CN110487801A - Identify method, apparatus, equipment and the storage medium of graphite plate high-temperature baking result - Google Patents
Identify method, apparatus, equipment and the storage medium of graphite plate high-temperature baking result Download PDFInfo
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- CN110487801A CN110487801A CN201910692172.2A CN201910692172A CN110487801A CN 110487801 A CN110487801 A CN 110487801A CN 201910692172 A CN201910692172 A CN 201910692172A CN 110487801 A CN110487801 A CN 110487801A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
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Abstract
The present invention provides a kind of method, apparatus, equipment and storage medium for identifying graphite plate high-temperature baking result.The described method includes: obtaining the image of graphite plate to be measured by the image acquisition units fixed with graphite plate relative position to be measured；The area to be tested for obtaining the graphite plate on image, detects the gray value of area to be tested, to determine whether the region of white disk.Described device includes: image acquisition units, area to be tested acquiring unit and detection unit.The equipment and storage medium are for realizing the method.It is that this method is capable of automatic identification graphite plate high-temperature baking as a result, high-efficient, it is high to the precision of result identification, provide guarantee to produce the epitaxial wafer of high quality.And this method is rapidly and efficiently；Standard data can also be provided and pass to MES production system simultaneously, be convenient for subsequent review.
Description
Technical field
The present invention relates to MOCVD production field more particularly to a kind of methods for identifying graphite plate high-temperature baking result, dress
It sets, equipment and storage medium.
Background technique
Graphite plate is MOCVD (Metal-organic Chemical Vapor Deposition, metallo-organic compound
Chemical gaseous phase deposition) essential device in production process, the every metallo-organic compound for having grown a batch of graphite plate
It requires to toast in oven high temperature, the source MO remaining in growth course and some other impurity is baked, toasted clean
Graphite plate could be used for the growth of next batch.Graphite plate such as non-high temperature is dried only, will lead to film source after growing into MOCVD
Abnormal quality, and graphite plate does not dry the accumulation of the source net part MO, can be rendered as white, this kind of situation need to notify technique people in time
Member.The graphite plate that whether existing detection graphite plate high-temperature baking, which is all completely operator, is completed growth is taken pictures, and
Topic is cross-examined whether there is or not white by carrying out interpretation confirmation to photo by professional training personnel.However this method has the following deficiencies:
1, because the white disk of most of graphite plate is that micro- white disk even across professional training personnel also often will appear and fail to judge
Situation；
2, personnel are difficult to clearly define its white disc area size, can not be quantified in the white disk of judgement graphite plate；
3, manually determine Bai Panhou, only recordable whether there is or not can not pass to its accurate location information corresponding technologist；
4, existing operating personnel is checking for Bai Panhou, is only capable of doing simple information record, and can not be by information standard
Change is transferred to production system, is also just difficult to adjust the corresponding interpretation foundation of offer to technology.
As seen in figure la and lb, usually there is the case where micro- white disk area A, only amplify on graphite plate 10 in the prior art
The lower whiting area 11 for seeing micro- white disk area A that could be clear and accurate.If however the whiting region in micro- white disk is made by scene
Industry personnel manually check, it is easy to can be fallen by careless omission, this will lead to technologist when product goes wrong, it has to again
It transfers graphite plate picture to reaffirm, at this point, the product loss of next batch may be had resulted in.
Summary of the invention
In view of the foregoing deficiencies of prior art, the purpose of the present invention is at least that provide a kind of identification graphite plate high temperature
Toast method, apparatus, equipment and the storage medium of result；Be capable of automatic identification graphite plate high-temperature baking as a result, high-efficient, right
As a result the precision identified is high, provides guarantee to produce the epitaxial wafer of high quality.
In order to achieve the above objects and other related objects, an embodiment of the invention provides a kind of automatic identification graphite
The method of disk high-temperature baking result, comprising steps of
The image of graphite plate to be measured is obtained by the image acquisition units fixed with graphite plate relative position to be measured；
The area to be tested for obtaining the graphite plate on image, detects the gray value of area to be tested, is with determination
The no region for having white disk.
Optionally, the area to be tested includes the non-slot position region on the graphite plate to be measured.
Optionally, the slot position region on the graphite plate to be measured is shielded in the graphite plate to be measured by shielding templates
Area to be tested is obtained in image.
Optionally, described to shield the slot position region on graphite plate in the image of the graphite plate to be measured by shielding templates
The step of middle acquisition area to be tested includes:
The image of the graphite plate and the shielding templates are compared, the slot on the intermediate image is masked
Position region, obtains the area to be tested.
Optionally, further comprising the steps of before the slot position region on shielding templates shielding graphite plate:
Test the gray value in slot position region all on graphite plate to be measured, and by the gray value in all slot position regions
Average gray value as benchmark gray value；
It is that foundation detects the area to be tested to obtain the gray value of detection zone with the benchmark gray value,
Region to determine whether white disk is compared with the benchmark gray value for the gray value that will test region.
Optionally, before the gray value in slot position region all on testing the graphite plate to be measured the step of further include:
Gray processing processing is carried out to the image of the graphite plate to be measured, obtains the gray level image of the graphite plate to be measured；
Edge detection is carried out to the gray level image of the graphite plate to be measured, obtains intermediate image.
Optionally, it is described to the area to be tested carry out detection include:
Obtain the gray value dynamic threshold of the graphite plate to be measured；
Using the gray value dynamic threshold of the graphite plate to be measured as foundation, the gray scale of the area to be tested is detected
Value, and the gray value of the area to be tested is compared with the gray value threshold value of the graphite plate to be measured, with
Determine whether the region of white disk.
Optionally, in the gray value dynamic threshold using the graphite plate to be measured as foundation, the area to be detected is detected
The gray value in domain, and by the gray value dynamic threshold of the gray value of the area to be tested and the graphite plate to be measured
It is compared, before the region step to determine whether white disk further include:
Subarea detecting is carried out to the area to be tested, to determine whether there is white disk area and the white disk area
Position.
Optionally, the step of gray value dynamic threshold of the acquisition graphite plate to be measured includes:
The benchmark gray value is floated up and down into predetermined value or predetermined percentage obtains described in the graphite plate to be measured
Gray value dynamic threshold.
Optionally, the region for determining whether white disk the step of after include:
Output test result.
Optionally, the step of output test result includes:
Export graphite plate to be measured graphite reel number, whether white disk, position locating for white disc area and white disk.
To realize that above-mentioned and other purposes, an embodiment of the invention provide a kind of automatic identification graphite plate high temperature baking
The device of roasting result, comprising:
Image acquisition units, described image acquisition unit and the relative position of graphite plate to be measured are fixed, described image acquisition
Unit is configured to obtain the image of graphite plate to be measured；
Area to be tested acquiring unit is configured to the slot position region on shielding templates shielding graphite plate described
Area to be tested is obtained in the image of graphite plate to be measured；
Detection unit is configured to using the average gray value in slot position region all on graphite plate to be measured as benchmark gray scale
Value, and with the benchmark gray value be according to the area to be tested is detected region to determine whether white disk and
The position of the white disk area.
Optionally, described is by the device of graphite plate high-temperature baking result automatically further include:
Output unit is configured to output test result.
In order to achieve the above objects and other related objects, an embodiment of the invention provides a kind of equipment, described to set
It is standby to include:
Processor；
Memory, for storing one or more programs,
When one or more of programs are executed by the processor, so that the processor executes implementation of the invention
Method described in example.
In order to achieve the above objects and other related objects, an embodiment of the invention provides one kind and is stored with computer
The computer readable storage medium of program realizes method described in the embodiment of the present invention when program is executed by processor.
The above-mentioned technical proposal that embodiment of the present invention provides, can directly be inquired white with the white disk area of precise quantification
Position where disk, due to can intuitively obtain accurate white disk data, so help can be provided for technologic improvement, with
Adverse effect caused by white disk is reduced, subsequent appearance similar the problem of damaging product quality is prevented.
It can also be realized using the technical solution that embodiment of the present invention provides: no longer need to carry out profession to operating personnel
The training of white disk identification, reduces training cost；Need to only taking pictures to graphite plate, it is all to be completed using technical solution of the present invention
Check analysis work, rapidly and efficiently；Standard data can also be provided and pass to MES production system simultaneously, be convenient for subsequent review.
Detailed description of the invention
Fig. 1 a and 1b are shown as micro- white disk described in the prior art and form the schematic diagram in the whiting area of micro- white disk.
Fig. 2 is shown as identifying the flow chart of the method for graphite plate high-temperature baking result described in the embodiment of the present invention one.
Fig. 3 is shown as the schematic diagram of the image of the graphite plate to be measured obtained in method shown in Fig. 2.
Fig. 4 is shown as the schematic diagram after the image gray processing to graphite plate to be measured shown in Fig. 3.
Fig. 5 obtains the schematic diagram of area to be tested after being shown as two pocket regions shields shown in Fig. 4.
Fig. 6 is shown as carrying out area to be tested shown in fig. 5 into the schematic diagram of subregion.
Specific embodiment
Embodiments of the present invention are illustrated by particular specific embodiment below, those skilled in the art can be by this explanation
Content disclosed by book is understood other advantages and efficacy of the present invention easily.
Fig. 1 a and 1b show the schematic diagram of micro- white disk.The upper left corner pocket regional edge of micro- white disk shown in the figure
Edge has whiting area 11 to exist, which is easy to by operating personnel's missing inspection, thereby results in that subsequent product is unqualified or damage
It is bad.
Embodiment one
As shown in Fig. 2, this method includes step the present embodiment provides a kind of method for identifying graphite plate high-temperature baking result
It is rapid:
S1 obtains the image of graphite plate to be measured by the image acquisition units fixed with graphite plate relative position to be measured；
The image that graphite plate to be measured is obtained by the camera or other image collecting devices that are mounted on fixed position, is being obtained
Before the image for taking graphite plate to be measured, the unified screening-mode and acquisition parameters for setting camera or other image collecting devices,
The relative position of fixed graphite plate and camera or other image collecting devices simultaneously, such as fixed camera or other images are adopted
Acquisition means are with respect to the height of graphite plate and the angle taken pictures etc..Captured all images are in identical screening-mode and ginseng
Several lower acquisitions, and graphite plate uses unified shooting background, such as white background, is facilitated at the later period using unified shooting background
Manage image.Such as graphite plate to be measured obtained in the present embodiment image as shown in figure 3, obtained graphite plate to be measured image
It include the region pocket 101 on graphite plate 100 and graphite plate to be measured 100 to be measured.
S2 obtains the area to be tested of the graphite plate on image, detects to the gray value of area to be tested, with determination
Whether the region of white disk is had.
In the preferred embodiment of the present embodiment, the area to be tested includes the non-slot position region on graphite plate.Such as
It can be by shielding the slot position region (region pocket) on the graphite plate to be measured with barricade in the graphite plate to be measured
Area to be tested is obtained in image, i.e., the described area to be tested is the non-slot position region on graphite plate to be measured.
Before shielding the slot position region (region pocket) on the graphite plate to be measured with barricade, graphite to be measured is tested
The gray value in all slot position regions on disk, and by the gray value in all slot position regions (region pocket) of graphite plate to be measured
Average gray value is that foundation detects to obtain the area to be tested as benchmark gray value, and with the benchmark gray value
The gray value of detection zone is obtained, the gray value that will test region is compared with the benchmark gray value to determine whether white disk
Region.
The average gray value in all slot position regions (region pocket) of graphite plate to be measured passes through the image of graphite plate to be measured
Or the average value of the gray scale in the region pocket in intermediate image obtains.
In a preferred embodiment of the present embodiment, the gray scale in all slot position regions on testing the graphite plate to be measured
Before value further include:
Gray processing processing is carried out to the image of the graphite plate to be measured, obtains the gray level image of the graphite plate to be measured；
Edge detection is carried out to the gray level image of the graphite plate to be measured, confirms that graphite plate image obtained is
No completely whether there is or not offsets, obtain intermediate image, the intermediate image is complete graphite plate image to be detected.
The image of the only graphite plate ontology got is not ensured that during due to obtaining graphite plate image to be measured
(perhaps contain the image information (such as background image information) except graphite plate ontology in the image got, and the part
Image information is not image information required for us, it is therefore desirable to be removed), the purpose of edge detection is exactly to remove stone to be measured
Except the image-region of the outer portion of graphite plate in the image of disc.
As shown in figure 4, carrying out gray processing processing to image, provides convenience operational hypothesis for subsequent step, carry out simultaneously
Edge detection can effectively ensure that the accuracy for obtaining area to be tested, provide guarantor accurately to obtain final output
Barrier.
After edge detection, gray value detection is carried out to the slot position of the graphite plate in intermediate image and obtains benchmark gray scale
Value, the average value of gray scale described herein are the average value of gray value, also referred to as average gray value.And according to benchmark ash
Angle value determines that the dynamic threshold of graphite plate area to be tested, dynamic threshold float solid above and below i.e. on graphite plate benchmark gray value
Fixed or predetermined value or fixation or predetermined percentage generate a threshold value；Predetermined value, fixed numbers, predetermined percentage and solid
Determining percentage can be set according to the different type of graphite plate by technologist.By setting dynamic threshold, entire side is improved
The applicable elasticity of method.
After carrying out edge detection to the image of gray processing treated graphite plate to be measured, as shown in figure 5, using shielding templates
The slot position region (region pocket) 101 on the intermediate image is masked, area to be tested 103 is obtained.
Shielding templates are corresponding with slot position region (region pocket) on graphite plate, and the slot position is set on the graphite
Circular groove on disk, for holding epitaxial wafer, the region pocket do not need detected, are masked by shielding templates
Slot position region (region pocket) in intermediate image, obtains area to be tested.Due to being according to to be checked with benchmark gray value
It surveys region to be detected, the result detected can quantify on gray value, can precisely obtain graphite plate high-temperature baking
Result and white disk position and white disk area.
In the another preferred embodiment of the present embodiment, the step of detecting to the area to be tested, includes:
Obtain the dynamic threshold of the gray value of graphite plate to be measured；
Using the dynamic threshold as foundation, the white disk position in area to be tested is detected.Specific detection process are as follows: ratio
To the gray value in dynamic threshold and area to be tested, when the gray value in certain region in area to be tested is greater than dynamic threshold,
Just determine that the region is white panel.
Since the specifications and models of each graphite plate in specifically producing are not quite similar, dynamic threshold is set for different graphite plates
Value determines whether there is white disk area, so as to adapt to elasticity in the process of implementation stronger for entire method.
In more preferred embodiment, it is detected using the dynamic threshold as foundation in detection zone described
Before the step of white panel further include:
Subregion is carried out to the area to be tested；As shown in fig. 6, by the region 103 to be measured be divided into A, B, C, D, E, F,
G, the positions such as H, I.According to above-mentioned subregion, the region for white disk occur can be accurately locked, such as shown in Fig. 6, through detecting the region E
There is white disk.
To area to be tested carry out subregion, area to be tested is divided into different positions, convenient for output test result when
Time directly gives position, in order to which technologist can be quickly found out position locating for white disk position.
According to an embodiment of the invention, the method can also include: output test result upon step s 2.In the step
In, the testing result of area to be tested is exported, technologist can intuitively obtain accurate white disk data, this can be work
Improvement in skill provides help, to reduce adverse effect caused by white disk, prevents the similar damage product quality of subsequent appearance
Problem.
In a preferred embodiment, the step of output test result includes:
Export the lot number of graphite plate to be measured, graphite reel number, whether white disk, position locating for white disc area and white disk.
Output test result includes above content, can allow technologist is flat-footed to obtain white disk data, Neng Gouzhi
Position where connecing the white disk of inquiry.This exports result and is capable of providing the relevant informations such as accurate white disc area, region to technologist,
In order to which it does industrial analysis.
The above-mentioned technical proposal that embodiment provides through the invention, can directly be looked into the white disk area of precise quantification
Position where asking white disk, due to can intuitively obtain accurate white disk data, so side can be provided for technologic improvement
It helps, to reduce adverse effect caused by white disk, prevents subsequent appearance similar the problem of damaging product quality.Using of the invention real
The technical solution that the mode of applying provides can also be realized: no longer needing to carry out operating personnel the training of the white disk identification of profession, reduce
Training cost；It need to only take pictures to graphite plate and complete all check analysis work using technical solution of the present invention, it is quickly high
Effect.
In the another preferred embodiment of the present embodiment, the step of the output test result further include: output result system
Table is counted, such as the following table 1 shows the content composition of result statistical form in the preferred embodiment.Wherein the content of the first row is shown
The testing result of graphite plate shown in fig. 6.Include in the result statistical form lot number for exporting graphite plate to be measured, graphite reel number,
Whether white disk, white disc area and white panel position.
Table 1 exports result statistics
| The lot number of graphite plate | Graphite reel number | Whether white disk is had | White disc area percentage in region to be measured | Position where white disk |
| XXX | 1111 | It is | 20% | E |
| XXX | ||||
| XXX | ||||
| XXX |
Result is exported in the form of statistical form, checks result convenient for staff.
It in one embodiment, further include transmitting the output test result after the output test result step
Give MES (Manufacturing Execution System, manufacturing execution system) production system.The testing result passes through system
Formula data show that the standard data refer to the data of fixed format, and the format of data can be set via staff
It is fixed to obtain.This step is capable of providing standard data and passes to MES production system, is convenient for subsequent review.
Embodiment two
The present embodiment provides a kind of devices of automatic identification graphite plate high-temperature baking result, comprising:
Image acquisition units, described image acquisition unit and the relative position of graphite plate to be measured are fixed, described image acquisition
Unit is configured to obtain the image of graphite plate to be measured；
Area to be tested acquiring unit, the slot position region (Pocket being configured on shielding templates shielding graphite plate
Region) to obtain area to be tested in the image of the graphite plate to be measured；
Detection unit is configured to make the average gray value in all slot position regions (region pocket) of graphite plate to be measured
It for benchmark gray value, and is according to being detected to the area to be tested to determine whether white disk with the benchmark gray value
Region and the white disk area position.
The image that graphite plate to be measured is obtained by the camera or other image collecting devices that are mounted on fixed position, is being obtained
Before the image for taking graphite plate to be measured, the unified screening-mode and acquisition parameters for setting camera or image collecting device, simultaneously
The relative position of fixed graphite plate and camera or other image collecting devices, such as fixed camera or other image collectors
Set the height of opposite graphite plate and the angle taken pictures etc..Captured all images are under identical screening-mode and parameter
It obtains, and graphite plate uses unified shooting background, such as white background, facilitates post-processing figure using unified shooting background
Picture.
The part for not needing detection is masked using shielding templates, is only retained effective area to be tested and is detected, energy
Enough effectively improve detection efficiency.For example, by the pocket regions shield of graphite plate, being protected in the preferred embodiment of the present embodiment
Stay the detection zone other than the region pocket.
Due to being with benchmark gray value for according to detecting to area to be tested, the result detected is on gray value
It can quantify, can accurately obtain the result of graphite plate high-temperature baking and the position of white disk and white disk area.
In one embodiment, described device further include:
Output unit is configured to output test result, for example, export graphite plate to be measured graphite reel number, whether white disk,
Position locating for white disc area and white disk.The testing result of area to be tested is exported, technologist can be so can be intuitive
The accurate white disk data of acquisition, this can provide help for technologic improvement, to reduce adverse effect caused by white disk,
Prevent subsequent appearance similar the problem of damaging product quality.
Embodiment three
The present embodiment provides a kind of equipment, the equipment includes:
One or more processors；
Memory, for storing one or more programs,
When one or more of programs are executed by one or more of processors, so that one or more of places
It manages device and executes the method.
Due to being with benchmark gray value for according to detecting to area to be tested, the result detected is on gray value
It can quantify, can accurately obtain the result of graphite plate high-temperature baking and the position of white disk and white disk area.This can be
Technologic improvement provides help, to reduce adverse effect caused by white disk, prevents the similar damage product quality of subsequent appearance
The problem of.
Example IV
The present embodiment provides a kind of computer readable storage medium for being stored with computer program, which is held by processor
The method is realized when row.
Since the method is that foundation detects area to be tested with benchmark gray value, the result detected is in gray scale
It can quantify in value, can accurately obtain the result of graphite plate high-temperature baking and the position of white disk and white disk area.This
Help can be provided for technologic improvement, to reduce adverse effect caused by white disk, prevent the similar damage of subsequent appearance and produce
The problem of product quality.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should be covered by the claims of the present invention.
Claims (15)
1. a kind of method of automatic identification graphite plate high-temperature baking result, which is characterized in that comprising steps of
The image of graphite plate to be measured is obtained by the image acquisition units fixed with graphite plate relative position to be measured；
The area to be tested for obtaining the graphite plate on image, detects the gray value of area to be tested, to determine whether
The region of white disk.
2. the method for automatic identification graphite plate high-temperature baking result according to claim 1, which is characterized in that
The area to be tested includes the non-slot position region on the graphite plate to be measured.
3. the method for automatic identification graphite plate high-temperature baking result according to claim 2, which is characterized in that
The slot position region on the graphite plate to be measured is shielded by shielding templates to obtain in the image of the graphite plate to be measured
Area to be tested.
4. the method for automatic identification graphite plate high-temperature baking result according to claim 3, which is characterized in that described to pass through
Shielding templates shield the step of slot position region on graphite plate in the image of the graphite plate to be measured to obtain area to be tested
Include:
The image of the graphite plate and the shielding templates are compared, the slot position area on the intermediate image is masked
Domain obtains the area to be tested.
5. the method for automatic identification graphite plate high-temperature baking result according to claim 4, which is characterized in that passing through screen
It is further comprising the steps of before covering the slot position region on template shielding graphite plate:
Test the gray value in slot position region all on graphite plate to be measured, and putting down the gray value in all slot position regions
Equal gray value is as benchmark gray value；
It is that will be examined according to being detected to the area to be tested to obtain the gray value of detection zone with the benchmark gray value
The region to determine whether white disk is compared with the benchmark gray value for the gray value for surveying region.
6. the method for automatic identification graphite plate high-temperature baking result according to claim 5, which is characterized in that in test institute
Before the step of stating the gray value in slot position region all on graphite plate to be measured further include:
Gray processing processing is carried out to the image of the graphite plate to be measured, obtains the gray level image of the graphite plate to be measured；
Edge detection is carried out to the gray level image of the graphite plate to be measured, obtains intermediate image.
7. the method for automatic identification graphite plate high-temperature baking result according to claim 1, which is characterized in that described to institute
It states area to be tested and detect and include:
Obtain the gray value dynamic threshold of the graphite plate to be measured；
Using the gray value dynamic threshold of the graphite plate to be measured as foundation, the gray value of the area to be tested is detected, and
The gray value of the area to be tested is compared with the gray value threshold value of the graphite plate to be measured, is with determination
The no region for having white disk.
8. the method for automatic identification graphite plate high-temperature baking result according to claim 7, which is characterized in that with described
The gray value dynamic threshold of graphite plate to be measured is foundation, detects the gray value of the area to be tested, and will be described to be checked
The gray value for surveying region is compared with the gray value dynamic threshold of the graphite plate to be measured, white to determine whether
Before the region step of disk further include:
Subarea detecting is carried out to the area to be tested, to determine whether there is the position of white disk area and the white disk area
It sets.
9. the method for automatic identification graphite plate high-temperature baking result according to claim 7, which is characterized in that described in acquisition
The step of gray value dynamic threshold of graphite plate to be measured includes:
The benchmark gray value is floated up and down into predetermined value or predetermined percentage obtains the gray scale of the graphite plate to be measured
It is worth dynamic threshold.
10. the method for automatic identification graphite plate high-temperature baking result according to claim 1, which is characterized in that described
Include: after the step of determining whether the region of white disk
Output test result.
11. the method for automatic identification graphite plate high-temperature baking result according to claim 10, which is characterized in that described defeated
The step of testing result includes: out
Export graphite plate to be measured graphite reel number, whether white disk, position locating for white disc area and white disk.
12. a kind of device of automatic identification graphite plate high-temperature baking result characterized by comprising
Image acquisition units, described image acquisition unit and the relative position of graphite plate to be measured are fixed, described image acquisition unit
It is configured to obtain the image of graphite plate to be measured；
Area to be tested acquiring unit is configured to the slot position region on shielding templates shielding graphite plate described to be measured
Area to be tested is obtained in the image of graphite plate；
Detection unit is configured to using the average gray value in slot position region all on graphite plate to be measured as benchmark gray value,
And with the benchmark gray value for according to region and the institute detected to the area to be tested to determine whether white disk
State the position of white disk area.
13. the device of automatic identification graphite plate high-temperature baking result according to claim 12, which is characterized in that also wrap
It includes:
Output unit is configured to output test result.
14. a kind of equipment, which is characterized in that the equipment includes:
Processor；
Memory, for storing one or more programs,
When one or more of programs are executed by the processor, so that the processor is executed as in claim 1-11
Described in any item methods.
15. a kind of computer readable storage medium for being stored with computer program, which is characterized in that the program is executed by processor
Shi Shixian method for example of any of claims 1-11.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910692172.2A CN110487801B (en) | 2019-07-30 | 2019-07-30 | Method, device and equipment for identifying high-temperature baking result of graphite plate and storage medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910692172.2A CN110487801B (en) | 2019-07-30 | 2019-07-30 | Method, device and equipment for identifying high-temperature baking result of graphite plate and storage medium |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110487801A true CN110487801A (en) | 2019-11-22 |
| CN110487801B CN110487801B (en) | 2022-07-19 |
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