CN110487775A - A kind of portable spectral analysis device based on plasma - Google Patents
A kind of portable spectral analysis device based on plasma Download PDFInfo
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- CN110487775A CN110487775A CN201910674260.XA CN201910674260A CN110487775A CN 110487775 A CN110487775 A CN 110487775A CN 201910674260 A CN201910674260 A CN 201910674260A CN 110487775 A CN110487775 A CN 110487775A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
Abstract
A kind of portable spectral analysis device based on plasma, belongs to spectrum analysis field.The portable spectral analysis device based on plasma includes microwave source system 1, microwave transmission system 2, Microwave Plasma Torch Source system 3, plasma source capture systems 4, spectral detection system 5, sampling system 6.The present invention in the inner conductor of Microwave Plasma Torch Source system by punching, optical fiber is directed into the open end of system, direct short distance plasma light source is captured, and it is transmitted to spectral detection system, spectral detection probe has been integrated into Microwave Plasma Torch Source system using optical fiber, equipment volume is greatly reduced, and realizes portability.
Description
Technical field
The invention belongs to spectrum analysis fields, and in particular to one kind generates the portable spectrum of low temperature plasma based on microwave
Analytical equipment and method.
Background technique
Different atoms or molecule can issue different radiation when being excited, and the spectrum of itself and standard is compared
Compared with, so that it may identify which kind of element contained in substance.Also constituent content can be determined by the size of characteristic spectral line intensity simultaneously
Number.Analyze atom spectrum frequently with inductively coupled plasma body (ICP) atomic emission spectrometry at present, it be using with
The electromagnetic field of time change carrys out source excitation plasma to generate electric current as energy, and what is generally produced is high-temperature plasma.
A variety of instruments have been derived around this kind of technology, have become one of the common instrument of scientific research and technical application, but have also been deposited
The disadvantages of expensive, equipment instrument is big, inconvenient.
Charged particle is accelerated using microwave, between the particle after acceleration, or generates and is collided so that atom with other particles
Obtaining energy causes to excite or ionize, so that it may generate low temperature plasma.It can be generally easy to by microwave resonance cavity
Realization, the cost of plasma torch light source can be reduced to a certain extent, compared to inductively-coupled plasma spectrometer
Lower production costs are having a degree of advantage in price.In the application for a patent for invention of Publication No. CN105136749A
Propose a kind of " microwave plasma torch atomic emission spectrometer ", including high power microwave plasma torch light-source system, gas
HIGH-POWERED MICROWAVES can be coupled by path control system, sampling system, spectral detection system etc., the spectrometer, excite plasma
Ability of immigrants is stronger, so that saving heating removes dissolving device, greatly simplifies instrument sampling system.However, the light that this application proposes
Spectrometer is to build that corresponding platform is relatively cumbersome, and spectrometer also seems very stupid from capture-outside light source by spectral detection system
Weight.Simultaneously because, in order to reduce the influence of environment plasma light source, needing to generate enough light from capture-outside light source
On the one hand source needs the high-power ability to improve excitation plasma, this application spectrometer works between 0-1500W, and
Export that stable microwave source power is higher, and cost is also just higher；On the other hand, the concentration of sample to be tested, humidity etc. are wanted
It asks higher, a series of cumbersome parts such as hothouse, spray chamber is needed to handle sample to be tested, it is numerous so as to cause operating
Trivial, equipment instrument is big, does not have portability.
Summary of the invention
The present invention provides aiming at the problem that being previously mentioned in background technique and a kind of generates low temperature plasma based on microwave
Portable spectral analysis device.
Main innovation point of the invention is:, will by punching in the inner conductor of Microwave Plasma Torch Source system
Optical fiber is directed into the open end of system, and direct short distance plasma light source is captured, and is transmitted to spectral detection system,
Spectral detection probe is integrated into Microwave Plasma Torch Source system using optical fiber, equipment volume is greatly reduced, and realizes
Portability.
Technical scheme is as follows:
A kind of portable spectral analysis device based on plasma proposed by the invention, including it is microwave source system 1, micro-
Wave Transmission system 2, Microwave Plasma Torch Source system 3, plasma source capture systems 4, spectral detection system 5, sample introduction
System 6；Wherein, the Microwave Plasma Torch Source system is the two-tube coaxial configuration of one end open, to excite sample；Institute
Sampling system is stated for the calibrating gas for carrying sample to be tested information to be transported in Microwave Plasma Torch Source system；It is described
Microwave source system generates microwave stable, that power is continuously adjustable；The microwave transmission system is micro- for generating microwave source
Wave is coupled in Microwave Plasma Torch Source system；The plasma source capture systems are for capturing microwave plasma
Plasma source caused by torch light-source system；The spectral detection system is captured for plasma light source capture systems
Spectroscopic data be detected and analyzed；
The Microwave Plasma Torch Source system includes inner conductor, outer conductor, coaxial coupling interface inner conductor, coaxial coupling
Splice grafting mouth outer conductor and reflecting mechanism, the inner conductor and outer conductor be coaxial configuration, the reflecting mechanism be located at inner conductor with
The bottom of outer conductor is separately connected reflecting mechanism as microwave reflection end, the coupling interface inner conductor and coupling interface outer conductor
And outer conductor, it is used for microwave coupling between inner conductor and outer conductor.
Further, the outer conductor include hollow cylinder and the internal diameter on hollow cylinder be gradually reduced it is hollow
Centrum, the hollow cylinder bottom are connect with reflecting mechanism, are the Microwave Plasma Torch Source system at the top of hollow centrum
Open end.
Further, the inner conductor is hollow cylinder, and plasma source capture systems are inserted into the hollow cylinder, is used
Spectral detection system is transmitted in the plasma source for generating Microwave Plasma Torch Source open system end.
It preferably, is hierarchic structure with the coaxial inner conductor of the hollow cylindrical part of outer conductor, to enhance microwave energy
Aggregation in open end.
Further, tuning screw can also be set on the reflecting mechanism, for adjusting inner conductor, outer conductor and reflection
The height for the cavity that mechanism is formed, to reach preferable resonance effect.
Further, it when sample to be tested is gas, after sampling system mixes calibrating gas under test gas, is transported to
Between the inner conductor and outer conductor of Microwave Plasma Torch Source system；When sample to be tested is liquid, calibrating gas passes through liquid
After body sample, between the inner conductor and outer conductor of Microwave Plasma Torch Source system.
As shown in Fig. 2, sampling system includes calibrating gas bottle 7, flowmeter 8, mixing chamber 9 when sample to be tested is gas
With under test gas bottle 10, the flow of air valve and flowmeter control calibrating gas and under test gas, calibrating gas and under test gas into
After entering mixing chamber mixing, it is delivered to Microwave Plasma Torch Source system.
As shown in figure 3, sampling system includes calibrating gas bottle 7, flowmeter 8 and liquid-like when sample to be tested is liquid
Product room 11, the flow of air valve and flowmeter control calibrating gas, calibrating gas are passed through in fluid sample, carrying of liquids sample message
Enter microwave plasma torch light-source system afterwards.
Further, the microwave transmission system include coaxial transmission line, first wave guide coaxial converter, rectangular waveguide and
Second waveguide coaxial converter；Coaxial transmission line one end is connected with microwave source, the other end by first wave guide coaxial converter with
Rectangular waveguide connection, the rectangular waveguide other end pass through the coaxial coupling of second waveguide coaxial converter and plasma torch light-source system
Splice grafting mouth (coaxial coupling interface outer conductor with coaxial coupling interface inner conductor) is connected.
Further, the microwave source system is the adjustable solid state microwave sources system of continuous wave power, passes through N-type or SMA
Coaxial interface is connected with microwave transmission system.
Further, the plasma source capture systems are optical fiber, are inserted into inner conductor hollow cylinder, for capturing
The plasma source that Microwave Plasma Torch Source open system end generates, and transmit it to spectral detection system.
Further, the spectral detection system includes fiber spectrometer and computer, plasma source capture systems
The plasma source of capture is transmitted to fiber spectrometer, the standard for carrying sample to be tested is obtained after fiber spectrometer is analyzed
After the spectral line for removing calibrating gas, the information of sample to be tested is can be obtained in the spectral line of gas.
Compared with prior art, the invention has the benefit that
1, spectral detection probe has been integrated into Microwave Plasma Torch Source system by the present invention using optical fiber, is effectively dropped
The low influence of environment light plasma light source, may be implemented to capture fainter plasma source, therefore drop
The concentration requirement of the power and sample to be tested of low microwave source, the power of microwave source are reduced to 0~200W, reduce cost,
And inner conductor temperature is lower, it is ensured that the normal work of fibre-optical probe.
2, Microwave Plasma Torch Source system provided by the invention, reduces and wants to the concentration of sample to be tested and humidity etc.
It asks, for certain organic liquids, directly calibrating gas, which is passed through after sample to be tested, can be obtained apparent spectrum, without atomization
Room, hothouse etc., greatly simplifie the sampling system of equipment, further improve the convenience of the system, be microwave etc. from
The miniaturization and industrialization of daughter spectroanalysis instrument provide possibility.
3, a kind of portable spectral analysis device based on plasma provided by the invention, using optical fiber Direct Acquisition light
Source can save the spectral detection systems such as most convex lens, slit, collimating mirror, prism, so that the volume of whole system
It is greatly reduced, easy to operate, portability is higher.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the portable spectral analysis device based on plasma provided by the invention；Its
In, 1 is microwave source system, and 2 be microwave transmission system, and 3 be Microwave Plasma Torch Source system, and 4 catch for plasma source
System is obtained, 5 be spectral detection system, and 6 be sampling system；
Fig. 2 is in a kind of portable spectral analysis device based on plasma provided by the invention, and sample to be tested is gas
The structural schematic diagram of sampling system when body；Wherein, 7 be calibrating gas bottle, and 8 be flowmeter, and 9 be mixing chamber, and 10 be gas to be measured
Body bottle；
Fig. 3 is in a kind of portable spectral analysis device based on plasma provided by the invention, and sample to be tested is liquid
The structural schematic diagram of sampling system when body；Wherein, 7 be calibrating gas bottle, and 8 be flowmeter, and 11 be fluid sample room；
Fig. 4 is in a kind of portable spectral analysis device based on plasma provided by the invention, microwave source system and
The structural schematic diagram of microwave transmission system；Wherein, 1 is microwave source system, and 2 be microwave transmission system；
Fig. 5 is microwave plasma in a kind of portable spectral analysis device based on plasma provided by the invention
The three-view diagram of torch light-source system and plasma source capture systems；Wherein, (a) is cross-sectional view, (b) is top view, is (c) left side
View, 12 be optical fiber, and 13 be inner conductor, and 14 be outer conductor, and 15 be coaxial coupling interface inner conductor, and 16 is outside coaxial coupling interfaces
Conductor, 17 be reflecting mechanism, and 18 be air inlet；
Fig. 6 is plasma source in a kind of portable spectral analysis device based on plasma provided by the invention
The structural schematic diagram of capture systems and spectral detection system；Wherein, 12 be optical fiber, and 13 be inner conductor, and 19 be fiber spectrometer, 20
For computer；
Fig. 7 is sample spectrum diagram measured in the embodiment of the present invention.
Specific embodiment
It is With reference to embodiment and attached drawing, right to keep the purpose of the present invention, technical solution and advantage clearer
The present invention is described in further detail.
Many details of the invention are elaborated in being described below from every side, but the present invention can be to be different from following explain
Many other modes for stating realize that the worker in related fields can do appropriate push away on the basis of based on the present invention
Extensively, so the present invention is not limited by specific embodiments described below.
As shown in Figure 1, being that a kind of structure of the portable spectral analysis device based on plasma provided by the invention is shown
It is intended to, including microwave source system 1, microwave transmission system 2, Microwave Plasma Torch Source system 3, plasma source capture system
System 4, spectral detection system 5 and sampling system 6.
In one embodiment, microwave source system used in the present invention is work in 200W solid state microwave sources below,
It can continue to export stable microwave, excite sample to form plasma under low-power, while guaranteeing microwave plasma torch
The stability that light-source system 3 works.
In device of the present invention, microwave source system 1 couples microwave etc. for microwave energy by microwave transmission system 2
In gas ions torch light-source system 3.Wherein, Microwave Plasma Torch Source system 3 is pair that an outer tube diameter is gradually reduced upwards
Pipe coaxial configuration, cavity length are about 1/4 microwave wavelength, can slightly adjustment length to match electric field frequency.Microwave energy coupling
To inside cavity, electromagnetic viscosimeter can occur between inner and outer pipes and form stationary field, and then excite sample in open end, generate etc.
Gas ions light source.Wherein, inner tube is hollow, is inserted into plasma source capture systems 4 (optical fiber) in inner tube, one end extends to
Open end, can directly plasma light source be acquired, the other end connect spectral detection system 5,5 pairs of institutes of spectral detection system
Collected light source carries out spectrum analysis.
As shown in Fig. 2, sampling system includes calibrating gas bottle 7, flowmeter 8, mixing chamber 9 when sample to be tested is gas
With under test gas bottle 10, calibrating gas bottle 7 is connected by tracheae with flowmeter 8, and centre passes through Air Valve Control gas flow；It is to be measured
Gas bottle 10 is connected to mixing chamber 9 by tracheae, equally uses Air Valve Control flow on tracheae.Calibrating gas and under test gas into
After entering mixing chamber mixing, it is delivered between the inner conductor and outer conductor of Microwave Plasma Torch Source system.
As shown in figure 3, sampling system includes calibrating gas bottle 7, flowmeter 8 and liquid-like when sample to be tested is liquid
Product room 11, the flow of air valve and flowmeter control calibrating gas, calibrating gas are passed through in fluid sample, carrying of liquids sample message
Enter microwave plasma torch light-source system afterwards.
As shown in figure 4, microwave source system 1 generates stable microwave output, passed by N-type or SMA coaxial interface and microwave
Defeated system is connected.Microwave transmission system includes that coaxial transmission line, first wave guide coaxial converter, rectangular waveguide and second waveguide are same
Axis converter；Coaxial transmission line one end is connected with microwave source, and the other end is connected by first wave guide coaxial converter and rectangular waveguide
It connects, the rectangular waveguide other end is (same by second waveguide coaxial converter and the coaxial coupling interface of plasma torch light-source system
Axis coupling interface outer conductor and coaxial coupling interface inner conductor) it is connected.
As shown in figure 5, Microwave Plasma Torch Source system 3 is including in inner conductor 13, outer conductor 14, coaxial coupling interface
Conductor 15, coaxial coupling interface outer conductor 16, reflecting mechanism 17 and air inlet 18；The inner conductor and outer conductor are coaxial knot
Structure, outer conductor include the hollow centrum that hollow cylinder and the internal diameter on hollow cylinder are gradually reduced, and inner conductor is hollow
Cylinder, bottom are step structure, to reinforce the polymerization of electric field；The reflecting mechanism is located at the bottom of inner conductor and outer conductor
As microwave reflection end；The coupling interface inner conductor is bent downwardly, and is directly contacted with reflecting mechanism, is led outside coaxial coupling interface
Body surface face band spiral, to realize the connection with microwave transmission system.After microwave energy is inputted by microwave transmission system, through coaxial
Coupling interface inner conductor and coaxial coupling interface outer conductor are coupled in plasma torch light-source system, inner conductor, outer conductor and
Reflecting mechanism collectively forms coaxial resonant cavity, vibrates electromagnetic wave between internal and external conductor；Carry the standard of sample to be tested information
Gas is entered between internal and external conductor by the air inlet of system bottom, is then transmit to open system end, in the work of microwave energy
It is excited under, forms plasma source.
Wherein, the height of the cavity formed by inner conductors, outer conductor and reflecting mechanism, or the frequency of input microwave source
Rate is adjusted, and the resonance effect of the adjustable system achieves preferable resonance.It can also be arranged on reflecting mechanism
Tuning screw, for adjusting the height for the cavity that inner conductor, outer conductor and reflecting mechanism are formed substantially close to the 1/4 of input microwave
Wavelength makes it realize preferable resonance within the scope of certain frequency.
Wherein, the outer conductor includes that hollow cylinder and the interior radial open end on hollow cylinder are gradually reduced
Hollow centrum；It is hierarchic structure with the coaxial inner conductor of the hollow cylindrical part of outer conductor, to enhance microwave energy in opening
The aggregation at end.
As shown in fig. 6, the plasma source capture systems are optical fiber 12, it is inserted into 13 hollow cylinder of inner conductor, uses
In the plasma source that capture Microwave Plasma Torch Source open system end generates, and it is transmitted to spectral detection system.Institute
Stating spectral detection system includes fiber spectrometer 19 and computer 20, and plasma source capture systems (optical fiber 12) are by capture
Plasma source is transmitted to fiber spectrometer, and the spectrum for carrying the calibrating gas of sample to be tested is obtained after fiber spectrometer is analyzed
Line after the spectral line for removing calibrating gas, can be analyzed to obtain the information of sample to be tested.
As shown in fig. 7, after being passed through sample formaldehyde, passing through light source capture systems in a specific embodiment of the invention
Plasma source is captured, after fiber spectrometer is analyzed, the spectral information and carrying formaldehyde of obtained argon gas calibrating gas
Argon gas spectral information；The spectral information of the argon gas and argon gas that carry formaldehyde is significantly different, can be obtained by spectrum analysis
The spectral line of formaldehyde shows that apparatus of the present invention can realize the detection of sample to be tested.
The above, several specific embodiments only of the invention, any feature disclosed in this specification, unless
Especially narration, can be replaced by other alternative features that are equivalent or have similar purpose；Any person in the art is equal
Variation and modification appropriate can be carried out in the scope of the present invention.
Claims (10)
1. a kind of portable spectral analysis device based on plasma, including microwave source system (1), microwave transmission system (2),
Microwave Plasma Torch Source system (3), plasma source capture systems (4), spectral detection system (5), sampling system
(6)；Wherein, the Microwave Plasma Torch Source system is the two-tube coaxial configuration of one end open, to excite sample；It is described
Sampling system is used to for the calibrating gas for carrying sample to be tested information being transported in Microwave Plasma Torch Source system；It is described micro-
Wave source system generates stable, the continuously adjustable microwave of power and is coupled to microwave plasma torch light by microwave transmission system
In the system of source；The plasma source capture systems are for capturing plasma caused by Microwave Plasma Torch Source system
Body light source；Spectroscopic data of the spectral detection system for the capture of plasma light source capture systems is detected and is divided
Analysis；
The Microwave Plasma Torch Source system includes inner conductor, outer conductor, coaxial coupling interface inner conductor, coaxially coupling connects
Mouth outer conductor and reflecting mechanism, the inner conductor and outer conductor are coaxial configuration, and the reflecting mechanism is located at inner conductor and leads outside
As microwave reflection end, the coupling interface inner conductor and coupling interface outer conductor are separately connected reflecting mechanism and outer for the bottom of body
Conductor is used for microwave coupling between inner conductor and outer conductor.
2. the portable spectral analysis device according to claim 1 based on plasma, which is characterized in that led outside described
Body includes the hollow centrum that hollow cylinder and the internal diameter on hollow cylinder are gradually reduced, the hollow cylinder bottom and anti-
Mechanism connection is penetrated, is the open end of the Microwave Plasma Torch Source system at the top of hollow centrum.
3. the portable spectral analysis device according to claim 1 based on plasma, which is characterized in that led in described
Body is hollow cylinder, and plasma source capture systems are inserted into the hollow cylinder, is used for Microwave Plasma Torch Source system
The plasma source that system open end generates is transmitted to spectral detection system.
4. the portable spectral analysis device according to claim 1 based on plasma, which is characterized in that the reflection
Tuning screw is set in mechanism, for adjusting the height for the cavity that inner conductor, outer conductor and reflecting mechanism are formed, to reach preferable
Resonance effect.
5. the portable spectral analysis device according to claim 1 based on plasma, which is characterized in that when to test sample
When product are gas, after sampling system mixes calibrating gas under test gas, it is transported to Microwave Plasma Torch Source system
Between inner conductor and outer conductor；When sample to be tested is liquid, after calibrating gas passes through fluid sample, into microwave plasma
Between the inner conductor and outer conductor of torch light-source system.
6. the portable spectral analysis device according to claim 5 based on plasma, which is characterized in that when to test sample
When product are gas, sampling system includes calibrating gas bottle (7), flowmeter (8), mixing chamber (9) and under test gas bottle (10), standard
Gas and under test gas enter after mixing chamber mixes, and are delivered to Microwave Plasma Torch Source system.
7. the portable spectral analysis device according to claim 5 based on plasma, which is characterized in that when to test sample
When product are liquid, sampling system includes calibrating gas bottle (7), flowmeter (8) and fluid sample room (11), and calibrating gas is passed through liquid
In body sample, microwave plasma torch light-source system is entered after carrying of liquids sample message.
8. the portable spectral analysis device according to claim 1 based on plasma, which is characterized in that the microwave
Transmission system includes coaxial transmission line, first wave guide coaxial converter, rectangular waveguide and second waveguide coaxial converter；It is coaxial to pass
Defeated line one end is connected with microwave source, and the other end is connect by first wave guide coaxial converter with rectangular waveguide, and rectangular waveguide is another
End is connected by second waveguide coaxial converter with the coaxial coupling interface of plasma torch light-source system.
9. the portable spectral analysis device according to claim 1 based on plasma, which is characterized in that it is described it is equal from
Daughter light source capture systems are optical fiber, are inserted into inner conductor hollow cylinder, open for capturing Microwave Plasma Torch Source system
The plasma source that end generates is put, and transmits it to spectral detection system.
10. the portable spectral analysis device according to claim 1 based on plasma, which is characterized in that the light
Spectrum detection system includes fiber spectrometer and computer, and plasma source capture systems transmit the plasma source of capture
To fiber spectrometer, the spectral line for carrying the calibrating gas of sample to be tested is obtained after fiber spectrometer is analyzed, removes calibrating gas
Spectral line after, the information of sample to be tested can be obtained.
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