CN107991289A - A kind of plasma height adjuster and method - Google Patents
A kind of plasma height adjuster and method Download PDFInfo
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- CN107991289A CN107991289A CN201711143883.1A CN201711143883A CN107991289A CN 107991289 A CN107991289 A CN 107991289A CN 201711143883 A CN201711143883 A CN 201711143883A CN 107991289 A CN107991289 A CN 107991289A
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/73—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited using plasma burners or torches
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Abstract
The invention discloses a kind of plasma height adjuster and method, which includes MPT modules, fibre-optical probe, optical system, camera, detection terminal, control panel and exhaust module, and MPT modules are plasma torch pipe；The chamber that exhaust module is used for plasma torch pipe is exhausted；Fibre-optical probe is used for the optical signal for obtaining plasma generation；Optical system is connected with fibre-optical probe, and the optical signal for being transmitted according to fibre-optical probe generates spectrogram；Camera is used to shoot Plasma picture；Detection terminal is used for the exhaust velocity that exhaust module is controlled by control panel, and the Plasma picture that the spectrogram generated according to optical system is calculated the signal-to-background ratio of the spectrogram and is shot to camera is identified, to obtain plasma height.The present invention changes plasma gas concentration by being vented, and then changes plasma height indirectly, actual capture point is located at the optimal observation section of plasma, so as to improve accuracy of detection.
Description
Technical field
The invention belongs to Atomic Emission Spectrometer AES field, more particularly to a kind of plasma height adjuster and method.
Background technology
Side view observation mode：The central shaft of plasma torch pipe and the optical axis of detecting system observation mode at a right angle；
Axial _ view pattern：The central shaft of plasma torch pipe and the optical axis coincidence of detecting system or parallel observation mould
Formula；
Plasma gas：For forming and maintaining the main atmosphere of plasma, such as Ar；
Plasma torch pipe：For forming and maintaining the device of plasma, such as microwave plasma torch (MPT), inductance
Coupled plasma torch (ICP), surface wave device (Surfatron) etc..
In plasma atomic emission spectrometer, sample to be tested usually introduces plasma by carrier gas in a gaseous form
In, and in the plasma successively through pervaporation, go the processes such as molten, atomization, ionization, excitation, transmitting.Due to characteristic of elements
Difference, for different elements, the complexity difference of the above process occurs in it in the plasma, therefore, using side view
When observation mode is detected elemental characteristic the intensity of spectral line, there are optimal observation area for plasma.
For the demand, existing solution includes three kinds of modes：
1) it is detected using Axial _ view pattern plasma, i.e. the axis of the optical axis of optical system and plasma torch
Line coincidence or parallel, since the excitation process of sample to be tested or element to be measured is also the axis along plasma torch, eliminates
Influence of the observation area to detection；
2) side view observation mode is used, while the relative position of plasma torch pipe is adjusted by mechanical structure；
3) side view observation mode, while the relative position of the probe by mechanical structure adjusting Systems for optical inspection are used.
The shortcomings that prior art：
Scheme 1)：When regarding mode using end, since the characteristic emission spectral line of some elements holds by plasma tail flame
Phenomena such as self-priming easily occurs is so as to influence quantitative analysis, and plasma tail flame temperature is excessive easily to Systems for optical inspection performance
Impact, therefore it is usually necessary to use the mode for removing wake flame, such as cold to bore to remove wake flame with bleed type, structure is complex；Its
Secondary, the range of linearity of element is small compared to side view observation mode under Axial _ view pattern；
Scheme 2) and scheme 3)：
Need to adjust probe (fibre-optical probe or light cylinder etc.) position of plasma torch pipe either Systems for optical inspection, from
And enable detector to capture the optimal observation position of element in the plasma, realize follow-up qualitative and quantitative point
Analysis；
The descending operation system of existing spectrometer generally uses mechanically, i.e., will be whole micro- using manual or automaticization facility
The probe (optical fiber or light cylinder etc.) of ripple plasma torch either optical detector moves up and down, it the defects of have these points：
A, need to provide extra mechanical erection and mobile space, be unfavorable for the miniaturization of structure；B, mechanical movable can bring abrasion
The factor such as accuracy and reappearance is tested Deng influence；C, mechanical movable will also result in security risk；D, mechanical movable can drop
The detection efficiency of low spectrometer；E, Machine Design is complicated, its required activity space brings hidden danger to microwave radiation.
The content of the invention
In order to solve above-mentioned technical problem existing in the prior art, the present invention proposes a kind of plasma and highly adjusts dress
Put and method.
The technical solution adopted in the present invention is：
A kind of plasma height adjuster, including MPT modules, fibre-optical probe, optical system, camera, detection are eventually
End, control panel and exhaust module, the MPT modules are plasma torch pipe；The exhaust module is used for the plasma
The chamber of torch pipe is exhausted；The fibre-optical probe is used for the optical signal for obtaining plasma generation；The optical system and institute
Fibre-optical probe connection is stated, the optical signal for being transmitted according to the fibre-optical probe generates spectrogram；The camera is used to shoot
Plasma picture；The detection terminal is used for the exhaust velocity that the exhaust module is controlled by the control panel, according to
The signal-to-background ratio of the spectrogram and the plasma to camera shooting is calculated in the spectrogram of the optical system generation
Body image is identified, to obtain plasma height.
Preferably, the fibre-optical probe and the camera use side view observation mode.
Preferably, the fibre-optical probe and the camera are located at the same horizontal position.
Preferably, the exhaust module includes passage, air bleeding valve and scavenger fan, the air bleeding valve and the scavenger fan
It is arranged in the passage, the control panel controls the speed of exhaust velocity by controlling the rotating speed of the scavenger fan,
The air bleeding valve is used to make the indoor exhaust velocity of the chamber gradual change and tend towards stability when the rotating speed of the scavenger fan changes
State.
Preferably, the detection terminal is any of PC ends, smart mobile phone, tablet and embedded system.
A kind of plasma method for adjusting height, using a kind of above-mentioned plasma height adjuster, it include with
Lower step：
Step A, detection terminal send control instruction to control panel, and the exhaust velocity of control panel control exhaust module changes step by step
Become, so as to change the indoor plasma gas concentration of chamber, to adjust plasma height；
Step B, in different plasma gas concentration, fibre-optical probe obtains optical signal, and optical signal is passed to optical system
Spectrogram is generated after system, spectrogram is loaded into signal-to-background ratio of the detection terminal by this spectrogram of calculating acquisition, meanwhile, camera is clapped
The indoor Plasma picture of chamber is taken the photograph, detection terminal is identified using image recognition algorithm plasma image, to obtain
Plasma height；
Step C, detection terminal judge optimum measurement scope, i.e., maximum signal-to-background ratio, and record signal-to-background ratio, exhaust mould at this time
Exhaust velocity and the plasma height of block；
Step D, repeat step A-C obtain the exhaust of signal-to-background ratio, exhaust module of the different elements in optimum measurement scope
Speed and plasma height；
Step E, adjusts the exhaust velocity of exhaust module, while what detection terminal was shot according to identification camera step by step
Plasma picture come obtain plasma height or according to through fibre-optical probe and optical system acquisition spectrogram be calculated
The signal-to-background ratio of spectrogram, the plasma when element is reached in optimum measurement scope is highly or untill maximum signal-to-background ratio.
Compared with prior art, the method have the benefit that：
The present invention by exhaust module come the indoor exhaust velocity of adjusting cavity, with adjusting cavity indoor gas (such as argon gas)
Concentration, so as to adjust plasma height so that the device has the advantages that safe and reliable, high accuracy and high automation；
Plasma height adjuster provided by the invention is simple and compact for structure, and torch pipe is consolidated with optical system relative position
It is fixed, without extra mechanical moving element, mechanical loss can be avoided, high accuracy, high efficiency is realized, improves safety coefficient, subtract
Microwave radiation is lacked；
The present invention uses enclosed chamber, reduces environmental air of knowing clearly and is involved in generation interference in plasma；
Optical system, camera and the exhaust module of the present invention is uniformly controlled by detection terminal, increasingly automated to realize.
Certainly, implement any of the products of the present invention and it is not absolutely required to meet above-mentioned all advantages.
Brief description of the drawings
Fig. 1 is a kind of structure diagram of plasma height adjuster of the present invention；
Fig. 2 is the process schematic of adjustment plasma height of the invention to optimal observation section, and wherein Fig. 2 (a) is
The standard analysis area (Q regions) of plasma is not in the schematic diagram in most preferably observation section；Fig. 2 (b) is the standard scores of plasma
Analyse the schematic diagram of area (Q regions) positioned at optimal observation section；
Fig. 3 is a kind of main flow chart of plasma height adjuster of the present invention；
Fig. 4 is a kind of plasma gas concentration regulation flow process figure of plasma height adjuster of the present invention；
Fig. 5 is that a kind of collection of plasma height adjuster of the present invention is divided signal-to-background ratio flow chart；
Fig. 6 is the signal-to-background ratio schematic diagram calculation of the present invention；
Fig. 7 is a kind of operational flow diagram of plasma height adjuster of the present invention.
Embodiment
To make the object, technical solutions and advantages of the present invention clearer, each reality below in conjunction with attached drawing to the present invention
The mode of applying is explained in detail.
As shown in Figure 1, a kind of plasma height adjuster, including MPT modules (dotted box portion), fibre-optical probe,
Optical system, camera, detection terminal, control panel and exhaust module, the MPT modules are plasma torch pipe；The exhaust
Module is used to the chamber of the plasma torch pipe be exhausted；The fibre-optical probe is used for the light for obtaining plasma generation
Signal；The optical system is connected with the fibre-optical probe, and the optical signal for being transmitted according to the fibre-optical probe generates spectrum
Figure；The camera is used to shoot Plasma picture；The detection terminal is used to control the row by the control panel
The exhaust velocity of gas module, the signal-to-background ratio of the spectrogram is calculated and to institute according to the spectrogram that the optical system generates
The Plasma picture for stating camera shooting is identified, to obtain plasma height.In the design, plasma torch pipe
The indoor intake velocity of chamber is stablized constant, transmits a signal to control panel by detection terminal, control panel transmits a signal to exhaust again
Module, the indoor air pressure of exhaust module adjusting cavity change plasma gas concentration different in chamber, so that indirect control
Plasma height, can be carried out detecting after plasma is highly stable.
As shown in Fig. 2, the optimal observation section in figure between reference line S1 and S2 for plasma, Q regions are plasma
The actual capture point region in the standard analysis area of body, i.e. camera, what it reflected is plasma height.In Fig. 2 (a), plasma
The standard analysis area of body is not or not most preferably observation section；In Fig. 2 (b), the standard analysis area of plasma is positioned at optimal observation section.
The operation principle of the present invention is：The indoor exhaust velocity of chamber is changed by exhaust module, thus change etc. from
The indoor plasma gas concentration of daughter torch chamber, and the change of plasma gas concentration can directly affect plasma height
Degree；When maintaining gas (such as argon gas) concentration to tend towards stability, plasma height can also settle out.
As one embodiment of the present of invention, fibre-optical probe and camera use side view observation mode, to avoid existing
Technology middle-end depending on observation mode there are the defects of, and due to its be by the indoor air pressure of exhaust module control chamber so that
Control plasma height is connect, optimal observation section is located at, so as to it also avoid side view observation mode of the prior art
There are the defects of.
As one embodiment of the present of invention, fibre-optical probe and camera are located at the same horizontal position, therefore can be from taking the photograph
Observation information as judging current optical probe in Plasma picture that head captures, with the change of plasma height, when
When collection signal reaches signal-to-background ratio maximum of intensity, the actual capture point of fiber-optic signal collection point and camera is located at plasma
Optimal observation section.
As one embodiment of the present of invention, exhaust module includes passage, air bleeding valve and scavenger fan, air bleeding valve and exhaust
Fan is arranged in passage, and control panel controls the speed of exhaust velocity by controlling the rotating speed of scavenger fan, and air bleeding valve is used
Gradual change and tended towards stability in making the indoor exhaust velocity of chamber when the rotating speed of scavenger fan changes.In the design, scavenger fan can
To set multiple gear values, different gear values corresponds to the exhaust velocity of different exhaust modules.Air bleeding valve can be uniformly big
The baffle of small consistent through hole, baffle and passage seal, it is therefore an objective to which exhaust velocity gradual change is simultaneously when changing the rotating speed of scavenger fan
Tend towards stability state.
As one embodiment of the present of invention, detection terminal can be in PC ends, smart mobile phone, tablet and embedded system
It is any.
With reference to figure 3 to Fig. 7, a kind of course of work of plasma height adjuster of the invention is as follows：
Step A, detection terminal send control instruction to control panel, and the exhaust velocity of control panel control exhaust module changes step by step
Become, so as to change the indoor plasma gas concentration of chamber, to adjust plasma height；
Step B, in different plasma gas concentration, fibre-optical probe obtains optical signal, and optical signal is passed to optical system
Spectrogram is generated after system, spectrogram is loaded into signal-to-background ratio of the detection terminal by this spectrogram of calculating acquisition, meanwhile, camera is clapped
The indoor Plasma picture of chamber is taken the photograph, detection terminal is identified using image recognition algorithm plasma image, to obtain
Plasma height；
Step C, detection terminal judge optimum measurement scope, i.e., maximum signal-to-background ratio, and record signal-to-background ratio, exhaust mould at this time
Exhaust velocity and the plasma height of block；
Step D, repeat step A-C obtain the exhaust of signal-to-background ratio, exhaust module of the different elements in optimum measurement scope
Speed and plasma height；
Step E, adjusts the exhaust velocity of exhaust module, while what detection terminal was shot according to identification camera step by step
Plasma picture come obtain plasma height or according to through fibre-optical probe and optical system acquisition spectrogram be calculated
The signal-to-background ratio of spectrogram, the plasma when element is reached in optimum measurement scope is highly or untill maximum signal-to-background ratio.
Expansion explanation is carried out to the above-mentioned course of work：
Fig. 3 is main flow chart：After MPT igniting starts, the concentration of plasma gas in plasma chamber body is gradually risen,
The light splitting information under different plasma gas concentration is gathered respectively and calculates and record signal-to-background ratio, then judges that letter is carried on the back by program
Than one group of maximum data.
Fig. 4 is the idiographic flow that the plasma gas concentration of main flow plasma cavity is adjusted：Sent out by PC ends
Regulate signal is penetrated, exhaust module is inputted after control panel, realizes that the exhaust velocity of exhaust module improves step by step.
Fig. 5 is collection light splitting signal-to-background ratio idiographic flow in main flow chart：Optical signal is obtained by fibre-optical probe first, by light
Spectrogram can be generated after signal discrepancy optical system, spectrogram is loaded into PC ends calculates the signal-to-background ratio of this spectrogram of acquisition, and remembers
The gear value of the scavenger fan of lower this numerical value contrast of record.
The calculating of signal-to-background ratio：As shown in fig. 6, L1 is the image of blank sample, L2 is the image of actual sample, and I is actual
Intensity at the signal peak position λ 0 of sample, B0 are the intensity at the signal peak position of blank sample, and the definition of signal-to-background ratio is：
But each setting value of each sample is tested (blank sample test and actual sample survey twice in actual experiment
Examination) it is extremely cumbersome.The left peak B1 (choosing methods of signal strength can be obtained by experiment：On the left of peak position and away from choosing at peak position
Select one piece of arbitrary region and take its average intensity value, the corresponding wavelength in left peak is λ 1) and right peak B2 (choosing methods：On the right side of peak position
And take its average intensity value away from one piece of arbitrary region of selection at peak position, and the corresponding wavelength in right peak is λ 2), using three kinds of method energy
The valuation of signal-to-background ratio is accessed, simplifies test.
Method one：Background signal intensities are used as using left peak B1
Method two：Background signal intensities are used as using right peak B2
Method three：Difference equation solution value is as background signal intensities
Signal-to-background ratio of the same element under different plasma gas concentration is measured, chooses maximum therein, by this
The exhaust velocity of exhaust module during maximum and signal-to-background ratio at this time are as database.
According to the implementation of Fig. 3 to Fig. 7, signal-to-background ratio (SBR), exhaust module of the different elements in optimum measurement scope are generated
Exhaust velocity and plasma height H database.
The exhaust velocity and plasma of signal-to-background ratio, exhaust module when having generated different elements in optimum measurement scope
In the case of the database of height H, by adjusting the exhaust velocity of exhaust module step by step, it is dense to change plasma gas in chamber
Degree, adjustment plasma height, is observed when collection signal reaches signal-to-background ratio maximum of intensity, fibre-optical probe signal acquisition point
Observation center can also be located at optimal observation scope of this kind of element for plasma.
Another implementation method, due to the influence of the other conditions such as temperature, the exhaust velocity for directly adjusting exhaust module is extremely remembered
Record value can not necessarily obtain plasma height of the height for H, therefore device operational process is as shown in fig. 7, adjust exhaust mould
The exhaust velocity of block is shown in PC ends after obtaining Plasma picture by camera, is calculated through the image recognition of PC ends to deep low gear
Method calculates plasma height H1 at this time, plasma height H1 is made comparisons with record value H in database, if Error Absolute Value
More than 0.05mm, signal value is transmitted to control panel, the gear of the exhaust velocity of exhaust module is improved into level-one, is continued above-mentioned
Step is until result of calculation is less than 0.05mm with record value Error Absolute Value in database.
The plasma height adjuster of the present invention can obtain optimal sight using mechanical movable instead of traditional
The method for surveying section, changes plasma height by the indoor exhaust velocity of control chamber, the plasma of different elements
Standard analysis area is respectively positioned on the optimal observation section of plasma, to improve the accuracy of detected spectrum and improve MPT spectrum
The safety and reliability of instrument, while real time monitoring can be carried out by camera and automate debugging, improve the detection of device
Efficiency.The present invention can equally be well applied to ICP, Surfatron etc..
The foregoing is only a preferred embodiment of the present invention, but protection scope of the present invention be not limited thereto,
Any one skilled in the art the invention discloses technical scope in, the change or replacement that can readily occur in,
It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with scope of the claims
Subject to.
Claims (6)
1. a kind of plasma height adjuster, it is characterised in that including MPT modules, fibre-optical probe, optical system, shooting
Head, detection terminal, control panel and exhaust module, the MPT modules are plasma torch pipe；The exhaust module is used for described
The chamber of plasma torch pipe is exhausted；The fibre-optical probe is used for the optical signal for obtaining plasma generation；The optics
System is connected with the fibre-optical probe, and the optical signal for being transmitted according to the fibre-optical probe generates spectrogram；The camera
For shooting Plasma picture；The detection terminal is used for the exhaust speed that the exhaust module is controlled by the control panel
Degree, the spectrogram generated according to the optical system are calculated the signal-to-background ratio of the spectrogram and to camera shootings
Plasma picture is identified, to obtain plasma height.
2. a kind of plasma height adjuster according to claim 1, it is characterised in that the fibre-optical probe and institute
State camera and use side view observation mode.
3. a kind of plasma height adjuster according to claim 2, it is characterised in that the fibre-optical probe and institute
State camera and be located at the same horizontal position.
4. a kind of plasma height adjuster according to claim 1, it is characterised in that the exhaust module includes
Passage, air bleeding valve and scavenger fan, the air bleeding valve and the scavenger fan are arranged in the passage, and the control panel leads to
Cross and control the rotating speed of the scavenger fan to control the speed of exhaust velocity, the air bleeding valve is used to make the indoor exhaust of the chamber
Speed gradual change and the state that tends towards stability when the rotating speed of the scavenger fan changes.
5. a kind of plasma height adjuster according to any one of claim 1 to 4, it is characterised in that described
Detection terminal is any of PC ends, smart mobile phone, tablet and embedded system.
6. a kind of plasma method for adjusting height, employs a kind of plasma as claimed in claim 1 and highly adjusts dress
Put, it is characterised in that including：
Step A, detection terminal send control instruction to control panel, and the exhaust velocity of control panel control exhaust module changes step by step,
So as to change the indoor plasma gas concentration of chamber, to adjust plasma height；
Step B, in different plasma gas concentration, fibre-optical probe obtains the optical signal that plasma produces, by optical signal
Spectrogram is generated after incoming optical system, spectrogram is loaded into signal-to-background ratio of the detection terminal by this spectrogram of calculating acquisition, together
When, the camera shooting indoor Plasma picture of chamber, detection terminal is carried out using image recognition algorithm plasma image
Identification, to obtain plasma height；
Step C, detection terminal judge optimum measurement scope, i.e., maximum signal-to-background ratio, and record signal-to-background ratio at this time, exhaust module
Exhaust velocity and plasma height；
Step D, repeat step A-C obtain signal-to-background ratio in optimum measurement scope of different elements, the exhaust velocity of exhaust module
With plasma height；
Step E, step by step adjust exhaust module exhaust velocity, while detection terminal according to the grade that identification camera is shot from
Daughter image come obtain plasma height or according to through fibre-optical probe and optical system acquisition spectrogram spectrum is calculated
The signal-to-background ratio of figure, the plasma when element is reached in optimum measurement scope is highly or untill maximum signal-to-background ratio.
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| CN201711143883.1A CN107991289A (en) | 2017-11-17 | 2017-11-17 | A kind of plasma height adjuster and method |
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| CN201711143883.1A CN107991289A (en) | 2017-11-17 | 2017-11-17 | A kind of plasma height adjuster and method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110487775A (en) * | 2019-07-25 | 2019-11-22 | 电子科技大学 | A kind of portable spectral analysis device based on plasma |
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| CN1174991A (en) * | 1997-07-08 | 1998-03-04 | 吉林大学 | Microwave plasma torch atomic emission spectrometer |
| CN101368267A (en) * | 2007-08-17 | 2009-02-18 | 株式会社半导体能源研究所 | Plasma cvd apparatus, manufacture of microcrystalline semiconductor layer and thin film transistor |
| KR20110123375A (en) * | 2010-05-07 | 2011-11-15 | 한국과학기술연구원 | High efficient plasma reactor for thermal destruction processes of high concentrated perfluorocompounds gases |
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