CN110459950A - It can cascade laser travelling-wave amplifier - Google Patents
It can cascade laser travelling-wave amplifier Download PDFInfo
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- CN110459950A CN110459950A CN201910909978.2A CN201910909978A CN110459950A CN 110459950 A CN110459950 A CN 110459950A CN 201910909978 A CN201910909978 A CN 201910909978A CN 110459950 A CN110459950 A CN 110459950A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
- H01S3/2308—Amplifier arrangements, e.g. MOPA
- H01S3/2316—Cascaded amplifiers
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Abstract
This application involves laser amplifier apparatus fields, specifically, being related to one kind can cascade laser travelling-wave amplifier, the laser travelling-wave amplifier includes seed light input end, pumping light input end, amplification laser output and amplification optical path, the seed light input end and amplification laser output coaxial arrangement are exported after amplification optical path amplification by the amplification laser output from the seed light that the seed light input end inputs and from the pump light that the pumping light input end inputs.The application is by making laser travelling-wave amplifier form standardized module, in order to which multiple laser travelling-wave amplifiers can cascade, user can amplify laser with realizing different multiplying by increasing and decreasing the quantity of laser travelling-wave amplifier, solve the problems, such as that existing laser amplifier cannot quickly adjust laser amplifier parameter, it is fast with easy to operate, adjustment speed, can unrestricted choice amplification factor beneficial effect.
Description
Technical field
This application involves laser amplifier apparatus fields, can cascade laser travelling-wave amplifier in particular to one kind.
Background technique
In the prior art, it is desirable to obtain the laser of appropriate power, generally there is resonant cavity directly to export and amplify two kinds with traveling wave
Scheme.Resonant cavity is directly exported there are certain limitation, depending on the laser power of output, width parameter are formed according to resonant cavity
Type is limited by laser crystal thermal lensing effect in resonant cavity, it is desirable to obtain compare for high-power, high light beam quality laser by
Limit.Traveling wave amplification is to add amplifying stage to amplify seed light using seed source, can obtain so high laser intensity and seed
The similar laser output of optical parameter.Either resonant cavity output or amplification output, the prior art all can not flexibly control sharp
Optical output power is only fixed the laser parameter of output relatively, can not quickly adjust laser amplifier parameter.
Summary of the invention
The application be intended to provide one kind can cascade laser travelling-wave amplifier, with solve it is in the prior art can not fast velocity modulation
The problem of saving laser amplifier parameter.
Embodiments herein is achieved in that
In a first aspect, the application one kind is provided can cascade laser travelling-wave amplifier comprising seed light input end, pumping
Light input end, amplification laser output and amplification optical path, the seed light input end and the amplification laser output are coaxial
It is put described in setting, the seed light inputted from the seed light input end and the pump light process inputted from the pumping light input end
It is exported after big optical path amplification by the amplification laser output.
A kind of laser travelling-wave amplifier provided by the present application, pump light are first added amplification optical path from pumping light input end, connect
Seed light amplification optical path is entered by seed light input end is formed after stimulated radiation and amplify and exported via amplification laser output,
It forms laser travelling-wave amplifier standardized by the way that the output end of the input terminal of seed light and amplification laser to be coaxially disposed
Module, in order to which multiple laser travelling-wave amplifiers can cascade, user can be real by increasing and decreasing the quantity of laser travelling-wave amplifier
Amplify laser to existing different multiplying, solves the problems, such as that existing laser amplifier cannot quickly adjust laser amplifier parameter, there is behaviour
Make simple, adjustment speed is fast, can unrestricted choice amplification factor beneficial effect.
Optionally, in one embodiment of the application, the amplification optical path includes the first semi-transparent semi-reflecting lens, second semi-transparent
Semi-reflective mirror, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and first laser crystal, the laser travelling-wave amplifier include first
Light input end is pumped, the pump light inputted from the first pumping light input end injects institute after passing through first semi-transparent semi-reflecting lens
State first laser crystal；The seed light inputted from the seed light input end is radiated on first semi-transparent semi-reflecting lens, is passed through
It is incident on after the reflection of first semi-transparent semi-reflecting lens in the first laser crystal, the light being emitted from the first laser crystal
Line successively by second semi-transparent semi-reflecting lens, the third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens reflection after by
The amplification laser output output.
By the way that the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens shape are arranged
At the optical path for being substantially in " several " shape, and first laser crystal is set in the optical path of " several " shape and amplifies optical path to form " several " shape,
Make first laser crystal between the first semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens, in order to which the first pumping light input end is defeated
The pump light (hereinafter referred to as the first pump light) entered can enter first laser crystal from an end face of first laser crystal, the
One pump light and seed light are incident in the same direction, so that the overlay path of seed light and pump light in first laser crystal is as far as possible
It is long, in order to which laser travelling-wave amplifier is being realized and can obtain preferable amplification effect under cascade situation.
Optionally, in one embodiment of the application, the amplification optical path includes the first semi-transparent semi-reflecting lens, second semi-transparent
Semi-reflective mirror, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and first laser crystal, the laser travelling-wave amplifier include first
Light input end and the second pumping light input end are pumped, the pump light inputted from the first pumping light input end passes through described first
The first laser crystal is injected after semi-transparent semi-reflecting lens, the pump light inputted from the second pumping light input end passes through described the
The first laser crystal is injected after two semi-transparent semi-reflecting lens；The seed light inputted from the seed light input end is radiated at described the
It on one semi-transparent semi-reflecting lens, is incident on after the reflection of first semi-transparent semi-reflecting lens in the first laser crystal, from described
The light of first laser crystal outgoing successively passes through second semi-transparent semi-reflecting lens, the third semi-transparent semi-reflecting lens, the described 4th
It is exported after the reflection of semi-transparent semi-reflecting lens by the amplification laser output.
By the way that the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens shape are arranged
At the optical path for being substantially in " several " shape, and first laser crystal is set in the optical path of " several " shape and amplifies optical path to form " several " shape,
Make first laser crystal between the first semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens, in order to which the first pumping light input end is defeated
The pump light entered can enter first laser crystal from an end face of first laser crystal, and convenient for the second pumping light input end
The pump light (hereinafter referred to as the second pump light) of input can enter first laser crystalline substance from another end face of first laser crystal
Body, i.e. the second pump light are reversely incident relative to seed light, so as to be injected separately into pumping at the both ends of first laser crystal
Light makes laser travelling-wave amplifier can be cascade in realization so that the limited amplification efficiency apart from interior single laser crystal is higher
In the case of obtain preferable amplification effect.
Optionally, in one embodiment of the application, the amplification optical path includes the first semi-transparent semi-reflecting lens, second semi-transparent
Semi-reflective mirror, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and second laser crystal, the laser travelling-wave amplifier includes third
Light input end is pumped, the pump light inputted from third pumping light input end injects institute after passing through the third semi-transparent semi-reflecting lens
State second laser crystal；The seed light inputted from the seed light input end successively passes through first semi-transparent semi-reflecting lens, described
It is incident in the second laser crystal after second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens reflection, swashs from described second
The light of luminescent crystal outgoing is exported after the reflection of the 4th semi-transparent semi-reflecting lens by the amplification laser output.
By the way that the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens shape are arranged
At the optical path for being substantially in " several " shape, and second laser crystal is set in the optical path of " several " shape and amplifies optical path to form " several " shape,
Make second laser crystal between third semi-transparent semi-reflecting lens and the 4th semi-transparent semi-reflecting lens, in order to which third pumping light input end is defeated
The pump light (hereinafter referred to as third pump light) entered can enter second laser crystal from an end face of second laser crystal, the
Three pump lights and seed light are incident in the same direction, so that the overlay path of seed light and pump light in second laser crystal is as far as possible
It is long, in order to which laser travelling-wave amplifier is being realized and can obtain preferable amplification effect under cascade situation.
Optionally, in one embodiment of the application, the amplification optical path includes the first semi-transparent semi-reflecting lens, second semi-transparent
Semi-reflective mirror, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and second laser crystal, the laser travelling-wave amplifier includes third
Light input end and the 4th pumping light input end are pumped, the pump light inputted from third pumping light input end passes through the third
The second laser crystal is injected after semi-transparent semi-reflecting lens, the pump light inputted from the 4th pumping light input end passes through described the
The second laser crystal is injected after four semi-transparent semi-reflecting lens；The seed light inputted from the seed light input end is successively passed through described
The second laser is incident on after first semi-transparent semi-reflecting lens, second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens reflection
In crystal, the light being emitted from the second laser crystal is swashed after the reflection of the 4th semi-transparent semi-reflecting lens by the amplification
Light output end output.
By the way that the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens shape are arranged
At the optical path for being substantially in " several " shape, and second laser crystal is set in the optical path of " several " shape and amplifies optical path to form " several " shape,
Make second laser crystal between the first semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens, in order to be able to defeated from third pump light
The pump light for entering end input can enter second laser crystal from an end face of second laser crystal, and be convenient for the 4th pump light
The pump light (hereinafter referred to as the 4th pump light) of input terminal input can enter second from another end face of second laser crystal
Laser crystal, i.e. the 4th pump light are reversely incident relative to seed light, so as to infuse respectively at the both ends of second laser crystal
Enter pump light, so that the limited amplification efficiency apart from interior single laser crystal is higher, makes laser travelling-wave amplifier can in realization
Preferable amplification effect is obtained in cascade situation.
Optionally, in one embodiment of the application, the amplification optical path includes the first semi-transparent semi-reflecting lens, second semi-transparent
Semi-reflective mirror, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, first laser crystal and second laser crystal, the laser traveling wave
Amplifier includes that the first pumping light input end and third pump light input end, the pumping inputted from the first pumping light input end
Light injects the first laser crystal after passing through first semi-transparent semi-reflecting lens, the pump inputted from third pumping light input end
Pu light injects the second laser crystal after passing through the third semi-transparent semi-reflecting lens；The seed inputted from the seed light input end
Light is radiated on first semi-transparent semi-reflecting lens, is incident on the first laser after the reflection of first semi-transparent semi-reflecting lens
In crystal, the light being emitted from the first laser crystal successively passes through second semi-transparent semi-reflecting lens, the third semi-transparent half
It is incident in the second laser crystal after anti-mirror reflection, the light being emitted from the second laser crystal passes through the described 4th half
It is exported after the reflection of saturating semi-reflective mirror by the amplification laser output.
By the way that the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens shape are arranged
First laser crystal and second laser crystal are set to be formed at the optical path for being substantially in " several " shape, and in the optical path of " several " shape
" several " shape amplifies optical path, makes first laser crystal between the first semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens, makes second to swash
Luminescent crystal is between third semi-transparent semi-reflecting lens and the 4th semi-transparent semi-reflecting lens, in order to which the first pump light can be from first laser crystalline substance
One end face of body, which enters first laser crystal, third pump light, to swash from an end face of second laser crystal into second
Luminescent crystal, to make two segments for amplifying optical path be respectively provided with amplification effect, and two segments do not input with seed light
End and amplification laser output are coaxial, facilitate pump light from the surface feeding sputtering of first laser crystal and second laser crystal, so that
The overlay path of seed light and pump light in two laser crystals is all as long as possible, so that laser travelling-wave amplifier can in realization
Preferable amplification effect is obtained in cascade situation.
Optionally, in one embodiment of the application, the amplification optical path includes the first semi-transparent semi-reflecting lens, second semi-transparent
Semi-reflective mirror, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, first laser crystal and second laser crystal, the laser traveling wave
Amplifier includes the first pumping light input end and the 4th pumping light input end, the pumping inputted from the first pumping light input end
Light injects the first laser crystal after passing through first semi-transparent semi-reflecting lens, the pump inputted from the 4th pumping light input end
Pu light injects the second laser crystal after passing through the 4th semi-transparent semi-reflecting lens；The seed inputted from the seed light input end
Light is radiated on first semi-transparent semi-reflecting lens, is incident on the first laser after the reflection of first semi-transparent semi-reflecting lens
In crystal, the light being emitted from the first laser crystal successively passes through second semi-transparent semi-reflecting lens, the third semi-transparent half
It is incident in the second laser crystal after anti-mirror reflection, the light being emitted from the second laser crystal passes through the described 4th half
It is exported after the reflection of saturating semi-reflective mirror by the amplification laser output.
By the way that the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens shape are arranged
First laser crystal and second laser crystal are set to be formed at the optical path for being substantially in " several " shape, and in the optical path of " several " shape
" several " shape amplifies optical path, makes first laser crystal between the first semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens, makes second to swash
Luminescent crystal is between third semi-transparent semi-reflecting lens and the 4th semi-transparent semi-reflecting lens, in order to which the first pump light can be from first laser crystalline substance
The pump light that one end face of body enters first laser crystal, third pumping light input end inputs can be from second laser crystal
One end face enters second laser crystal, so that two segments for amplifying optical path be made to be respectively provided with amplification effect, and this two sections
Duan Jun is not coaxial with seed light input end and amplification laser output, facilitates pump light brilliant from first laser crystal and second laser
The surface feeding sputtering of body, so that the overlay path of seed light and pump light in two laser crystals is all as long as possible, so that laser
Travelling-wave amplifier is being realized and can obtain preferable amplification effect under cascade situation.
Optionally, in one embodiment of the application, the amplification optical path includes the first semi-transparent semi-reflecting lens, second semi-transparent
Semi-reflective mirror, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, first laser crystal and second laser crystal, the laser traveling wave
Amplifier includes the first pumping light input end, the second pumping light input end, third pumping light input end, the input of the 4th pump light
End, the pump light inputted from the first pumping light input end inject the first laser after passing through first semi-transparent semi-reflecting lens
Crystal, the pump light inputted from the second pumping light input end inject described first after second semi-transparent semi-reflecting lens and swash
Luminescent crystal, the pump light inputted from third pumping light input end inject described second after passing through the third semi-transparent semi-reflecting lens
Laser crystal, the pump light inputted from the 4th pumping light input end inject described the after passing through the 4th semi-transparent semi-reflecting lens
Dual-laser crystal；The seed light inputted from the seed light input end is radiated on first semi-transparent semi-reflecting lens, by described
Be incident on after the reflection of first semi-transparent semi-reflecting lens in the first laser crystal, from the first laser crystal be emitted light according to
It is secondary to be incident in the second laser crystal after second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens reflection, from
The light of the second laser crystal outgoing is after the reflection of the 4th semi-transparent semi-reflecting lens by the amplification laser output
Output.
By the way that the first semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens shape are arranged
First laser crystal and second laser crystal are set to be formed at the optical path for being substantially in " several " shape, and in the optical path of " several " shape
" several " shape amplifies optical path, makes first laser crystal between the first semi-transparent semi-reflecting lens and the second semi-transparent semi-reflecting lens, makes second to swash
Luminescent crystal is between third semi-transparent semi-reflecting lens and the 4th semi-transparent semi-reflecting lens, so that two segments for amplifying optical path be made to be respectively provided with
Amplification effect, and two segments are not coaxial with seed light input end and amplification laser output, facilitate pump light from first
Two end faces of laser crystal and two end faces of second laser crystal are incident respectively, so that limited brilliant apart from interior single laser
The amplification efficiency of body is higher, and keeps the overlay path of seed light and pump light in two laser crystals all as long as possible, so that
Laser travelling-wave amplifier is being realized and can obtain preferable amplification effect under cascade situation.
Optionally, in one embodiment of the application, each pumping light input end is provided with coupling focusing lens group, pump
Pu light enters corresponding laser crystal after the coupling focusing lens group.
By the way that coupling focusing lens group is arranged in pumping light input end, to guarantee to make pump light focusing to be directed into laser crystalline substance
Body.
Optionally, in one embodiment of the application, the amplification laser output is provided with output Shaping lens group,
The light of the 4th semi-transparent semi-reflecting lens reflection is exported after the output Shaping lens group by the amplification laser output.
By amplification laser output be arranged output Shaping lens group, enable output amplification laser facular model
Facular model needed for being enough adapted to next stage amplification, or be adapted to using required facular model.
Detailed description of the invention
Technical solution in ord to more clearly illustrate embodiments of the present application, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only some embodiments of the application, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is the structural schematic diagram for the laser travelling-wave amplifier that the embodiment of the present application 1 provides；
Fig. 2 is two cascade structural schematic diagrams of laser travelling-wave amplifier that the embodiment of the present application 1 provides；
Fig. 3 is three cascade structural schematic diagrams of laser travelling-wave amplifier that the embodiment of the present application 1 provides；
Fig. 4 is the first structural schematic diagram for the laser travelling-wave amplifier that the embodiment of the present application 2 provides；
Fig. 5 is second of structural schematic diagram of the laser travelling-wave amplifier that the embodiment of the present application 2 provides；
Fig. 6 is the third structural schematic diagram for the laser travelling-wave amplifier that the embodiment of the present application 2 provides；
Fig. 7 is the 4th kind of structural schematic diagram of the laser travelling-wave amplifier that the embodiment of the present application 2 provides；
Fig. 8 is the 5th kind of structural schematic diagram of the laser travelling-wave amplifier that the embodiment of the present application 2 provides；
Fig. 9 is the 6th kind of structural schematic diagram of the laser travelling-wave amplifier that the embodiment of the present application 2 provides；
Figure 10 is the first structural schematic diagram for the laser travelling-wave amplifier that the embodiment of the present application 3 provides；
Figure 11 is second of structural schematic diagram of the laser travelling-wave amplifier that the embodiment of the present application 3 provides；
Figure 12 is the third structural schematic diagram for the laser travelling-wave amplifier that the embodiment of the present application 3 provides；
Figure 13 is the 4th week structural schematic diagram for the laser travelling-wave amplifier that the embodiment of the present application 3 provides；
Figure 14 is the 5th kind of structural schematic diagram of the laser travelling-wave amplifier that the embodiment of the present application 3 provides；
Figure 15 is the 6th kind of structural schematic diagram of the laser travelling-wave amplifier that the embodiment of the present application 3 provides.
Icon: 10- laser travelling-wave amplifier；100- seed light input end；200- amplifies laser output；310-
One pumping light input end；320- second pumps light input end；330- third pumps light input end；The 4th pump light of 340- is defeated
Enter end；The first semi-transparent semi-reflecting lens of 410-；The second semi-transparent semi-reflecting lens of 420-；430- third semi-transparent semi-reflecting lens；440- the 4th half
Saturating semi-reflective mirror；510- first laser crystal；520- second laser crystal；600- output Shaping lens group；The first coupling of 710-
Close focus lens group；720- the second coupling focusing lens group；730- third coupling focusing lens group；The coupling of 740- the 4th is poly-
Focus lens group；20- input shaper lens group.
Specific embodiment
To keep the purposes, technical schemes and advantages of the embodiment of the present application clearer, below in conjunction with the embodiment of the present application
In attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is
Some embodiments of the present application, instead of all the embodiments.The application being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
In the description of the present application, it should be noted that if occur term " center ", "upper", "lower", "left", "right",
The orientation or positional relationship of the instructions such as "vertical", "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings,
Either this application product using when the orientation or positional relationship usually put, be merely for convenience of description the application and simplification retouched
It states, rather than the device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation,
Therefore it should not be understood as the limitation to the application.If only being used in addition, occurring term " first ", " second " etc. in the description of the present application
It is described in distinguishing, is not understood to indicate or imply relative importance.
Embodiment 1
The application provides a kind of laser travelling-wave amplifier 10 of standardized traveling wave amplifying type, single laser travelling-wave amplifier
10 include seed light input end 100, pumping light input end, amplification laser output 200 and amplification optical path, seed light input
End 100 and amplification laser output 200 are coaxially disposed, and are inputted from the seed light of the input of seed light input end 100 and from pump light
The pump light of input is held to be exported after amplification optical path amplification by amplification laser output 200.
It is designed by above-mentioned standardized structural, the laser travelling-wave amplifier 10 of traveling wave amplifying type provided by the present application can be with
Realize black box minor cascade operation, forming one kind can cascade laser travelling-wave amplifier 10.That is, multiple laser traveling waves are put
Big device 10 can be sequentially connected in series, and user can adjust the ginseng of laser amplifier by increasing and decreasing the quantity of laser travelling-wave amplifier 10.
Regulative mode is the quantity for increasing and decreasing laser travelling-wave amplifier 10, therefore easy to operate, and adjustment speed is fast, can be with unrestricted choice times magnification
Number.
The structure of single laser travelling-wave amplifier 10 is as shown in Figure 1, amplification optical path includes the first semi-transparent semi-reflecting lens 410, the
Two semi-transparent semi-reflecting lens 420, third semi-transparent semi-reflecting lens 430, the 4th semi-transparent semi-reflecting lens 440, first laser crystal 510 and second laser
Crystal 520.Seed light input end 100, the first semi-transparent semi-reflecting lens 410, first laser crystal 510, the second semi-transparent semi-reflecting lens 420,
Third semi-transparent semi-reflecting lens 430, second laser crystal 520, the 4th semi-transparent semi-reflecting lens 440, amplification laser output 200 are successively held in the mouth
It connects.
It is coaxially disposed seed light input end 100, amplification laser output 200, in order to multiple laser travelling-wave amplifiers
When 10 cascade, the amplification laser output 200 of previous laser travelling-wave amplifier 10 can be with the latter laser travelling-wave amplifier
10 seed light input end 100 is directed at linking.
Pumping light input end above-mentioned includes that the first pumping light input end 310, second pumps light input end 320, third pump
Pu light input end the 330, the 4th pumps light input end 340.First pumping light input end 310 is connected the first semi-transparent semi-reflecting lens 410, the
Two pumping light input ends 320 are connected the second semi-transparent semi-reflecting lens 420, and third pumps light input end 330 and is connected third semi-transparent semi-reflecting lens
430, the 4th pumping light input end 340 is connected the 4th semi-transparent semi-reflecting lens 440.
Such as Fig. 1, the first semi-transparent semi-reflecting lens 410, the second semi-transparent semi-reflecting lens 420 are arranged in 45° angle, third semi-transparent semi-reflecting lens
430, the 4th semi-transparent semi-reflecting lens 440 are in 135 ° of angle settings, the angle of the second semi-transparent semi-reflecting lens 420 and third semi-transparent semi-reflecting lens 430
It is complementary.Swash towards the first semi-transparent semi-reflecting lens 410 and the second semi-transparent semi-reflecting lens 420, second two end faces of first laser crystal 510
Two end faces of luminescent crystal 520 are towards third semi-transparent semi-reflecting lens 430 and the 4th semi-transparent semi-reflecting lens 440.So that seed light, pump light
Injected from the end face of first laser crystal 510 or second laser crystal 520.
The both-end of laser crystal injects pump light simultaneously to guarantee to have sufficient pump light, laser crystal in laser crystal
Influx and translocation makes limited higher apart from the amplification efficiency of interior single laser crystal.
Laser crystal is injected after seed light is Chong Die with pump light makes overlay path as long as possible, so that laser traveling wave is amplified
Device 10 is being realized and can obtain preferable amplification effect under cascade situation.
It is optionally, poly- in the setting coupling of each pumping light input end to guarantee to make pump light focusing to be directed into laser crystal
Focus lens group, pump light enter corresponding laser crystal after coupling focusing lens group.Such as Fig. 1, the first pumping light input end
First coupling focusing lens group 710 is set at 310, second coupling focusing lens group is set at the second pumping light input end 320
720, third, which pumps, is arranged third coupling focusing lens group 730 at light input end 330, is arranged at the 4th pumping light input end 340
4th coupling focusing lens group 740.
By primary amplified laser, due to after laser crystal thermal lens and the light path of amplification optical path there may be
Certain facular model variation, for the ease of connecting next laser travelling-wave amplifier 10, or it is defeated for the ease of obtaining needing
Optionally output Shaping lens group 600 is arranged in amplification laser output 200, the 4th is semi-transparent semi-reflecting in the facular model used out
The light that mirror 440 reflects is exported after output Shaping lens group 600 by amplification laser output 200.
In order to can adapt to laser travelling-wave amplifier 10 in different seed lights, optionally, the embodiment of the present application is also mentioned
For an input shaper lens group 20, it is used cooperatively it with one or more laser travelling-wave amplifiers 10.By seed light source
It accesses before seed light input end 100, seed light source is first made to connect the input shaper lens group 20, so that seed light passes through shaping
Laser travelling-wave amplifier 10 is injected afterwards, so that different seed lights can be adapted to the hot spot of the adaptation of laser travelling-wave amplifier 10
Mode, the hot spot for focusing the facular model being injected into laser crystal with coupling pump light match, and realize preferably amplification
Efficiency.
The embodiment of laser travelling-wave amplifier 10 provided by the present application is as follows:
(1) single laser travelling-wave amplifier 10.
It first connects the first pumping light input end 310, second and pumps light input end 320, third pumping light input end 330, the
Four pumping light input ends 340, the pump light for inputting the first pumping light input end 310 are infused after passing through the first semi-transparent semi-reflecting lens 410
Enter first laser crystal 510, the pump light for inputting the second pumping light input end 320 is infused after passing through the second semi-transparent semi-reflecting lens 420
Enter first laser crystal 510, the pump light for inputting third pumping light input end 330 is infused after passing through third semi-transparent semi-reflecting lens 430
Enter second laser crystal 520, the pump light for inputting the 4th pumping light input end 340 is infused after passing through the 4th semi-transparent semi-reflecting lens 440
Enter second laser crystal 520.
First laser crystal 510, second laser crystal 520 are the excited states that both-end has been injected into pump light at this time.
Then seed light input end 100 is connected, the seed light inputted from seed light input end 100 is radiated at first semi-transparent half
It on anti-mirror 410, is incident in first laser crystal 510 after the reflection of the first semi-transparent semi-reflecting lens 410, from first laser crystal
The light of 510 outgoing is successively incident on second laser after the second semi-transparent semi-reflecting lens 420, third semi-transparent semi-reflecting lens 430 reflect
In crystal 520, the light being emitted from second laser crystal 520 is after the reflection of the 4th semi-transparent semi-reflecting lens 440 by amplification laser
Output end 200 exports.
Seed light enter after laser travelling-wave amplifier 10 successively in first laser crystal 510, second laser crystal 520 by
It is exported to after amplifying twice.
(2) multiple laser travelling-wave amplifiers 10 cascade.
Amplifying parameters as required select the laser travelling-wave amplifier 10 of respective numbers, and multiple laser traveling waves are put
Big device 10 is sequentially connected in series.
As shown in Fig. 2, Fig. 2 shows two concatenated situations of laser travelling-wave amplifier 10.Input shaper lens group 20 connects
The seed light input end 100 of the laser travelling-wave amplifier 10 of the first order is connect, the amplification of the laser travelling-wave amplifier 10 of the first order swashs
Light output end 200 connects the seed light input end 100 of the laser travelling-wave amplifier 10 of the second level.
Seed light enters the laser travelling-wave amplifier 10 of the first order after 20 shaping of input shaper lens group, in the first order
Laser travelling-wave amplifier 10 in, seed light is amplified that (every level-one amplification in the present embodiment includes putting twice by the first order
Greatly)；Seed light is shaped to the laser traveling wave amplification for being adapted to the second level through output Shaping lens group 600 after being amplified by the first order
It is exported after the facular model of device 10 by amplification laser output 200, forms the first order and amplify laser；
The seed light output end of the laser travelling-wave amplifier 10 of the second level receives the first order and amplifies laser, i.e. the first order is amplified
Seed light of the laser as the laser travelling-wave amplifier 10 of the second level.The first order is amplified laser traveling wave of the laser in the second level and is amplified
Amplification process in device 10, it is identical as amplification process of the seed light in the laser travelling-wave amplifier 10 of the first order, herein no longer
It repeats.The first order is amplified laser and is exported after the laser travelling-wave amplifier 10 of the second level completes second level amplification, and target is obtained
The laser of amplifying parameters.
The concatenated situation of three laser travelling-wave amplifiers 10 is shown in Fig. 3, three laser travelling-wave amplifiers 10 are concatenated
Situation is similar to two concatenated situations of laser travelling-wave amplifier 10, and difference is only that seed light is amplified by three-level altogether.
It will be appreciated by those skilled in the art that in other embodiments, the quantity of laser travelling-wave amplifier 10 can also be
Four, five, six ... particular numbers the amplification factors of needs, root are determined according to seed optical parameter and target laser parameter
The quantity of the laser travelling-wave amplifier 10 of needs is determined according to the amplification factor of needs.
Embodiment 2:
Laser travelling-wave amplifier 10 in embodiment 1, in two end faces of each laser crystal, at least one end face is equipped with
Pump light incoming end, it will be able to realize that seed light is amplified twice in single laser travelling-wave amplifier 10 and coaxially exported.
That is, the first pump light incoming end at 510 both ends of first laser crystal, the second pump light incoming end is arranged in
Any of can cancel；In the third pump light incoming end at 520 both ends of second laser crystal, the 4th pump light incoming end
Any one can cancel.Correspondingly, the coupling convergent lens group for the pump light incoming end setting being cancelled can also be cancelled.
Fig. 4 is the first structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 2, cancels the first pumping soft exchange
End, the first coupling convergent lens group.
Fig. 5 is second of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 2, cancels the second pumping soft exchange
End, the second coupling convergent lens group.
Fig. 6 is the third structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 2, cancels third and pumps soft exchange
End, third couple convergent lens group.
Fig. 7 is the 4th kind of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 2, cancels the 4th pumping soft exchange
End, the 4th coupling convergent lens group.
Fig. 8 is the 5th kind of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 2, cancels the second pumping soft exchange
The 4th pump light incoming end, the 4th coupling convergent lens group are cancelled in end, the second coupling convergent lens group.
Fig. 9 is the 6th kind of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 2, cancels the second pumping soft exchange
End, the second coupling convergent lens group, cancel third pump light incoming end, third couples convergent lens group.
Embodiment 3:
Laser travelling-wave amplifier 10 in embodiment 1, in entirely amplification optical path, first laser crystal 510 and second swashs
At least one in luminescent crystal 520 can be such that seed light is amplified and coaxially export, and two of a laser crystal
At least one end face is equipped with pump light incoming end in end face.
That is, one in first laser crystal 510 or second laser crystal 520 can cancel, what is be cancelled swashs
The pump light incoming end of two end faces of luminescent crystal is accordingly cancelled, and two end faces of the laser crystal being arranged in amplification optical path
Corresponding pump light incoming end can cancel one.Correspondingly, the coupling convergent lens for the pump light incoming end setting being cancelled
Group can also be cancelled.
Figure 10 is the first structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 3, cancels second laser crystal
520, cancel third pump light incoming end, third couples convergent lens group, the 4th pump light incoming end of cancellation, the 4th coupling aggregation
Lens group.
Figure 11 is second of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 3, cancels second laser crystal
520, cancel the second pump light incoming end, the second coupling convergent lens group, cancels third pump light incoming end, third coupling aggregation
Lens group cancels the 4th pump light incoming end, the 4th coupling convergent lens group.
Figure 12 is the third structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 3, cancels second laser crystal
520, cancel the first pump light incoming end, the first coupling convergent lens group, cancels third pump light incoming end, third coupling aggregation
Lens group cancels the 4th pump light incoming end, the 4th coupling convergent lens group.
Figure 13 is the 4th kind of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 3, cancels first laser crystal
510, cancel the first pump light incoming end, the first coupling convergent lens group, cancels the second pump light incoming end, the second coupling aggregation
Lens group.
Figure 14 is the 5th kind of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 3, cancels first laser crystal
510, cancel the first pump light incoming end, the first coupling convergent lens group, cancels the second pump light incoming end, the second coupling aggregation
Lens group cancels the 4th pump light incoming end, the 4th coupling convergent lens group.
Figure 15 is the 6th kind of structural schematic diagram of laser travelling-wave amplifier 10 in embodiment 3, cancels first laser crystal
510, cancel the first pump light incoming end, the first coupling convergent lens group, cancels the second pump light incoming end, the second coupling aggregation
Lens group cancels third pump light incoming end, third couples convergent lens group.
It will be apparent to a skilled person that amplifying the quantity of optical path in the same laser travelling-wave amplifier 10
It can increase, multiple amplification optical paths are successively connected, and the quantity of laser crystal or pump light incoming end in each amplification optical path can
With provided in embodiment 1 amplification optical path on the basis of carry out embodiment 2 or reduction described in embodiment 3.
The foregoing is merely preferred embodiment of the present application, are not intended to limit this application, for the skill of this field
For art personnel, various changes and changes are possible in this application.Within the spirit and principles of this application, made any to repair
Change, equivalent replacement, improvement etc., should be included within the scope of protection of this application.
Claims (10)
1. one kind can cascade laser travelling-wave amplifier, which is characterized in that including seed light input end, pumping light input end, put
Big laser output and amplification optical path, the seed light input end and the amplification laser output are coaxially disposed, from described
The seed light of seed light input end input and the pump light inputted from the pumping light input end are by amplification optical path amplification
It is exported afterwards by the amplification laser output.
2. according to claim 1 can cascade laser travelling-wave amplifier, which is characterized in that the amplification optical path includes the
One semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and first laser crystal, it is described
Laser travelling-wave amplifier includes the first pumping light input end, and the pump light inputted from the first pumping light input end passes through described
The first laser crystal is injected after first semi-transparent semi-reflecting lens；The seed light inputted from the seed light input end is radiated at described
It on first semi-transparent semi-reflecting lens, is incident on after the reflection of first semi-transparent semi-reflecting lens in the first laser crystal, from institute
The light for stating the outgoing of first laser crystal successively passes through second semi-transparent semi-reflecting lens, the third semi-transparent semi-reflecting lens, described the
It is exported after the reflection of four semi-transparent semi-reflecting lens by the amplification laser output.
3. according to claim 1 can cascade laser travelling-wave amplifier, which is characterized in that the amplification optical path includes the
One semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and first laser crystal, it is described
Laser travelling-wave amplifier includes the first pumping light input end and the second pumping light input end, and it is defeated to pump light input end from described first
The pump light entered injects the first laser crystal after passing through first semi-transparent semi-reflecting lens, from the second pumping light input end
The pump light of input injects the first laser crystal after passing through second semi-transparent semi-reflecting lens；It is defeated from the seed light input end
The seed light entered is radiated on first semi-transparent semi-reflecting lens, is incident on after the reflection of first semi-transparent semi-reflecting lens described
In first laser crystal, the light being emitted from the first laser crystal successively passes through second semi-transparent semi-reflecting lens, described the
Three semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens reflection after by the amplification laser output export.
4. according to claim 1 can cascade laser travelling-wave amplifier, which is characterized in that the amplification optical path includes the
One semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and second laser crystal, it is described
Laser travelling-wave amplifier includes third pumping light input end, and the pump light inputted from third pumping light input end passes through described
The second laser crystal is injected after third semi-transparent semi-reflecting lens；The seed light inputted from the seed light input end successively passes through institute
State the first semi-transparent semi-reflecting lens, second semi-transparent semi-reflecting lens, the third semi-transparent semi-reflecting lens reflection after be incident on described second swash
In luminescent crystal, the light being emitted from the second laser crystal is after the reflection of the 4th semi-transparent semi-reflecting lens by the amplification
Laser output output.
5. according to claim 1 can cascade laser travelling-wave amplifier, which is characterized in that the amplification optical path includes the
One semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens and second laser crystal, it is described
Laser travelling-wave amplifier includes third pumping light input end and the 4th pumping light input end, and it is defeated to pump light input end from the third
The pump light entered injects the second laser crystal after passing through the third semi-transparent semi-reflecting lens, from the 4th pumping light input end
The pump light of input injects the second laser crystal after passing through the 4th semi-transparent semi-reflecting lens；It is defeated from the seed light input end
It is anti-that the seed light entered successively passes through first semi-transparent semi-reflecting lens, second semi-transparent semi-reflecting lens, the third semi-transparent semi-reflecting lens
It is incident on after penetrating in the second laser crystal, the light being emitted from the second laser crystal is semi-transparent semi-reflecting by the described 4th
It is exported after the reflection of mirror by the amplification laser output.
6. according to claim 1 can cascade laser travelling-wave amplifier, which is characterized in that the amplification optical path includes the
One semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, first laser crystal and second
Laser crystal, the laser travelling-wave amplifier includes that the first pumping light input end and third pump light input end, from described first
The pump light of pumping light input end input injects the first laser crystal after passing through first semi-transparent semi-reflecting lens, from described the
The pump light of three pumping light input end inputs injects the second laser crystal after passing through the third semi-transparent semi-reflecting lens；From described
The seed light of seed light input end input is radiated on first semi-transparent semi-reflecting lens, by the anti-of first semi-transparent semi-reflecting lens
It is incident on after penetrating in the first laser crystal, it is semi-transparent that the light being emitted from the first laser crystal successively passes through described second
It is incident in the second laser crystal after semi-reflective mirror, third semi-transparent semi-reflecting lens reflection, goes out from the second laser crystal
The light penetrated is exported after the reflection of the 4th semi-transparent semi-reflecting lens by the amplification laser output.
7. according to claim 1 can cascade laser travelling-wave amplifier, which is characterized in that the amplification optical path includes the
One semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, first laser crystal and second
Laser crystal, the laser travelling-wave amplifier includes the first pumping light input end and the 4th pumping light input end, from described first
The pump light of pumping light input end input injects the first laser crystal after passing through first semi-transparent semi-reflecting lens, from described the
The pump light of four pumping light input end inputs injects the second laser crystal after passing through the 4th semi-transparent semi-reflecting lens；From described
The seed light of seed light input end input is radiated on first semi-transparent semi-reflecting lens, by the anti-of first semi-transparent semi-reflecting lens
It is incident on after penetrating in the first laser crystal, it is semi-transparent that the light being emitted from the first laser crystal successively passes through described second
It is incident in the second laser crystal after semi-reflective mirror, third semi-transparent semi-reflecting lens reflection, goes out from the second laser crystal
The light penetrated is exported after the reflection of the 4th semi-transparent semi-reflecting lens by the amplification laser output.
8. according to claim 1 can cascade laser travelling-wave amplifier, which is characterized in that the amplification optical path includes the
One semi-transparent semi-reflecting lens, the second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens, the 4th semi-transparent semi-reflecting lens, first laser crystal and second
Laser crystal, the laser travelling-wave amplifier are defeated including the first pumping light input end, the second pumping light input end, third pump light
Enter end, the 4th pumping light input end, it is semi-transparent semi-reflecting that the pump light inputted from the first pumping light input end passes through described first
The first laser crystal is injected after mirror, the pump light inputted from the second pumping light input end passes through described second semi-transparent half
The first laser crystal is injected after anti-mirror, it is semi-transparent that the pump light inputted from third pumping light input end passes through the third
The second laser crystal is injected after semi-reflective mirror, the pump light inputted from the 4th pumping light input end passes through the described 4th half
The second laser crystal is injected after saturating semi-reflective mirror；The seed light inputted from the seed light input end is radiated at described the first half
On saturating semi-reflective mirror, it is incident on after the reflection of first semi-transparent semi-reflecting lens in the first laser crystal, from described first
The light of laser crystal outgoing is successively incident on institute after second semi-transparent semi-reflecting lens, third semi-transparent semi-reflecting lens reflection
State in second laser crystal, from the second laser crystal be emitted light after the reflection of the 4th semi-transparent semi-reflecting lens by
The amplification laser output output.
9. according to claim 2-8 is described in any item can cascade laser travelling-wave amplifier, which is characterized in that each pumping
Light input end is provided with coupling focusing lens group, and it is brilliant that pump light enters corresponding laser after the coupling focusing lens group
Body.
10. according to claim 2-8 is described in any item can cascade laser travelling-wave amplifier, which is characterized in that the amplification
Laser output is provided with output Shaping lens group, and the light of the 4th semi-transparent semi-reflecting lens reflection is saturating by the output Shaping
It is exported after microscope group by the amplification laser output.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US20210219408A1 (en) * | 2020-01-09 | 2021-07-15 | Samsung Electronics Co., Ltd. | Laser beam delivery apparatus for extreme ultra violet light source |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20210219408A1 (en) * | 2020-01-09 | 2021-07-15 | Samsung Electronics Co., Ltd. | Laser beam delivery apparatus for extreme ultra violet light source |
| US11778719B2 (en) * | 2020-01-09 | 2023-10-03 | Samsung Electronics Co., Ltd. | Laser beam delivery apparatus for extreme ultra violet light source |
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