CN110459632B - Flexible polarized light detector based on core-shell nanowire and preparation method - Google Patents

Flexible polarized light detector based on core-shell nanowire and preparation method Download PDF

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CN110459632B
CN110459632B CN201910771937.1A CN201910771937A CN110459632B CN 110459632 B CN110459632 B CN 110459632B CN 201910771937 A CN201910771937 A CN 201910771937A CN 110459632 B CN110459632 B CN 110459632B
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core
flexible
polarized light
light detector
shell
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CN110459632A (en
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肖梦琪
魏钟鸣
文宏玉
邓惠雄
宗易昕
李京波
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Zhejiang Xinke Semiconductor Co Ltd
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Institute of Semiconductors of CAS
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Abstract

A flexible polarized light detector based on core-shell nanowires and a preparation method thereof are provided, wherein the flexible polarized light detector comprises a flexible substrate; the core-shell nanowire is positioned on the flexible substrate and used as an active area of the flexible polarized light detector; and the source electrode and the drain electrode are both arranged on the flexible substrate and are respectively arranged at two ends of the core-shell nanowire. The invention uses the nanometer line of the heterogeneous structure of nucleocapsid as the active area, the heterogeneous structure has improved the polarization ratio to a certain extent than the ordinary nanometer line, has improved the degree of sensitiveness of the flexible polarization detector; the polarized light detection wavelength of the linear polarization detector of the core-shell nanowire can be changed by changing the thicknesses of the core part and the shell part, so that the effect of testing wavelength adjustability is achieved; simple operation on the process and further promotes the integration development.

Description

Flexible polarized light detector based on core-shell nanowire and preparation method
Technical Field
The invention relates to the technical field of photoelectric detection preparation, in particular to a core-shell nanowire-based flexible polarized light detector and a preparation method thereof.
Background
The optical detection plays an important role in a plurality of fields such as military industry, medical treatment, geography and the like, and is also indispensable in daily life of people, but with the development of the photoelectric technology, the information quantity of common optical detection cannot support the requirements of some fields. Light in nature is mostly provided with polarization information through atmospheric scattering, refraction and reflection, any target can also show polarization characteristics determined by own characteristics and basic laws of optics through reflection and emission of electromagnetic radiation, information detected by polarized light is mined out to supplement and expand information detected by common light, and the polarized light of a detection line is the core of practical application in the fields of polarized light and photoelectrons.
At present, polarization detection equipment is applied to the fields of geological survey and the like, but under the promotion of moore's law, electronic devices gradually tend to be miniaturized and have high integration degree, so that research on low-dimensional semiconductor materials as linearly polarized light detectors becomes a hot spot concerned by people, and the flexible characteristics of the low-dimensional materials enable the linearly polarized light detectors to be manufactured on flexible substrates and applied to aspects of wearable photoelectric equipment and the like.
In recent years, two-dimensional semiconductor materials having linearly polarized light absorption anisotropy have been reported, but it is difficult to synthesize two-dimensional semiconductor materials in a large area, the number of two-dimensional semiconductor materials exhibiting polarization characteristics is limited, and problems such as complicated two-dimensional heterostructure transfer lead to difficulty in practical application. One-dimensional nanowire structures represented by nanowires such as carbon nanotubes, gallium nitride, and zinc oxide have also been reported, and the polarization characteristics depend on the properties and size of the material itself, so the detection spectral range is limited to a certain extent.
Disclosure of Invention
In view of the above, one of the main objectives of the present invention is to provide a flexible polarization photodetector based on core-shell nanowires and a manufacturing method thereof, so as to at least partially solve at least one of the above technical problems.
In order to achieve the above object, as an aspect of the present invention, there is provided a core-shell nanowire-based flexible polarization photodetector, including:
a flexible substrate;
the core-shell nanowire is positioned on the flexible substrate and used as an active area of the flexible polarized light detector; and
and the source electrode and the drain electrode are both arranged on the flexible substrate and are respectively arranged at two ends of the core-shell nanowire.
As another aspect of the present invention, there is also provided a method for manufacturing the flexible polarized light detector, including the following steps:
preparing semiconductor core-shell nanowires on a flexible substrate;
preparing a source electrode and a drain electrode on a flexible substrate;
and packaging the integral structure formed in the step to obtain the flexible polarized light detector.
According to the technical scheme, the core-shell nanowire-based flexible polarized light detector and the preparation method thereof have at least one of the following beneficial effects:
(1) the nano wire of the core-shell heterostructure is used as an active region, and compared with the common nano wire, the heterostructure improves the polarization ratio to a certain extent, and improves the sensitivity of a linear polarization detection device;
(2) the core part of the core-shell nanowire is antimony triiodide, and the waveband with high optical anisotropic absorption is in the visible light range; the shell part is antimony trioxide, has no anisotropic absorption, the absorption waveband of the shell part is also in the visible light range, particularly, the heterostructure expands the absorption waveband of polarized light to near ultraviolet, the polarized light detection wavelength of the flexible polarization detector of the core-shell nanowire can be changed by changing the thicknesses of the core part and the shell part, and the effect of testing wavelength adjustability is achieved;
(3) the core-shell nanowire is prepared on the PET flexible substrate, so that the performance of the photoelectric detector can be ensured to a certain extent, and the core-shell nanowire is favorable for application in the field of flexible devices such as wearable equipment;
(4) the preparation method of the flexible polarized light detector based on the core-shell nanowire is simple in process and easy to operate, and further promotes the development of integration.
Drawings
FIG. 1 is a schematic structural diagram of a core-shell nanowire-based flexible polarized photodetector according to an embodiment of the present disclosure;
FIG. 2 is a schematic energy band diagram of a core-shell heterostructure of a flexible polarized photodetector based on core-shell nanowires according to an embodiment of the disclosure;
fig. 3 is a core-shell nanowire-based flexible polarized photodetector according to an embodiment of the present disclosure.
Description of reference numerals:
11. a source electrode; 12. a drain electrode; 13. core-shell nanowires; 14. a PET flexible substrate; 15. electrons; 16. a cavity; 17. near ultraviolet light or visible linear polarized light; 18. (ii) a shell antimony trioxide; 19. antimony triiodide in the core.
Detailed Description
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
The invention discloses a flexible polarized light detector based on a core-shell nanowire, which comprises:
a flexible substrate;
the core-shell nanowire is positioned on the flexible substrate and used as an active area of the flexible polarized light detector; and
and the source electrode and the drain electrode are both arranged on the flexible substrate and are respectively arranged at two ends of the core-shell nanowire.
The testable wave bands of the flexible polarized light detector comprise a visible light wave band and a near ultraviolet light wave band;
the light detected by the flexible polarized light detector is linearly polarized light.
Wherein the material of the core portion of the core-shell nanowire has light absorption anisotropy.
The core-shell nanowire is of a one-dimensional heterostructure;
wherein, the core part of the core-shell nanowire is made of antimony triiodide; the shell part of the core-shell nanowire is made of antimony trioxide.
Wherein the polarization detection sensitivity of the flexible polarized light detector is adjusted by varying the thickness of the core portion and the shell portion.
Wherein, the flexible substrate is made of materials including but not limited to PET or PEN;
wherein, the source electrode and the drain electrode materials include, but are not limited to, gold or chromium.
The invention also discloses a preparation method of the flexible polarized light detector, which comprises the following steps:
preparing semiconductor core-shell nanowires on a flexible substrate;
preparing a source electrode and a drain electrode on a flexible substrate;
and packaging the integral structure formed in the step to obtain the flexible polarized light detector.
The source electrode and the drain electrode are respectively arranged at two ends of the core-shell nanowire;
the packaging method for packaging the integral structure comprises the following steps: and leading out the source electrode and the drain electrode by adopting an aluminum wire bonding machine.
The preparation of the source electrode and the drain electrode on the flexible substrate specifically comprises the following steps:
spin coating a mask material on the flexible substrate;
designing an electrode plate, and etching electrode areas of the source electrode and the drain electrode on the mask material;
evaporating the source electrode and the drain electrode on the electrode area;
and dissolving the mask material to obtain the source electrode and the drain electrode.
Wherein, the mask is made of materials including but not limited to PMMA or SML;
wherein, the electrode areas of the source electrode and the drain electrode are etched by adopting an electron beam etching method;
wherein, the source electrode and the drain electrode are deposited by adopting a magnetron sputtering method;
wherein the mask material is sequentially cleaned with acetone, ethanol and deionized water.
According to an exemplary aspect of the present disclosure, there is provided a core-shell nanowire-based flexible polarization photodetector, including:
the device comprises a source electrode, a drain electrode, a core-shell nanowire and a flexible substrate;
the source electrode, the core-shell nanowire and the drain electrode are sequentially located above the flexible substrate from left to right.
In some disclosed embodiments, the testable wavelength bands of the linearly polarized light detector (i.e. the flexible polarized light detector) are visible light and near ultraviolet.
In some disclosed embodiments, the material of the core portion in the core-shell nanowires has light absorption anisotropy.
In some disclosed embodiments, the polarization detection sensitivity of the flexible polarization detector of the core-shell nanowires is adjusted by varying the thickness of the core and shell portions.
In some disclosed embodiments, the core portion of the core-shell nanowires is antimony triiodide and the shell portion is antimony trioxide.
In some disclosed embodiments, the source electrode and the drain electrode are made of materials with better conductivity, such as metal gold and chromium.
In some disclosed embodiments, the flexible substrate material is a PET (polyethylene terephthalate) plastic sheet or PEN.
According to another embodiment of the disclosure, a method for preparing a core-shell nanowire-based flexible polarized photodetector is provided, which includes the following steps:
preparing semiconductor core-shell nanowires on a PET flexible substrate as an active region;
preparing a source electrode and a drain electrode on the PET flexible substrate at the positions of the left end and the right end of the active core-shell nanowire;
and packaging the integral structure formed by the core-shell nanowire active region, the drain electrode, the source electrode and the PET flexible substrate to obtain the core-shell nanowire-based linearly polarized light detector.
In some disclosed embodiments, preparing a source electrode and a drain electrode on the PET flexible substrate at the left and right ends of the active core-shell nanowire includes:
spin-coating a mask material on the PET flexible substrate at the left end and the right end of the active core-shell nanowire;
designing an electrode plate, and etching electrode areas of the source electrode and the drain electrode on the mask material;
evaporating the source electrode and the drain electrode on the electrode area;
and dissolving the mask material to obtain the source electrode and the drain electrode.
In some embodiments disclosed, the mask material is a resist material such as PMMA, SML, etc., and the electrode regions of the source electrode and the drain electrode are etched by using an electron beam etching method.
In some embodiments disclosed, the source and drain electrodes are deposited using a magnetron sputtering process.
In some disclosed embodiments, the mask material is sequentially cleaned with acetone, ethanol, and deionized water.
In some disclosed embodiments, the core-shell nanowire active region, the source electrode, the drain electrode and the PET flexible substrate form an integral structure for packaging, and an aluminum wire ball bonding machine is adopted to lead out the electrodes.
The technical solution of the present invention is further illustrated by the following specific embodiments in conjunction with the accompanying drawings. Certain embodiments of the present disclosure will now be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the disclosure are shown. Indeed, various embodiments of the disclosure may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will satisfy applicable legal requirements.
The core-shell nanowire is a one-dimensional heterostructure, has high detection sensitivity on near ultraviolet and visible band linearly polarized light, is prepared on a flexible substrate, has the characteristic of more prominent one-dimensional structure, is simple in preparation step and easy to operate, and is expected to promote the development of the wearable field.
Specifically, the schematic structural diagram is shown in fig. 1:
a source electrode 11, a drain electrode 12, a core-shell nanowire 13 and a flexible substrate 14;
the source electrode 11, the core-shell nanowire 13 and the drain electrode 12 are sequentially located above the flexible substrate 14 from left to right.
The following describes each part of the core-shell nanowire-based flexible polarization photodetector in detail.
The source electrode 11 and the drain electrode 12 are both made of metal material gold, and the work function of gold is about 1eV below the Fermi level of the two semiconductor materials in the core-shell nanowire, so that the core-shell nanowire has good conductivity and contact.
The flexible substrate 14 is made of a PET plastic flexible substrate material, has strong light transmittance and good flexibility, has good depending capability on active region materials, has low cost, and can be made into different shapes according to requirements.
The core part of the active area material core-shell nanowire 13 is antimony triiodide 19, and the shell part is antimony trioxide 18. Wherein the forbidden band width of the antimony triiodide 19 is 2.3eV, the forbidden band width of the antimony trioxide 18 is 3eV, wherein according to the formula λ 1.24/Eg (μm), it can be found that the absorption range of the antimony triiodide 19 is in the visible light range, the absorption of the antimony trioxide 18 is also in the visible part close to ultraviolet, and the antimony triiodide 19 has structural symmetry break due to the higher structural symmetry of the antimony triiodide 18, so that the anisotropy of the polarized light absorption is mainly caused by the antimony triiodide 19; actually, the antimony triiodide 19 is easily oxidized in the air, and the antimony trioxide 18 of the shell part has a good protection effect on the antimony triiodide 19 of the core part and can stably exist in the air; the interface of the nuclear shell heterostructure has stress action, and the slight difference of absorption wave bands is caused according to the difference of the nuclear shell thickness, so that the light detection range of the linearly polarized light detector can be finely adjusted.
The specific photoelectric conversion principle is shown in fig. 2, near ultraviolet or visible linear polarized light 17 irradiates on the core-shell nanowire 13, and electrons in the material are excited to a conduction band from a valence band. Due to the structural anisotropy of the antimony triiodide 19, the electrical information is greatly different along with the different included angles between the linearly polarized light 17 and the core-shell nanowire 13, and electrons are transmitted to the drain electrode 12 through the antimony trioxide 18.
In the present embodiment, the core-shell nanowire 11 has a length of 30 μm, a width of 100nm, and a height of 100nm, and the thickness of the source electrode 11 and the drain electrode 12 is 40 nm.
So far, the introduction of the core-shell nanowire-based flexible polarized photodetector in the first embodiment of the present disclosure is completed.
In a second embodiment of the present disclosure, a method for manufacturing a core-shell nanowire-based flexible polarized light detector is provided, and fig. 3 is a flowchart of a method for manufacturing a core-shell nanowire-based flexible polarized light detector, including the following steps:
s21: preparing semiconductor core-shell nanowires 13 on a PET flexible substrate 14 as an active region;
s22: preparing a source electrode 11 and a drain electrode 12 on the PET flexible substrate 14 at the positions of the left end and the right end of the active core-shell nanowire 13;
s23: and packaging the integral structure formed by the active region of the core-shell nanowire 13, the source electrode 11, the drain electrode 12 and the PET flexible substrate 14 to obtain the core-shell nanowire-based flexible polarized light detector.
In the step S22, the method for preparing the source electrode 11 and the drain electrode 12 on the PET flexible substrate 11 at the left and right ends of the active core-shell nanowire 13 includes:
uniformly spin-coating a mask material on the PET flexible substrate 11 at the positions of the left end and the right end of the active core-shell nanowire 13 by using a spin coater;
designing an electrode plate, designing the plate according to the requirements of a user, making a single device or an array device, and etching electrode areas of the source electrode 11 and the drain electrode 12 on the mask material;
evaporating the source electrode 11 and the drain electrode 12 on the electrode region by using gold;
the mask material is removed, resulting in the source electrode 11 and the drain electrode 12.
And packaging the device, and leading out the source and drain electrodes.
In the above steps, the mask material is PMMA, and the electrode areas of the source electrode and the drain electrode are etched by adopting an electron beam etching method; depositing the primary electrode and the drain electrode by a magnetron sputtering method; sequentially cleaning the mask material by using acetone, ethanol and deionized water; and leading out the gold electrode by adopting an aluminum wire bonding machine to package the gold electrode.
Up to this point, the present embodiment has been described in detail with reference to the accompanying drawings. From the above description, those skilled in the art should clearly recognize the present invention.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (15)

1. A core-shell nanowire-based flexible polarized photodetector comprising:
a flexible substrate;
the core-shell nanowire is positioned on the flexible substrate and used as an active area of the flexible polarized light detector, and the core part of the core-shell nanowire is made of antimony triiodide; the shell part of the core-shell nanowire is made of antimony trioxide; and
and the source electrode and the drain electrode are both arranged on the flexible substrate and are respectively arranged at two ends of the core-shell nanowire.
2. The flexible polarized light detector of claim 1,
the testable wave bands of the flexible polarized light detector comprise a visible light wave band and a near ultraviolet light wave band.
3. The flexible polarized light detector of claim 1,
the light detected by the flexible polarized light detector is linearly polarized light.
4. The flexible polarized light detector of claim 1,
the material of the core portion of the core-shell nanowire has light absorption anisotropy.
5. The flexible polarized light detector of claim 1,
the core-shell nanowire is of a one-dimensional heterostructure.
6. The flexible polarized light detector of claim 1,
the polarization detection sensitivity of the flexible polarized light detector is adjusted by varying the thickness of the core portion and the shell portion.
7. The flexible polarized light detector of claim 1,
the flexible substrate is made of PET or PEN;
the source electrode and drain electrode materials both comprise gold or chromium.
8. A method of making a flexible polarized light detector according to any of claims 1 to 7 comprising the steps of:
preparing semiconductor core-shell nanowires on a flexible substrate;
preparing a source electrode and a drain electrode on a flexible substrate;
and packaging the integral structure formed in the step to obtain the flexible polarized light detector.
9. The method according to claim 8,
and the source electrode and the drain electrode are respectively arranged at two ends of the core-shell nanowire.
10. The method according to claim 8,
the packaging method for packaging the integral structure comprises the following steps: and leading out the source electrode and the drain electrode by adopting an aluminum wire bonding machine.
11. The method according to claim 8,
preparing a source electrode and a drain electrode on the flexible substrate, which specifically comprises:
spin coating a mask material on the flexible substrate;
designing an electrode plate, and etching electrode areas of the source electrode and the drain electrode on the mask material;
evaporating the source electrode and the drain electrode on the electrode area;
and dissolving the mask material to obtain the source electrode and the drain electrode.
12. The production method according to claim 11,
the mask is made of PMMA.
13. The production method according to claim 11,
and the electrode areas of the source electrode and the drain electrode are etched by adopting an electron beam etching method.
14. The production method according to claim 11,
the source electrode and the drain electrode are deposited by adopting a magnetron sputtering method.
15. The production method according to claim 11,
and sequentially cleaning the mask material by using acetone, ethanol and deionized water.
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