CN110456433A - Laser random scatter material and its design method - Google Patents

Laser random scatter material and its design method Download PDF

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Publication number
CN110456433A
CN110456433A CN201910651524.XA CN201910651524A CN110456433A CN 110456433 A CN110456433 A CN 110456433A CN 201910651524 A CN201910651524 A CN 201910651524A CN 110456433 A CN110456433 A CN 110456433A
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China
Prior art keywords
nano brick
cellular construction
light
array
random scatter
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Pending
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CN201910651524.XA
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Chinese (zh)
Inventor
李子乐
付娆
邓娟
戴琦
梁聪玲
郑国兴
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Wuhan University WHU
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Wuhan University WHU
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Priority to CN201910651524.XA priority Critical patent/CN110456433A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0012Optical design, e.g. procedures, algorithms, optimisation routines
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/02Diffusing elements; Afocal elements
    • G02B5/0205Diffusing elements; Afocal elements characterised by the diffusing properties
    • G02B5/021Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures
    • G02B5/0215Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures the surface having a regular structure

Abstract

The invention discloses a kind of laser random scatter material and its design methods, incident laser can be shaped as the light outgoing of total space random distribution and any light distribution by the laser random scatter material, the intensity of luminous point at the spatial position and the position of emergent light can arbitrarily be regulated and controled, realize random scatter.The laser random scatter material is made of super surface array structure, include the silicon nano brick array etched in silica substrate and substrate, with it is simple and compact for structure, small in size, light-weight, with existing silicon-based semiconductor technical compatibility in order to the advantages such as highly integrated, this material unmanned plane night take photo by plane floor light, security protection, panorama camera and in terms of have potential application.

Description

Laser random scatter material and its design method
Technical field
The present invention relates to micronano optical technical field, in particular to a kind of laser random scatter material and its design methods.
Background technique
Unmanned plane be manipulated by radio robot or airborne computer tele-control system it is not manned fly Row device, structure is simple, use cost is low, easy to operate, strong flexibility, stability are good, be widely applied aeroplane photography, Manage the fields such as mapping, agricultural plant protection, power-line patrolling, environmental monitoring and police investigation.
Existing unmanned plane does not have illuminating effect generally, since illumination deficiency causes aerial photographing effect to be paid no attention to when night takes photo by plane Think, shoots fogging image.Flash lamp can be placed on unmanned plane and realize the illumination taken photo by plane of night, but flash lamp, battery and drawn The weight of device is dodged, so that unmanned plane continuation of the journey greatly declines, and lighting apparatus can not be changed according to the view direction of camera and be shone Area pellucida domain.
Summary of the invention
In order to solve defect of the existing technology, the purpose of the present invention is to provide a kind of laser random scatter material and Its design method realizes total space random scatter using super surface texture, makes unmanned plane that can realize comprehensive night light filling, night It takes photo by plane and the functions such as night search.
To achieve the above object, one aspect of the present invention provides a kind of laser random scatter material, it is characterised in that: the material Material is made of super surface array structure, the silicon nano brick array comprising silica substrate and etching on the substrate, described Nano brick array is by Mx×MyThe consistent only different nano brick cellular construction of the deflection arranged at equal intervals on the direction x, y of a size Composition.
Another aspect of the present invention provides a kind of design method of laser random scatter material, it is characterised in that:
The following steps are included:
(1) it determines operation wavelength λ, optimizes the dimensional parameters of nano brick cellular construction, optimization tool by electromagnetic simulation software There is semi-transparent semi-reflecting dichroism while the nano brick cellular construction of half-wave plate can be equivalent to, so that the circularly polarized light under operation wavelength When normal incidence to the nano brick cellular construction, the reflectivity of opposite circular polarization light and one group of ruler that transmitance is of substantially equal are obtained Very little parameter;The dimensional parameters of the nano brick cellular construction include length L, width W, height H and the cellular construction base of nano brick Bottom side length C;
(2) assume that nano brick array includes Mx×MyA sub-wavelength nano brick cellular construction, heart septum is C in cellular construction, When plane wave normal incidence, the diffraction time quantity that transmissive Spatial and reflection space generate respectively is Mx×MyIt is a;The super surface battle array Array structure is made of the nano brick array of substrate and etching on the substrate;Heart septum C≤λ/2 in the cellular construction;
(3) randomly selecting N number of level in traveling wave is target diffraction time, N≤Mx×My;The N number of target diffraction of random arrangement The light distribution of level, by the phase distribution matrix φ of grey level compensation and the optimization nano brick array of G-S algorithm, by relationship The deflection arrangement matrix Φ of nano brick array is calculated in the Φ of formula φ=2;
(4) by Mx×MyA size is consistent, deflection exists according to the nano brick cellular construction of deflection arrangement matrix Φ arrangement X, arranged at equal intervals on the direction y constitute laser random scatter material.
Preferably, operation wavelength λ selects 633nm in the step (1);When operation wavelength λ selects 633nm, The length of nano brick is 230nm, width 124nm, is highly 277nm, and cellular construction substrate side length is 300nm.
Further, the substrate in the step (2) selects silica, and the nano brick cellular construction selects silicon nanometer Brick.
The invention has the advantages that and the utility model has the advantages that laser random scatter material of the present invention and its design method, the material Incident laser can be shaped as the light outgoing of total space random distribution and any light distribution by material, can arbitrarily regulate and control emergent light The intensity of luminous point at spatial position and the position, realizes random scatter.And the laser random scatter material has structure simple It is compact, small in size, light-weight, be easy to the advantages such as highly integrated, greatly reduce the weight bearing of unmanned plane, make unmanned plane that can realize night Between light filling, night take photo by plane and the functions such as night search, and other can be expanded to beacon, buoy etc., omnibearing observation is needed to indicate Scene.
Detailed description of the invention
Fig. 1 is the schematic diagram of nano brick cellular construction in the present invention;
Fig. 2 is the transmission and reflection efficiency of the nano brick cellular construction designed in the present invention;
Fig. 3 is in the present invention by Mx×MyA size unanimously only the different nano brick cellular construction of deflection on the direction x, y Arranged at equal intervals, the schematic diagram of the nano brick array of composition;
Fig. 4 is the normalization surface of intensity distribution of the transmissive Spatial designed in the present invention;
Fig. 5 is in the present invention by the phase distribution schematic diagram of grey level compensation and the nano brick array of G-S algorithm optimization.
Specific embodiment
The present invention is further elaborated to the present invention in the following with reference to the drawings and specific embodiments.
1, optimization design has the nano brick cellular construction of semi-transparent semi-reflecting dichroism and half-wave plate function.
It is illustrated so that nano brick cellular construction is cuboid as an example below.The length of nano brick cellular construction is Sub-wavelength.
As shown in Figure 1, establishing xyz rectangular coordinate system, the longitudinal direction of nano brick cellular construction represents long axis, short side direction Short axle is represented, Φ is the angle between the long axis and x-axis of nano brick cellular construction, the i.e. deflection (Φ of nano brick cellular construction Value range be 0 °~180 °), as shown in Figure 1.
Optimize the dimensional parameters of nano brick cellular construction, the height including nano brick cellular construction 1 by electromagnetic simulation software H, length L, width W and cellular construction substrate side length C are spent, as shown in Figure 1, making operation wavelength circularly polarized light normal incidence to nanometer When block assembly structure, opposite circular polarization light reflectivity and the of substantially equal packet size parameter of transmitance are obtained, that is, after optimizing Semi-transparent semi-reflecting light splitting function may be implemented in the dimensional parameters of nano brick cellular construction, the nano brick cellular construction after optimization design Energy.Its function can be equivalent to half-wave plate when nano brick cellular construction works, and can use Jones matrixCarry out table Show, when incident light is rotatory polarizationWhen (left circularly polarized light takes "+", and right-circularly polarized light takes "-"), by nano brick list Emergent light after meta structure may be expressed as:
By formula (1) it is found that emergent light is still circularly polarized light, but rotation direction with incident light on the contrary, and attached the phase of 2 Φ and prolong Late, i.e. phase-delay quantity φ is 2 times of nano brick deflection Φ.Therefore emergent light can be realized by changing the deflection of nano brick Phase adjusted, and then emergent light is projected to the total space 360 ° of any directions outgoing.
2, the Signal Phase Design method of nano brick array.
Nano brick array includes Mx×MyA sub-wavelength nano brick cellular construction, heart septum is C in cellular construction, works as plane When wave normal incidence, the diffraction time quantity that transmissive Spatial and reflection space generate respectively is Mx×MyIt is a, wherein (mx,my) a spread out Penetrate the horizontal space frequency of level are as follows:
In formula (2), | mx|≤Mx/ 2, | my|≤My/2.As horizontal space frequency k' >=1/ λ, corresponding diffraction time is Evanescent wave can not propagate to far field.Conversely, corresponding diffraction time is traveling wave, energy when horizontal space frequency 1/ λ of k'< Propagate to far field, corresponding angle of diffraction are as follows:
Wherein, θxFor the angle of diffraction time and coordinate surface yoz, θyFor the angle of diffraction time and coordinate surface xoz, θ is to spread out Penetrate the angle of level and z-axis.By formula (2) and (3) it is found that when heart septum meets C≤λ/2 in cellular construction, the traveling wave angle of diffraction Close to 90 °, i.e., diffraction light wave energy is full of entire transmissive Spatial.
Randomly select N (N≤M in traveling wavex×My) a level is target diffraction time, any target diffraction time of arranging Light distribution, by the phase distribution matrix φ of grey level compensation and the optimization nano brick array of G-S algorithm, by relational expression φ The deflection arrangement matrix Φ of nano brick array is calculated in=2 Φ.Designed laser random scatter material can swash incidence Light shaping is the light outgoing of the random spatial distribution of transmissive Spatial and any light distribution, recycles nano brick list designed by front The semi-transparent semi-reflecting dichroism of meta structure realizes the modulation of transflector locking phase, finally realizes the total space (transmissive Spatial and reflection Space) random scatter.
Wherein, substrate is silica substrate, and nano brick cellular construction is silicon nano brick, but not limited to this.
The present embodiment laser random scatter material and its design method, it is expected that the function of realizing is the laser random scatter Incident laser can be shaped as the light outgoing of total space random distribution and any light distribution by material, can arbitrarily regulate and control emergent light Spatial position and the position at luminous point intensity.
In the present embodiment, nanocell structures are by silica substrate, and the silicon nano brick etched in substrate is constituted, As shown in Figure 1.Selection design wavelength is λ=633nm, for the wavelength, by electromagnetic simulation software CST to nanometer block assembly knot Structure optimizes emulation, the dimensional parameters of the silicon nano brick after being optimized are as follows: and a length of L=230nm, width W=124nm are high For H=277nm, cellular construction substrate side length is C=300nm.The reflection and transmission of nano brick cellular construction under the structural parameters Efficiency is as shown in Fig. 2, wherein Rco、TcoRespectively represent the reflectivity and transmissivity of circularly polarized light in the same direction, Rcross、TcrossTable respectively Show the reflectivity and transmissivity of opposite circular polarization light.As shown in Figure 2, as a length of design wavelength 633nm of incident light wave, RcrossWith TcrossOf substantially equal and be above 25%, the transmitance and reflectivity without the circularly polarized light in the same direction of additional phase delay are low In 4%, nano brick cellular construction has the function of semi-transparent semi-reflecting dichroism and half-wave plate after showing the optimization.
Based on the nano brick cellular construction good by above-mentioned simulation optimization, for operation wavelength λ=633nm, one kind is designed Laser random scatter material, it includes 201 × 201 nanometer block assemblies, i.e. Mx=201, My=201.It randomly selects in traveling wave 5000 levels are target diffraction time, i.e. N=5000, the normalization light distribution of any target diffraction time of arranging, such as Fig. 4 It is shown.It is 180 ° of (heart septum C=in nano brick cellular construction according to the crevice projection angle of the laser random scatter material transmission of design 300nm, less than the half of wavelength 633nm, therefore diffraction light can cover entire 180 ° of transmissive Spatials), pass through grey level compensation and G-S The phase distribution matrix φ of the optimization nano brick array of algorithm, as shown in figure 5, nanometer is calculated by the Φ of relational expression φ=2 The deflection arrangement matrix Φ of brick array.Designed laser random scatter material incident laser can be shaped as transmissive Spatial with Machine spatial distribution and the outgoing of the light of any light distribution, point for recycling nano brick cellular construction designed by front semi-transparent semi-reflecting Light characteristic, realizes the modulation of transflector locking phase, and the final light for realizing the random spatial distribution of the total space and any light distribution goes out It penetrates.
In the present embodiment, laser random scatter material is made of silicon nano brick array in silica substrate and substrate, is received Rice brick array is by 201 × 201 having a size of L=230nm, W=124nm, H=277nm, C=300nm, and deflection is according to direction Angle arrangement matrix Φ arranged at equal intervals on the direction x, y are constituted.When circularly polarized light normal incidence is to the laser random scatter material, It can be observed that the luminous point full of entire transflector space random spatial distribution and any light distribution.
The present embodiment include at least following technical effect: in the present embodiment, optimization have semi-transparent semi-reflecting dichroism and The nano brick cellular construction of half-wave plate function, so that being obtained when operation wavelength circularly polarized light normal incidence to nano brick cellular construction Opposite circular polarization light reflectivity and the of substantially equal packet size parameter of transmitance, recycle the phase tune of super surface array structure Function is saved, realizes the modulation of transflector locking phase, it is final to realize total space random scatter.
The embodiment of the present invention has the advantage that
(1) the laser random scatter material structure designed by the present invention is simple and compact, it is only necessary to a piece of to be etched with nano brick battle array The flat glass of column can arbitrarily regulate and control the intensity of luminous point at the spatial position and the position of emergent light.
(2) present invention is received using the super surfacing in transparent substrates surface etch nano brick array by rationally designing Rice brick array realizes beam shaping, and the material is manufactured using microelectronics photoetching process, is conducive to batch machining production.
(3) nano brick size used by is sub-wavelength, thus the laser random scatter material volume it is small, it is light-weight, Development trend convenient for highly integrated, suitable for optical system miniaturization, micromation.

Claims (4)

1. a kind of laser random scatter material, it is characterised in that: the material is made of super surface array structure, includes titanium dioxide The silicon nano brick array of silicon base and etching on the substrate, the nano brick array is by Mx×MyThe consistent only direction of a size The different nano brick cellular construction in angle arranged at equal intervals on the direction x, y form.
2. a kind of design method of laser random scatter material as described in claim 1, it is characterised in that: the following steps are included:
(1) it determines operation wavelength λ, optimizes the dimensional parameters of nano brick cellular construction by electromagnetic simulation software, optimization has half Saturating half anti-dichroism can be equivalent to the nano brick cellular construction of half-wave plate simultaneously, so that the circularly polarized light under operation wavelength just enters When being incident upon the nano brick cellular construction, the reflectivity of opposite circular polarization light and the packet size ginseng that transmitance is of substantially equal are obtained Number;The dimensional parameters of the nano brick cellular construction include length L, width W, height H and the cellular construction substrate side of nano brick Long C;
(2) assume that nano brick array includes Mx×MyA sub-wavelength nano brick cellular construction, heart septum is C in cellular construction, when flat When surface wave normal incidence, the diffraction time quantity that transmissive Spatial and reflection space generate respectively is Mx×MyIt is a;The super surface array knot Structure is made of the nano brick array of substrate and etching on the substrate;Heart septum C≤λ/2 in the cellular construction;
(3) randomly selecting N number of level in traveling wave is target diffraction time, N≤Mx×My;The N number of target diffraction time of random arrangement Light distribution, by the phase distribution matrix φ of grey level compensation and the optimization nano brick array of G-S algorithm, by relational expression φ The deflection arrangement matrix Φ of nano brick array is calculated in=2 Φ;
(4) by Mx×MyThe nano brick cellular construction that a size is consistent, deflection is arranged according to deflection arrangement matrix Φ is in x, y Arranged at equal intervals on direction constitute laser random scatter material.
3. the design method of laser random scatter material according to claim 2, it is characterised in that: in the step (1) Operation wavelength λ selects 633nm;When operation wavelength λ selects 633nm, the length of nano brick is 230nm, width 124nm, height Degree is 277nm, and cellular construction substrate side length is 300nm.
4. the design method of laser random scatter material according to claim 2 or 3, it is characterised in that: the step (2) In substrate select silica, the nano brick cellular construction selects silicon nano brick.
CN201910651524.XA 2019-07-18 2019-07-18 Laser random scatter material and its design method Pending CN110456433A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111413754A (en) * 2020-03-05 2020-07-14 武汉大学 Super-surface-based wide-angle scattering and directional scattering element structure and design method

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Publication number Priority date Publication date Assignee Title
CN105278026A (en) * 2015-11-30 2016-01-27 武汉大学 Metamaterial motion-sensing holographic element and design method thereof
CN107085298A (en) * 2017-06-20 2017-08-22 武汉大学 A kind of 360 ° of full filed angle diffraction optical elements and its design method
WO2019043016A1 (en) * 2017-09-01 2019-03-07 Thomson Licensing Optical device capable of providing at least two different optical functions
CN109581551A (en) * 2018-12-19 2019-04-05 武汉大学 Super surface lambert device based on super surfacing
CN109814266A (en) * 2019-03-07 2019-05-28 武汉邮电科学研究院有限公司 A kind of laser shaping optical element and its design method

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105278026A (en) * 2015-11-30 2016-01-27 武汉大学 Metamaterial motion-sensing holographic element and design method thereof
CN107085298A (en) * 2017-06-20 2017-08-22 武汉大学 A kind of 360 ° of full filed angle diffraction optical elements and its design method
WO2019043016A1 (en) * 2017-09-01 2019-03-07 Thomson Licensing Optical device capable of providing at least two different optical functions
CN109581551A (en) * 2018-12-19 2019-04-05 武汉大学 Super surface lambert device based on super surfacing
CN109814266A (en) * 2019-03-07 2019-05-28 武汉邮电科学研究院有限公司 A kind of laser shaping optical element and its design method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111413754A (en) * 2020-03-05 2020-07-14 武汉大学 Super-surface-based wide-angle scattering and directional scattering element structure and design method

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Application publication date: 20191115