CN110455569B - Sampling device and method - Google Patents
Sampling device and method Download PDFInfo
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- CN110455569B CN110455569B CN201910811479.XA CN201910811479A CN110455569B CN 110455569 B CN110455569 B CN 110455569B CN 201910811479 A CN201910811479 A CN 201910811479A CN 110455569 B CN110455569 B CN 110455569B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/04—Devices for withdrawing samples in the solid state, e.g. by cutting
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The embodiment of the invention provides a sampling device and a method, wherein the sampling device comprises: a support frame; a clamping part for clamping a sample to be tested; the first rotating part is used for driving the clamping part to rotate in a first rotating plane and connected with the supporting frame, and two ends of the clamping part are respectively in rotating connection with the supporting frame through the first rotating part; the second rotating part is used for driving the clamping part to rotate in a second rotating plane, the second rotating part is connected with the supporting frame, and the first rotating plane and the second rotating plane are provided with preset included angles. By the sampling device provided by the embodiment of the invention, the sampling liquid can be fully sampled in the container type sample, the occurrence of repeated sampling is avoided, and the sampling efficiency of the sample to be tested can be improved, such as: sampling efficiency of the container type sample in the production process of the silicon wafer can improve sampling accuracy and convenience, and accurate test data are provided for subsequent production.
Description
Technical Field
The invention relates to the field of silicon wafer processing and manufacturing, in particular to a sampling device and a sampling method.
Background
Generally, when a container type sample is analyzed, a chemical solvent is used for sampling, and then the container type sample is tested in an analysis instrument, so that the sampling integrity of the container type sample is very important for the whole testing process. When the sample cannot be completely sampled, the subsequent measurement results are directly affected. In the existing sampling method, the sampling liquid is poured out after artificial violent shaking, and the method has the following two risks:
1) The artificial shaking does not have a clear definition and standard for the sampling effect, the sampling process cannot be quantized, and the cleaning process cannot be standardized;
2) The artificial shaking can cause the risk of hand release due to the slippery of hands, so that the sampling container is separated from the hands, and certain safety risk exists.
Disclosure of Invention
The embodiment of the invention provides a sampling device and a sampling method, which aim to solve the problems that the sampling process cannot be quantized and the cleaning process cannot be standardized.
In a first aspect, to solve the above technical problem, an embodiment of the present invention provides a sampling device, including:
a support frame;
a clamping part for clamping a sample to be tested;
the first rotating part is used for driving the clamping part to rotate in a first rotating plane and is connected with the supporting frame, and two ends of the clamping part are respectively in rotating connection with the supporting frame through the first rotating part;
the second rotating part is used for driving the clamping part to rotate in a second rotating plane, the second rotating part is connected with the supporting frame, and the first rotating plane and the second rotating plane are provided with preset included angles.
Optionally, the support frame comprises:
the clamping part is positioned in the annular frame, and two ends of the clamping part are respectively connected with the annular frame.
Optionally, the clamping portion comprises:
the first clamping piece is rotatably connected with the supporting frame and is provided with a first groove for clamping a sample to be tested;
the second clamping piece is arranged opposite to the first clamping piece and is rotatably connected with the supporting frame, and a second groove which is used for clamping a sample to be tested and corresponds to the first groove is formed in the second clamping piece.
Optionally, the second rotating part comprises:
one end of the rocking handle is fixedly connected with the support frame;
the base is provided with a first mounting hole, and the rocking handle is rotatably inserted into the first mounting hole;
the driving structure is fixedly connected with the other end of the rocking handle, and the driving structure and the supporting frame are respectively located on two sides of the base.
Optionally, the drive structure is an electric drive structure, the drive structure at least comprising: a motor; the motor is connected with one end of the rocking handle.
Optionally, the driving structure comprises:
the handle, the handle with the other end fixed connection of handle, the handle with the support frame is located respectively the both sides of base.
Optionally, the sampling device further comprises:
and the adjusting structure is used for adjusting the clamping height of the clamping part and is respectively connected with the support frame and the clamping part.
Optionally, the adjusting structure comprises:
the adjusting screw is connected with the supporting frame, and the threaded end of the adjusting screw is connected with the clamping part.
Optionally, the sampling device further comprises:
the buffer structure is used for preventing the sample to be tested from being scratched and is connected with the clamping part, and the buffer structure is arranged at least two positions of the clamping part, which are in contact with the sample to be tested.
In a second aspect, the embodiment of the present invention further provides a sampling method, which is applied to the sampling apparatus described above;
the sampling method comprises the following steps:
fixing a sample to be tested on the clamping part;
the clamping part is driven to rotate in a first rotating plane through the first rotating part and/or the clamping part is driven to rotate for a preset number of turns in a second rotating plane through the second rotating part;
and after sampling, detaching the sample to be tested from the clamping part.
The embodiment of the invention has the following beneficial effects:
in the embodiment of the present invention, the first rotating part and the second rotating part can drive the clamping part to rotate in the first rotating plane and the second rotating plane respectively, so that the sampling device according to the embodiment of the present invention can fully sample the sampling liquid in the container-type sample, avoid the occurrence of repeated sampling, and improve the sampling efficiency of the sample to be tested, for example: sampling efficiency of the container type sample in the production process of the silicon wafer can improve sampling accuracy and convenience, and accurate test data are provided for subsequent production.
Drawings
FIG. 1 is a schematic structural diagram of a sampling device according to an embodiment of the present invention;
FIG. 2 is a second schematic structural diagram of a sampling device according to an embodiment of the present invention;
FIG. 3 is a flowchart illustrating a sampling method according to an embodiment of the present invention.
Detailed Description
To make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.
The terms first, second and the like in the description and in the claims of the present invention are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein.
Referring to fig. 1 and 2, an embodiment of the present invention provides a sampling device, including: the device comprises a support frame 1, a clamping part 2 for clamping a sample to be tested, a first rotating part 3 and a second rotating part 4.
The first rotating part 3 is used for driving the clamping part 2 to rotate in a first rotating plane, the first rotating part 3 is connected with the support frame 1, and two ends of the clamping part 2 are respectively rotatably connected with the support frame 1 through the first rotating part 3; the second rotating part 4 is used for driving the clamping part 2 to rotate in a second rotating plane, the second rotating part 4 is connected with the support frame 1, and the first rotating plane and the second rotating plane are provided with preset included angles.
In the embodiment of the invention, the sample to be tested can be a silicon wafer, a wafer or a silicon wafer, and the like, and the sample to be tested can be a container type sample.
In the embodiment of the present invention, the first rotating part 3 and the second rotating part 4 can drive the clamping part 2 to rotate in the first rotating plane and the second rotating plane respectively, so that the sampling liquid can be fully sampled in the container type sample, the occurrence of repeated sampling is avoided, and the sampling efficiency of the sample to be tested can be improved, for example: sampling efficiency of the container type sample in the production process of the silicon wafer can improve sampling accuracy and convenience, and accurate test data are provided for subsequent production.
With continued reference to fig. 1 and 2, the support 1 comprises: the annular frame 11, the clamping part 2 is located in the annular frame 11, and two ends of the clamping part 2 are respectively connected with the annular frame 11.
With continued reference to fig. 1 and 2, further, the clamping portion 2 includes: a first clamp 21 and a second clamp 22. The first clamping piece 21 is rotatably connected with the support frame 1, and the first clamping piece 21 is provided with a first groove 211 for clamping a sample to be tested; the second clamping member 22 is opposite to the first clamping member 21, the second clamping member 22 is rotatably connected with the support frame 1, and a second groove 221 which is used for clamping a sample to be tested and is arranged corresponding to the first groove is arranged on the second clamping member 22.
Further, the first clamping member 21 and the second clamping member 22 may be plate-shaped structures, but are not limited thereto.
With continued reference to fig. 1 and 2, the first rotary part 3 comprises: a handle 31, a base 32 and a drive structure 33; one end of the rocking handle 31 is fixedly connected with the support frame 1; the base 32 is provided with a first mounting hole, and the rocking handle 31 is rotatably inserted into the first mounting hole; the driving structure 33 is fixedly connected with the other end of the rocking handle 31, and the driving structure 33 and the support frame 1 are respectively positioned at two sides of the base 32.
With continued reference to fig. 2, the base 32 includes: the connecting structure comprises a first connecting piece 321, a second connecting piece 322 and a third connecting piece 323, wherein two ends of the second connecting piece 322 are respectively connected with the first connecting piece 321 and the third connecting piece 323, a U-shaped structure is formed by the first connecting piece 321, the second connecting piece 322 and the third connecting piece 323, and first mounting holes are formed in the first connecting piece 321 and the third connecting piece 323.
In the embodiment of the present invention, the driving structure 33 may be an electric driving structure or a manual driving structure, but is not limited thereto.
Wherein, when the driving structure 33 is an electric driving structure, the driving structure 33 at least includes: a motor; the motor is connected with one end of the rocking handle 31. It can be understood that the output end of the motor is connected with the rocking handle 31, the motor can drive the rocking handle 31 to rotate, and then the clamping part 2 is driven by the rocking handle 31 to rotate in the second rotating plane.
When the driving structure 33 is a manual structure, the driving structure 33 includes: the handle 331, the handle 331 with the other end fixed connection of handle 31, the handle 331 with the support frame 1 is located respectively the both sides of base 32. It can be understood that the hand crank 331 can be manually shaken to rotate the clamping portion 2 in the second rotation plane.
With continued reference to fig. 1 and 2, the sampling device further comprises: the adjusting structure 5, the adjusting structure 5 respectively with the support frame 1 with the clamping part 2 is connected, the adjusting structure 5 is used for adjusting the centre gripping height of the clamping part 2.
Wherein the clamping portion 2 includes: when the first clamping member 21 and the second clamping member 22 are used, the adjusting structure 5 is connected with the first clamping member 21 and/or the second clamping member 22, and the adjusting structure 5 can be used for adjusting the distance between the first clamping member 21 and the second clamping member 22, namely the clamping height of the clamping portion 2, so as to adapt to samples to be tested with different sizes, such as: the sample to be tested can be silicon wafers with different sizes, such as 8 inches or 12 inches, and the like, so that the applicability of the sampling device is improved.
With continued reference to fig. 1 and 2, the adjustment structure 5 includes: the adjusting screw 51, the adjusting screw 51 with the support frame 1 is connected, the screw thread end of adjusting screw 51 with the clamping part 2 is connected.
Further, the clamping portion 2 includes: when the first clamping member 21 and the second clamping member 22 are used, the adjusting screw 51 is connected with the first clamping member 21 and/or the second clamping member 22, and the adjusting screw 51 is screwed in a first direction or a second direction opposite to the first direction to adjust the distance between the first clamping member 21 and the second clamping member 22, so that the device is suitable for samples to be tested with different sizes, and the applicability of the device can be improved.
For example: referring to fig. 1 and 2, the adjusting screw 51 is in threaded connection with the supporting frame 1, a threaded end of the adjusting screw 51 is at least partially exposed outside the supporting frame 1, a threaded end of the adjusting screw 51 is connected with the first clamping member 21, and the adjusting screw 51 is screwed downward to drive the first clamping member 21 to move downward, so as to reduce a distance between the first clamping member 21 and the second clamping member 22. Similarly, by screwing the adjusting screw 51 upward, the second clamping member 22 can be driven to move upward, so as to increase the distance between the first clamping member 21 and the second clamping member 22.
With continued reference to fig. 2, the sampling device further comprises: a buffer structure 6 for preventing the sample to be tested from being scratched, wherein the buffer structure 6 is connected with the clamping part 2, and the buffer structure 6 is arranged at least two positions of the clamping part 2, which are in contact with the sample to be tested.
In an embodiment of the present invention, with continued reference to fig. 2, the buffer structure 6 at least comprises: and pads 61, wherein the pads 61 are connected with the clamping part 2, and the pads 61 are arranged at least two positions of the clamping part 2 contacted with the sample to be tested. Further, the spacers 61 are provided on the first and second grips 21 and 22 at least two positions of contact with the sample to be tested.
Specifically, the spacer 61 may be disposed in the first groove and the second groove, but is not limited thereto.
Referring to fig. 2, the second rotating portion 4 includes: the bearing 41, the bearing 41 is connected with the support frame 1, the adjusting screw 51 is inserted into the inner hole of the bearing 41, the threaded end of the adjusting screw 51 is connected with the clamping portion 2, and the clamping portion 2 can be driven to rotate in a second rotation plane through the bearing 41.
With continued reference to fig. 2, further, the support frame 1 is provided with a second mounting hole 12 and a threaded hole 13 connected to the second mounting hole 12, the threaded hole 13 is close to one side of the clamping portion 2, the bearing 41 is placed in the second mounting hole 12, the adjusting screw 51 is inserted into an inner hole of the bearing 41, and the adjusting screw 51 is connected to the support frame 1 through the threaded hole 13.
Further, the adjusting screw may be disposed perpendicular to the first and second clamping members 21 and 22, and it is understood that the second mounting hole 12 and the screw hole 13 are disposed perpendicular to the first and second clamping members 21 and 22. Meanwhile, the handle 31 may be disposed in parallel with the first and second clamping members 21 and 22. In this way, the grip 2 can be made to rotate in the perpendicular first and second planes of rotation.
Referring to fig. 3, an embodiment of the present invention further provides a sampling method, which is applied to the sampling device described above. The sampling method comprises the following steps:
step 301: fixing a sample to be tested on the clamping part 2;
step 302: the clamping part 2 is driven to rotate in a first rotating plane through the first rotating part 3 and/or the clamping part 2 is driven to rotate for a preset number of turns in a second rotating plane through the second rotating part 4;
in the embodiment of the invention, the preset number of turns can be determined according to needs, and statistics and counting can be conveniently carried out by presetting the preset number of turns.
Step 303: after sampling, the sample to be tested is detached from the holding portion 2.
In step 301, the adjustment structure 5 adjusts the clamping height of the clamping portion according to the height of the sample to be tested, so as to fix the sample to be tested on the clamping portion 2.
In the embodiment of the invention, the sampling device can be used for sampling and testing the sample to be tested, so that the production efficiency can be greatly improved, and the safety influence on the testing process caused by personnel operation is avoided. Through first rotating part 3 and/or second rotating part 4 can drive clamping part 2 is rotary motion in first rotation plane and/or second rotation plane, can accomplish the sample process better, improves the completion degree effect of sample, makes the sample more complete more convenient.
While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (7)
1. A sampling device, comprising:
a support frame;
a clamping part for clamping a sample to be tested;
the first rotating part is used for driving the clamping part to rotate in a first rotating plane and connected with the supporting frame, and two ends of the clamping part are respectively in rotating connection with the supporting frame through the first rotating part;
the second rotating part is used for driving the clamping part to rotate in a second rotating plane, the second rotating part is connected with the supporting frame, and a preset included angle is formed between the first rotating plane and the second rotating plane;
the support frame includes:
the clamping part is positioned in the annular frame, and two ends of the clamping part are respectively connected with the annular frame;
the clamping portion includes:
the first clamping piece is rotatably connected with the supporting frame and is provided with a first groove for clamping a sample to be tested;
the second clamping piece is arranged opposite to the first clamping piece and is rotationally connected with the supporting frame, and a second groove which is used for clamping a sample to be tested and is arranged corresponding to the first groove is formed in the second clamping piece;
the first rotating part includes:
one end of the rocking handle is fixedly connected with the support frame;
the base is provided with a first mounting hole, and the rocking handle is rotatably inserted into the first mounting hole;
the driving structure is fixedly connected with the other end of the rocking handle, and the driving structure and the supporting frame are respectively located on two sides of the base.
2. The sampling device of claim 1, wherein the drive structure is an electric drive structure, the drive structure comprising at least: a motor; the motor is connected with one end of the rocking handle.
3. The sampling device of claim 1, wherein the drive structure comprises:
the handle, the handle with the other end fixed connection of handle, the handle with the support frame is located respectively the both sides of base.
4. The sampling device of claim 1, further comprising:
and the adjusting structure is used for adjusting the clamping height of the clamping part and is respectively connected with the supporting frame and the clamping part.
5. The sampling device of claim 4, wherein the adjustment structure comprises:
the adjusting screw is connected with the supporting frame, and the threaded end of the adjusting screw is connected with the clamping part.
6. The sampling device of claim 1, further comprising:
the buffer structure is used for preventing the sample to be tested from being scratched and is connected with the clamping part, and the buffer structure is arranged at least two positions of the clamping part, which are in contact with the sample to be tested.
7. A sampling method, characterized in that, applied to the sampling device of any one of claims 1~6;
the sampling method comprises the following steps:
fixing a sample to be tested on the clamping part;
the clamping part is driven to rotate in a first rotating plane through the first rotating part and/or the clamping part is driven to rotate for a preset number of turns in a second rotating plane through the second rotating part;
and after sampling, detaching the sample to be tested from the clamping part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910811479.XA CN110455569B (en) | 2019-08-30 | 2019-08-30 | Sampling device and method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910811479.XA CN110455569B (en) | 2019-08-30 | 2019-08-30 | Sampling device and method |
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| CN110455569A CN110455569A (en) | 2019-11-15 |
| CN110455569B true CN110455569B (en) | 2023-01-06 |
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| CN209027894U (en) * | 2018-11-13 | 2019-06-25 | 段世举 | A kind of clinical laboratory's blood evenly mixing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2961338B2 (en) * | 1992-04-08 | 1999-10-12 | コマツ電子金属株式会社 | Apparatus and method for manufacturing semiconductor thin film |
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN205374922U (en) * | 2015-11-10 | 2016-07-06 | 上海与德通讯技术有限公司 | Angle of visibility testing arrangement |
| CN207497644U (en) * | 2017-09-29 | 2018-06-15 | 泉州弘盛琉璃有限公司 | A kind of rotating device of coloured glaze batch machining |
| CN208044921U (en) * | 2018-09-10 | 2018-11-02 | 高彤彤 | A kind of College English interactive teaching device |
| CN208880280U (en) * | 2018-10-23 | 2019-05-21 | 苏州迈特科技有限公司 | A kind of CNC milling machine automatic blanking device |
| CN208992193U (en) * | 2018-11-07 | 2019-06-18 | 广州哲野超硬材料磨削技术有限公司 | A kind of multi-angle adjustable numerical control machine tool clamp |
| CN209027894U (en) * | 2018-11-13 | 2019-06-25 | 段世举 | A kind of clinical laboratory's blood evenly mixing device |
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Effective date of registration: 20211021 Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Applicant after: Xi'an yisiwei Material Technology Co.,Ltd. Applicant after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: Room 1323, block a, city gate, No.1 Jinye Road, high tech Zone, Xi'an, Shaanxi 710065 Applicant before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |
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Address after: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee after: Xi'an Yisiwei Material Technology Co.,Ltd. Patentee after: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. Address before: 710000 room 1-3-029, No. 1888, Xifeng South Road, high tech Zone, Xi'an, Shaanxi Province Patentee before: Xi'an yisiwei Material Technology Co.,Ltd. Patentee before: XI'AN ESWIN SILICON WAFER TECHNOLOGY Co.,Ltd. |
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