CN110453188A - A kind of magnet steel swing type head assemblies being built in vacuum cavity - Google Patents
A kind of magnet steel swing type head assemblies being built in vacuum cavity Download PDFInfo
- Publication number
- CN110453188A CN110453188A CN201910814429.7A CN201910814429A CN110453188A CN 110453188 A CN110453188 A CN 110453188A CN 201910814429 A CN201910814429 A CN 201910814429A CN 110453188 A CN110453188 A CN 110453188A
- Authority
- CN
- China
- Prior art keywords
- magnet steel
- transmission parts
- target pipe
- driving member
- mandrel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000831 Steel Inorganic materials 0.000 title claims abstract description 80
- 239000010959 steel Substances 0.000 title claims abstract description 80
- 238000000429 assembly Methods 0.000 title claims abstract description 11
- 230000000712 assembly Effects 0.000 title claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 6
- 238000009434 installation Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
A kind of magnet steel swing type head assemblies being built in vacuum cavity, including device noumenon, magnet steel, target pipe, magnet steel mandrel, bearing, cover board, end, the first transmission parts, the second transmission parts, target pipe rotary driving member and magnet steel swing driving member；Magnet steel and target Guan Jun are rotatably arranged on inside device noumenon；The top of end is arranged in device noumenon；The bottom of magnet steel is connect with magnet steel mandrel；Magnet steel mandrel is rotatably installed in inside end, and magnet steel mandrel periphery is provided with bearing；Magnet steel mandrel lower part and the first transmission parts are sequentially connected；The periphery of magnet steel is arranged in target pipe, and the lower part of target pipe and the second transmission parts are sequentially connected；Magnet steel swings driving member one end and the first transmission parts are sequentially connected, and the other end is connect with motor power；One end of target pipe rotary driving member and the second transmission parts are sequentially connected, and the other end connects power mechanism.In the present invention, there is better target as sputter deposition rate and smaller installation space and more optimal producing line layout.
Description
Technical field
The present invention relates to the end apparatus field of magnetron sputtering plating more particularly to a kind of magnet steel for being built in vacuum cavity
Swing type head assemblies.
Background technique
On rotating cathode continuous coating production line, end drives target rotation, is meeting certain process environments requirement
Under, by target as sputter to glass substrate, the film layer of product requirement is met with acquisition.
In existing equipment, include the following three types structure: 1, end is built in vacuum cavity and the stationary formula of magnet steel；2, it holds
Head is placed outside vacuum cavity and the stationary formula of magnet steel；3, end is placed outside vacuum cavity and magnet steel swing type.
As shown in Figure 1, being built in the structure of vacuum cavity and the stationary formula of magnet steel for end, this end structure is mainly lacked
Point is: magnet steel can not be swung, and influence target as sputter rate and film forming homogeneity.
As shown in Fig. 2, being placed outside the structure of vacuum cavity and the stationary formula of magnet steel for end, this end structure is mainly lacked
Point is: magnet steel can not be swung, and end outer dimension is slightly larger, occupy larger space.
As shown in figure 3, end is placed outside vacuum cavity and the shuttle-type structure of magnet steel, this end structure major defect is:
End outer dimension is larger, occupies more spaces, is unfavorable for whole line layout, and use is more inconvenient.
Therefore, better target as sputter deposition rate and smaller installation space how are obtained, and how to optimize production
Line layout, is problem to be solved.
Summary of the invention
(1) goal of the invention
To solve technical problem present in background technique, the present invention proposes that a kind of magnet steel for being built in vacuum cavity is swung
Formula head assemblies have better target as sputter deposition rate and smaller installation space and more optimal producing line layout.
(2) technical solution
To solve the above problems, the present invention provides a kind of magnet steel swing type head assemblies for being built in vacuum cavity, packet
Include device noumenon, magnet steel, target pipe, magnet steel mandrel, bearing, cover board, end, the first transmission parts, the second transmission parts, target Guan Xuan
Turn driving member and magnet steel swings driving member；
Magnet steel and target Guan Jun are rotatably arranged on inside device noumenon；The top of end is arranged in device noumenon；Cover board setting
In the side of end；Wherein, cover board is vacuum environment towards the side of device noumenon and end, and the cover board other side is big compression ring
Border；
The bottom of magnet steel is connect with magnet steel mandrel；Magnet steel mandrel is rotatably installed in inside end, wherein at the top of magnet steel mandrel
It is provided with bearing with the periphery at middle part, bearing is arranged inside end；Magnet steel mandrel lower part and the transmission of the first transmission parts connect
It connects；
By clamp connection, magnet steel is arranged inside target pipe for target pipe and end；The lower part of target pipe and the second transmission parts pass
Dynamic connection；
One end that magnet steel swings driving member passes through cover board and protrudes into inside end and be sequentially connected with the first transmission parts, another
One end is connect with motor power；
One end of target pipe rotary driving member passes through cover board and protrudes into inside end and be sequentially connected with the second transmission parts, another
One end connects power mechanism.
Preferably, motor is equipped with controller and control system for controlling motor rotational angle.
Above-mentioned technical proposal of the invention has following beneficial technical effect:
In the present invention, target pipe sputter deposition rate is higher, and film uniformity is more preferable, compared to effect of magnet steel when stationary
Fruit is more preferable, and there is smaller installation space and more optimal producing line to be laid out.
In the present invention, magnet steel is realized in the process of target pipe internal rotating, motor swings driving member, the first transmission by magnet steel
Component and the swing for driving magnet steel, controller and control system are for controlling motor rotating angles, to realize the pendulum to magnet steel
The control of dynamic angle.
Detailed description of the invention
Fig. 1 is in the prior art that end is built-in and the structural schematic diagram of the stationary formula of magnet steel.
Fig. 2 is in the prior art that end is external and the structural schematic diagram of the stationary formula of magnet steel.
Fig. 3 is in the prior art that end is external and the shuttle-type structural schematic diagram of magnet steel.
Fig. 4 is the structural schematic diagram of the magnet steel swing type head assemblies proposed by the present invention for being built in vacuum cavity.
Fig. 5 is the side view of the magnet steel swing type head assemblies proposed by the present invention for being built in vacuum cavity.
Specific embodiment
In order to make the objectives, technical solutions and advantages of the present invention clearer, With reference to embodiment and join
According to attached drawing, the present invention is described in more detail.It should be understood that these descriptions are merely illustrative, and it is not intended to limit this hair
Bright range.In addition, in the following description, descriptions of well-known structures and technologies are omitted, to avoid this is unnecessarily obscured
The concept of invention.
As illustrated in figures 4-5, a kind of magnet steel swing type head assemblies being built in vacuum cavity proposed by the present invention, including dress
Set ontology 3, magnet steel 1, target pipe 2, magnet steel mandrel 6, bearing 7, cover board 4, end 5, the first transmission parts 8, the second transmission parts, target
Pipe rotary driving member 9 and magnet steel swing driving member 10；
Magnet steel 1 and target pipe 2 are rotatably arranged on inside device noumenon 3；The top of end 5 is arranged in device noumenon 3；Cover board
4 are arranged in the side of end 5；Wherein, the side of cover board 4 towards device noumenon 3 and end 5 is vacuum environment, 4 other side of cover board
For atmospheric environment；
The bottom of magnet steel 1 is connect with magnet steel mandrel 6；Magnet steel mandrel 6 is rotatably installed in inside end 5, wherein magnet steel mandrel
The periphery at 6 tops and middle part is provided with bearing 7, and bearing 7 is arranged inside end 5；6 lower part of magnet steel mandrel and the first driving section
Part 8 is sequentially connected；
By clamp connection, magnet steel 1 is arranged inside target pipe 2 for target pipe 2 and end 5；The lower part of target pipe 2 and the second driving section
Part transmission connection；
One end that magnet steel swings driving member 10, which passes through cover board 4 and protrudes into 5 inside of end and be driven with the first transmission parts 8, to be connected
It connects, the other end is connect with motor power；
One end of target pipe rotary driving member 9 passes through cover board 4 and protrudes into 5 inside of end and be sequentially connected with the second transmission parts,
Its other end connects power mechanism.
In the present invention, using built in end and magnet steel swing be structure；During target pipe 2 rotates, magnet steel 1 while energy
Enough at the uniform velocity to swing in certain angular range, so that 2 sputter deposition rate of target pipe is higher, film uniformity is more preferable, compared to
Effect when magnet steel is stationary is more preferable；That is, this equipment has better target as sputter deposition rate and smaller installation empty
Between and more optimal producing line layout.
In the present invention, magnet steel mandrel 6 is autorotation structure, and 6 top of magnet steel mandrel and the periphery at middle part are provided with bearing
7, bearing 7 is arranged inside end 5, to realize magnet steel 1 in the process of 2 internal rotating of target pipe.Wherein, motor is swung by magnet steel
Driving member 10, the first transmission parts 8 and drive the swing of magnet steel 1.
In an alternative embodiment, motor is equipped with the controller for controlling motor rotational angle and control system
System.
In the present invention, controller and control system are for controlling motor rotating angles, to realize the swing to magnet steel 1
The control of angle.
It should be understood that above-mentioned specific embodiment of the invention is used only for exemplary illustration or explains of the invention
Principle, but not to limit the present invention.Therefore, that is done without departing from the spirit and scope of the present invention is any
Modification, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.In addition, appended claims purport of the present invention
Covering the whole variations fallen into attached claim scope and boundary or this range and the equivalent form on boundary and is repairing
Change example.
Claims (2)
1. a kind of magnet steel swing type head assemblies for being built in vacuum cavity, which is characterized in that including device noumenon (3), magnet steel
(1), target pipe (2), magnet steel mandrel (6), bearing (7), cover board (4), end (5), the first transmission parts (8), the second transmission parts,
Target pipe rotary driving member (9) and magnet steel swing driving member (10)；
It is internal that magnet steel (1) and target pipe (2) are rotatably arranged on device noumenon (3)；Device noumenon (3) is arranged in the upper of end (5)
Side；Cover board (4) is arranged in the side of end (5)；Wherein, cover board (4) towards device noumenon (3) and the side of end (5) be true
Altitude, cover board (4) other side are atmospheric environment；
The bottom of magnet steel (1) is connect with magnet steel mandrel (6)；It is internal that magnet steel mandrel (6) is rotatably installed in end (5), wherein magnet steel
At the top of mandrel (6) and the periphery at middle part is provided with bearing (7), and bearing (7) setting is internal in end (5)；Under magnet steel mandrel (6)
Portion and the first transmission parts (8) are sequentially connected；
By clamp connection, magnet steel (1) setting is internal in target pipe (2) for target pipe (2) and end (5)；The lower part and second of target pipe (2)
Transmission parts transmission connection；
One end that magnet steel swings driving member (10) passes through cover board (4) and protrudes into end (5) inside and be driven with the first transmission parts (8)
Connection, the other end are connect with motor power；
One end of target pipe rotary driving member (9), which passes through cover board (4) and protrudes into end (5) inside and be driven with the second transmission parts, to be connected
It connects, the other end connects power mechanism.
2. the magnet steel swing type head assemblies according to claim 1 for being built in vacuum cavity, which is characterized in that on motor
Equipped with the controller and control system for controlling motor rotational angle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910814429.7A CN110453188A (en) | 2019-08-30 | 2019-08-30 | A kind of magnet steel swing type head assemblies being built in vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910814429.7A CN110453188A (en) | 2019-08-30 | 2019-08-30 | A kind of magnet steel swing type head assemblies being built in vacuum cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110453188A true CN110453188A (en) | 2019-11-15 |
Family
ID=68490115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910814429.7A Pending CN110453188A (en) | 2019-08-30 | 2019-08-30 | A kind of magnet steel swing type head assemblies being built in vacuum cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110453188A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113802097A (en) * | 2021-09-17 | 2021-12-17 | 北京航空航天大学 | Tool for preparing thermal barrier coating of blade |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2656432Y (en) * | 2003-09-11 | 2004-11-17 | 深圳豪威真空光电子股份有限公司 | Rotary type magnetic controlled sputtering target |
| CN2873800Y (en) * | 2005-09-13 | 2007-02-28 | 北京实力源科技开发有限责任公司 | Target device |
| CN103147056A (en) * | 2013-03-26 | 2013-06-12 | 长春科纳光电技术有限公司 | Moving field vacuum coating magnetron sputtering source |
| CN103409725A (en) * | 2013-05-22 | 2013-11-27 | 东莞宏威数码机械有限公司 | Rotary alien target cathode mechanism and magnetron sputtering coating device |
| CN103938171A (en) * | 2014-04-12 | 2014-07-23 | 合肥工业大学 | Device and method for improving sputtering cathode target utilization rate and coating uniformity |
| CN206157219U (en) * | 2016-10-21 | 2017-05-10 | 斡兹真空科技（上海）有限公司 | Rotating cathode with adjustable target surface magnetic field intensity |
| CN206157215U (en) * | 2016-10-21 | 2017-05-10 | 斡兹真空科技（上海）有限公司 | Novel rotating cathode |
| CN107058965A (en) * | 2017-06-28 | 2017-08-18 | 武汉科瑞达真空科技有限公司 | A kind of built-in rotating cathode structure |
| CN210394510U (en) * | 2019-08-30 | 2020-04-24 | 深圳市金耀玻璃机械有限公司 | Magnetic steel swinging end assembly arranged in vacuum cavity |
-
2019
- 2019-08-30 CN CN201910814429.7A patent/CN110453188A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2656432Y (en) * | 2003-09-11 | 2004-11-17 | 深圳豪威真空光电子股份有限公司 | Rotary type magnetic controlled sputtering target |
| CN2873800Y (en) * | 2005-09-13 | 2007-02-28 | 北京实力源科技开发有限责任公司 | Target device |
| CN103147056A (en) * | 2013-03-26 | 2013-06-12 | 长春科纳光电技术有限公司 | Moving field vacuum coating magnetron sputtering source |
| CN103409725A (en) * | 2013-05-22 | 2013-11-27 | 东莞宏威数码机械有限公司 | Rotary alien target cathode mechanism and magnetron sputtering coating device |
| CN103938171A (en) * | 2014-04-12 | 2014-07-23 | 合肥工业大学 | Device and method for improving sputtering cathode target utilization rate and coating uniformity |
| CN206157219U (en) * | 2016-10-21 | 2017-05-10 | 斡兹真空科技（上海）有限公司 | Rotating cathode with adjustable target surface magnetic field intensity |
| CN206157215U (en) * | 2016-10-21 | 2017-05-10 | 斡兹真空科技（上海）有限公司 | Novel rotating cathode |
| CN107058965A (en) * | 2017-06-28 | 2017-08-18 | 武汉科瑞达真空科技有限公司 | A kind of built-in rotating cathode structure |
| CN210394510U (en) * | 2019-08-30 | 2020-04-24 | 深圳市金耀玻璃机械有限公司 | Magnetic steel swinging end assembly arranged in vacuum cavity |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113802097A (en) * | 2021-09-17 | 2021-12-17 | 北京航空航天大学 | Tool for preparing thermal barrier coating of blade |
| CN113802097B (en) * | 2021-09-17 | 2022-05-20 | 北京航空航天大学 | Tool for preparing thermal barrier coating of blade |
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