CN110448968A - Exhaust gas processing device - Google Patents
Exhaust gas processing device Download PDFInfo
- Publication number
- CN110448968A CN110448968A CN201910759052.XA CN201910759052A CN110448968A CN 110448968 A CN110448968 A CN 110448968A CN 201910759052 A CN201910759052 A CN 201910759052A CN 110448968 A CN110448968 A CN 110448968A
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- Prior art keywords
- exhaust gas
- filter
- filter house
- shell
- processing device
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- 238000012545 processing Methods 0.000 title claims abstract description 49
- 239000007787 solid Substances 0.000 claims abstract description 24
- 238000001914 filtration Methods 0.000 claims abstract description 19
- 239000008187 granular material Substances 0.000 claims abstract description 19
- 239000011148 porous material Substances 0.000 claims abstract description 11
- 238000007789 sealing Methods 0.000 claims description 12
- 238000009826 distribution Methods 0.000 claims description 5
- 238000007596 consolidation process Methods 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 abstract description 14
- 230000008569 process Effects 0.000 abstract description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000012423 maintenance Methods 0.000 abstract description 5
- 238000005265 energy consumption Methods 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 10
- 239000002245 particle Substances 0.000 description 8
- 230000009286 beneficial effect Effects 0.000 description 6
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
- B01D46/0008—Two or more filter elements not fluidly connected positioned in the same housing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
- B01D46/12—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces in multiple arrangements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/54—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms
- B01D46/543—Particle separators, e.g. dust precipitators, using ultra-fine filter sheets or diaphragms using membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/56—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition
- B01D46/62—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series
- B01D46/64—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with multiple filtering elements, characterised by their mutual disposition connected in series arranged concentrically or coaxially
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2265/00—Casings, housings or mounting for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2265/06—Details of supporting structures for filtering material, e.g. cores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2271/00—Sealings for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2271/02—Gaskets, sealings
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
The present invention provides a kind of exhaust gas processing devices, including shell, intake section, exhaust portion and setting are in the intracorporal filter house of the shell and cradle portion.The direction that the bottom of the shell is directed toward at the top from the shell of the exhaust gas processing device is provided with N number of sub- filter house that pore size filter successively increases, so that the exhaust gas to be processed in the exhaust gas processing device from bottom to top movements during, the filter house can successively intercept the solid granulates of different-grain diameter in the exhaust gas to be processed, reduce the resistance in gas operational process, the energy consumption and maintenance frequency for reducing vacuum pump are conducive to improve production efficiency.In addition the bottom bracket of the cradle portion makes the lower end surface of the filter house higher than the top level of the air inlet, and the radial dimension of every sub- filter house and the internal diameter of the shell are adapted, and can guarantee to carry out effective filtration treatment to all exhaust gas to be processed.
Description
Technical field
The present invention relates to semiconductor processing technology field more particularly to a kind of exhaust gas processing devices.
Background technique
In silicon chip of solar cell manufacturing process, with atomic layer deposition (Atomic Layer Deposition, ALD)
For technique, by two or more precursor gas under flow control and pulse control introducing technology chamber, and to technique
Intracavitary progress temperature control and pressure control, make the surface of substrate that physical absorption and surface chemical reaction occur, are generated with controlling
Functional membrane, such as the thickness and the uniformity of the field-effects passivating film such as aluminium oxide or silica effectively make up lacking for substrate surface
It falls into.
However, production and pair that chemical reaction generates occur since deposition reaction carries out under vacuum conditions, between presoma
The solid granulates such as the dust in product and process cavity can be arranged on the extraction of the vacuum pump outside process cavity, unreacted forerunner
Gas through vacuum pump extract out process cavity after, due to chamber outside temperature and pressure change also converted into solid granulates.These solid-states
Particle once enters in the pump housing of vacuum pump, will affect the service life of vacuum pump.Vacuum pump once breaks down repeatedly, shuts down
Maintenance not only will increase maintenance cost, it is often more important that will affect the production efficiency of the entire production line.
Notification number is that the Chinese invention patent application of CN104107601A discloses a kind of particle collection device, which receives
Acquisition means are internally provided with strainer, to intercept the solid granulates in tail gas.However, each layer strainer of the particle collection device is
80 mesh specifications, once the average particle size distribution of the solid granulates in tail gas is very wide, and discharge amount increases, pumping of the gas in vacuum pump
The resistance encountered during flowing through strainer from bottom to top under power effect obviously increases, to increase the energy consumption of vacuum pump, and shadow
Ring the service life of vacuum pump.
Therefore, it is necessary to develop the novel exhaust gas processing device of one kind to avoid the above-mentioned problems in the prior art.
Summary of the invention
The purpose of the present invention is to provide a kind of exhaust gas processing devices, for effectively intercepting consolidating in exhaust gas to be processed
It can reduce the energy consumption and maintenance frequency of vacuum pump while state particle, to be conducive to improve production efficiency.
The exhaust gas processing device of the invention includes that shell, intake section, exhaust portion and setting are intracorporal in the shell
Filter house and cradle portion, the cradle portion include bottom bracket；Air inlet and institute of the intake section by the housing sidewall
It states enclosure interior to communicate, the intake section is through the top of the shell to communicate with the enclosure interior；The bottom bracket
It is set between the bottom of the shell and the filter house, to support the filter house, keeps the lower end surface of the filter house high
In the top level of the air inlet；The filter house includes setting gradually along the first axial direction of the shell, and phase
Mutually for the first parallel sub- filter house to the sub- filter house of N, N is the natural number more than or equal to 3；The radial dimension of every sub- filter house
It is adapted with the internal diameter of the shell；The pore size filter of different sub- filter houses successively increases along the first axial direction of the shell
Add, the bottom of the shell is directed toward at the top of first axial direction from the shell of the shell.
The beneficial effect of the exhaust gas processing device of the invention is: in the exhaust gas processing device, the intake section
Through the housing sidewall, the exhaust portion runs through the case top, and is directed toward the shell from the top of the shell
The direction of bottom is provided with N number of sub- filter house that pore size filter successively increases along the first axial direction so that it is described to
Handle exhaust gas in the exhaust gas processing device from bottom to top movements during, the filter house can successively intercept institute
The solid granulates for stating different average grain diameters in exhaust gas to be processed, reduce the resistance in gas operational process, to reduce vacuum pump
Energy consumption and maintenance frequency, the service life of vacuum pump is conducive to extend, to improve production efficiency.In addition, the bottom branch
Frame portion makes the lower end surface of the filter house be higher than the top level of the air inlet, and the radial dimension of every sub- filter house with
The internal diameter of the shell is adapted, and can guarantee that the exhaust gas to be processed all flows through the filter house, with to solid granulates into
The effective filtration treatment of row.
Preferably, the pore size filter of the described first sub- filter house is 1-1.5 millimeters, the filter hole of the sub- filter house of N
Diameter is 4-6 millimeters.The beneficial effect is that: be conducive to the solid granulates for successively intercepting different average grain diameters, reduce gas operation
Resistance in the process.
Preferably, every sub- filter house includes being parallel to each other, and the identical M layers of filter screen of structure, M are more than or equal to 1
Natural number.The beneficial effect is that: further promote the interdiction capability to solid granulates.
It is further preferred that the cradle portion further includes supporting support, between adjacent head net or adjacent sub- filter house it
Between be provided with the supporting support.The beneficial effect is that: further strengthen the branch to each filter screen or every sub- filter house
Support effect, to guarantee the stabilization of airflow channel.
It is further preferred that every layer of filter screen includes a plurality of filter mesh, the minimum edge of adjacent head mesh away from for
1.5-3.5 millimeter.
Still more preferably, a plurality of filter mesh are along the center of the filter screen with annular array or rectangular battle array
The formal distribution of column.
Preferably, the filter house further includes miillpore filter, and the miillpore filter is fixedly connected on the first son filtering
The upper surface in portion, and aperture is 5-10 microns.The beneficial effect is that: further obstruct granularity in the exhaust gas to be processed very
Small solid granulates promote the filter capacity of the exhaust gas processing device.
It preferably, further include setting in the intracorporal lifting guide part of the shell, the fixing end of the lifting guide part and institute
It states bottom bracket to be fixedly connected, lift end runs through the filter house, to be fixedly connected with the filter house.Its advantages exist
In: convenient for the filter house and the cradle portion are disposably proposed the shell by the lifting guide part, with quickly clear
Manage the solid granulates intercepted.
Preferably, the shell includes upper cover, lower cover and cylinder, at the top of the upper cover and the cylinder between and it is described
Connection is detachably fixed by locking mechanism between lower cover and the cylinder body bottom, to reinforce the sealing performance of the shell.
It is further preferred that between at the top of the upper cover and the cylinder and between the lower cover and the cylinder body bottom
Sealing structure is all had, to further strengthen the sealing performance of the shell.
It is further preferred that the cradle portion further includes top-support, the top-support is set to the filter house
Upper surface, and height is mutually fitted with the vertical height for limiting space between the upper surface of the filter house and the lower end surface of the upper cover
It answers.The beneficial effect is that: the roof timbering and the cradle portion further strengthen the work of the support to the filter house jointly
With.
It is further preferred that the inner sidewall of the cylinder has anti-stick layer, it is solid because accumulating to avoid the solid granulates
It ties and influences gas passage.
Still more preferably, the surface of the cradle portion or the surface of the filter house have the anti-stick layer.
Preferably, the interface end of the interface end of the intake section and the exhaust portion is also respectively provided with air inlet switching part
With exhaust switching part.
Detailed description of the invention
Fig. 1 is the working state schematic representation of the first exhaust gas processing device of the embodiment of the present invention 1；
Fig. 2 is the cross-sectional view of the second exhaust gas processing device of the embodiment of the present invention 2；
Fig. 3 a is a kind of structural schematic diagram of filter screen of the embodiment of the present invention 3；
Fig. 3 b is the structural schematic diagram of another filter screen of the embodiment of the present invention 3；
Fig. 4 is the structural schematic diagram of the second bottom bracket of the embodiment of the present invention 4；
Fig. 5 is the structural schematic diagram of the supporting support of the embodiment of the present invention 5；
Fig. 6 is the structural schematic diagram of the first top-support of the embodiment of the present invention 6.
Specific embodiment
To make the object, technical solutions and advantages of the present invention clearer, below in conjunction with attached drawing of the invention, to this hair
Technical solution in bright embodiment is clearly and completely described, it is clear that described embodiment is that a part of the invention is real
Example is applied, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making creation
Property labour under the premise of every other embodiment obtained, shall fall within the protection scope of the present invention.Unless otherwise defined, make herein
Technical term or scientific term should be persons with general skills in the field understood it is usual
Meaning.The similar word such as " comprising " used herein, which means to occur element or object before the word, to be covered and appears in this
The element of word presented hereinafter perhaps object and its equivalent and be not excluded for other elements or object.
In view of the problems of the existing technology, the embodiment provides a kind of exhaust gas processing devices.
Fig. 1 is the working state schematic representation of the first exhaust gas processing device of the embodiment of the present invention 1.
Referring to Fig.1, the first exhaust gas processing device 11 is between process cavity 12 and gas collecting equipment 13, inlet channel 14
Both ends are respectively communicated with the bottom of the process cavity 12 and the side wall of first exhaust gas processing device 11, and exhaust passage 15 is distinguished
It is connected to the vacuum pump (not indicating in figure) being arranged in the top and the gas collecting equipment 13 of first exhaust gas processing device 11.
After the vacuum pump startup of the vacuum gas collecting equipment 13, in the process cavity 12 to substrate (not indicated in figure) into
Row coating process, while generating the exhaust gas to be processed comprising solid particle；The exhaust gas to be processed along the inlet channel 14 into
Enter first exhaust gas processing device 11, to be filtered processing to the solid particle, forms purification exhaust gas；The purification is useless
Gas enters in the gas collecting equipment 13 through the exhaust passage 15, to carry out subsequent gas treatment.
In some embodiments of the invention, the process cavity 12 is the reaction cavity of ALD deposition equipment.
In the embodiment of the present invention, the exhaust gas processing device is single cavity body structure, including shell, intake section, exhaust portion
And it is arranged in the intracorporal filter house of the shell and cradle portion.The cradle portion includes bottom bracket, top-support and support branch
Frame.
The filter house includes the first son filtering for setting gradually along the first axial direction of the shell, and being parallel to each other
To the sub- filter house of N, N is the natural number more than or equal to 3 in portion.
In some embodiments of the invention, the pore size filter of the first sub- filter house is 1-1.5 millimeters, the sub- mistake of N
The pore size filter in filter portion is 4-6 millimeters.
The pore size filter of different sub- filter houses is successively increased along the first axial direction of the shell, and the first of the shell
It is directed toward the bottom of the shell in the top of axial direction from the shell.
In some embodiments of the invention, the exhaust gas processing device further includes lifting guide part.The present invention is some specific
In embodiment, the lifting guide part is guide post.
Fig. 2 is the cross-sectional view of the second exhaust gas processing device of the embodiment of the present invention 2.
Referring to Fig. 2, the second exhaust gas processing device 2 has cylinder 21, lid (not indicating in figure), exhaust portion 23 and intake section
24, and be cavity structure inside second exhaust gas processing device 2, it is provided with bottom bracket 25, filter house 26, middle bracket
27, top-support 28 and guide post 29.The filter house 26 has the first sub- filter house 261, the second sub- filter house 262, the
Three sub- filter houses 263 and the 4th sub- filter house 264.The lid (not indicating in figure) has upper cover 221, lower cover 223 and four
The identical latch segment 222 of a structure.
Specifically, referring to Figures 1 and 2, the exhaust portion 23 and the intake section 24 are the pipeline of column construction, described
Intake section 24 runs through the side wall of the cylinder 21 from the air inlet (not indicating in figure) of 21 side wall of cylinder, with described second
It is communicated inside exhaust gas processing device 2；The exhaust portion 23 runs through the lid 22 along the central axial direction of the cylinder 21, with
Communicated with inside second exhaust gas processing device 2 so that the exhaust gas to be processed flow through second exhaust gas processing device 2 with
During the gas collecting equipment 13, the big partial size solid granulates contained in the exhaust gas to be processed are also without the filtering
The filtering in portion 26, it will be able to because the gravity of itself is deposited in the bottom of the cylinder 21.
The bottom bracket 25 is arranged between 26 lower end surface of 21 bottom of cylinder and the filter house, and with it is described into
Gas portion 24 is oppositely arranged, and the lower end surface of the filter house 26 is higher than the top level 241 of the air inlet (not indicating in figure),
The exhaust gas to be processed is enabled all to flow through filter house 26, effectively to carry out the filtration treatment.
The first sub- filter house 261, the second sub- filter house 262, the sub- filter house 263 of the third and the described 4th
Sub- filter house 264 is set gradually along the bottom of central axial direction towards the cylinder 21 of the cylinder 21, every height filtering
Portion all has at least one filter screen, and the outer diameter of each filter screen is adapted with the internal diameter of the cylinder 21, so that the cylinder
The side edge of the inner sidewall of body 21 and each filter screen is touched, and inner sidewall and the filtering selvage due to the cylinder 21 are avoided
There are problems that effectively intercepting solid granulates caused by gap between edge.
For ease of description, defining the first sub- filter house 261, the second sub- filter house 262, the sub- filter house of the third
263 and every layer of filter screen in the 4th sub- filter house 264 mesh aperture be followed successively by the first aperture, the second aperture,
Third aperture and the 4th aperture.
Referring to Fig. 2, in some embodiments of the invention, first aperture, the second aperture, third aperture and the 4th aperture according to
Secondary increase, so that during the exhaust gas to be processed flows through the filter house 26, the 4th sub- filter house 264, described
Three sub- filter houses 263, the second sub- filter house 262 and the first sub- filter house 261 can successively intercept described wait locate
The solid granulates that average grain diameter is sequentially reduced in reason exhaust gas.
Specifically, it is 6 millimeters of filter screen that the first sub- filter house 261, which has one layer of first aperture, second son
It is 5 millimeters of filter screen that filter house 262, which has one layer of second aperture, and the sub- filter house 263 of third has one layer of third aperture
For 4 millimeters of filter screen, it is 1.5 millimeters of filter screen that the 4th sub- filter house 264, which has five layer of the 4th aperture,.The filtering
In all filter screens in portion 26, the interlamellar spacing of adjacent head net is equal.
Fig. 3 a is a kind of structural schematic diagram of filter screen of the embodiment of the present invention 3.Fig. 3 b is the another of the embodiment of the present invention 3
The structural schematic diagram of kind filter screen.
Referring to Fig. 3 and Fig. 4, the first filter screen 31 has circular first filtering surface (not indicating in figure), the second filter screen
32 have circular second filtering surface (not indicating in figure).The center of described first filtering surface (not indicating in figure) offers
The center of one through-hole 311, second filtering surface (not indicating in figure) offers the second through-hole 321.311 He of first through hole
Second through-hole 321 is for running through and being fixedly connected for guide post (not indicating in figure).It opens on first filter screen, 31 surface
If a plurality of mesh there is same aperture, and along the center of first filter screen 31 with the formal distribution of annular array；Institute
Stating a plurality of mesh that 32 surface of the second filter screen opens up has same aperture, and along the center of second filter screen 32 with side
The formal distribution of shape array.
In some embodiments of the invention, the minimum edge of the adjacent head mesh of every sub- filter house is away from being 1.5-3.5 millimeters.
The minimum edge is away from the minimum linear distance between the edge for being defined as adjacent head mesh.The some specific embodiments of the present invention
In, the minimum edge is away from being 2 millimeters.
In some embodiments of the invention, referring to Fig. 2, in order to further increase the filter house 26 to average particle size very little
The upper surface of the interdiction capability of solid granulates, the first sub- filter house 261 is provided with miillpore filter (not indicating in figure), described
The aperture of miillpore filter is 5-10 microns.
In some embodiments of the invention, the upper cover 221 and the lower cover 223 pass through locking knot with the cylinder 21 respectively
Structure is detachably fixed connection, to reinforce the sealing performance of the shell.
Specifically, the upper cover 221 and the top bump portion 211 of the cylinder 21 pass through two lockings referring to Fig. 2
Block 222 is detachably fixed connection；The bottom protrusion portion 212 of the lower cover 223 and the cylinder 21 passes through other two described lock
Tight block 222 is detachably fixed connection.
In some specific embodiments of the present invention, the latch segment 222 is detachably solid in such a way that bolt and nut is fixed
Surely the upper cover 221 and the lower cover 223 are connected.
In some embodiments of the invention, between the upper cover 221 and the cylinder 21 and the lower cover 223 with it is described
Sealing structure is all had between cylinder 21, to further strengthen the sealing performance of the shell.
Specifically, referring to Fig. 2, between the top bump portion 211 and the upper cover 221 and bottom protrusion portion
Sealing ring (not indicating in figure) is additionally provided between 212 and the lower cover 223, respectively to further strengthen the cylinder 21 and institute
State the sealing relationship between lid (not indicating in figure).
In some embodiments of the invention, referring to Figures 1 and 2, the interface end of the intake section 24 is additionally provided with air inlet switching
Portion (does not indicate) in figure, so that 12 inside of the process cavity and the 2 inside high-speed communication of the second exhaust gas processing device.It is described
The interface end of exhaust portion 23 is additionally provided with exhaust switching part (not indicating in figure), with the second exhaust gas processing device described in high-speed communication
2 inside and the pump end pipe road in the gas collecting equipment 13.
In some specific embodiments of the present invention, the air inlet switching part and the exhaust switching part are adapter flange,
The specific implementation form of the adapter flange is the conventional technical means that those skilled in the art use, and this will not be repeated here.
In some embodiments of the invention, referring to Fig. 2, the guide post 29 is arranged along the axial direction of the cylinder 21, and
Through the center of every layer of filter screen of the filter house 26.The bottom of the guide post 29 and the bottom of the bottom bracket 25 are solid
Fixed connection, top is provided with stretching structure (not indicating in figure).
Since the diameter of every layer of filter screen of the filter house 26 is adapted with the radial dimension of the cylinder 21, but institute
The inner sidewall of the edge and the cylinder 21 of stating every layer of filter screen of filter house 26 is not fixed setting, described in releasing
Locking relation between upper cover 221 and the top bump portion 211 is led described in lifting after communicating the cylinder 21 with outside
It, can be by the filter house 26, all supporting supports being arranged between adjacent head portion and the bottom bracket to column 29
25 it is whole remove the cylinders 21, in order to subsequent to quickly being cleaned inside the filter house 26 and the cylinder 21
Processing.
Fig. 4 is the structural schematic diagram of the second bottom bracket of the embodiment of the present invention 4.
Referring to Fig. 4, the second bottom bracket 4 is open-topped cylindrical structure, has the top that shape is identical and diameter is equal
Portion's fixed ring 41 and bottom fixed board 42, and be fixed between the top fixed ring 41 and the bottom fixed board 42 12
The identical vertical fixed link 43 of structure.
Referring to Fig. 2 and Fig. 4, the bottom in the cylinder 21, and the guide post 29 is arranged in the bottom fixed board 42
One end be fixedly connected with the bottom fixed board 42.The lower end of the top fixed ring 41 and the described 4th sub- filter house 264
Face, i.e., the lower end surface of the nearest filter screen of 21 bottom linear distance of cylinder described in distance is fixed in the described 4th sub- filter house 264
Connection.Bottom to the air inlet that the height of second bottom bracket 4 is more than or equal to the cylinder 21 (does not indicate) in figure
Top level 241 vertical range, enable the exhaust gas to be processed all to flow through the filter house 26, with effectively into
The row filtration treatment.
In some embodiments of the invention, adjacent head is provided with supporting support between portion, to constitute middle bracket, thus right
Adjacent head portion plays a supporting role.Referring to Fig. 2, the middle bracket 27 has the first supporting support 271, the second supporting support
272 and third supporting support 273, the first sub- filter house 261, the second sub- filter house 262, third filtering
The first support branch is respectively arranged between the sub- filter house of adjacent two of portion 263 and the 4th sub- filter house 264
Frame 271, second supporting support 272 and the third supporting support 273.
In some specific embodiments of the present invention, first supporting support 271, the second supporting support 272 and third
The structure having the same of supporting support 273.
Fig. 5 is the structural schematic diagram of the supporting support of the embodiment of the present invention 5.
Referring to Fig. 4 and Fig. 5, supporting support 5 and the difference of second bottom bracket 4 are: the bottom of the supporting support 5
Portion and top plate are fixed ring structure, and the spatial altitude limited between the height of the supporting support 5 and adjacent sub- filter house
It being adapted, i.e., the top fixed ring and bottom fixed ring of the described supporting support 5 are fixedly connected with adjacent sub- filter house respectively, with
Reinforce the supporting role to adjacent sub- filter house.
In some embodiments of the invention, branch is provided in the space that limits between the adjacent head net of every sub- filter house
Support structure, the support construction have structure identical with the supporting support 5.
In some embodiments of the invention, the sub- filter house upper surface is fixedly connected with top-support, the top-support
It is contained in the exhaust gas processing device, to further strengthen the supporting role to the filter house.Referring to Fig. 2, the filtering
The upper surface in portion 26 is fixedly connected with the top-support 28 being contained in inside the cylinder 21, to further strengthen to described first
The supporting role of sub- filter house 261.
Fig. 6 is the structural schematic diagram of the first top-support of the embodiment of the present invention 6.
Referring to Fig. 2, Fig. 5 and Fig. 6, the first top-support 6 and the difference of the supporting support 5 are: first top
Hanging down for space is limited between the lower end surface of the upper surface and the upper cover 221 of the height of bracket 6 and the first sub- filter house 261
Straight height is adapted, with the upper cover 221 by the latch segment 222 by the cylinder 21 sealing after, first top
Bracket 6 and the bottom bracket 25 can be by the relatively fixed inside in the cylinder 21 of the filter house 26, when described wait locate
Reason exhaust gas (not indicated in figure) flow through the filter house 26 during, the filter house 26 can the relatively described cylinder 21 do not send out
Raw relative movement.
In some embodiments of the invention, referring to Fig. 2, the inner sidewall of the cylinder 21, the cradle portion (not indicated in figure)
Surface or the filter house 26 surface have anti-stick layer, to avoid the solid granulates because accumulate consolidation due to influence gas
Channel.
In some embodiments of the invention, the supporting support surface between the adjacent filter screen has the anti-stick layer.
Although embodiments of the present invention are hereinbefore described in detail, show for those skilled in the art
And be clear to, these embodiments can be carry out various modifications and be changed.However, it is understood that this modifications and variations all belong to
Within scope and spirit of the present invention described in the claims.Moreover, the present invention described herein can have others real
Mode is applied, and can be practiced or carried out in several ways.
Claims (14)
1. a kind of exhaust gas processing device, which is characterized in that for intercepting the solid granulates in exhaust gas to be processed, the vent gas treatment
Device includes shell, intake section, exhaust portion and is arranged in the intracorporal filter house of the shell and cradle portion, and the cradle portion includes
Bottom bracket；
The intake section is communicated by the air inlet of the housing sidewall with the enclosure interior, and the exhaust portion runs through the shell
The top of body with the enclosure interior to communicate；
The bottom bracket is set between the bottom of the shell and the filter house, to support the filter house, is made described
The lower end surface of filter house is higher than the top level of the air inlet；
The filter house includes setting gradually along the first axial direction of the shell, and the sub- filter house of first to be parallel to each other is extremely
The sub- filter house of N, N are the natural number more than or equal to 3；
The radial dimension of every sub- filter house and the internal diameter of the shell are adapted；
The pore size filter of different sub- filter houses is successively increased along the first axial direction of the shell, the first axis of the shell
It is directed toward the bottom of the shell in the top of direction from the shell.
2. exhaust gas processing device according to claim 1, which is characterized in that the pore size filter of the first sub- filter house is
1-1.5 millimeters, the pore size filter of the sub- filter house of N is 4-6 millimeters.
3. exhaust gas processing device according to claim 1, which is characterized in that each sub- filter house includes mutually flat
Row, and the identical M layers of filter screen of pore size filter, M are the natural number more than or equal to 1.
4. exhaust gas processing device according to claim 3, which is characterized in that the cradle portion further includes supporting support, phase
The supporting support is provided between the adjacent filter screen or between the adjacent sub- filter house.
5. exhaust gas processing device according to claim 3, which is characterized in that the filter screen includes a plurality of filter screens
Hole, the minimum edge of the adjacent filter mesh is away from being 1.5-3.5 millimeters.
6. exhaust gas processing device according to claim 5, which is characterized in that a plurality of filter mesh are along the filtering
The center of net is with annular array or the formal distribution of square array.
7. exhaust gas processing device according to claim 1, which is characterized in that the filter house further includes miillpore filter, institute
The upper surface that miillpore filter is set to the described first sub- filter house is stated, and aperture is 5-10 microns.
8. exhaust gas processing device according to claim 1, which is characterized in that further include being arranged in the intracorporal lifting of the shell
The fixing end of guide part, the lifting guide part is fixedly connected with the bottom bracket, lift end through the filter house, with
The filter house is fixedly connected.
9. exhaust gas processing device according to claim 1, which is characterized in that the shell includes upper cover, lower cover and cylinder,
It is detachable to pass through locking mechanism between at the top of the upper cover and the cylinder and between the lower cover and the cylinder body bottom
It is fixedly connected, to reinforce the sealing performance of the shell.
10. exhaust gas processing device according to claim 9, which is characterized in that between at the top of the upper cover and the cylinder
And sealing structure is all had between the lower cover and the cylinder body bottom, to further strengthen the sealing performance of the shell.
11. exhaust gas processing device according to claim 9, which is characterized in that the cradle portion further includes top-support, institute
State the upper surface that top-support is set to the filter house, and height and the upper surface of the filter house and the lower end of the upper cover
The vertical height that space is limited between face is adapted.
12. exhaust gas processing device according to claim 9, which is characterized in that the inner sidewall of the cylinder has anti-stick
Layer influences gas passage because accumulating consolidation to avoid the solid granulates.
13. exhaust gas processing device according to claim 12, which is characterized in that the surface of the cradle portion or the filtering
The surface in portion has the anti-stick layer.
14. exhaust gas processing device according to claim 1, which is characterized in that the interface end of the intake section and described
The interface end of exhaust portion is also respectively provided with air inlet switching part and exhaust switching part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910759052.XA CN110448968A (en) | 2019-08-16 | 2019-08-16 | Exhaust gas processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910759052.XA CN110448968A (en) | 2019-08-16 | 2019-08-16 | Exhaust gas processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110448968A true CN110448968A (en) | 2019-11-15 |
Family
ID=68487235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910759052.XA Pending CN110448968A (en) | 2019-08-16 | 2019-08-16 | Exhaust gas processing device |
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| Country | Link |
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| CN (1) | CN110448968A (en) |
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Address after: Room 402, building 3, 3255 Sixian Road, Songjiang District, Shanghai, 201602 Applicant after: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Address before: 201620 Shanghai city Songjiang District Sixian Road No. 3255 Building No. 3, B building four floor Applicant before: DEPOSITION EQUIPMENT AND APPLICATIONS (SHANGHAI) Ltd. |
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