CN110445005B - Hardware interlocking control system and method based on excimer laser - Google Patents
Hardware interlocking control system and method based on excimer laser Download PDFInfo
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- CN110445005B CN110445005B CN201910742243.5A CN201910742243A CN110445005B CN 110445005 B CN110445005 B CN 110445005B CN 201910742243 A CN201910742243 A CN 201910742243A CN 110445005 B CN110445005 B CN 110445005B
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/042—Programme control other than numerical control, i.e. in sequence controllers or logic controllers using digital processors
- G05B19/0423—Input/output
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/09702—Details of the driver electronics and electric discharge circuits
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- Optics & Photonics (AREA)
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- Automation & Control Theory (AREA)
- Lasers (AREA)
Abstract
The invention relates to the technical field of lasers, in particular to a hardware interlocking control system and a method thereof based on an excimer laser; according to the invention, the hardware interlocking management unit receives the cavity switch signal sent by the sensor and simultaneously receives the control signal sent by the photoetching machine, the hardware interlocking management unit sends the channel switch signal to the power distribution management unit and simultaneously sends the interlocking signal to the main controller, the main controller performs interlocking signal logic processing, the hardware interlocking management unit is integrated, and the interlocking information CAN interface is added to be transmitted to the laser, so that the working safety of the laser is improved, and the equipment and personal safety are effectively protected.
Description
Technical Field
The invention relates to the technical field of lasers, in particular to a hardware interlocking control system and a method thereof based on an excimer laser.
Background
An excimer laser is a pulse gas laser applied to deep ultraviolet features, has the characteristics of high repetition frequency, large energy, short wavelength, narrow line width and the like, is an excellent laser light source for a microelectronic photoetching system, and a working substance of the excimer laser is made of inert gas (neon, argon, krypton, xenon and the like) and halogen elements (fluorine, chlorine, bromine and the like), and forms a mixed state of two atomic gases when in a ground state, and generates a compound when excited to a high energy level by a short pulse current, wherein each molecule of the compound is formed by two gases respectively contributing one atom to form an excimer state. Ultraviolet laser light is radiated when electrons transition from a high energy level to a low energy level.
The excimer laser needs to excite the high-voltage discharge of a gas medium in the working process, required signals of the excimer laser pass through a power management unit, a high-voltage boosting module and a solid-state switch, magnetic pulses are compressed to form dozens of kilovolts, microsecond-level pulse widths and thousands of amperes of peak current signals, so that the laser has strong electromagnetic interference in the working process, the system signal transmission has strong requirements on interference resistance, each module in the excimer laser is expensive in manufacturing cost, and high voltage and high current are generated in the working process, so that the system has high requirements on the safety of personnel and equipment. At present, the integral interlocking mechanism of the excimer laser is not perfect enough, and the following problems exist: firstly, time delay exists; secondly, communication faults and other problems caused by system electromagnetic interference of a communication link exist.
Disclosure of Invention
The invention mainly solves the technical problem of providing a hardware interlocking control system based on an excimer laser, a hardware interlocking management unit receives a cavity switch signal sent by a sensor and simultaneously receives a control signal sent by a photoetching machine, the hardware interlocking management unit sends a channel switch signal to a power distribution management unit and simultaneously sends an interlocking signal to a main controller, the main controller carries out interlocking signal logic processing, the hardware interlocking management unit is integrated, an interlocking information CAN interface is added for transmitting the interlocking signal to the laser, the working safety of the laser is improved, equipment and personal safety are effectively protected, and a hardware interlocking control method based on the excimer laser is also provided.
In order to solve the technical problems, the invention adopts a technical scheme that: the hardware interlocking control system based on the excimer laser is in wireless communication with a master controller of the laser, and comprises a sensor, a photoetching machine, a hardware interlocking management unit and a power distribution management unit, wherein the sensor is arranged in the laser and used for monitoring the cavity condition in the laser, the photoetching machine is used for sending a control signal, the hardware interlocking management unit is used for sending an interlocking signal to the master controller, and the power distribution management unit is used for supplying power; the hardware interlocking management unit receives the cavity switch signal sent by the sensor and simultaneously receives the control signal sent by the photoetching machine, the hardware interlocking management unit sends a channel switch signal to the power distribution management unit and simultaneously sends an interlocking signal to the main controller, and the main controller performs interlocking signal logic processing.
As an improvement of the present invention, the hardware interlock management unit includes an interlock detector for detecting an interlock switch signal input from outside, an MCU for receiving a TTL level signal sent by the interlock detector, an interlock logic output device for receiving a control signal sent by the MCU and outputting a channel switch signal to the power distribution management unit, and a communication interface CAN for sending an interlock signal to the master controller.
As a further improvement of the invention, the cavity switching signal comprises a cavity temperature overrun signal, a cavity pressure overrun signal and a gas flow overrun signal.
As a further improvement of the invention, the control signals sent by the photoetching machine comprise a user remote starting signal, a user remote stopping signal and an external factory gas interlocking signal.
As a further improvement of the invention, the communication interface CAN has an isolation function.
A hardware interlocking control method based on an excimer laser comprises the following steps:
step S1, the hardware interlock management unit receives the cavity switch signal sent by the sensor and the transmission signal sent by the lithography machine at the same time.
Step S2, the hardware interlocking management unit sends a channel switch signal to the power distribution management unit and sends an interlocking signal to the master controller;
step S3, the master performs logic processing on the interlock signal.
As a modification of the present invention, in step S1, the chamber switching signals include a chamber temperature overrun signal, a chamber pressure overrun signal, and a gas flow overrun signal.
As a further improvement of the present invention, in step S1, the control signals sent by the lithography machine include a user remote start signal, a user remote stop signal and an external plant gas interlock signal.
As a further improvement of the present invention, step S2 includes the following steps:
step S21, the interlock detector detects the interlock switch signal input from outside and sends out TTL level signal;
step S22, the MCU receives the TTL level signal and sends a control signal;
step S23, the interlock logic output device receives the control signal and outputs a channel switch signal to the power distribution management unit; meanwhile, the communication interface CAN sends an interlocking signal to the master controller.
As a further improvement of the present invention, in step S3, the master logic processing the interlock information includes: and interrupting the communication interface CAN to inquire the received information, continuing to interrupt and wait if the interlocking information is not received, judging the working state of the laser at the moment if the interlocking information is received, keeping the state of the laser if the laser is in the LaserOff state, prompting alarm information by an interface, storing the interlocking information, returning the laser to the LaserOff state if the laser is in the non-LaserOff state, prompting the alarm information by the interface, and storing the interlocking information.
The invention has the beneficial effects that: according to the invention, the hardware interlocking management unit receives the cavity switch signal sent by the sensor and simultaneously receives the control signal sent by the photoetching machine, the hardware interlocking management unit sends the channel switch signal to the power distribution management unit and simultaneously sends the interlocking signal to the main controller, the main controller performs interlocking signal logic processing, the hardware interlocking management unit is integrated, and the interlocking information CAN interface is added to be transmitted to the laser, so that the working safety of the laser is improved, and the equipment and personal safety are effectively protected.
Drawings
FIG. 1 is a connection block diagram of an excimer laser based hardware interlock control system of the present invention;
FIG. 2 is a block diagram of the internal connections of the hardware interlock management unit of the present invention;
FIG. 3 is a block diagram illustrating the steps of the excimer laser based hardware interlock control method of the present invention;
FIG. 4 is a block diagram of the internal steps of step S2 according to the present invention;
fig. 5 is a flowchart of step S3 according to the present invention.
Detailed Description
Referring to fig. 1 to 2, a hardware interlock control system based on an excimer laser according to the present invention, which is in wireless communication with a master controller of the laser, includes a sensor disposed in the laser for monitoring a cavity condition in the laser, a lithography machine for sending a control signal, a hardware interlock management unit for sending an interlock signal to the master controller, and a power distribution management unit for supplying power.
In the invention, the hardware interlocking management unit receives a cavity switch signal sent by the sensor and simultaneously receives a control signal sent by the photoetching machine, the hardware interlocking management unit sends a channel switch signal to the power distribution management unit and simultaneously sends an interlocking signal to the main controller, and the main controller carries out interlocking signal logic processing.
According to the invention, the hardware interlocking management unit receives the cavity switch signal sent by the sensor and simultaneously receives the control signal sent by the photoetching machine, the hardware interlocking management unit sends the channel switch signal to the power distribution management unit and simultaneously sends the interlocking signal to the main controller, the main controller performs interlocking signal logic processing, the hardware interlocking management unit is integrated, and the interlocking information CAN interface is added to be transmitted to the laser, so that the working safety of the laser is improved, and the equipment and personal safety are effectively protected.
As shown in fig. 2, the hardware interlock management unit includes an interlock detector for detecting an interlock switch signal input from outside, an MCU for receiving a TTL level signal sent by the interlock detector, an interlock logic output device for receiving a control signal sent by the MCU and outputting a channel switch signal to the power distribution management unit, and a communication interface CAN for sending an interlock signal to the master controller.
In the invention, the cavity switching signal comprises a cavity temperature overrun signal, a cavity pressure overrun signal and a gas flow overrun signal; the control signals sent by the photoetching machine comprise a user remote starting signal, a user remote stopping signal and an external factory gas interlocking signal.
In the invention, the communication interface CAN has an isolation function.
As shown in fig. 3 to 5, the hardware interlock control method based on excimer laser of the present invention includes the following steps:
step S1, the hardware interlock management unit receives the cavity switch signal sent by the sensor and the transmission signal sent by the lithography machine at the same time.
Step S2, the hardware interlocking management unit sends a channel switch signal to the power distribution management unit and sends an interlocking signal to the master controller;
step S3, the master performs logic processing on the interlock signal.
In step S1, the cavity switching signal includes a cavity temperature overrun signal, a cavity pressure overrun signal, and a gas flow overrun signal; the control signals sent by the photoetching machine comprise a user remote starting signal, a user remote stopping signal and an external factory gas interlocking signal.
As shown in fig. 4, step S2 includes the following steps:
step S21, the interlock detector detects the interlock switch signal input from outside and sends out TTL level signal;
step S22, the MCU receives the TTL level signal and sends a control signal;
step S23, the interlock logic output device receives the control signal and outputs a channel switch signal to the power distribution management unit; meanwhile, the communication interface CAN sends an interlocking signal to the master controller.
As shown in fig. 5, in step S3, the master performs logical processing on the interlock information: and interrupting the communication interface CAN to inquire the received information, continuing to interrupt and wait if the interlocking information is not received, judging the working state of the laser at the moment if the interlocking information is received, keeping the state of the laser if the laser is in the LaserOff state, prompting alarm information by an interface, storing the interlocking information, returning the laser to the LaserOff state if the laser is in the non-LaserOff state, prompting the alarm information by the interface, and storing the interlocking information.
On the basis of software interlocking, a hardware interlocking management unit is integrated, and an interlocking information CAN interface is added and transmitted to a laser, so that the working safety of the laser is improved, and equipment and personal safety are effectively protected; the invention takes the interlocking mechanism into consideration, combines software and hardware, makes up the deficiency of software interlocking by using the real-time performance of a hardware circuit, improves the interlocking real-time performance, effectively stores interlocking information and greatly improves the system safety.
The above description is only an embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications of equivalent structures and equivalent processes performed by the present specification and drawings, or directly or indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (7)
1. A hardware interlocking control system based on an excimer laser is in wireless communication with a master controller of the laser and is characterized by comprising a sensor, a photoetching machine, a hardware interlocking management unit and a power distribution management unit, wherein the sensor is arranged in the laser and used for monitoring the cavity condition in the laser, the photoetching machine is used for sending a control signal, the hardware interlocking management unit is used for sending an interlocking signal to the master controller, and the power distribution management unit is used for supplying power;
the hardware interlocking management unit receives a cavity switching signal sent by the sensor and simultaneously receives a control signal sent by the photoetching machine, the hardware interlocking management unit sends a channel switching signal to the power distribution management unit and simultaneously sends an interlocking signal to the main controller, and the main controller performs interlocking signal logic processing;
the master controller logically processes the interlocking information: the CAN of the communication interface is interrupted to inquire received information, if interlocking information is not received, the interruption and the waiting are continued, if the interlocking information is received, the working state of the laser at the moment is judged, if the laser is in a LaserOff state, the laser maintains the state, the interface prompts alarm information and simultaneously stores the interlocking information, and if the laser is in a non-LaserOff state, the laser returns to the LaserOff state, and simultaneously the interface prompts the alarm information and stores the interlocking information;
the hardware interlocking management unit comprises an interlocking detector for detecting an externally input interlocking switch signal, an MCU for receiving a TTL level signal sent by the interlocking detector, an interlocking logic output device for receiving a control signal sent by the MCU and outputting a channel switch signal to the power distribution management unit, and a communication interface CAN for sending the interlocking signal to the main controller.
2. The excimer laser based hardware interlock control system of claim 1, wherein the cavity switch signal comprises a cavity temperature overrun signal, a cavity pressure overrun signal, and a gas flow overrun signal.
3. The excimer laser based hardware interlock control system of claim 1, wherein the control signals issued by the lithography machine comprise a user remote start signal, a user remote stop signal and an external plant gas interlock signal.
4. The excimer laser based hardware interlock control system of claim 1, wherein the communication interface CAN has an isolation function.
5. A hardware interlocking control method based on an excimer laser is characterized by comprising the following steps:
step S1, the hardware interlocking management unit receives a cavity switch signal sent by a sensor which is arranged in the laser and used for detecting the cavity condition in the laser and a transmission signal sent by the photoetching machine;
step S2, the hardware interlocking management unit sends a channel switch signal to the power distribution management unit and sends an interlocking signal to the master controller;
step S3, the master controller carries out logic processing on the interlocking signal;
the step S2 includes the following steps:
step S21, the interlock detector detects the interlock switch signal input from outside and sends out TTL level signal;
step S22, the MCU receives the TTL level signal and sends a control signal;
step S23, the interlock logic output device receives the control signal and outputs a channel switch signal to the power distribution management unit; meanwhile, the communication interface CAN sends an interlocking signal to the master controller;
the step S3 includes the following steps:
and interrupting the communication interface CAN to inquire the received information, continuing to interrupt and wait if the interlocking information is not received, judging the working state of the laser at the moment if the interlocking information is received, keeping the state of the laser if the laser is in the LaserOff state, prompting alarm information by an interface, storing the interlocking information, returning the laser to the LaserOff state if the laser is in the non-LaserOff state, prompting the alarm information by the interface, and storing the interlocking information.
6. The excimer laser based hardware interlock control method of claim 5, wherein in step S1, the cavity switch signal comprises a cavity temperature overrun signal, a cavity pressure overrun signal and a gas flow overrun signal.
7. The excimer laser based hardware interlock control method of claim 5, wherein in step S1, the control signals sent by the lithography machine comprise a user remote start signal, a user remote stop signal and an external plant gas interlock signal.
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| CN113805945A (en) * | 2020-06-12 | 2021-12-17 | 北京科益虹源光电技术有限公司 | Software architecture applied to excimer laser and control method thereof |
| CN113934166A (en) * | 2020-07-14 | 2022-01-14 | 北京科益虹源光电技术有限公司 | Control and monitoring system of high-voltage pulse power supply solid-state switch of excimer laser |
| CN115121937A (en) * | 2022-08-22 | 2022-09-30 | 苏州创鑫激光科技有限公司 | Laser processing system |
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| JP2000164480A (en) * | 1998-11-24 | 2000-06-16 | Canon Inc | Semiconductor manufacturing device and method |
| US8232687B2 (en) * | 2006-04-26 | 2012-07-31 | Raydiance, Inc. | Intelligent laser interlock system |
| CN103092114A (en) * | 2013-01-22 | 2013-05-08 | 中国科学院光电技术研究所 | Embedded control equipment for lithography machine and control method thereof |
| CN208399891U (en) * | 2018-05-31 | 2019-01-18 | 上海微电子装备（集团）股份有限公司 | A kind of safety control system and a kind of exposure system of photo-etching machine |
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