CN110444549B - Flexible display panel and manufacturing method thereof - Google Patents
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- CN110444549B CN110444549B CN201910751005.0A CN201910751005A CN110444549B CN 110444549 B CN110444549 B CN 110444549B CN 201910751005 A CN201910751005 A CN 201910751005A CN 110444549 B CN110444549 B CN 110444549B
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- 239000002184 metal Substances 0.000 description 5
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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Abstract
The invention discloses a flexible display panel and a manufacturing method thereof, and belongs to the technical field of display. The flexible display panel includes a substrate base plate; the substrate base plate is provided with an inorganic layer structure, the inorganic layer structure comprises a plurality of inorganic layers, the substrate base plate is provided with a bending area, and the inorganic layer structure is provided with a groove in the bending area; the substrate base plate provided with the inorganic layer structure is provided with a bending bearing structure, the bending bearing structure is positioned in the groove, one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, and the substrate base plate provided with the bending bearing structure is provided with a wiring. The wiring and the plurality of alternate protruding structures and the groove structures are attached to form a wave-shaped bending structure with high bending performance, the problems that the wiring in the prior art is low in bending performance and easy to break in the bending process of the display panel are solved, and the effect of improving the performance of a bending area is achieved.
Description
Technical Field
The invention relates to the technical field of display, in particular to a flexible display panel and a manufacturing method thereof.
Background
A flexible display panel is a device which is flexible and has a display function. The flexibility of the device can meet the application requirements of various different scenes.
There is a display panel in the related art having a substrate base plate and a plurality of inorganic layers formed on the substrate base plate, the plurality of inorganic layers having wirings disposed thereon. The display panel is provided with a bending area, and the part of the routing wire positioned in the bending area is bent to a certain degree on the surface of the inorganic layer so as to avoid the breakage of the routing wire in the bending process of the display panel.
The bending performance of the wiring in the display panel is low, and the wiring is still easy to break in the bending process of the display panel.
Disclosure of Invention
In order to solve the problem that the routing wire in the related art is broken in the process of bending the display panel, the embodiment of the invention provides a flexible display panel and a manufacturing method thereof. The technical scheme is as follows:
according to a first aspect of the present invention, there is provided a flexible display panel comprising a substrate base plate;
the substrate base plate is provided with an inorganic layer structure, the inorganic layer structure comprises a plurality of inorganic layers, the substrate base plate is provided with a bending area, and the inorganic layer structure is provided with a groove in the bending area;
a substrate base plate provided with the inorganic layer structure is provided with a bending bearing structure, the bending bearing structure is positioned in the groove, one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away from the substrate base plate, of the inorganic layer structure is positioned;
the substrate base plate provided with the bending bearing structure is provided with a routing wire, and the routing wire passes through the bending area and is attached to one side, far away from the substrate base plate, of the bending bearing structure.
Optionally, in the plurality of protruding structures, a vertical distance between a top of any protruding structure and the top surface is positively correlated to a specified distance, where the specified distance is a distance between any protruding structure and the inorganic layer structure in a direction parallel to the top surface;
in the plurality of groove structures, the vertical distance between the bottom of any groove structure and the top surface is positively correlated to the designated distance.
Optionally, the width of the top of the groove structure in the direction parallel to the top surface is positively correlated to the specified distance;
the width of the bottom of the raised structure in a direction parallel to the top surface is positively correlated to the specified distance.
Optionally, the vertical distance between the top of each of the protruding structures and the top surface is equal to the vertical distance between the bottom of each of the groove structures and the top surface.
Optionally, the bottom of each of the protrusion structures is located on the top surface of the inorganic layer structure, and the top of each of the groove structures is located on the top surface of the inorganic layer structure.
Optionally, the bending region is rectangular;
the cross section of any one of the plurality of convex structures cut by any one designated surface is identical, and the designated surface is a surface vertical to one long side of the rectangle;
and the section of any one groove structure in the plurality of groove structures, which is sectioned by any one of the designated surfaces, is identical.
Optionally, the material of the bending bearing structure includes an insulating organic material.
According to a second aspect of the present invention, there is provided a method of manufacturing a flexible display panel, the method comprising:
forming an inorganic layer structure on a substrate, the inorganic layer structure including a plurality of inorganic layers;
forming a groove in the bending area of the substrate base plate;
forming a bending bearing structure in the groove, wherein one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away from the substrate base plate, of the inorganic layer structure is positioned;
and forming a routing on the substrate base plate on which the bending bearing structure is formed, wherein the routing passes through the bending area and is attached to the plurality of protruding structures.
Optionally, the forming of the bent bearing structure in the groove includes:
forming a plurality of pedestals in the recess, the pedestals having mesas coplanar with the top surface;
and forming a convex structure on each base platform.
Optionally, the forming a plurality of abutments in the groove includes:
forming a substrate structure in the groove, wherein one side of the substrate structure, which is far away from the substrate base plate, is provided with an upper surface, and the upper surface is coplanar with the top surface;
forming a plurality of said protrusions on said upper surface;
the plurality of groove structures are formed between the plurality of protrusions.
The technical scheme provided by the embodiment of the invention has the following beneficial effects:
a flexible display panel is provided that includes a substrate base plate having an inorganic layer structure thereon, the inorganic layer structure including a plurality of inorganic layers, the substrate base plate having a bending region, the inorganic layer structure having a groove in the bending region; the substrate base plate provided with the inorganic layer structure is provided with a bending bearing structure, the bending bearing structure is positioned in the groove, one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away from the substrate base plate, of the inorganic layer structure is positioned; the substrate base plate provided with the bending bearing structure is provided with a wiring, and the wiring passes through the bending area and is attached to one side of the bending bearing structure, which is far away from the substrate base plate. Through set up bearing structure of buckling in the recess of inorganic layer structure to set up a plurality of protruding structures and groove structure in turn in one side of bearing structure of buckling, walk the line and form the wavy structure of buckling that the performance is higher with the laminating of these a plurality of protruding structures and groove structure in turn, it is lower to have solved the performance of buckling of walking the line among the prior art, is easy at the cracked problem of display panel's in-process of buckling, has reached the effect that improves the district's performance of buckling.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the invention, as claimed.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and together with the description, serve to explain the principles of the invention.
Fig. 1 is a schematic structural diagram of a flexible display panel according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of another flexible display panel according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of another flexible display panel according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of another flexible display panel according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of another protrusion structure and a groove structure in a flexible display panel according to an embodiment of the present invention;
FIG. 6 is a top view of a bend region in a flexible display panel in accordance with an embodiment of the present invention;
FIG. 7 is a schematic cross-sectional view of a flexible display panel in accordance with an embodiment of the present invention;
fig. 8 is a flowchart of a method for manufacturing a flexible display panel according to an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of the substrate at the end of step 801;
FIG. 10 is a schematic diagram illustrating a structure of the groove at the end of step 802;
FIG. 11 is a flow chart of forming a bend-bearing structure in a groove;
FIG. 12 is a schematic view of the structure of the substrate at the end of step 8031;
FIG. 13 is a schematic structural view of the protrusion structure and the groove structure at the end of step 8032;
FIG. 14 is another flow chart of forming a bend-bearing structure in a groove;
FIG. 15 is a schematic structural view of another substrate structure;
FIG. 16 is a schematic view of the structure of the second insulating organic layer at the end of step 8034;
FIG. 17 is a schematic view of the formation of multiple protrusions on the top surface at the end of step 8035;
FIG. 18 is a structural diagram illustrating a plurality of groove structures formed on the upper surface at the end of step 8036;
fig. 19 is a structural diagram of the trace at the end of step 804.
With the above figures, certain embodiments of the invention have been illustrated and described in more detail below. The drawings and the description are not intended to limit the scope of the inventive concept in any way, but rather to illustrate it by those skilled in the art with reference to specific embodiments.
Detailed Description
Reference will now be made in detail to the exemplary embodiments, examples of which are illustrated in the accompanying drawings. When the following description refers to the accompanying drawings, like numbers in different drawings represent the same or similar elements unless otherwise indicated. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with the present invention. Rather, they are merely examples of apparatus and methods consistent with certain aspects of the invention, as detailed in the appended claims.
At present, in the technical field of display, a bending area can be arranged on a flexible display panel, so that the flexible display panel can form a narrow frame or a frameless technology. In a display panel in the prior art, a metal trace is laid on an inorganic layer area of the display panel, and the metal trace may be directly laid on the inorganic layer area or may be laid on the inorganic layer area in a small bending manner.
However, because the radius of the metal trace in bending is small, the metal trace is frequently stretched in the bending region in the stress process and is easily broken, the brittleness of the inorganic layer region is large, and the inorganic layer region is also easily broken under stress, so that the display of the display panel is poor.
Fig. 1 is a schematic structural diagram of a flexible display panel according to an embodiment of the present invention. The flexible display panel may include:
the flexible display panel includes a base substrate 11.
The substrate base plate is provided with an inorganic layer structure 12, the inorganic layer structure 12 comprises a plurality of inorganic layers, the substrate base plate 11 is provided with a bending area, and the inorganic layer structure 12 is provided with a groove in the bending area.
The substrate base plate 11 provided with the inorganic layer structure 12 is provided with a bending bearing structure 14, the bending bearing structure 14 is located in a groove, one side of the bending bearing structure 14, which is far away from the substrate base plate 11, is provided with a plurality of protrusion structures 141 and groove structures 142 which are alternately arranged, the bottom of each groove structure 142 is located on one side, which is close to the substrate base plate 11, of the top surface of the inorganic layer structure 12, the top of each protrusion structure 141 is located on one side, which is far away from the substrate base plate 11, of the top surface of the inorganic layer structure 12, and the top surface of the inorganic layer structure 12 is a plane where one side, which is far away from the substrate base plate 11, of the inorganic layer structure 12 is located.
The substrate base plate 11 provided with the bending bearing structure 14 is provided with a trace 15, and the trace 15 passes through the bending area and is attached to one side of the bending bearing structure 15, which is far away from the substrate base plate 11.
In summary, embodiments of the present invention provide a flexible display panel including a substrate, the substrate having an inorganic layer structure thereon, the inorganic layer structure including a plurality of inorganic layers, the substrate having a bending region, the inorganic layer structure having a groove in the bending region; the substrate base plate provided with the inorganic layer structure is provided with a bending bearing structure, the bending bearing structure is positioned in the groove, one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away; the substrate base plate provided with the bending bearing structure is provided with a wiring, and the wiring passes through the bending area and is attached to one side of the bending bearing structure, which is far away from the substrate base plate. Through set up bearing structure of buckling in the recess of inorganic layer structure to set up a plurality of protruding structures and groove structure in turn in one side of bearing structure of buckling, walk the line and form the wave structure of buckling that the performance is higher with the laminating of these a plurality of protruding structures and groove structure in turn, it is lower to have solved the performance of buckling of walking the line among the prior art, is easy at the cracked problem of the in-process that display panel buckles, has reached the effect that improves the regional performance of buckling.
Referring to fig. 2, a schematic structural diagram of another flexible display panel according to an embodiment of the invention is shown.
Optionally, the material of the bend carrying structure 14 comprises an insulating organic material. In the prior art, the inorganic layer structure is brittle and is easily broken when being stressed, thereby causing product damage, and therefore in the embodiment of the present invention, the groove is filled with an insulating organic material to form the bending support structure 14. The insulating organic material has good toughness and is not easy to break when stressed. The material of the bending support structure 14 may be photoresist, or other materials such as polyimide, which is not limited in the embodiment of the present invention.
When the material of bearing structure 14 buckles is the photoresist, adopt the mask version of different luminousness to carry out exposure of different degrees to bearing structure 14 buckles, develop and form protruding structure 141 and groove structure 142 that the interval is equal, when the material of bearing structure 14 buckles is other organic insulating material, scribble a layer of photoresist on bearing structure 14 buckles, through exposure and development technology, make the photoresist form the mask version that has specific pattern, adopt the sculpture mode to form protruding structure 141 and groove structure 142 that the interval is equal on bearing structure 14 buckles.
Alternatively, the bottom a of each protrusion structure 141 is located on the top surface 16 of the inorganic layer structure 12, and the top b of each groove structure 142 is located on the top surface 16 of the inorganic layer structure 12. The top surface 16 is the level of the inorganic layer structure 12 at the two ends of the groove contacting with the trace.
Optionally, the vertical distance 1411 of the top c of each raised structure 141 from the top surface 16 is equal to the vertical distance 1421 of the bottom d of each recessed structure 142 from the top surface 16. When the vertical distances 1411 and 1421 are equal, the radians of the traces 15 on the protrusion structure 141 and the groove structure 142 are substantially equal. Likewise, each of the projection structures 141 and the groove structures 142 has the same width in the direction e parallel to the top surface 16. When the bending area is stressed, the wires with the same radian can averagely bear external force and are not easy to break.
Each of the protruding structures 141 and the recessed structures 142 having the same distance in the vertical direction and the width direction e is provided with a trace 15, and two ends of the trace 15 extend to one end of the inorganic layer structure 12 away from the substrate. The trace 15 is tightly attached to each of the protruding structures 141 and the recessed structures 142 to form a spring-like structure, so that the stretch-resistant and bending-resistant performance of the trace 15 is improved. During the stress process, each of the protrusion structures 141 and the groove structures 142 can provide a back supporting force for the trace 15, so that the stress of the trace 15 at the bending region is reduced, and the risk of breaking the trace 15 is reduced. The trace 15 may be a metal trace or a trace made of other materials, which is not limited in the embodiment of the present invention.
The shape of each of the protrusion structures 141 and the groove structures 142 may be a square shape, a circular arc shape, or a combination of a square shape and a circular arc shape, and the embodiment of the present invention is not limited herein. Fig. 3 is a schematic structural diagram of another flexible display panel according to an embodiment of the present invention. As shown in fig. 3, each of the protrusion structures 141 and the groove structures 142 has a circular arc shape, the vertical distance between the top of the protrusion structure 141 and the top surface 16 is equal to the vertical distance between the bottom of each groove structure 142 and the top surface 16, and the width of each protrusion structure 141 and each groove structure 142 in the direction parallel to the top surface is also equal.
Fig. 4 is a schematic structural diagram of another flexible display panel according to an embodiment of the present invention. Each of the protrusion structures 141 has a circular arc shape, each of the groove structures 142 has a square shape, a vertical distance between a top of each of the protrusion structures 141 and the top surface 16 is equal to a vertical distance between a bottom of each of the groove structures 142 and the top surface 16, and widths of each of the protrusion structures 141 and the groove structures 142 in a direction parallel to the top surface are equal. The flexible display panel with various structures described above are various expressions of the embodiments of the present application, and any person skilled in the art can easily think of various structures within the counting range of the present invention, and all such structures are covered within the protection scope of the present invention, and therefore, the detailed description thereof is omitted.
Fig. 5 is a schematic structural diagram of another protrusion structure and a groove structure in a flexible display panel according to an embodiment of the present invention. Alternatively, in the plurality of protruding structures 141, the vertical distance between the top of any protruding structure and the top surface is positively correlated to a specified distance, and the specified distance is the distance between any protruding structure and the inorganic layer structure in the direction parallel to the top surface. In the plurality of groove structures 142, the vertical distance between the bottom and the top of any groove structure is positively correlated to a specified distance. Optionally, the width of the top of the groove structure in a direction parallel to the top surface positively correlates to a specified distance; the width of the bottom of the raised structure in a direction parallel to the top surface positively correlates to the specified distance. I.e. the greater the perpendicular distance between the top of the raised structure and the top surface, the greater its distance from the inorganic layer structure in a direction parallel to the top surface. Likewise, the smaller the perpendicular distance of the bottom of the groove structure from the top surface, the smaller its distance from the inorganic layer structure in a direction parallel to the top surface. I.e., the amplitude of the protrusion structures and groove structures closer to the inorganic structure layer 12 is smaller. At this time, the stress and strain of the wires close to the two ends of the inorganic structural layer 12 and the wires laid on the inorganic structural layer 12 are small in the stress process, and the wires are not easy to break.
Optionally, the bending region is rectangular; in the plurality of convex structures, the section of any convex structure cut by any one specified surface is identical, and the specified surface is a surface vertical to one long side of the rectangle; in the plurality of groove structures, the cross section of any one groove structure sectioned by any one designated surface is identical. Fig. 6 is a top view of a bending region in a flexible display panel according to an embodiment of the present invention. The length of the bending region 17 of the flexible display panel is slightly shorter than the rectangular area of the substrate base plate (the width may be about 1 mm). Fig. 7 is a schematic structural diagram of a cross section of a flexible display panel according to an embodiment of the present invention, in which a plurality of convex structures 141 and a plurality of concave structures 142 form a wavy tape. After the wire is laid on the wavy tape, the maximum stress of the wire is about 100MPa less than that of the wire in the prior art.
In summary, embodiments of the present invention provide a flexible display panel including a substrate, the substrate having an inorganic layer structure thereon, the inorganic layer structure including a plurality of inorganic layers, the substrate having a bending region, the inorganic layer structure having a groove in the bending region; the substrate base plate provided with the inorganic layer structure is provided with a bending bearing structure, the bending bearing structure is positioned in the groove, one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away from the substrate base plate, of the inorganic layer structure is positioned; the substrate base plate provided with the bending bearing structure is provided with a wiring, and the wiring passes through the bending area and is attached to one side of the bending bearing structure, which is far away from the substrate base plate. Through set up bearing structure of buckling in the recess of inorganic layer structure to set up a plurality of protruding structures and groove structure in turn in one side of bearing structure of buckling, walk the line and form the wave structure of buckling that the performance is higher with the laminating of these a plurality of protruding structures and groove structure in turn, it is lower to have solved the performance of buckling of walking the line among the prior art, is easy at the cracked problem of the in-process that display panel buckles, has reached the effect that improves the regional performance of buckling.
Referring to fig. 8, a flowchart of a method for manufacturing a flexible display panel according to an embodiment of the present invention is shown, where the method for manufacturing a flexible display panel includes the following steps:
step 801 forms an inorganic layer structure on a base substrate.
The inorganic layer structure includes a plurality of inorganic layers, as shown in fig. 9, which is a schematic structural diagram of the substrate at the end of step 801. The substrate 11 has the inorganic layer structure 12 formed thereon, where the inorganic layer structure 12 includes a buffer layer 121, a first gate insulating layer 122, a second gate insulating layer 123 and an interlayer dielectric layer 124, and the inorganic layer structure 12 may also include other inorganic layers.
The bending area is an area where the trace is laid, as shown in fig. 10, which is a schematic structural diagram of the groove when step 802 is finished. The inorganic layer structure 12 is hollowed out a groove 13 in the bending region, the bottom of the groove 13 is connected to the substrate 11, the side surface of the groove 13 is in contact with the inorganic layer structure 12, and the side surface of the groove 13 may be perpendicular to the bottom of the groove 13 or may be inclined to some extent. In the embodiment of the invention, the patterning process may include processes of coating photoresist, exposing, developing, etching, stripping the photoresist, and the like. The recess 13 may be realized by a patterning process.
The manner of forming the bent bearing structure in the groove in this step may include the following two ways:
the first mode is as follows: as shown in fig. 11, this method includes the following steps:
The bending support structure may be an insulating organic material, and the groove is filled with the insulating organic material to form the bending support structure, as shown in fig. 12, which is a schematic structural diagram of the substrate structure at the end of step 8031. Wherein the substrate structure is located in the groove 13, that is, the substrate structure 143 fills the whole groove 13, and optionally, the substrate structure 143 may be higher than the groove 13, that is, the side of the substrate structure 143 away from the substrate base plate 11 is higher than the side of the inorganic layer structure 12 away from the substrate base plate 11.
When the substrate structure is made of photoresist, mask plates with different light transmittance are adopted to expose the substrate structure to different degrees, and development is carried out to form a protruding structure and a groove structure with equal intervals. Fig. 13 is a schematic diagram of the structure of the protrusion structure and the groove structure at the end of step 8032. The bottom d of each groove structure 142 is located on the side of the top surface 16 of the inorganic layer structure 12 close to the substrate 11, the top c of each protrusion structure 141 is located on the side of the top surface 16 of the inorganic layer structure 12 away from the substrate 11, and the top surface 16 of the inorganic layer structure 12 is the plane where the side of the inorganic layer structure 12 away from the substrate 11 is located.
The second mode is as follows: as shown in fig. 14, this method includes the following steps:
And filling a substrate structure in the groove, wherein the substrate structure is made of an insulating organic material. Fig. 15 is a schematic structural diagram of another substrate structure, in which the upper surface of the side of the substrate structure 143 away from the substrate base 11 is coplanar with the top surface of the groove, i.e. the side of the inorganic structure layer 12 away from the substrate base 11 is flush with the upper surface of the side of the substrate structure 143 away from the substrate base 11.
A second insulating organic layer is formed on the substrate structure, and the material of the second insulating organic layer may be photoresist. As shown in fig. 16, which is a schematic diagram of the structure of the second insulating organic layer at the end of step 8034, the second insulating organic layer 144 has a certain thickness and covers the inorganic structure layer and the substrate structure, wherein the second insulating organic layer 144 may only cover the substrate structure, which is an option of different processes, and the embodiment of the present invention is not limited thereto.
After the second insulating organic layer is formed, the second insulating organic layer may be processed into a plurality of protrusion structures. When the second insulating organic layer is made of photoresist, the second insulating organic layer can be processed into a plurality of protruding structures through exposure, development and other processes. When the second insulating organic layer is made of other materials, a plurality of protruding structures may be formed through a patterning process.
As shown in fig. 17, it is a schematic structural diagram of forming a plurality of protruding structures on the upper surface at the end of step 8035, where the protruding structures 141 may be protruding structures with the same shape and size, or protruding structures with the same shape and different size, that is, the protruding structures closer to the two ends of the inorganic structural layer are smaller. The bottom surface of the bump structure 141 contacts the upper surface of the substrate structure 143.
And forming a plurality of groove structures among the plurality of formed convex structures. The shape of the plurality of groove structures may be the same as the shape of the plurality of protrusion structures, as shown in fig. 18, which is a schematic structural view of forming the plurality of groove structures on the upper surface when step 8036 is finished, and etching a plurality of spaced groove structures 142 by using the formed plurality of protrusion structures as a mask, where as shown in fig. 4, the plurality of spaced groove structures may also be different from the plurality of protrusion structures in shape.
Optionally, the step 8031 and 8032 are the first way to form the bending carrying structure, and the step 8033 and 8036 are the second way to form the bending carrying structure.
And 804, forming a routing on the substrate base plate with the bending bearing structure.
As shown in fig. 19, it is a schematic structural diagram of the trace when step 804 is finished. The trace 15 passes through the bending region and is attached to the plurality of protrusion structures 141 and the groove structures 142, and the trace 15 extends to the surface of the inorganic structure layer 12 at the two ends of the groove.
In summary, embodiments of the present invention provide a method for manufacturing a flexible display panel, in which an inorganic layer structure is formed on a substrate, the inorganic layer structure includes a plurality of inorganic layers, the substrate has a bending region, and the inorganic layer structure has a groove in the bending region; the substrate base plate provided with the inorganic layer structure is provided with a bending bearing structure, the bending bearing structure is positioned in the groove, one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away from the substrate base plate, of the inorganic layer structure is positioned; the substrate base plate provided with the bending bearing structure is provided with a wiring, and the wiring passes through the bending area and is attached to one side of the bending bearing structure, which is far away from the substrate base plate. Through set up bearing structure of buckling in the recess of inorganic layer structure to set up a plurality of protruding structures and groove structure in turn in one side of bearing structure of buckling, walk the line and form the wave structure of buckling that the performance is higher with the laminating of these a plurality of protruding structures and groove structure in turn, it is lower to have solved the performance of buckling of walking the line among the prior art, is easy at the cracked problem of the in-process that display panel buckles, has reached the effect that improves the regional performance of buckling.
In the drawings of the present application, the size of layers and regions may be exaggerated for clarity of illustration. Also, it will be understood that when an element or layer is referred to as being "on" another element or layer, it can be directly on the other element or layer or intervening layers may also be present. In addition, it will be understood that when an element or layer is referred to as being "under" another element or layer, it can be directly under the other element or intervening layers or elements may also be present. In addition, it will also be understood that when a layer or element is referred to as being "between" two layers or elements, it can be the only layer between the two layers or elements, or more than one intermediate layer or element may also be present. Like reference numerals refer to like elements throughout.
The above description is only exemplary of the present invention and should not be taken as limiting, and any modifications, equivalents, improvements and the like that are within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (9)
1. A flexible display panel, comprising a substrate base plate;
the substrate base plate is provided with an inorganic layer structure, the inorganic layer structure comprises a plurality of inorganic layers, the substrate base plate is provided with a bending area, and the inorganic layer structure is provided with a groove in the bending area;
a substrate base plate provided with the inorganic layer structure is provided with a bending bearing structure, the bending bearing structure is positioned in the groove, one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away from the substrate base plate, of the inorganic layer structure is positioned;
the substrate base plate provided with the bending bearing structure is provided with a wire, and the wire passes through the bending area and is attached to one side of the bending bearing structure, which is far away from the substrate base plate;
a vertical distance between a top of any protruding structure and the top surface of the plurality of protruding structures is positively correlated with a specified distance, and the specified distance is a distance between the any protruding structure and the inorganic layer structure in a direction parallel to the top surface;
in the plurality of groove structures, the vertical distance between the bottom of any groove structure and the top surface is positively correlated to the designated distance.
2. The flexible display panel of claim 1, wherein a width of the groove structure top in a direction parallel to the top surface is positively correlated to the specified distance;
the width of the bottom of the raised structure in a direction parallel to the top surface is positively correlated to the specified distance.
3. The flexible display panel of claim 1, wherein a vertical distance between a top of each of the protrusion structures and the top surface is equal to a vertical distance between a bottom of each of the groove structures and the top surface.
4. The flexible display panel according to any of claims 1-3, wherein the bottom of each of the protrusion structures is located on the top surface of the inorganic layer structure, and the top of each of the groove structures is located on the top surface of the inorganic layer structure.
5. The flexible display panel of claim 1, wherein the bend region is rectangular;
the cross section of any one of the plurality of convex structures cut by any one designated surface is identical, and the designated surface is a surface vertical to one long side of the rectangle;
and the section of any one groove structure in the plurality of groove structures, which is sectioned by any one of the designated surfaces, is identical.
6. The flexible display panel of claim 1, wherein the material of the bend-bearing structure comprises an insulating organic material.
7. A method of manufacturing a flexible display panel, the method comprising:
forming an inorganic layer structure on a substrate, the inorganic layer structure including a plurality of inorganic layers;
forming a groove in the bending area of the substrate base plate;
forming a bending bearing structure in the groove, wherein one side of the bending bearing structure, which is far away from the substrate base plate, is provided with a plurality of protrusion structures and groove structures which are alternately arranged, the bottom of each groove structure is positioned on one side, which is close to the substrate base plate, of the top surface of the inorganic layer structure, the top of each protrusion structure is positioned on one side, which is far away from the substrate base plate, of the top surface of the inorganic layer structure, and the top surface of the inorganic layer structure is a plane on which one side, which is far away from the substrate base plate, of the inorganic layer structure is positioned;
forming a routing on the substrate base plate on which the bending bearing structure is formed, wherein the routing passes through the bending area and is attached to the plurality of protruding structures;
a vertical distance between a top of any protruding structure and the top surface of the plurality of protruding structures is positively correlated with a specified distance, and the specified distance is a distance between the any protruding structure and the inorganic layer structure in a direction parallel to the top surface;
in the plurality of groove structures, the vertical distance between the bottom of any groove structure and the top surface is positively correlated to the designated distance.
8. The method of claim 7, wherein forming a bend-bearing structure in the groove comprises:
forming a plurality of pedestals in the recess, the pedestals having mesas coplanar with the top surface;
and forming a convex structure on each base platform.
9. The method of claim 8, wherein forming a plurality of abutments in the groove comprises:
forming a substrate structure in the groove, wherein one side of the substrate structure, which is far away from the substrate base plate, is provided with an upper surface, and the upper surface is coplanar with the top surface;
forming a plurality of said raised structures on said upper surface;
forming the plurality of groove structures between a plurality of the protrusion structures.
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| CN110931530B (en) * | 2019-11-26 | 2022-07-12 | 武汉华星光电半导体显示技术有限公司 | Display panel and manufacturing method thereof |
| CN111129027B (en) * | 2019-12-03 | 2022-10-04 | 武汉华星光电半导体显示技术有限公司 | Structure of flexible display and manufacturing method thereof |
| CN111430417B (en) * | 2020-03-31 | 2022-09-09 | 武汉华星光电半导体显示技术有限公司 | Display panel and preparation method thereof |
| CN111726442B (en) * | 2020-06-30 | 2021-06-18 | 东莞斯蒙奇智能科技有限公司 | Flexible screen folding mechanism capable of being turned over manually and uniformly and electronic equipment |
| CN112309266B (en) * | 2020-11-17 | 2022-12-20 | 苏州昱铮辉光电科技有限公司 | Ultrathin flexible glass one-way folding screen for electronic product |
| CN113241368B (en) * | 2021-07-09 | 2021-11-12 | 北京京东方技术开发有限公司 | Display panel and display device |
| CN113745247A (en) * | 2021-08-20 | 2021-12-03 | 武汉华星光电半导体显示技术有限公司 | Display panel |
| CN114333584B (en) | 2021-12-28 | 2023-02-28 | 深圳市华星光电半导体显示技术有限公司 | Folding display panel and manufacturing method thereof |
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