CN110442015A - A kind of macro micro- compound platform coupling error removing method - Google Patents
A kind of macro micro- compound platform coupling error removing method Download PDFInfo
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- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
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Abstract
The present invention discloses a kind of macro micro- compound platform coupling error removing method, detects the macro dynamic displacement error of macro dynamic platform；Judge that macro dynamic displacement error whether within the scope of macro dynamic error threshold, if the determination result is YES, then determines the fine motion compensation displacement namely the distance that should move of micropositioner of micropositioner, according to macro dynamic displacement error to make up the error of macro dynamic platform；Being compensated to be displaced according to fine motion determines micropositioner to the fine motion reaction force of macro dynamic platform；According to fine motion reaction force, macro dynamic driver applies contrary macro dynamic compensating action power to macro dynamic platform simultaneously.While applying displacing force to micropositioner, contrary reaction force is applied to macro dynamic platform, to offset micropositioner to the active force of macro dynamic platform, macro dynamic stylobate originally will not generate displacement because of the active force of fine motion, keep Bit andits control more accurate.
Description
Technical field
The present invention relates to motion platform Accuracy Control fields, further relate to a kind of macro micro- compound platform coupling mistake
Poor removing method.
Background technique
Domestic and international high-precision control motion platform mostly uses greatly macro micro- two-stage drive to realize, macro dynamic platform realizes large travel high-speed
Positioning, micropositioner realize high accuracy positioning by compensating the error of macro dynamic platform.Macro dynamic platform generallys use linear motor driving, fine motion
Platform generallys use voice coil motor or Piezoelectric Ceramic.
As shown in Figure 1, the schematic diagram moved for macro dynamic platform 01 with micropositioner 02；Micropositioner is mounted on macro dynamic platform, macro dynamic
When platform displacement drive micropositioner move synchronously, macro dynamic platform stops after initial position move distance L1, with target position it
Between position error be L2；In order to make up this error, starting micropositioner moves l2, micropositioner is made to reach target position.
But since micropositioner is mounted on macro dynamic platform, macro dynamic platform and micropositioner constitute an entirety, and macro dynamic platform is to micropositioner
Support is provided, when micropositioner travels forward, macro dynamic platform provides forward active force to micropositioner, and micropositioner generates macro dynamic platform
Reaction force backward makes macro dynamic platform move backward small distance.
Such case will lead to whole position error and become larger, and cause the stroke of piezoelectric ceramics or voice coil motor to be saturated, very
To the stroke range beyond piezoelectric ceramics or voice coil motor, it is unable to reach the purpose of compensation error.
For those skilled in the art, micropositioner error caused by macro dynamic platform reaction force is removed as reduced, is
The technical issues that need to address at present.
Summary of the invention
The present invention provides a kind of macro micro- compound platform coupling error removing methods, are supported by applying active force to macro dynamic platform
Disappear the coupling influence of micropositioner, reduces micropositioner error caused by macro dynamic platform reaction force, and concrete scheme is as follows:
A kind of macro micro- compound platform coupling error removing method, comprising:
Detect the macro dynamic displacement error of macro dynamic platform；
Judge the macro dynamic displacement error whether within the scope of macro dynamic error threshold；
If so, determining the fine motion compensation displacement of micropositioner according to the macro dynamic displacement error；
Compensating displacement according to the fine motion determines the micropositioner to the fine motion reaction force of the macro dynamic platform；
According to the fine motion reaction force, macro dynamic driver applies contrary macro dynamic compensation to the macro dynamic platform simultaneously
Active force.
Optionally, the macro dynamic driver applies contrary macro dynamic compensating action power, root to the macro dynamic platform simultaneously
It is calculated according to following formula:
Wherein: N12It (s) is macro dynamic penalty function；Gp11It (s) is the macro dynamic driver current to the transmission function of displacement；
Gp12It (s) is frequency method of the macro dynamic platform by micropositioner reaction force；S indicates complex field, is passed through by the differential equation
Laplace transform obtains transmission function.Optionally, transmission function G of the macro dynamic driver current to displacementp11(s) basis
Test result is fitted to obtain；
Frequency method G of the macro dynamic platform by micropositioner reaction forcep12(s) it is obtained using step response method.
Optionally, to the macro dynamic penalty function N12(s) low-pass filtering is carried out, is obtained:
Wherein: τ is constant.
Optionally, further includes:
It is defeated to be converted to feedback control by the movement interference that the micropositioner is monitored by interference observer for movement interference
Out, feedback signal is applied to the macro dynamic driver.
The present invention provides a kind of macro micro- compound platform coupling error removing method, detects the macro dynamic displacement error of macro dynamic platform；
Judge macro dynamic displacement error whether within the scope of macro dynamic error threshold, it is if the determination result is YES, then true according to macro dynamic displacement error
The distance that the fine motion compensation displacement namely micropositioner for determining micropositioner should move, to make up the error of macro dynamic platform；It is compensated according to fine motion
It is displaced and determines micropositioner to the fine motion reaction force of macro dynamic platform；According to fine motion reaction force, macro dynamic driver to macro dynamic platform simultaneously
Apply contrary macro dynamic compensating action power.While applying displacing force to micropositioner, direction is applied to macro dynamic platform
Opposite reaction force, to offset micropositioner to the active force of macro dynamic platform, macro dynamic stylobate originally will not be generated because of the active force of fine motion
Displacement, keeps Bit andits control more accurate.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the schematic diagram of macro dynamic platform and micropositioner movement；
Fig. 2 is the flow chart of macro micro- compound platform coupling error removing method provided by the invention；
Fig. 3 is the compensation principle figure of the macro micro- compound platform coupling error removing method of the present invention；
Fig. 4 is that macro dynamic platform is displaced four step response diagrams；
Fig. 5 is the complex controll block diagram of feedforward compensation and feedback compensation double action.
Specific embodiment
The present invention provides a kind of macro micro- compound platform coupling error removing methods, are supported by applying active force to macro dynamic platform
Disappear the coupling influence of micropositioner, reduces micropositioner error caused by macro dynamic platform reaction force.
In order to make those skilled in the art more fully understand technical solution of the present invention, below in conjunction with attached drawing and specifically
Embodiment, explanation is described in detail to macro micro- compound platform coupling error removing method of the invention.
As shown in Fig. 2, being the flow chart of macro micro- compound platform coupling error removing method provided by the invention, specifically include
Following steps:
The macro dynamic displacement error of S1, the macro dynamic platform of detection；Macro dynamic platform movement, drives the micropositioner synchronous shift being arranged thereon,
After macro dynamic platform stops, whether the move distance for detecting macro dynamic platform reaches the overall distance mesh of requirement namely macro dynamic platform and micropositioner
The distance of cursor position.
S2, judge macro dynamic displacement error whether within the scope of macro dynamic error threshold；If macro dynamic displacement error is excessive, can weigh
Macro dynamic platform movement is newly driven, until macro dynamic displacement error reaches macro dynamic error threshold range.
If the determination result is YES, namely when macro dynamic displacement error reaches macro dynamic error threshold range, step S3, root are executed
The fine motion compensation displacement of micropositioner is determined according to macro dynamic displacement error；Macro dynamic displacement error is equal in magnitude with fine motion compensation displacement,
The error that macro dynamic platform movement is compensated by micropositioner, so that micropositioner reaches target position.
S4, the determining micropositioner of displacement is compensated according to fine motion to the fine motion reaction force of macro dynamic platform；Micropositioner is driven by fine motion
Device drives, and fine motion driver generallys use piezoelectric ceramics, and piezoelectric ceramics is assemblied between macro dynamic platform and micropositioner, applies to micropositioner
The active force for adding movement makes micropositioner generate displacement, and the work for being displaced and determining that piezoelectric ceramics generates micropositioner is compensated according to fine motion
Firmly size, since macro dynamic platform supports micropositioner, micropositioner generates fine motion reaction force to macro dynamic platform, will cause macro dynamic platform
Be displaced in the opposite direction, macro dynamic platform intercouples with the movement of micropositioner be superimposed after, position that micropositioner is finally reached occurs
Deviation is unable to reach due precision.
Macro dynamic platform is subjected to displacement by the reaction force of micropositioner in order to prevent, executes step S5, according to fine motion reaction
Power, macro dynamic driver apply contrary macro dynamic compensating action power to macro dynamic platform simultaneously.Macro dynamic driver applies macro dynamic platform
Force direction it is contrary with fine motion reaction force and in the same size, macro dynamic platform is applied for offsetting micropositioner
Active force, in micropositioner movement, macro dynamic platform keeps stress balance, and macro dynamic platform is remained stationary positioned at original place, and only micropositioner is done
Compensation campaign, macro dynamic platform are not influenced the error compensation, it can be achieved that more accurate by fine motion reaction force, and Bit andits control is more smart
It is quasi-.
On the basis of above scheme, macro dynamic driver applies contrary macro dynamic benefit to macro dynamic platform simultaneously in the present invention
Active force is repaid, is calculated according to the following formula:
Wherein: N12(s) it is macro dynamic penalty function, is decoupling controller；Gp11It (s) is macro dynamic driver current to displacement
Transmission function；Gp12It (s) is frequency method of the macro dynamic platform by micropositioner reaction force；S indicates complex field, by differential side
Journey obtains transmission function by Laplace transform.
Be illustrated below to s: 1. output y are the derivative for inputting x, then the differential equation is writeable in time domain are as follows:
Then the corresponding transmission function indicated between output and input is (L indicates Laplace transform):
Can release: y (s)=x (s) s, s is differential operator.
2. output y is the integral for inputting x, then the differential equation is writeable in time domain are as follows:
Then:
As shown in figure 3, for the compensation principle figure of the macro micro- compound platform coupling error removing method of the present invention；x1Indicate macro dynamic
The displacement of platform exports, x2Indicate the displacement output of micropositioner；Gp11It (s) is macro dynamic driver current to the transmission function of displacement,
I.e. macro dynamic driver receives the displacement exported after current signal, and the displacement of size of current difference output is also different；Gp12(s) it is
The fine motion reaction force that macro dynamic platform is generated by the frequency method of micropositioner reaction force namely macro dynamic platform by micropositioner
When, the displacement that macro dynamic platform generates, fine motion reaction force is bigger, and the displacement of macro dynamic platform is bigger；N12(s) macro dynamic penalty function is indicated,
Namely the active force that macro dynamic platform is provided according to fine motion reaction force.
Realize x in Fig. 31And x2It is necessary to meet following condition for decoupling control between two major loops:
U2Gp12(s)+Uc2N12(s)Gp11(s)=0
U2And Uc2For the voltage of fine motion driver, U herein2=Uc2, then it can be obtained:
Specifically, above-mentioned two transmission function, transmission function G of the macro dynamic driver current to displacementp11(s) according to test
As a result fitting obtains；The multiple different current signal of input respectively, and the corresponding output displacement of each current signal is measured, it obtains not
The frequency and phase of the sinusoidal displacement curve of corresponding output when the sinusoidal signal electric current input of same frequency, and with the frequency of electric current and
Phase is compared, and is fitted in the softwares such as MATLAB using included tool box.As macro dynamic driver current to displacement
Transmission function Gp11(s)。
Frequency method G of the macro dynamic platform by micropositioner reaction forcep12(s) it is obtained using step response method, enables U2For
The voltage step of amplitude+5V instructs, and measures macro dynamic platform displacement x1Four times step response is as shown in Figure 4.Step method fit first order passes
Delivery function, only there are two simple parameters for first-order transfer function, can directly be obtained by macro dynamic platform response displacement diagram by graphing method.
G in Fig. 3c1(s) be macro dynamic platform master controller transmission function, Gc2(s) be micropositioner master controller transmitting letter
Number uses PID controller here:
Gc2(s) and Gc1(s) expression formula is the same, wherein kp, ki, kdFor adjustable parameter.PID controller is widely used
Controller based on control amount error；PID controller requires no knowledge about the output how many electric current or voltage to reach specific bit
Move, it is only necessary to know distance objective position error be it is just or negative or zero, error is that canonical exports positive voltage and keeps motor past
Preceding movement is zero until error.If the transmission function between known input signal and output displacement then can directly give input
Signal obtains the displacements of needs, does not need error feedback at this time, this is to be not based on the controller of error, but be based on mould
The controller of type, decoupling controller herein are namely based on the controller of model.
In order to further increase precision, to macro dynamic penalty function N12(s) low-pass filtering is carried out, is obtained:
Wherein: τ is constant.
Decoupling controller N12(s) it is non-causal system, a low-pass filter is addedFilter high-frequency letter
Number.
The above process is feedforward compensation, namely while applying active force to micropositioner, is applied to macro dynamic platform is synchronous
Active force, to movement real-time monitoring, is also needed to carry out feedback compensation, be monitored by interference observer to further increase precision
The movement of micropositioner is interfered, and movement interference is converted to feedback control output, applies feedback signal to macro dynamic driver, before utilization
Feedback compensation and feedback compensation double action, guarantee the precision of macro dynamic platform and micropositioner mass motion.As shown in figure 5, being mended for feedforward
Repay the complex controll block diagram with feedback compensation double action, N in medium and small dotted line frame12QNIndicate decoupling controller, N12For transmitting
Function, QNFor low-pass filter function:
Indicate that interference observer, PID indicate that controller, PZT indicate fine motion driver piezoelectric ceramics in big dotted line frame,
PMLSM indicates macro dynamic driver linear motor.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, this hair
It is bright to be not intended to be limited to the embodiments shown herein, and be to fit to and the principles and novel features disclosed herein phase
Consistent widest scope.
Claims (5)
1. a kind of macro micro- compound platform coupling error removing method characterized by comprising
Detect the macro dynamic displacement error of macro dynamic platform；
Judge the macro dynamic displacement error whether within the scope of macro dynamic error threshold；
If so, determining the fine motion compensation displacement of micropositioner according to the macro dynamic displacement error；
Compensating displacement according to the fine motion determines the micropositioner to the fine motion reaction force of the macro dynamic platform；
According to the fine motion reaction force, macro dynamic driver applies contrary macro dynamic compensating action to the macro dynamic platform simultaneously
Power.
2. macro micro- compound platform coupling error removing method according to claim 1, which is characterized in that the macro dynamic driving
Device applies contrary macro dynamic compensating action power simultaneously to the macro dynamic platform, calculates according to the following formula:
Wherein: N12It (s) is macro dynamic penalty function；Gp11It (s) is the macro dynamic driver current to the transmission function of displacement；Gp12
It (s) is frequency method of the macro dynamic platform by micropositioner reaction force；S indicates complex field, by the differential equation by drawing
Laplace transform obtains transmission function.
3. macro micro- compound platform coupling error removing method according to claim 2, which is characterized in that the macro dynamic driving
Transmission function G of the device electric current to displacementp11(s) it is fitted to obtain according to test result；
Frequency method G of the macro dynamic platform by micropositioner reaction forcep12(s) it is obtained using step response method.
4. macro micro- compound platform coupling error removing method according to claim 3, which is characterized in that the macro dynamic benefit
Repay function N12(s) low-pass filtering is carried out, is obtained:
Wherein: τ is constant.
5. macro micro- compound platform coupling error removing method according to claim 4, which is characterized in that further include:
Movement interference is converted to feedback control output by the movement interference that the micropositioner is monitored by interference observer,
Feedback signal is applied to the macro dynamic driver.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110989354A (en) * | 2019-12-17 | 2020-04-10 | 天津津航技术物理研究所 | High-order polynomial position feedforward compensation method of piezoelectric ceramic micro-motion platform |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4618938A (en) * | 1984-02-22 | 1986-10-21 | Kla Instruments Corporation | Method and apparatus for automatic wafer inspection |
| CN101369155A (en) * | 2008-07-16 | 2009-02-18 | 上海大学 | Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench |
| CN101458532A (en) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | Synchronous control system for ultraprecise double-layer macro/micromotion platform |
| CN103170845A (en) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | Coaxial macro-micro composite linear motion platform device and accuracy compensation method thereof |
| CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| CN108106547A (en) * | 2018-01-17 | 2018-06-01 | 华南理工大学 | The grand micro- compound alignment system of planar three freedom and method based on laser sensor |
| CN109676403A (en) * | 2019-02-01 | 2019-04-26 | 广东工业大学 | A kind of macro micro- composite motion platform of large travel high-speed high-precision |
-
2019
- 2019-08-13 CN CN201910744790.7A patent/CN110442015B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4618938A (en) * | 1984-02-22 | 1986-10-21 | Kla Instruments Corporation | Method and apparatus for automatic wafer inspection |
| CN101458532A (en) * | 2008-07-11 | 2009-06-17 | 华中科技大学 | Synchronous control system for ultraprecise double-layer macro/micromotion platform |
| CN101369155A (en) * | 2008-07-16 | 2009-02-18 | 上海大学 | Locking control method and system of large-stroke nanometer displacement positioning macro-movement bench |
| CN103170845A (en) * | 2013-03-01 | 2013-06-26 | 广东工业大学 | Coaxial macro-micro composite linear motion platform device and accuracy compensation method thereof |
| CN104440343A (en) * | 2014-11-26 | 2015-03-25 | 广东工业大学 | Co-stator double-drive macro and micro integration high-speed precision movement one-dimensional platform for linear motor |
| CN108106547A (en) * | 2018-01-17 | 2018-06-01 | 华南理工大学 | The grand micro- compound alignment system of planar three freedom and method based on laser sensor |
| CN109676403A (en) * | 2019-02-01 | 2019-04-26 | 广东工业大学 | A kind of macro micro- composite motion platform of large travel high-speed high-precision |
Non-Patent Citations (1)
| Title |
|---|
| 孙永倩等: "光刻机工件台宏微电机的非线性复合控制", 《哈尔滨工程大学学报》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110989354A (en) * | 2019-12-17 | 2020-04-10 | 天津津航技术物理研究所 | High-order polynomial position feedforward compensation method of piezoelectric ceramic micro-motion platform |
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