CN110441571A - A kind of manually operable CDM static discharge detection structure and test method - Google Patents

Abstract

The present invention is according to the CDM mode current test verification requirement in ESD electrostatic protection, propose a kind of detection structure and test method that can be used for being manually operated, accurately to complete that the ESD current waveform crawl based on CDM mode is provided data for the test of CDM mode ESD electrostatic protection capacity and supported.The system structure includes: the tester table for support, bearing test device DUT(Device Under Test on board pedestal), board bracket, the detection module for fixed system.Detection module includes pogo(pogo stick) structures such as probe, test board.Tester table is made using aluminum alloy material, has the function of that tightening knob manually adjusts lifting, can be bilayer FR-4 plate with the test board of fixed equipment, test board simultaneous with fixed device.Pogo probe is radio frequency application specific probe, can satisfy the signal testing under 18GHz and the following conditions.Characteristic Impedance of Coaxial Cables is that calibration module (i.e. calibration capacitance) used in 50 Ω is FR-4 material, and electrostatic capacitance is 4pF.

Description

A kind of manually operable CDM static discharge detection structure and test method

Technical field

The present invention relates to integrated circuit fields more particularly to the detection systems and survey of CDM mode static discharge current waveform Method for testing.

Background technique

Due to the continuous improvement of technological level, complementary metal oxide semiconductor (CMOS, Complementary Metal- Oxide-Semiconductor) size of device is constantly in the trend of diminution, has reached deep-submicron at present even more It is small.This development trend also brings a fatal weakness, that is, inputs while improving device performance and operating rate Impedance is very big, it is easy to be punctured by static discharge (ESD, Electro-Static Discharge).

In actual use, all there is capacity effects everywhere.It is known that electrostatic charge can store almost In all objects, this makes static discharge phenomenon come across each place.Currently, ESD protection is surveyed for integrated circuit According to device electrification, approach is unusual is divided into HBM(Human Body Model for examination), MM (Machine), CDM(Charged Device Model) etc. it is several, according to its charge approach difference, relevant test equipment and test method also have certain journey The difference of degree.In these three modes, HBM mode and MM mode, since the time being suggested is more early, many people are ripe Know, and Electronics Engineers have taken various electrostatic preventing structures or measure targetedly also to be promoted The stability of this two classes device and electrostatic protection are horizontal.

However, CDM failure mode has been increasingly becoming one with the promotion of technological level and device function complexity Distinct issues, reason are: first, with the progress of chip technology, operating rate is accelerated, but chip also becomes fragile .The raising of integrated level is so that device size is smaller and smaller, and the link width between device is more and more narrow, and passivation layer is increasingly It is thin, these factors all can when chip it is also bigger to the sensibility of static discharge.One less high voltage can hit transistor It wears, a small ESD electric current can fuse line, so that semiconductor device failure, increases scientific research cost；Second, pass through The Electrostatic discharge waveforms of CDM mode are measured, it can be by checking that the device performance performance after detection may determine that whether device loses Effect；Third is analyzed by parameters such as peak value, the periods of analysis discharge waveform whether performance of semiconductor device fails, from And propose to avoid the precautionary measures of component failure.It is therefore proposed that the test for the static discharge that can be manually operated based on CDM mode System and method is very necessary.

Currently, being had the following problems about CDM mode static discharge detection system: 1. current AEC-Q100(by The qualification authentication testing process for integrated circuit of AIAG car pool exploitation) in test specification, it is not specified by used test The overall architecture of equipment and relevant parameter；Specific material is not provided, this make in the production process because Different types of test equipment can be generated for the difference of producer, is lacked normative.Meanwhile the because a variety of materials that may be used All kinds of parameters between difference, will lead to measurement result lack accuracy.2. external some company produces accordingly CDM mode electrostatic discharge testing equipment, but at home the field also in blank stage.The equipment that foreign countries have been produced For, high degree of automation, but it is at high price, substantially all more than 100,000 U.S. dollars.And in actually using, many small companies are past It is past not need very high precision, it is only necessary to there is manual equipment to do qualitative detection.But existing equipment is but all base at present In high-precision full-automatic testing equipment so that little company need to pay in introduction or rental equipment it is many it is unnecessary at This.Therefore, it is badly in need of inventing a functional, cheap type hand CDM mode electrostatic discharge testing system.

Summary of the invention

The present invention provides a kind of functional, cheap type hand CDM mode ESD current waveform detection system knots Structure and test method, to complete the current discharge waveform measurement of CDM mode.

To solve the above-mentioned problems, the invention proposes the manual operation ESD current waveform detection systems based on CDM mode Structure, the structure include: the tester table of adjustable lifting, the adjustable elastic bracket for being used to fix suspension arrangement, Screw and test board can be passed through.The test board, which contains, accommodates the through-hole that screw passes through.Plug is contained in test board side, is convenient for Connecting coaxial cable, ground plane bottom are welded with pogo(pogo stick) probe, for contacting electrification device, needed for acquisition Waveform；Calibration module is horizontally arranged on tester table pedestal.

Optionally, the bracket of the fixed suspension arrangement, part for fixing are annular, and internal diameter is slightly larger than for connecting The cylindrical flange disk diameter of test board.

It is optional, the test board, containing there are two can be by the through-hole of screw, for test board and ring flange to be incorporated in Together, it is fixed on tester table, the through-hole distance test plate centre distance is equal.The test board is connected with ring flange Opposite side be welded with pogo probe.

Optionally, the pogo probe that test board is welded, the workable frequency range of institute are to include DC ~ 18GHz

Optionally, the pogo probe that test board is welded is weldingly connected by 1 Ω resistance with test board, and 1 Ω resistance used is ring Shape radiation resistance；Optionally, the plug that test board is welded is standard SMA connector, can be connected with coaxial cable.

Optionally, the calibration module is a kind of in a kind of code name of flame resistant material grade of FR-4(, representative to mean Resin material allows for a kind of material specification of self-extinguish by combustion state, its not a kind of title material, and one Kind of material rate) PCB figure on material, surface gold-plating or nickel plating.

To achieve the above object, the present invention also provides a kind of tests CDM mode static discharge using said detecting system The method of current waveform, comprising: the modules of the measuring system are fixed in a bracket；According to required charging Voltage charges to DUT by field plate with DC power supply；Connect big resistance (M when charging, between power output end and field plate Ω rank) it is protected, the electric current in DC voltage source is that charging finishes when being 0, then disconnects power supply；Tester table is adjusted, So that fixed pogo probe decline, contacts with device under test pin, the charging charge on device passes through probe quick release, The current signal is eventually displayed on oscillograph by coaxial cable transmission；After oscilloscope display waveform, by adjusting test machine Platform spiral leaves DUT pin, high-voltage DC power supply accesses again fills DUT so that fixed pogo probe rises Electricity, preparation are tested next time；According to the test process, the current waveform shown on oscillograph is obtained, as required waveform As a result.

Compared with prior art, above-mentioned technical proposal has the advantage that detection system proposed by the present invention builds simplicity, Cost is far below automated test device；The specific structure and material for specifying detection system comply fully with relevant criterion requirement, It ensure that the accuracy of test result.Secondly, it is flexible and convenient based on manually operating method, it is suitble to mark irregular device Standardization test.Signal transmission path can accomplish most shortization, reduce measuring technique difficulty.Simultaneously because test resistance is 1 Ω, Complicated conversion is not needed, also ensures the accuracy of test.It is closed additionally, due to the measurement structure and actual test circuit structure Join larger, therefore is easy to change by control variate method modules ginseng based on the current waveform that the measuring device is measured Number, conveniently probes into the relationship of every some materials parameter and test result, convenient for being further improved equipment.

Detailed description of the invention

Fig. 1 is the left view of the ESD current waveform detection system of CDM mode in first embodiment of the invention.

Fig. 2 is the bottom view of measurement module in first embodiment of the invention.

Fig. 3 is the top view of first embodiment of the invention alignment module.

Specific embodiment

Aiming at the problem that background technique refers to, present inventor's analysis is obtained: if a kind of manual measurement can be proposed System is not necessarily to it by expensive automation control board and software, directly measurement current waveform, and material therefor can be surveyed The signal for trying out 10GHz band above will not then generate background technique and mention in the case where correct simulation practical band power mode The problem of.

Based on above-mentioned idea, the embodiment of the present invention proposes the ESD current waveform detection system of following CDM mode, the structure It include: the 1. support module pedestals for being used for overall support, material is aluminium alloy；2. to firm banking and top fixed module Connect knob；3. quasi- coke spiral, the raising and lowering for adjusting bracket part；4. elastic adjusting knob, convenient for difference The cylindrical connecting rod of diameter is fixed；5. cylindrical type connecting rod is used for connecting test plate and bracket；6. test board, material For FR-4, with a thickness of 0.8mm, above have filter and attenuator with；7. standard SMA socket, to connect coaxial cable；8. spiral shell Silk and through-hole, to connecting test plate and cylindrical type connecting rod；9.pogo probe, for contacting calibration module, triggering electric discharge thing Part；10. calibration module, material FR-4 carries charge to simulate electrification device；11. charging resistor, at least 20M Ω； 12.1 Ω test resistance；13. Pogo probe location, outside perpendicular to plane；14. copper dish, diameter 9mm constitute 4pF capacitor Effect.

The ESD current waveform detection system of above-mentioned CDM mode is described in detail with reference to the accompanying drawings of the specification, is provided Two specific embodiments of above-mentioned measurement structure, in order to understand above-mentioned measurement structure.

Embodiment, the ESD protection current waveform of actual test CDM mode.

1 pedestal is placed on horizontal plane, guarantees that entire test macro is horizontal, knob 2 is screwed, by entire upper bracket and 1 Pedestal is fixed together, mobile when preventing from testing, and causes adverse effect to measurement result.According to assembling entire survey shown in Fig. 1 After test system, by the not connected termination DC voltage source anode of charging resistor, 8 fixed screws connect DC voltage source cathode.It adjusts After DC voltage source to required charging voltage, output voltage is charged by 11 charging resistors to 10 calibration modules, after charging 10 calibration modules for simulating electrification device.Power opening state is kept, quasi- burnt spiral 3 is adjusted, declines entire bracket, directly The copper dish at 10 calibration module centers are contacted to 9pogo probe.Quasi- burnt spiral 3 is adjusted, increase bracket, disconnecting DC voltage source is It can.

The ESD protection current waveform method using above-mentioned measurement structure measurement CDM mode is illustrated in detail below.

The measurement method includes:

Step 1, above-mentioned modules are made in same system；

Step 2, repeatedly measurement is connected to total test resistance value between pogo probe and test board respectively before test every time；

Step 3, after electric discharge, copper dish (electrification device simulated) institute it is electrically charged by 9 pogo probes and test resistance after, It using the coaxial cable being connected with SMA connector 7, is shown on the oscillograph of the coaxial cable other end, the voltage on oscillograph Waveform is required current waveform.

Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies Within, then the present invention is also intended to include these modifications and variations.

Claims (8)

1. the ESD current waveform detection system based on CDM mode characterized by comprising the test machine of adjustable lifting Platform, the adjustable elastic bracket for being used to fix suspension arrangement, can pass through screw and test board；The test board contains appearance The through-hole that screw of receiving passes through；Plug is contained in test board side, is convenient for connecting coaxial cable, ground plane bottom is welded with pogo(bullet Spring pogo) probe, for contacting electrification device, waveform needed for obtaining；Calibration module is horizontally arranged on tester table pedestal.

2. structure as described in claim 1, which is characterized in that the bracket of the fixed suspension arrangement, part for fixing For annular, internal diameter is slightly larger than the cylindrical flange disk diameter for connecting test plate.

3. structure as described in claim 1, which is characterized in that the test board, containing there are two can by the through-hole of screw, For test board and ring flange to be combined together, it is fixed on tester table, the through-hole distance test plate centre distance phase Deng the test board is welded with pogo probe in the opposite side being connected with ring flange.

4. structure as described in claim 1, which is characterized in that the pogo probe that test board is welded, the workable frequency of institute Rate range is DC ~ 18GHz.

5. structure as described in claim 1, which is characterized in that the pogo probe that test board is welded by 1 Ω resistance and is surveyed Test plate (panel) is weldingly connected, and 1 Ω resistance used is ring radiation resistance.

6. structure as described in claim 1, which is characterized in that the SMA connector that test board is welded is standard radio frequency plug, can To be connected with coaxial cable.

7. structure as described in claim 1, which is characterized in that the calibration module is one kind in a kind of flame resistant material of FR-4( The code name of grade, a kind of representative material specification for meaning resin material and allowing for self-extinguish by combustion state, Its not a kind of title material, a kind of material rate) PCB figure on material, surface gold-plating or nickel plating.

8. a kind of method for testing CDM discharge waveform using detection system described in claim 1 characterized by comprising

The modules of the measuring system are fixed in a bracket；According to required charging voltage, DC power supply is used By charging, field plate charges to DUT；Connect when charging, between power output end and field plate big resistance (M Ω rank) progress It protects, the electric current in DC voltage source is that charging finishes when being 0, then disconnects power supply；Tester table is adjusted, so that fixed The decline of pogo probe, contacts with device under test pin, and the charging charge on device passes through probe quick release, current signal warp Coaxial cable transmission is crossed to be eventually displayed on oscillograph；After oscilloscope display waveform, by adjusting tester table spiral, so that by Fixed pogo probe rises, and leaves DUT pin, and high-voltage DC power supply accesses charge to DUT again, and preparation is surveyed next time Examination；According to the test process, the current waveform shown on oscillograph is obtained, as required waveform result.