CN104297713B - Integrated circuit test system load plate calibration system - Google Patents
Integrated circuit test system load plate calibration system Download PDFInfo
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- CN104297713B CN104297713B CN201410530720.9A CN201410530720A CN104297713B CN 104297713 B CN104297713 B CN 104297713B CN 201410530720 A CN201410530720 A CN 201410530720A CN 104297713 B CN104297713 B CN 104297713B
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Abstract
The present invention provides a kind of integrated circuit test system load plate calibration system, including high speed signal input module, integrated circuit interface adaptor module, probe location module and calibration module；The output end of the high speed signal input module is electrically connected with the input of load plate to be calibrated；The input of the integrated circuit interface adaptor module is electrically connected with the output end of load plate to be calibrated；The output end of the integrated circuit interface adaptor module is electrically connected with the input of the probe location module；The output end of the probe location module is electrically connected with the input of the calibration module；The output end of the calibration module is electrically connected with the input of the high speed signal input module；By the main performance index of quantitative analysis load plate, the deficiencies such as the limitation of load plate tradition qualitative test analysis are solved, it is ensured that high speed, large scale integrated circuit parameter measurement value are accurately and reliably.
Description
Technical field
The present invention relates to integrated circuit test clip tool field of measuring techniques, and in particular to a kind of integrated circuit test system adds
Support plate calibration system.
Background technology
Integrated circuit test system load plate (hereinafter referred to as load plate) is integrated circuit test system TCH test channel mouthful bullet
Connection circuit between spring pin and tested integrated circuit pin, typically with insulation board as base material, is cut into certain size, with setting
The conductive pattern counted, realizes mutual between integrated circuit input/output port and the input/output pin of tested integrated circuit
Even.With the data rate requirement more and more higher of integrated circuit, the available test rate ability of integrated circuit test system
More and more higher, requirement to load plate transmission performance also more and more higher.Method of testing currently for load plate is relatively common
To change qualitatively to be judged by eye pattern, its judgment basis be also according to user to the understanding of high speed transmission of signals performance and
Acceptable degree and it is different, without it is unified can foundation codes and standards.In order to ensure high speed, large scale integrated circuit value
Accurately and reliably, a kind of calibration system of integrated circuit test system load plate is studied, the performance of quantitative analysis load plate is ten
Divide necessary.
The content of the invention
In view of this, it is necessary to which providing one kind can completely disengage from integrated circuit test system, and separate calibrations are to be calibrated to be added
The parameters of carrier plate transmission performance, the integrated circuit test system load plate calibration system of quantitative analysis load plate performance to be calibrated
System.
A kind of integrated circuit test system load plate calibration system, including high speed signal input module, integrated circuit interface
Adaptor module, probe location module and calibration module；The output end of the high speed signal input module and load plate to be calibrated
Input electrical connection；The input of the integrated circuit interface adaptor module is electrically connected with the output end of load plate to be calibrated
Connect；The output end of the integrated circuit interface adaptor module is electrically connected with the input of the probe location module；The spy
The output end of pin locating module is electrically connected with the input of the calibration module；The output end of the calibration module and the high speed
The input electrical connection of signal input module；
The calibration module is used to send initial signal and receives the collection signal after being processed by load plate to be calibrated, and
Collection signal is compared with initial signal, and load plate to be calibrated is calibrated according to comparing result, calibration module simultaneously is used to incite somebody to action
Collection signal is stored in the memory of calibration module.
The high speed signal input module is used to receive the initial signal that the calibration module sends, and simulated testing system
Initial signal is sent to load plate to be calibrated；
The integrated circuit interface adaptor module is used to receive the output signal after the load plate treatment to be calibrated, and
The signal of the output is configured, and is sent to the probe location module；
The probe location module is used to gather the output signal after the integrated circuit interface adaptor module configuration,
And the signal of collection is sent to the calibration module.
The integrated circuit test system load plate calibration system that the present invention is provided, for transmission line class in load plate to be calibrated
The factors such as type, Via Design, impedance matching are determined influence degree, the situation of distorted signals, amplitude of variation of its performance etc.
Amount analysis, enables calibration system to cover the key technical indexes of integrated circuit test system load plate to be calibrated；By quantitative
The main performance index of load plate to be calibrated is analyzed, the limitation of load plate tradition qualitative test analysis to be calibrated is solved well
Property etc. deficiency, it is ensured that at a high speed, large scale integrated circuit parameter measurement value accurately and reliably；It is simultaneously of the present invention integrated
Circuit test system load plate calibration system, departing from complementary conditions such as integrated circuit test systems, is widely to measure clothes in the later stage
Work and provided convenience as development；And the system has, and accuracy is high, Scalable Performance is good, simple to operate, integrated level is high to wait special
Point, disclosure satisfy that the calibration requirements of contemporary integrated circuits test system load plate main performance index to be calibrated.
Brief description of the drawings
Fig. 1 is the structural representation of the integrated circuit test system load plate calibration system that embodiment of the present invention is provided；
Fig. 2 is the structured flowchart of Fig. 1 alignment modules；
Fig. 3 is the flow chart of the integrated circuit test system load plate calibration system that embodiment of the present invention is provided.
Specific embodiment
As shown in figure 1, in a kind of integrated circuit test system load plate calibration system of the embodiment of the present invention, including at a high speed
Signal input module 10, integrated circuit interface adaptor module 20, probe location module 30 and calibration module 40；The high speed letter
The output end of number input module 10 is electrically connected with the input of load plate to be calibrated；The integrated circuit interface adaptor module 20
Input electrically connected with the output end of load plate to be calibrated；The output end of the integrated circuit interface adaptor module 20 and institute
State the input electrical connection of probe location module 30；The output end of the probe location module 30 is defeated with the calibration module 40
Enter end electrical connection；The output end of the calibration module 40 is electrically connected with the input of the high speed signal input module 10；
The calibration module 40 is used to send initial signal and receives the collection signal after being processed by load plate to be calibrated,
And collection signal is compared with initial signal, and load plate to be calibrated is calibrated according to comparing result, calibration module 40 is used in combination
It is stored in the memory of calibration module 40 in by collection signal.
Optionally, as shown in Fig. 2 the calibration module 40 includes that signal generating unit 41, signal receives memory cell 42
And signal contrast unit 43,
Size is identical, amplitude is equal, frequency stabilization first for being sent according to calibration standard for the signal generating unit 41
Beginning signal, and initial signal is sent to the high speed signal input module 10；
The signal receives memory cell 42 is used to receive the signal of the collection of the probe location module 30, and collection is believed
Number and the comparing result of signal contrast unit 43 stored；
The signal contrast unit 43 is used to read the collection signal, and gathers signal and the initial signal by described
Compare, obtain comparing result.
Specifically, the calibration module 40 includes high speed code error tester, high speed pattern generator and high-speed oscilloscope.
Optionally, the signal contrast unit 43 compares the collection signal with the initial signal, and it is right to obtain
Include than result：
When being calibrated to load plate transmission rate to be calibrated, high speed pattern generator is by metallic vias to loading to be calibrated
Plate is input into high-speed digital signal, and gathers output waveform with high-speed oscilloscope, watches eye pattern and sets detection signal transmission quality；
When being calibrated to load plate signal attenuation to be calibrated, high speed pattern generator is by metallic vias to loading to be calibrated
Plate is input into high-speed digital signal, and output waveform is gathered with external high-speed oscilloscope, and measured waveform amplitude, the amplitude of signal declines
It is kept to Δ V=20lg (V0/Vm), wherein V0Represent high speed pattern generator to load plate to be calibrated input high-speed digital signal
Peak-to-peak value, VmRepresent that high-speed oscilloscope collects the peak-to-peak value of signal；
When being calibrated to the load plate bit error rate to be calibrated, high speed pattern generator sends all kinds to load plate to be calibrated
Serial code, by high speed code error tester receive by load plate to be calibrated treatment after signal, and gather high speed pattern generation
Initial serial code and the signal after treatment that device sends are compared, and measure the bit error rate n of load plate to be calibrated, are calculated mistake
Code check result；
When being calibrated to the load plate rise time to be calibrated, high-speed oscilloscope is sent out by metallic vias to load plate to be calibrated
It is t to send the rise timer0Fast along signal, the waveform of signal after high-speed oscilloscope timely collection, and measure the signal that obtains
Rise time is tr1, then the actual rise time t of the signalrAs：
The high speed signal input module 10 is used to receive the initial signal that the calibration module 40 sends, and simulation test
System sends to load plate to be calibrated initial signal；Specifically, high speed signal input module 10 is included for receiving calibrating die
The signal source interface of the connection of block 40 and the loading plate interface to be calibrated for signal transmission to be given load plate to be calibrated, wherein, institute
State loading plate interface to be calibrated to be electrically connected with the input of load plate to be calibrated by metallic vias, the signal source interface is used
SMA interfaces are connected with calibration module 40.
The integrated circuit interface adaptor module 20 is used to receive the output signal after the load plate treatment to be calibrated,
And configured the signal of the output, and it is sent to the probe location module 30；The integrated circuit interface adapter
For the connection between load plate to be calibrated and probe, it is directly mounted in load plate to be calibrated, by adapter surrounding
Location hole be connected with load plate to be calibrated.Bond pad arrangement on adapter is by load plate to be calibrated and integrated circuit interface
Arrangement design.
The probe location module 30 is used to gather the output after the integrated circuit interface adaptor module 20 is configured
Signal, and the signal of collection is sent to the calibration module 40.Specifically, the probe location module 30 is included for gathering
The probe of signal, the locator positioned for traveling probe and to the probe and the microscope for observing probe, institute
Stating probe location module 30 includes being provided with multiple respective channels according to signal difference to be calibrated, for example：Transmission rate calibrated channel,
Signal attenuation calibrated channel, bit error rate calibrated channel, rise time calibrated channel etc., the probe location module 30 pass through probe
Connect different passages, the signal to be calibrated required for collection.
In the composition of the integrated circuit test system load plate calibration system in the embodiment of the present invention, from meeting demand
The high speed code error tester of pattern generator is included, such as pacifies vertical MP1800A series digit serial analyzers, contain pattern generation
Scope be 0.1~12.5Gbps pattern generator module MU181020A-002 and error detection scope for 0.1~
The error detection module MU181040A-002 of 12.5Gbps；From the high-speed oscilloscope for meeting demand, it is desirable to which analog bandwidth reaches
12.5GHz, 31M standard configuration internal memory, such as U.S. Tyke DSA71254C high-speed oscilloscopes；From meeting can sending for demand
One module on the fast edge of rise time, such as U.S. Tyke DSA8200 sampling oscilloscopes TDR modules；From 12.5GHz bandwidth with
On microwave probe, such as GTL40-500-GSG-DX model probes of the GigaTest Labs in the U.S.；From 16 roadbeds in metal
The high speed signal input unit and relevant interface of via, the TDR Kit accessories of such as Rosenberger.
In the embodiment of the present invention, the integrated circuit test system load plate calibration system is additionally provided with a load plate to be calibrated
Fixture, load plate fixture to be calibrated has high-stability, and for fixing load plate to be calibrated, the load plate to be calibrated is consolidated
Determining part includes two-layer hollowed-out board, and the load plate to be calibrated being calibrated is fixed on two-layer hollowed-out board；Wherein, the loading fixture
Side be additionally provided with a crossbeam, the probe location module 30 is placed on the crossbeam；High speed signal based on metallic vias is defeated
Enter module 10 and be fixed on load plate lower section to be calibrated；Integrated circuit interface adaptor module 20 is fixed in load plate to be calibrated
Side, the position of each module sets the design that not only consider high speed signal and earth signal pad, is easy to probe collection signal, also needs
Consider the selection of resistance matching problem and material, reduce loss and distortion that integrated circuit interface adaptor module 20 is caused.
Bond pad arrangement in integrated circuit interface adaptor module 20 is the arrangement design by load plate to be calibrated and integrated circuit interface
Form.For different encapsulation, the arrangement of pad would also vary from integrated circuit interface adaptor module 20, but its pad
Structure be all similar to.
As shown in figure 3, the calibration steps of the integrated circuit test system load plate calibration system is as follows：
Step 1.1：Calibration module 40 sends that size is identical, amplitude is equal, frequency stabilization initial letter according to calibration standard
Number, and initial signal is sent to the high speed signal input module 10；Into step 1.2.
Step 1.2：The high speed signal input module 10 receives initial signal, and simulated testing system sends out initial signal
Deliver to load plate to be calibrated；Into step 1.3.
Step 1.3：The initial signal enters load plate to be calibrated, and integrated electricity is passed to after being processed through load plate to be calibrated
Road interface adapter module 20, into step 1.4.
Step 1.4：Signal after the treatment of integrated circuit interface adaptor module 20 pairs pass to probe and determine with postponing
Position module 30；Into step 1.5.
Step 1.5：Probe location module 30 is switched to passage to be measured by probe, the signal to be calibrated required for gathering,
And the signal transmission that will be gathered is to calibration module 40；Into step 1.6.
Step 1.6：The calibration module 40 receives collection signal, and will gather signal transmission to corresponding according to calibration standard
Calibrating installation；Into step 1.7.
Step 1.7：Initial signal will be gathered to compare with the signal after being processed through load plate to be calibrated, display comparison knot
Fruit is simultaneously stored comparing result；Into step 1.8.
Step 1.8：Check whether that required parameter is all calibrated to finish, calibrated when required parameter and finished, into step 1.9；
Finished when required data are not calibrated, then return to step 1.6.
Step 1.9：Check whether whether all passages to be measured are calibrated to finish, calibrated when all passages to be measured and finished, enter
Enter step 1.10；Finished when all passages to be measured are not calibrated, then return to step 1.5.
Step 1.10：Calibration data is derived and is stored, and by the analyzing and processing to calibration data, to load plate to be calibrated
Calibrated.
The integrated circuit test system load plate calibration system that the present invention is provided, for transmission line class in load plate to be calibrated
The factors such as type, Via Design, impedance matching are determined influence degree, the situation of distorted signals, amplitude of variation of its performance etc.
Amount analysis, enables calibration system to cover the key technical indexes of integrated circuit test system load plate to be calibrated；By quantitative
The main performance index of load plate to be calibrated is analyzed, the limitation of load plate tradition qualitative test analysis to be calibrated is solved well
Property etc. deficiency, it is ensured that at a high speed, large scale integrated circuit parameter measurement value accurately and reliably；It is simultaneously of the present invention integrated
Circuit test system load plate calibration system, departing from complementary conditions such as integrated circuit test systems, is widely to measure clothes in the later stage
Work and provided convenience as development；System has the features such as accuracy is high, Scalable Performance is good, simple to operate, and integrated level is high, energy
Enough meet the calibration requirements of contemporary integrated circuits test system load plate main performance index to be calibrated.
Each embodiment is described by the way of progressive in this specification, and what each embodiment was stressed is and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
Professional further appreciates that, with reference to the unit of each example of the embodiments described herein description
And algorithm steps, can be realized with electronic hardware, computer software or the combination of the two, in order to clearly demonstrate hardware and
The interchangeability of software, generally describes the composition and step of each example according to feature in the above description.This
A little functions are performed with hardware or software mode actually, depending on the application-specific and design constraint of technical scheme.Specially
Industry technical staff can realize described function to each specific application using distinct methods, but this realization is not
The scope of the present invention should be exceeded.
The step of method or algorithm for being described with reference to the embodiments described herein, directly can be held with hardware, processor
Capable software module, or the two combination is implemented.Software module can be placed in random access memory, internal memory, read-only storage,
Electrically programmable ROM, electricity can sassafras except in programming ROM, register, hard disk, moveable magnetic disc, CD-ROM or technical field institute it is public
In the storage medium of any other forms known.
It is understood that for the person of ordinary skill of the art, can be done with technology according to the present invention design
Go out other various corresponding changes and deformation, and all these changes and deformation should all belong to the protection model of the claims in the present invention
Enclose.
Claims (8)
1. a kind of integrated circuit test system load plate calibration system, it is characterised in that including high speed signal input module, integrated
Circuit interface adaptor module, probe location module and calibration module；The output end of the high speed signal input module with treat school
The input electrical connection of quasi- load plate；The output of the input of the integrated circuit interface adaptor module and load plate to be calibrated
End electrical connection；The output end of the integrated circuit interface adaptor module is electrically connected with the input of the probe location module；
The output end of the probe location module is electrically connected with the input of the calibration module；The output end of the calibration module and institute
State the input electrical connection of high speed signal input module；
The calibration module is used to send initial signal and receives the collection signal after being processed by load plate to be calibrated, and will adopt
Collection signal is compared with initial signal, and calibrates load plate to be calibrated according to comparing result, and calibration module simultaneously is used to gather
Signal is stored in the memory of calibration module；
The high speed signal input module is used to receive the initial signal that the calibration module sends, and simulated testing system will just
Beginning signal is sent to load plate to be calibrated；
The integrated circuit interface adaptor module is used to receiving the output signal after the load plate to be calibrated treatment, and by institute
State output signal to be configured, and be sent to the probe location module；
The probe location module is used to gather the output signal after the integrated circuit interface adaptor module configuration, and will
The signal of collection is sent to the calibration module.
2. integrated circuit test system load plate calibration system according to claim 1, it is characterised in that the high speed letter
Number input module output end is electrically connected by metallic vias with the input of load plate to be calibrated.
3. integrated circuit test system load plate calibration system according to claim 1, it is characterised in that the calibrating die
Block includes that signal generating unit, signal receive memory cell and signal contrast unit,
Size is identical, amplitude is equal, frequency stabilization initial signal for being sent according to calibration standard for the signal generating unit,
And initial signal is sent to the high speed signal input module；
The signal receives memory cell is used to receive the signal of the probe location module collection, and will gather signal and signal
The comparing result of comparison unit is stored；
The signal contrast unit is used to read the collection signal, and the collection signal is compared with the initial signal
It is right, obtain comparing result.
4. integrated circuit test system load plate calibration system according to claim 3, it is characterised in that the calibrating die
Block includes high speed code error tester, high speed pattern generator and high-speed oscilloscope.
5. integrated circuit test system load plate calibration system according to claim 4, it is characterised in that the signal pair
The collection signal is compared with the initial signal than unit, obtaining comparing result includes：
When being calibrated to load plate transmission rate to be calibrated, high speed pattern generator is defeated to load plate to be calibrated by metallic vias
Enter high-speed digital signal, and output waveform is gathered with high-speed oscilloscope, watch eye pattern and detection signal transmission quality is set；
When being calibrated to load plate signal attenuation to be calibrated, high speed pattern generator is defeated to load plate to be calibrated by metallic vias
Enter high-speed digital signal, output waveform gathered with external high-speed oscilloscope, and measured waveform amplitude, the amplitude attenuation of signal is
Δ V=20lg (V0/Vm), wherein V0Represent that high speed pattern generator is input into the peak-to-peak of high-speed digital signal to load plate to be calibrated
Value, VmRepresent that high-speed oscilloscope collects the peak-to-peak value of signal；
When being calibrated to the load plate bit error rate to be calibrated, high speed pattern generator sends various types of strings to load plate to be calibrated
Row code, is received by the signal after load plate to be calibrated treatment by high speed code error tester, is compared by with initial serial code, is surveyed
The bit error rate n of load plate to be calibrated is measured, bit error rate result is calculated；
When being calibrated to the load plate rise time to be calibrated, high-speed oscilloscope is sent by metallic vias to load plate to be calibrated
The time of liter is tr0Fast along signal, the waveform of signal after high-speed oscilloscope timely collection, and measure the signal that obtains and rise
Time is tr1, then the actual rise time t of the signalrAs：
6. integrated circuit test system load plate calibration system according to claim 1, it is characterised in that the integrated electricity
Path test system load plate calibration system is additionally provided with a load plate fixture to be calibrated, for fixing load plate to be calibrated.
7. integrated circuit test system load plate calibration system according to claim 1, it is characterised in that the probe is determined
Position module is including the probe for gathering signal, the locator positioned for traveling probe and to the probe and for seeing
Examine the microscope of probe.
8. integrated circuit test system load plate calibration system according to claim 7, it is characterised in that the probe is determined
Position module includes multigroup signalling channel, and every group of signalling channel exports corresponding signal to be calibrated, signalling channel is connected by probe,
Signal to be calibrated required for collection.
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104991214B (en) * | 2015-07-30 | 2017-12-29 | 中国船舶重工集团公司第七0九研究所 | Digital integrated electronic circuit DC parameter standard reproducing method and standard set-up |
| CN106526522A (en) * | 2016-11-30 | 2017-03-22 | 武汉数字工程研究所（中国船舶重工集团公司第七0九研究所） | Calibration device for digital signal processor test system |
| CN108828492B (en) * | 2018-07-23 | 2021-04-09 | 中国船舶重工集团公司第七0九研究所 | Time measuring unit calibration device and method for integrated circuit test system |
| CN111208462A (en) * | 2018-11-21 | 2020-05-29 | 上海春尚电子科技有限公司 | Integrated circuit test system load plate detection system |
| CN109459719B (en) * | 2018-12-25 | 2021-03-16 | 北京无线电计量测试研究所 | Method and device for calibrating rise time of broadband oscilloscope probe |
| CN109766232B (en) * | 2019-01-15 | 2022-02-18 | 郑州云海信息技术有限公司 | PCIe pressure eye pattern test calibration method |
| CN114200370A (en) * | 2020-09-18 | 2022-03-18 | 中国科学院微电子研究所 | Test equipment and integrated circuit test method |
| CN114325542B (en) * | 2021-11-23 | 2023-08-22 | 中国船舶重工集团公司第七0九研究所 | Direct current signal calibration plate, calibration device and calibration method of integrated circuit test system |
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