CN110439331A - A kind of clean room - Google Patents

A kind of clean room Download PDF

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Publication number
CN110439331A
CN110439331A CN201910736089.0A CN201910736089A CN110439331A CN 110439331 A CN110439331 A CN 110439331A CN 201910736089 A CN201910736089 A CN 201910736089A CN 110439331 A CN110439331 A CN 110439331A
Authority
CN
China
Prior art keywords
toilet
end bay
core
return air
air passageway
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910736089.0A
Other languages
Chinese (zh)
Inventor
李强
肖红梅
杨光明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Original Assignee
China Electronics Engineering Design Institute Co Ltd
SY Technology Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Electronics Engineering Design Institute Co Ltd, SY Technology Engineering and Construction Co Ltd filed Critical China Electronics Engineering Design Institute Co Ltd
Priority to CN201910736089.0A priority Critical patent/CN110439331A/en
Publication of CN110439331A publication Critical patent/CN110439331A/en
Pending legal-status Critical Current

Links

Classifications

    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H1/00—Buildings or groups of buildings for dwelling or office purposes; General layout, e.g. modular co-ordination or staggered storeys
    • E04H1/12—Small buildings or other erections for limited occupation, erected in the open air or arranged in buildings, e.g. kiosks, waiting shelters for bus stops or for filling stations, roofs for railway platforms, watchmen's huts or dressing cubicles
    • E04H1/1277—Shelters for decontamination
    • E—FIXED CONSTRUCTIONS
    • E04—BUILDING
    • E04H—BUILDINGS OR LIKE STRUCTURES FOR PARTICULAR PURPOSES; SWIMMING OR SPLASH BATHS OR POOLS; MASTS; FENCING; TENTS OR CANOPIES, IN GENERAL
    • E04H5/00—Buildings or groups of buildings for industrial or agricultural purposes
    • E04H5/02—Buildings or groups of buildings for industrial purposes, e.g. for power-plants or factories
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/02—Ducting arrangements
    • F24F13/0227—Ducting arrangements using parts of the building, e.g. air ducts inside the floor, walls or ceiling of a building
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
    • F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
    • F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
    • F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/04—Ventilation with ducting systems, e.g. by double walls; with natural circulation
    • F24F7/06—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit
    • F24F7/08—Ventilation with ducting systems, e.g. by double walls; with natural circulation with forced air circulation, e.g. by fan positioning of a ventilator in or against a conduit with separate ducts for supplied and exhausted air with provisions for reversal of the input and output systems

Abstract

The present invention relates to cleaning production technology fields, disclose a kind of clean room, including workshop ontology, it is equipped with core toilet in workshop ontology, and is equipped with the core toilet return air passageway of core toilet upper interlayer, core toilet lower interlayer and connection core toilet upper interlayer and core toilet lower interlayer；Wherein, core toilet return air passageway is equipped with end bay away from the side of core toilet and supports area, end bay is supported to be equipped with end bay toilet in area, and is equipped with the end bay toilet upper interlayer being located at the top of end bay toilet and the end bay toilet lower interlayer positioned at end bay toilet bottom；End bay toilet upper interlayer and end bay toilet lower interlayer are connected to core toilet return air passageway respectively, and/or the end bay toilet return air passageway for being connected to end bay toilet upper interlayer and end bay toilet lower interlayer is equipped between side of the end bay toilet far from core toilet and the wall of workshop ontology.

Description

A kind of clean room
Technical field
The present invention relates to cleaning production technology field more particularly to a kind of clean rooms.
Background technique
Existing toilet generallys use three-layer sandwich structure, i.e., upper interlayer as plenum chamber will be adjusted temperature and humidity and Air after filtering micronic dust is sent by blower to intermediate clean operating space, and clean operating space is equipped with toilet, and toilet is equipped with band Hole floor makes to wear under toilet's air-flow to lower interlayer.Lower interlayer is then used as return air layer, can pass air through returning for toilet two sides Wind passageway returns to upper interlayer, to realize the recycling of pure air.Meanwhile clean operating space is served in order to arrange The miscellaneous functions such as purification air-conditioning unit, substation, dressing room are equipped with usually on the outside of clean area and support area, and clean area then leads to Frequently referred to core clean area.
Clean room expenditure of construction is high, and occupies valuable factory for the region that toilet provides power and auxiliary support Room (land occupation) area, workshop (land occupation) area shared by the support area by the prior art is usually more than 30%, that is, can use in workshop It is lower than 70%, therefore, the construction of unit cleaning area in ratio of toilet's area in area of mill site of production operation It is higher with operating cost.
Summary of the invention
The present invention provides a kind of clean room, and clean area is extended to the support area of clean room, to improve clean factory The effective area utilization rate in room reduces the construction and operating cost of unit cleaning area.
The embodiment of the invention provides a kind of clean room, which includes workshop ontology, in the workshop ontology Equipped with core toilet, and be equipped be located at the core toilet at the top of core toilet upper interlayer, be located at the core it is clean The core toilet lower interlayer and connection core toilet upper interlayer and core toilet lower interlayer of clean room bottom Core toilet return air passageway；Wherein:
The core toilet return air passageway is equipped with end bay away from the side of the core toilet and supports area, the end bay It supports the end bay toilet upper interlayer in area equipped with end bay toilet and at the top of the end bay toilet, be located at the side End bay toilet lower interlayer across toilet bottom；The end bay supports to be additionally provided with ancillary chamber in area, the ancillary chamber with it is described End bay toilet is stacked；
End bay toilet upper interlayer and end bay toilet lower interlayer respectively with core toilet return air Passageway connection, and/or, between the wall of side and the workshop ontology of the end bay toilet far from the core toilet Equipped with the end bay toilet return air passageway for being connected to end bay toilet upper interlayer and end bay toilet lower interlayer.
In above-described embodiment, the gross area for expanding clean area by the way that end bay toilet is arranged in workshop, also, end bay Toilet is spatially stacked with the ancillary chamber in area is supported, is avoided the area occupied for additionally increasing workshop, is improved clean The effective area utilization rate of net workshop.
Optionally, clean channel, and the clean channel are equipped between the core toilet and the end bay toilet It is connected to respectively with the core toilet and the end bay toilet.End bay toilet is connected to core toilet, thus just In the movement between the two toilets of transport and staff of cargo.
Optionally, partition is equipped in the core toilet return air passageway, between the partition and the end bay toilet Form the end bay toilet return air passageway of connection end bay toilet upper interlayer and end bay toilet lower interlayer.
Optionally, the bottom plate in the clean channel respectively with the floor of the core toilet and the end bay toilet Floor flush.
Optionally, the ancillary chamber is located at the top of the end bay toilet, and end bay toilet lower interlayer extends To ground and it is used for clear production space.It is lower clean raw that space in end bay toilet lower interlayer can be used for cleaniliness classs Produce space.
Optionally, the top of the end bay toilet and it is respectively arranged below with the ancillary chamber.
Optionally, in the workshop ontology, roof truss corresponding with the core toilet and with the end bay toilet Corresponding roof truss flushes.
Optionally, the opposite two sides in the core toilet are respectively equipped with the core toilet return air passageway, and each A core toilet return air passageway is respectively equipped with the end bay away from the side of the core toilet and supports area and institute State end bay toilet.
Detailed description of the invention
Fig. 1 is a kind of structural map of clean room provided in an embodiment of the present invention；
Fig. 2 is the structural map of another clean room provided in an embodiment of the present invention；
Fig. 3 is the structural map of another clean room provided in an embodiment of the present invention；
Fig. 4 is the structural map of another clean room provided in an embodiment of the present invention；
Fig. 5 is the structural map of another clean room provided in an embodiment of the present invention；
Fig. 6 is the structural map of another clean room provided in an embodiment of the present invention.
Appended drawing reference:
10- workshop ontology
20- core toilet
20a- core toilet upper interlayer
20b- core toilet lower interlayer
20c- core toilet return air passageway
30- ancillary chamber
40- end bay toilet
40a- end bay toilet upper interlayer
40b- end bay toilet lower interlayer
40c- end bay toilet return air passageway
50- partition 60- cleaning channel
70- fan filter unit
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention is made into one with reference to the accompanying drawing Step describes in detail, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments. Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts all Other embodiments shall fall within the protection scope of the present invention.
The embodiment of the invention provides a kind of clean rooms, expand clean area by the way that end bay toilet is arranged in workshop The gross area, also, end bay toilet and end bay support the ancillary chamber in area to be spatially stacked, and avoid additionally increasing factory The area occupied in room improves the effective area utilization rate of clean room.
Specifically, the clean room includes workshop ontology, core toilet is equipped in workshop ontology, and be equipped with and be located at core Core toilet at the top of toilet, the core toilet lower interlayer positioned at core toilet bottom and connection core toilet The core toilet return air passageway of upper interlayer and core toilet lower interlayer；Wherein,
Core toilet return air passageway is equipped with end bay away from the side of core toilet and supports area, and end bay is supported to be equipped in area End bay toilet, and equipped with the end bay toilet upper interlayer being located at the top of end bay toilet and positioned at end bay toilet bottom End bay toilet lower interlayer；Ancillary chamber is additionally provided in end bay clean area, ancillary chamber is stacked with end bay toilet；
End bay toilet upper interlayer and end bay toilet lower interlayer are connected to core toilet return air passageway respectively, and/ Or, being equipped between side of the end bay toilet far from core toilet and the wall of workshop ontology for being connected to end bay toilet The end bay toilet return air passageway of interlayer and end bay toilet lower interlayer.
In above-described embodiment, end bay toilet is set, end bay toilet and core toilet can both share Jie in workshop It, can also be in end bay toilet far from core toilet in return air passageway between the two, i.e. core toilet return air passageway End bay for being connected to end bay toilet upper interlayer Yu end bay toilet lower interlayer is set between side and the wall of workshop ontology Toilet return air passageway, for the independent return air of end bay toilet, alternatively, can be combined with above two scheme realizes that bilateral returns Wind；End bay toilet is formed by the gross area that clean area expands clean area in workshop, also, end bay toilet and support Ancillary chamber in area is spatially stacked, and is avoided the area occupied for additionally increasing workshop, is improved the effective of clean room Area utilization.
In order to more be apparent from the interior layout of clean room provided in an embodiment of the present invention, carried out now in conjunction with attached drawing Detailed description.
FIG. 1 to FIG. 6 is referred to together, which includes workshop ontology 10, is equipped with core toilet in workshop ontology 10 20, and it is equipped with the core toilet upper interlayer 20a for being located at 20 top of core toilet, the core positioned at 20 bottom of core toilet The core toilet of toilet lower interlayer 20b and connection core toilet upper interlayer 20a and core toilet lower interlayer 20b are returned Wind passageway 20c；Specifically, core toilet 20 includes floor with holes, the wallboard being arranged on floor and cooperates with wallboard Furred ceiling, furred ceiling is equipped with multiple fan filter units 70, and in workshop, fan filter unit 70 on furred ceiling sucks core Air-flow in heart toilet upper interlayer 20a, and be filtered, be sent into core toilet 20 after pressurized treatments, air-flow from upper and Under core toilet lower interlayer 20b is entered by the hole on floor behind core toilet 20, in core toilet lower interlayer 20b, air-flow continue to flow, and return to core toilet upper interlayer 20a by the core toilet return air passageway 20c of two sides, complete One cycle.
Core toilet return air passageway 20c is equipped with end bay away from the side of core toilet and supports area, and end bay is supported in area Equipped with ancillary chamber 30, ancillary chamber 30 can be used for arranging substation, purification air-conditioning unit, or the dressing room as staff Deng.In order to maximally utilise clean room land occupation, the effective rate of utilization of workshop is improved, end bay is supported to be additionally provided with end bay in area Toilet 40 is additionally provided with the end bay toilet upper interlayer 40a positioned at 40 top of end bay toilet, is located at 40 bottom of end bay toilet End bay toilet lower interlayer 40b, end bay toilet 40 and ancillary chamber 30 are supported to be stacked in area in end bay；End bay toilet 40 structure is similar with the structure of core toilet 20, by the floor of aerial setting, the wallboard and and wall that are arranged on floor The furred ceiling composition of plate cooperation, furred ceiling is equipped with multiple fan filter units 70, for the air for entering end bay toilet 40 It is filtered, pressurized treatments, by fan filter unit 70, treated after air-flow passes through end bay toilet 40 from top to bottom End bay toilet lower interlayer 40b is entered by the hole on floor, also needs setting connection end bay toilet upper interlayer 40a and end bay The return air channel of toilet lower interlayer 40b, so that the air-flow in end bay toilet lower interlayer 40b be enable to pass through return air passageway weight End bay toilet upper interlayer 40a is newly returned to, airflow circulating is formed.
When specific setting, end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b are returned with core toilet respectively Wind passageway 20c connection, that is, end bay toilet 40 and core toilet 20 share the core toilet return air to fall between and press from both sides Air-flow in road 20c, end bay toilet lower interlayer 40b is entered in end bay toilet by core toilet return air passageway 20c to be pressed from both sides In layer 40a, in other words, a part in air-flow and core toilet lower interlayer 20b in end bay toilet lower interlayer 40b Air-flow enters in the core toilet return air passageway 20c between end bay toilet and core toilet, in core cleaning In the 20c of room return air passageway, mixed airflow a part that this two parts air-flow is formed enters in end bay toilet upper interlayer 40a, separately A part enters in core toilet upper interlayer 20a, specifically can be by adjusting the wind being arranged on 40 furred ceiling of end bay toilet The quantity and parameter of machine filter unit 70, and adjust the fan filter unit 70 being arranged on 20 furred ceiling of core toilet Quantity and parameter, make the proportionate relationship for meeting setting between the two, to realize in the 20c of core toilet return air passageway The distribution of air quantity.
It can also be end bay toilet other than making end bay toilet 40 and core toilet 20 share a return air passageway The 40 individual return air passageways of configuration, in a kind of specific embodiment, as shown in Fig. 2, between core toilet 20 and end bay It is equipped with partition 50 in core toilet return air passageway 20c between toilet 40, is formed between partition 50 and end bay toilet 40 It is connected to the end bay toilet return air passageway 40c of end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b, that is, in core The return air that a part is individually used for end bay toilet 40 is separated out by partition 50 in the 20c of heart toilet return air passageway.Alternatively, another In a kind of specific embodiment, as shown in figure 3, side of the end bay toilet 40 far from core toilet 20 and workshop ontology 10 Wall between be equipped with end bay toilet for being connected to end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b Return air passageway 40c.
Further, return air passageway can also be respectively set in the two sides of end bay toilet 40, two sides return air is realized, one In kind of specific embodiment, as shown in figure 4, end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b respectively with Core toilet return air passageway 20c connection between end bay toilet 40 and core toilet 20, also, end bay is clean It is additionally provided between side of the room 40 far from core toilet 20 and the wall of workshop ontology 10 and is pressed from both sides for being connected in end bay toilet The end bay toilet return air passageway 40c of layer 40a and end bay toilet lower interlayer 40b, that is, end bay toilet 40 is close to core The side and core toilet 20 of toilet 20 share a return air passageway, are arranged in the side far from core toilet 20 independent Return air passageway；Alternatively, independent return air passageway can also be respectively set in the two sides of end bay toilet 40, specifically, such as Fig. 5 It is shown, partition 50 is set in the core toilet return air passageway 20c between end bay toilet 40 and core toilet 20, This segment space being separated out by partition 50 connects with end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b respectively It is logical, realize independent return air, meanwhile, between side of the end bay toilet 40 far from core toilet 20 and the wall of workshop ontology 10 It is additionally provided with the end bay toilet return air passageway for being connected to end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b 40c realizes independent return air.
In brief, end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b is returned with core toilet respectively Wind passageway 20c connection, and/or, between side of the end bay toilet 40 far from core toilet 20 and the wall of workshop ontology 10 Equipped with the end bay toilet return air passageway for being connected to end bay toilet upper interlayer 40a and end bay toilet lower interlayer 40b 40c；Also, further it can also pass through partition in the 20c of core toilet return air passageway for the first air return method 50 are separated out the return air that a part is individually used for end bay toilet 40.
Clean area in end bay toilet 40 can be used alone, alternatively, as shown in fig. 1~fig. 5, in end bay toilet 40 Clean channel 60 is set between core toilet 20, and keeps clean channel 60 clean with end bay toilet 40 and core respectively Room 20 is connected to, in this way, the transport of product can be carried out between end bay toilet 40 and core toilet 20 by clean channel 60, And staff is facilitated to walk between the toilet Liang Ge.When specific setting, the bottom plate in clean channel 60 is clean with core respectively The floor of room 20 and the floor of end bay toilet 40 flush.In addition, clean channel 60 is between core toilet return air passageway 20c Interior, clean channel 60 only takes up a part of space of core toilet return air passageway 20c, does not influence the circulation of air-flow.
From integral layout, the ancillary chamber 30 and end bay toilet 40 being arranged in end bay support area spatially have more Kind positional relationship, as shown in fig. 6, ancillary chamber 30 is located at the top of end bay toilet 40, at this point it is possible to by pressing from both sides under end bay toilet The spatial spread of layer 40b is to ground, and end bay toilet lower interlayer 40b is for the lower clear production space of cleaniliness classs.Or Person, as shown in fig. 1~fig. 5, as needed end bay toilet 40 top and be respectively arranged below ancillary chamber 30, and end bay Toilet 40 and each ancillary chamber 30 interval are arranged, and the gap between end bay toilet 40 and the ancillary chamber 30 of top forms end bay Gap between the ancillary chamber 30 of toilet upper interlayer 40a, end bay toilet 40 and lower section forms end bay toilet lower interlayer 40b。
In workshop, core toilet return air passageway 20c, such as FIG. 1 to FIG. 5 can be set in the side of core toilet 20 Shown, two sides that can also be opposite in core toilet 20 are respectively set core toilet return air passageway 20c, also, in addition to Side setting end bay of one of core toilet return air passageway 20c away from core toilet supports area and end bay toilet Outside 40, above-mentioned end bay can also be respectively set away from the side of core toilet 20 in each core toilet return air passageway 20c Support area and end bay toilet 40, wherein the set-up mode of end bay toilet return air passageway 40c can be using hereinbefore listed Any mode lifted.In addition, in building process, in workshop, roof truss corresponding with core toilet 20 and clean with end bay The corresponding roof truss of clean room 40 flushes, so that the space in workshop be made to have obtained maximum utilization, also, entire roof truss can be with For integral type roof truss.
By above description as can be seen that in the embodiment of the present invention, expanded by the way that end bay toilet is arranged in workshop The area of clean area, also, end bay toilet is spatially stacked with ancillary chamber, avoids the occupancy face for additionally increasing workshop Product, improves the effective area utilization rate of clean room.
Obviously, various changes and modifications can be made to the invention without departing from essence of the invention by those skilled in the art Mind and range.In this way, if these modifications and changes of the present invention belongs to the range of the claims in the present invention and its equivalent technologies Within, then the present invention is also intended to include these modifications and variations.

Claims (8)

1. a kind of clean room, including workshop ontology, the workshop ontology is interior to be equipped with core toilet, and is equipped with and is located at the core Core toilet upper interlayer at the top of heart toilet, the core toilet lower interlayer positioned at core toilet bottom and company Lead to the core toilet return air passageway of core toilet upper interlayer Yu core toilet lower interlayer；It is characterized in that,
The core toilet return air passageway is equipped with end bay away from the side of the core toilet and supports area, and the end bay is supported It is equipped with end bay toilet in area, and is equipped with the end bay toilet upper interlayer being located at the top of the end bay toilet and is located at described The end bay toilet lower interlayer of end bay toilet bottom；The end bay is supported to be additionally provided with ancillary chamber, the ancillary chamber and institute in area End bay toilet is stated to be stacked；
End bay toilet upper interlayer and end bay toilet lower interlayer respectively with the core toilet return air passageway Connection, and/or, it is equipped between the wall of side and the workshop ontology of the end bay toilet far from the core toilet For being connected to the end bay toilet return air passageway of end bay toilet upper interlayer and end bay toilet lower interlayer.
2. clean room as described in claim 1, which is characterized in that between the core toilet and the end bay toilet Equipped with clean channel, and the clean channel is connected to the core toilet and the end bay toilet respectively.
3. clean room as described in claim 1, which is characterized in that partition is equipped in the core toilet return air passageway, It is formed and is connected under end bay toilet upper interlayer and the end bay toilet between the partition and the end bay toilet The end bay toilet return air passageway of interlayer.
4. clean room as claimed in claim 2, which is characterized in that the bottom plate in the cleaning channel is clean with the core respectively The floor of clean room and the floor of the end bay toilet flush.
5. clean room as described in claim 1, which is characterized in that the ancillary chamber is located at the upper of the end bay toilet Side, and end bay toilet lower interlayer extends to ground and for clear production space.
6. clean room as described in claim 1, which is characterized in that the top and lower section of the end bay toilet are set respectively There is the ancillary chamber.
7. clean room as described in claim 1, which is characterized in that in the workshop ontology, with the core toilet pair The roof truss and roof truss corresponding with the end bay toilet answered flush.
8. clean room as described in claim 1, which is characterized in that the opposite two sides in the core toilet are respectively equipped with institute Core toilet return air passageway is stated, and each described core toilet return air passageway is away from the side point of the core toilet It She You not the end bay support area and the end bay toilet.
CN201910736089.0A 2019-08-09 2019-08-09 A kind of clean room Pending CN110439331A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910736089.0A CN110439331A (en) 2019-08-09 2019-08-09 A kind of clean room

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Application Number Priority Date Filing Date Title
CN201910736089.0A CN110439331A (en) 2019-08-09 2019-08-09 A kind of clean room

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Publication Number Publication Date
CN110439331A true CN110439331A (en) 2019-11-12

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CN201910736089.0A Pending CN110439331A (en) 2019-08-09 2019-08-09 A kind of clean room

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112843918A (en) * 2020-12-29 2021-05-28 浙江中电环境科技有限公司 Clean factory building of gallium nitride semiconductor production usefulness
CN115095187A (en) * 2022-03-24 2022-09-23 成都格力新晖医疗装备有限公司 Mobile laboratory and cabin body mechanism thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112843918A (en) * 2020-12-29 2021-05-28 浙江中电环境科技有限公司 Clean factory building of gallium nitride semiconductor production usefulness
CN115095187A (en) * 2022-03-24 2022-09-23 成都格力新晖医疗装备有限公司 Mobile laboratory and cabin body mechanism thereof
CN115095187B (en) * 2022-03-24 2023-10-03 成都格力新晖医疗装备有限公司 Mobile laboratory and cabin mechanism thereof

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