CN110434116A - A kind of automatic bubble cleaning system - Google Patents
A kind of automatic bubble cleaning system Download PDFInfo
- Publication number
- CN110434116A CN110434116A CN201910700571.9A CN201910700571A CN110434116A CN 110434116 A CN110434116 A CN 110434116A CN 201910700571 A CN201910700571 A CN 201910700571A CN 110434116 A CN110434116 A CN 110434116A
- Authority
- CN
- China
- Prior art keywords
- overflow
- plate
- cleaning system
- automatic bubble
- regulating valve
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses a kind of automatic bubble cleaning systems, it include: the upper groove body and lower groove being connected, cleaning equipment is equipped in lower groove, the cleaning equipment, including escape pipe, clean plate, support plate are equipped with multiple rows of cleaning hole on clean plate, multiple support plates are distributed in clean plate bottom surface, support plate is equipped with through hole, and multiple escape pipes are located in corresponding through hole, and each escape pipe bottom surface offers multiple ventholes.The system can remove the large-scale particle in component, and removal effect is preferable, and scavenging period substantially reduces, and easy to use, produced on-site efficiency is greatly improved.
Description
Technical field
The present invention relates to a kind of cleaning device, specifically a kind of automatic bubble cleaning system.
Background technique
It is repaired in regeneration technology to semiconductor chemical mechanical grinding head at present, due in distress on grinding head loading body
With the particle removed, therefore it is handled using ultrasonic wave, the particle of component is removed.Since ultrasonic wave can only be by component
The molecule on surface removes, and is difficult to remove bigger particle, it is therefore desirable to first artificial that grinding head is loaded body with different
Propyl alcohol wipes one time, and a period of time is rinsed with water after wiping.Due to grinding head structure complexity, and material is polyethylene, first
First wiping is difficult, slightly neglects the damage that will result in product, it is long in addition to wipe the time, and effect is bad, time-consuming and laborious, existing
The production efficiency of field substantially reduces.
Summary of the invention
To solve the prior art, there are disadvantages mentioned above, and this application provides a kind of automatic bubble cleaning systems, can be by component
On the removal of large-scale particle, and removal effect is preferable, and scavenging period substantially reduces, and easy to use, produced on-site efficiency obtains
It greatly promotes.
To achieve the above object, a kind of technical solution of the application are as follows: automatic bubble cleaning system, comprising: be connected
Upper groove body and lower groove are equipped with cleaning equipment, the cleaning equipment, including escape pipe, clean plate, support plate in lower groove,
It is equipped with multiple rows of cleaning hole on clean plate, multiple support plates are distributed in clean plate bottom surface, support plate is equipped with through hole, multiple
Escape pipe is located in corresponding through hole, and each escape pipe bottom surface offers multiple ventholes；Water inlet pipe one end is connected to down
In groove body.
Further, it is additionally provided with overflow mechanism in lower groove, the overflow mechanism includes overflow side plate and overflow bottom plate,
The overflow side plate bottom is connected with overflow bottom plate, and overflow port is equipped on overflow side plate；The overflow side plate is located at cleaning and sets
Standby two sides, multiple support plates are located on overflow bottom plate.
Further, the gap between overflow side plate and lower groove side plate is overflow ducts, the overflow bottom plate and lower slot
Gap between body bottom plate is drainage channel.
Further, multiple water draining plates are arranged below in overflow bottom plate, each water draining plate is equipped with multiple drainage holes.
Further, a side of the upper groove body is inclined surface, is equipped with baffle and upper arm-tie on the inclined surface；Institute
Two side plates for stating upper arm-tie and upper groove body are to be slidably connected, and upper arm-tie is equipped with lift-pull handle, and being equipped with above lift-pull handle can
Form.
Further, one end of the multiple escape pipe is connected with communicating pipe, the communicating pipe by air inlet pipe with
Compressed air source unit is connected, and the air inlet pipe is equipped with regulating valve a.
Further, the lower groove bottom plate is connected with drainpipe a, and overflow bottom plate is connected with drainpipe b, in drainpipe
B is equipped with regulating valve b, and the bottom of the drainpipe a is connected to drainpipe b, and regulating valve c is equipped on water inlet pipe.
Further, exhaust hood is equipped at the top of upper groove body, the exhaust hood passes through air hose and double scrubbing tower phases of connecting
Even, double scrubbing towers of connecting connect induced draft fans.
As further, it is equipped with headlamp at the top of upper groove body, the headlamp and is fixed on upper groove body outer wall
Light switch is connected.
Further include PLC controller as further, is located in upper groove body；The PLC controller respectively with regulating valve
A, regulating valve b, regulating valve c, light switch are connected with induced draft fans.
As further, two sides are equipped with handle on clean plate.
The present invention due to using the technology described above, can obtain following technical effect: compared with prior art, can be certainly
It is dynamic to realize cleaning, without manual wipe, only grinding head need to be loaded body and be placed in slot, it will be in component by the water recycled back and forth
The removal of large-scale particle, effect is preferable, and scavenging period substantially reduces, easy to use, greatly promotes produced on-site efficiency.
Detailed description of the invention
Fig. 1 is the application main view；
Fig. 2 is the application side view；
Fig. 3 is the application structural schematic diagram；
Fig. 4 is lower groove part-structure sectional view；
Fig. 5 is the application cross-sectional view；
Fig. 6 is the part-structure enlarged drawing in cross-sectional view；
Fig. 7 is cleaning equipment structure chart；
Fig. 8 is cleaning equipment bottom view；
Fig. 9 is cleaning equipment structural schematic diagram；
Number explanation in figure: 1, exhaust hood, 2, baffle, 3, upper arm-tie, 4, lower groove, 5, regulating valve b, 6, drainpipe b, 7,
Drainpipe a, 8, lift-pull handle, 9, light switch, 10, visual window, 11, overflow side plate, 12, overflow port, 13, overflow ducts, 14,
Drainage channel, 15, overflow bottom plate, 16, regulating valve c, 17, water inlet pipe, 18, clean plate, 19, drainage hole, 20, support plate, 21, dredge
Water plate, 22, escape pipe, 23, communicating pipe, 24, venthole, 25, cleaning hole, 26, air inlet pipe, 27, handle.
Specific embodiment
The present invention is described in further detail in the following with reference to the drawings and specific embodiments: doing as example to the application
Further description explanation.
Embodiment 1
As shown in figs 1-9, the present embodiment provides a kind of automatic bubble cleaning systems, comprising: the upper groove body being connected is under
Groove body, a side of the upper groove body are inclined surface, are equipped with baffle and upper arm-tie on the inclined surface；It is equipped in lower groove
Cleaning equipment and overflow mechanism, the cleaning equipment, including escape pipe, clean plate, support plate are equipped with multiple rows of clear on clean plate
Multiple support plates are distributed in clean plate bottom surface in hole flushing, and support plate is equipped with multiple through holes, and each column in each support plate is logical
Via hole is on a horizontal line；Multiple escape pipes are located in corresponding through hole, each escape pipe bottom surface offer it is multiple go out
Stomata；The overflow mechanism includes overflow side plate and overflow bottom plate, and the overflow side plate bottom is connected with overflow bottom plate, in overflow
Side plate is equipped with overflow port；The overflow side plate is located at cleaning equipment two sides, and multiple support plates are located on overflow bottom plate；Water inlet pipe
One end is connected in lower groove.Gap between overflow side plate and lower groove side plate is overflow ducts, and the overflow bottom plate is under
Gap between groove body bottom plate is drainage channel, multiple water draining plates is arranged below in overflow bottom plate, each water draining plate is equipped with more
A drainage hole；Multiple water draining plates are located in drainage channel；One end of the multiple escape pipe is connected with communicating pipe, the connection
Pipe is connected by air inlet pipe with compressed air source unit, and the air inlet pipe is equipped with regulating valve a；It is equipped on clean plate and is worn for air inlet pipe
The groove crossed.
Embodiment 2
The present embodiment provides a kind of working methods of automatic bubble cleaning system, and specific step is as follows for this method:
S1: four supporting legs of lower groove bottom are stood in the position of Land leveling；
S2: being connected to running water pipe for water inlet pipe, guarantees that groove body is had abundant water resources, and achievees the effect that overflow is not cut off the water supply；
S3: air inlet pipe is connected on compressed air source unit, and the air inlet pipe is equipped with regulating valve a；
S4:PLC controller opens induced draft fans, guarantees that gas with foreign flavor can effectively flow away in slot；
S5:PLC controller opens regulating valve c, injects water into lower groove, and the water in lower groove is piled to overflow port height
After degree, extra water is flowed out from overflow port, is flowed through overflow ducts, drainage channel, is drained eventually by drainpipe a；
S6: upper arm-tie is opened, and mechanical grinding bistrique is loaded body and is placed on the clean plate in lower groove；
S7: compressed air source unit being opened and connects gas source, and the regulating valve a of adjustable tolerance is equipped in air inlet pipe, is controlled in PLC
The open degree of 3 or 4 regulating valve a is equipped in device；
S8:PLC controller opens light switch；Upper arm-tie is closed, has prevented other sundries from falling into, has been seen by visual window
Examine component cleaning state；
S9:PLC controller constantly adjusts the open degree of regulating valve a, until reaching timer setting time；
S10: arriving to setting time, and PLC controller closes regulating valve c and regulating valve a, and component is placed on super English wave trough body
Middle carry out ultrasonic treatment；
S11:PLC controller opens regulating valve b, and ejected wash water is discharged；
It preferably, further include display screen, the display screen is connected with PLC controller, and the display screen display bubble is strong
Information is spent, operator can also according to the actual situation manually adjust regulating valve a.Groove body uses stainless steel material, ruler
Very little stabilization, is unlikely to deform；Cleaning equipment material is polypropylene, and the material processing performance is good, excellent weather resistance and hard, and resistance to acid and alkali is excellent.
The preferable specific embodiment of the above, only the invention, but the protection scope of the invention is not
It is confined to this, anyone skilled in the art is in the technical scope that the invention discloses, according to the present invention
The technical solution of creation and its inventive concept are subject to equivalent substitution or change, should all cover the invention protection scope it
It is interior.
Claims (10)
1. a kind of automatic bubble cleaning system characterized by comprising the upper groove body and lower groove being connected, in lower groove
Equipped with cleaning equipment, the cleaning equipment, including escape pipe, clean plate, support plate, multiple rows of cleaning hole is equipped on clean plate,
Multiple support plates are distributed in clean plate bottom surface, support plate is equipped with through hole, and multiple escape pipes are located in corresponding through hole,
Each escape pipe bottom surface offers multiple ventholes；Water inlet pipe one end is connected in lower groove.
2. a kind of automatic bubble cleaning system according to claim 1, which is characterized in that be additionally provided with overflow dress in lower groove
It sets, the overflow mechanism includes overflow side plate and overflow bottom plate, and the overflow side plate bottom is connected with overflow bottom plate, in return side
Plate is equipped with overflow port；The overflow side plate is located at cleaning equipment two sides, and multiple support plates are located on overflow bottom plate.
3. a kind of automatic bubble cleaning system according to claim 2, which is characterized in that overflow side plate and lower groove side plate it
Between gap be overflow ducts, gap between the overflow bottom plate and lower groove bottom plate is drainage channel.
4. a kind of automatic bubble cleaning system according to claim 2, which is characterized in that be arranged below in overflow bottom plate multiple
Water draining plate, each water draining plate are equipped with multiple drainage holes.
5. a kind of automatic bubble cleaning system according to claim 1, which is characterized in that a side of the upper groove body is
Inclined surface is equipped with baffle and upper arm-tie on the inclined surface；Two side plates of the upper arm-tie and upper groove body are to be slidably connected, on
Pulling plate is equipped with lift-pull handle, and visual window is equipped with above lift-pull handle.
6. a kind of automatic bubble cleaning system according to claim 1, which is characterized in that one end of the multiple escape pipe is equal
It is connected with communicating pipe, the communicating pipe is connected by air inlet pipe with compressed air source unit, and the air inlet pipe is equipped with regulating valve a.
7. a kind of automatic bubble cleaning system according to claim 2, which is characterized in that the lower groove bottom plate is connected with row
Water pipe a, overflow bottom plate are connected with drainpipe b, regulating valve b are equipped on drainpipe b, the bottom of the drainpipe a is connected to row
Water pipe b is equipped with regulating valve c on water inlet pipe.
8. a kind of automatic bubble cleaning system according to claim 1, which is characterized in that be equipped with air draft at the top of upper groove body
Cover, the exhaust hood are connected by air hose with double scrubbing towers of connecting, and double scrubbing towers of connecting connect induced draft fans.
9. a kind of automatic bubble cleaning system according to claim 1, which is characterized in that be equipped with illumination at the top of upper groove body
Lamp, the headlamp are connected with the light switch for being fixed on upper groove body outer wall.
10. a kind of automatic bubble cleaning system according to claim 9, which is characterized in that further include PLC controller, be located at
In upper groove body；The PLC controller is connected with regulating valve a, regulating valve b, regulating valve c, light switch and induced draft fans respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910700571.9A CN110434116A (en) | 2019-07-31 | 2019-07-31 | A kind of automatic bubble cleaning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910700571.9A CN110434116A (en) | 2019-07-31 | 2019-07-31 | A kind of automatic bubble cleaning system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110434116A true CN110434116A (en) | 2019-11-12 |
Family
ID=68432502
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910700571.9A Pending CN110434116A (en) | 2019-07-31 | 2019-07-31 | A kind of automatic bubble cleaning system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110434116A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112251760A (en) * | 2020-08-28 | 2021-01-22 | 富乐德科技发展（大连）有限公司 | Automatic control cleaning device |
| CN112718691A (en) * | 2020-12-07 | 2021-04-30 | 富乐德科技发展（大连）有限公司 | Automatic cleaning device for silicon component in cavity of semiconductor equipment |
Citations (7)
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|---|---|---|---|---|
| US5082518A (en) * | 1990-10-29 | 1992-01-21 | Submicron Systems, Inc. | Sparger plate for ozone gas diffusion |
| KR20070030542A (en) * | 2005-09-13 | 2007-03-16 | 세메스 주식회사 | Apparatus bubble removing for treatment bath |
| CN102430542A (en) * | 2011-12-29 | 2012-05-02 | 北京泰拓精密清洗设备有限公司 | Multi-station bubbling cleaning machine |
| CN104307781A (en) * | 2014-08-27 | 2015-01-28 | 富乐德科技发展（天津）有限公司 | Cleaning method for removing oxide film attached to surface of ceramic part |
| CN205949401U (en) * | 2016-07-19 | 2017-02-15 | 富乐德科技发展（天津）有限公司 | Ultrasonic wave support |
| JP2017063766A (en) * | 2015-10-02 | 2017-04-06 | 山本電気株式会社 | Food cleaning device |
| CN206935918U (en) * | 2017-04-27 | 2018-01-30 | 苏州宝馨科技实业股份有限公司 | A kind of silicon chip of solar cell descaling bath |
-
2019
- 2019-07-31 CN CN201910700571.9A patent/CN110434116A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5082518A (en) * | 1990-10-29 | 1992-01-21 | Submicron Systems, Inc. | Sparger plate for ozone gas diffusion |
| KR20070030542A (en) * | 2005-09-13 | 2007-03-16 | 세메스 주식회사 | Apparatus bubble removing for treatment bath |
| CN102430542A (en) * | 2011-12-29 | 2012-05-02 | 北京泰拓精密清洗设备有限公司 | Multi-station bubbling cleaning machine |
| CN104307781A (en) * | 2014-08-27 | 2015-01-28 | 富乐德科技发展（天津）有限公司 | Cleaning method for removing oxide film attached to surface of ceramic part |
| JP2017063766A (en) * | 2015-10-02 | 2017-04-06 | 山本電気株式会社 | Food cleaning device |
| CN205949401U (en) * | 2016-07-19 | 2017-02-15 | 富乐德科技发展（天津）有限公司 | Ultrasonic wave support |
| CN206935918U (en) * | 2017-04-27 | 2018-01-30 | 苏州宝馨科技实业股份有限公司 | A kind of silicon chip of solar cell descaling bath |
Non-Patent Citations (1)
| Title |
|---|
| 段成龙;祝福生;: "全自动半导体RCA清洗机", no. 01, pages 47 - 51 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112251760A (en) * | 2020-08-28 | 2021-01-22 | 富乐德科技发展（大连）有限公司 | Automatic control cleaning device |
| CN112718691A (en) * | 2020-12-07 | 2021-04-30 | 富乐德科技发展（大连）有限公司 | Automatic cleaning device for silicon component in cavity of semiconductor equipment |
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