CN110426658A - A kind of vertical sensitive Magnetic Sensor of the wide-range fed back on closed loop core - Google Patents
A kind of vertical sensitive Magnetic Sensor of the wide-range fed back on closed loop core Download PDFInfo
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- CN110426658A CN110426658A CN201910619688.4A CN201910619688A CN110426658A CN 110426658 A CN110426658 A CN 110426658A CN 201910619688 A CN201910619688 A CN 201910619688A CN 110426658 A CN110426658 A CN 110426658A
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- flux guide
- mistor
- magnetic field
- signal
- mistors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
- G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
Abstract
The invention discloses a kind of vertical sensitive Magnetic Sensors of the wide-range fed back on closed loop core, including silicon-based substrate, flux guide, mistor, signal feedback coil, operational amplifier and power amplifier, the present invention is by being arranged signal feedback coil in place on plug-type vertical sensitive magnetic sensor chip, contrary magnetic field signal equal in magnitude is generated in mistor sensitivity axis direction when being connected with feedback current above signal feedback coil, original signal magnetic field is offset respectively, and form closed loop feedback arrangement, it is effectively improved Sensor output linearity, improve measurement accuracy, reduce power consumption；It is different away from flux guide spacing using mistor, so that the received horizontal direction magnetic-field component of mistor is different, realize the purpose detected respectively to big magnetic field with small magnetic field difference range.
Description
Technical field
The invention belongs to magnetic sensor technologies field, the vertical sensitive magnetic of wide-range for being related to feeding back on a kind of closed loop core is passed
Sensor.
Background technique
With the rapid development in Magnetic Sensor field, using more and more extensive, current vertical Magnetic Sensor is largely answered
For in consumer electronics field such as mobile phone etc. and electronic compass mobile device, the lesser package dimension of such product requirement with
And higher measurement stability.
Existing vertical sensitive Magnetic Sensor is mostly the design of Z axis packaged type, and Z axis encapsulation is by the sensitive axis of sensing chip
Vertical level encapsulation, such as 102426344 A of patent CN, a kind of entitled patent of invention of triaxial magnetic field sensor are adopted
With the method that three sensor encapsulation are integrated, wherein the sensor of Z axis is placed using vertical plane to measure the magnetic of vertical direction
.This kind of method is made that sensor bulk is big, and packaging cost is big, complex process, and stability is low and encapsulation easy fracture etc..Patent CN
A kind of entitled magneto-resistor Z axis gradient sensor chip of 103995240B, the invention are divided Z axis magnetic field using flux guide
Amount is in X/Y plane.But the invention is mainly carried out Z axis introduction by magnetic field using flux guide in X/Y plane to Z axis gradient
Measurement.The sensor that existing magneto sensor is constituted detects the section in magnetic field mostly in positive and negative 10Gs to guarantee its sensitivity
It is interior, to larger magnetic field detection scarce capacity.
Despite the presence of the vertical sensitive Magnetic Sensor that single integrates, but it is all made of open loop type design at present, such as apply
Number for 201820341886.X the plug-type vertical sensitive magnetic sensing of entitled one kind, utilize flux guide by vertical direction
Z axis magnetic field be converted to the leakage field magnetic-field component in plane, realize the magnetic field detection in vertical direction, but this kind design is being surveyed
It measures that mistor in the case where larger magnetic field is easy magnetic saturation and magnetic hysteresis is larger in measurement, largely influences sensor
Measurement bandwidth, measurement accuracy and the linearity, and open-loop design poor linearity, measurement accuracy are low, it is difficult to meet modern produce
The demand of industry.
Summary of the invention
It is an object of the invention to overcome the shortcomings of prior art, the wide-range fed back on a kind of closed loop core is provided
Vertical sensitive Magnetic Sensor.
The present invention includes silicon-based substrate, flux guide, four identical mistors, a signal feedback coil, fortune
Calculate amplifier and power amplifier；
The flux guide is string configuration, is arranged in same silicon-based substrate with four mistors, is led to
Two shielded mistors for reference are arranged in the underface for measuring guiding device, are each provided at left and right sides of flux guide
One mistor, the two mistors are about flux guide bilateral symmetry, the sensitive axis direction of the two mistors
In same horizontal line and direction it is consistent, be each perpendicular to flux guide left and right sides；Flux guide believes vertical magnetic field
Number it is induced to direction in plane, an in-plane magnetic field component is generated at the mistor of its two sides, and in two mistors
The signal magnetic-field component generated in sensitive axis direction is equal in magnitude, contrary；
The medianly zygomorphic mistor of the flux guide forms one group of half-bridge, sets immediately below flux guide
The shielded mistor for reference of two set forms another group of half-bridge, and four mistors collectively constitute a push-and-pull
The wheatstone bridge configuration of output；Signal feedback coil is the U-shaped structure that both sides are parallel to each other, and signal feedback coil is arranged in magnetic
In the silicon-based substrate of the lower section of quick resistance, two parallel edges of signal feedback coil is separately positioned on the magnetic at left and right sides of flux guide
The underface of quick resistance, lead to feedback current when signal feedback coil flux guide two sides mistor sensitive axis direction
Upper place generates contrary magnetic field signal equal in magnitude；
A detection resistance is provided between the output end and ground terminal of the signal feedback coil；Wheatstone bridge
Output end is connected to the input terminal of operational amplifier, and the output end of operational amplifier is connected to the input terminal on power amplifier,
The output end of power amplifier is connected on signal feedback coil and forms closed loop feedback structure.
The present invention can also include silicon-based substrate, flux guide, six identical mistors, two signal feedback lines
Circle, operational amplifier and power amplifier；It is characterized by: the flux guide is string configuration, with six magnetosensitives
Resistance is arranged in same silicon-based substrate, and two shielded magnetosensitive electricity for reference are arranged in the underface of flux guide
Two mistors are respectively set in resistance, flux guide left and right side, close to two magnetic of flux guide left and right sides
Quick resistance partners, and two mistors far from flux guide left and right sides partner, every a pair of mistor
About flux guide bilateral symmetry, six mistor sensitivity axis directions are identical, flux guide and six mistors
Position configure the magnetic field signal of detectable vertical plane；Two signal feedback coils are U-shaped structure, U-shaped structure
Feedback coil is positioned close in the silicon-based substrate below flux guide left and right sides a pair of mistor, another is U-shaped
The feedback coil of structure is arranged far from the silicon-based substrate below a pair of of mistor of flux guide left and right sides, should
Two sides of U-shaped structure are parallel to each other, are separately positioned on flux guide two sides two to the underface of mistor；Close to flux
The shielded mistor shape for reference of two be arranged immediately below a pair of of the mistor and flux guide of guiding device
At the wheatstone bridge configuration of a push-and-pull output, the detection of the magnetic field signal for small-range vertical plane；Draw far from flux
A pair of of the mistor for leading device is formed with two shielded mistors for reference being arranged immediately below flux guide
The wheatstone bridge configuration of another push-and-pull output, the detection of the magnetic field signal for wide range vertical plane；Two pairs of favour stones
Bridge structure design meets the demand of magnetic field signal difference range detection of the sensor chip to vertical plane；
Vertical magnetic field signal is induced in plane on direction and in flux guide or so two by the flux guide
Leakage field component is generated in the sensitive axis direction of two pairs of mistors of side respectively, vertical magnetic field signal is induced by flux guide
Afterwards, equal in magnitude, contrary leakage field component is generated in the sensitive axis direction of first pair of mistor respectively, in second pair of magnetic
Equal in magnitude, contrary leakage field component is generated in quick resistance sensitivity axis direction；When logical feedback current, close to flux guide
In the sensitive axis direction of two mistors of signal feedback coil above it below a pair of of mistor of left and right sides
Generate the leakage field component feedback magnetic field for offsetting the mistor sensitivity axis direction；A pair far from flux guide left and right sides
It is generated in the sensitive axis direction of two mistors of signal feedback coil above it below mistor and offsets magnetosensitive electricity
Hinder the leakage field component feedback magnetic field of sensitive axis direction；
The output end of two Wheatstone bridges passes through the input terminal that switch is connected to operational amplifier, and switch acts on
In selecting one group in two groups of Wheatstone bridges as detection electric bridge, have the function of selecting measuring range indirectly；Operation amplifier
Device exports after amplified signal amplitude, and the output end of operational amplifier is connected on the input terminal of power amplifier, and power is put
The output end of big device is connected on signal feedback coil, and the other end of feedback coil concatenates testing resistance, testing resistance it is another
End ground connection.
Preferably, the flux guide is made of nickel system, cobalt system or iron series soft magnetic materials.
Preferably, the mistor selects giant magnetoresistance resistance or tunneling junction magnetoresistive.
Preferably, the signal feedback coil uses non magnetic, low resistance, the metallic silver of good electric conductivity, copper, aluminium, gold
Titanium or its alloy are made.
The present invention is by being arranged signal feedback coil in place on core in plug-type vertical sensitive magnetic sensor chip, when logical
It is generated in the sensitive axis direction of two pairs of mistors when having feedback current above signal feedback coil equal in magnitude contrary
Magnetic field signal offsets original signal magnetic field respectively, and forms closed loop feedback arrangement, is effectively improved Sensor output linearity, mentions
High measurement accuracy reduces power consumption；Can also be different away from flux guide spacing using two groups of mistors, so that two groups of magnetic
The quick received horizontal direction magnetic-field component of resistance is different, and two pairs of plug-type electric bridges that six identical mistors are formed, which are realized, to be divided
The other purpose that big magnetic field is detected with small magnetic field difference range.
Detailed description of the invention
Fig. 1 is one structural schematic diagram of the embodiment of the present invention；
Fig. 2 is one general system set-up figure of the embodiment of the present invention；
Fig. 3 is that flux guide induces vertical magnetic field schematic diagram under external magnetic field in the embodiment of the present invention one；
Fig. 4 is plug-type Wheatstone bridge schematic diagram in the embodiment of the present invention one；
Fig. 5 is that feedback magnetic field offsets the schematic diagram in former magnetic field under the effect of signal feedback coil in the embodiment of the present invention one；
Fig. 6 is the state schematic diagram of the Wheatstone bridge shape under the effect of signal feedback coil in the embodiment of the present invention one；
Fig. 7 is two structural schematic diagram of the embodiment of the present invention；
Fig. 8 is two general system set-up figure of the embodiment of the present invention；
Fig. 9 is that flux guide induces vertical magnetic field schematic diagram under external magnetic field in the embodiment of the present invention two；
Figure 10 is plug-type Wheatstone bridge schematic diagram in the embodiment of the present invention two；
Figure 11 is that feedback magnetic field offsets the schematic diagram in former magnetic field under the effect of signal feedback coil in the embodiment of the present invention two；
Figure 12 is the state schematic diagram of the Wheatstone bridge shape under the effect of signal feedback coil in the embodiment of the present invention two.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Embodiment one:
As shown in Figure 1, vertically sensitive Magnetic Sensor includes silicon-based substrate 1, leads to the wide-range fed back on a kind of closed loop core
Measure guiding device 2, four identical mistors 3 and a signal feedback coil 4, operational amplifier and power amplifier.
Flux guide 2 is string configuration, is arranged in same silicon-based substrate 1 with four mistors 3, flux draws
Two shielded mistors for reference are arranged in the underface for leading device 2, are each provided with one at left and right sides of flux guide 2
A mistor, the two mistors are about 2 bilateral symmetry of flux guide, the sensitive axis direction of the two mistors 3
In same horizontal line and direction it is consistent, be each perpendicular to 2 left and right sides of flux guide.
As shown in figure 3, vertical magnetic field signal is induced to direction in plane by flux guide 2, the magnetosensitive electricity in its two sides
An in-plane magnetic field component, and the signal magnetic-field component size phase generated in two mistor sensitivity axis directions are generated at resistance
Deng, it is contrary.
As shown in figure 4, the medianly zygomorphic mistor of flux guide 2 forms one group of half-bridge, flux guide 2 is just
The shielded mistor 3 for reference of two of lower section setting forms another group of half-bridge, and four mistors 3 collectively constitute
The wheatstone bridge configuration of one push-and-pull output.
As shown in figure 5, signal feedback coil 4 is U-shaped structure, two sides of the U-shaped structure are parallel to each other, and U-shaped structure is set
It sets in the silicon-based substrate 1 of the lower section of mistor, 4 liang of parallel edges of signal feedback coil of U-shaped structure are separately positioned on flux
The underface of the mistor of the left and right sides of guiding device 2, the signal feedback coil 4 when leading to feedback current is in flux guide two sides
Contrary magnetic field signal equal in magnitude is generated in the sensitive axis direction of mistor.
As shown in Fig. 2, being provided with a detection resistance between the output end and ground terminal of signal feedback coil 4；Favour stone
The output end of electric bridge is connected to the input terminal of operational amplifier, and the output end of operational amplifier is connected to defeated on power amplifier
Enter end, the output end of power amplifier is connected on signal feedback coil 4 and forms closed loop feedback structure.
Flux guide 2 is made of nickel system, cobalt system or iron series soft magnetic materials in this implementation.Soft magnetic materials has very strong
Magnetic conduction ability is especially first such as ferronickel or ferro-cobalt material with magnetically soft alloy.Mistor 3 selects giant magnetoresistance resistance or tunnel knot
Magneto-resistor.Giant magnetoresistance resistance or tunneling junction magnetoresistive all have ambipolar characteristic, are formed and are measured convenient for plug-type electric bridge.Letter
Number feedback coil 4 is made of non magnetic, low resistance, good conductive metal silver, copper, aluminium or gold.High value metal is avoided to generate heat
Cause sensor degradation.
The operational amplifier selected in the present embodiment is the AD623 model of ADI company, and the effect of operational amplifier is amplification
The output voltage values of sensor are not easy to because the voltage that sensor chip generates belongs to small voltage and is generally millivolt rank
Subsequent processing.The amplification factor maximum of operational amplifier can amplify 1000 times, adjust appropriate amplification factor convenient at signal analysis
Reason, measurement.
The present embodiment intermediate power amplifier can choose the power amplifier of the LM3886 money of National Semiconductor, and power is put
Big device is as the term suggests be that amplifying power uses, and most importantly amplification electric current, intermediate power amplifier raising sensor of the present invention are defeated
The driving capability of signal out, driving signal feedback coil 4.
2 one side of flux guide can produce in the horizontal plane under the Z axis magnetic fields of vertical direction in the present embodiment
Raw leakage field magnetic-field component, while can shield and reduce the interference of magnetic-field component in horizontal direction；Leakage field is in the two pairs of magnetosensitive electricity in left and right
The magnetic-field component that different directions are generated at 3 is hindered, different size of change, which occurs, for the magneto-resistor resistance value of two pairs of mistors 3 makes Hui Si
Energization bridge forms push-and-pull output；The differential voltage of Wheatstone bridge output is converted into through operational amplifying module and power amplifier module
Current signal is applied on signal feedback coil 4, and generation annular is inducted after 4 liang of parallel edges of signal feedback coil are connected with feedback current
Magnetic field, the magnetic-field component of the horizontal tangent at the top of the annular Induced magnetic field react on flux guide 2 and generate in the horizontal plane
Leakage field magnetic-field component, and then tested magnetic field is offset, until the received magnetic field strength approach in its sensitive axis direction of mistor 3
In zero, Wheatstone bridge is in equilibrium state at this time, then measures the voltage at the both ends testing resistance Rm concatenated on feedback coil i.e.
Feedback current size can be obtained；Feedback current and tested magnetic field proportion relation, by the feedback current size that measures into
One step obtains the size in tested magnetic field.
As shown in fig. 6, in the plug-type electric bridge of R1, R2, R3 and R4 composition, when sensor is by perpendicular to silicon-based substrate
When magnetic field on 1, flux guide 2 resolves into the magnetic field in the horizontal sensitive axis direction of R1 and R2, and R3 and R4 are due to being shielded
Cover that resistance value is constant, resistance value one due to push-pull configuration R1 and the R2 resistance of formation increases another reduction, and increases and reduce
Resistance it is identical, it is assumed that under the influence of by magnetic field to be measured, the change in resistance amount of mistor 3 is Δ R, and electric bridge is defeated at this time
It is outDue to the presence of signal feedback coil 4, believing after sensor output electrical signals
Feedback current is generated on number feedback coil 4, feedback current generates feedback magnetic field, and feedback magnetic field reacts on to be supported on mistor 3
Disappear former magnetic field, so that the suffered magnetic field of closing of mistor 3 is almost equal to zero, reaches equilibrium state.
The feedback system that Zero flux measurement is formed can trace into 0.2 microsecond, i.e., frequency is up to 5MHZ；Feedback system is effective
Reducing external interference and improving the linearity is the accuracy for greatly improving measurement.
Embodiment two:
As shown in fig. 7, the present embodiment is with one difference of embodiment: the left and right sides of flux guide 2 is arranged two pairs
Mistor, two pairs of mistors are about mutually symmetrical at left and right sides of flux guide；Six mistors are identical rule
Lattice and side by side parallel placement.
As shown in Fig. 8 and 10, a pair of of the mistor and flux guide 2 of close 2 left and right sides of flux guide are just
The shielded mistor for reference of two of lower section setting forms the wheatstone bridge configuration of a push-and-pull output, the electricity
The magnetic-field component of bridge detection is big, and susceptibility is high, can be used for the magnetic field signal detection of small-range vertical plane, far from flux guide
The shielded magnetosensitive for reference of two be arranged immediately below another pair mistor and flux guide 2 of 2 left and right sides
Resistance 3 forms the wheatstone bridge configuration of another push-and-pull output, and the magnetic-field component of electric bridge detection is small, and susceptibility is low, can use
It is detected in the magnetic field signal of wide range vertical plane, two pairs of Wheatstone bridge designs meet sensor chip to the magnetic of vertical plane
The detection demand of field signal difference range.
Wherein R1, R2, R3 and R4 form one group of Wheatstone bridge, and wherein R1 connect to form one group of half-bridge, R3 and R4 with R2
Connection forms another group of half-bridge.Supply voltage, the junction R2 and R4 ground connection are provided between R1 and R3.R1 and the junction R2 and R3
Sensor output is drawn with the junction R4；
R5, R6, R3 and R4 form one group of Wheatstone bridge, and wherein R5 connect to form one group of half-bridge with R6, and R3 is connected with R4
Form another group of half-bridge.Supply voltage, the junction R6 and R4 ground connection are provided between R5 and R3.R5 and the junction R6 and R3 and R4
Draw sensor output in junction.
The output end of two Wheatstone bridges passes through the input terminal that switch is connected to the operational amplifier, (effect of switch
It is to select one group in two groups of Wheatstone bridges as detection electric bridge, has the function of selection measuring range indirectly) operation puts
Big device exports after amplified signal amplitude, and the output end of operational amplifier is connected on the input terminal of power amplifier, power
The output end of amplifier is connected on signal feedback coil, and the other end of feedback coil concatenates testing resistance Rm, testing resistance Rm
The other end ground connection.
As shown in figure 11, another signal feedback is set below a pair of of mistor 3 far from 2 left and right sides of flux guide
The signal feedback coil 4 of coil 4, energization generates contrary magnetic equal in magnitude in the sensitive axis direction of two mistors
Field signal.
As shown in figure 9, flux guide 2 generates leakage field magnetic field under the Z axis magnetic fields of vertical direction in the horizontal plane
Component, the leakage field component respectively act on the mistor for being distributed in 2 left and right sides of flux guide.Similarly assume to hang down
Straight upward uniform magnetic field H, 2 upper and lower surface of flux guide is evenly distributed with positive and negative magnetic charge under the action of uniform magnetic field H, away from
Stronger magnetic-field component is received from the closer mistor 3 of flux guide 2, apart from the farther away mistor of flux guide 2
Receive weaker magnetic-field component.
Mistor in 2 lower section of flux guide is covered by soft magnetic materials flux guide 2 to be shielded, not by extraneous magnetic
Influence, shielded two mistors are as reference resistance at this time, respectively with the magnetosensitive at left and right sides of flux guide 2
Resistance forms bridge structure.That is R1, R2, R3, R4 formed one group of plug-type electric bridge, R3, R4, R5, R6 formed another group it is plug-type
Electric bridge.
When tested vertical magnetic field is smaller, using the mistor R1 and R2 close to 2 two sides of flux guide, flux draws
The magnetic field that device 2 converts vertical magnetic field to horizontal direction, the R1 being formed simultaneously, R2 are led, the plug-type electric bridge of R3, R4 also forms push-and-pull
Structure.Electric bridge output sensitivity at this time are as follows:
The sensitivity of sensor is that four arms push away in the present embodiment known in formula
The half of the sensitivity of sensor in pull-type electric bridge.But the sensor chip volume that this kind of mode is made into is smaller, more accords with
Conjunction meets requirement of the modern sensor to miniaturization.
If tested magnetic field is larger, mistor R5 and R6 far from 2 two sides of flux guide and shielded is utilized
R3 and R4 forms wheatstone bridge configuration.At this time due to R5 and R6 apart from flux guide 2 farther out, flux guide 2 exists at this time
Horizontal magnetic intensity herein is smaller, therefore horizontal leakage field is much smaller than the leakage field at R1 and R2 at this, suitable for larger magnetic
The detection of field.
As shown in figure 12, in the plug-type electric bridge of R5, R6, R3 and R4 composition, when sensor is served as a contrast by perpendicular to silicon substrate
When magnetic field on bottom 1, flux guide 2 resolves into the magnetic field in the horizontal sensitive axis direction of R5 and R6, R3 and R4 due to by
Shielding resistance value is constant, and resistance value one due to push-pull configuration R5 and the R6 resistance of formation increases another reduction, and increases and subtract
Small resistance is identical, it is assumed that under the influence of by magnetic field to be measured, the change in resistance amount of mistor 3 is Δ R1, electric bridge at this time
Output beDue to the presence of signal feedback coil 4, work as sensor output electrical signals
Feedback current is generated on signal feedback coil 4 afterwards, feedback current generates feedback magnetic field, and feedback magnetic field reacts on mistor
Former magnetic field is offset on 3, so that the suffered magnetic field of closing of mistor 3 is almost equal to zero, reaches equilibrium state.
It is worth noting that: slanted bar shape filling arrow, which is directed toward, in attached drawing 4, attached drawing 6, attached drawing 10 and attached drawing 12 indicates magnetosensitive electricity
The direction in original magnetic field suffered by resistance 3；Cross hatch fills the direction that arrow is directed toward the feedback magnetic field for indicating that signal feedback coil 4 generates.
Feedback arrangement in place is compared to traditional external circuitry system feedback structure on core, and required feedback current is significantly
It reduces, coil impedance also greatly reduces, and then high degree reduces the power consumption of sensing system.
The advantage of the invention is that anti-by the way that signal in place on core is arranged in plug-type vertical sensitive magnetic sensor chip
Feeder line circle generates size phase in the sensitive axis direction of two pairs of mistors 3 of 4 top of signal feedback coil when being connected with feedback current
Etc. contrary magnetic field signal, original signal magnetic field is offset respectively, and forms closed loop feedback arrangement, and it is defeated to be effectively improved sensor
The linearity out improves measurement accuracy, reduces power consumption；It is different away from 2 spacing of flux guide using two groups of mistors, so that
Two groups of received horizontal direction magnetic-field components of mistor 3 are different, two pairs of plug-type electricity that six identical mistors 3 are formed
Bridge realizes the purpose detected respectively to big magnetic field with small magnetic field difference range.
It is obvious to a person skilled in the art that invention is not limited to the details of the above exemplary embodiments, Er Qie
In the case where without departing substantially from spirit or essential attributes of the invention, the present invention can be realized in other specific forms.Therefore, no matter
From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the present invention is by appended power
Benefit requires rather than above description limits, it is intended that all by what is fallen within the meaning and scope of the equivalent elements of the claims
Variation is included within the present invention.Any reference signs in the claims should not be construed as limiting the involved claims.
Claims (8)
1. vertically sensitive Magnetic Sensor includes silicon-based substrate, flux guide, four to the wide-range fed back on a kind of closed loop core
Identical mistor, a signal feedback coil, operational amplifier and power amplifier；
It is characterized by: the flux guide is string configuration, same silicon substrate is arranged at four mistors and is served as a contrast
On bottom, two shielded mistors for reference, the flux guide left and right sides is arranged in the underface of flux guide
Be each provided with a mistor, the two mistors about flux guide bilateral symmetry, the two mistors it is quick
Sense axis direction is in same horizontal line and direction is consistent, is each perpendicular to flux guide left and right sides；Flux guide will hang down
Straight magnetic field signal is induced to direction in plane, an in-plane magnetic field component is generated at the mistor of its two sides, and at two
The signal magnetic-field component generated in mistor sensitivity axis direction is equal in magnitude, contrary；
The medianly zygomorphic mistor of the flux guide forms one group of half-bridge, is arranged immediately below flux guide
Two shielded mistors for reference form another group of half-bridge, and four mistors collectively constitute a push-and-pull output
Wheatstone bridge configuration；Signal feedback coil is the U-shaped structure that both sides are parallel to each other, and the setting of signal feedback coil is in magnetosensitive electricity
In the silicon-based substrate of the lower section of resistance, two parallel edges of signal feedback coil is separately positioned on the electricity of the magnetosensitive at left and right sides of flux guide
The underface of resistance, lead to feedback current when signal feedback coil in the sensitive axis direction of flux guide two sides mistor
Generate contrary magnetic field signal equal in magnitude；
A detection resistance is provided between the output end and ground terminal of the signal feedback coil；The output of Wheatstone bridge
End is connected to the input terminal of operational amplifier, and the output end of operational amplifier is connected to the input terminal on power amplifier, power
The output end of amplifier is connected on signal feedback coil and forms closed loop feedback structure.
2. vertically sensitive Magnetic Sensor, feature exist the wide-range fed back on a kind of closed loop core according to claim 1
In: the flux guide is made of nickel system, cobalt system or iron series soft magnetic materials.
3. vertically sensitive Magnetic Sensor, feature exist the wide-range fed back on a kind of closed loop core according to claim 1
In: the mistor selects giant magnetoresistance resistance or tunneling junction magnetoresistive.
4. vertically sensitive Magnetic Sensor, feature exist the wide-range fed back on a kind of closed loop core according to claim 1
In: the signal feedback coil is made of non magnetic, low resistance, the metallic silver of good electric conductivity, copper, aluminium, golden titanium or its alloy.
5. a kind of wide-range fed back on closed loop core vertically sensitive Magnetic Sensor, including silicon-based substrate, flux guide, six
Identical mistor, two signal feedback coils, operational amplifier and power amplifier；It is characterized by: the flux
Guiding device is string configuration, is arranged in same silicon-based substrate with six mistors, sets immediately below flux guide
Two shielded mistors for reference are set, flux guide left and right side is respectively set two mistors, leans on
Two mistors of nearly flux guide left and right sides partner, two magnetic far from flux guide left and right sides
Quick resistance partners, and every a pair of mistor is about flux guide bilateral symmetry, six mistor sensitivity axis directions
Identical, the position of flux guide and six mistors configures the magnetic field signal of detectable vertical plane；Two signal feedbacks
Coil is U-shaped structure, and the feedback coil of a U-shaped structure is positioned close to flux guide left and right sides a pair of magnetosensitive electricity
In the silicon-based substrate for hindering lower section, the feedback coil of another U-shaped structure is arranged far from the one of flux guide left and right sides
To in the silicon-based substrate below mistor, two sides of the U-shaped structure are parallel to each other, are separately positioned on flux guide two sides
The underface of two pairs of mistors；Two be arranged immediately below a pair of of the mistor and flux guide of flux guide
The shielded mistor for reference forms the wheatstone bridge configuration of a push-and-pull output, is used for small-range vertical plane
Magnetic field signal detection；A pair of of mistor of separate flux guide is shielded with two of setting immediately below flux guide
The mistor for reference covered forms the wheatstone bridge configuration of another push-and-pull output, for wide range vertical plane
The detection of magnetic field signal；The design of two pairs of wheatstone bridge configurations meets sensor chip to the magnetic field signal of vertical plane not same amount
The demand of journey detection；
Vertical magnetic field signal is induced in plane on direction and at left and right sides of flux guide by the flux guide
Leakage field component is generated respectively in the sensitive axis direction of two pairs of mistors, and vertical magnetic field signal divides after flux guide induces
Equal in magnitude, contrary leakage field component is not generated in the sensitive axis direction of first pair of mistor, in second pair of magnetosensitive electricity
It hinders and generates equal in magnitude, contrary leakage field component in sensitive axis direction；When logical feedback current, close to flux guide or so
It is generated in the sensitive axis direction of two mistors of signal feedback coil above it below a pair of of mistor of two sides
Offset the leakage field component feedback magnetic field of the mistor sensitivity axis direction；A pair of of magnetosensitive far from flux guide left and right sides
It is quick to offset the mistor for generation in the sensitive axis direction of two mistors of signal feedback coil above it below resistance
Feel the leakage field component feedback magnetic field of axis direction；
The output end of two Wheatstone bridges passes through the input terminal that switch is connected to operational amplifier, and the effect of switch is to select
One group in two groups of Wheatstone bridges is selected as detection electric bridge, has the function of selecting measuring range indirectly；Operational amplifier warp
It is exported after crossing amplification signal amplitude, the output end of operational amplifier is connected on the input terminal of power amplifier, power amplifier
Output end be connected on signal feedback coil, the other end of feedback coil concatenates testing resistance, another termination of testing resistance
Ground.
6. vertically sensitive Magnetic Sensor, feature exist the wide-range fed back on a kind of closed loop core according to claim 5
In: the flux guide is made of nickel system, cobalt system or iron series soft magnetic materials.
7. vertically sensitive Magnetic Sensor, feature exist the wide-range fed back on a kind of closed loop core according to claim 5
In: the mistor selects giant magnetoresistance resistance or tunneling junction magnetoresistive.
8. vertically sensitive Magnetic Sensor, feature exist the wide-range fed back on a kind of closed loop core according to claim 5
In: the signal feedback coil is made of non magnetic, low resistance, the metallic silver of good electric conductivity, copper, aluminium, golden titanium or its alloy.
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| CN201921833744.6U CN211180162U (en) | 2019-07-10 | 2019-10-29 | Wide-range vertical sensitive magnetic sensor with feedback on closed-loop core |
| CN201911039039.3A CN110687485A (en) | 2019-07-10 | 2019-10-29 | Wide-range vertical sensitive magnetic sensor with feedback on closed-loop core |
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| CN201911039039.3A Pending CN110687485A (en) | 2019-07-10 | 2019-10-29 | Wide-range vertical sensitive magnetic sensor with feedback on closed-loop core |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111198342A (en) * | 2020-01-10 | 2020-05-26 | 江苏多维科技有限公司 | Magneto-resistance sensor with harmonic wave widening linear range |
| CN117405958A (en) * | 2023-12-14 | 2024-01-16 | 江苏多维科技有限公司 | Current sensor |
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| CN112378994B (en) * | 2020-11-09 | 2024-04-30 | 华东理工大学 | Electromagnetic detection probe for deep defects of metal component based on TMR (total magnetic resistance) magnetoresistive sensor array |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111198342A (en) * | 2020-01-10 | 2020-05-26 | 江苏多维科技有限公司 | Magneto-resistance sensor with harmonic wave widening linear range |
| CN111198342B (en) * | 2020-01-10 | 2021-07-06 | 江苏多维科技有限公司 | Magneto-resistance sensor with harmonic wave widening linear range |
| CN117405958A (en) * | 2023-12-14 | 2024-01-16 | 江苏多维科技有限公司 | Current sensor |
| CN117405958B (en) * | 2023-12-14 | 2024-02-13 | 江苏多维科技有限公司 | current sensor |
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