CN110405622B - Circular arc swing plane grinding device - Google Patents

Circular arc swing plane grinding device Download PDF

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Publication number
CN110405622B
CN110405622B CN201910608597.0A CN201910608597A CN110405622B CN 110405622 B CN110405622 B CN 110405622B CN 201910608597 A CN201910608597 A CN 201910608597A CN 110405622 B CN110405622 B CN 110405622B
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Prior art keywords
shaft
motor
bevel gear
gear
cylindrical gear
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Chinese (zh)
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CN110405622A (en
Inventor
文东辉
肖燏婷
王辉
许鑫祺
邹磊
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Zhejiang University of Technology ZJUT
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Zhejiang University of Technology ZJUT
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Publication of CN110405622A publication Critical patent/CN110405622A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/04Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/10Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
    • B24B37/105Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/27Work carriers
    • B24B37/30Work carriers for single side lapping of plane surfaces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00Lapping machines or devices; Accessories
    • B24B37/34Accessories

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

The utility model provides a novel circular arc swing plane grinds device, including motor support, motor I, rigid coupling, lower arc guide rail, cylindrical gear I, cylindrical gear II, the bull's eye wheel, axle I, the gear mount, lower swing arm, go up the swing arm, go up arc guide rail, fixed riser, the motor board, the bent axle, bevel gear II, motor II, the plum blossom shaft coupling, axle II, cylindrical gear III, cylindrical gear IV, axle III, axle IV, bevel gear I, the universal joint, fixed diaphragm, axle V, the chuck, inserted bar and workpiece dish, through mechanical mechanism, form irrational number's rotation through a motor drive workpiece dish, another motor drives the swing motion that the workpiece dish is variable swing angle simultaneously, make the workpiece dish realize rotation and swing two motions in grinding the in-process, realize grinding the not closed of track line, increase the distribution range of track line at the grinding dish. The invention improves the precision and efficiency of plane grinding.

Description

Circular arc swing plane grinding device
Technical Field
The invention relates to a plane grinding mechanism, in particular to novel grinding equipment formed by two motors, four cylindrical gears, two bevel gears, two groups of arc-shaped guide rails and the like, and belongs to the technical field of plane grinding processing.
Background
Plane grinding processing kinematics is an important theoretical basis for high-precision shape control. As the size of crystalline substrates increases, control of polishing uniformity becomes increasingly difficult and the uniformity of polishing tracks has become a research hotspot. The principle of kinematics between the grinding disc and the workpiece is one of the main factors limiting the plane grinding processing precision, namely the plane forming mechanism of the grinding processing surface, and mainly comprises the design of a driving mode, processing technological parameters and a planeness finishing method of the grinding disc.
In the plane grinding process, on one hand, the uniform removal of the material on the processing surface of the workpiece is ensured so as to obtain good flatness; on the other hand, the uniform abrasion of the grinding tool is ensured. The purpose is to reduce the grinding disc finishing time, improve the efficiency of the whole processing flow, and more importantly, to reduce the fluctuation of the surface shape precision of the grinding disc in the processing process and ensure the acquisition of a high-precision processing surface.
The common characteristics of the current grinding track are: the abrasive machining trajectory is closed over the machining time, which means that the abrasive particles will repeat their motion trajectory over time. Meanwhile, in the grinding process, due to the fact that the inner linear speed and the outer linear speed of the grinding disc are different, abrasion is inconsistent, the flatness of the grinding disc can be reduced, and concave errors or convex errors are generated. During the grinding process, errors are copied, namely, during the processing process, the errors of the grinding disc can influence the grinding quality of the surface of the workpiece.
The rotation speed ratio between the grinding disc and the workpiece disc in plane grinding has important significance for workpiece processing, and numerical simulation research shows that when the rotation speed ratio is irrational number, an unclosed processing curve can be obtained. The instantaneous position of the workpiece relative to the grinding disc is adjusted, so that the motion of the workpiece is distributed on the surface of the grinding disc as uniformly as possible, and the abrasion uniformity of the grinding disc is further effectively improved. However, the rotation speed of the existing plane grinding mechanism is a single rational number compared with the adjustment, and the uniform abrasion of the grinding disc is less concerned.
Disclosure of Invention
In order to overcome the defects of lower precision and lower efficiency of the traditional plane grinding mechanism, the invention provides a novel arc swinging plane grinding device for improving the precision and efficiency of plane grinding.
The invention is realized by the following technical scheme:
the novel circular arc swing plane grinding device comprises a motor bracket, a motor I, a rigid coupling, a lower arc guide rail, a cylindrical gear I, a cylindrical gear II, a bull eye wheel, a shaft I, a gear fixing frame, a lower swing arm, an upper arc guide rail, a fixed vertical plate, a motor plate, a bent shaft, a bevel gear II, a motor II, a plum coupling, a shaft II, a cylindrical gear III, a cylindrical gear IV, a shaft III, a shaft IV, a bevel gear I, a universal joint, a fixed transverse plate, a shaft V, a chuck, an inserted link and a workpiece disc;
The motor I is fixedly arranged on the motor bracket, the motor shaft is directly connected with the cylindrical gear I through a rigid coupler, and the cylindrical gear I is fixedly arranged at the upper end of the motor shaft; the cylindrical gear II is fixedly arranged on the shaft I and meshed with the cylindrical gear I; the cylindrical fixed shaft I is arranged on the gear fixing frame through an upper pair of deep groove ball bearings and a lower pair of deep groove ball bearings; the upper swing arm and the lower swing arm are fixedly arranged on the shaft I through shaft end check rings and bolts and are fixedly arranged on the fixed vertical plate; the bullseye wheel is fixedly connected with the lower swing arm and is in tangential contact with the lower arc-shaped guide rail;
the motor II is fixedly arranged on the motor plate, and the upper end of the shaft II is connected with the output shaft of the motor II through a plum coupling; the cylindrical gear III is connected with the shaft II through a key, and the lower part of the cylindrical gear III is fixedly arranged on the shaft II through a shaft end retainer ring and a bolt. The cylindrical gear IV is sleeved on the shaft III through an internal deep groove ball bearing and meshed with the cylindrical gear IV, the upper end of the bent shaft is fixedly connected with a hub of the cylindrical gear IV through welding, the bevel gear I is connected with the shaft III through an internal deep groove ball bearing, and the lower part of the bevel gear I is fixed with a bolt through a bearing retainer ring; the bevel gear II is sleeved at the lower part of the bent shaft through a deep groove ball bearing and meshed with the bevel gear I; the bevel gear I, the bevel gear II and the bent axle form a planetary gear train, and the bevel gear II performs planetary motion under the drive of the bent axle through the meshing of the bevel gear II and the bevel gear I; the upper end of the shaft IV is fixedly connected with the bevel gear II through a flange, and the lower end of the shaft IV is connected with the upper end of the universal joint; the upper end of the shaft V is fixedly connected with the lower part of the universal joint, and two fixed transverse plates are arranged on the shaft V through deep groove ball bearings and are fixedly connected to fixed vertical plates; the fixed vertical plate is fixedly connected with the motor plate at the same time; the chuck is fixedly connected with the connecting shaft V through a key, and the lower part of the connecting shaft V is fixed by a shaft end retainer ring and a bolt; the insert rod is fixedly connected to the chuck through threads, the lower part of the insert rod is sleeved in a hole corresponding to the workpiece disc, and the workpiece disc is contacted with the grinding disc
Further, six bull wheels are arranged on the motor plate and are tangentially arranged in contact with the upper arc-shaped guide rail.
Still further, the bevel gear I and the bevel gear II are in oblique engagement, the shaft angle sigma=60°, the bevel gear II, the lower part of the universal joint and the shaft V are in the same straight line.
Still further, the center of the axis of the cylindrical gear II is 445mm away from the center of the grinding disc, and the axis is on the center line of the grinding machine.
Still further, fixed riser and last swing arm, lower swing arm, fixed diaphragm, motor board all pass through screw fixed connection, guaranteed that axle V is unchangeable for the relative position of axle III, rotation structure's whole keeps stable, guarantees the rotational speed output of work piece dish.
Still further, the universal joint ensures that the shaft angles at the upper and lower ends are equal in magnitude when being installed.
Still further, lower arc guide rail, last arc guide and aluminium alloy fixed connection, aluminium alloy and quick-witted fixed connection form a whole.
According to the invention, through a reasonable mechanical mechanism, one motor drives the workpiece disc to form irrational number of rotation, and the other motor drives the workpiece disc to do variable swing angle swing motion, so that the workpiece disc can realize rotation and swing motions in the grinding process, the non-closure of the grinding track line is realized, and the distribution range of the track line in the grinding disc is increased.
The beneficial effects of the invention are as follows: 1. according to the invention, the insert rod is used for connecting the workpiece disc in transmission of the workpiece disc, so that the height of a workpiece is effectively adjusted, the transmission effectiveness is realized, and the irrational rotation speed of the workpiece disc is ensured. 2. The upper and lower circular arc-shaped tracks play a role in guiding and fixing the swinging motion, and the stability and the accuracy of the swinging are ensured through the bull's eye wheels. 3. The swing and autorotation structure is fixed through the rocker arm, the fixed vertical plate and the fixed transverse plate, so that the integral fixing and swing of the mechanism are realized, and the combination of the two movements is effectively realized. 3. The workpiece disc rotation structure has the advantages of accurate transmission, no noise, lower production cost, higher grinding precision and efficiency, and solves the problem of closed track line from the grinding machining motion principle. 4. The circular arc swing structure is simple, the transmission is stable, the uniform abrasion of the grinding disc is realized, and the circular arc swing structure has important significance for improving the grinding precision of workpieces.
Drawings
Fig. 1 is an overall construction diagram of the present invention.
Fig. 2 is a main component configuration diagram of the present invention.
Fig. 3 is a cross-sectional view of a part of the structure of the present invention, wherein (a) is a bullseye wheel, (b) is an axis II, and (c) is an axis IV.
In fig. 2, 1, a motor bracket, 2, a motor i, 3, a rigid coupling, 4, a lower arc guide rail, 5, a cylindrical gear i, 6, a cylindrical gear ii, 7, a bull wheel, 8, a shaft i, 9, a lower swing arm, 10, a gear fixing frame, 11, an upper swing arm, 12, an upper arc guide rail, 13, a fixed vertical plate, 14, a motor plate, 15, a bent shaft, 16, a bevel gear ii, 17, a motor ii, 18, a plum blossom coupling, 19, a shaft ii, 20, a cylindrical gear iii, 21, a cylindrical gear iv, 22, a shaft iii, 23, a shaft iv, 24, a bevel gear i, 25, a universal joint, 26, a fixed transverse plate, 27, a shaft v, 28, a chuck, 29, a plunger, 30, a work disc, 31, and a grinding disc.
The number of teeth of each gear is cylindrical gear iz1=20, cylindrical gear iz2=40, cylindrical gear iz3=20, cylindrical gear ivz4=40, bevel gear i and bevel gear iz1=z2=30, respectively.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1-3, a novel circular arc swing plane grinds device, including motor support, motor I, rigid coupling, lower arc guide rail, cylindrical gear I, cylindrical gear II, bull's eye wheel, axle I, gear mount, lower swing arm, go up the arc guide rail, fixed riser, motor board, bent axle, bevel gear II, motor II, plum blossom shaft coupling, axle II, cylindrical gear III, cylindrical gear IV, axle III, axle IV, bevel gear I, universal joint, fixed diaphragm, axle V, chuck, inserted bar and work piece dish.
The motor I2 is fixedly arranged on the motor bracket 1, a motor shaft is directly connected with the cylindrical gear I5 through the rigid coupler 3, and the cylindrical gear I5 is fixedly arranged at the upper end of the motor shaft; the cylindrical gear II 6 is fixedly arranged on the shaft I8 and meshed with the cylindrical gear I5; the cylindrical fixed shaft I8 is arranged on the gear fixing frame 10 through an upper pair of deep groove ball bearings and a lower pair of deep groove ball bearings; the upper swing arm 11 and the lower swing arm 9 are fixedly arranged on the shaft I8 through shaft end check rings and bolts and are fixedly arranged on the fixed vertical plate 13 through screws; the bull's eye wheel 7 is fixedly connected with the lower swing arm 9 and is in tangential contact with the lower arc-shaped guide rail 4.
The motor II 17 is fixedly arranged on a motor plate, and the upper end of the shaft II 19 is connected with an output shaft of the motor II 17 through a plum coupling 18; the cylindrical gear III 20 is connected with the shaft II 19 through a key, and the lower surface of the cylindrical gear III is fixedly arranged on the shaft II 19 through a shaft end retainer ring and a bolt. The cylindrical gear IV 21 is sleeved on the shaft III 22 through an internal deep groove ball bearing and is meshed with the cylindrical gear IV 21, the upper end of the bent shaft 15 is fixedly connected with a hub of the cylindrical gear IV 21 through welding, the bevel gear I24 is connected with the shaft III 22 through an internal deep groove ball bearing, and the lower part of the bevel gear I is fixed through a bearing retainer ring and a bolt; the bevel gear II 16 is sleeved on the lower part of the bent shaft 15 through a deep groove ball bearing and is meshed with the bevel gear I24; the bevel gear I24, the bevel gear II 16 and the bent axle form a planetary gear train, and the bevel gear II 16 performs planetary motion under the drive of the bent axle 15 through the meshing of the bevel gear II with the bevel gear I24; the upper end of the shaft IV 23 is fixedly connected with the bevel gear II 16 through a flange, and the lower end of the shaft IV is connected with the upper end of the universal joint 25; the upper end of the shaft V27 is fixedly connected with the lower part of the universal joint 25, and the two fixed transverse plates 26 are arranged on the shaft V27 through deep groove ball bearings and are fixedly connected with the fixed vertical plate 13 through screws; the fixed vertical plate 13 is fixedly connected with the motor plate 14 through screws; the chuck 28 is fixedly connected to the connecting shaft V27 through a key, and the lower part of the connecting shaft V27 is fixed by a shaft end retainer ring and a bolt; the insert rod 29 is fixedly connected to the chuck 28 through threads thereof, the lower part of the insert rod is sleeved in a hole corresponding to the workpiece disc 30, and the workpiece disc 30 is contacted with the grinding disc 31.
Further, six bull wheels 7 are arranged on the motor plate 17 and are in tangential contact with the upper arc-shaped guide rail 12.
Still further, the bevel gear i 24 and the bevel gear ii 16 are diagonally meshed, the shaft angle Σ=60°, and the bevel gear ii 16, the lower part of the universal joint 25, and the shaft v 27 are aligned with each other.
Still further, the center of the axis of the cylindrical gear II 6 is 445mm away from the center of the grinding disc 31, and the axis is on the center line of the grinding machine.
Still further, the fixed vertical plate 13, the upper swing arm 11, the lower swing arm 9, the fixed transverse plate 26 and the motor plate 14 are fixedly connected through screws, so that the relative position of the shaft V27 relative to the shaft III 22 is unchanged, the whole rotation structure is kept stable, and the rotation speed output of the workpiece disc is ensured.
Still further, the universal joint 25 ensures that the shaft angles at the upper and lower ends thereof are equal in size when installed.
Still further, lower arc guide rail 4, last arc guide rail 12 and aluminium alloy fixed connection, aluminium alloy and quick-witted fixed connection form a whole.
The working process of the invention is as follows:
In the first part, a motor I2 inputs a signal, power is transmitted to a cylindrical gear I5 through a rigid coupler 3, the cylindrical gear II 6 is driven to rotate due to the meshing effect of the cylindrical gear I5 and the cylindrical gear II 6, the cylindrical gear II 6 transmits the power to a shaft I8, an upper rocker arm 11 and a lower rocker arm 9 fixed on the shaft I8 drive a fixed vertical plate 13 to swing, so that a bullnose wheel on a motor plate 14 is driven to swing along an upper arc-shaped guide rail 12, and a bullnose wheel 7 on a lower rocker arm 9 swings along a lower arc-shaped guide rail 4, so that the swing of a workpiece disc is driven.
In the second part, a motor II 17 inputs signals, power is transmitted to a cylindrical gear III 20 through a plum blossom coupler 18, and the cylindrical gear III 20 and a cylindrical gear IV 21 are meshed to drive a crankshaft to rotate around the axis of a shaft III 22, a bevel gear II 16 is meshed with a bevel gear I24 to perform planetary motion under the driving of a bent shaft, the rotating speed is transmitted to a shaft V27 through a universal joint 25 at a constant speed, so that the chuck 28 is driven to rotate, and the rotation of a workpiece is completed by transmitting the motion to a workpiece disc 30 through a plug rod 29.
The two motors work together so that the workpiece disk 30 performs a stable swinging motion while achieving rotation, and this mode improves the machining accuracy and the machining efficiency of single-sided planar grinding.
The above embodiments are only preferred embodiments of the present invention, and are not limiting to the technical solutions of the present invention, and any technical solution that can be implemented on the basis of the above embodiments without inventive effort should be considered as falling within the scope of protection of the patent claims of the present invention.

Claims (2)

1. The utility model provides a circular arc swing plane grinder which characterized in that: the device comprises a motor bracket, a motor I, a rigid coupling, a lower arc-shaped guide rail, a cylindrical gear I, a cylindrical gear II, a bull wheel, a shaft I, a gear fixing frame, a lower swing arm, an upper arc-shaped guide rail, a fixed vertical plate, a motor plate, a bent shaft, a bevel gear II, a motor II, a plum blossom coupling, a shaft II, a cylindrical gear III, a cylindrical gear IV, a shaft III, a shaft IV, a bevel gear I, a universal joint, a fixed transverse plate, a shaft V, a chuck, an inserting rod and a workpiece disc;
The motor I is fixedly arranged on the motor bracket, the motor shaft is directly connected with the cylindrical gear I through a rigid coupler, and the cylindrical gear I is fixedly arranged at the upper end of the motor shaft; the cylindrical gear II is fixedly arranged on the shaft I and meshed with the cylindrical gear I; the shaft I is arranged on the gear fixing frame through an upper pair of deep groove ball bearings and a lower pair of deep groove ball bearings; the upper swing arm and the lower swing arm are fixedly arranged on the shaft I through shaft end check rings and bolts and are fixedly arranged on the fixed vertical plate; the bullseye wheel is fixedly connected with the lower swing arm and is in tangential contact with the lower arc-shaped guide rail;
The motor II is fixedly arranged on the motor plate, and the upper end of the shaft II is connected with the output shaft of the motor II through a plum coupling; the cylindrical gear III is connected with the shaft II through a key, the lower part of the cylindrical gear IV is fixedly arranged on the shaft II through a shaft end retainer ring and a bolt, the cylindrical gear IV is sleeved on the shaft III through an inner deep groove ball bearing and meshed with the cylindrical gear IV, the upper end of the bent shaft is fixedly connected with a hub of the cylindrical gear IV through welding, the bevel gear I is connected with the shaft III through an inner deep groove ball bearing, and the lower part of the bevel gear I is fixed through a bearing retainer ring and a bolt; the bevel gear II is sleeved at the lower part of the bent shaft through a deep groove ball bearing and meshed with the bevel gear I; the bevel gear I, the bevel gear II and the bent axle form a planetary gear train, and the bevel gear II performs planetary motion under the drive of the bent axle through the meshing of the bevel gear II and the bevel gear I; the upper end of the shaft IV is fixedly connected with the bevel gear II through a flange, and the lower end of the shaft IV is connected with the upper end of the universal joint; the upper end of the shaft V is fixedly connected with the lower part of the universal joint, and two fixed transverse plates are arranged on the shaft V through deep groove ball bearings and are fixedly connected to fixed vertical plates; the fixed vertical plate is fixedly connected with the motor plate at the same time; the chuck is fixedly connected to the shaft V through a key, and the lower part of the shaft V is fixed by a shaft end retainer ring and a bolt; the insert rod is fixedly connected to the chuck through threads, the lower part of the insert rod is sleeved in a hole corresponding to the workpiece disc, and the workpiece disc is contacted with the grinding disc;
Six bull's eye wheels are arranged on the motor plate and are tangentially arranged in contact with the upper arc guide rail; the bevel gear I and the bevel gear II are in oblique engagement, the shaft angle sigma=60°, and the axes of the bevel gear II, the lower part of the universal joint and the shaft V are on the same straight line; the fixed vertical plate, the upper swing arm, the lower swing arm, the fixed transverse plate and the motor plate are fixedly connected through screws; when the universal joint is installed, the shaft angles at the upper end and the lower end of the universal joint are ensured to be equal.
2. The circular arc swing plane grinding apparatus according to claim 1, wherein: the lower arc guide rail, the upper arc guide rail and the aluminum profile are fixedly connected, and the aluminum profile is fixedly connected with the grinding machine.
CN201910608597.0A 2019-07-08 2019-07-08 Circular arc swing plane grinding device Active CN110405622B (en)

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111451950B (en) * 2020-04-15 2021-11-02 浙江工业大学 Rocker arm feeding type grinding disc manufacturing device
CN113172542A (en) * 2021-05-20 2021-07-27 高桥金属制品(苏州)有限公司 Spherical surface grinding device and grinding method

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1736661A (en) * 2004-08-22 2006-02-22 秦朝学 Pipe end burr polisher
CN106737191A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that lower polishing disk irrational number is rotated
CN106737134A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN107097123A (en) * 2017-06-29 2017-08-29 西华大学 A kind of rotating mechanism
CN206614403U (en) * 2016-12-30 2017-11-07 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN108608315A (en) * 2018-05-16 2018-10-02 浙江工业大学 A kind of plane lapping driving device of novel high-precision control shape
CN211163455U (en) * 2019-07-08 2020-08-04 浙江工业大学 Novel circular arc swing plane grinding device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1736661A (en) * 2004-08-22 2006-02-22 秦朝学 Pipe end burr polisher
CN106737191A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that lower polishing disk irrational number is rotated
CN106737134A (en) * 2016-12-30 2017-05-31 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN206614403U (en) * 2016-12-30 2017-11-07 浙江工业大学 It is a kind of to realize the mechanism that polishing disk irrational number is rotated
CN107097123A (en) * 2017-06-29 2017-08-29 西华大学 A kind of rotating mechanism
CN108608315A (en) * 2018-05-16 2018-10-02 浙江工业大学 A kind of plane lapping driving device of novel high-precision control shape
CN211163455U (en) * 2019-07-08 2020-08-04 浙江工业大学 Novel circular arc swing plane grinding device

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