CN110405622B - Arc swing plane grinding device - Google Patents
Arc swing plane grinding device Download PDFInfo
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- CN110405622B CN110405622B CN201910608597.0A CN201910608597A CN110405622B CN 110405622 B CN110405622 B CN 110405622B CN 201910608597 A CN201910608597 A CN 201910608597A CN 110405622 B CN110405622 B CN 110405622B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/27—Work carriers
- B24B37/30—Work carriers for single side lapping of plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
技术领域Technical Field
本发明涉及一种平面研磨机构,具体地说是应用两个电机、四个圆柱齿轮、两个锥齿轮、两组圆弧弧形导轨等构成的一种新型研磨设备,属于平面研磨加工技术领域。The invention relates to a plane grinding mechanism, in particular to a new type of grinding equipment composed of two motors, four cylindrical gears, two bevel gears, two groups of circular arc guide rails, etc., belonging to the technical field of plane grinding processing.
背景技术Background technique
平面研磨加工运动学是高精度控形的重要理论基础。随着晶体衬底尺寸的增大,研磨均匀性的控制变得越来越困难,研磨轨迹的均匀性已经成为研究热点。研磨盘与工件之间的运动学原理是制约平面研磨加工精度的主要因素之一,亦即研磨加工表面的平面形成机理,主要包括驱动方式的设计、加工工艺参数和研磨盘的平面度修整方法。The kinematics of plane grinding is an important theoretical basis for high-precision shape control. As the size of the crystal substrate increases, the control of grinding uniformity becomes more and more difficult, and the uniformity of the grinding trajectory has become a research hotspot. The kinematic principle between the grinding disc and the workpiece is one of the main factors restricting the accuracy of plane grinding, that is, the plane formation mechanism of the grinding surface, which mainly includes the design of the drive mode, the processing parameters and the flatness finishing method of the grinding disc.
平面研磨加工过程中,一方面要保证工件加工表面材料均匀去除,以获得良好的平面度;另一方面要保证研具的均匀磨损。目的是减少研磨盘修整时间,提高整个加工流程的效率,更重要的是为了减小研磨盘面形精度在加工过程中的波动,保证高精度加工表面的获得。During the surface grinding process, on the one hand, it is necessary to ensure that the material on the workpiece surface is evenly removed to obtain a good flatness; on the other hand, it is necessary to ensure that the grinding tool is evenly worn. The purpose is to reduce the grinding disc dressing time, improve the efficiency of the entire processing process, and more importantly, to reduce the fluctuation of the grinding disc surface accuracy during the processing process to ensure the acquisition of a high-precision processing surface.
目前研磨加工轨迹的共同特点是:随着加工时间的推移,研磨加工轨迹线是闭合型的,这意味着磨粒在一定的时间内将周而复始地重复其运动轨迹。同时,考虑到研磨的过程中,由于研磨盘的内外线速度不同,磨损不一致,会造成研磨盘的平面度会下降,产生凹误差或者凸误差。研磨加工时“复制”误差,即在加工过程中,研磨盘的误差会影响工件表面研磨质量。The common feature of the grinding process trajectory at present is that as the processing time goes by, the grinding process trajectory is closed, which means that the abrasive particles will repeat their movement trajectory over and over again within a certain period of time. At the same time, considering that during the grinding process, the inner and outer linear speeds of the grinding disc are different, the wear is inconsistent, which will cause the flatness of the grinding disc to decrease, resulting in concave or convex errors. The "copy" error during grinding, that is, during the processing, the error of the grinding disc will affect the surface grinding quality of the workpiece.
平面研磨中研磨盘与工件盘之间的转速比对于工件加工有重要意义,数值模拟研究发现转速比为无理数时,能得到不闭合的加工曲线。调整工件相对于研磨盘瞬时位置,使得工件的运动尽量均匀遍布研磨盘表面,进而有效改善研磨盘的磨损均匀性。但现有平面研磨机构的转速比调节都为单一的有理数,且对于研磨盘的均匀磨损关注较少。The speed ratio between the grinding disc and the workpiece disc in plane grinding is of great significance for workpiece processing. Numerical simulation studies have found that when the speed ratio is an irrational number, an unclosed processing curve can be obtained. Adjusting the instantaneous position of the workpiece relative to the grinding disc makes the movement of the workpiece as evenly distributed as possible on the surface of the grinding disc, thereby effectively improving the wear uniformity of the grinding disc. However, the speed ratio adjustment of existing plane grinding mechanisms is a single rational number, and less attention is paid to the uniform wear of the grinding disc.
发明内容Summary of the invention
为了克服现有平面研磨机构的精度较低、效率较低的不足,本发明提供了一种提高平面研磨的精度和效率的新型圆弧摆动平面研磨装置。In order to overcome the shortcomings of low precision and low efficiency of existing plane grinding mechanisms, the present invention provides a novel arc swing plane grinding device which improves the precision and efficiency of plane grinding.
本发明是通过以下技术方案实现的:The present invention is achieved through the following technical solutions:
一种新型圆弧摆动平面研磨装置,所述装置包括电机支架、电机Ⅰ、刚性联轴器、下弧形导轨、圆柱齿轮Ⅰ、圆柱齿轮Ⅱ、牛眼轮、轴Ⅰ、齿轮固定架、下摆臂,上摆臂、上弧形导轨、固定竖板、电机板、弯轴,锥齿轮Ⅱ、电机Ⅱ、梅花联轴器、轴Ⅱ、圆柱齿轮Ⅲ、圆柱齿轮Ⅳ、轴Ⅲ、轴Ⅳ、锥齿轮Ⅰ、万向节、固定横板、轴Ⅴ、卡盘、插杆和工件盘;A novel arc swing plane grinding device, the device comprises a motor bracket, a motor I, a rigid coupling, a lower arc guide rail, a cylindrical gear I, a cylindrical gear II, a bull's eye wheel, a shaft I, a gear fixing frame, a lower swing arm, an upper swing arm, an upper arc guide rail, a fixed vertical plate, a motor plate, a bent shaft, a bevel gear II, a motor II, a plum coupling, a shaft II, a cylindrical gear III, a cylindrical gear IV, a shaft III, a shaft IV, a bevel gear I, a universal joint, a fixed horizontal plate, a shaft V, a chuck, a plunger and a workpiece plate;
所述电机Ⅰ固定安装在电机支架上,电机轴通过刚性联轴器和圆柱齿轮Ⅰ直接连接,所述圆柱齿轮Ⅰ固定安装在电机轴的上端;所述圆柱齿轮Ⅱ固定安装在轴Ⅰ上,且和圆柱齿轮Ⅰ啮合;所述圆柱固定轴Ⅰ通过上下两对深沟球轴承安装在齿轮固定架上;所述上摆臂和下摆臂通过轴端挡圈和螺栓固定安装在轴Ⅰ上,并固定安装在固定竖板上;所述牛眼轮与下摆臂固定连接,并与下弧形导轨相切接触;The motor I is fixedly mounted on the motor bracket, the motor shaft is directly connected to the cylindrical gear I through a rigid coupling, and the cylindrical gear I is fixedly mounted on the upper end of the motor shaft; the cylindrical gear II is fixedly mounted on the shaft I and meshes with the cylindrical gear I; the cylindrical fixed shaft I is mounted on the gear fixing frame through two pairs of upper and lower deep groove ball bearings; the upper swing arm and the lower swing arm are fixedly mounted on the shaft I through shaft end retaining rings and bolts, and are fixedly mounted on the fixed vertical plate; the bull's eye wheel is fixedly connected to the lower swing arm and is in tangential contact with the lower arc guide rail;
所述电机Ⅱ固定安装在电机板上,所述轴Ⅱ的上端通过梅花联轴器和所述电机Ⅱ的输出轴连接;所述圆柱齿轮Ⅲ通过键和轴Ⅱ连接,其下面通过轴端挡圈和螺栓固定安装在轴Ⅱ上。所述圆柱齿轮Ⅳ通过内部的深沟球轴承套装在轴Ⅲ上,并且和圆柱齿轮Ⅳ啮合,所述弯轴的上端通过焊接与圆柱齿轮Ⅳ的轮毂固定连接,所述锥齿轮Ⅰ通过内部的深沟球轴承和轴Ⅲ连接,其下部通过轴承挡圈和螺栓固定;所述锥齿轮Ⅱ通过深沟球轴承套装在弯轴的下部,且与锥齿轮Ⅰ啮合;所述的锥齿轮Ⅰ、锥齿轮Ⅱ和弯轴形成行星轮系,锥齿轮Ⅱ通过与锥齿轮Ⅰ的啮合在弯轴的带动下作行星运动;所述轴Ⅳ的上端通过法兰与锥齿轮Ⅱ固定连接,其下端与万向节的上端相连接;所述的轴Ⅴ上端和万向节的下部固定连接,两块固定横板通过深沟球轴承安装在所述轴Ⅴ上,并固定连接在固定竖板上;所述的固定竖板同时和电机板固定连接;所述的卡盘通过键连接固定连接轴Ⅴ上,并通过轴端挡圈和螺栓固定轴Ⅴ的下部;所述插杆通过其螺纹固定连接在卡盘上,其下部套在工件盘对应的孔中,工件盘和研磨盘接触The motor II is fixedly mounted on the motor plate, and the upper end of the shaft II is connected to the output shaft of the motor II through a plum blossom coupling; the cylindrical gear III is connected to the shaft II through a key, and its lower side is fixedly mounted on the shaft II through a shaft end retaining ring and bolts. The cylindrical gear IV is mounted on the shaft III through an internal deep groove ball bearing and meshes with the cylindrical gear IV. The upper end of the bent shaft is fixedly connected to the hub of the cylindrical gear IV through welding, and the bevel gear I is connected to the shaft III through an internal deep groove ball bearing, and its lower part is fixed through a bearing retaining ring and bolts; the bevel gear II is mounted on the lower part of the bent shaft through a deep groove ball bearing and meshes with the bevel gear I; the bevel gear I, bevel gear II and the bent shaft form a planetary gear system, and the bevel gear II performs planetary motion driven by the bent shaft through meshing with the bevel gear I; the shaft The upper end of Ⅳ is fixedly connected to the bevel gear Ⅱ through a flange, and its lower end is connected to the upper end of the universal joint; the upper end of the shaft V is fixedly connected to the lower part of the universal joint, and two fixed horizontal plates are installed on the shaft V through deep groove ball bearings and fixedly connected to the fixed vertical plate; the fixed vertical plate is also fixedly connected to the motor plate; the chuck is fixedly connected to the shaft V through a key connection, and the lower part of the shaft V is fixed by a shaft end retaining ring and bolts; the insertion rod is fixedly connected to the chuck through its thread, and its lower part is sleeved in the corresponding hole of the workpiece disk, and the workpiece disk and the grinding disk are in contact
进一步,所述电机板上装有六个牛眼轮,并与上弧形导轨相切接触安装。Furthermore, six bull's eye wheels are mounted on the motor plate and are installed in tangential contact with the upper arc-shaped guide rail.
再进一步的,所述的锥齿轮Ⅰ和锥齿轮Ⅱ斜交啮合的轴角Σ=60°,锥齿轮Ⅱ、万向节下部、轴Ⅴ,轴线在同一直线。Furthermore, the axis angle Σ of the oblique meshing of the bevel gear I and the bevel gear II is 60°, and the axes of the bevel gear II, the lower part of the universal joint, and the shaft V are in the same straight line.
再进一步的,所述的圆柱齿轮Ⅱ轴线中心,距离研磨盘中心445mm,且轴心在研磨机的中线上。Furthermore, the axis center of the cylindrical gear II is 445 mm away from the center of the grinding disc, and the axis is on the center line of the grinder.
再进一步的,所述的固定竖板和上摆臂、下摆臂、固定横板、电机板都通过螺钉固定连接,确保了轴Ⅴ相对于轴Ⅲ的相对位置不变,自转结构的整体保持稳定,确保工件盘的转速输出。Furthermore, the fixed vertical plate and the upper swing arm, the lower swing arm, the fixed horizontal plate, and the motor plate are all fixedly connected by screws, ensuring that the relative position of the axis V with respect to the axis III remains unchanged, the overall rotation structure remains stable, and the rotation speed output of the workpiece disk is ensured.
再进一步的,所述万向节在安装时,确保其上下两端的轴角大小相等。Furthermore, when the universal joint is installed, ensure that the shaft angles at the upper and lower ends are equal.
再进一步的,所述下弧形导轨、上弧形导和铝型材固定连接,铝型材和研磨机固定连接,形成一个整体。Furthermore, the lower arc-shaped guide rail, the upper arc-shaped guide rail and the aluminum profile are fixedly connected, and the aluminum profile and the grinder are fixedly connected to form a whole.
本发明通过合理的机械机构,通过一个电机带动工件盘的形成无理数的自转,同时另一个电机带动工件盘做可变摆角的摆动运动,使得工件盘在研磨过程中实现自转和摆动两个运动,实现研磨轨迹线的不闭合,增加轨迹线在研磨盘的分布范围。The present invention uses a reasonable mechanical mechanism, in which a motor drives the workpiece disc to form an irrational rotation, and at the same time another motor drives the workpiece disc to swing with a variable swing angle, so that the workpiece disc can realize both rotation and swing during the grinding process, realize the non-closure of the grinding trajectory line, and increase the distribution range of the trajectory line on the grinding disc.
该发明的有益之处有益效果表现在:1.本发明的对于工件盘的传动使用插杆连接工件盘,有效调节工件的高度,实现了传动的有效性,保证了工件盘无理自转速度的实现。2.本发明的上下两组圆弧形轨道对于摆动运动起到引导作用和一定的固定作用,通过牛眼轮保证了摆动的平稳性和精确性。3.本发明的摆动和自转结构的固定通过摇臂、固定竖板和固定横板,实现了机构的整体固定和摆动,有效实现了两种运动的结合。3.本发明的工件盘自转结构传动准确、无噪声、生产成本较低,研磨精度和效率更高,从研磨加工运动原理上解决了轨迹线闭合的问题。4.本发明的圆弧摆动结构简单、传动平稳,实现了研磨盘的均匀磨损,对于改善工件研磨精度有重要意义。The beneficial effects of the invention are as follows: 1. The transmission of the workpiece disk of the present invention uses an insert rod to connect the workpiece disk, which effectively adjusts the height of the workpiece, realizes the effectiveness of the transmission, and ensures the realization of the unreasonable rotation speed of the workpiece disk. 2. The upper and lower sets of arc tracks of the present invention play a guiding role and a certain fixing role for the swinging motion, and the stability and accuracy of the swing are guaranteed by the bull's eye wheel. 3. The swing and rotation structure of the present invention is fixed by a rocker arm, a fixed vertical plate and a fixed horizontal plate, which realizes the overall fixation and swing of the mechanism and effectively realizes the combination of the two movements. 3. The workpiece disk rotation structure of the present invention has accurate transmission, no noise, low production cost, higher grinding accuracy and efficiency, and solves the problem of trajectory closure from the principle of grinding processing motion. 4. The arc swing structure of the present invention is simple and has stable transmission, which realizes uniform wear of the grinding disk, which is of great significance for improving the grinding accuracy of the workpiece.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
图1是本发明的整体结构图。FIG. 1 is an overall structural diagram of the present invention.
图2是本发明的主要部件结构图。FIG. 2 is a structural diagram of the main components of the present invention.
图3是本发明的部分结构的剖视图,其中,(a)为牛眼轮,(b)为轴II,(c)为轴IV。FIG3 is a cross-sectional view of a partial structure of the present invention, wherein (a) is a bull's eye wheel, (b) is axis II, and (c) is axis IV.
图2中,1、电机支架,2、电机Ⅰ,3、刚性联轴器,4、下弧形导轨,5、圆柱齿轮Ⅰ,6、圆柱齿轮Ⅱ,7、牛眼轮,8、轴Ⅰ,9、下摆臂,10、齿轮固定架,11、上摆臂,12、上弧形导轨,13、固定竖板,14、电机板,15、弯轴,16、锥齿轮Ⅱ,17、电机Ⅱ,18、梅花联轴器,19、轴Ⅱ,20、圆柱齿轮Ⅲ,21、圆柱齿轮Ⅳ,22、轴Ⅲ,23、轴Ⅳ,24、锥齿轮Ⅰ,25、万向节,26、固定横板,27、轴Ⅴ,28、卡盘,29、插杆,30、工件盘,31、研磨盘。In Figure 2, 1, motor bracket, 2, motor I, 3, rigid coupling, 4, lower arc guide rail, 5, cylindrical gear I, 6, cylindrical gear II, 7, bull's eye wheel, 8, shaft I, 9, lower swing arm, 10, gear fixing frame, 11, upper swing arm, 12, upper arc guide rail, 13, fixed vertical plate, 14, motor plate, 15, bent shaft, 16, bevel gear II, 17, motor II, 18, plum blossom coupling, 19, shaft II, 20, cylindrical gear III, 21, cylindrical gear IV, 22, shaft III, 23, shaft IV, 24, bevel gear I, 25, universal joint, 26, fixed horizontal plate, 27, shaft V, 28, chuck, 29, plunger, 30, workpiece disk, 31, grinding disk.
各个齿轮的齿数分别为圆柱齿轮Ⅰz1=20,圆柱齿轮Ⅱz2=40,圆柱齿轮Ⅲz3=20,圆柱齿轮Ⅳz4=40,锥齿轮Ⅰ和锥齿轮Ⅱz1=z2=30。The number of teeth of each gear is cylindrical gear I z1=20, cylindrical gear II z2=40, cylindrical gear III z3=20, cylindrical gear IV z4=40, bevel gear I and bevel gear II z1=z2=30.
具体实施方式Detailed ways
下面结合附图对本发明作进一步描述。The present invention will be further described below in conjunction with the accompanying drawings.
参照图1~图3,一种新型圆弧摆动平面研磨装置,包括包括电机支架、电机Ⅰ、刚性联轴器、下弧形导轨、圆柱齿轮Ⅰ、圆柱齿轮Ⅱ、牛眼轮、轴Ⅰ、齿轮固定架、下摆臂,上摆臂、上弧形导轨、固定竖板、电机板、弯轴,锥齿轮Ⅱ、电机Ⅱ、梅花联轴器、轴Ⅱ、圆柱齿轮Ⅲ、圆柱齿轮Ⅳ、轴Ⅲ、轴Ⅳ、锥齿轮Ⅰ、万向节、固定横板、轴Ⅴ、卡盘、插杆和工件盘。Referring to Figures 1 to 3, a novel arc swing plane grinding device includes a motor bracket, a motor I, a rigid coupling, a lower arc guide rail, a cylindrical gear I, a cylindrical gear II, a bull's eye wheel, a shaft I, a gear fixing frame, a lower swing arm, an upper swing arm, an upper arc guide rail, a fixed vertical plate, a motor plate, a bent shaft, a bevel gear II, a motor II, a plum blossom coupling, a shaft II, a cylindrical gear III, a cylindrical gear IV, a shaft III, a shaft IV, a bevel gear I, a universal joint, a fixed horizontal plate, a shaft V, a chuck, a plunger and a workpiece disk.
所述电机Ⅰ2固定安装在电机支架1上,电机轴通过刚性联轴器3和圆柱齿轮Ⅰ5直接连接,所述圆柱齿轮Ⅰ5固定安装在电机轴的上端;所述圆柱齿轮Ⅱ6固定安装在轴Ⅰ8上,且和圆柱齿轮Ⅰ5啮合;所述圆柱固定轴Ⅰ8通过上下两对深沟球轴承安装在齿轮固定架10上;所述上摆臂11和下摆臂9通过轴端挡圈和螺栓固定安装在轴Ⅰ8上,并通过螺钉固定安装在固定竖板13上;所述牛眼轮7与下摆臂9固定连接,并与下弧形导轨4相切接触。The motor I2 is fixedly mounted on the motor bracket 1, and the motor shaft is directly connected to the cylindrical gear I5 through a rigid coupling 3, and the cylindrical gear I5 is fixedly mounted on the upper end of the motor shaft; the cylindrical gear II6 is fixedly mounted on the shaft I8 and meshes with the cylindrical gear I5; the cylindrical fixed shaft I8 is mounted on the gear fixing frame 10 through two pairs of upper and lower deep groove ball bearings; the upper swing arm 11 and the lower swing arm 9 are fixedly mounted on the shaft I8 through shaft end retaining rings and bolts, and are fixedly mounted on the fixed vertical plate 13 through screws; the bull's eye wheel 7 is fixedly connected to the lower swing arm 9, and is in tangential contact with the lower arc guide rail 4.
所述电机Ⅱ17固定安装在电机板上,所述轴Ⅱ19的上端通过梅花联轴器18和所述电机Ⅱ17的输出轴连接;所述圆柱齿轮Ⅲ20通过键和轴Ⅱ19连接,其下面通过轴端挡圈和螺栓固定安装在轴Ⅱ19上。所述圆柱齿轮Ⅳ21通过内部的深沟球轴承套装在轴Ⅲ22上,并且和圆柱齿轮Ⅳ21啮合,所述弯轴15的上端通过焊接与圆柱齿轮Ⅳ21的轮毂固定连接,所述锥齿轮Ⅰ24通过内部的深沟球轴承和轴Ⅲ22连接,其下部通过轴承挡圈和螺栓固定;所述锥齿轮Ⅱ16通过深沟球轴承套装在弯轴15的下部,且与锥齿轮Ⅰ24啮合;所述的锥齿轮Ⅰ24、锥齿轮Ⅱ16和弯轴形成行星轮系,锥齿轮Ⅱ16通过与锥齿轮Ⅰ24的啮合在弯轴15的带动下作行星运动;所述轴Ⅳ23的上端通过法兰与锥齿轮Ⅱ16固定连接,其下端与万向节25的上端相连接;所述的轴Ⅴ27上端和万向节25的下部固定连接,所述两块固定横板26通过深沟球轴承安装在所述轴Ⅴ27上,并通过螺钉固定连接在固定竖板13上;所述的固定竖板13同时和电机板14通过螺钉固定连接;所述的卡盘28通过键连接固定连接轴Ⅴ27上,并通过轴端挡圈和螺栓固定轴Ⅴ27的下部;所述插杆29通过其螺纹固定连接在卡盘28上,其下部套在工件盘30对应的孔中,工件盘30和研磨盘31接触。The motor II 17 is fixedly mounted on the motor plate, and the upper end of the shaft II 19 is connected to the output shaft of the motor II 17 through a plum blossom coupling 18; the cylindrical gear III 20 is connected to the shaft II 19 through a key, and its lower side is fixedly mounted on the shaft II 19 through a shaft end retaining ring and bolts. The cylindrical gear IV 21 is mounted on the shaft III 22 through an internal deep groove ball bearing and meshes with the cylindrical gear IV 21. The upper end of the bent shaft 15 is fixedly connected to the hub of the cylindrical gear IV 21 through welding, and the bevel gear I 24 is connected to the shaft III 22 through an internal deep groove ball bearing, and its lower part is fixed through a bearing retaining ring and bolts; the bevel gear II 16 is mounted on the lower part of the bent shaft 15 through a deep groove ball bearing and meshes with the bevel gear I 24; the bevel gear I 24, bevel gear II 16 and the bent shaft form a planetary gear system, and the bevel gear II 16 performs planetary motion driven by the bent shaft 15 through meshing with the bevel gear I 24; the upper end of the shaft IV 23 is mounted through a The flange is fixedly connected to the bevel gear II 16, and its lower end is connected to the upper end of the universal joint 25; the upper end of the shaft V 27 is fixedly connected to the lower part of the universal joint 25, and the two fixed horizontal plates 26 are installed on the shaft V 27 through deep groove ball bearings, and are fixedly connected to the fixed vertical plate 13 through screws; the fixed vertical plate 13 is also fixedly connected to the motor plate 14 through screws; the chuck 28 is fixedly connected to the shaft V 27 through a key connection, and the lower part of the shaft V 27 is fixed by a shaft end retaining ring and bolts; the insert rod 29 is fixedly connected to the chuck 28 through its thread, and its lower part is sleeved in the corresponding hole of the workpiece disk 30, and the workpiece disk 30 is in contact with the grinding disk 31.
进一步,所述电机板17上装有六个牛眼轮7,并与上弧形导轨12相切接触。Furthermore, six bull's eye wheels 7 are mounted on the motor plate 17 and are in tangential contact with the upper arc-shaped guide rail 12 .
再进一步,所述的锥齿轮Ⅰ24和锥齿轮Ⅱ16斜交啮合的轴角Σ=60°,锥齿轮Ⅱ16、万向节25下部、轴Ⅴ27,轴线在同一直线。Furthermore, the bevel gear I 24 and the bevel gear II 16 are in oblique meshing with each other at an axial angle Σ=60°, and the axes of the bevel gear II 16, the lower part of the universal joint 25, and the shaft V 27 are in the same straight line.
再进一步,所述的圆柱齿轮Ⅱ6轴线中心,距离研磨盘31中心445mm,且轴心在研磨机的中线上。Furthermore, the axis center of the cylindrical gear II 6 is 445 mm away from the center of the grinding disc 31, and the axis is on the center line of the grinder.
再进一步,所述的固定竖板13,和上摆臂11,下摆臂9,固定横板26,电机板14都通过螺钉固定连接,确保了轴Ⅴ27相对于轴Ⅲ22的相对位置不变,自转结构的整体保持稳定,确保工件盘的转速输出。Furthermore, the fixed vertical plate 13, the upper swing arm 11, the lower swing arm 9, the fixed horizontal plate 26, and the motor plate 14 are all fixedly connected by screws, ensuring that the relative position of the shaft V27 relative to the shaft III22 remains unchanged, the overall rotation structure remains stable, and the rotation speed output of the workpiece disk is ensured.
再进一步,所述万向节25在安装时,确保其上下两端的轴角大小相等。Furthermore, when the universal joint 25 is installed, ensure that the shaft angles at the upper and lower ends are equal.
再进一步,所述下弧形导轨4、上弧形导轨12和铝型材固定连接,铝型材和研磨机固定连接,形成一个整体。Furthermore, the lower arc guide rail 4, the upper arc guide rail 12 and the aluminum profile are fixedly connected, and the aluminum profile and the grinder are fixedly connected to form a whole.
本发明的工作过程为:The working process of the present invention is:
第一部分,电机Ⅰ2输入信号,通过刚性联轴器3将动力传递给圆柱齿轮Ⅰ5,由于圆柱齿轮Ⅰ5和圆柱齿轮Ⅱ6的啮合作用,带动圆柱齿轮Ⅱ6转动,圆柱齿轮Ⅱ6将动力传递给轴Ⅰ8,固定在轴Ⅰ8上的上摇臂11和下摇臂9带动固定竖板13摆动,从而带动电机板14上的牛眼轮沿着上弧形导轨12摆动,下摇臂9上的牛眼轮7沿着下弧形导轨4摆动,从而带动工件盘的摆动。In the first part, motor Ⅰ2 inputs a signal and transmits power to cylindrical gear Ⅰ5 through the rigid coupling 3. Due to the meshing action of cylindrical gear Ⅰ5 and cylindrical gear Ⅱ6, cylindrical gear Ⅱ6 is driven to rotate, and cylindrical gear Ⅱ6 transmits power to shaft Ⅰ8. The upper rocker arm 11 and the lower rocker arm 9 fixed on shaft Ⅰ8 drive the fixed vertical plate 13 to swing, thereby driving the bull's eye wheel on the motor plate 14 to swing along the upper arc guide rail 12, and the bull's eye wheel 7 on the lower rocker arm 9 swings along the lower arc guide rail 4, thereby driving the workpiece disk to swing.
第二部分,电机Ⅱ17输入信号,通过梅花联轴器18将动力传递给圆柱齿轮Ⅲ20,由于圆柱齿轮Ⅲ20和圆柱齿轮Ⅳ21的啮合作用,从而带动曲轴绕轴Ⅲ22的轴线旋转运动,锥齿轮Ⅱ16通过与锥齿轮Ⅰ24的啮合在弯轴的带动下作行星运动,并通过万向节25将转速等速传递给轴Ⅴ27,从而带动卡盘28的旋转运动,再通过在插杆29将运动传递给工件盘30,完成对工件的自转运动。In the second part, the motor II 17 inputs the signal and transmits the power to the cylindrical gear III 20 through the plum blossom coupling 18. Due to the meshing of the cylindrical gear III 20 and the cylindrical gear IV 21, the crankshaft is driven to rotate around the axis of shaft III 22. The bevel gear II 16 meshes with the bevel gear I 24 and drives the bent shaft to perform planetary motion, and transmits the rotation speed to the shaft V 27 at a constant speed through the universal joint 25, thereby driving the rotation of the chuck 28, and then transmits the motion to the workpiece disk 30 through the insertion rod 29 to complete the rotation of the workpiece.
两个电机一起工作,使得工件盘30在实现自转的同时,进行平稳的摆动运动,该模式提高了单面平面研磨的加工精度和加工效率。The two motors work together to enable the workpiece disc 30 to perform a smooth swinging motion while achieving self-rotation. This mode improves the processing accuracy and processing efficiency of single-sided plane grinding.
上述实施例只是本发明的较佳实施例,并不是对本发明技术方案的限制,只要是不经过创造性劳动即可在上述实施例的基础上实现的技术方案,均应视为落入本发明专利的权利保护范围内。The above embodiments are only preferred embodiments of the present invention and are not limitations of the technical solutions of the present invention. Any technical solution that can be implemented on the basis of the above embodiments without creative work should be deemed to fall within the scope of protection of the patent of the present invention.
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