CN110398661A - A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system - Google Patents

A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system Download PDF

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Publication number
CN110398661A
CN110398661A CN201910798529.5A CN201910798529A CN110398661A CN 110398661 A CN110398661 A CN 110398661A CN 201910798529 A CN201910798529 A CN 201910798529A CN 110398661 A CN110398661 A CN 110398661A
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CN
China
Prior art keywords
power module
sic power
source table
gate pole
matrix relay
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Pending
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CN201910798529.5A
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Chinese (zh)
Inventor
袁磊
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Hefei Zhongheng Micro Semiconductor Co Ltd
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Hefei Zhongheng Micro Semiconductor Co Ltd
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Application filed by Hefei Zhongheng Micro Semiconductor Co Ltd filed Critical Hefei Zhongheng Micro Semiconductor Co Ltd
Priority to CN201910798529.5A priority Critical patent/CN110398661A/en
Publication of CN110398661A publication Critical patent/CN110398661A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a kind of multi-channel high-accuracy SiC power module gate pole leakage tests systems, including multichannel scan matrix relay, the high accuracy number source table being bi-directionally connected, the multichannel scan matrix relay passes through probe respectively and connects the carrier that SiC power module, the probe and the coaxial shielding line are transmitted as signal between SiC power module and the multichannel scan matrix relay with coaxial shielding line;High accuracy number source table is used to generate pumping signal and the response signal returned to SiC power module is analyzed, and the multichannel scan matrix relay realizes the load and transmission of pumping signal and response signal by switching.Compared to traditional test macro, have the characteristics that high degree of automation, test scope are wide, measuring accuracy is high, versatile, provides more good test macro for SiC power module gate pole leakage tests.

Description

A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system
Technical field
The present invention relates to SiC power module test technical field, especially a kind of multi-channel high-accuracy SiC power module door Pole leakage tests system.
Background technique
SiC power module is a kind of high-frequency drive, high efficiency, high-power power semiconductor modular, is widely used in height The fields such as the conversion of power density electric energy, the control of high performance motor driving motor, high-speed motor.Currently, the switch of SiC power module Frequency is the section 30-100KHz in the high frequency stage, and high frequency time switchs in a very short period of time, for the reliability of SiC power module Bring very big challenge.In actual production, it needs to carry out gate pole leakage tests to SiC power module, and with minimum measurement range, It is usually characterized in 1nA or less, to guarantee the reliability of SiC power module gate pole long-term work.
Legacy test system needs manually-operated link more, is easy error and the testing time is longer, and more adopts With modularization matrix switch, higher cost and the degree of automation is not high.Therefore, SiC power of the market for high degree of automation Module gate pole leakage tests system be there is an urgent need to.
Summary of the invention
In view of the above-mentioned problems, the present invention provides the SiC power module gate pole of a kind of multi-channel high-accuracy, high degree of automation Leakage tests system.
A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system, including the multichannel scanning being bi-directionally connected Matrix relay, high accuracy number source table, the multichannel scan matrix relay passes through probe respectively and coaxial shielding line connects SiC power module is connect, the probe and the coaxial shielding line are as SiC power module and the multichannel scan matrix relay The carrier that signal transmits between device;
High accuracy number source table is used to generate pumping signal and the response signal returned to SiC power module is divided Analysis, the multichannel scan matrix relay realize the load and transmission of pumping signal and response signal by switching.
Further, high accuracy number source table uses programmable digital source table.
Further, in test process, SiC power module is fixed in position by test fixture.
Further, test macro working method the following steps are included:
S1, by computer to high accuracy number source table input test code;
S2, high accuracy number source table execute test code and output drive signal;
S3, multichannel scan matrix relay load pumping signal are simultaneously transmitted to SiC power module;
S4, SiC power module receive pumping signal and returning response signal at most Channel scan matrix relay;
S5, multichannel scan matrix relay transmission response signal to high accuracy number source table;
S6, high accuracy number source table analysis response signal simultaneously transmit feedback code to computer;
S7, computer are analyzed test data according to feedback code and are compared with preset value;
S8 determines SiC power module gate pole leakage tests result according to comparison result.
Beneficial effects of the present invention: compared to traditional test macro, with high degree of automation, test scope is wide, tests Precision height, versatile feature, provide more good test macro for SiC power module gate pole leakage tests.
Detailed description of the invention
Fig. 1 is multi-channel high-accuracy SiC power module gate pole leakage tests system structure diagram.
Specific embodiment
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.The embodiment of the present invention is It is provided for the sake of example and description, and is not exhaustively or to limit the invention to disclosed form.Very much Modifications and variations are obvious for the ordinary skill in the art.Selection and description embodiment are in order to more preferable Illustrate the principle of the present invention and practical application, and makes those skilled in the art it will be appreciated that the present invention is suitable to design In the various embodiments with various modifications of special-purpose.
Embodiment 1
A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system, as shown in Figure 1, including being bi-directionally connected Multichannel scan matrix relay, high accuracy number source table, the multichannel scan matrix relay pass through probe and same respectively Axis shielding line connects SiC power module, and the probe and the coaxial shielding line are swept as SiC power module and the multichannel Retouch the carrier that signal transmits between matrix relay;
High accuracy number source table is used to generate pumping signal and the response signal returned to SiC power module is divided Analysis, the multichannel scan matrix relay realize the load and transmission of pumping signal and response signal by switching.
Multichannel scan matrix relay improves the scalability of flexibility and the data acquisition of test macro;In high precision Digital sourcemeter has multrirange, high accuracy data fan-out capability and high-acruracy survey ability;Programmable operations, can same stepping Row multichannel, the test of multimode and data analysis.
For the ease of test, high accuracy number source table uses programmable digital source table.
Accuracy in order to ensure the test results, in test process, SiC power module is solid by test fixture holding position It is fixed.
The working method of test macro the following steps are included:
S1, by computer to high accuracy number source table input test code;
S2, high accuracy number source table execute test code and output drive signal;
S3, multichannel scan matrix relay load pumping signal are simultaneously transmitted to SiC power module;
S4, SiC power module receive pumping signal and returning response signal at most Channel scan matrix relay;
S5, multichannel scan matrix relay transmission response signal to high accuracy number source table;
S6, high accuracy number source table analysis response signal simultaneously transmit feedback code to computer;
S7, computer are analyzed test data according to feedback code and are compared with preset value;
S8 determines SiC power module gate pole leakage tests result according to comparison result.
Obviously, described embodiment is only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, this field and those of ordinary skill in the related art institute without creative labor The every other embodiment obtained, all should belong to the scope of protection of the invention.

Claims (4)

1. a kind of multi-channel high-accuracy SiC power module gate pole leakage tests system, which is characterized in that more including what is be bi-directionally connected Channel scan matrix relay, high accuracy number source table, the multichannel scan matrix relay pass through probe and coaxial respectively Shielding line connects SiC power module, the probe and the coaxial shielding line and scans as SiC power module and the multichannel The carrier that signal transmits between matrix relay;
High accuracy number source table is used to generate pumping signal and the response signal returned to SiC power module is analyzed, The multichannel scan matrix relay realizes the load and transmission of pumping signal and response signal by switching.
2. multi-channel high-accuracy SiC power module gate pole leakage tests system according to claim 1, which is characterized in that High accuracy number source table uses programmable digital source table.
3. multi-channel high-accuracy SiC power module gate pole leakage tests system according to claim 1 or 2, feature exist In in test process, SiC power module is fixed in position by test fixture.
4. multi-channel high-accuracy SiC power module gate pole leakage tests system according to claim 2, which is characterized in that Its working method the following steps are included:
S1, by computer to high accuracy number source table input test code;
S2, high accuracy number source table execute test code and output drive signal;
S3, multichannel scan matrix relay load pumping signal are simultaneously transmitted to SiC power module;
S4, SiC power module receive pumping signal and returning response signal at most Channel scan matrix relay;
S5, multichannel scan matrix relay transmission response signal to high accuracy number source table;
S6, high accuracy number source table analysis response signal simultaneously transmit feedback code to computer;
S7, computer are analyzed test data according to feedback code and are compared with preset value;
S8 determines SiC power module gate pole leakage tests result according to comparison result.
CN201910798529.5A 2019-08-27 2019-08-27 A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system Pending CN110398661A (en)

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CN201910798529.5A CN110398661A (en) 2019-08-27 2019-08-27 A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system

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CN201910798529.5A CN110398661A (en) 2019-08-27 2019-08-27 A kind of multi-channel high-accuracy SiC power module gate pole leakage tests system

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116087738A (en) * 2023-04-10 2023-05-09 合肥中恒微半导体有限公司 SiC power module gate electrode leakage test equipment and test system thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104111416A (en) * 2013-07-23 2014-10-22 广东美的制冷设备有限公司 Test circuit used for intelligent power module and test method thereof
CN105403788A (en) * 2015-12-07 2016-03-16 中国电子科技集团公司第十研究所 Automatic ground testing system of spaceborne electronic equipment
CN105929278A (en) * 2016-05-11 2016-09-07 株洲中车时代电气股份有限公司 System and method for high voltage testing of converting module
CN107656185A (en) * 2017-10-25 2018-02-02 北京国联万众半导体科技有限公司 A kind of test device for Wide Bandgap Semiconductor Power Devices
CN108344936A (en) * 2018-01-22 2018-07-31 无锡昌德微电子股份有限公司 A kind of test method of power semiconductor
CN209182442U (en) * 2018-07-12 2019-07-30 成都杰启科电科技有限公司 A kind of power device leakage current and Reliability Test Instrument

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104111416A (en) * 2013-07-23 2014-10-22 广东美的制冷设备有限公司 Test circuit used for intelligent power module and test method thereof
CN105403788A (en) * 2015-12-07 2016-03-16 中国电子科技集团公司第十研究所 Automatic ground testing system of spaceborne electronic equipment
CN105929278A (en) * 2016-05-11 2016-09-07 株洲中车时代电气股份有限公司 System and method for high voltage testing of converting module
CN107656185A (en) * 2017-10-25 2018-02-02 北京国联万众半导体科技有限公司 A kind of test device for Wide Bandgap Semiconductor Power Devices
CN108344936A (en) * 2018-01-22 2018-07-31 无锡昌德微电子股份有限公司 A kind of test method of power semiconductor
CN209182442U (en) * 2018-07-12 2019-07-30 成都杰启科电科技有限公司 A kind of power device leakage current and Reliability Test Instrument

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116087738A (en) * 2023-04-10 2023-05-09 合肥中恒微半导体有限公司 SiC power module gate electrode leakage test equipment and test system thereof

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