CN110398521A - A kind of highly sensitive recessed groove NOx sensor structure - Google Patents
A kind of highly sensitive recessed groove NOx sensor structure Download PDFInfo
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- CN110398521A CN110398521A CN201910789300.5A CN201910789300A CN110398521A CN 110398521 A CN110398521 A CN 110398521A CN 201910789300 A CN201910789300 A CN 201910789300A CN 110398521 A CN110398521 A CN 110398521A
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- recessed groove
- sensing unit
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- nitrogen oxygen
- nox sensor
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/125—Composition of the body, e.g. the composition of its sensitive layer
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Abstract
The invention discloses a kind of highly sensitive recessed groove NOx sensor structures, belong to nitrogen oxide sensor technical field, it is main to be to solve that existing nitrogen oxide sensor sensitivity is low, the technical issues of being of limited application, the sensor structure includes substrate, the substrate is equipped at least one recessed groove, the nitrogen oxygen sensing unit across its two sides is equipped with above each recessed groove, the both ends of the nitrogen oxygen sensing unit connect the substrate top.The present invention can be such that nitrogen oxygen sensing unit contacts with 360 ° of omnidirectionals of nitrogen carrier of oxygen, the sensitivity of sensor is greatly improved, simultaneously because nitrogen oxygen sensing unit is not contacted with recessed groove, the contact area of substrate and nitrogen oxygen sensing unit is small, heating area is small, can achieve the purpose for reducing heat power consumption.
Description
Technical field
The present invention relates to nitrogen oxide sensor technical fields, more specifically, it relates to a kind of highly sensitive recessed groove NOx sensing
Device structure.
Background technique
With the development of society, rate of industrial development is accelerated, the pollution situation of atmosphere is also increasingly severe.In recent years, by
In production and development needs, China petrochemical industry, motor vehicles production on advance by leaps and bounds, although pushing away to a certain extent
The development of society has been moved, but more serious pollution is caused to atmospheric environment.Currently, being got in the world to atmospheric environment protection
More pay attention to, sound is more more and more intense, China has put into effect some relevant laws and regulations also with environment protection.
On June 28th, 2018, ecological environment portion issued " heavy-duty diesel vehicle pollutant emission limit and measurement method (in
The 6th stage of state) " (six standard of abbreviation heavy goods vehicles state).The advance of Europe superscript and American Standard has been merged in heavy goods vehicles state six, and is directed to
The actual conditions in China propose tightened up requirement.Although the China diesel vehicle Zhi Zhan vehicle guaranteeding organic quantity less than 10%,
Be its discharge nitrogen oxides close to the 70% of vehicle mass exhaust total quantity, it is China's Motor Vehicle Pollution Prevention that particulate matter, which is more than 90%,
The most important thing.
Nitrogen oxide sensor can be applied to environmental monitoring field, for detecting the amount of nitrogen oxides in atmosphere.In order to prevent
The precision of environmental pollution, the detection of nitrogen carrier of oxygen must reach requirement.Therefore it is related to the detection of nitrogen carrier of oxygen in environmental area and needs height
The gas sensor of sensitivity.But the nitrogen oxide sensor that can reach detection accuracy at present is only used for the large-scale precision instrument in laboratory
Device equipment.Mature air-sensitive membrane preparation method is screen printing technique, the sizes of substrate of obtained carrying array air-sensitive film
Generally grade, but the sensitivity relatively large-scale precision instrument and equipment of portable device that this scene uses substantially reduces,
Often it is only able to detect the gas that concentration is higher than 1ppm.
The type of nitrogen oxide sensor specifically includes that semi-conductor type, concentration potential type, compound potential type at present.Semi-conductor type
Sensor is relatively poor to the selectivity of gas, stability is not also high.Concentration potential type is to sealing requirements height.Compound potential type
Sensor structure is complicated, is easy to fail.Therefore for these sensors, sensitivity is lower, and application range is relatively limited.
Summary of the invention
The technical problem to be solved by the present invention is to be directed to the above-mentioned deficiency of the prior art, the object of the present invention is to provide one kind
High sensitivity, the highly sensitive recessed groove NOx sensor structure having a wide range of application.
The technical scheme is that: a kind of highly sensitive recessed groove NOx sensor structure, including substrate, the substrate are equipped with
At least one recessed groove, each recessed groove top are equipped with the nitrogen oxygen sensing unit across its two sides, the nitrogen oxygen sensing unit
Both ends connect the substrate top.
As a further improvement, the nitrogen oxygen sensing unit include supporting-core, by the supporting-core periphery wrap up sense
Answer film.
Further, the supporting-core includes by Al3O2Inner core made of material, the SiO for wrapping up the inner core2Film.
Further, the sense film includes the first inductive layer, the second induction by first inductive layer periphery package
Layer, the resistance value of first inductive layer are greater than the resistance value of second inductive layer.
Further, first inductive layer with a thickness of 6~12 μm, the material of first inductive layer is SnO2The inside
Zn is adulterated, the concentration of the Zn is 1~4%, the SnO2Particulate matter diameter with Zn is 5~8nm.
Further, second inductive layer with a thickness of 6~12 μm, the material of second inductive layer is SnO2The inside
Pt is adulterated, the concentration of the Pt is 1~4%, the SnO2Particulate matter diameter with Pt is 5~8nm.
Further, it is fallen in the inner cavity of the recessed groove under the middle part of the nitrogen oxygen sensing unit.
Further, the recessed groove is hemispheric structure.
Further, the material of the substrate is NiCr.
Beneficial effect
Compared with prior art, the present invention having the advantage that are as follows:
1. the present invention is by being arranged at least one recessed groove in substrate top, and above each recessed groove setting across its two
The nitrogen oxygen sensing unit of the filament of side can be such that nitrogen oxygen sensing unit contacts with 360 ° of omnidirectionals of nitrogen carrier of oxygen, be greatly improved
The sensitivity of sensor can effectively detect that concentration is lower than the gas of 1ppm, simultaneously because nitrogen oxygen sensing unit and recess
Slot does not contact, and the contact area of substrate and nitrogen oxygen sensing unit is small, and heating area is small, can achieve the purpose for reducing heat power consumption.
2. the present invention is greater than the distance of recessed groove two sides by the length of setting nitrogen oxygen sensing unit, on the one hand can increase
The contact area of nitrogen oxygen sensing unit and nitrogen carrier of oxygen, improves the sensitivity of sensor, and another aspect nitrogen oxygen sensing unit is in
Semiellipse is set on recessed groove, can be with the expanding with heat and contract with cold of effective compensation course of work nitrogen oxygen sensing unit.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is cross-sectional view of the invention；
Fig. 3 is the cross-sectional view of nitrogen oxygen sensing unit in the present invention.
Wherein: 1- substrate, 2- recessed groove, 3- nitrogen oxygen sensing unit, 4- supporting-core, 41- inner core, 42-SiO2Film, 5- sense
Answer film, the first inductive layer of 51-, the second inductive layer of 52-.
Specific embodiment
The present invention is described further for specific embodiment in reference to the accompanying drawing.
Refering to fig. 1-3, a kind of highly sensitive recessed groove NOx sensor structure, including substrate 1, it is recessed that substrate 1 is equipped at least one
Slot 2 is fallen into, recessed groove 2 is located at 1 top of substrate, the nitrogen oxygen sensing unit 3 across its two sides is equipped with above each recessed groove 2, nitrogen oxygen is quick
Sense unit 3 is filament, and 1 top of both ends connection substrate of nitrogen oxygen sensing unit 3, the both ends of nitrogen oxygen sensing unit 3 are by swashing
It is connected at the top of photocoagulation and substrate 1.Nitrogen oxygen sensing unit 3 can be made to contact with 360 ° of omnidirectionals of nitrogen carrier of oxygen, greatly improve biography
The sensitivity of sensor can effectively detect that concentration is lower than the gas of 1ppm, simultaneously because nitrogen oxygen sensing unit 3 and recessed groove 2
It does not contact, substrate 1 and the contact area of nitrogen oxygen sensing unit 3 are small, and heating area is small, can achieve the purpose for reducing heat power consumption.
Nitrogen oxygen sensing unit 3 includes supporting-core 4, the sense film 5 for wrapping up 4 periphery of supporting-core.Supporting-core 4 includes by Al3O2
Inner core 41, the SiO for wrapping up inner core 41 made of material2Film 42, the diameter of inner core 41 are 80~120 μm, SiO2Film 42
With a thickness of 6~12 μm.Preferably, the diameter of inner core 41 is 100 μm, SiO2Film 42 with a thickness of 8 μm.
Sense film 5 includes the first inductive layer 51, by the second inductive layer 52 of 51 periphery package of the first inductive layer, and first incudes
Layer 51 is by SiO2Film 42 wraps up, and the resistance value of the first inductive layer 51 is greater than the resistance value of the second inductive layer 52.First inductive layer 51
With a thickness of 6~12 μm, the material of the first inductive layer 51 is SnO2Zn is adulterated in the inside, and the concentration of Zn is 1~4%, the first inductive layer
51 modes that plating can be used generate, SnO2Particulate matter diameter with Zn is 5~8nm.Second inductive layer 52 with a thickness of 6~
12 μm, the material of the second inductive layer 52 is SnO2Pt is adulterated in the inside, and the concentration of Pt is 1~4%, and the second inductive layer 52 can be used
The mode of plating generates, SnO2Particulate matter diameter with Pt is 5~8nm.
It is fallen in the inner cavity of recessed groove 2 under the middle part of nitrogen oxygen sensing unit 3, but nitrogen oxygen sensing unit 3 and 2 inner wall of recessed groove
It does not contact, i.e., nitrogen oxygen sensing unit 3 is set on recessed groove 2 in semiellipse, on the one hand can increase nitrogen oxygen sensing unit 3 and nitrogen
The contact area of carrier of oxygen improves the sensitivity of sensor, on the other hand can be sensitive single with effective compensation course of work nitrogen oxygen
The expanding with heat and contract with cold of member 3.Recessed groove 2 is hemispheric structure, and the bulb diameter of recessed groove 2 can be 1.09mm, processing technology
It is good, it is directly i.e. processable with rose cutter.The material of substrate 1 is NiCr.
When the quantity of recessed groove 2 and nitrogen oxygen sensing unit 3 is 1, sensor is single sensor array.When 2 He of recessed groove
When the quantity of nitrogen oxygen sensing unit 3 is greater than 1, sensor is more sensor arrays.In more sensor arrays, each nitrogen oxygen is sensitive single
Member 3 characteristic be it is inconsistent, can by change the first inductive layer 51 and the doping concentration of the second inductive layer 52, particulate matter it is straight
Diameter or thickness obtain the different nitrogen oxygen sensing unit 3 of characteristic.Number of arrays is more, and detection accuracy is higher, while structure is more complicated, at
This is higher, and specific number of arrays can be set according to actual needs.
As shown in Figure 1, the quantity of recessed groove 2 and nitrogen oxygen sensing unit 3 is 3, sensor is three sensor arrays, three nitrogen
First inductive layer 51 of oxygen sensing unit 3 is consistent.52 parameter of the second inductive layer of first nitrogen oxygen sensing unit 3: with a thickness of 8 μ
The concentration of m, Pt are 2%, particulate matter diameter 6nm.Second inductive layer, 52 parameter in second nitrogen oxygen sensing unit 3: with a thickness of 8
μm, the concentration of Pt is 3%, particulate matter diameter 6nm.Second inductive layer, 52 parameter in third nitrogen oxygen sensing unit 3: with a thickness of
8 μm, the concentration of Pt is 4%, particulate matter diameter 6nm.The parameter of second inductive layer 52 of three nitrogen oxygen sensing units 3 is different
Sample, characteristic are also different.It is of course also possible to change the first inductive layer 51 and the second inductive layer in above-mentioned parameter variation range
52 other parameters obtain the inconsistent nitrogen oxygen sensing unit of characteristic.
The above is only the preferred embodiment of the present invention, it should be pointed out that for those skilled in the art, is not taking off
Under the premise of from structure of the invention, several modifications and improvements can also be made, these all will not influence the effect that the present invention is implemented
And patent practicability.
Claims (9)
1. a kind of highly sensitive recessed groove NOx sensor structure, which is characterized in that including substrate (1), the substrate (1) is equipped with extremely
A few recessed groove (2), each recessed groove (2) top are equipped with the nitrogen oxygen sensing unit (3) across its two sides, and the nitrogen oxygen is quick
The both ends for feeling unit (3) connect at the top of the substrate (1).
2. a kind of highly sensitive recessed groove NOx sensor structure according to claim 1, which is characterized in that the nitrogen oxygen is quick
Feel the sense film (5) that unit (3) include supporting-core (4), wrap up the supporting-core (4) periphery.
3. a kind of highly sensitive recessed groove NOx sensor structure according to claim 2, which is characterized in that the supporting-core
It (4) include by Al3O2Inner core made of material (41), the SiO for wrapping up the inner core (41)2Film (42).
4. a kind of highly sensitive recessed groove NOx sensor structure according to claim 2, which is characterized in that the sense film
It (5) include the first inductive layer (51), by peripheral the second inductive layer (52) wrapped up of first inductive layer (51), described first feels
The resistance value of layer (51) is answered to be greater than the resistance value of second inductive layer (52).
5. a kind of highly sensitive recessed groove NOx sensor structure according to claim 4, which is characterized in that first sense
Answer layer (51) with a thickness of 6~12 μm, the material of first inductive layer (51) is SnO2Adulterate Zn, the concentration of the Zn in the inside
It is 1~4%, the SnO2Particulate matter diameter with Zn is 5~8nm.
6. a kind of highly sensitive recessed groove NOx sensor structure according to claim 4, which is characterized in that second sense
Answer layer (52) with a thickness of 6~12 μm, the material of second inductive layer (52) is SnO2Adulterate Pt, the concentration of the Pt in the inside
It is 1~4%, the SnO2Particulate matter diameter with Pt is 5~8nm.
7. a kind of highly sensitive recessed groove NOx sensor structure according to claim 1, which is characterized in that the nitrogen oxygen is quick
Feel and being fallen in the inner cavity of the recessed groove (2) under the middle part of unit (3).
8. a kind of highly sensitive recessed groove NOx sensor structure according to claim 1, which is characterized in that the recessed groove
It (2) is hemispheric structure.
9. a kind of highly sensitive recessed groove NOx sensor structure according to any one of claims 1 to 8, which is characterized in that
The material of the substrate (1) is NiCr.
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| CN201910789300.5A CN110398521A (en) | 2019-08-26 | 2019-08-26 | A kind of highly sensitive recessed groove NOx sensor structure |
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| CN201910789300.5A CN110398521A (en) | 2019-08-26 | 2019-08-26 | A kind of highly sensitive recessed groove NOx sensor structure |
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