CN110384995A - A kind of high boiling point organic compound waste gas treatment equipment and its processing method - Google Patents
A kind of high boiling point organic compound waste gas treatment equipment and its processing method Download PDFInfo
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- CN110384995A CN110384995A CN201910672239.6A CN201910672239A CN110384995A CN 110384995 A CN110384995 A CN 110384995A CN 201910672239 A CN201910672239 A CN 201910672239A CN 110384995 A CN110384995 A CN 110384995A
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- boiling point
- high boiling
- organic compound
- point organic
- exhaust gas
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D50/00—Combinations of methods or devices for separating particles from gases or vapours
- B01D50/20—Combinations of devices covered by groups B01D45/00 and B01D46/00
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/002—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by condensation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
Abstract
This application involves technical field of waste gas treatment, a kind of high boiling point organic compound waste gas treatment equipment and its processing method are disclosed, wherein processing equipment includes: the condensation process equipment for the gaseous organic substance in high boiling point organic compound exhaust gas to be converted to liquid；It is connected to condensation process equipment, for handling the depth-type filtration processing equipment for passing through condensation process equipment treated high boiling point organic compound exhaust gas, wherein depth-type filtration equipment is used for fine mist of the filter diameter at 0.1 μm to 200 μm；It is connected to depth-type filtration processing equipment, for eluting the elution treatment equipment for passing through depth-type filtration processing equipment treated high boiling point organic compound exhaust gas；For by the exhaust blower of scrubbed processing equipment treated high boiling point organic compound exhaust gas discharge.High boiling point organic compound waste gas treatment equipment disclosed in the present application, can not only reduce environmental pollution, can also be achieved clean manufacturing, reduce production cost.
Description
Technical field
This application involves technical field of waste gas treatment, in particular to a kind of high boiling point organic compound waste gas treatment equipment and its place
Reason method.
Background technique
Currently, the main product of electronics industry is semiconductor chip and display device, the removing of production process photoresist
Process is needed using ethanol amine (MEA), dimethyl sulfoxide (DMSO), butyl (BDG), N-Methyl pyrrolidone
(NMP) etc. organic solvents are as stripper, and the boiling point of these organic solvents is respectively as follows: MEA, and 170.5 DEG C；DMSO, 189 DEG C；
BDG, 230.6 DEG C；NMP, 203 DEG C.The boiling point of above-mentioned organic solvent stripper is all between 150 DEG C~250 DEG C, so belonging to
Higher boiling volatile organic matter.In recent years, the higher boiling volatility generated in electronics industry photoresist lift off process production process
Organic matter (VOCs) generallys use condensation+elution processing mode, processing system process such as Fig. 1, and handling principle is as follows: from light
Volatile organic matter (VOCs) exhaust gas containing stripper that photoresist peel-off device 3 is discharged initially enters device of condensation recovery 4, gives up
Gas is after the cooling of the cooling coil of device of condensation recovery, and most of gaseous organic matter is condensed into liquid, after this liquid is collected
It usually distilled, purify reuse.Through treated the exhaust gas of device of condensation recovery 4, though most high boiling point organic compound is
Be condensed removal, but still reduces atmosphere pollution containing the organic matter of higher concentration in exhaust gas to protect environment, this exhaust gas also needs
Through 5 condensation process of condensing plant, then through elution 6 elution of equipment processing, high altitude discharge after finally being pressurizeed by exhaust blower 7.
The mode for the high boiling point organic compound exhaust gas that above-mentioned processing photoresist lift off process generates, obtained in electronics industry in recent years
To extensive use, but it has also been found that there is following problems in application process:
Due to the high boiling point organic compound generated in photoresist lift off process production process, treatment in situ, light are usually first carried out
Photoresist peel-off device 3 is mounted in toilet 1, and device of condensation recovery 4 is mounted on the lower skill of 3 corresponding position of photoresist lift off equipment
In art interlayer 2, device of condensation recovery 4 usually with condensing mode by exhaust gas to be mostly in gaseous high boiling point organic compound cold
Two parts are congealed into, a part is liquid, this liquid is along the catch tray that the heat exchange fin of cooler falls to cooler bottom；Separately
A part is fine mist, and the diameter distribution of the droplet is wider, and small fogdrop diameter is 0.1 μm, big fogdrop diameter
Up to 200 μm, this part fine mist will enter the processing system of condensation+elution shown in FIG. 1 with exhaust gas, but condensation is typically only capable to
>=10 μm of particle of processing, elution are typically only capable to the particle of>=5 μm of processing, so a large amount of<5 μm of organic matter droplet, and especially
The organic matter droplet of sub-micron is not handled, is caused the outlet of exhaust tube in Practical Project white cigarette often occur, is caused one
The atmosphere pollution for determining degree, also influences perception.
Summary of the invention
This application provides a kind of high boiling point organic compound waste gas treatment equipment and its processing methods, can effectively solve the problem that condensation
The problem of a large amount of fine mists of bring cannot be removed effectively when handling high boiling point organic compound exhaust gas with elution, and then thoroughly handle
The high boiling point organic compound generated in photoresist lift off process production process, reaches reduction atmosphere pollution, protects the purpose of environment.
In order to achieve the above object, this application provides a kind of high boiling point organic compound waste gas treatment equipments, comprising:
For the gaseous organic substance in high boiling point organic compound exhaust gas to be converted to the condensation process equipment of liquid；
It is connected to the condensation process equipment, for handling, by the condensation process equipment, treated that higher boiling is organic
The depth-type filtration processing equipment of object exhaust gas, wherein the depth-type filtration equipment is thin at 0.1 μm to 200 μm for filter diameter
Small droplet；
It is connected to the depth-type filtration processing equipment, for eluting, by the depth-type filtration processing equipment, that treated is high
The elution treatment equipment of boiling organics exhaust gas；
The exhaust blower for high boiling point organic compound exhaust gas discharge that treated for will pass through the elution treatment equipment.
High boiling point organic compound waste gas treatment equipment provided by the present application, for handling in photoresist lift off process production process
The high boiling point organic compound exhaust gas of generation, higher boiling after high boiling point organic compound exhaust gas enters condensation process equipment, in exhaust gas
Organic matter and vapor condense into two parts together to the cold, and a part is liquid, and another part is diameter at 0.1 μm to 200 μm
Fine mist.After fine mist enters in depth-type filtration processing equipment with exhaust gas, it can be captured by deep filter, and in depth
It spends on filter and assembles, finally drip under gravity.At this point, the remaining lower organic matter of concentration is through filtering in exhaust gas
When washing processing equipment, the ingredient that water can be dissolved in organic matter can be removed, and the organic matter that further reduced in exhaust gas is dense
Degree, to ensure that exhaust gas can reach the standard of discharge, is most disposed in atmosphere after exhaust blower pressurizes afterwards.
Therefore, the high boiling point organic compound waste gas treatment equipment in the application passes through setting condensation, depth-type filtration and elution
Equipment can make the operation that high boiling point organic compound exhaust treatment system is efficient, stable, and then it is raw thoroughly to handle photoresist lift off process
The high boiling point organic compound generated during producing, to achieve the purpose that reduce environmental pollution.
Preferably, the condensation process equipment and the depth-type filtration processing equipment are set to interlayer under toilet
It is interior.
Preferably, the condensation process equipment includes condenser and positioned at the condenser bottom, liquefied for collecting
First catch tray of organic matter.
Preferably, the depth-type filtration processing equipment includes: depth-type filtration processing equipment shell, is located at the depth-type filtration
Deep filter in processing equipment shell and positioned at the deep filter bottom, it is filtered liquefied organic for collecting
Second catch tray of object.
Preferably, the filtering velocity of the deep filter is 0.02~0.15m/s.
Preferably, the filter material of the deep filter is glass fabric.
Present invention also provides a kind of processing methods of high boiling point organic compound exhaust gas, comprising:
Condensation process is carried out to the high boiling point organic compound exhaust gas that inlet air temperature is room temperature, to carry out to the organic matter in exhaust gas
Condensation is collected；
Fine mist to diameter in the high boiling point organic compound exhaust gas after condensation process at 0.1 μm to 200 μm carries out
Depth-type filtration；
To depth-type filtration, treated that high boiling point organic compound exhaust gas carries out elution processing, to the gas after depth-type filtration is handled
In organic matter in can be dissolved in the ingredient of water and be purged.
Preferably, depth-type filtration is carried out to the high boiling point organic compound exhaust gas after condensation process, further includes: to passing through
The organic matter filtered in the exhaust gas of trapping is collected.
Preferably, when carrying out depth-type filtration to the high boiling point organic compound exhaust gas, the filtering velocity of deep filter is 0.02~
0.15m/s。
Detailed description of the invention
Fig. 1 is the processing equipment schematic diagram of a kind of pair of high boiling point organic compound exhaust gas in the prior art；
Fig. 2 is processing equipment schematic diagram of one of the embodiment of the present application to high boiling point organic compound exhaust gas；
Fig. 3 is one of the embodiment of the present application depth-type filtration processing equipment schematic diagram；
Fig. 4 is the processing method flow chart of one of the embodiment of the present application high boiling point organic compound exhaust gas.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Referring to FIG. 2, this application provides a kind of high boiling point organic compound waste gas treatment equipments, comprising: be used for higher boiling
Gaseous organic substance in organic compounds is converted to the condensation process equipment 40 of liquid；It is connected to, is used for condensation process equipment 40
Processing by treated the high boiling point organic compound exhaust gas of condensation process equipment 40 depth-type filtration processing equipment 50, wherein depth
Filter plant is used for fine mist of the filter diameter at 0.1 μm to 200 μm；It is connected to depth-type filtration processing equipment 50, for drenching
Wash the elution treatment equipment 60 by treated the high boiling point organic compound exhaust gas of depth-type filtration processing equipment 50；For will be through filtering
Wash processing equipment 60 treated the exhaust blower 70 of high boiling point organic compound exhaust gas discharge.
High boiling point organic compound waste gas treatment equipment in the embodiment of the present application, by the way that condensation process equipment 40, depth is arranged
Filtration processing equipment 50 and elution treatment equipment 60, it is useless to the high boiling point organic compound generated in photoresist lift off process production process
Gas is handled.After the high boiling point organic compound exhaust gas that inlet air temperature is room temperature enters in condensation process equipment 40, at condensation
Under the cryogenic conditions for managing equipment 40, two parts are condensed into the cold in gaseous organic matter and vapor in exhaust gas, a part is
Liquid, another part are fine mist of the diameter at 0.1 μm to 200 μm, these fine mists enter at depth-type filtration with exhaust gas
It manages in equipment 50.Depth-type filtration processing equipment 50 is the equipment that the droplet of sub-micron can be trapped after special processing, can
So that the sub-micron droplet being captured is assembled and constantly becomes larger, finally drip under gravity.Contain high boiling point organic compound
Exhaust gas after the processing of condensation process equipment 40, be condensed into liquid and tiny mist in gaseous high boiling point organic compound in exhaust gas
Drop, but still have the high boiling organic matter of small part not condensed, also it is present in exhaust gas in a manner of gaseous；Since photoresist is shelled
The ethanol amine (MEA) usually used from process, dimethyl sulfoxide (DMSO), butyl (BDG), N-Methyl pyrrolidone
(NMP) it can be dissolved in water, therefore, exhaust gas can remove water-soluble ingredient in exhaust gas after entering elution treatment equipment 60,
The organic concentration in high boiling point organic compound exhaust gas is further decreased, to reach the standard of discharge, is most added afterwards through exhaust blower 70
It is emitted into atmosphere after pressure.
Therefore, the high boiling point organic compound waste gas treatment equipment in the embodiment of the present application, by setting condensation, depth-type filtration and
The equipment of elution can make the operation that high boiling point organic compound exhaust treatment system is efficient, stable, and then thoroughly handle photoresist lift off
The high boiling point organic compound generated in process production process, to achieve the purpose that reduce environmental pollution.
Alternatively, to exhaust gas carry out elution processing when, settable water tank come collect to exhaust gas elution after
Liquid, and the water in water tank repeatedly elutes exhaust gas as circulation fluid, processing cost can be reduced to a certain extent.
Alternatively, condensation process equipment 40 and depth-type filtration processing equipment 50 are set to technology under toilet
In interlayer 20, as shown, photoresist lift off equipment 30 is placed in toilet 10.
Alternatively, condensation process equipment 40 may include condenser and positioned at condenser bottom, for receiving
Collect the first catch tray 41 of liquefied organic matter.Low temperature chilled water without interruption in condenser coil, the supply water temperature of chilled water
It is 4 DEG C~7 DEG C, the heat exchange fin surface of condenser is enabled to be in low-temperature condition always.When the condenser of exhaust gas and low temperature
After heat exchange fin contact, it can liquefy rapidly, the organic matter after liquefaction can fall to the first catch tray 41 along heat exchange fin
It is interior, this usual partially liq distilled, purify after the higher stripper of purity can be obtained, be supplied to photoresist lift off process
It reuses, can not only realize clean manufacturing, can also reduce production cost；Or this partially liq can also be immediately discharged to waste liquid and return
Receipts system or waste water processing station.
Alternatively, reference can be made to Fig. 3, depth-type filtration processing equipment 50 may include: that depth-type filtration processing is set
For shell 51, the deep filter 52 in depth-type filtration processing equipment shell 51 and it is located at 52 bottom of deep filter, use
In the second catch tray 53 for collecting filtered liquefied organic matter.Wherein, depth-type filtration processing equipment shell 51 and depth mistake
The frame of filter 52 can be made by stainless steel；In the present embodiment, deep filter 52 can be tubular, be also possible to other shapes
Formula；Fine mist removal efficiency due to deep filter 52 to diameter greater than 0.1 μm is greater than 95%, at depth-type filtration
It manages equipment 50 substantially all to remove the fine mist after liquefaction, the organic concentration in exhaust gas is effectively reduced.Also, this part
Liquid can be collected by the second catch tray 53, the higher stripper of purity after distillation and purification, can be obtained, for photoresist
Stripping process is reused, and is realized clean manufacturing, is reduced costs；Certainly, this partially liq can also be immediately discharged to waste liquid time
Receipts system or waste water station.
Alternatively, the filtering velocity of deep filter is 0.02~0.15m/s, can effectively filter exhaust gas through condensing
Liquefied fine mist afterwards, so that deep filter is greater than 95% to > 0.1 μm of fine mist removal efficiency.
Alternatively, the filter material of deep filter is glass fabric, it is preferable that glass fabric outer layer covers
There are polypropylene and polyvinyl alcohol film, the droplet of sub-micron can be captured after special processing, so that fine mist is assembled, and in fibre
The point of intersection of dimension constantly becomes larger, and finally drops in the second catch tray 53 from separation in filter material under gravity.
Based on same invention thinking, as shown in figure 4, present invention also provides a kind of processing sides of high boiling point organic compound exhaust gas
Method, comprising the following steps:
S101: condensation process is carried out to the high boiling point organic compound exhaust gas that inlet air temperature is room temperature, to organic in exhaust gas
Object carries out condensation collection；
S102: the fine mist to diameter in the high boiling point organic compound exhaust gas after condensation process at 0.1 μm to 200 μm carries out
Depth-type filtration；
S103: to depth-type filtration, treated that high boiling point organic compound exhaust gas carries out elution processing, handles through depth-type filtration
The ingredient that water can be dissolved in the organic matter in gas afterwards is purged.
The processing method to high boiling point organic compound exhaust gas in the embodiment of the present application, using the filtering of condensation plus depth plus elution
Mode the high boiling point organic compound exhaust gas generated in photoresist lift off process production process is handled.When exhaust gas enters condensation
After in processing equipment 40, high boiling point organic compound and vapor in exhaust gas being capable of liquid in the condenser surface under low-temperature condition
Change, wherein a part of mixed liquor drippage can be collected, it is higher that purity can be obtained after being distilled, being purified in the liquid being collected
Stripper, be supplied to photoresist lift off process reuse, it can be achieved that clean manufacturing, is also beneficial to reduce cost；Separately
A part of diameter can not be collected in 0.1 μm to 200 μm of fine mist, after entering depth-type filtration, at depth-type filtration
It is captured and assembles under the action of reason equipment 50, and drip under gravity；Remaining small part is not condensed in exhaust gas
Organic matter after scrubbed processing, water-soluble part is removed in organic matter.At this point, high boiling point organic compound exhaust gas
After condensation, depth-type filtration and elution processing, the organic concentration in exhaust gas is effectively reduced, environmental pollution is reduced.
Therefore, the processing method of the high boiling point organic compound exhaust gas in the embodiment of the present application, can not only make high boiling point organic compound
Efficient, the stable operation of exhaust treatment system goes back most stripping in exhaust gas recycling to achieve the purpose that reduce environmental pollution
Chaotropic realizes clean manufacturing, and reduces production cost.
Alternatively, depth-type filtration is carried out to the high boiling point organic compound exhaust gas after condensation process, further includes: right
Organic matter in filtered exhaust gas is collected, and the higher stripping of purity can be obtained in this partially liq after being distilled, being purified
Chaotropic is supplied to photoresist lift off process and reuses, it can be achieved that clean manufacturing, is also beneficial to reduce cost.
Alternatively, when carrying out depth-type filtration to high boiling point organic compound exhaust gas, the filtering velocity of deep filter is
0.02~0.15m/s, can effectively fine mist of the filter diameter at 0.1 μm to 200 μm so that deep filter is to > 0.1 μm
Fine mist removal efficiency be greater than 95%.
Obviously, those skilled in the art can carry out various modification and variations without departing from this hair to the embodiment of the present invention
Bright spirit and scope.In this way, if these modifications and changes of the present invention belongs to the claims in the present invention and its equivalent technologies
Within the scope of, then the present invention is also intended to include these modifications and variations.
Claims (9)
1. a kind of high boiling point organic compound waste gas treatment equipment characterized by comprising
For the gaseous organic substance in high boiling point organic compound exhaust gas to be converted to the condensation process equipment of liquid；
It is connected to the condensation process equipment, is useless by the condensation process equipment treated high boiling point organic compound for handling
The depth-type filtration processing equipment of gas, wherein the depth-type filtration equipment is used for tiny mist of the filter diameter at 0.1 μm to 200 μm
Drop；
It is connected to the depth-type filtration processing equipment, for eluting by the depth-type filtration processing equipment treated higher boiling
The elution treatment equipment of organic compounds；
The exhaust blower for high boiling point organic compound exhaust gas discharge that treated for will pass through the elution treatment equipment.
2. high boiling point organic compound waste gas treatment equipment according to claim 1, which is characterized in that the condensation process equipment
It is set under toilet in interlayer with the depth-type filtration processing equipment.
3. high boiling point organic compound waste gas treatment equipment according to claim 1, which is characterized in that the condensation process equipment
Including condenser and positioned at the condenser bottom, the first catch tray for collecting liquefied organic matter.
4. high boiling point organic compound waste gas treatment equipment according to claim 1, which is characterized in that the depth-type filtration processing
Equipment includes: depth-type filtration processing equipment shell, the deep filter in the depth-type filtration processing equipment shell and position
In the deep filter bottom, the second catch tray for collecting filtered liquefied organic matter.
5. high boiling point organic compound waste gas treatment equipment according to claim 4, which is characterized in that the deep filter
Filtering velocity is 0.02~0.15m/s.
6. high boiling point organic compound waste gas treatment equipment according to claim 4, which is characterized in that the deep filter
Filter material is glass fabric.
7. a kind of processing method of high boiling point organic compound exhaust gas characterized by comprising
Condensation process is carried out to the high boiling point organic compound exhaust gas that inlet air temperature is room temperature, to condense to the organic matter in exhaust gas
It collects；
Fine mist to diameter in the high boiling point organic compound exhaust gas after condensation process at 0.1 μm to 200 μm carries out depth
Filtering；
To depth-type filtration, treated that high boiling point organic compound exhaust gas carries out elution processing, to after depth-type filtration is handled in gas
The ingredient that water can be dissolved in organic matter is purged.
8. the processing method of high boiling point organic compound exhaust gas according to claim 7, which is characterized in that after condensation process
The high boiling point organic compound exhaust gas carries out depth-type filtration, further includes: receives to the organic matter in the exhaust gas by trap filter
Collection.
9. the processing method of high boiling point organic compound exhaust gas according to claim 7, which is characterized in that have to the higher boiling
When machine object exhaust gas carries out depth-type filtration, the filtering velocity of deep filter is 0.02~0.15m/s.
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| CN201910672239.6A CN110384995A (en) | 2019-07-24 | 2019-07-24 | A kind of high boiling point organic compound waste gas treatment equipment and its processing method |
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| CN201910672239.6A CN110384995A (en) | 2019-07-24 | 2019-07-24 | A kind of high boiling point organic compound waste gas treatment equipment and its processing method |
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Application publication date: 20191029 |