CN110375705A - Antenna reflector and its type face deformation measurement method and measurement of comparison method - Google Patents
Antenna reflector and its type face deformation measurement method and measurement of comparison method Download PDFInfo
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Abstract
Antenna reflector and its type face deformation measurement method and measurement of comparison method, belong to overall deformation fields of measurement, it is larger currently for the presence of grid reflector type face deformation measurement or deviation in order to solve, or cumbersome and time-consuming and laborious problem, main points are to arrange multiple target spots in reflector type face, the three-dimensional coordinate for measuring target spot, carries out single measurement with deformation displacement of the sensor for the target spot in reflector type face；Reflector type face is divided into multiple fitted areas；The deformation displacement that the coordinate information of target spot in different fitted areas is corresponded to target spot using fitting of a polynomial respectively, the solution of multinomial coefficient is carried out using least square method, obtains fitting function corresponding to every fitted area；The fitting function that the coordinate information of target spot in different zones is substituted into corresponding region, updates and obtains the deformation displacement of corresponding target spot, and effect is to improve its overall deformation measurement accuracy using spatial continuity feature, and can be easy to operate, time saving and energy saving.
Description
Technical field
The invention belongs to overall deformation fields of measurement, are related to a kind of measurement method of antenna-reflected type face deformation.
Background technique
High-precision solid surface antenna reflector, such as grid reflector, be widely used in satellite communication, earth observation and
The fields such as deep space exploration.It needs to keep higher type face precision in the operating condition, is just able to satisfy the requirement of its working frequency,
However influenced by factors such as space thermal force, structural relaxation and material creeps, it will lead to reflector type face and deform, make it
Type face accuracy decline needs to measure the deformation of its type face and is adjusted.
It is right at present often using the method for using photogrammetric equal sensors single measurement or more measurements to take mean value
The deformation of reflector type face is determined, however is limited to the measurement accuracy of sensor, and the value of single measurement always has certain deviation
, and use and the method that is averaged of measurement is repeated several times is able to ascend measurement accuracy, but this method concrete operations it is cumbersome and
It is time-consuming and laborious, especially for reflector type face dynamic deformation in the case where, do not have repeatedly measurement and take the condition of mean value.
Summary of the invention
It is larger or cumbersome and time-consuming currently for the presence of antenna-reflected type face deformation measurement or deviation in order to solve
Laborious problem, the present invention propose a kind of antenna-reflected type face deformation measurement method, and this method step in measurement is simple, energy
It is enough time saving and energy saving, and measurement accuracy is high, and further solves the problem of reflector type face dynamic deformation measures.
In order to achieve the above object, the following technical solutions are proposed: a kind of antenna-reflected type face deformation measurement side by the present invention
Method includes the following steps:
S1. multiple target spots are arranged in reflector type face, measures the three-dimensional coordinate of target spot, coordinate origin is placed in reflector
Type face center, Z axis parallel reflectors out-of-plane deformation direction, X/Y plane is perpendicular to Z axis, with sensor for the target in reflector type face
The Z-direction deformation displacement dz of point carries out single measurement；
S2. according to the surface-type feature of reflector and due to fitting demand target spot quantity, reflector type face is divided into more
A fitted area；
S3., the X of target spot, Y axis coordinate information in different fitted areas are corresponded to the Z axis of target spot using fitting of a polynomial respectively
Direction distortion is displaced dz, and the solution of multinomial coefficient is carried out using least square method, obtains intending corresponding to every fitted area
Close function；
S4., the fitting function that the coordinate information of the X of target spot in different zones, Y-axis are substituted into corresponding region, updates and obtains
The Z-direction deformation displacement dz of corresponding target spot.
Further, by taking grid reflector as an example, grid reflector is regular hexagon, and multiple groove installations are arranged in back
PZT piezoelectric actuator, since grid reflector rear channel affects the continuity in its monolithic devices face, so according to point of groove
Grid reflector is divided into several small delta-shaped regions by cloth, and adjacent several small triangles are integrated into a triangle fitting
Region, so that six triangle fitted areas that the grid reflector of regular hexagon has shape essentially identical, and each fitting
Region has the vertex of intersection, and fitted area is distributed with this vertex in inverted triangle, and target spot quantity is more than 10 in each fitted area
It is a.
Further, by taking grid reflector as an example, the area in grid reflector type face is 0.311 square metre, 30 PZT pressures
Motor-driven cylinder is mounted in the U-type groove at reflector back, and grid reflector front is disposed with the target that 178 diameters are 1.6 centimetres
Point measures target coordinate using DIC, grid reflector is divided into 24 small delta-shaped regions according to the distribution of groove, by four
A adjacent small triangle is integrated into 1 fitted area, so that the grid reflector of regular hexagon has essentially identical six of shape
A triangle fitted area, and each fitted area has the vertex of intersection, fitted area is distributed with this vertex in inverted triangle, often
Target spot quantity is 28~32 in a fitted area.
Further, the fitting using quadratic polynomial be fitted, if in a certain fitted area any target spot Z axis side
To deformation displacement dzi=f (xi,yi) write as:
When having n target spot in a certain region, n equation is arranged:
A in above formula20、a02、a11、a10、a01、a00For fitting coefficient to be solved, (xi,yi) it is target spot in X/Y plane
Two-dimensional coordinate, dziIt is target spot along the deformation displacement of Z-direction, RiFor residual error, fitting coefficient a appropriate is chosenijMake the flat of residual error
Fang HeReach minimum value, obtains polynomial fit function and then by the (x of n target spoti,yi) coordinate substitution fitting letter
Number, updates the Z-direction deformation displacement dz for corresponding to target spot outi。
Further, described to choose fitting coefficient a appropriateijMake the quadratic sum of residual errorReach minimum value, specific side
Formula is to ask respectivelyTo the partial derivative of all fitting coefficients, can solve when to enable all partial derivatives be 0 to fitting coefficient.
The invention further relates to a kind of grid reflectors, are regular hexagon grid reflectors, and projection bore is 0.6 meter, face
Product is 0.311 square metre, and 30 PZT piezoelectric actuators are mounted in the U-type groove at reflector back, grid reflector front arrangement
Having 178 diameters is 1.6 centimetres of target spot, measures target coordinate using DIC, is divided grid reflector according to the distribution of groove
For 24 small delta-shaped regions, four adjacent small triangles are integrated into 1 fitted area, so that the grid of regular hexagon reflects
Six triangle fitted areas that device has shape essentially identical, and each fitted area has the vertex of intersection, fitted area
It being distributed with this vertex in inverted triangle, target spot quantity is 30 in each fitted area, and with one or two fitted area
Target spot lazy weight 30.
The present invention also relates to a kind of antenna-reflected type face deformation contrast measurement method, using regular hexagon grid reflector,
It is 0.6 meter that it, which projects bore, 30 PZT piezoelectric actuators is mounted in the U-type groove at reflector back, cloth on grid reflector
It is equipped with the target spot that 178 diameters are 1.6 centimetres, using DIC systematic survey target coordinate, DIC the measuring precision is 20um+
Grid reflector is divided into 24 small delta-shaped regions according to the distribution of groove by 10um/m, and four adjacent small triangles are whole
It is combined into 1 fitted area, so that six triangle fitted areas that the grid reflector of regular hexagon has shape essentially identical,
And each fitted area has the vertex of intersection, fitted area is distributed with this vertex in inverted triangle, target spot in each fitted area
Quantity is 30, and target spot lazy weight 30 with one or two fitted area, arranges multiple targets in reflector type face
Point, measures the three-dimensional coordinate of target spot, and coordinate origin is placed in the type face center of reflector, Z axis parallel reflectors out-of-plane deformation side
To X/Y plane is perpendicular to Z axis；
By DIC system duplicate measurements 50 times under original state, target spot data are recorded, coordinate origin o is located in reflector
The heart, Z axis along deformation direction outside slotted-type reflector surface perpendicular to reflector level, and to the number of PZT piezoelectric actuator；
2 target spots are randomly selected from 178 target spots, in its initial state 50 Z axis coordinates of duplicate measurements, after observation
The Z axis coordinate and measure the difference between obtained obtained Z axis coordinate for the first time that 49 measurements obtain；Take the Z of 50 measurements
The average value of axial coordinate is as the measured value under current state；
Two kinds of operating conditions are set,
Operating condition 1: choosing two actuator and apply 150 volts of voltages respectively, and repeats current state measurement 50 times and take mean value；
Operating condition 2: choosing four actuator and apply 150 volts of voltages respectively, and repeats current state measurement 50 times and take mean value；
Subtract each other to obtain the mark of the type face under two kinds of operating condition current states with the average value of the lower 50 measurements Z axis coordinate of original state
Quasi- deformation data draws cloud atlas；
Certain Z axis coordinates measurements is randomly choosed from operating condition 1, operating condition 2 subtracts original state Z axis of lower first time coordinate
Measured value obtains the type face deformation data of grid reflector single measurement, draws cloud atlas；
The lower reflector type face phenotypic criteria cloud atlas of operating condition 1, operating condition 2 and single measurement reflector type face Aberration nephogram are compared,
The difference of the reflector type face deformation of record single measurement and the reflector type face deformation for taking mean value repeatedly measured；
Reflector type face is divided into multiple quasi- by the target spot quantity of demand according to the surface-type feature of reflector and due to fitting
Region is closed, the X of target spot, Y axis coordinate information in different fitted areas are corresponded to the Z-direction of target spot using fitting of a polynomial respectively
Deformation displacement dz is carried out the solution of multinomial coefficient using least square method, obtains fitting letter corresponding to every fitted area
Number；
By operating condition 1, the data of 2 single measurement of operating condition, the target coordinate in every piece of region is respectively adopted secondary multinomial
Formula carry out surface fitting, if in a certain fitted area any target spot Z-direction deformation displacement dzi=f (xi,yi) write as:
When having n target spot in a certain region, n equation is arranged:
A in above formula20、a02、a11、a10、a01、a00For fitting coefficient to be solved, (xi,yi) it is target spot in X/Y plane
Two-dimensional coordinate, dziIt is target spot along the deformation displacement of Z-direction, RiFor residual error, fitting coefficient a appropriate is chosenijMake the flat of residual error
Fang HeReach minimum value, obtains polynomial fit function and then by the (x of n target spoti,yi) coordinate substitution fitting letter
Number, updates the Z-direction deformation displacement dz for corresponding to target spot outi；
Drawing indicates the Z-direction deformation displacement of fitting correspondence target spot and repeatedly measures the Z-direction being averaged
The error amount of deformation displacement；
It calculates all target spot Z-direction deformation displacements of single measurement in operating condition 1 and repeatedly measures Z-direction deformation displacement
All target spot Z-direction deformation displacements after taking the mean error and single measurement fitting in the case of mean value and repeatedly measurement Z axis
Direction distortion displacement takes the mean error in the case of mean value；
It calculates all target spot Z-direction deformation displacements of single measurement in operating condition 2 and repeatedly measures Z-direction deformation displacement
All target spot Z-direction deformation displacements after taking mean error and the single measurement fitting in the case of mean value and repeatedly measuring take
Mean error in the case of mean value；
Data after fitting are drawn into reflector type face Aberration nephogram；
Reflector type face Aberration nephogram after operating condition 1,2 single measurement of operating condition fitting, compared to the reflection after single measurement
Type face Aberration nephogram is closer to operating condition 1, operating condition more than 2 times and measures the standard transformations cloud atlas for taking mean value；
Operating condition 1,2 single measurement reflector type face Aberration nephograms and single measurement fitting back reflection type face are deformed into cloud
Figure takes the standard transformations cloud atlas of mean value to subtract each other to obtain type face distortion inaccuracy cloud atlas and compare with multiple measurement respectively；Compare operating condition
1, the reflector type surface error after the reflector type surface error of 2 single measurement of operating condition and single measurement are fitted.
The utility model has the advantages that the present invention is first according to the surface-type feature of reflector and using fitting of a polynomial for target spot quantity
Type face is divided into the region of suitable size by demand, and the coordinate information of target spot in different zones is then used multinomial respectively
It is fitted the deformation displacement of corresponding target spot, obtains corresponding fitting function, then again by the coordinate substitution pair of target spot in different zones
The fitting function answered updates the deformation displacement of corresponding target spot, can either effectively reduce sensing by way of to data processing
The deviation of device single measurement is improved reflector type face overall deformation measurement accuracy, i.e., is mentioned using the spatial continuity feature of deformation
Its high overall deformation measurement accuracy, and can be easy to operate, it is time saving and energy saving.It solves and measures caused operation due to being repeated several times
The not high problem of cumbersome and time-consuming and laborious problem and single measurement precision, the present disclosure additionally applies for reflector dynamic deformation process
In the precision measure of type face can not carry out multiplicating degree measurement in such cases and take mean value, can only single measurement, the present invention
The deviation of single measurement can be further suppressed, the measurement accuracy in structure monolithic devices face is improved, it can for dynamic deformation measurement
It carries out applicable, and guarantees measurement accuracy.The present invention can also be applied to the profile measurement of the surface deformation of general structure.
Detailed description of the invention
Fig. 1 grid reflector back schematic diagram
Fig. 2 grid reflector type face zoning plan
Fig. 3 coordinate system schematic diagram
Fig. 4 PZT piezoelectric actuator distribution map
More than 1 measurement differential chart of Fig. 5 random point
More than 2 measurement differential charts of Fig. 6 random point
1 reflector type face standard transformations figure of Fig. 7 operating condition
2 reflector type face standard transformations figure of Fig. 8 operating condition
1 single measurement reflector type face deformation pattern of Fig. 9 operating condition
2 single measurement reflector type face deformation pattern of Figure 10 operating condition
1 preceding 89 target spot fitting front and back of Figure 11 operating condition takes the Error Graph of mean value with repeatedly measurement
89 target spot fitting front and backs take the Error Graph of mean value with repeatedly measurement after Figure 12 operating condition 1
2 preceding 89 target spot fitting front and backs of Figure 13 operating condition take the Error Graph of mean value with repeatedly measurement
89 target spot fitting front and backs take the Error Graph of mean value with repeatedly measurement after Figure 14 operating condition 2
1 single measurement of Figure 15 operating condition is fitted back reflection type face deformation pattern
2 single measurement of Figure 16 operating condition is fitted back reflection type face deformation pattern
1 single measurement reflector type surface error figure of Figure 17 operating condition
1 single measurement of Figure 18 operating condition is fitted rear reflector surface contour error figure
2 single measurement reflector type surface error of Figure 19 operating condition
2 single measurement of Figure 20 operating condition is fitted rear reflector surface contour error.
Specific embodiment
Embodiment 1: the present embodiment record it is a kind of based on grid reflector type face deformation measurement method, can be realized for
Spatial continuity feature improves overall deformation measurement accuracy, comprising the following steps:
S1: multiple target spots, as far as possible target spot density in promotion unit area are arranged in reflector type face, utilize sensor
The three-dimensional coordinate of target spot is measured, coordinate origin is placed in structural type face center, and Z axis is parallel to type face large deformation direction, the big change
Shape direction has uniqueness, and for X/Y plane perpendicular to Z axis, the small deformation occurred in X/Y plane influences grid reflector performance
It is faint, therefore the present embodiment does not give consideration.
S2: according to the surface-type feature of structure and using fitting of a polynomial for the demand of target spot quantity, type face is divided
For the fitted area of six triangles.Grid reflector is regular hexagon, and area is 0.311 square metre, and front is pasted with 178
Target spot, back is arranged 30 grooves and installs PZT piezoelectric actuator, since grid reflector rear channel affects its monolithic devices face
Continuity, so grid reflector is divided into 24 small delta-shaped regions according to the distribution of groove, but consider small triangle
10 data requirementss for being difficult to meet fitting of a polynomial of target spot lazy weight in shape region, so four small triangles are integrated into
1 fitted area, target spot quantity is about 30 or so in each fitted area, it is specific as shown in Figure 1, 2.
S3: the X of target spot, Y axis coordinate information in different zones are corresponded to the Z-direction of target spot using fitting of a polynomial respectively
Deformation displacement dz is carried out the solution of multinomial coefficient based on least square method, obtains fitting function corresponding to every panel region.
S4: the X of target spot in different zones, Y axis coordinate in S2 are substituted into corresponding fitting function, update the Z axis of target spot out
Direction distortion is displaced dz.
Further, single measurement is carried out for target spot on reflector type face with sensor first, then according to type face spy
Sign, and type face is divided into for the demand of target spot quantity using fitting of a polynomial by sufficiently small region, it respectively will not same district
The X of target spot, Y axis coordinate information correspond to the Z-direction deformation displacement dz of target spot using fitting of a polynomial in domain.
By using quadratic polynomial fitting for, if in a certain region any target spot Z-direction deformation displacement dzi=f
(xi,yi) can be write as:
When having n target spot in a certain region, n equation can be arranged:
A in above formula20、a02、a11、a10、a01、a00For fitting coefficient to be solved, (xi,yi) it is target spot in X/Y plane
Two-dimensional coordinate, dziIt is target spot along the deformation displacement of Z-direction, RiFor residual error, fitting coefficient a appropriate is chosenijMake the flat of residual error
Fang HeReach minimum value, concrete mode is to ask respectivelyTo the partial derivative of all fitting coefficients, all partial derivatives are enabled to be
It can solve when 0 to fitting coefficient.Obtain polynomial fit function and then by the (x of n target spoti,yi) coordinate substitution fitting
Function updates the Z-direction deformation displacement dz for corresponding to target spot outi。
The measurement method of the present embodiment has the effect that (1) prior art using sensor on reflector type face
Target spot be under same state carry out be repeated several times measurement when, the measured value of same target spot will be fluctuated in a certain value environs,
Depending on the value is the average value that measurement is repeated several times, and specific deviation situation wants view sensor measurement accuracy.It is repeated several times and surveys
The method for measuring average value is undoubtedly the most accurately, and the very complicated but concrete operations are got up is time-consuming and laborious, and for structure
For the case where type face is deformed, structure can not be under same state and carry out multiplicating measurement.The present embodiment will be pre-
The data of first single measurement are handled, and target spot on type face is carried out region division, is carried out to the target spot data on each region
Fitting of a polynomial updates data new out, can effectively reduce the deviation of single measurement, improves reflector type face overall deformation
Measurement accuracy.Thoroughly solve under the situation static for reflector, it is cumbersome and time-consuming take since measurement is repeated several times
Power problem and single measurement are again since the limitation of sensor accuracy class has the problem of certain deviation.(2) the present embodiment is especially
Type face precision measure problem suitable for reflector dynamic deformation process can not carry out the survey of multiplicating degree in such cases
Measure mean value, can only single measurement, the deviation of single measurement can further be inhibited using the present invention, improve structure monolithic devices
The measurement accuracy in face.
Embodiment 2: the present embodiment is by measuring sensor single measurement and repeatedly the method being averaged as a comparison
Example, compares with measurement method of the invention, by experimental result, shows that method of the invention can either effectively reduce biography
The deviation of sensor single measurement improves reflector type face overall deformation measurement accuracy, i.e., improves it using spatial continuity feature
Overall deformation measurement accuracy, and can be easy to operate, it is time saving and energy saving.
By taking regular hexagon grid reflector as an example, projection bore is 0.6 meter, and 30 PZT piezoelectric actuators are mounted on
In the U-type groove at reflector back, the target spot that 178 diameters are 1.6 centimetres is disposed on grid reflector.Using DIC (three-dimensional light
Learn speckle system) measurement target coordinate, which is 20um+10um/m.Such as Fig. 1, according to the distribution of groove by lattice
Grid reflector is divided into 24 small delta-shaped regions, and four adjacent small triangles are integrated into 1 fitted area by such as Fig. 2, so that
Six triangle fitted areas that the grid reflector of regular hexagon has shape essentially identical, and each fitted area has phase
The vertex of friendship, fitted area are distributed with this vertex in inverted triangle, and target spot quantity is 30 in each fitted area, select one to intend
It closes region and distributes 28 target spots.
Multiple target spots are arranged in reflector type face, are measured the three-dimensional coordinate of target spot, are repeated to survey by DIC system under original state
Amount 50 times records target spot data, and establishment of coordinate system is illustrated in fig. 3 shown below, and coordinate origin o is located at reflector center, and Z axis is along anti-
Emitter out-of-plane deformation direction provides the number distribution of PZT piezoelectric actuator, such as Fig. 4 perpendicular to reflector level.
From being randomly selected in 178 target spots in terms of 2 target spots under its original state at duplicate measurements 50 times, measure for latter 49 times
The difference with first time measurement of the Z axis coordinate arrived, as shown below.
Measured value, which is repeated several times, it can be seen that being limited to sensor accuracy class from Fig. 5,6, under same state also has
Certain deviation, taking the average value of 50 measurements at this time as the measured value under current state is optimal selection.
Two kinds of operating conditions are set, operating condition 1: applying 150 volts of voltages respectively to A2, B2 actuator, and repeat current state 50 times
Take mean value；Operating condition 2: apply 150 voltages respectively to A2, B2, A9, B9 actuator, and repeat to take mean value current state 50 times.With it is first
Average value is repeatedly measured under beginning state and subtracts each other to obtain type face standard transformations data under two kinds of operating condition current states, such as Fig. 7,8 institutes
Show.
Randomly choosed from operating condition 1,2 certain measured value subtract original state measured value of lower first time obtain grid reflection
The type face deformation data of device single measurement, as shown in Figures 9 and 10.
By comparing the lower reflector type face phenotypic criteria cloud atlas of operating condition 1,2 and single measurement reflector type face Aberration nephogram,
This it appears that the reflector type face deformation of single measurement takes the reflector type face of mean value to deform with repeatedly measurement larger difference
It is different.
Target spot is divided into six pieces of regions according to reflector type region feature by the target spot on reflector type face, in every piece of region
Target spot number average value 30 or so.Data based on operating condition 1,2 single measurements, the target coordinate in every piece of region is respectively adopted
Quadratic polynomial carries out surface fitting.If the Z-direction deformation displacement dz of any target spot in a certain regioni=f (xi,yi) can be with
It is write as:
When having n target spot in a certain region, n equation can be arranged:
Claim RiFor residual error, fitting coefficient a appropriate is chosenijMake the quadratic sum of residual errorReach minimum value.It obtains multinomial
Formula fitting function and then by the (x of n target spoti,yi) coordinate substitution fitting function, update the Z-direction change for corresponding to target spot out
Morpheme moves dzi。
Figure 11,12, which show the Z-direction deformation displacement of the fitting correspondence target spot of operating condition 1 and repeatedly measure, to be averaged
Z-direction deformation displacement error amount.
1 operating condition of table, 1 target spot fitting front and back distortion inaccuracy
All target spot Z-direction deformation displacements of single measurement averagely miss in the case of taking mean value with multiple measurement in operating condition 1
Difference is 11.762 microns, and all target spot Z-direction deformation displacements and multiple measurement after single measurement fitting take mean value situation
Lower mean error is 7.112 microns.
2 operating condition of table, 2 target spot fitting front and back distortion inaccuracy
Figure 13,14, which show the Z-direction deformation displacement of the fitting correspondence target spot of operating condition 1 and repeatedly measure, to be averaged
Z-direction deformation displacement error amount.
All target spot Z axis numerical value of single measurement and multiple measurement take the mean error in the case of mean value to be in operating condition 2
11.426 microns, and all target spot Z axis numerical value after single measurement fitting and repeatedly measure and take the mean error in the case of mean value to be
6.861 micron.
Data after fitting are drawn into Aberration nephogram, as shown in Figure 15,16.
According to the reflector type face Aberration nephogram after operating condition 1,2 single measurements fitting, it can be seen that compared to single measurement
Reflector type face Aberration nephogram afterwards is closer to operating condition 1, measures the standard transformations cloud atlas for taking mean value more than 2 times.By operating condition 1,
2 single measurement reflector type face Aberration nephograms and single measurement are fitted back reflection type face Aberration nephogram, measure respectively with multiple
The standard transformations cloud atlas of mean value is taken to subtract each other to obtain type face distortion inaccuracy cloud atlas and compare, as shown in figures 17 to 20.By comparing operating condition
1, the reflector type surface error after the reflector type surface error of 2 single measurements and single measurement are fitted, it can be clearly seen that use
The method invented herein can effectively reduce deviation caused by single measurement, effective to improve structure overall deformation measurement essence
Degree.
The preferable specific embodiment of the above, only the invention, but the protection scope of the invention is not
It is confined to this, anyone skilled in the art is in the technical scope that the invention discloses, according to the present invention
The technical solution of creation and its inventive concept are subject to equivalent substitution or change, should all cover the invention protection scope it
It is interior.
Claims (7)
1. a kind of antenna-reflected type face deformation measurement method, which comprises the steps of:
S1. multiple target spots are arranged in reflector type face, measures the three-dimensional coordinate of target spot, coordinate origin is placed in the type face of reflector
Center, Z axis parallel reflectors out-of-plane deformation direction, X/Y plane is perpendicular to Z axis, with sensor for the target spot in reflector type face
Z-direction deformation displacement dz carries out single measurement；
S2. according to the surface-type feature of reflector and due to fitting demand target spot quantity, reflector type face is divided into multiple quasi-
Close region；
S3., the X of target spot, Y axis coordinate information in different fitted areas are corresponded to the Z-direction of target spot using fitting of a polynomial respectively
Deformation displacement dz is carried out the solution of multinomial coefficient using least square method, obtains fitting letter corresponding to every fitted area
Number；
S4., the fitting function that the coordinate information of the X of target spot in different zones, Y-axis are substituted into corresponding region, updates and is corresponded to
The Z-direction deformation displacement dz of target spot.
2. antenna-reflected type as described in claim 1 face deformation measurement method, which is characterized in that grid reflector is positive six
Side shape, back is arranged multiple grooves and installs PZT piezoelectric actuator, since grid reflector rear channel affects its monolithic devices face
Continuity will be adjacent several small so grid reflector is divided into several small delta-shaped regions according to the distribution of groove
Triangle is integrated into a triangle fitted area, so that the grid reflector of regular hexagon has essentially identical six of shape
Triangle fitted area, and each fitted area has the vertex of intersection, fitted area is distributed with this vertex in inverted triangle, each
Target spot quantity is more than 10 in fitted area.
3. antenna-reflected type as claimed in claim 2 face deformation contrast measurement method, which is characterized in that grid reflector type
The area in face is 0.311 square metre, and 30 PZT piezoelectric actuators are mounted in the U-type groove at reflector back, and grid reflector is just
Face is disposed with the target spot that 178 diameters are 1.6 centimetres, measures target coordinate using DIC, is reflected grid according to the distribution of groove
Device is divided into 24 small delta-shaped regions, four adjacent small triangles is integrated into 1 fitted area, so that the lattice of regular hexagon
Six triangle fitted areas that grid reflector has shape essentially identical, and each fitted area has the vertex of intersection, intends
It closes region to be distributed with this vertex in inverted triangle, target spot quantity is 28~32 in each fitted area.
4. antenna-reflected type as described in claim 1 face deformation contrast measurement method, which is characterized in that the fitting is adopted
Be fitted with quadratic polynomial, if in a certain fitted area any target spot Z-direction deformation displacement dzi=f (xi,yi) write as:
dzi=f (xi,yi)=a20xi 2+a02yi 2+a11xiyi+a10xi+a01yi+a00
When having n target spot in a certain region, n equation is arranged:
A in above formula20、a02、a11、a10、a01、a00For fitting coefficient to be solved, (xi,yi) it is two dimension of the target spot in X/Y plane
Coordinate, dziIt is target spot along the deformation displacement of Z-direction, RiFor residual error, fitting coefficient a appropriate is chosenijMake the quadratic sum of residual errorReach minimum value, obtains polynomial fit function and then by the (x of n target spoti,yi) coordinate substitution fitting function, more
It is new to go out to correspond to the Z-direction deformation displacement dz of target spoti。
5. antenna-reflected type as claimed in claim 3 face deformation measurement method, which is characterized in that described to choose appropriate intend
Collaboration number aijMake the quadratic sum of residual errorReach minimum value, concrete mode is to ask respectivelyTo the inclined of all fitting coefficients
Derivative, enable all partial derivatives be 0 when can solve to fitting coefficient.
6. a kind of antenna reflector, which is characterized in that be regular hexagon grid reflector, projection bore is 0.6 meter, and area is
0.311 square metre, 30 PZT piezoelectric actuators are mounted in the U-type groove at reflector back, and grid reflector front is disposed with
The target spot that 178 diameters are 1.6 centimetres measures target coordinate using DIC, is divided into grid reflector according to the distribution of groove
Four adjacent small triangles are integrated into 1 fitted area, so that the grid reflector of regular hexagon by 24 small delta-shaped regions
With six essentially identical triangle fitted areas of shape, and each fitted area has a vertex of intersection, fitted area with
This vertex is distributed in inverted triangle, and target spot quantity is 30 in each fitted area, and the target with one or two fitted area
Point lazy weight 30.
7. a kind of antenna-reflected type face deformation contrast measurement method, which is characterized in that
Using regular hexagon grid reflector, projecting bore is 0.6 meter, and 30 PZT piezoelectric actuators are mounted on reflector
In the U-type groove at back, the target spot that 178 diameters are 1.6 centimetres is disposed on grid reflector, using DIC systematic survey target spot
Coordinate, DIC the measuring precision are 20um+10um/m, and grid reflector is divided into 24 small triangles according to the distribution of groove
Four adjacent small triangles are integrated into 1 fitted area by shape region, so that the grid reflector of regular hexagon has shape base
This identical six triangle fitted area, and each fitted area has the vertex of intersection, fitted area is with this vertex in
Angular distribution, target spot quantity is 30 in each fitted area, and the target spot lazy weight with one or two fitted area
30, multiple target spots are arranged in reflector type face, measure the three-dimensional coordinate of target spot, coordinate origin is placed in the type face of reflector
The heart, Z axis parallel reflectors out-of-plane deformation direction, X/Y plane is perpendicular to Z axis；
By DIC system duplicate measurements 50 times under original state, target spot data are recorded, coordinate origin o is located at reflector center, Z
Axis along deformation direction outside slotted-type reflector surface perpendicular to reflector level, and to the number of PZT piezoelectric actuator；
2 target spots are randomly selected from 178 target spots, in its initial state 50 Z axis coordinates of duplicate measurements, 49 times after observation
It measures obtained Z axis coordinate and measures the difference between obtained obtained Z axis coordinate for the first time；The Z axis of 50 measurements is taken to sit
Target average value is as the measured value under current state；
Two kinds of operating conditions are set,
Operating condition 1: choosing two actuator and apply 150 volts of voltages respectively, and repeats current state measurement 50 times and take mean value；
Operating condition 2: choosing four actuator and apply 150 voltages respectively, and repeats current state measurement 50 times and take mean value；
Subtract each other to obtain the type face standard under two kinds of operating condition current states with the average value of the lower 50 measurements Z axis coordinate of original state to become
Cloud atlas is made in graphic data；
Certain Z axis coordinates measurements is randomly choosed from operating condition 1, operating condition 2 subtracts original state Z axis of lower first time measurement of coordinates
Value obtains the type face deformation data of grid reflector single measurement, and cloud atlas is made；
Compare the lower reflector type face phenotypic criteria cloud atlas of operating condition 1, operating condition 2 and single measurement reflector type face Aberration nephogram, record
The difference of the reflector type face deformation of single measurement and the reflector type face deformation for taking mean value repeatedly measured；
The target spot quantity of demand, is divided into multiple fitting areas for reflector type face according to the surface-type feature of reflector and due to fitting
Domain is respectively deformed the X of target spot, Y axis coordinate information in different fitted areas using the Z-direction that fitting of a polynomial corresponds to target spot
It is displaced dz, the solution of multinomial coefficient is carried out using least square method, obtains fitting function corresponding to every fitted area；
By operating condition 1, the data of 2 single measurement of operating condition, by the target coordinate in every piece of region be respectively adopted quadratic polynomial into
Row surface fitting, if in a certain fitted area any target spot Z-direction deformation displacement dzi=f (xi,yi) write as:
dzi=f (xi,yi)=a20xi 2+a02yi 2+a11xiyi+a10xi+a01yi+a00
When having n target spot in a certain region, n equation is arranged:
A in above formula20、a02、a11、a10、a01、a00For fitting coefficient to be solved, (xi,yi) it is two dimension of the target spot in X/Y plane
Coordinate, dziIt is target spot along the deformation displacement of Z-direction, RiFor residual error, fitting coefficient a appropriate is chosenijMake the quadratic sum of residual errorReach minimum value, obtains polynomial fit function and then by the (x of n target spoti,yi) coordinate substitution fitting function, more
It is new to go out to correspond to the Z-direction deformation displacement dz of target spoti；
Drawing indicates that the Z-direction deformation displacement of fitting correspondence target spot is deformed with the Z-direction being averaged repeatedly is measured
The error amount of displacement；
It calculates all target spot Z-direction deformation displacements of single measurement in operating condition 1 and repeatedly measurement Z-direction deforming position pipettes
All target spot Z-direction deformation displacements and repeatedly measurement Z-direction after mean error and single measurement fitting in the case of value
Deforming position pipettes the mean error in the case of mean value；
It calculates all target spot Z-direction deformation displacements of single measurement in operating condition 2 and repeatedly measurement Z-direction deforming position pipettes
All target spot Z-direction deformation displacements after mean error and single measurement fitting in the case of value take mean value with repeatedly measurement
In the case of mean error；
Data after fitting are drawn into reflector type face Aberration nephogram；
Reflector type face Aberration nephogram after operating condition 1,2 single measurement of operating condition fitting, compared to the reflector type after single measurement
Face Aberration nephogram is closer to operating condition 1, operating condition more than 2 times and measures the standard transformations cloud atlas for taking mean value；
Operating condition 1,2 single measurement reflector type face Aberration nephograms and single measurement are fitted back reflection type face Aberration nephogram, point
The standard transformations cloud atlas of mean value is not taken to subtract each other to obtain type face distortion inaccuracy cloud atlas and compare with multiple measurement；Compare operating condition 1, operating condition
Reflector type surface error after the reflector type surface error of 2 single measurements and single measurement fitting.
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