CN110335846A - Chip tightens the device and method picked manually - Google Patents

Chip tightens the device and method picked manually Download PDF

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Publication number
CN110335846A
CN110335846A CN201910563886.3A CN201910563886A CN110335846A CN 110335846 A CN110335846 A CN 110335846A CN 201910563886 A CN201910563886 A CN 201910563886A CN 110335846 A CN110335846 A CN 110335846A
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CN
China
Prior art keywords
bracket
supporting support
tensioning shaft
lever
screw
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910563886.3A
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Chinese (zh)
Other versions
CN110335846B (en
Inventor
彭建学
赵传洲
王辉
崔玲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
QINGDAO AEROSPACE SEMICONDUCTOR RESEARCH INSTITUTE Co Ltd
Original Assignee
QINGDAO AEROSPACE SEMICONDUCTOR RESEARCH INSTITUTE Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Priority to CN202110229205.7A priority Critical patent/CN112908929B/en
Priority to CN201910563886.3A priority patent/CN110335846B/en
Publication of CN110335846A publication Critical patent/CN110335846A/en
Application granted granted Critical
Publication of CN110335846B publication Critical patent/CN110335846B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68735Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

Abstract

The present invention relates to chips to tighten the device and method picked manually, it includes that chip tightens the device picked manually, including lower plate, lower plate pillar I, lower plate pillar II, lever, lever bracket, lever adjusting nut, lever adjusts bolt, upper mounted plate pillar, upper mounted plate, adjustable compact heap, height adjustment thick stick, lower frame bottom plate, dextrorotation bracket I, left-handed bracket I, tensioning shaft I, axis supporting support I, axis supporting support II, dextrorotation bracket I, left-handed bracket I, tensioning shaft II, axis supporting support III, axis supporting support IV, heat lamp, heat lamp fixed plate, tensioning shaft nut I, tensioning shaft nut II, screw axis, and limit for height screw;The present invention has rational design, compact-sized and easy to use.

Description

Chip tightens the device and method picked manually
Technical field
The present invention relates to chips to tighten the device and method picked manually.
Background technique
At present, manually picking up piece is mainly to use tweezers, vacuum WAND or other tools by the single chip of very small dimensions by hand It is pressed from both sides out from the chip array of dense arrangement, chip is sticked on special mucous membrane in operating process, and mucous membrane can pass through any special measures Dispergation reduces adhesion strength, very close to each other although chip is still adjacent to film by dispergation, and tweezers or other tools are by chip gripper Rise it is highly difficult, easily cause scuffing, chipping, unfilled corner.Disadvantages described above is caused in order to reduce, existing mode of operation is following two: One, chip ring peripheral edge chip is destroyed, then picks chip from destruction place with tweezers, but the drawbacks of operation is as follows: 1, Waste edge chip;2, chip chamber when being picked with tweezers, be easy to cause scuffing, chipping, unfilled corner away from too small.Two, simple work Dress, production bulb protrusion, chip film is placed above, required chip is jacked up, is haved the function that and UF membrane.But the operation Risk and drawback are as follows: 1, can not fixed core loop, needing to be pushed chip ring with hand could will by film and lower section projection contacts Chip and UF membrane, separating effect is bad, will directly affect and picks up piece quality;2, due to protrusion, difficulty is brought to using microscope, Influence defective locations judgement.
Summary of the invention
The technical problems to be solved by the invention are generally speaking to provide a kind of chip and tighten the device picked manually and side Method.The present invention solves the waste of edge chip;Chip chamber when being picked with tweezers, be easy to cause scuffing, chipping, unfilled corner away from too small; Raised tooling chip and membrane separating effect are bad;Raised tooling microscope defective locations judgement.
To solve the above problems, the technical solution used in the present invention is:
A kind of chip tightens the device picked manually, and the device picked manually, including lower plate, lower plate branch are tightened including chip Column I, lower plate pillar II, lever, lever bracket, lever adjusting nut, lever adjust bolt, upper mounted plate pillar, upper mounted plate, Adjustable compact heap, height adjustment thick stick, lower frame bottom plate, dextrorotation bracket I, left-handed bracket I, tensioning shaft I, axis supporting support I, axis support Bracket II, dextrorotation bracket I, left-handed bracket I, tensioning shaft II, axis supporting support III, axis supporting support IV, heat lamp, heat lamp are fixed Plate, tensioning shaft nut I, tensioning shaft nut II, screw axis and limit for height screw;
Lower plate pillar I is installed on lower plate lower end, and is fixed by screw;Lower plate pillar II is installed on lower plate, and It is fixed by screw;Lever cross screw axis is articulated on the lever bracket of lower plate lower end, and is rotated around articulated shaft;Lever Adjusting nut is bolted with lever adjusting, and lever adjusts bolt and is connected on lower plate vertically by screw thread, and lever adjusts spiral shell Bolt lower end and lever bottom righthand side contact with pressure;
Upper mounted plate lower rod end is fixed on lower plate by screw;The upper mounted plate of hollow setting is installed on upper mounted plate branch In the card slot of column;Adjustable compact heap is fixed on upper mounted plate by screw;Lower frame is fixed on by screw in height adjustment thick stick upper end Bottom plate lower end, height adjustment thick stick lower end and lever left upper end contact with pressure;The limit for height screw of the throw of lever is adjusted for maximum height limit By being fastened transversely to height regulating rod lower end;
Dextrorotation bracket I by forward direction revolve screw thread, left-handed bracket I by reversely rotation screw thread be connected on tensioning shaft I, and with open Mandrel I rotation and towards or away from rotation;Axis supporting support I, the upper end axis supporting support II are placed on the left end and the right side of tensioning shaft I End, in tensioning shaft I rotary motion on the positioning shoulder of axis supporting support I and axis supporting support II, the axis lower end supporting support II is logical Screw is crossed to be fixed on lower frame bottom plate;Tensioning shaft nut I is installed on tensioning shaft I by screw;
Dextrorotation bracket II revolves screw thread, left-handed bracket II by forward direction and is connected on tensioning shaft II by reversely revolving screw thread, and With tensioning shaft II rotation towards or away from rotation;Before axis supporting support III, the upper end axis supporting support IV are placed on tensioning shaft II End and rear end, tensioning shaft II axis supporting support III, axis supporting support IV positioning shoulder on rotary motion, axis supporting support III, the axis lower end supporting support IV are fixed on lower frame bottom plate by screw;Tensioning shaft nut II is fixed on tensioning shaft by screw On II;Heat lamp is fixed in heat lamp fixed plate by nut;Taut frame be placed in dextrorotation bracket I, left-handed bracket I, dextrorotation bracket II, On left-handed bracket II;
The taut frame for being fixed with chip rises from the middle vacancy of upper mounted plate.
As a further improvement of the above technical scheme:
Taut frame includes that outer ring stretches tight and frame and the inner ring that outer ring is stretched tight in frame is arranged in stretches tight frame.
The device picked manually is tightened by means of chip, specific step is as follows for this method:
S1, chip is cut with crop tool from chip ring, is fixed on taut frame;
S2, taut frame is placed on left-right rotary bracket, rotates adjustment fastening into axis with;
S3, make taut frame rising concordant with upper mounted plate with lever adjusting nut;
S4, the taut frame in outer ring is fixed with adjustable compact heap;
S5, heat lamp is opened, started to work.
Present apparatus design is unique, convenient and practical, tightens the chip cut on chip ring by taut frame, solves raised tooling Can not fixed core loop the problem of;Risen by taut frame and keep plane, solves raised tooling microscope defective locations judgement Problem;It is tightened by the dislocation for the frame that stretches tight, widens the spacing between chip, solve the problems, such as the waste of edge chip;Solves core The problem of piece spacing is too small, when being picked with tweezers, be easy to cause scuffing, chipping, unfilled corner, to improve what chip picked by hand Efficiency improves the yield rate that chip picks by hand.
The invention structure is simple, easy to use, has practical function, low in cost, improves chip and picks by hand Efficiency, reduce chip damage cost.
Beneficial effects of the present invention have carried out more detailed description in specific embodiment part.
Detailed description of the invention
Fig. 1 is the structural schematic diagram inside the present invention.
Fig. 2 is the structural schematic diagram of other direction local interior of the present invention.
Wherein: 1. lower plate pillar I, 2. lower plates, 3. lower plate pillar II, 4. levers, 5. lever brackets, 6. thick sticks Bar adjusting nut, 7. levers adjust bolt, 8. upper mounted plate pillars, 9 upper mounted plates, 10. adjustable compact heaps, 11. height Adjusting thick stick, 12. lower frame bottom plates, 13. dextrorotation bracket I, 14 left-handed bracket I, 15. tensioning shaft I, 16. axis supporting support I, 17. Axis supporting support II, the 18 dextrorotation bracket tensioning shaft of II, 19. left-handed bracket II, 20. II, 21. axis supporting support III, 22. Axis supporting support IV, 23. heat lamps, 24. heat lamp fixed plates, 25. tensioning shaft nut I, 26. tensioning shaft nut II, 27. outer rings Taut frame, 28. inner rings stretch tight frame, 29. screw axis, 30. limit for height screws.
Specific embodiment
Such as Fig. 1-2, the chip of the present embodiment tightens the device picked manually, which is characterized in that including lower plate 2, bottom Plate pillar I1, lower plate pillar II3, lever 4, lever bracket 5, lever adjusting nut 6, lever adjust bolt 7, upper mounted plate pillar 8, upper mounted plate 9, adjustable compact heap 10, height adjustment thick stick 11, lower frame bottom plate 12, dextrorotation bracket I13, left-handed bracket I14, tensioning Axis I15, axis supporting support I16, axis supporting support II17, dextrorotation bracket I18, left-handed bracket I19, tensioning shaft II20, axis support Bracket III21, axis supporting support IV22, heat lamp 23, heat lamp fixed plate 24, tensioning shaft nut I25, tensioning shaft nut II26, spiral shell Follow closely axis 29, limit for height screw 30
Lower plate pillar I1 is installed on 2 lower end of lower plate, and is fixed by screw;Lower plate pillar II3 is installed on lower plate, And it is fixed by screw;4 cross screw axis 29 of lever is articulated on the lever bracket 5 of 2 lower end of lower plate, and is turned around articulated shaft It is dynamic;Lever adjusting nut 6 adjusts bolt 7 with lever and connect, and lever adjusts bolt 7 and is connected on lower plate 2 vertically by screw thread, Lever adjusts 7 lower end of bolt and 4 bottom righthand side of lever contacts with pressure;
8 lower end of upper mounted plate pillar is fixed on lower plate 2 by screw;The upper mounted plate 9 of hollow setting is installed on fixation In the card slot of plate pillar 8;Adjustable compact heap 10 is fixed on upper mounted plate 9 by screw;11 upper end of height adjustment thick stick passes through screw It is fixed on lower 12 lower end of frame bottom plate, 11 lower end of height adjustment thick stick and 4 left upper end of lever contact with pressure;For maximum height limit adjusting rod The limit for height screw 30 of 11 strokes is by being fastened transversely to 11 lower end of height regulating rod;
Dextrorotation bracket I13 revolves screw thread, left-handed bracket I14 by forward direction and is connected on tensioning shaft I15 by reversely revolving screw thread, And with tensioning shaft I rotation and towards or away from rotation;Axis supporting support I16, the upper end axis supporting support II17 are placed on tensioning shaft I's Left end and right end, in tensioning shaft I rotary motion on the positioning shoulder of axis supporting support I16 and axis supporting support II17, axis support The lower end bracket II17 is fixed on lower frame bottom plate by screw;Tensioning shaft nut I25 is installed on tensioning shaft I by screw;
Dextrorotation bracket II revolves screw thread, left-handed bracket II by forward direction and is connected on tensioning shaft II20 by reversely revolving screw thread, And with tensioning shaft II rotation and towards or away from rotation;Axis supporting support III21, the upper end axis supporting support IV22 are placed on tensioning shaft The front-end and back-end of II, tensioning shaft II axis supporting support III21, axis supporting support IV22 positioning shoulder on rotary motion, Axis supporting support III21, the axis lower end supporting support IV22 are fixed on lower frame bottom plate by screw;Tensioning shaft nut II26 passes through Screw is fixed on tensioning shaft II20;Heat lamp 23 is fixed in heat lamp fixed plate 24 by nut;Taut frame is placed in dextrorotation bracket I, left-handed bracket I, dextrorotation bracket II, on left-handed bracket II.
The taut frame for being fixed with chip rises from the middle vacancy of upper mounted plate 9.
Taut frame includes that outer ring stretches tight and frame 27 and the inner ring that outer ring is stretched tight in frame 27 is arranged in stretches tight frame 28.
The course of work:
1, chip is cut with crop tool from chip ring, is fixed on taut frame;
2, taut frame is placed on left-right rotary bracket, rotates adjustment fastening into axis with;
3, make taut frame rising concordant with upper mounted plate with lever adjusting nut;
4, the taut frame in outer ring is fixed with adjustable compact heap;
5, heat lamp is opened, is started to work.
The present invention has rational design, it is low in cost, durable, safe and reliable, easy to operate, time saving and energy saving, save fund, It is compact-sized and easy to use.
It is to disclose in order to more clear, and the prior art is just no longer enumerated that the present invention, which fully describes,.
Finally, it should be noted that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations;Although Present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: it still may be used To modify to technical solution documented by previous embodiment or equivalent replacement of some of the technical features;Make It is obvious for being combined for those skilled in the art to multiple technical solutions of the invention.And these are modified or replace It changes, the spirit and scope for technical solution of the embodiment of the present invention that it does not separate the essence of the corresponding technical solution.

Claims (3)

1. a kind of chip tightens the device picked manually, it is characterised in that: tighten the device picked manually, feature including chip It is, including lower plate, lower plate pillar I, lower plate pillar II, lever, lever bracket, lever adjusting nut, lever adjust spiral shell Bolt, upper mounted plate pillar, upper mounted plate, adjustable compact heap, height adjustment thick stick, lower frame bottom plate, dextrorotation bracket I, left-handed bracket I, Tensioning shaft I, axis supporting support I, axis supporting support II, dextrorotation bracket I, left-handed bracket I, tensioning shaft II, axis supporting support III, Axis supporting support IV, heat lamp, heat lamp fixed plate, tensioning shaft nut I, tensioning shaft nut II, screw axis and limit for height screw;
Lower plate pillar I is installed on lower plate lower end, and is fixed by screw;Lower plate pillar II is installed on lower plate, and It is fixed by screw;Lever cross screw axis is articulated on the lever bracket of lower plate lower end, and is rotated around articulated shaft;Lever Adjusting nut is bolted with lever adjusting, and lever adjusts bolt and is connected on lower plate vertically by screw thread, and lever adjusts spiral shell Bolt lower end and lever bottom righthand side contact with pressure;
Upper mounted plate lower rod end is fixed on lower plate by screw;The upper mounted plate of hollow setting is installed on upper mounted plate branch In the card slot of column;Adjustable compact heap is fixed on upper mounted plate by screw;Lower frame is fixed on by screw in height adjustment thick stick upper end Bottom plate lower end, height adjustment thick stick lower end and lever left upper end contact with pressure;The limit for height screw of the throw of lever is adjusted for maximum height limit By being fastened transversely to height regulating rod lower end;
Dextrorotation bracket I by forward direction revolve screw thread, left-handed bracket I by reversely rotation screw thread be connected on tensioning shaft I, and with open Mandrel I rotation and towards or away from rotation;Axis supporting support I, the upper end axis supporting support II are placed on the left end and the right side of tensioning shaft I End, in tensioning shaft I rotary motion on the positioning shoulder of axis supporting support I and axis supporting support II, the axis lower end supporting support II is logical Screw is crossed to be fixed on lower frame bottom plate;Tensioning shaft nut I is installed on tensioning shaft I by screw;
Dextrorotation bracket II revolves screw thread, left-handed bracket II by forward direction and is connected on tensioning shaft II by reversely revolving screw thread, and With tensioning shaft II rotation towards or away from rotation;Before axis supporting support III, the upper end axis supporting support IV are placed on tensioning shaft II End and rear end, tensioning shaft II axis supporting support III, axis supporting support IV positioning shoulder on rotary motion, axis supporting support III, the axis lower end supporting support IV are fixed on lower frame bottom plate by screw;Tensioning shaft nut II is fixed on tensioning shaft by screw On II;Heat lamp is fixed in heat lamp fixed plate by nut;Taut frame be placed in dextrorotation bracket I, left-handed bracket I, dextrorotation bracket II, On left-handed bracket II;
The taut frame for being fixed with chip rises from the middle vacancy of upper mounted plate.
2. chip according to claim 1 tightens the device picked manually, it is characterised in that: taut frame includes the taut frame in outer ring And the inner ring that outer ring is stretched tight in frame is set and is stretched tight frame.
3. chip according to claim 2 is tightened picks method manually, it is characterised in that: tightened by means of chip and picked up manually The device taken, specific step is as follows for this method:
S1, chip is cut with crop tool from chip ring, is fixed on taut frame;
S2, taut frame is placed on left-right rotary bracket, rotates adjustment fastening into axis with;
S3, make taut frame rising concordant with upper mounted plate with lever adjusting nut;
S4, the taut frame in outer ring is fixed with adjustable compact heap;
S5, heat lamp is opened, started to work.
CN201910563886.3A 2019-06-26 2019-06-26 Chip tightening manual picking device Active CN110335846B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN202110229205.7A CN112908929B (en) 2019-06-26 2019-06-26 Chip tightening manual picking method
CN201910563886.3A CN110335846B (en) 2019-06-26 2019-06-26 Chip tightening manual picking device

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Application Number Priority Date Filing Date Title
CN201910563886.3A CN110335846B (en) 2019-06-26 2019-06-26 Chip tightening manual picking device

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CN202110229205.7A Division CN112908929B (en) 2019-06-26 2019-06-26 Chip tightening manual picking method

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CN110335846A true CN110335846A (en) 2019-10-15
CN110335846B CN110335846B (en) 2021-05-11

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CN202110229205.7A Active CN112908929B (en) 2019-06-26 2019-06-26 Chip tightening manual picking method

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110808160A (en) * 2019-11-19 2020-02-18 青岛航天半导体研究所有限公司 Winding method for copper strip winding of transformer

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US4875824A (en) * 1988-02-01 1989-10-24 Biorne Enterprises, Inc. Wafer transfer apparatus
JP2000340528A (en) * 1999-05-31 2000-12-08 M Tec Kk Fine chip pickup device
JP2006332417A (en) * 2005-05-27 2006-12-07 Matsushita Electric Ind Co Ltd Pickup device and pickup method for chip
CN201467622U (en) * 2009-03-26 2010-05-12 赵永先 Manual centering positioning system for chip
CN103594406A (en) * 2013-11-05 2014-02-19 中国电子科技集团公司第四十五研究所 Method for centering and positioning self-centering positioning chuck and semiconductor wafer
CN207858730U (en) * 2018-01-26 2018-09-14 成都海威华芯科技有限公司 A kind of manual picking device of chip

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CN106571331B (en) * 2016-10-31 2019-01-11 长春光华微电子设备工程中心有限公司 A kind of tensioning of wafer indigo plant film and angle adjustment device
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Publication number Priority date Publication date Assignee Title
US4875824A (en) * 1988-02-01 1989-10-24 Biorne Enterprises, Inc. Wafer transfer apparatus
JP2000340528A (en) * 1999-05-31 2000-12-08 M Tec Kk Fine chip pickup device
JP2006332417A (en) * 2005-05-27 2006-12-07 Matsushita Electric Ind Co Ltd Pickup device and pickup method for chip
JP4507985B2 (en) * 2005-05-27 2010-07-21 パナソニック株式会社 Chip pickup device and pickup method
CN201467622U (en) * 2009-03-26 2010-05-12 赵永先 Manual centering positioning system for chip
CN103594406A (en) * 2013-11-05 2014-02-19 中国电子科技集团公司第四十五研究所 Method for centering and positioning self-centering positioning chuck and semiconductor wafer
CN207858730U (en) * 2018-01-26 2018-09-14 成都海威华芯科技有限公司 A kind of manual picking device of chip

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110808160A (en) * 2019-11-19 2020-02-18 青岛航天半导体研究所有限公司 Winding method for copper strip winding of transformer
CN110808160B (en) * 2019-11-19 2022-09-20 青岛航天半导体研究所有限公司 Winding method for copper strip winding of transformer

Also Published As

Publication number Publication date
CN110335846B (en) 2021-05-11
CN112908929A (en) 2021-06-04
CN112908929B (en) 2022-09-20

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