CN110331380A - A kind of applying coating and preparation method thereof on blade base - Google Patents
A kind of applying coating and preparation method thereof on blade base Download PDFInfo
- Publication number
- CN110331380A CN110331380A CN201910723201.7A CN201910723201A CN110331380A CN 110331380 A CN110331380 A CN 110331380A CN 201910723201 A CN201910723201 A CN 201910723201A CN 110331380 A CN110331380 A CN 110331380A
- Authority
- CN
- China
- Prior art keywords
- layer
- ticl
- mixed gas
- coating
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/36—Carbonitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
Landscapes
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention provides the applying coating and preparation method thereof on a kind of blade base, applying coating includes: the TiN layer and TiCN layer of at least four groups alternating deposits, and every thickness degree is 0.5~1.0 μm；The TiCNO and TiN layer of at least five groups alternating deposits, every thickness degree are 0.5~1.0 μm；One layer AlTiCNO layers, with a thickness of 0.1~1.5 μm；One layer of aluminium oxide nucleating layer, with a thickness of 0.1~0.8 μm；And one layer of aluminum oxide coating layer, with a thickness of 3~10 μm.Preparation method is to be sequentially depositing above-mentioned coating in carbide cutter tool on piece in relevant temperature, the gentle pressure of atmosphere with chemical vapour deposition technique.Blade stiffness and wearability coated with above-mentioned coating are stronger, wear-resistant degree is higher, and the service life is longer.
Description
Technical field
Applying coating and its preparation the present invention relates to the coatings art of cutting tool, in particular on a kind of blade base
Method.
Background technique
Cutting element surface coatings be improve cutting element performance it is important by way of one of, coated cutting tool have table
Surface hardness is high, wearability is good, the small advantages such as low with pyroconductivity of stable chemical performance, heat-resistant oxidized, coefficient of friction, when cutting
Cutter life than uncoated coating improves 5~10 times or more.
Aluminum oxide coating layer has very high chemical stability and excellent thermal boundary performance, is that high speed cutting tool preferably applies
Layer material.The prior art attempts to refine alumina grain, makes the aluminium oxide of strong-texture to improve hardness and wearability.Such as
Chinese patent CN104085142A discloses the applying coating on a kind of blade base, and aluminum oxide coating layer has very detail column
Crystal structure, each crystal grain in alumina layer arrange in the same direction, orient uniform growth, and this coating structure can have
Effect reduces the internal stress of coating and improves the toughness of coating.A kind of CVD coating skiver disclosed in Chinese patent CN107557755
Multilayer aluminium oxide is prepared in tool, reduces the time of one single deposition, aluminium oxide refinement crystal grain has been obtained, to reach enhancing knife
Has the purpose of wearability.But it is above-mentioned with CVD production high quality aluminum oxide coating technology there are crystal grain easily to grow up, be easy shape
At the deficiency of hole and crystal defect, this is very unfavorable for improving cutting element performance, be easy to cause tipping, reduces the cutter longevity
Life.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides the applying coating and preparation method thereof on a kind of blade base,
Its purpose is to by carrying out multilayer stepped depositions immersion coating on blade base, acquisition hardness is high, wearability is good, the service life
Long cutting tool.
In order to achieve the above object, the invention provides the following technical scheme:
A kind of preparation method of the applying coating on blade base, includes the following steps:
(1) digital cuttings are put into reaction chamber, then reaction chamber air pressure is evacuated to 10mbar or less；
It (2) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、N2And H2
Mixed gas, one layer 0.5~1 μm of TiN layer is deposited on the digital cuttings；
It (3) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 200~500mbar4、N2、CH4
And H2Mixed gas, one layer 0.5~1 μm of TiCN layer is deposited in TiN layer；
It (4) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、N2And H2
Mixed gas, one layer 0.5~1 μm of TiN layer is deposited in TiCN layer；
It (5) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、CH3CN、
N2And H2Mixed gas, one layer 0.5~1 μm of TiCN layer is deposited on the surface TiN；
(6) step (4) and step (5) are repeated at least twice；
It (7) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 100~500mbar4、CH3CN、
N2, CO, HCl and H2Mixed gas, one layer 0.5~1 μm of TiCNO layer is deposited on the surface TiCN；
It (8) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、N2And H2
Mixed gas, one layer 0.5~1 μm of TiN layer is deposited in TiCNO layer surface；
(9) step (7) and step (8) are repeated at least four times；
It (10) is 980~1100 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、
AlCl3、CO、CH4、N2And H2Mixed gas, one layer 0.1~1.5 μm of AlTiCNO layer is deposited on TiN layer surface；
It (11) is 980~1100 DEG C in reaction chamber temperature, pressure is passed through CO under conditions of being 50~200mbar2、AlCl3、
HCl and H2Mixed gas, one layer 0.1~0.8 μm of aluminium oxide nucleating layer is deposited in AlTiCNO layer surface；
It (12) is 980~1100 DEG C in reaction chamber temperature, pressure is passed through AlCl under conditions of being 50~200mbar3、CO、
CO2, HCl, H2S and H2Mixed gas, one layer 3~10 μm of the aluminum oxide coating layer of deposition in aluminium oxide nucleation layer surface completes
Applying coating on blade base.
Preferably, TiCl described in step (2), step (4) and step (8)4、N2And H2Mixed gas in press quality
Percentage TiCl4For 0.2~10%, N2It is 2~50%, surplus H2。
Preferably, TiCl described in step (3)4、N2、CH4And H2Mixed gas in TiCl by mass percentage4It is 0.2
~10%, N2For 2~50%, CH4It is 0.2~10%, surplus H2。
Preferably, TiCl described in step (5)4、CH3CN、N2And H2Mixed gas in TiCl by mass percentage4For
0.2~10%, CH3CN is 0.2~10%, N2It is 2~50%, surplus H2。
Preferably, TiCl described in step (7)4、CH3CN、N2, CO, HCl and H2Mixed gas in by mass percentage
TiCl4For 0.2~10%, CH3CN is 0.2~10%, N2It is 0.2~10%, HCl for 2~10%, CO is 0.2~10%, it is remaining
For H2。
Preferably, TiCl described in step (10)4、AlCl3、CO、CH4、N2And H2Mixed gas according to quality percentage
Compare TiCl4For 0.2~20%, AlCl3It is 0.3~20%, CH for 0.2~20%, CO4For 0.2~7%, N2It is 0~15%, it is remaining
Amount is H2。
Preferably, CO described in step (11)2、AlCl3, HCl and H2Mixed gas according to mass percent CO2It is 1
~20%, AlCl3It is 1~25%, Yu Wei H for 2~20%, HCl2。
Preferably, AlCl described in step (12)3、CO、CO2, HCl, H2S and H2Mixed gas according to quality percentage
Compare AlCl3It is 0~20%, CO for 0.1~20%, CO2It is 0~15%, H for 0~5%, HCl2S is 0.01~1%, Yu Wei H2。
The present invention also provides the applying coating on a kind of blade base, the coating includes:
The thickness of the TiN layer and TiCN layer of at least four groups alternating deposits, the TiN layer and TiCN layer is 0.5~1.0 μ
m；
The TiCNO and TiN layer of at least five groups alternating deposits, the TiCNO and the thickness of TiN layer are 0.5~1.0 μm；
One layer AlTiCNO layers, with a thickness of 0.1~1.5 μm；
One layer of aluminium oxide nucleating layer, with a thickness of 0.1~0.8 μm；
One layer of aluminum oxide coating layer, with a thickness of 3~10 μm.
Preferably, the aluminum oxide coating layer is made of columnar grain；The 90% columnar grain partial size be 0.50~
1.00μm。
Above scheme of the invention have it is following the utility model has the advantages that
Applying coating of the invention includes medium temperature layer of the multilayer compared with shallow layer superposition composition, can avoid the crystalline substance of same coating
Grain continuous forming core in the chemical vapor deposition processes of long period is grown up, and keeps medium temperature layer crystal particle size thinner；The crystalline substance of medium temperature layer
Kernel structure becomes superfine equiaxed grain from column crystal, keeps the blade toughness of applying coating higher.It grows out on the medium temperature layer
The initial particle of aluminium oxide is smaller, is made of columnar grain；90% size of microcrystal is 0.50~1.00 μm, hardness and wearability
It is stronger.
The alternating layer of TICNO and TIN is equipped in medium temperature layer of the invention.TiCNO is the TiCNO with face-centred cubic structure
Solid solution, wherein oxygen incorporation on the one hand refine crystal grain more, structure it is finer and close；On the other hand, TiCNO solid solution is hard
The binding force of Du Genggao, coating are more preferable.In cutting ability, the blade coated with coating of the present invention is ground during the cutting process
Damage is reduced, and the service life is longer.
Detailed description of the invention
Fig. 1 is the section transmission electron microscope picture (amplification factor 10K) of 1 aluminum oxide coating layer of the embodiment of the present invention；
Fig. 2 is the section transmission electron microscope picture (amplification factor 8K) of prior art aluminum oxide coating layer；
Fig. 3 is 1 aluminum oxide coating layer surface transmission electron microscope (amplification factor 3k) of the embodiment of the present invention；
Fig. 4 is prior art aluminum oxide coating layer surface transmission electron microscope (amplification factor 3k)；
Fig. 5 is 1 aluminum oxide coating layer surface transmission electron microscope (amplification factor 10k) of the embodiment of the present invention；
Fig. 6 is prior art aluminum oxide coating layer surface transmission Electronic Speculum (amplification factor 10k)；
Fig. 7 is 1 aluminum oxide coating layer surface transmission electron microscope (amplification factor 20k) of the embodiment of the present invention；
Fig. 8 is prior art aluminum oxide coating layer surface transmission Electronic Speculum (amplification factor 20k).
Specific embodiment
To keep the technical problem to be solved in the present invention, technical solution and advantage clearer, below in conjunction with specific implementation
Example is described in detail.
Embodiment 1
It is coated with medium temperature layer and alumina layer on carbide cutting blade surface, is specifically included: four groups of alternating deposits
The thickness of TiN layer and TiCN layer, TiN layer and TiCN layer is 0.5~1.0 μm；The TiCNO and TiN layer of five groups of alternating deposits,
TiCNO and the thickness of TiN layer are 0.5~1.0 μm；One layer AlTiCNO layers, with a thickness of 0.1~1.5 μm；One layer of aluminium oxide at
Stratum nucleare, with a thickness of 0.1~0.8 μm；One layer of aluminum oxide coating layer, with a thickness of 3~10 μm.The detailed process for preparing above-mentioned coating is as follows
Shown in table.
1 embodiment of table, 1 detailed process parameter
Fig. 1,3,5 and 7 are the Electronic Speculum result of the present embodiment coating.As shown in Figure 1, aluminum oxide coating layer is by columnar grain group
At；The length-width ratio of the columnar grain is 1~13；By Fig. 3,5 and 7 it is found that the 90% columnar grain partial size be 0.50~
1.00μm.Fig. 2,4,6 and 8 indicate the surface topography map of aluminium oxide in the prior art, under same amplification factor, the oxygen of the present embodiment
Changing aluminized coating size of microcrystal may be significantly smaller, is finer and smoother.
Embodiment 2
It is coated with medium temperature layer and alumina layer on carbide cutting blade surface, is specifically included: five groups of alternating deposits
The thickness of TiN layer and TiCN layer, TiN layer and TiCN layer is 0.5~1.0 μm；The TiCNO and TiN layer of five groups of alternating deposits,
TiCNO and the thickness of TiN layer are 0.5~1.0 μm；One layer AlTiCNO layers, with a thickness of 0.1~1.5 μm；One layer of aluminium oxide at
Stratum nucleare, with a thickness of 0.1~0.8 μm；One layer of aluminum oxide coating layer, with a thickness of 3~10 μm.The detailed process for preparing above-mentioned coating is as follows
Shown in table.
1 embodiment of table, 2 detailed process parameter
Embodiment 3
It is coated with medium temperature layer and alumina layer on carbide cutting blade surface, is specifically included: four groups of alternating deposits
The thickness of TiN layer and TiCN layer, TiN layer and TiCN layer is 0.5~1.0 μm；The TiCNO and TiN layer of six groups of alternating deposits,
TiCNO and the thickness of TiN layer are 0.5~1.0 μm；One layer AlTiCNO layers, with a thickness of 0.1~1.5 μm；One layer of aluminium oxide at
Stratum nucleare, with a thickness of 0.1~0.8 μm；One layer of aluminum oxide coating layer, with a thickness of 3~10 μm.The detailed process for preparing above-mentioned coating is as follows
Shown in table.
1 embodiment of table, 3 detailed process parameter
Embodiment 4
It carries out shock resistance experiment to coating a and coating b to compare, workpiece is the cylindrical rod of 4 fault troughs of band；Material is 45# steel；
Blade model WNMG080408；Cutting parameter is V=320M/s, ap=0.5mm, F=0.15mm/r.Experimental result such as table 2
It is shown.
2 shock resistance experimental result of table
As can be seen from Table 2, in the blade 10 of the coating coated with Examples 1 to 3 2000 Yu Cihou point of a knife of shock resistance according to
Old intact, the toughness of coating of the present invention is more preferable than prior art coating.
Embodiment 5
Wear-resisting experiment: workpiece HT is carried out to coating a and coating b；Material is 45# steel；Blade model WNMG080408；
Cutting parameter is V=320M/s, ap=0.5mm, F=0.15mm/r.
After cutting 8min, the abrasion loss of point of a knife is measured, numerical value is recorded, then cuts 3min again, measure the mill of point of a knife
Numerical quantity is damaged, as shown in table 3.
3 abrasion resistance test results of table
| Serial number | The trade mark | It cuts 8min abrasion loss (mm) | It cuts 11min abrasion loss (mm) |
| 1 | Embodiment 1 | 0.178 | 0.252 |
| 2 | Embodiment 2 | 0.175 | 0.251 |
| 3 | Embodiment 3 | 0.179 | 0.257 |
| 4 | Prior art coating 1 | 0.289 | 0.392 |
| 5 | Prior art coating 2 | 0.281 | 0.398 |
| 6 | Prior art coating 3 | 0.285 | 0.395 |
As can be seen from Table 3,8 minutes abrasion losses of blade cut of the coating coated with Examples 1 to 3 are less than
The abrasion loss of 0.18mm, cutting 11 minutes are less than 0.26mm, and the wearability of coating of the present invention is more preferable than prior art coating.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, it can also make several improvements and retouch, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of preparation method of the applying coating on blade base, which comprises the steps of:
(1) digital cuttings are put into reaction chamber, then reaction chamber air pressure is evacuated to 10mbar or less；
It (2) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、N2And H2It is mixed
Gas is closed, one layer 0.5~1 μm of TiN layer is deposited on the digital cuttings；
It (3) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 200~500mbar4、N2、CH4And H2
Mixed gas, one layer 0.5~1 μm of TiCN layer is deposited in TiN layer；
It (4) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、N2And H2It is mixed
Gas is closed, one layer 0.5~1 μm of TiN layer is deposited in TiCN layer；
It (5) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、CH3CN、N2And H2
Mixed gas, one layer 0.5~1 μm of TiCN layer is deposited on the surface TiN；
(6) step (4) and step (5) are repeated at least twice；
It (7) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 100~500mbar4、CH3CN、N2、
CO, HCl and H2Mixed gas, one layer 0.5~1 μm of TiCNO layer is deposited on the surface TiCN；
It (8) is 920~980 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、N2And H2It is mixed
Gas is closed, one layer 0.5~1 μm of TiN layer is deposited in TiCNO layer surface；
(9) step (7) and step (8) are repeated at least four times；
It (10) is 980~1100 DEG C in reaction chamber temperature, pressure is passed through TiCl under conditions of being 50~200mbar4、AlCl3、CO、
CH4、N2And H2Mixed gas, one layer 0.1~1.5 μm of AlTiCNO layer is deposited on TiN layer surface；
It (11) is 980~1100 DEG C in reaction chamber temperature, pressure is passed through CO under conditions of being 50~200mbar2、AlCl3, HCl and
H2Mixed gas, one layer 0.1~0.8 μm of aluminium oxide nucleating layer is deposited in AlTiCNO layer surface；
It (12) is 980~1100 DEG C in reaction chamber temperature, pressure is passed through AlCl under conditions of being 50~200mbar3、CO、CO2、
HCl, H2S and H2Mixed gas, one layer 3~10 μm of the aluminum oxide coating layer of deposition in aluminium oxide nucleation layer surface completes blade
Applying coating on matrix.
2. preparation method according to claim 1, which is characterized in that described in step (2), step (4) and step (8)
TiCl4、N2And H2Mixed gas in TiCl by mass percentage4For 0.2~10%, N2It is 2~50%, surplus H2。
3. preparation method according to claim 1, which is characterized in that TiCl described in step (3)4、N2、CH4And H2Mixing
TiCl by mass percentage in gas4For 0.2~10%, N2For 2~50%, CH4It is 0.2~10%, surplus H2。
4. preparation method according to claim 1, which is characterized in that TiCl described in step (5)4、CH3CN、N2And H2It is mixed
Close TiCl by mass percentage in gas4For 0.2~10%, CH3CN is 0.2~10%, N2It is 2~50%, surplus H2。
5. preparation method according to claim 1, which is characterized in that TiCl described in step (7)4、CH3CN、N2、CO、HCl
And H2Mixed gas in TiCl by mass percentage4For 0.2~10%, CH3CN is 0.2~10%, N2It is for 2~10%, CO
0.2~10%, HCl are 0.2~10%, Yu Wei H2。
6. preparation method according to claim 1, which is characterized in that TiCl described in step (10)4、AlCl3、CO、CH4、N2
And H2Mixed gas according to mass percent TiCl4For 0.2~20%, AlCl3It is 0.3~20% for 0.2~20%, CO,
CH4For 0.2~7%, N2It is 0~15%, surplus H2。
7. preparation method according to claim 1, which is characterized in that CO described in step (11)2、AlCl3, HCl and H2It is mixed
It closes in gas according to mass percent CO2For 1~20%, AlCl3It is 1~25%, Yu Wei H for 2~20%, HCl2。
8. preparation method according to claim 1, which is characterized in that AlCl described in step (12)3、CO、CO2, HCl, H2S
And H2Mixed gas according to mass percent AlCl3It is 0~20%, CO for 0.1~20%, CO2For 0~5%, HCl 0
~15%, H2S is 0.01~1%, Yu Wei H2。
9. the applying coating on a kind of blade base, which is characterized in that the coating includes:
The thickness of the TiN layer and TiCN layer of at least four groups alternating deposits, the TiN layer and TiCN layer is 0.5~1.0 μm；
The TiCNO and TiN layer of at least five groups alternating deposits, the TiCNO and the thickness of TiN layer are 0.5~1.0 μm；
One layer AlTiCNO layers, with a thickness of 0.1~1.5 μm；
One layer of aluminium oxide nucleating layer, with a thickness of 0.1~0.8 μm；
One layer of aluminum oxide coating layer, with a thickness of 3~10 μm.
10. coating according to claim 9, which is characterized in that the aluminum oxide coating layer is made of columnar grain；90% institute
Stating columnar grain partial size is 0.50~1.00 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910723201.7A CN110331380B (en) | 2019-08-06 | 2019-08-06 | Coating on blade substrate and preparation method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910723201.7A CN110331380B (en) | 2019-08-06 | 2019-08-06 | Coating on blade substrate and preparation method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110331380A true CN110331380A (en) | 2019-10-15 |
| CN110331380B CN110331380B (en) | 2020-05-15 |
Family
ID=68146866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910723201.7A Active CN110331380B (en) | 2019-08-06 | 2019-08-06 | Coating on blade substrate and preparation method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110331380B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113151804A (en) * | 2021-04-22 | 2021-07-23 | 厦门钨业股份有限公司 | Titanium oxycarbonitride coating and application thereof |
| CN114875379A (en) * | 2022-04-29 | 2022-08-09 | 厦门金鹭特种合金有限公司 | Aluminum oxide composite coating, preparation method thereof and cutting device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1121537A (en) * | 1994-05-31 | 1996-05-01 | 三菱麻铁里亚尔株式会社 | Coated hard alloy blade member |
| CN1616169A (en) * | 2003-10-30 | 2005-05-18 | 三菱综合材料株式会社 | Hard coated layer with good anti-tipping property surface coated with metal ceramic made cutting tool |
| CN102061454A (en) * | 2011-01-20 | 2011-05-18 | 厦门金鹭特种合金有限公司 | Method for preparing coating on cutter |
| CN104085142A (en) * | 2014-05-28 | 2014-10-08 | 厦门金鹭特种合金有限公司 | Coating layer on blade base body |
| CN105980602A (en) * | 2013-12-23 | 2016-09-28 | 韩国冶金株式会社 | Alpha alumina thin film for processing difficult-to-cut material and cast iron |
| CN107002237A (en) * | 2014-12-19 | 2017-08-01 | 山特维克知识产权股份有限公司 | CVD coated cutting tools |
-
2019
- 2019-08-06 CN CN201910723201.7A patent/CN110331380B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1121537A (en) * | 1994-05-31 | 1996-05-01 | 三菱麻铁里亚尔株式会社 | Coated hard alloy blade member |
| CN1616169A (en) * | 2003-10-30 | 2005-05-18 | 三菱综合材料株式会社 | Hard coated layer with good anti-tipping property surface coated with metal ceramic made cutting tool |
| CN102061454A (en) * | 2011-01-20 | 2011-05-18 | 厦门金鹭特种合金有限公司 | Method for preparing coating on cutter |
| CN105980602A (en) * | 2013-12-23 | 2016-09-28 | 韩国冶金株式会社 | Alpha alumina thin film for processing difficult-to-cut material and cast iron |
| CN104085142A (en) * | 2014-05-28 | 2014-10-08 | 厦门金鹭特种合金有限公司 | Coating layer on blade base body |
| CN107002237A (en) * | 2014-12-19 | 2017-08-01 | 山特维克知识产权股份有限公司 | CVD coated cutting tools |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113151804A (en) * | 2021-04-22 | 2021-07-23 | 厦门钨业股份有限公司 | Titanium oxycarbonitride coating and application thereof |
| CN114875379A (en) * | 2022-04-29 | 2022-08-09 | 厦门金鹭特种合金有限公司 | Aluminum oxide composite coating, preparation method thereof and cutting device |
| CN114875379B (en) * | 2022-04-29 | 2023-09-29 | 厦门金鹭特种合金有限公司 | Alumina composite coating, preparation method thereof and cutting device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110331380B (en) | 2020-05-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4477308B2 (en) | Cutting tool insert | |
| KR101157434B1 (en) | Oxide coated cutting tool | |
| CN102061454B (en) | Method for preparing coating on cutter | |
| CN104085142B (en) | A kind of applying coating on blade base | |
| EP0819776B1 (en) | Cutting blade made of titanium carbonitride-type cermet, and cutting blade made of coated cermet | |
| CN101517127B (en) | Coated cutting tool | |
| JP4427271B2 (en) | Alumina protective film and method for producing the same | |
| CN110331380A (en) | A kind of applying coating and preparation method thereof on blade base | |
| JP2006187859A (en) | Coated cutting insert | |
| CN104099580A (en) | Cutter coating layer having nanometer columnar crystal for enhancing wear resistance and toughness | |
| CN102650049A (en) | Method of manufacturing surface-coated cutting tool with excellent abrasion resistance | |
| CN112342525B (en) | CVD (chemical vapor deposition) coating suitable for vermicular cast iron cutting processing and preparation method thereof | |
| JP7412679B2 (en) | Surface coated cutting tool with excellent fracture resistance | |
| WO2009035404A1 (en) | Insert for milling of cast iron | |
| JP3887811B2 (en) | Cutting tool made of surface-coated tungsten carbide based cemented carbide with a hard coating layer that provides excellent wear resistance in high-speed cutting | |
| JP2012183635A (en) | Coated substrate and method of manufacturing the same | |
| JP3856891B2 (en) | Method for surface modification of hard material and cutting tool | |
| JP3353239B2 (en) | Method for producing diamond-coated member | |
| JP5876724B2 (en) | Surface coated cutting tool with excellent chipping resistance, peel resistance and wear resistance | |
| JP7056637B2 (en) | Heat resistant material | |
| JP7256978B2 (en) | A surface-coated cutting tool with a hard coating layer that exhibits excellent adhesion resistance and abnormal damage resistance. | |
| CN110359029B (en) | Coating for cutting tools and method for producing the same | |
| JP2004188502A (en) | Cutting tool of surface-coated cermet with hard coating layer having excellent thermal shock resistance | |
| JP7243013B2 (en) | Surface-coated cutting tools with excellent fracture resistance | |
| JP2004181554A (en) | Surface-coated cermet cutting tool with hard coating layer excellent in thermal shock resistance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |