CN110327830A - C4F7N/CO2/O2Three-element mixed gas body divides air distributing device, air distributing method - Google Patents
C4F7N/CO2/O2Three-element mixed gas body divides air distributing device, air distributing method Download PDFInfo
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- CN110327830A CN110327830A CN201910726127.4A CN201910726127A CN110327830A CN 110327830 A CN110327830 A CN 110327830A CN 201910726127 A CN201910726127 A CN 201910726127A CN 110327830 A CN110327830 A CN 110327830A
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- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000002156 mixing Methods 0.000 claims description 198
- 230000005540 biological transmission Effects 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 8
- 230000005611 electricity Effects 0.000 claims description 4
- 238000002360 preparation method Methods 0.000 abstract description 12
- 238000009413 insulation Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000011177 media preparation Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 291
- 239000000203 mixture Substances 0.000 description 14
- 229910018503 SF6 Inorganic materials 0.000 description 8
- 229910000831 Steel Inorganic materials 0.000 description 5
- 230000008901 benefit Effects 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 238000009472 formulation Methods 0.000 description 4
- 238000004064 recycling Methods 0.000 description 4
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 4
- 230000001276 controlling effect Effects 0.000 description 2
- 238000012864 cross contamination Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000005431 greenhouse gas Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 2
- 239000004810 polytetrafluoroethylene Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- 241000345998 Calamus manan Species 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 235000012950 rattan cane Nutrition 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 230000001131 transforming effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
- B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/70—Mixers specially adapted for working at sub- or super-atmospheric pressure, e.g. combined with de-foaming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/712—Feed mechanisms for feeding fluids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/71—Feed mechanisms
- B01F35/714—Feed mechanisms for feeding predetermined amounts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/88—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise
- B01F35/883—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise using flow rate controls for feeding the substances
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Accessories For Mixers (AREA)
Abstract
The present invention relates to mix insulation medium preparation technique fields, specifically disclose a kind of C4F7N/CO2/O2Three-element mixed gas body divides air distributing device, including C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure, C4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line structure, C4F7N/CO2/O2Three-element mixed gas body output pipe structure；Invention additionally discloses a kind of C4F7N/CO2/O2Three-element mixed gas body divides air distributing method.The present invention has the C that not only can accurately prepare different proportion, different pressures4F7N/CO2/O2Three-element mixed gas body, and can realize the preparation of Diversity gas, distribution speed is fast, the small technical effect of error.
Description
Technical field
The present invention relates to technical field of electricity more particularly to mix insulation medium preparation technique fields.
Background technique
Air insulating device is the key that one of irreplaceable power transmission and transforming equipment of modern power network, have it is compact-sized, by ring
Border factor influences the advantages that small, property safe and reliable to operation is high.SF6Gas is current electric power because of its excellent insulation arc extinction performance
The most commonly used dielectric of industrial application.But due to SF6The extremely strong greenhouse effects of gas, in Kyoto Protocol in 1997
It has been put into one of restricted six kinds of greenhouse gases.In addition, 2016 " Paris agreement " is also distinctly claimed in this century lower half
Leaf realizes the net zero-emission of greenhouse gases.Therefore, exploitation substitution SF6Environmentally friendly gas and to develop environmentally friendly gas apparatus extremely urgent.
Currently, external developed without SF6C4F7N (hereinafter referred to as C4) environmental protection dielectric, it is considered to be current generation
For SF6Gas is applied to the potential hot spot medium of power equipment, and China had carried out the development work of novel environment-friendly transmission of electricity pipeline already
Make.The insulation performance of C4 is SF62.2 times or more of gas, greenhouse effects coefficient only has SF6/ 10th of gas, but it liquefies
Temperature is higher (under an atmospheric pressure be about -4.7 DEG C), and when use need to be by itself and a certain proportion of buffer gas (such as CO2) mixing
It uses.C4F7N/CO2Mixed gas is in the electrical apparatus in application, CO2It easily is decomposed into CO, carrys out biggish insulation wind to equipment belt
Danger.C4F7N/CO2O is added in mixed gas2It can inhibit CO well2Decomposition, greatly improve this kind of dielectric application
Feasibility.
A kind of modified formula of environmental-protective gas-insulating medium, proposes as disclosed in patent application 201910252824.0
A kind of C4F7N、CO2With the dielectric of oxygen mix.By C4F7N/CO2/O2When three-element mixed gas body is applied to electrical equipment, no
In same engineer application scene, need to prepare the mixed gas of different proportion, different operating pressure.
Currently, mixed gas air distributing device mostly uses mass flow controller to control gas ratio, such as patent Shen
Please eight channel sulfur hexafluoride dynamic air-distributing method and system of one kind disclosed in 2017109526872, distribution speed and precision is limited
In the range and precision of mass flowmenter.This method is the flow that two kinds of gas is controlled using mass flowmenter, and precision preparation is high,
It is easy to operate.However this method can not a large amount of mixed gas of rapid preparing, particularly with this atmospheric chamber equipment of GIL, need compared with
The long distribution time, seriously affect the live duration.
Summary of the invention
Present invention seek to address that the prior art is slow there are distribution rate when preparing ternary and the above mixed gas and matches
The low technical problem of gas precision.
The present invention is realized by following technological means solves a kind of above-mentioned technical problem: C4F7N/CO2/O2Ternary mixing
Partial pressure air distributing device, including C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure, C4F7N/
CO2/O2Three-element mixed gas body divides mixed pipe line structure, C4F7N/CO2/O2Three-element mixed gas body output pipe structure；
The C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure is to by C4F7N、CO2、O2According to
It is secondary to be delivered to the C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure；The C4F7N/CO2/O2Ternary mixing
Partial pressure mixed pipe line structure is to input C therein4F7N、CO2、O2Carry out level pressure and by the C after level pressure4F7N、CO2、O2
It is mixed, the C4F7N/CO2/O2Three-element mixed gas body output pipe structure is to the C after exporting constant pressure mixing theory4F7N/CO2/
O2Three-element mixed gas body；
Multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is in be arranged in parallel.
The present invention passes through first opens C4F7N/CO2/O2Three-element mixed gas body divides each valve in air distributing device, leads to
It crosses vacuum pump and vacuumize process is carried out to the device.Then by C4F7N、CO2、O2Pass through C respectively4F7N air inlet pipeline structure, CO2
Air inlet pipeline structure, O2Air inlet pipeline structure is input to C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure, and
In C4F7N/CO2/O2Constant pressure mixing theory is carried out in three-element mixed gas body partial pressure mixed pipe line structure, and guarantees multiple C4F7N/CO2/O2
Three-element mixed gas body partial pressure mixed pipe line structure alternately constant pressure mixing theory (distribution), gas transmission, and the mixed C of level pressure4F7N/
CO2/O2Three-element mixed gas body passes through C4F7N/CO2/O2Three-element mixed gas body output pipe structure output.
The present invention replaces the dynamic quantitative distribution of the prior art using partial pressure distribution, and partial pressure distribution is applied and is mixed in ternary
In the formulation art for closing gas, not only precision preparation is high, but also can greatly improve distribution speed, so that it is this big to meet GIL
The needs of gas chamber equipment.
Since the present invention includes multiple C4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line structure and sets in parallel connection
It sets, when real work, by by multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is divided into two groups, makes
Wherein one group be in distribution when, another group in output mixed gas state so that system is in always
Distribution, the synchronous progress of gas transmission, save the distribution time, further increase air distribution efficiency.
Preferably, the present invention, which has, can mix partial pressure by the way that weight sensor is arranged in the bottom of partial pressure blending tank
Gaseous mass in tank is monitored online, and cooperates the on-line monitoring of differential pressure pick-up, realizes that weight value, pressure value are anti-each other
Feedback can monitor the precision of ternary gas mixing more accurately.In addition, the present invention can be arranged accordingly in each pipeline
Pressure gauge, flowmeter further realize being precisely controlled online for distribution numerical value.Further, electrical ratio through the invention
Valve can be precisely controlled the partial pressure that three road gases enter gas mixing pipe road.And then solve prior art air distribution system in without real-time monitoring,
The technical problem of the degree of automation difference.
Preferably, the C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure is identical and in simultaneously
Connection setting includes pressure reducing valve, solenoid valve, admission line；
The steel cylinder of the gas source of the air inlet and input of the admission line is connected to, the gas outlet of the admission line with it is described
C4F7N/CO2/O2Three-element mixed gas body divides the inlet end connection of mixed pipe line structure；The pressure reducing valve, solenoid valve are arranged at
In the admission line.
When needing to input a certain gas (C4F7N or CO2Or O2) when, the present invention is by opening corresponding pressure reducing valve, electromagnetism
Valve carries out pressure-reduced and-regulated to the gas, the gas after pressure stabilizing is input to by admission line by controlling the aperture of pressure reducing valve
C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure.
Preferably, the C4F7N/CO2/O2It includes gas pressure regulation pipe that three-element mixed gas body, which divides mixed pipe line structure,
Line structure, gas mixing pipeline structure；The gas pressure adjusts the inlet end and the C of pipeline structure4F7N air inlet pipeline knot
The outlet side of structure, CO2The outlet side of air inlet pipeline structure, O2The outlet side of air inlet pipeline structure is connected to, to therein to inputting
Its pressure of gas is regulated and controled；The gas pressure adjust pipeline structure outlet side and the gas mixing pipeline structure into
Gas end connection, to mix the gas after level pressure.
Preferably, it includes pressure regulation tube road, proportioning valve, the first solenoid valve that the gas pressure, which adjusts pipeline structure,；Institute
The air inlet for stating pressure regulation tube road is connected to the outlet side of each air inlet pipeline structure, the gas outlet in the pressure regulation tube road
It is connected to the inlet end of the gas mixing pipeline structure；The proportioning valve, the first solenoid valve are arranged at the pressure and adjust
In pipeline.
As a certain gas (C4F7N or CO2Or O2) be input to pressure regulation tube road after, by adjust proportioning valve aperture, come
It realizes and is adjusted (level pressure) to being delivered to the gas of gas mixing pipeline structure its pressure, after gas conveying,
Close pressure reducing valve, the solenoid valve in the gas inlet pipeline structure.
Preferably, the gas mixing pipeline structure includes mixing outlet pipe, the second electromagnetism after preceding admission line, mixing
Valve, third solenoid valve, partial pressure blending tank；
The air inlet of admission line is connected to the outlet side of each air inlet pipeline structure before the mixing, before the mixing
The gas outlet of admission line is connected to the air inlet of the partial pressure blending tank；The gas outlet of the partial pressure blending tank is mixed with described
The air inlet connection of outlet pipe afterwards, the gas outlet of outlet pipe and the C after the mixing4F7N/CO2/O2Three-element mixed gas
The inlet end of body output pipe structure is connected to；
The second solenoid valve is arranged before the mixing on admission line, and the third solenoid valve is arranged in the mixing
Afterwards on outlet pipe.
The present invention is by opening second solenoid valve, the C after level pressure4F7N、CO2、O2Successively pass through C respectively4F7N air inlet pipe
Line structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure is input to before mixing in admission line, and in partial pressure blending tank into
Row mixing after mixing, closes second solenoid valve and opens third solenoid valve, mixed C4F7N/CO2/O2Ternary mixing
Gas outlet pipe after mixing exports.
Preferably, the gas mixing pipeline structure further includes circulation mixed pipe line structure；The circulation mixed pipe line knot
Structure includes circulating line, the 4th solenoid valve, circulation pressure reducing valve, circulating pump, the 5th solenoid valve；
The air inlet of the circulating line is connected to the gas outlet of the partial pressure blending tank, the gas outlet of the circulating line
It is connected to the air inlet of the partial pressure blending tank；4th solenoid valve, circulation pressure reducing valve, circulating pump, the 5th solenoid valve are all provided with
It sets on the circulating line；Wherein, the 4th solenoid valve, the 5th solenoid valve respectively close to it is described partial pressure blending tank gas outlet,
The air inlet of the partial pressure blending tank.
The present invention by close second solenoid valve, third solenoid valve, open the 4th solenoid valve, circulation pressure reducing valve, circulating pump,
5th solenoid valve divides the C in blending tank4F7N/CO2/O2Three-element mixed gas body is exported from the gas outlet of partial pressure blending tank to following
In endless tube road, export from circulating line to the air inlet of partial pressure blending tank, in this way, carrying out circulation mixing.
Preferably, the C4F7N/CO2/O2It is two that three-element mixed gas body, which divides mixed pipe line structure,；The circulating line
Including the circulation air inlet section being sequentially communicated that finishes up, circulation section, circulation air outlet section；It is described circulation air inlet section air inlet with it is corresponding
The gas outlet connection of blending tank is divided, two the 4th solenoid valves are arranged in corresponding circulation air inlet section, follow described in two
The gas outlet of ring air inlet section is connected to the air inlet of a circulation section；The circulation pressure reducing valve, circulating pump are arranged at
On the circulation section, the gas outlet of the circulation section is connected to the air inlets of two circulation air outlet sections, and two described the
Five solenoid valves be arranged in corresponding circulation air outlet section, it is described circulation air outlet section gas outlet with it is corresponding divide blending tank into
Port connection.Preferably, check valve is additionally provided on circulation section.
Preferably, the C4F7N/CO2/O2Three-element mixed gas body output pipe structure includes gas output supervisor after mixing
Gas output branch pipeline, the 6th solenoid valve, the 7th solenoid valve, negative pressure pump/vacuum pump, check valve after road, mixing；
The air inlet and the C of gas output main pipeline after the mixing4F7N/CO2/O2The partial pressure mixing of three-element mixed gas body
The outlet side of pipeline structure is connected to, and gas output branch pipeline is connected in parallel on gas output main pipeline after the mixing after the mixing
On；6th solenoid valve, negative pressure pump/vacuum pump, check valve are arranged at after the mixing on gas output branch pipeline, institute
The 7th solenoid valve is stated to be arranged after the mixing on gas output main pipeline.
The C4F7N/CO2/O2Three-element mixed gas body output pipe structure realizes C by following steps4F7N/CO2/O2Ternary is mixed
Close the output of gas；The C completed through partial pressure blending tank distribution4F7N/CO2/O2Three-element mixed gas body, when just starting output,
Since its pressure is larger, at this point, opening the 7th solenoid valve, C by closing the 6th solenoid valve4F7N/CO2/O2Three-element mixed gas body
Main pipeline output is exported by gas after mixing.C in partial pressure blending tank4F7N/CO2/O2The pressure of three-element mixed gas body is low
In setting value (100kPa), at this point, only exporting main pipeline by gas after mixing it is difficult that the remaining C in blending tank will be divided4F7N/
CO2/O2The output of three-element mixed gas body；At this point, opening the 6th solenoid valve, vacuum pump or negative pressure by closing the 7th solenoid valve
Pump, check valve, C4F7N/CO2/O2Three-element mixed gas body is by vacuum pump or the air-extraction function of negative pressure pump, the gas after mixing
Output branch pipeline output, until as the C in partial pressure blending tank4F7N/CO2/O2The pressure reduction of three-element mixed gas body is to 5kPa
Until.
Preferably, the C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2The quantity of air inlet pipeline structure is extremely
It is one less, and all air inlet pipeline structures are mutually arranged in parallel.
Invention additionally discloses a kind of using above-mentioned C4F7N/CO2/O2Three-element mixed gas body divides air distributing device and carries out
C4F7N/CO2/O2The method for dividing distribution, comprising the following steps:
S1, to the C4F7N/CO2/O2Three-element mixed gas body divides air distributing device and carries out vacuumize process；
S2、C4F7N、CO2、O2Pass through C respectively4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure
It is input to the C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure；
S3、C4F7N、CO2、O2In C4F7N/CO2/O2Constant pressure mixing theory is carried out in three-element mixed gas body partial pressure mixed pipe line structure；
Multiple C4F7N/CO2/O2Three-element mixed gas body divides the alternately distribution, gas transmission of mixed pipe line structure；
C after S4, constant pressure mixing theory4F7N/CO2/O2Pass through C4F7N/CO2/O2Three-element mixed gas body output pipe structure output.
The present invention has the advantages that
First, the present invention replaces the dynamic quantitative distribution of the prior art using partial pressure distribution, partial pressure distribution is applied
In the formulation art of three-element mixed gas body, distribution speed can be greatlyd improve, to meet the need of this atmospheric chamber equipment of GIL
It wants.
Second, since the present invention includes multiple C4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line structure and in simultaneously
Connection setting, when real work, by by multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is divided into two
Group so that wherein one group be in distribution when, another group in output mixed gas state so that system is always
It is carried out in distribution, the synchronous of gas transmission, saves the distribution time, further increase air distribution efficiency.
Third, the invention discloses a kind of C4F7N/CO2/O2Three-element mixed gas body divides air distributing device, realizes three kinds of gas
The preparation of body provides specific preparation program and feasibility device for the preparation of ternary and the above gas.Prepare ternary
When the above mixed gas, it is only necessary to increase air inlet gas circuit in air inlet pipeline part, other do not change.
Further, the free movement between gas molecule is relied solely on compared with prior art to realize the mode of gas mixing,
The present invention is by setting circulation mixed pipe line structure, so that C4F7N、CO2、O2Mix under flow regime, it can be more into one
Step improves C4F7N、CO2、O2Mixing efficiency, finally improve air distribution efficiency.
Further, the present invention can be able to achieve by the setting of circulation pressure reducing valve to the C for being input to circulating line4F7N、CO2、
O2The adjusting of flow, and then realize the C that the unit time is controlled according to specific distribution requirement, distribution environment4F7N、CO2、O2's
Combined amount improves the flexibility of mixing.
Further, since the present invention is only with a circulation section, that is, it is able to achieve the middle gas of above-mentioned two partial pressure blending tank
Mixing, thus the integrated result for simplifying the complexity of circuit design, improving pipeline.
Further, C of the invention4F7N/CO2/O2Three-element mixed gas body output pipe structure provides two sets of air delivering pipelines,
When mixture pressure is larger, the open-minded of main pipeline is exported using gas after mixing, C can be completed4F7N/CO2/O2Three
The output of first mixed gas, when mixture pressure be less than 100kPa when, by open mixing after gas output branch pipeline, benefit
With vacuum pump or negative pressure pump air-extraction function, guarantee that the mixed gas in partial pressure blending tank is exported as much as possible, and can prevent
Next time prepares the mixed gas of different proportion different pressures, and cross contamination occurs.
Detailed description of the invention
Fig. 1 is C in the embodiment of the present invention4F7N/CO2/O2The structural schematic diagram of three-element mixed gas body partial pressure air distributing device.
Fig. 2 is the structural schematic diagram of air inlet pipeline structure in the embodiment of the present invention.
Fig. 3 is C in the embodiment of the present invention4F7N/CO2/O2The structural representation of three-element mixed gas body partial pressure mixed pipe line structure
Figure.
Fig. 4 is the structural schematic diagram that mixed pipe line structure is recycled in the embodiment of the present invention.
Fig. 5 is C in the embodiment of the present invention4F7N/CO2/O2The structural schematic diagram of three-element mixed gas body output pipe structure.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention,
Technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is the present invention one
Divide embodiment, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art are not making
Every other embodiment obtained, shall fall within the protection scope of the present invention under the premise of creative work.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to
To another element or it may be simultaneously present centering elements.
Embodiment 1
As shown in Figure 1, the present embodiment discloses a kind of C4F7N/CO2/O2Three-element mixed gas body divides air distributing device, including
C4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline structure 3, C4F7N/CO2/O2Three-element mixed gas body partial pressure
Mixed pipe line structure 4, C4F7N/CO2/O2Three-element mixed gas body output pipe structure 5.
C4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline structure 3 is to respectively by C4F7N、CO2、
O2Successively it is delivered to C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure.C4F7N/CO2/O2Three-element mixed gas body
Mixed pipe line structure is divided to input C therein4F7N、CO2、O2Carry out level pressure and by the C after level pressure4F7N、CO2、O2It carries out
Mixing, C4F7N/CO2/O2Three-element mixed gas body output pipe structure 5 is to the C after exporting constant pressure mixing theory4F7N/CO2/O2Ternary is mixed
Close gas.
Multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is in be arranged in parallel.
The present invention is first to C4F7N/CO2/O2Three-element mixed gas body divides air distributing device and carries out vacuumize process, then will
C4F7N、CO2、O2Pass through C respectively4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline structure 3 is input to
C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure, and in C4F7N/CO2/O2The partial pressure mixing of three-element mixed gas body
Constant pressure mixing theory is carried out in pipeline structure, and guarantees multiple C4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line structure alternating
Carry out constant pressure mixing theory (distribution), gas transmission.C after constant pressure mixing theory4F7N/CO2/O2Three-element mixed gas body passes through C4F7N/CO2/O2Ternary
Mixed gas output pipe structure 5 exports.
Compared with prior art, there are following advantages by the present invention: first, the invention discloses a kind of C4F7N/CO2/O2Ternary
Mixed gas divides air distributing device, realizes the preparation of three kinds of gas, provides and specifically matches for the preparation of the above gas of ternary
Scheme and feasibility device processed.Second, the present invention replaces the dynamic quantitative distribution of the prior art using partial pressure distribution, will divide
Press-fitting gas is applied in the formulation art of three-element mixed gas body, distribution speed can be greatlyd improve, to meet this atmosphere of GIL
The needs of room equipment.Third, since the present invention includes multiple C4F7N/CO2/O2Three-element mixed gas body divide mixed pipe line structure and
In being arranged in parallel, when real work, by by multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is divided into
Two groups so that wherein one group be in distribution when, another group in output mixed gas state so that system begin
It is carried out eventually in distribution, the synchronous of gas transmission, saves the distribution time, further increase air distribution efficiency.
Embodiment 2
As shown in Fig. 2, due to C of the invention4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline knot
Structure 3 is all the same, and the present embodiment is with C4F7N air inlet pipeline structure 1 is object, carries out its structure, working principle discloses, CO2Air inlet pipe
Line structure 2, O2Air inlet pipeline structure 3 its structure, working principle are referring to the present embodiment.
C4F7N air inlet pipeline structure 1 includes pressure reducing valve 11, solenoid valve 12, admission line 13.
The air inlet and C of admission line 134F7The connection of N steel cylinder, C4F7N is from C4F7N steel cylinder is input in admission line 13, into
The gas outlet of feed channel 13 and C4F7N/CO2/O2Three-element mixed gas body divides the inlet end connection of mixed pipe line structure.Pressure reducing valve
11, solenoid valve 12 is successively set in admission line 13 from front to back according to the tandem that gas conveys.
Specifically, when needing to input C4F7When N, the present invention is depressurized by opening pressure reducing valve 11, solenoid valve 12 by control
The aperture of valve 11, to C4F7N carries out pressure-reduced and-regulated, it is preferable that pressure stablizes the CO within 0.9MPa2、O2Pressure is stablized
It is in this data area.C after pressure stabilizing4F7N is input to C by admission line 134F7N/CO2/O2Three-element mixed gas body point
It presses in mixed pipe line structure.
When needing to input CO2、O2When, principle is same as above.It should be noted that preferably, C of the present invention4F7N、CO2、O2According to
The sequence of front and back is successively delivered to three-element mixed gas body partial pressure mixed pipe line structure rather than a variety of gas with various while conveying, as
Described in the embodiment of the present invention 1, by C4F7N、CO2、O2Pass sequentially through C4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Into
Tracheae line structure 3 is input to C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure.
Certainly, proportioning valve 412 of the invention is arranged one in each air inlet pipeline, that is to say, that each air inlet pipeline knot
Structure is respectively arranged a proportioning valve 412, air inlet pipelines several in this way can air inlet simultaneously, distribution rate can be greatly improved.
Embodiment 3
As shown in Figure 1,3, the C of the present embodiment4F7N/CO2/O2It includes gas that three-element mixed gas body, which divides mixed pipe line structure,
Pressure regulation tube line structure 41, gas mixing pipeline structure 42.The inlet end and C of gas pressure adjusting pipeline structure 414F7N into
The outlet side of tracheae line structure 1, CO2The outlet side of air inlet pipeline structure 2, O2The outlet side of air inlet pipeline structure 3 is connected to, to
Regulate and control to its pressure of gas therein is inputted.Gas pressure adjusts outlet side and the gas mixing pipeline knot of pipeline structure 41
The inlet end of structure 42 is connected to, to mix the gas after level pressure.
Embodiment 4
As shown in figure 3, the present embodiment discloses a kind of specific gas pressure adjusting pipeline structure 41, including pressure regulation tube
Road 411, proportioning valve 412, the first solenoid valve 413.The outlet of the air inlet in pressure regulation tube road 411 and each air inlet pipeline structure
End connection, the gas outlet in pressure regulation tube road 411 is connected to the inlet end of gas mixing pipeline structure 42.Proportioning valve 412, first
Solenoid valve 413 is successively set on pressure regulation tube road 411 from front to back according to the tandem that gas conveys.
The present embodiment is with C4F7Its pressure regulative mode of N carries out disclosure, CO2、O2Its pressure controlled mode is referring to this implementation
Example.
Work as C4F7After N is input to pressure regulation tube road 411, by adjusting the aperture of proportioning valve 412, to realize to being delivered to
The C of gas mixing pipeline structure 424F7Its pressure of N is adjusted, and works as C4F7After N is conveyed, C is closed4F7N air inlet pipeline structure
Pressure reducing valve 11, solenoid valve 12 in 1.
Then successively in the manner described above to the CO for being delivered to gas mixing pipeline structure 422、O2Its pressure is adjusted.
Embodiment 5
As shown in figure 3, the present embodiment discloses a kind of specific gas mixing pipeline structure 42, including mix preceding admission line
421, outlet pipe 422, second solenoid valve 423, third solenoid valve 424, partial pressure blending tank 425 after mixing.
The air inlet of admission line 421 is connected to (i.e. and in Fig. 3 with the outlet side of pressure regulation tube line structure 41 before mixing
The gas outlet in pressure regulation tube road 411 is connected to), the air inlet of the gas outlet of admission line 421 and partial pressure blending tank 425 before mixing
Connection.The gas outlet of partial pressure blending tank 425 is connected to the air inlet of outlet pipe 422 after mixing, outlet pipe 422 after mixing
Gas outlet and C4F7N/CO2/O2The inlet end of three-element mixed gas body output pipe structure 5 is connected to.
For the setting of second solenoid valve 423 before mixing on admission line 421, outlet upon mixing is arranged in third solenoid valve 424
On pipeline 422.
The present invention is by opening second solenoid valve 423, the C after level pressure4F7N、CO2、O2Successively pass through respective pressure respectively
Power adjusts pipeline 411 and is input in the preceding admission line 421 of mixing, and mixed in partial pressure blending tank 425, and mixing finishes
Afterwards, third solenoid valve 424, mixed C are opened4F7N/CO2/O2Three-element mixed gas body outlet pipe 422 after mixing exports.
Preferably, within the concentration value of mixed gas and the concentration value deviation of setting are less than 0.5%, show that tank is intracorporal
Gas is by evenly mixing.
Embodiment 6
As shown in figure 4, gas mixing pipeline structure 42 of the invention further includes circulation mixed pipe line structure 426.Circulation is mixed
Closing pipeline structure 426 includes circulating line, the 4th solenoid valve 4262, circulation pressure reducing valve 4263, circulating pump 4264, the 5th solenoid valve
4265。
The air inlet of circulating line is connected to the gas outlet of partial pressure blending tank 425, and the gas outlet of circulating line and partial pressure are mixed
Close the air inlet connection of tank 425.4th solenoid valve 4262, circulation pressure reducing valve 4263, circulating pump 4264, the 5th solenoid valve 4265 are
It is arranged on circulating line.Wherein, the 4th solenoid valve 4262, the 5th solenoid valve 4265 go out respectively close to partial pressure blending tank 425
Port, the air inlet for dividing blending tank 425.
The present invention opens the 4th solenoid valve 4262, circulation decompression by closing second solenoid valve 423, third solenoid valve 424
Valve 4263, circulating pump 4264, the 5th solenoid valve 4265 divide the C in blending tank 4254F7N/CO2/O2Three-element mixed gas body from point
The gas outlet of pressure blending tank 425 is exported into circulating line, is exported from circulating line to the air inlet of partial pressure blending tank 425,
In this way, carrying out circulation mixing.
Rely solely on the free movement between gas molecule compared with prior art to realize that the mode of gas mixing, the present invention are logical
Setting circulation mixed pipe line structure 426 is crossed, so that C4F7N、CO2、O2Mix under flow regime, can further mention
High C4F7N、CO2、O2Mixing efficiency, finally improve air distribution efficiency.
The present invention can be realized by the setting of circulation pressure reducing valve 4263 to the C for being input to circulating line4F7N、CO2、O2's
The adjusting of flow, and then realize according to specific distribution requirement, the C of distribution environmental Kuznets Curves unit time4F7N、CO2、O2Mixing
Amount, improves the flexibility of mixing.
Embodiment 7
As shown in figure 4, the C of the present embodiment4F7N/CO2/O2The quantity that three-element mixed gas body divides mixed pipe line structure is two
It is a, wherein the partial pressure blending tank 425 in a partial pressure mixed pipe line structure is the first partial pressure blending tank (not marking in figure), separately
Partial pressure blending tank 425 in one partial pressure mixed pipe line structure is the second partial pressure blending tank (not marking in figure).
Circulating line includes circulation air inlet section 42611, circulation section 42612, the circulation air outlet section that ending is sequentially communicated
42613.The air inlet for recycling air inlet section 42611 is connected to the gas outlet of corresponding partial pressure blending tank 425, two the 4th solenoid valves
4262 be arranged in corresponding circulation air inlet section 42611, two recycle air inlet section 42611 gas outlet with a circulation section
42612 air inlet connection.Circulation pressure reducing valve 4263, circulating pump 4264 are arranged on circulation section 42612, circulation section 42612
The gas outlet air inlet that recycles air outlet sections 42613 with two be connected to, two the 5th solenoid valves 4265 are arranged to follow corresponding
In ring air outlet section 42613, the gas outlet for recycling air outlet section 42613 is connected to the air inlet of corresponding partial pressure blending tank 425.
When the first partial pressure blending tank carries out distribution, the second partial pressure blending tank carries out gas transmission.That is, mixed with the first partial pressure
The 4th solenoid valve 4262, the 5th solenoid valve 4265 of conjunction tank cooperation are in the open state and first divides the second of blending tank cooperation
When solenoid valve 423, third solenoid valve 424 are in close state, with second partial pressure blending tank cooperation the 4th solenoid valve 4262,
5th solenoid valve 4265 is in close state and at the second solenoid valve 423 of the first partial pressure blending tank cooperation, third solenoid valve 424
In open state.
Since the present invention is only with a circulation section 42612, that is, it is able to achieve the middle gas of above-mentioned two partial pressure blending tank 425
Circulation mixing, thus the integrated result for simplifying the complexity of circuit design, improving pipeline.
Embodiment 8
As shown in figure 5, this implementation discloses a kind of specific C4F7N/CO2/O2Three-element mixed gas body output pipe structure, packet
Include mixing after gas output main pipeline 51, mixing after gas output branch pipeline 52, the 6th solenoid valve 53, the 7th solenoid valve 54,
Negative pressure pump or vacuum pump 55, check valve 56.
The air inlet and C of gas output main pipeline 51 after mixing4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line knot
The outlet side of structure is connected to, after mixing on the output of the gas upon mixing main pipeline 51 in parallel of gas output branch pipeline 52.6th electricity
Magnet valve 53, vacuum pump 55 or negative pressure pump, check valve 56 are respectively provided on gas output branch pipeline 52 upon mixing, the 7th electromagnetism
The setting of valve 54 is upon mixing on gas output main pipeline 51.
The C4F7N/CO2/O2Three-element mixed gas body output pipe structure 5 realizes C by following steps4F7N/CO2/O2Ternary
The output of mixed gas；The C completed through partial pressure 425 distribution of blending tank4F7N/CO2/O2Three-element mixed gas body starts to export just
When, since its pressure is larger, at this point, opening the 7th solenoid valve 54, C by closing the 6th solenoid valve 534F7N/CO2/O2Three
First mixed gas exports main pipeline 51 by gas after mixing and exports.C in partial pressure blending tank 4254F7N/CO2/O2Ternary is mixed
The pressure for closing gas is lower than setting value (100kPa), at this point, only being difficult to divide by gas output main pipeline 51 after mixing mixed
Close the remaining C in tank 4254F7N/CO2/O2The output of three-element mixed gas body；At this point, opening the 6th by closing the 7th solenoid valve 54
Solenoid valve 53, vacuum pump 55 or negative pressure pump, check valve 56, C4F7N/CO2/O2Three-element mixed gas body by vacuum pump 55 or
The air-extraction function of negative pressure pump, gas output branch pipeline 52 exports after mixing, until the C in partial pressure blending tank 4254F7N/
CO2/O2Until the pressure reduction to 5kPa of three-element mixed gas body.
C of the invention4F7N/CO2/O2Three-element mixed gas body output pipe structure 5 provides two sets of air delivering pipelines, works as mixing
When gas pressure is larger, the open-minded of main pipeline 51 is exported using gas after mixing, C can be completed4F7N/CO2/O2Ternary is mixed
Close gas output, when mixture pressure be less than 100kPa when, by open mixing after gas output branch pipeline 52, utilize
Vacuum pump 55 or negative pressure pump air-extraction function guarantee that the mixed gas in partial pressure blending tank 425 is exported as much as possible, and can prevent
Only next time prepares the mixed gas of different proportion different pressures, and cross contamination occurs.
Preferably, vacuum pump 55 of the invention preferably uses rattan original oilless vacuum pump, and the area that common pipeline vacuumizes
It is not, conventional vacuum, which pumps, lubricating oil, in mixed gas process for preparation, if using conventional vacuum pump 55, it may
Polluted gas.
Embodiment 9
As shown in Figure 1, the difference of the present embodiment and above-described embodiment is, C4F7N air inlet pipeline structure 1, CO2Air inlet pipe
Line structure 2, O2The quantity of air inlet pipeline structure 3 is at least one, and all air inlet pipeline structures are mutually arranged in parallel.
Due to C of the invention4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2The quantity of air inlet pipeline structure 3
At least one, i.e. C4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2The quantity of air inlet pipeline structure 3 can be more
It is a, in this way, can satisfy the preparation of the gas more than ternary, such as quaternary gas, five yuan of gases are prepared, this can be further expanded
Application field of the device, method of invention in terms of distribution.
It should be noted that C in the present invention4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline knot
Structure 3 is in order to facilitate C of the embodiment of the present invention4F7N/CO2/O2Used by its statement for preparing working principle of three-element mixed gas body
A kind of naming method.Obviously, C4F7N air inlet pipeline structure 1 can only not only input C4F7N；CO2Air inlet pipeline structure 2, O2Air inlet
Pipeline structure 3 is similarly.
Embodiment 10
As shown in Figure 1, the present invention discloses a kind of C4F7N/CO2/O2Three-element mixed gas body divides air distributing device, including C4F7N
Air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline structure 3, C4F7N/CO2/O2The partial pressure mixing of three-element mixed gas body
Pipeline structure 4, C4F7N/CO2/O2Three-element mixed gas body output pipe structure 5.
C4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline structure 3 is to by respective gas
(C4F7N、CO2、O2) successively it is delivered to C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure.C4F7N/CO2/O2Three
First mixed gas partial pressure mixed pipe line structure is to input C therein4F7N、CO2、O2Carry out constant pressure mixing theory, C4F7N/CO2/O2
Three-element mixed gas body output pipe structure 5 is to the C after exporting constant pressure mixing theory4F7N/CO2/O2Three-element mixed gas body.
Multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is in be arranged in parallel.
Due to C of the invention4F7N air inlet pipeline structure 1, CO2Air inlet pipeline structure 2, O2Air inlet pipeline structure 3 is all the same,
The present embodiment is with C4F7N air inlet pipeline structure 1 is object, carries out its structure, the disclosure of working principle, CO2Air inlet pipeline structure 2,
O2Air inlet pipeline structure 3 its structure, working principle are referring to the present embodiment.
C4F7N air inlet pipeline structure 1 includes pressure reducing valve 11, solenoid valve 12, admission line 13.
The air inlet and C of admission line 134F7The connection of N steel cylinder, C4F7N is from C4F7N steel cylinder is input in admission line 13, into
The gas outlet of feed channel 13 and C4F7N/CO2/O2Three-element mixed gas body divides the inlet end connection of mixed pipe line structure.Pressure reducing valve
11, solenoid valve 12 is successively set in admission line 13 from front to back according to the tandem of the conveying of gas.
C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure includes that gas pressure adjusts pipeline structure 41, gas
Body mixed pipe line structure 42.The inlet end and C of gas pressure adjusting pipeline structure 414F7The outlet side of N air inlet pipeline structure 1,
CO2The outlet side of air inlet pipeline structure 2, O2The outlet side of air inlet pipeline structure 3 is connected to, to gas therein is inputted, it is pressed
Power is regulated and controled.The outlet side that gas pressure adjusts pipeline structure 41 is connected to the inlet end of gas mixing pipeline structure 42, is used
The gas (gas after level pressure) after pressure controlling to be mixed.
Gas pressure adjusts pipeline structure 41, including pressure regulation tube road 411, proportioning valve 412, the first solenoid valve 413.Pressure
Power adjust pipeline 411 air inlet be connected to the outlet side of each air inlet pipeline structure, the gas outlet in pressure regulation tube road 411 and
The inlet end of gas mixing pipeline structure 42 is connected to.Proportioning valve 412, the first solenoid valve 413 are suitable according to the front and back of the conveying of gas
Sequence is successively set on from front to back in pressure regulation tube road 411.
Gas mixing pipeline structure 42, including mix outlet pipe 422, second solenoid valve after preceding admission line 421, mixing
423, third solenoid valve 424, partial pressure blending tank 425.
Mix before admission line 421 air inlet be connected to the outlet side of each air inlet pipeline structure (i.e. with pressure tune
Length of tubing 411 is connected to), the gas outlet of admission line 421 is connected to the air inlet of partial pressure blending tank 425 before mixing.Partial pressure mixing
The gas outlet of tank 425 is connected to the air inlet of outlet pipe 422 after mixing, the gas outlet of outlet pipe 422 and C after mixing4F7N/
CO2/O2The inlet end of three-element mixed gas body output pipe structure 5 is connected to.
For the setting of second solenoid valve 423 before mixing on admission line 421, outlet upon mixing is arranged in third solenoid valve 424
On pipeline 422.
Gas mixing pipeline structure 42 of the invention further includes circulation mixed pipe line structure 426.Recycle mixed pipe line structure
426 include circulating line 4261, the 4th solenoid valve 4262, circulation pressure reducing valve 4263, circulating pump 4264, the 5th solenoid valve 4265.
The air inlet of circulating line 4261 is connected to the gas outlet of partial pressure blending tank 425, the gas outlet of circulating line 4261
It is connected to the air inlet of partial pressure blending tank 425.4th solenoid valve 4262, circulation pressure reducing valve 4263, circulating pump 4264, the 5th electromagnetism
Valve 4265 is arranged on circulating line.Wherein, the 4th solenoid valve 4262, the 5th solenoid valve 4265 are respectively close to partial pressure blending tank
425 gas outlet, the air inlet for dividing blending tank 425.
Preferably, the C of the present embodiment4F7N/CO2/O2It is two that three-element mixed gas body, which divides mixed pipe line structure, wherein
Partial pressure blending tank 425 in one partial pressure mixed pipe line structure is the first partial pressure blending tank, another partial pressure mixed pipe line structure
In partial pressure blending tank 425 be second partial pressure blending tank.
Circulating line includes circulation air inlet section 42611, circulation section 42612, the circulation air outlet section that ending is sequentially communicated
42613.The air inlet for recycling air inlet section 42611 is connected to the gas outlet of corresponding partial pressure blending tank 425, two the 4th solenoid valves
4262 be arranged in corresponding circulation air inlet section 42611, two recycle air inlet section 42611 gas outlet with a circulation section
42612 air inlet connection.Circulation pressure reducing valve 4263, circulating pump 4264 are arranged on circulation section 42612, circulation section 42612
The gas outlet air inlet that recycles air outlet sections 42613 with two be connected to, two the 5th solenoid valves 4265 are arranged to follow corresponding
In ring air outlet section 42613, the gas outlet for recycling air outlet section 42613 is connected to the air inlet of corresponding partial pressure blending tank 425.
C4F7N/CO2/O2Gas output main pipeline 51, mixing after three-element mixed gas body output pipe structure 5, including mixing
Gas output branch pipeline 52, the 6th solenoid valve 53, the 7th solenoid valve 54, negative pressure pump, check valve 56 afterwards.
The air inlet and C of gas output main pipeline 51 after mixing4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line knot
The outlet side of structure is connected to (being connected to outlet pipe 422 after mixing), and gas output branch pipeline 52 is connected in parallel on mixing after mixing
Afterwards on gas output main pipeline 51.6th solenoid valve 53, vacuum pump 55 or negative pressure pump, check valve 56 are respectively provided with gas upon mixing
On body output branch pipeline 52, the setting of the 7th solenoid valve 54 is upon mixing on gas output main pipeline 51.
Embodiment 11
Due to C4F7N has unique physicochemical property, and each pipeline is all made of polytetrafluoroethylene (PTFE) in air distributing device of the present invention
Pipe, to avoid pipeline material to C4F7N is impacted.
In conclusion the present invention realizes the preparation of three kinds of gas, and the preparation for the above gas of binary provides specifically
Preparation program and feasibility device.The present invention replaces the dynamic quantitative distribution of the prior art using partial pressure distribution, will divide
Press-fitting gas is applied in the formulation art of three-element mixed gas body, distribution speed can be greatlyd improve, to meet this atmosphere of GIL
The needs of room equipment.Since the present invention includes multiple C4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line structure and in simultaneously
Connection setting, when real work, by by multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is divided into two
Group so that wherein one group be in distribution when, another group be in gas transmission state match so that system is in always
Gas, the synchronous of gas transmission carry out, and save the distribution time, further increase air distribution efficiency.
The present invention has the C that not only can accurately prepare different proportion, different pressures4F7N/CO2/O2Three-element mixed gas body, and
And can realize the preparation of Diversity gas, distribution speed is fast, the small technical effect of error.
It should be noted that, in this document, such as first and second or the like relational terms are used merely to one if it exists
A entity or operation with another entity or operate distinguish, without necessarily requiring or implying these entities or operation it
Between there are any actual relationship or orders.Moreover, the terms "include", "comprise" or its any other variant are intended to
Cover non-exclusive inclusion, so that the process, method, article or equipment for including a series of elements not only includes those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or setting
Standby intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that
There is also other identical elements in the process, method, article or apparatus that includes the element.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these modification or
Replacement, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (10)
1. a kind of C4F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that including C4F7N air inlet pipeline knot
Structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure, C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure,
C4F7N/CO2/O2Three-element mixed gas body output pipe structure；
The C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure is to by C4F7N、CO2、O2It is successively defeated
It send to the C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure；The C4F7N/CO2/O2Three-element mixed gas body
Mixed pipe line structure is divided to input C therein4F7N、CO2、O2Carry out level pressure and by the C after level pressure4F7N、CO2、O2It carries out
Mixing, the C4F7N/CO2/O2Three-element mixed gas body output pipe structure is to the C after exporting constant pressure mixing theory4F7N/CO2/O2Three
First mixed gas；
Multiple C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure is in be arranged in parallel.
2. C according to claim 14F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that described
C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2Air inlet pipeline structure is identical and in being arranged in parallel, include pressure reducing valve,
Solenoid valve, admission line；
The gas outlet of the admission line and the C4F7N/CO2/O2The inlet end of three-element mixed gas body partial pressure mixed pipe line structure
Connection；The pressure reducing valve, solenoid valve are arranged in the admission line.
3. C according to claim 14F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that described
C4F7N/CO2/O2Three-element mixed gas body partial pressure mixed pipe line structure includes that gas pressure adjusts pipeline structure, gas mixing pipeline
Structure；The gas pressure adjusts the inlet end and the C of pipeline structure4F7The outlet side of N air inlet pipeline structure, CO2Air inlet pipe
The outlet side of line structure, O2The outlet side of air inlet pipeline structure is connected to, to regulate and control to input its pressure of gas therein；
The outlet side that the gas pressure adjusts pipeline structure is connected to the inlet end of the gas mixing pipeline structure, to by level pressure
Gas afterwards is mixed.
4. C according to claim 34F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that the gas
Body pressure regulation tube line structure includes pressure regulation tube road, proportioning valve, the first solenoid valve；The air inlet in the pressure regulation tube road
It is connected to the outlet side of each air inlet pipeline structure, the gas outlet in the pressure regulation tube road and the gas mixing pipeline structure
Inlet end connection；The proportioning valve, the first solenoid valve are arranged in the pressure regulation tube road.
5. C according to claim 34F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that the gas
Body mixed pipe line structure includes that outlet pipe, second solenoid valve, third solenoid valve, partial pressure are mixed after admission line, mixing before mixing
Close tank；
The air inlet of admission line is connected to the outlet side of each air inlet pipeline structure before the mixing, air inlet before the mixing
The gas outlet of pipeline is connected to the air inlet of the partial pressure blending tank；The gas outlet of the partial pressure blending tank goes out with after described mix
The air inlet of feed channel is connected to, the gas outlet of outlet pipe and the C after the mixing4F7N/CO2/O2Three-element mixed gas body is defeated
The inlet end connection of pipeline structure out；
The second solenoid valve is arranged before the mixing on admission line, and the third solenoid valve, which is arranged after the mixing, to be gone out
In feed channel.
6. C according to claim 54F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that the gas
Body mixed pipe line structure further includes circulation mixed pipe line structure；The circulation mixed pipe line structure includes circulating line, the 4th electricity
Magnet valve, circulation pressure reducing valve, circulating pump, the 5th solenoid valve；
The air inlet of the circulating line is connected to the gas outlet of the partial pressure blending tank, the gas outlet of the circulating line and institute
State the air inlet connection of partial pressure blending tank；4th solenoid valve, circulation pressure reducing valve, circulating pump, the 5th solenoid valve are arranged at
On the circulating line；Wherein, the 4th solenoid valve, the 5th solenoid valve respectively close to the partial pressure blending tank gas outlet, described
Divide the air inlet of blending tank.
7. C according to claim 64F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that described
C4F7N/CO2/O2It is two that three-element mixed gas body, which divides mixed pipe line structure,；The circulating line includes that ending is sequentially communicated
Recycle air inlet section, circulation section, circulation air outlet section；
The air inlet of the circulation air inlet section is connected to the gas outlet of corresponding partial pressure blending tank, and two the 4th solenoid valves are set
It sets in corresponding circulation air inlet section, the gas outlet of two circulation air inlet sections connects with the air inlet of a circulation section
It is logical；The circulation pressure reducing valve, circulating pump are arranged on the circulation section, the gas outlet of the circulation section with followed described in two
The air inlet of ring air outlet section is connected to, and two the 5th solenoid valves are arranged in corresponding circulation air outlet section, the circulation outlet
The gas outlet of section is connected to the air inlet of corresponding partial pressure blending tank.
8. C according to claim 14F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that described
C4F7N/CO2/O2Three-element mixed gas body output pipe structure includes gas output point after gas output main pipeline, mixing after mixing
Branch pipe(tube), the 6th solenoid valve, the 7th solenoid valve, negative pressure pump/vacuum pump, check valve；
The air inlet and the C of gas output main pipeline after the mixing4F7N/CO2/O2Three-element mixed gas body divides mixed pipe line
The outlet side of structure is connected to, and gas exports on main pipeline after gas output branch pipeline is connected in parallel on the mixing after the mixing；
6th solenoid valve, negative pressure pump/vacuum pump, check valve are arranged at after the mixing on gas output branch pipeline, described
7th solenoid valve is arranged after the mixing on gas output main pipeline.
9. C according to claim 14F7N/CO2/O2Three-element mixed gas body divides air distributing device, which is characterized in that described
C4F7N air inlet pipeline structure, CO2Air inlet pipeline structure, O2The quantity of air inlet pipeline structure is at least one, and all air inlets
Pipeline structure is mutually arranged in parallel.
10. a kind of using such as the described in any item C of claim 1-94F7N/CO2/O2Three-element mixed gas body divide air distributing device into
Row C4F7N/CO2/O2The method for dividing distribution, which comprises the following steps:
S1, to the C4F7N/CO2/O2Three-element mixed gas body divides air distributing device and carries out vacuumize process；
S2、C4F7N、CO2、O2Pass through C4F7N air inlet pipeline structure, CO respectively2Air inlet pipeline structure, O2The input of air inlet pipeline structure
To the C4F7N/CO2/O2Three-element mixed gas body divides in mixed pipe line structure；
S3、C4F7N、CO2、O2In C4F7N/CO2/O2Constant pressure mixing theory is carried out in three-element mixed gas body partial pressure mixed pipe line structure；It is multiple
The C4F7N/CO2/O2Three-element mixed gas body divides the alternately distribution, gas transmission of mixed pipe line structure；
C after S4, constant pressure mixing theory4F7N/CO2/O2Pass through C4F7N/CO2/O2Three-element mixed gas body output pipe structure output.
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