CN110319789A - A kind of detection device and method of harmonic reducer flexible wheel tooth profile error and warping function - Google Patents

A kind of detection device and method of harmonic reducer flexible wheel tooth profile error and warping function Download PDF

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Publication number
CN110319789A
CN110319789A CN201910633256.9A CN201910633256A CN110319789A CN 110319789 A CN110319789 A CN 110319789A CN 201910633256 A CN201910633256 A CN 201910633256A CN 110319789 A CN110319789 A CN 110319789A
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rotating platform
precise rotating
laser displacement
displacement sensor
special fixture
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CN201910633256.9A
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CN110319789B (en
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刘志峰
张涛
杨聪彬
张彩霞
胡秋实
纪新宇
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Beijing University of Technology
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Beijing University of Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/16Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2416Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures of gears

Abstract

The invention discloses the detection devices and method of a kind of harmonic reducer flexible wheel tooth profile error and warping function, the detection device includes the high precision turntable system being installed on optical flat, the installation and 360 degree of uniformly indexing rotations of flexbile gear are realized by high precision turntable system, laser displacement sensor is installed on horizontal sliding table by sensor stand, and realize that laser passes through the central axis of precision turntable by being moved forward and backward adjustment, the calibration of flank profil point position is realized with this;The present invention is by establishing the corresponding relationship between laser displacement sensor and precise rotating platform, obtain the radius vector of flexbile gear flank profil point data under the conditions of different corners, compare the point data coordinate of theoretic profile, the profile error of different corners is obtained, is harmonic speed reducer practical tooth and the characterization of deformation equation to have established theoretical and experiment basis.

Description

A kind of detection device and method of harmonic reducer flexible wheel tooth profile error and warping function
Technical field
The present invention relates to the designs of harmonic speed reducer and manufacturing field technical field, more particularly to a kind of harmonic speed reducer The detection device and method of flexbile gear tooth profile error and warping function.
Background technique
Harmonic speed reducer is the core element of joint of robot, and the engagement of harmonic reducer flexible wheel and firm gear belongs to large deformation Under the conditions of low module multi-tooth meshing.The large deformation process of harmonic speed reducer refers to that the wave producer of ellipse is packed into flexible bearing The spatial movement process for the flexbile gear tooth realized in flexbile gear inner ring rotation process afterwards.For flexbile gear flank profil during large deformation envelope Tangential displacement, radial displacement and axial corner, mostly use finite element simulation and traditional empirical equation to obtain at present, do not have In view of real material and heat treatment and mismachining tolerance bring influence.In addition, using three traditional coordinate probe contacts formulas Detection process needs to customize dedicated microminiature detection probe and special-purpose software, and the customisation costs of software and hardware are expensive and measurement is all Time phase is longer.Non-contact measuring technology using laser displacement sensor is current fine module gear detection, complex teeth surfaces The advanced means of detection and accurate displacement detection.
Summary of the invention
Object of the present invention is to: to obtain the flank profil data and installation wave producer and flexible shaft that flexbile gear actual processing is completed Flank profil deformation data after holding is proposed by the radial distance of corresponding high-precision grating rotary table corner and laser displacement sensor A kind of detection device and method of harmonic reducer flexible wheel tooth profile error and warping function.
The technical solution used in the present invention is:
A kind of detection device of harmonic reducer flexible wheel tooth profile error and warping function, the detection device include being installed on light The high precision turntable system on plate 1 is learned, the installation and 360 degree of uniformly indexing rotations of flexbile gear 5 are realized by high precision turntable system Turn, laser displacement sensor 7 is installed on horizontal sliding table 8 by sensor stand 6, and realizes laser by being moved forward and backward adjustment Across the central axis of precision turntable 3, the calibration of flank profil point position is realized with this;
The high-accuracy turret systems include servo motor 2, precise rotating platform 3 and high-accuracy Circular gratings 11, servo motor 2, closed-loop system is formed between precise rotating platform 3 and high-accuracy Circular gratings 11, servo motor 2 is connect with precise rotating platform 3, high-accuracy Circular gratings 11 are mounted on the outside of precise rotating platform 3, realize corner positioning accuracy less than 30 second of arcs and corner by closed-loop system The real-time output of signal;
The laser displacement sensor 7 should be less than 5um apart from detection accuracy, and be installed on water by sensor stand 6 On somoothing board 8;
The flexbile gear 5 is installed on special fixture 4, and guarantees that flexbile gear unilateral side flank profil is located at the amount of laser displacement sensor 7 Within the scope of journey;
The special fixture 4 includes the bolt hole 13 fixed with precise rotating platform 3, positions the inner circle 14 of flexbile gear cup body, dedicated The concentricity of fixture inner circle 14 and special fixture outer circle 12 is less than 0.015mm and special fixture outer circle 12 and 3 center of precise rotating platform The concentricity of axis should be less than 0.01mm;
The machining accuracy of the special fixture inner circle 14 is identical as the machining accuracy of harmonic reducer flexible wheel outer housing inner hole;
This method comprises the following steps:
Step 1: precise rotating platform 3 is installed on optical platform 1, installs special fixture 4, and survey respectively by amesdial The rotational plane of precise rotating platform 3 and the bounce of 4 outer circle of special fixture are measured, until the outer circle bounce numerical value of special fixture 4 is less than essence Circle when close 3 table top of turntable rotates is jumped, to realize special fixture 4 with 3 axis of precise rotating platform to alignment;
Step 2: using 7 centering debugging tool of laser displacement sensor, repeats the operating process of step 1, realizes laser The centering of the centering debugging tool and 3 axis of precise rotating platform of displacement sensor 7 operates, at this point, the translation of laser displacement sensor 7 is simultaneously Real time distance is carried out, is to realize laser displacement sensor 7 with precise rotating platform 4 to alignment apart from shortest position:
Step 3: servo motor 2 drives the uniformly indexing rotation of precise rotating platform 3, while acquiring corner and sensing with laser displacement The distance measurements of device, through Calibration of Laser displacement sensor position at a distance from turntable center axis, realize precise rotating platform corner with The one-to-one correspondence of undeformed flexbile gear tooth radius is fitted contrast standard flexbile gear profile geometry, extracts flexbile gear flank profil elementary error;
Step 4: installation flexible bearing and central axis, while acquiring the corner and laser displacement biography of high-accuracy Circular gratings 11 The distance measurements of sensor 7 realize accurate turn through 7 laser position of Calibration of Laser displacement sensor at a distance from turntable center axis The one-to-one correspondence of 3 corner of platform and 5 flank profil radius of flexbile gear;
The advantages and positive effects of the present invention are: the present invention by establish laser displacement sensor and precise rotating platform it Between corresponding relationship, obtain the radius vector of flexbile gear flank profil point data under the conditions of different corners, compare the point data coordinate of theoretic profile, The profile error of different corners is obtained, is harmonic speed reducer practical tooth and the characterization of deformation equation to have established theoretical and experiment Basis.
Detailed description of the invention
The detection device of Fig. 1 harmonic reducer flexible wheel tooth profile error and warping function;
Fig. 2 harmonic reducer flexible wheel special fixture;
Wherein, 1 optical flat, 2 servo motors, 3 precise rotating platforms, 4 special fixtures, 5 flexbile gears, 6 laser displacement sensor branch Frame, 7 laser displacement sensors, 8 horizontal sliding tables, 9 slide unit brackets, 10 mounting seats, 11 high-accuracy Circular gratings, outside 12 special fixtures Circle, 13 bolt holes, 14 special fixture inner circles
Specific embodiment
In order to further understand the content, features and effects of the present invention, the following examples are hereby given, and cooperate attached drawing Detailed description are as follows:
As shown in Figure 1, a kind of detection device of harmonic reducer flexible wheel tooth profile error and warping function, which includes such as Flowering structure: the high precision turntable system being installed on optical flat 1 realizes the installation and 360 degree of uniformly indexing rotations of flexbile gear 5, swashs Optical displacement sensor 7 is installed on horizontal sliding table 8 by sensor stand 6, and realizes that laser passes through by being moved forward and backward to adjust The central axis of precision turntable 3 realizes the calibration of flank profil point position with this;
The high-accuracy turret systems include that servo motor 2, precise rotating platform 3 and high-accuracy Circular gratings 11 form closed loop system System realizes real-time output of the corner positioning accuracy less than 30 second of arcs and angular signal;
The laser displacement sensor 7 should be less than 5um apart from detection accuracy, and be installed on water by sensor stand 6 On somoothing board 8;
The flexbile gear 5 is installed on special fixture 4, and guarantees that flexbile gear unilateral side flank profil is located at the amount of laser displacement sensor 7 Within the scope of journey;
As shown in Fig. 2, the special fixture 4 includes the bolt hole 13 fixed with precise rotating platform 3, the interior of flexbile gear cup body is positioned Circle 14, the concentricity of special fixture inner circle 14 and special fixture outer circle 12 should be less than 0.015 and special fixture outer circle 12 and accurate The concentricity of 3 central axis of turntable should be less than 0.01;
As shown in Fig. 2, the machining accuracy of the special fixture inner circle 14 should be with harmonic reducer flexible wheel outer housing inner hole Machining accuracy it is identical;
This method comprises the following steps:
Step 1: precise rotating platform 3 is installed on optical platform 1, installs special fixture 4, and survey respectively by amesdial The rotational plane of precise rotating platform 3 and the bounce of 4 outer circle of special fixture are measured, until the outer circle bounce numerical value of special fixture 4 is less than essence Circle when close 3 table top of turntable rotates is jumped, to realize special fixture 4 with 3 axis of precise rotating platform to alignment;
Step 2: using 7 centering debugging tool of laser displacement sensor, repeats the operating process of step 1, realizes laser The centering of the centering debugging tool and 3 axis of precise rotating platform of displacement sensor 7 operates, at this point, the translation of laser displacement sensor 7 is simultaneously Real time distance is carried out, is to realize laser displacement sensor 7 with precise rotating platform 4 to alignment apart from shortest position:
Step 3: servo motor 2 drives the uniformly indexing rotation of precise rotating platform 3, while acquiring corner and sensing with laser displacement The distance measurements of device, through Calibration of Laser displacement sensor position at a distance from turntable center axis, realize precise rotating platform corner with The one-to-one correspondence of undeformed flexbile gear tooth radius is fitted contrast standard flexbile gear profile geometry, extracts flexbile gear flank profil elementary error;
Step 4: installation flexible bearing and central axis, while acquiring the corner and laser displacement biography of high-accuracy Circular gratings 11 The distance measurements of sensor 7 realize accurate turn through 7 laser position of Calibration of Laser displacement sensor at a distance from turntable center axis The one-to-one correspondence of 3 corner of platform and 5 flank profil radius of flexbile gear;
The advantages and positive effects of the present invention are: the present invention by establish laser displacement sensor and precise rotating platform it Between corresponding relationship, obtain the radius vector of flexbile gear flank profil point data under the conditions of different corners, compare the point data coordinate of theoretic profile, The profile error of different corners is obtained, is harmonic speed reducer practical tooth and the characterization of deformation equation to have established theoretical and experiment Basis.

Claims (3)

1. a kind of detection device of harmonic reducer flexible wheel tooth profile error and warping function, it is characterised in that: the detection device packet Include the high precision turntable system being installed on optical flat (1), by high precision turntable system realize flexbile gear (5) installation and 360 degree of uniformly indexing rotations, laser displacement sensor (7) is installed on horizontal sliding table (8) by sensor stand (6), and is led to It crosses and is moved forward and backward the central axis that adjustment realization laser passes through precise rotating platform (3), the calibration of flank profil point position is realized with this;
The high-accuracy turret systems include servo motor (2), precise rotating platform (3) and high-accuracy Circular gratings (11), servo electricity Closed-loop system, servo motor (2) and precise rotating platform are formed between machine (2), precise rotating platform (3) and high-accuracy Circular gratings (11) (3) it connects, high-accuracy Circular gratings (11) are mounted on the outside of precise rotating platform (3), realize corner positioning accuracy by closed-loop system Less than the real-time output of 30 second of arcs and angular signal;
The laser displacement sensor (7) should be less than 5um apart from detection accuracy, and be installed on water by sensor stand (6) On somoothing board (8);
The flexbile gear (5) is installed on special fixture (4), and guarantees that flexbile gear unilateral side flank profil is located at laser displacement sensor (7) In range ability;
The special fixture (4) includes the bolt hole (13) fixed with precise rotating platform (3), in the special fixture for positioning flexbile gear cup body The concentricity of circle (14), special fixture inner circle (14) and special fixture outer circle (12) is less than 0.015mm and special fixture outer circle (12) it should be less than 0.01mm with the concentricity of precise rotating platform (3) central axis.
2. the detection device of a kind of harmonic reducer flexible wheel tooth profile error and warping function according to claim 1, special Sign is: the machining accuracy and the machining accuracy phase of harmonic reducer flexible wheel outer housing inner hole of the special fixture inner circle (14) Together.
3. utilizing the detection side of a kind of harmonic reducer flexible wheel tooth profile error and warping function that claim 1 described device carries out Method, it is characterised in that: this method comprises the following steps,
Step 1: precise rotating platform (3) is installed on optical flat and (on 1, installs special fixture (4), and is surveyed respectively by amesdial The rotational plane of precise rotating platform (3) and the bounce of special fixture (4) outer circle are measured, until the outer circle bounce numerical value of special fixture (4) Circle when less than the rotation of precise rotating platform (3) table top is jumped, to realize special fixture (4) with precise rotating platform (3) axis to lieutenant colonel It is quasi-;
Step 2: using laser displacement sensor (7) centering debugging tool, repeats the operating process of step 1, realizes laser position The centering of the centering debugging tool and precise rotating platform (3) axis of displacement sensor (7) operates, at this point, laser displacement sensor (7) is flat Real time distance is moved and carried out, is to realize laser displacement sensor (7) with precise rotating platform (3) to lieutenant colonel apart from shortest position It is quasi-:
Step 3: servo motor (2) drives precise rotating platform (3) uniformly indexing rotation, while acquiring corner and sensing with laser displacement The distance measurements of device, through Calibration of Laser displacement sensor position at a distance from turntable center axis, realize precise rotating platform corner with The one-to-one correspondence of undeformed flexbile gear tooth radius is fitted contrast standard flexbile gear profile geometry, extracts flexbile gear flank profil elementary error;
Step 4: installation flexible bearing and central axis, while acquiring the corner and laser displacement sensing of high-accuracy Circular gratings (11) The distance measurements of device (7) are realized accurate through Calibration of Laser displacement sensor (7) laser position at a distance from turntable center axis The one-to-one correspondence of turntable (3) corner and flexbile gear (5) flank profil radius.
CN201910633256.9A 2019-07-15 2019-07-15 Detection device and method for tooth profile error and deformation function of flexible gear of harmonic reducer Active CN110319789B (en)

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CN110986813A (en) * 2019-12-11 2020-04-10 北京工业大学 Radial deformation measurement system for harmonic reducer flexible gear
CN112033296A (en) * 2020-08-07 2020-12-04 北京工业大学 Harmonic drive flexible gear radial deformation reconfigurable measuring device
CN113587846A (en) * 2021-08-01 2021-11-02 北京工业大学 Small modulus tooth profile detection method based on coordinate transformation principle
CN113791480A (en) * 2021-07-17 2021-12-14 国华(青岛)智能装备有限公司 Precise swing angle table for optical experiment and assembling method
CN114234855A (en) * 2021-11-22 2022-03-25 北京航天控制仪器研究所 Small-angle corner calibration device and method for galvanometer motor
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Publication number Priority date Publication date Assignee Title
CN110986813A (en) * 2019-12-11 2020-04-10 北京工业大学 Radial deformation measurement system for harmonic reducer flexible gear
CN112033296A (en) * 2020-08-07 2020-12-04 北京工业大学 Harmonic drive flexible gear radial deformation reconfigurable measuring device
CN113791480A (en) * 2021-07-17 2021-12-14 国华(青岛)智能装备有限公司 Precise swing angle table for optical experiment and assembling method
CN113587846A (en) * 2021-08-01 2021-11-02 北京工业大学 Small modulus tooth profile detection method based on coordinate transformation principle
CN114234855A (en) * 2021-11-22 2022-03-25 北京航天控制仪器研究所 Small-angle corner calibration device and method for galvanometer motor
CN114234855B (en) * 2021-11-22 2024-04-09 北京航天控制仪器研究所 Small-angle rotation angle calibration device and method for vibrating mirror motor
CN115615373A (en) * 2022-12-19 2023-01-17 山东九博智能装备有限公司 Harmonic gear radial runout detection device, detection method and control method

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