CN110311530B - Magnetic inversion bistable vibration energy collector manufactured in integrated mode - Google Patents
Magnetic inversion bistable vibration energy collector manufactured in integrated mode Download PDFInfo
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- CN110311530B CN110311530B CN201910555283.9A CN201910555283A CN110311530B CN 110311530 B CN110311530 B CN 110311530B CN 201910555283 A CN201910555283 A CN 201910555283A CN 110311530 B CN110311530 B CN 110311530B
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- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
- H02K35/02—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving magnets and stationary coil systems
Abstract
The invention discloses an integrally manufactured magnetic reversal bistable vibration energy collector which comprises a planar coil, a vibration magnetic pole, a flat plate, an upper magnetic yoke and a lower magnetic yoke, wherein the flat plate is respectively provided with a through hole and a magnetic yoke through hole, the vibration magnetic pole is arranged at the through hole, the planar coil is fixed at the magnetic yoke through hole, the upper magnetic yoke is fixed on the upper surface of the flat plate, and the lower magnetic yoke is fixed on the lower surface of the flat plate; the vibration magnetic pole can move up and down; the magnetic flux of the planar coil is changed in size and the direction of the magnetic flux is reversed by the up-and-down movement of the vibrating magnetic pole, so that the change rate of the magnetic flux is increased, the bistable switching under the magnetic action of the upper magnetic yoke and the lower magnetic yoke is realized, the polarity reversal and the bistable switching effect are easily superposed, the working bandwidth is increased, the output power density is obviously improved, and the device is easy to integrate and manufacture.
Description
Technical Field
The invention relates to the technical field of efficient collection and utilization of micro-scale environment vibration energy, in particular to an integrally manufactured magnetic inversion bistable vibration energy collector.
Background
The vibration energy collector converts vibration energy in the environment into electric energy through different mechanisms (electromagnetic type, electrostatic type, piezoelectric type and friction power generation type) so as to drive an electronic device to work. The electromagnetic vibration energy collector has attracted much attention due to the characteristics of low output impedance, high output power and the like, and has wide application prospects in power supply of wireless sensor network nodes, wearable equipment and medical implant devices.
At present, the working bandwidth and the output power of the miniaturized vibration energy harvester are too low, which becomes one of the bottleneck problems limiting the application. The existing research develops a great deal of exploration from the angle of improving the vibration energy transfer efficiency by using bistable vibration and improving the energy conversion efficiency by using magnetic circuit optimization respectively, but related analysis and optimization are usually limited to a certain link in energy transfer or energy conversion, and the comprehensive improvement of the transfer and conversion efficiency is difficult to be considered from the angle of the whole energy conversion process; the adopted vibration pickup structure, such as a cantilever beam and the like, is difficult to realize flexible adjustment of the structure dynamic characteristics, and is difficult to realize integrated manufacturing by adopting a high-aspect-ratio structure. Therefore, how to realize the integrated manufacturing of the device on the basis of the performance optimization becomes a critical problem to be solved urgently.
Through the search of the prior art documents, X.Xing et al, written in Applied Physics Letter (Applied Physics journal), written in the text "broadband vibration energy harvester with high permeability material", propose a broadband vibration energy harvester based on high permeability material. The author makes the cantilever beam through utilizing high magnetic permeability soft magnetic material, introduces bistable magnetic force nonlinearity between polarity reversal permanent magnetism to each other on the one hand, realizes widening of operating band, on the other hand utilizes the double change of magnetic flux size and direction when soft magnetic cantilever beam switches back and forth between polarity reversal permanent magnetism to each other, and the inside magnetic flux rate of change of coil that the parcel is soft magnetic cantilever beam is showing to increase to improve power output. Although the design scheme simultaneously realizes two functions of generating reversal magnetic flux and bistable switching by using the permanent magnet and realizes magnetic flux convergence by using the soft magnetic cantilever beam, the following defects still exist: firstly, the design of a device structure and a magnetic circuit is not developed aiming at the dual requirements of expanding the bandwidth and improving the energy conversion efficiency from the angle of the whole energy conversion process, the common action of bistable state and polarity inversion is difficult to be fully coordinated, the effect that one is added to one and is more than two is achieved, and meanwhile, the adjustment of the structural rigidity by the cantilever beam is only realized by adjusting the length, the width and the thickness, and the flexible adjustment is difficult to realize according to the requirement of bistable state switching. Secondly, in the scheme, because the cantilever beam is a vibration pickup structure and a magnetic conduction structure, the structural parameters of the cantilever beam not only need to consider that the requirement of bistable switching on rigidity cannot be randomly adjusted, but also need to increase the cross section area as much as possible in order to reduce the magnetic resistance, so that the comprehensive requirements of the structural rigidity and the magnetic flux convergence are difficult to be considered, and the contradiction on the design of the device is caused. Finally, from the overall structure, although the cantilever beam made of the high-permeability material has the effect of converging the magnetic flux, the overall magnetic circuit is still an open-loop magnetic circuit, and more magnetic fields are still not effectively utilized. And the whole structure is designed based on the traditional mechanical processing technology thought, and the coil is formed by manual winding and is difficult to realize by means of a micro-processing technology, so that the feasibility of reducing the volume of the device by utilizing a semiconductor technology is greatly limited.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide an integrally manufactured magnetic inversion bistable vibration energy collector, which has the structural design that the superposition effect of polarity inversion and bistable switching can be fully utilized, the dual requirements of widening the working bandwidth and the output power are considered, meanwhile, the integrated manufacturing of a closed magnetic circuit and a vibration pickup structure is realized, the excitation spectrum characteristics of different application environment working conditions can be aimed at, the bistable structure with adjustable depth of a potential well is realized under the microscale, and the high-efficiency conversion and utilization of vibration energy are met.
In order to achieve the purpose, the invention adopts the following technical scheme:
an integrally manufactured magnetic reversal bistable vibration energy collector comprises a planar coil, a vibration magnetic pole, a flat plate, an upper magnetic yoke and a lower magnetic yoke, wherein the flat plate is respectively provided with a through hole and a magnetic yoke through hole which are communicated, the vibration magnetic pole is arranged at the through hole, the planar coil is fixed at the magnetic yoke through hole, the upper magnetic yoke is fixed on the upper surface of the flat plate, and the lower magnetic yoke is fixed on the lower surface of the flat plate; the vibration magnetic pole can move up and down;
when the vibrating magnetic pole moves to the lower position, the upper part of the vibrating magnetic pole is positioned between the upper magnetic yoke and the lower magnetic yoke, and the magnetic flux of the vibrating magnetic pole returns to the vibrating magnetic pole through the upper magnetic yoke, the magnetic yoke through hole, the planar coil and the lower magnetic yoke in sequence to form a magnetic conduction loop;
when the vibration magnetic pole moves to an upper position, the lower part of the vibration magnetic pole is positioned between the upper magnetic yoke and the lower magnetic yoke, and the magnetic flux of the vibration magnetic pole sequentially passes through the lower magnetic yoke, the planar coil, the magnetic yoke through hole and the upper magnetic yoke and returns to the vibration magnetic pole to form a magnetic conduction loop;
the magnetic flux of the planar coil is changed in size and the direction of the magnetic flux is reversed through the up-and-down movement of the vibrating magnetic pole, so that the change rate of the magnetic flux is increased, and the bistable switching under the magnetic action of the upper magnetic yoke and the lower magnetic yoke is realized.
Preferably, the planar coil is composed of an induction coil winding, a central yoke and an insulating layer, wherein the induction coil winding is fixed in the insulating layer, and the central yoke is fixed at the center of the induction coil winding.
Preferably, the induction coil winding is formed by combining a plurality of layers of square or round spiral metal coils in a spiral involute mode.
Preferably, the vibration magnetic pole is composed of two permanent magnets with opposite polarities and a planar spring, wherein the planar spring is composed of a frame, a cantilever beam and a central movable platform, the two permanent magnets are respectively arranged above and below the central movable platform, the magnetic flux directions are mutually reversed to form a polarity reversal permanent magnet pair, and the frame and the cantilever beam support the central movable platform and the polarity reversal permanent magnet pair in a suspended manner at the through hole.
Preferably, the cantilever beam layout is central symmetry and plays the fixed and guide effect.
Preferably, the flat plate is composed of a top plate and a bottom plate, the top plate and the bottom plate main body are filling layers, an upper magnetic yoke through hole and an upper through hole are formed in the top plate, a lower magnetic yoke through hole and a lower through hole are formed in the bottom plate, the upper magnetic yoke through hole and the lower magnetic yoke through hole are correspondingly formed in positions, and the upper through hole and the lower through hole are correspondingly formed in positions.
Preferably, the upper magnetic yoke comprises an upper main magnetic yoke and an upper auxiliary magnetic yoke, the lower magnetic yoke comprises a lower main magnetic yoke and a lower auxiliary magnetic yoke, the upper main magnetic yoke and the lower main magnetic yoke are in a shape like a Chinese character 'ji', one end of each main magnetic yoke is positioned at one side of the through hole, the other end of each main magnetic yoke is connected with the through hole of the corresponding magnetic yoke, the middle part of each main magnetic yoke is tightly attached to the edge of the corresponding flat plate, the upper auxiliary magnetic yoke is arranged at the other side of the through hole and is positioned on the same central axis line with the upper main magnetic yoke, and the lower auxiliary magnetic yoke is arranged at the.
Compared with the prior art, the invention has at least one of the following beneficial effects:
1. the invention can adjust the structural rigidity from the aspects of the layout, the shape, the size and the like of the cantilever beam by adopting the plane spring structure, overcomes the limitation that the rigidity can only be adjusted by changing the size of the cantilever beam in the prior art, and provides a flexible adjusting means for reasonably configuring the magnetic-mechanical composite rigidity according to the characteristics of the working condition of the external environment and the requirements of both working bandwidth and output power.
2. Secondly, by separately arranging the vibration pickup structure and the magnetic conduction structure, the problem that the cantilever beam in the prior art needs to form a magnetic conduction magnetic circuit and also needs to be used as the vibration pickup structure is avoided, and the structural guarantee is provided for reducing the magnetic resistance and accurately setting the structural rigidity in the design of the device in the contradiction situation on the selection of materials and structural dimensions.
3. Finally, through the design of the laminated structure, the difficulty of a complex three-dimensional structure required by realizing polarity inversion and bistable switching by using an integrated manufacturing method is reduced, the advantage of high processing precision of integrated manufacturing methods such as photoetching, micro-electroforming and the like can be fully exerted, the setting and adjustment of micron-scale precision magnetic circuits and mechanical structure parameters are realized, and the precision requirements of realizing polarity inversion and bistable switching on the magnetic circuits and the mechanical structure parameters are ensured, so that the manufacturing cost of devices is reduced, the process steps are simplified, and the integrated circuit processing technology is easy to realize batch production.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a schematic diagram of the overall structure of an integrated magnetic inversion bistable vibration energy harvester according to a preferred embodiment of the invention;
FIG. 2 is a schematic cross-sectional view of the integrally fabricated magnetic inversion bistable vibration energy harvester of FIG. 1 with the top plate removed;
FIG. 3 is a bottom view of the integrally fabricated magnetic inversion bistable vibration energy harvester of FIG. 1;
FIG. 4 is a first magnetic flux direction diagram of a preferred embodiment of the present invention;
fig. 5 is a second magnetic flux direction diagram according to a preferred embodiment of the invention.
The scores in the figure are indicated as:
the magnetic resonance imaging device comprises a planar coil 1, a vibration magnetic pole 2, a top plate 3, a bottom plate 4, an induction coil winding 5, a central magnetic yoke 6, an insulating layer 7, a permanent magnet 8, a permanent magnet 9, a planar spring 10, a frame 11, a cantilever beam 12, a central movable platform 13, an upper filling layer 14, an upper main magnetic yoke 15, an upper auxiliary magnetic yoke 16, an upper through hole 17, an upper magnetic yoke through hole 18, a lower filling layer 19, a lower main magnetic yoke 20, a lower auxiliary magnetic yoke 21, a lower through hole 21 and a lower magnetic yoke through hole 23.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
As shown in fig. 1-5, the invention is a partial illustration of an integrated magnetic inversion bistable vibration energy harvester.
As shown in fig. 1 to 5, the integrally manufactured magnetic inversion bistable vibration energy harvester in the present embodiment includes a planar coil 1, a vibration magnetic pole 2, a top plate 3, and a bottom plate 4; the planar coil 1 and the vibrating magnetic pole 2 are located on the same plane, and the top plate 3 and the bottom plate 4 are symmetrically arranged above and below the plane.
As shown in fig. 2, the planar coil 1 is composed of an induction coil winding 5, a central yoke 6 and an insulating layer 7, the induction coil winding 5 is fixed in the insulating layer 7, and is composed of a plurality of layers of square or round spiral metallic copper coils combined in a spiral involute manner.
In some embodiments, the height, line width, and turn-to-turn distance of the induction coil winding 5 are all in the range of 10-30 microns; preferably, the height, line width and turn-to-turn distance of the coil winding 5 are all 15 μm. The insulating layer 7 is made of polyimide, alumina or poly-p-xylylene chloride; preferably, the insulating layer 7 is made of polyimide.
As shown in fig. 2 and 3, the vibration magnetic pole 2 is composed of a permanent magnet 8, a permanent magnet 9, and a flat spring 10, and the flat spring 10 is composed of a frame 11, a cantilever beam 12, and a central movable platform 13. The permanent magnets 8 and 9 with the magnetic flux directions reversed form a polarity reversal permanent magnet pair, are positioned above and below the plane spring central movable platform 13, and the distance between the permanent magnets 8 and 9 can be changed by changing the thickness of the central platform 13. The central movable platform 13 and the permanent magnet pair 8 and the permanent magnet 9 can move up and down along the height direction,
in some embodiments, the permanent magnets 8 and 9 are cubic and made of neodymium iron boron, samarium cobalt and the like; preferably, the permanent magnets 8 and 9 are made of neodymium iron boron. The thickness of the planar spring 10 is approximately in the range of 10-30 microns; while it is preferred that the thickness of the planar spring 10 is about 20 microns. The width of the cantilever beam 12 is about 20-50 microns; preferably, the cantilever beam has a width of 30 microns. The area of the central movable platform 13 is about 1-4 square millimeters, and the material is nickel, copper, iron nickel and the like; preferably, the central movable platform 13 is approximately 4 square millimeters in area and the material is electroformed nickel. The layout of the cantilever beam 12 is centrosymmetric, fixed-guide shape, 20 microns thick.
In some embodiments, the cantilever beams 12 may be arranged in a left-right symmetrical arrangement or stacked at the center with the upper through hole 17 and the lower through hole 21 as the center. The shape of the cantilever beam 12 may be crab-leg shape, zigzag shape, etc., which are some preferred embodiments of the present invention, but the present invention is not limited to the above shapes. The dimensions (width, thickness, length, etc.) of the cantilever beam 12 may also vary depending on the desired stiffness of the planar spring 10. The cantilever beam 12 is only used as a vibration pickup structure in the embodiment, so that the contradiction situation that the cantilever beam in the prior art needs to form a magnetic conduction magnetic circuit and also needs to be used as a vibration pickup structure in the selection of materials and structure dimensions is avoided, and the structural guarantee is provided for reducing the magnetic resistance and accurately setting the structural rigidity in the design of a device.
As shown in fig. 1, the top plate 3 includes an upper filling layer 14, an upper main yoke 15, an upper auxiliary yoke 16, an upper through hole 17, and an upper yoke via 18; as shown in fig. 3, the base plate 4 includes a lower filling layer 19, a lower main yoke 20, a lower auxiliary yoke 21, a lower through hole 22, and a lower yoke via 23.
In the top plate 3 and the bottom plate 4, the upper main yoke 15 and the lower main yoke 20 are located on the same side of the upper filling layer 14 and the lower filling layer 19 as the upper sub yoke 16 and the lower sub yoke 21, respectively, i.e., the upper main yoke 15 and the upper sub yoke 16 are located on the upper surface of the upper filling layer 14, and the lower main yoke 20 and the lower sub yoke 21 are located on the lower surface of the lower filling layer 19. The upper through hole 17 and the lower through hole 22, and the upper yoke via hole 18 and the lower yoke via hole 23 are respectively opened at both ends of the upper filling layer 14 and the lower filling layer 19 to be vertically penetrated.
As shown in fig. 1 and 3, the upper and lower main yokes 15 and 20 are in a zigzag shape, wherein one end of the upper main yoke 15 is located at one side of the upper through hole 17, the other end thereof is connected to the upper yoke via hole 18, one end of the lower main yoke 20 is located at one side of the lower through hole 22, the other end thereof is connected to the lower yoke via hole 23, and the middle portions of the two main yokes are respectively closely attached to the edge positions of the corresponding upper and lower filling layers 14 and 19, thereby increasing the distance between the two main yokes and reducing the leakage flux, i.e., the flux in the magnetic path that does not pass through the planar coil.
In one embodiment, the material of the upper and lower filling layers 14 and 19 may be polyimide, epoxy, or the like, with a thickness of about 300 and 400 μm; and preferably, the upper and lower fill layers 14, 19 have a thickness of about 350 microns. The thicknesses of the upper main magnetic yoke 15, the lower main magnetic yoke 20, the upper auxiliary magnetic yoke 16, the lower auxiliary magnetic yoke 21, the upper magnetic yoke through hole 18 and the lower magnetic yoke through hole 23 are about 200 and 1500 microns, and the materials are iron nickel or nickel and the like; preferably, the thickness of the above components is about 500 microns. The side lengths of the upper through hole 17 and the lower through hole 22 are about 1-4 mm, and the side length of the through hole is about 0.5-2 mm; preferably, the side lengths of the upper through hole 17 and the lower through hole 22 are about 3 mm, and the side length of the via hole is about 0.5 mm.
The upper yoke through hole 18 on the top plate 3 is positioned right above the central yoke 6, and the lower yoke through hole 23 on the bottom plate 4 is positioned right below the central yoke 6; the upper through hole 17 of the top plate 3 is located right above the vibration magnetic pole 2, and the lower through hole 22 of the bottom plate 4 is located right below the vibration magnetic pole 2.
As shown in fig. 1 and 3, the sub-yokes located at both sides of the upper and lower through- holes 17 and 22 and one end of the main yoke, i.e., the upper sub-yoke 16 is located at the other side of the upper main yoke 15 from the upper through-hole 17, and the lower sub-yoke 21 is located at the other side of the lower main yoke 20 from the lower through-hole 22. The upper sub yoke 16 is located on the same central axis as the upper main yoke 15, the lower sub yoke 21 and the lower main yoke 20. The upper main magnetic yoke 16 of the top plate 3 and the lower main magnetic yoke 20 of the bottom plate 4 are located on the same side of the vibration pole 2, and the upper main magnetic yoke 15 of the top plate 3 and the lower main magnetic yoke 21 of the bottom plate 4 are located on the other side of the vibration pole 2. In this way, the upper main yoke 15 and the upper sub-yoke 16 constitute an upper yoke, and the lower main yoke 20 and the lower sub-yoke 21 constitute a lower yoke, which are arranged in mirror symmetry with respect to the connection line of the vibration magnetic pole 2 and the planar coil 1 on the upper and lower surfaces of the top plate 3 and the bottom plate 4.
As shown in fig. 1, the permanent magnet 8 above the center movable platform 13 has its N-pole facing one end of the main yoke 15 on the side of the ceiling through hole 17 and its S-pole facing the auxiliary yoke 16 on the other side of the ceiling through hole 17.
As shown in fig. 3, the permanent magnet 9 below the central movable platform 13 has its S-pole facing one end of the main yoke 15 on the side of the top plate through hole 17 and its N-pole facing the auxiliary yoke 16 on the other side of the top plate through hole 17.
Magnetic force exists between the permanent magnets 8 and 9 on the vibration magnetic pole 2 and the main magnetic yokes and the auxiliary magnetic yokes on the top plate 3 and the bottom plate 4, the magnetic force depends on air gaps between the polarity reversal permanent magnets and the main magnetic yokes and the auxiliary magnetic yokes, and the main magnetic yokes and the auxiliary magnetic yokes are respectively arranged on the two sides of the permanent magnets, so that the magnetic force in the horizontal direction can be mutually offset, and the phenomenon that the magnetic poles are twisted due to unbalanced magnetic force to damage the device structure is avoided; the air gap and thus the magnetic force can be adjusted by adjusting the areas of the upper through hole 17 and the lower through hole 22, the area of the central movable platform 13, and the fixed positions of the permanent magnets 8 and 9.
The embodiment adopts the structure of the planar spring 10, can adjust the structural rigidity from various aspects such as the layout, the shape, the size and the like of the cantilever beam 12, overcomes the limitation that the rigidity can only be adjusted by changing the size of the cantilever beam in the prior art, and provides a flexible adjusting means for reasonably configuring the magnetic-mechanical composite rigidity according to the characteristics of the working condition of the external environment and considering the requirements of the working bandwidth and the output power.
As shown in fig. 4, when the vibration magnetic pole 2 moves downward to the lower position, the permanent magnet 8 above the upper portion of the vibration magnetic pole 2, i.e., above the central movable platform 13, is located between the upper main yoke 15 of the top plate 3 and the lower main yoke 20 of the bottom plate 4, and the magnetic flux starts from the N pole of the permanent magnet 8, passes through the air gap between the permanent magnet 8 and the upper main yoke 15, passes through the upper main yoke 15 of the top plate, the upper yoke through hole 18, the central yoke 6, the lower yoke through hole 23, and the lower main yoke 20, passes through the air gap between the lower main yoke 20 and the permanent magnet 8, and reaches the S pole of the permanent magnet 8, forming a.
As shown in fig. 5, when the vibration magnetic pole 2 moves upward to an upper position, the permanent magnet 9 below the central movable platform 13, which is the lower portion of the vibration magnetic pole 2, is located between the upper main yoke 15 and the lower main yoke 20 of the top plate 3 and the bottom plate 4, and the magnetic flux starts from the N pole of the permanent magnet 9, passes through the air gap between the permanent magnet 9 and the lower main yoke 20, passes through the bottom plate lower main yoke 20, the lower yoke through hole 23, the central yoke 6, the upper yoke through hole 18, and the upper main yoke 15, passes through the air gap between the upper main yoke 15 and the permanent magnet 9, reaches the S pole of the permanent magnet 9, and forms a second magnetic conduction.
The first magnetic conduction direction is opposite to the second magnetic conduction direction. Therefore, when the vibration magnetic pole 2 moves up and down, the magnetic flux passing through the induction coil winding 5 changes in magnitude and also reverses its magnetic flux direction, so that the magnetic flux change rate can be significantly increased.
On the other hand, when the vibration pole 2 moves up and down, the upper permanent magnet 8 is located between the upper and lower main yokes 15 and 20 of the top and bottom plates 3 and 4 and the lower permanent magnet 9 is located between the upper and lower main yokes 15 and 20 of the top and bottom plates 3 and 4 in the height direction, respectively, to constitute two bistable states by magnetic force, so that bistable switching can be realized.
The embodiment reduces the difficulty of a complex three-dimensional structure required by realizing polarity inversion and bistable switching by using an integrated manufacturing method through a laminated structure design, can fully exert the advantage of high processing precision of integrated manufacturing methods such as photoetching, micro-electroforming and the like to realize the setting and adjustment of micron-scale precision magnetic circuits and mechanical structure parameters, and ensures the precision requirements of realizing polarity inversion and bistable switching on the magnetic circuits and the mechanical structure parameters, thereby reducing the manufacturing cost of devices, simplifying the process steps and easily realizing batch production by using the integrated circuit processing technology.
In a specific embodiment, by setting the air gaps between the permanent magnets 8 and 9 and the upper and lower main yokes 15 and 20 to be 0.8 mm, the materials of the permanent magnets 8 and 9 are neodymium iron boron, the volume thereof is set to be 4 cubic mm, the distance between the permanent magnets 8 and 9 is set to be 0.5mm, the planar spring 10 is set to be a fixed-guide structure, the thickness thereof is 20 μm, the working bandwidth of the device can reach 75 hz and the output power can reach 146.3 microwatts by adjusting the depth of the potential well of the bistable vibration and the distance between the bistable states, and the corresponding normalized volumetric power density can reach 203.2 microwatts per cubic centimeter per square g.
The embodiment of the invention can fully utilize the superposition effect of polarity inversion and bistable switching for the structural design of the integrally manufactured magnetic inversion bistable vibration energy collector, gives consideration to the dual requirements of widening the working bandwidth and the output power, simultaneously realizes the integrated manufacture of the closed magnetic circuit and the vibration pickup structure, can realize the bistable structure with adjustable depth of a potential well under the microscale aiming at the excitation frequency spectrum characteristics of different application environment working conditions, and meets the high-efficiency conversion and utilization of vibration energy.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments of the invention and the features of the embodiments can be combined with one another arbitrarily without conflict.
Claims (5)
1. An integrated magnetic inversion bistable vibration energy harvester, which is characterized in that: the magnetic resonance vibration magnetic pole comprises a planar coil, a vibration magnetic pole, a flat plate, an upper magnetic yoke and a lower magnetic yoke, wherein the flat plate is respectively provided with a through hole and a magnetic yoke through hole which are communicated, the vibration magnetic pole is arranged at the through hole, the planar coil is fixed at the magnetic yoke through hole, the upper magnetic yoke is fixed on the upper surface of the flat plate, and the lower magnetic yoke is fixed on the lower surface of the flat plate; the vibration magnetic pole can move up and down;
when the vibrating magnetic pole moves to the lower position, the upper part of the vibrating magnetic pole is positioned between the upper magnetic yoke and the lower magnetic yoke, and the magnetic flux of the vibrating magnetic pole returns to the vibrating magnetic pole through the upper magnetic yoke, the magnetic yoke through hole, the planar coil and the lower magnetic yoke in sequence to form a magnetic conduction loop;
when the vibration magnetic pole moves to an upper position, the lower part of the vibration magnetic pole is positioned between the upper magnetic yoke and the lower magnetic yoke, and the magnetic flux of the vibration magnetic pole sequentially passes through the lower magnetic yoke, the planar coil, the magnetic yoke through hole and the upper magnetic yoke and returns to the vibration magnetic pole to form a magnetic conduction loop;
the magnetic flux of the planar coil is changed in size and the direction of the magnetic flux is reversed by the up-and-down movement of the vibrating magnetic pole, so that the change rate of the magnetic flux is increased, and the bistable switching under the magnetic action of the upper magnetic yoke and the lower magnetic yoke is realized;
the vibration magnetic pole is composed of two permanent magnets with opposite polarities and a planar spring, wherein the planar spring is composed of a frame, a cantilever beam and a central movable platform, the two permanent magnets are respectively arranged above and below the central movable platform, the magnetic flux directions are mutually reversed to form a polarity reversal permanent magnet pair, and the frame and the cantilever beam support the central movable platform and the polarity reversal permanent magnet pair in a suspended manner at the through hole;
the flat plate comprises a top plate and a bottom plate, the main bodies of the top plate and the bottom plate are filling layers, an upper magnet yoke through hole and an upper through hole are formed in the top plate, a lower magnet yoke through hole and a lower through hole are formed in the bottom plate, the upper magnet yoke through hole and the lower magnet yoke through hole are correspondingly formed in positions, and the upper through hole and the lower through hole are correspondingly formed in positions;
the upper magnetic yoke comprises an upper main magnetic yoke and an upper auxiliary magnetic yoke, the lower magnetic yoke comprises a lower main magnetic yoke and a lower auxiliary magnetic yoke, the upper main magnetic yoke and the lower main magnetic yoke are in a shape like a Chinese character 'ji', one end of each main magnetic yoke is positioned at one side of the through hole, the other end of each main magnetic yoke is connected with the through hole of the corresponding magnetic yoke, the middle part of each main magnetic yoke is tightly attached to the edge of the corresponding flat plate, the upper auxiliary magnetic yoke is arranged at the other side of the through hole and positioned on the same central axis with the upper main magnetic yoke, and the lower auxiliary magnetic yoke is arranged at the other;
magnetic force exists between the two permanent magnets with opposite polarities on the vibration magnetic pole and the main yoke and the auxiliary yoke on the top plate and the bottom plate, the magnitude of the magnetic force depends on air gaps between the polarity reversal permanent magnets and the main yoke and the auxiliary yoke, and the main yoke and the auxiliary yoke are respectively arranged on the two sides of the permanent magnets, so that the magnetic force in the horizontal direction can be mutually counteracted, and the phenomenon that the magnetic pole is twisted to damage a device structure due to unbalanced magnetic force is avoided; the air gap can be adjusted by adjusting the areas of the upper through hole and the lower through hole and the areas of the central movable platform and the fixed positions of the two permanent magnets with opposite polarities, so that the magnetic force can be adjusted;
the plane spring can adjust the structural rigidity from the layout, the shape and the size of the cantilever beam.
2. An integrally fabricated magnetic inversion bistable vibration energy harvester of claim 1 wherein: the planar coil is composed of an induction coil winding, a central yoke and an insulating layer, wherein the induction coil winding is fixed in the insulating layer, and the central yoke is fixed in the center of the induction coil winding.
3. An integrally fabricated magnetic inversion bistable vibration energy harvester according to claim 2 and further comprising: the induction coil winding is formed by combining a plurality of layers of square or round spiral metal coils according to a spiral involute mode.
4. An integrally fabricated magnetic inversion bistable vibration energy harvester of claim 1 wherein: the cantilever beam layout is central symmetrical and plays a role in fixing and guiding.
5. An integrally fabricated magnetic inversion bistable vibration energy harvester according to any one of claims 2-3 wherein: when the vibration magnetic pole moves downwards until the lower position, the first permanent magnet of the two permanent magnets with opposite polarities at the upper part of the vibration magnetic pole, namely the upper part of the central movable platform, is positioned between the upper main magnetic yoke of the top plate and the lower main magnetic yoke of the bottom plate, and magnetic flux is emitted from the N pole of the first permanent magnet, passes through an air gap between the first permanent magnet and the upper main magnetic yoke, passes through the upper main magnetic yoke of the top plate, the through hole of the upper magnetic yoke, the central magnetic yoke, the through hole of the lower magnetic yoke and the lower main magnetic yoke, passes through the air gap between the lower main magnetic yoke and the first permanent magnet, reaches the S;
when the vibration magnetic pole moves upwards until the vibration magnetic pole moves upwards to an upper position, a second permanent magnet in two permanent magnets with opposite polarities at the lower part of the vibration magnetic pole, namely the lower part of the central movable platform, is positioned between an upper main magnetic yoke and a lower main magnetic yoke of a top plate and a bottom plate, magnetic flux is emitted from the N pole of the second permanent magnet, passes through an air gap between the second permanent magnet and the lower main magnetic yoke, passes through the lower main magnetic yoke of the bottom plate, a through hole of the lower magnetic yoke, the central magnetic yoke, a through hole of the upper magnetic yoke and the upper main magnetic yoke, passes through the air gap between the upper main magnetic yoke;
the first magnetic conduction direction and the second magnetic conduction direction are opposite to each other, so that when the vibration magnetic pole moves up and down, the magnetic flux passing through the induction coil winding not only changes in magnitude, but also reverses in magnetic flux direction, and the magnetic flux change rate can be remarkably increased.
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