CN110307724A - A kind of multiple reactor vacuum drying oven producing silicon monoxide - Google Patents
A kind of multiple reactor vacuum drying oven producing silicon monoxide Download PDFInfo
- Publication number
- CN110307724A CN110307724A CN201910599294.7A CN201910599294A CN110307724A CN 110307724 A CN110307724 A CN 110307724A CN 201910599294 A CN201910599294 A CN 201910599294A CN 110307724 A CN110307724 A CN 110307724A
- Authority
- CN
- China
- Prior art keywords
- collector
- furnace body
- heating response
- silicon monoxide
- drying oven
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 title claims abstract description 58
- 238000001291 vacuum drying Methods 0.000 title claims abstract description 21
- 238000010438 heat treatment Methods 0.000 claims abstract description 92
- 238000006243 chemical reaction Methods 0.000 claims description 7
- 238000009413 insulation Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 5
- 238000007789 sealing Methods 0.000 claims description 5
- 239000007787 solid Substances 0.000 claims description 4
- 238000003860 storage Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 15
- 239000002994 raw material Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000005265 energy consumption Methods 0.000 description 3
- 239000011863 silicon-based powder Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 229910052744 lithium Inorganic materials 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 229910003978 SiClx Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- -1 silicon oxide compound Chemical class 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Drying Of Solid Materials (AREA)
Abstract
It is proposed by the present invention a kind of for producing the multiple reactor vacuum drying oven of silicon monoxide, it include: furnace body, multiple heating response devices, collector, vacuum evacuation device, furnace body one end is equipped with the first bell, the other end is equipped with the second bell, multiple heating response devices are tightly packed and are arranged in furnace body, collector is arranged in furnace body, each heating response device is connected to collector, a confined space is collectively formed in multiple heating response devices and collector, vacuum means are arranged in outside furnace body, and vacuum evacuation device is connected with furnace body.In the present invention, by the way that multiple heating response devices are arranged in furnace body, are conducive to improve production efficiency, and multiple heating response devices share a collector, are conducive to the collection efficiency for improving product, reduce the collection loss of multiple collectors.
Description
Technical field
The present invention relates to the production technical fields of silicon oxide compound, and in particular to a kind of multiple reactor for producing silicon monoxide
Vacuum drying oven.
Background technique
Silicon monoxide is a kind of wide band gap semiconducter optical material, is widely used in vacuum coating, D-T nuclear reaction absolute measurement
Imprison gas target window, laser anti-reflection film and the matrixes such as reflectance coating and radio component, glass, plastics and stationery of radioactivity deuterium
Protective film and insulating film and decorating film raw material.Since the working condition of silicon monoxide is harsh, it is limited to laboratory preparation more,
It is not able to satisfy the market demand.In recent years, silicon monoxide is applied on lithium cell cathode material, is remarkably improved lithium battery
Charge and discharge number and energy density.The technology just gradually moves towards market.Therefore, the demand of silicon monoxide is also swift and violent therewith increases
It is long.But production method before mostly uses electric furnace heating wire to heat, and furnace body is small in size, and single furnace output is low, and energy consumption is high, and production efficiency is low.
Summary of the invention
Technical problems based on background technology, a kind of multiple reactor vacuum producing silicon monoxide proposed by the present invention
Furnace.
It is a kind of for producing the multiple reactor vacuum drying oven of silicon monoxide, comprising: furnace body, multiple heating response devices, collector,
Vacuum evacuation device, furnace body one end are equipped with the first bell, and the other end is equipped with the second bell, and multiple heating response devices are tightly packed and set
It sets in furnace body, collector is arranged in furnace body, and each heating response device is connected to collector, multiple heating response devices and receipts
A confined space is collectively formed in storage, and vacuum means are arranged in outside furnace body, and vacuum evacuation device is connected with furnace body.
Further, multiple heating response devices are individually heated or are heated simultaneously.
It further, further include connecting tube, heating response device is closed end close to one end of the first bell, far from the first furnace
One end of lid is the beginning, and collector is the beginning close to one end of heating response device, and one end far from heating response device is closed end,
Connecting tube one end is equipped with the escape pipe that connect with collector, the other end equipped with the one-to-one air intake branch of heating response device,
Air intake branch is connected with the beginning removable seal of corresponding heating response device, the beginning removable seal of escape pipe and collector
Connection.
Further, air intake branch protrudes into the beginning of corresponding heating response device, the inner wall of the heating response device of fitting and
The first sealing structure is equipped between the outer wall of air intake branch, escape pipe protrudes into the beginning of collector, the inner wall of the collector of fitting
Second seals structure is equipped between the outer wall of escape pipe.
Further, connecting tube is formed using warm material is hindered.
Further, equipped with there are the heat insulation blocks in gap between outlet inside pipe wall in escape pipe.
It further, further include insulating layer, insulating layer wraps up multiple heating response device outer surfaces, insulating layer and inboard wall of furnace body
Between be equipped with gap.
It further, further include heat conducting bar, the second bell offers the through-hole to match with heat conducting bar, heat conducting bar one end and receipts
The closed end of storage is fixedly connected, and the other end is through through-hole and stretches out furnace body, and heat conducting bar is sealedly and fixedly connected with through-hole wall.
Further, heating response device is heating in medium frequency reactor or resistance heating reactor.
Further, furnace body is vertical or horizontal placement.
Compared with prior art, the invention has the following advantages:
(1) by the way that multiple heating response devices are arranged in furnace body, be conducive to improve production efficiency, and multiple heating are reacted
Device shares a collector, is conducive to the collection efficiency for improving product, reduces the collection loss of multiple collectors.
(2) multiple heating response devices are individually heated or are heated simultaneously, can select according to actual needs one of them or
Several heating response devices, which are begun to warm up, heats the raw material for being located at heating response device, reduces production energy consumption.
(3) fixed collector is supported while passing through the heat derives furnace body of heat conducting bar being arranged in collector, is convenient for
The installation and fixation of collector.
Detailed description of the invention
Fig. 1 is proposed by the present invention a kind of for producing the structural schematic diagram one of the multiple reactor vacuum drying oven of silicon monoxide.
Fig. 2 is proposed by the present invention a kind of for producing the structural schematic diagram two of the multiple reactor vacuum drying oven of silicon monoxide.
Fig. 3 is multiple heating reaction in a kind of multiple reactor vacuum drying oven for producing silicon monoxide proposed by the present invention
The structural schematic diagram of pipe.
Fig. 4 is the structure of the connecting tube in a kind of multiple reactor vacuum drying oven for producing silicon monoxide proposed by the present invention
Schematic diagram.
Fig. 5 is proposed by the present invention a kind of for producing the structural schematic diagram three of the multiple reactor vacuum drying oven of silicon monoxide.
Appended drawing reference: furnace body 1, the first bell 21, the second bell 22, multiple heating response devices 3, collector 4, vacuum means
Set 5, insulating layer 6, connecting tube 7, heat conducting bar 8, heat insulation block 9
Specific embodiment
Referring to Fig.1-5, a kind of for producing the multiple reactor vacuum drying oven of silicon monoxide, comprising: including furnace body 1, Duo Gejia
Thermal reactor 3, collector 4, vacuum evacuation device 5,1 one end of furnace body are equipped with the first bell 21, and 1 other end of furnace body is equipped with the second bell
22, multiple heating response devices 3 are tightly packed and are arranged in furnace body 1, and collector 4 is arranged in furnace body 1, each heating response device
3 are connected to collector 4, and a confined space is collectively formed in multiple heating response devices 3 and collector 4, and vacuum evacuation device 5 is set to
Outside furnace body 1, vacuum evacuation device 5 is connected with furnace body 1.
In the present invention, each heating response device 3 is connected to collector 4, and multiple heating response devices 3 and collector 4 are total
With a confined space 4 is formed, in reaction, multiple heating response devices 3 share a collector 4, are conducive to improve product
Collection efficiency reduces the collection loss of multiple collectors 4.
In the present embodiment, multiple heating response devices 3 are individually heated or are heated simultaneously.It, can be according to reality when specifically used
Border demand selects one of them or several heating response devices 3 to begin to warm up and heat to the raw material for being located at heating response device 3,
Production energy consumption is reduced, production efficiency is improved.
It further include connecting tube 7 in the present embodiment, connecting tube 7 is arranged in 3 He of heating response device referring to Fig. 2 and Fig. 4
To be connected to heating response device 3 and collector 4 between collector 4, heating response device 3 is closing close to one end of the first bell 21
End, one end far from the first bell 22 are the beginning, and collector 4 is the beginning close to one end of heating response device 3, far from heating reaction
One end of device 3 is closed end, and 7 one end of connecting tube is equipped with the escape pipe 72 connecting with collector 4, and the other end is equipped with to react with heating
The one-to-one air intake branch 71 of device 3, air intake branch 71 are connected with the beginning removable seal of corresponding heating response device 3, out
Tracheae 72 is connect with the beginning removable seal of collector 4.
It further carries out in mode, air intake branch 71 protrudes into the beginning of corresponding heating response device 3, and the heating of fitting is anti-
It answers and is equipped with the first sealing structure between the inner wall of device 3 and the outer wall of air intake branch 71, escape pipe 72 protrudes into the beginning of collector 4,
Second seals structure is equipped between the inner wall of the collector 4 of fitting and the outer wall of escape pipe 72.First sealing structure and second close
Seal structure is high-temperature resistant seal ring.
It referring to Fig. 2, further carries out in mode, connecting tube 7 is formed using warm material is hindered.Hinder connection made of warm material
Pipe 7 advantageously reduces transfer of 3 heat of heating response device to collector 4, is conducive to the deposition of product, improves the production effect of product
Rate.
It referring to Fig. 2, further carries out in mode, equipped with there are gaps between 72 inner wall of escape pipe in escape pipe 72
Heat insulation block 9.The setting of heat insulation block 9 can be further reduced transfer of 3 heat of heating response device to collector 4, be conducive to product
Deposition, improves the production efficiency of product.
It further include heat conducting bar 8 in the present embodiment, the second bell 22 offers and the matching of heat conducting bar 8 referring to Fig. 5
Through-hole, 8 one end of heat conducting bar are fixedly connected with the closed end of collector 4, and the other end is through through-hole and stretches out furnace body 1, heat conducting bar 8 with
Through-hole wall is sealedly and fixedly connected.Heat conducting bar 8 the heat derives furnace body 1 on collector 4 can be reduced the temperature of collector 4 from
And improve the production efficiency of product；Meanwhile collector 4 is fixedly connected to support fixed collect by heat conducting bar 8 with the second bell 22
Device 4, convenient for the installation and fixation of collector 4.
It in the present embodiment, further include support fixation kit, support fixation kit setting is used to support solid in furnace body 1
Fixed multiple heating response devices 3.First support component is made of refractory material.
It in the present embodiment, further include insulating layer 6, insulating layer 6 is wrapped in multiple 3 outer surfaces of heating response device, heat preservation
Gap is equipped between layer 6 and 1 inner wall of furnace body.Multiple heating response devices 3 are stacked, and 6 tight of insulating layer is in multiple heating
3 outer surface of reactor, insulating layer 6 are conducive to keep 3 temperature of heating response device while keeping 3 stable structure of heating response device
Stabilization and uniformly, reduce energy loss.It in the present embodiment, further include crucible for holding raw material, crucible is placed on
In heating response device 3.Crucible using graphite, perhaps the crucible made of graphite, molybdenum or ceramic material is made in ceramic material to molybdenum
As the container for holding production silicon monoxide raw material, it can be used for a long time, be hardly damaged, and heat transfer effect is good, heat transfer is fast.
In the present embodiment, heating response device 3 is heating in medium frequency reactor or resistance heating reactor.Resistance heating tool
There is wide heating temperature range, the features such as thermal efficiency is high；The principle of heating of heating in medium frequency reactor is electromagnetic induction, Yin Qire
Amount itself generates in workpiece, so it is with homogeneous heating, the spies such as the core watch temperature difference is minimum, heating speed is fast, production efficiency is high
Point is conducive to the production efficiency that body improves silicon monoxide.
In the present embodiment, heating response device 3 is powered using three phase mains, each heating response device 3 is using single-phase
Power supply, ensure that the alternate balance of power grid.
In the present embodiment, furnace body 1 it is vertical or it is horizontal placement to meet different production requirements.
When it is implemented, being put into crucible after silicon powder and silicon dioxide powder are mixed in a certain ratio uniformly, and will fill
The crucible of raw material is put into heating response device 3；Collector 4, connecting tube 7 and heating response device are tightly connected；Close the first furnace
Lid 21 and the second bell 22, are vacuumized by inside of the vacuum evacuation device 5 to furnace body 1；By heating response device 3 to being located at
Raw material in heating response device 3 is heated, so that raw material reaction be made to generate steam；Steam, which diffuses to, condenses shape in collector 4
At solid silicon monoxide；Reaction terminates, and opens the second bell 22 and takes out collector, and takes out one oxygen of solid in collector 4
SiClx；Again crucible adding raw materials into heating response device 3 respectively, repeat the above steps.Specifically, by silicon powder and titanium dioxide
After silicon powder is mixed in a certain ratio uniformly, it is made into bulk, is put into crucible after drying.Specifically, after vacuum degree is less than 10Pa,
Heating response device 3 is begun to warm up.Specifically, the heating temperature of heating response device 3 is 1200-1400 DEG C, heating time is 20 small
When.
The above only invents preferable specific embodiment, but the protection scope invented is not limited thereto, any
Those familiar with the art is in the technical scope that invention discloses, according to the technical solution and its inventive concept of invention
It is subject to equivalent substitution or change, should all covers within the protection scope of invention.
Claims (10)
1. a kind of for producing the multiple reactor vacuum drying oven of silicon monoxide characterized by comprising including furnace body (1), Duo Gejia
Thermal reactor (3), collector (4), vacuum evacuation device (5), furnace body (1) one end are equipped with the first bell (21), and the other end is equipped with the
Two bells (22), multiple heating response devices (3) are tightly packed and are arranged in furnace body (1), and collector (4) is arranged in furnace body (1)
Interior, each heating response device (3) is connected to collector (4), and multiple heating response devices (3) and collector (4) are collectively formed one
A confined space, vacuum evacuation device (5) are set to furnace body (1) outside, and vacuum evacuation device (5) is connected with furnace body (1).
2. according to claim 1 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that multiple heating
Reactor (3) is individually heated or is heated simultaneously.
3. according to claim 1 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that further include connecting
It takes over (7), heating response device (3) is closed end close to the one end of the first bell (21), and one end far from the first bell (22) is
Beginning, collector (4) are the beginning close to the one end of heating response device (3), and one end far from heating response device (3) is closed end,
Connecting tube (7) one end is equipped with the escape pipe (72) connecting with collector (4), and the other end is equipped with a pair of with heating response device (3) one
The air intake branch (71) answered, air intake branch (71) are connected with the beginning removable seal of corresponding heating response device (3), escape pipe
(71) it is connect with the beginning removable seal of collector (4).
4. according to claim 3 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that air intake branch
(71) protrude into the beginning of corresponding heating response device (3), the inner wall of the heating response device (3) of fitting and air intake branch (71) it is outer
The first sealing structure is equipped between wall, escape pipe (71) protrudes into the beginning of collector (4), the inner wall of the collector (4) of fitting and
Second seals structure is equipped between the outer wall of escape pipe (72).
5. according to claim 3 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that connecting tube
(7) using the warm material composition of resistance.
6. according to claim 5 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that escape pipe
(72) equipped with there are the heat insulation block in gap (9) between escape pipe (72) inner wall in.
7. for producing the multiple reactor vacuum drying oven of silicon monoxide according to claim 3-6 any one, feature exists
In further including heat conducting bar (8), the second bell (22) offers the through-hole to match with heat conducting bar (8), heat conducting bar (8) one end and receives
The closed end of storage (4) is fixedly connected, and the other end is through through-hole and stretches out furnace body (1), and heat conducting bar (8) and through-hole wall sealing are solid
Fixed connection.
8. according to claim 7 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that further include protecting
Warm layer (6), insulating layer (6) wraps up multiple heating response device (3) outer surfaces, between being equipped between insulating layer (6) and furnace body (1) inner wall
Gap.
9. according to claim 8 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that heating reaction
Device (3) is heating in medium frequency reactor or resistance heating reactor.
10. according to claim 9 for producing the multiple reactor vacuum drying oven of silicon monoxide, which is characterized in that furnace body (1)
Vertical or horizontal placement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910599294.7A CN110307724A (en) | 2019-07-04 | 2019-07-04 | A kind of multiple reactor vacuum drying oven producing silicon monoxide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910599294.7A CN110307724A (en) | 2019-07-04 | 2019-07-04 | A kind of multiple reactor vacuum drying oven producing silicon monoxide |
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| Publication Number | Publication Date |
|---|---|
| CN110307724A true CN110307724A (en) | 2019-10-08 |
Family
ID=68079198
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910599294.7A Pending CN110307724A (en) | 2019-07-04 | 2019-07-04 | A kind of multiple reactor vacuum drying oven producing silicon monoxide |
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| Country | Link |
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| CN (1) | CN110307724A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113171745A (en) * | 2021-03-16 | 2021-07-27 | 中国原子能科学研究院 | Multichannel reation kettle heating furnace |
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