CN110306157B - Sealing ring coating tool and coating method for vacuum coating machine - Google Patents

Sealing ring coating tool and coating method for vacuum coating machine Download PDF

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Publication number
CN110306157B
CN110306157B CN201910674903.0A CN201910674903A CN110306157B CN 110306157 B CN110306157 B CN 110306157B CN 201910674903 A CN201910674903 A CN 201910674903A CN 110306157 B CN110306157 B CN 110306157B
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sealing ring
nut
hanging disc
coating
tool
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CN110306157A (en
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蹤雪梅
刘剑飞
何冰
刘威
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Jiangsu XCMG Construction Machinery Institute Co Ltd
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Jiangsu XCMG Construction Machinery Institute Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4581—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber characterised by material of construction or surface finish of the means for supporting the substrate

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention relates to a sealing ring coating tool and a coating method for a vacuum coating machine, wherein two special sealing ring vacuum coating tools are designed, namely a tool a and a tool b, which are used for respectively coating the inner circular surface and the outer circular surface of a sealing ring; when the tool b is used for processing the sealing ring, the position of the supporting rod is adjusted according to the diameter of the sealing ring, the sealing ring is sleeved on the supporting rod layer by layer, the sealing ring is stretched by the supporting rod, the length of the supporting rod is longer, the more sealing rings can be hung, and the relative distance of the supporting rod is adjusted through the slide way to adapt to the sealing rings with different sizes. The sealing ring coating tool and the coating method for the vacuum coating machine, provided by the invention, can adjust the tool to adapt to coating processing of sealing rings with different sizes, can process the sealing rings at one time by more than several times compared with the prior art, and solve the problems of low processing efficiency and high cost of the sealing rings due to the limitation of the size of a vacuum chamber.

Description

Sealing ring coating tool and coating method for vacuum coating machine
Technical Field
The invention belongs to the technical field of vacuum coating, and particularly relates to a coating tool and a coating method for a sealing ring for a vacuum coating machine.
Background
The diamond-like carbon film is an amorphous carbon film with high hardness and low friction coefficient, can prevent the invasion of impurities such as external gas, liquid and the like, forms a wear-resistant protective layer, and can obviously enhance the wear resistance of the sealing element. The diamond-like film is deposited on the sealing ring by utilizing the vacuum coating technology, so that the sealing ring with low friction coefficient and strong impact resistance can be obtained, the service life of the sealing ring is greatly prolonged, and the reliability of a hydraulic system is improved.
The vacuum chamber is an important component of a vacuum coating machine, and the sealing ring deposits the diamond-like film in the vacuum chamber. For one coating device, the size of the vacuum chamber is fixed and unchanged, and the time and cost consumed by single coating are unchanged, so that the more the number of the sealing rings of the single coating is, the lower the coating cost is, and the higher the efficiency is.
The coating tool in the prior art generally comprises a plurality of coating stations, each station is driven by a planetary gear structure to revolve while rotating, coating at almost all positions of a sealing ring is achieved, and coating uniformity is guaranteed. However, for a single sealing ring, not all positions participate in friction, and the area participating in friction is generally one of the outer circular surface or the inner circular surface of the sealing ring, so that coating is not required for all positions. The position that current processing mode made not participate in the friction also the coating film, causes unnecessary waste, and the workable sealing washer quantity of prior art scheme single is few, and the sealing washer maximum diameter can not be too big, otherwise the sealing washer can take place mutual interference in the rotation, bumps the sealing washer to influence coating film qualification rate and efficiency. The existing coating tool causes higher coating cost and low efficiency, and influences the popularization and application of diamond-like coating strengthening in the direction of the sealing ring.
Disclosure of Invention
The purpose of the invention is as follows: in order to solve the problems in the prior art, the invention provides a sealing ring coating tool and a coating method for a vacuum coating machine, which can realize the improvement of the processing quantity of single coating under the condition of unchanged volume of a vacuum chamber, have more processing quantity, widen the specification range of the sealing ring capable of being coated, simultaneously have no influence on the strengthening effect of the sealing ring, have high coating efficiency and low coating cost, and are practical and convenient.
In order to achieve the purpose, the invention is realized by the following technical scheme:
the invention designs two sealing ring vacuum coating tools, namely a tool a and a tool b, which are used for respectively realizing the inner circular surface coating and the outer circular surface coating of the sealing ring, can adjust the coating tools to adapt to the coating processing of the sealing rings with different sizes, can process the sealing ring more than several times compared with the prior art in one step, and solves the problems of low processing efficiency and high cost of the sealing ring caused by the size limit of a vacuum chamber.
A seal ring coating tool for a vacuum coating machine adopts a tool a to coat the inner surface of a seal ring, the tool a consists of a screw rod, a limit nut, a screwing nut and seal ring hanging discs (an upper hanging disc and a lower hanging disc), a plurality of extending grooves are arranged on the outer circumference of each hanging disc and used for clamping and hanging the seal ring, the screw rod plays a role of connecting the upper hanging disc and the lower hanging disc and is matched with the screwing nut to fix the position, concretely, the upper hanging disc and the lower hanging disc are connected together through the screw rod, a plurality of extending grooves are arranged on the outer circumferences of the upper hanging disc and the lower hanging disc, two ends of the seal ring are respectively clamped and hung in the extending grooves of the upper hanging disc and the lower hanging disc, the distance between the upper hanging disc and the lower hanging disc is adjusted in real time according to the size of the seal ring, the screw rod, the upper hanging disc and the lower hanging disc are respectively limited through the limit nut and are matched with the screwing nut to fix, guarantee two hanging dishes in the course of working jointly and do not produce relative displacement, guarantee that the sealing washer does not drop in the course of working, add man-hour, arrange a whole set of frock a in the carousel in the vacuum chamber, the carousel drives frock a rotation, carries out the disc coating in the sealing washer, guarantees the coating uniformity.
Further, stop nut includes first stop nut and second stop nut, the nut of screwing includes that first nut and second are screwed the nut, it is relative with hanging the dish face down to go up to hang the dish, the central axis of the two is on a straight line, screw pole and last string dish and hang down between the dish carry on spacingly through first stop nut and second stop nut respectively, the realization is injectd the relative position's of going up, hang the dish down effect, screw nut and second through first nut of screwing and screw the nut fastening and fasten, two are hung the dish down, both guarantee that two hang the dish and do not produce relative displacement in the course of working jointly, guarantee that the sealing washer does not drop in the course of working.
Further, the distance between the upper hanging disc and the lower hanging disc is adjusted by adjusting the positions of the first limiting nut and the second limiting nut, so that sealing rings with different sizes can be clamped, and when the size of the sealing ring to be coated is large, the distance between the upper hanging disc and the lower hanging disc is increased; when the sealing ring size is small, the interval between the upper hanging disc and the lower hanging disc is reduced, when the sealing ring size is too large, and the distance between the upper hanging disc and the lower hanging disc cannot meet the processing requirement, the sealing ring is hung in a staggered extending groove through oblique dislocation, namely, two ends of the sealing ring are respectively clamped and hung on the upper hanging disc and the lower hanging disc, and the upper hanging disc and the lower hanging disc are prevented from rotating relatively through the common fastening and matching of the limit nut and the screwing nut.
Further, the method comprises the following steps:
when the tool a is used for hanging the sealing ring, the sealing ring is elongated, one end of the sealing ring is clamped in the extending groove on the periphery of the upper hanging disc, one surface to be coated is exposed outwards, the sealing ring is clamped through the extending groove, the other end of the sealing ring is clamped in the extending groove on the periphery of the lower hanging disc opposite to or staggered with the extending groove surface of the upper hanging disc, according to the size of the sealing ring, the distance between the upper hanging disc and the lower hanging disc is adjusted through the first limiting nut and the second limiting nut, the upper hanging disc and the lower hanging disc are screwed and fixed through the first screwing nut and the second screwing nut in a matched mode, the sealing ring is in a natural extension state or a stretching state after being hung, and the operation is repeated, and a plurality of sealing rings.
Further, adopt frock b to realize that the sealing washer surface coating film, frock b comprises chassis, bracing piece and set nut, and the chassis contains a plurality of support spokes, all is furnished with the slide on every support spoke for adjust the bracing piece relative position, the bracing piece can be dismantled, supports the sealing washer through the bracing piece and realizes the clamping, and two double-screw bolts are installed to the lower extreme, and with set nut cooperation fixed position, add man-hour, frock b is rotatory along with real empty room carousel, guarantees the coating homogeneity.
Further, the method comprises the following steps:
when the tool b is used for processing the sealing ring, the position of the supporting rod is adjusted according to the diameter of the sealing ring, the sealing ring is sleeved on the supporting rod layer by layer, the sealing ring is stretched by the supporting rod, the length of the supporting rod is longer, the more sealing rings can be hung, and the relative distance of the supporting rod is adjusted through the slide way to adapt to the sealing rings with different sizes.
Further, the coating can be finished by the tool a or the tool b rotating around the central axis.
Compared with the prior art, the invention has the beneficial effects that:
1) according to the invention, through two coating tools, namely the tool a and the tool b, coating is respectively realized on the positions of the inner surface or the outer surface of the sealing ring which are worn, so that the number of the sealing rings coated simultaneously is obviously increased, and the problems of low coating processing efficiency and high cost are solved;
2) the size of the tool is adjusted according to the size change of the sealing ring, the problem that the size of the sealing ring processed under the existing vacuum chamber is limited is solved, the size range of the machinable sealing ring is expanded through two coating tools, and the popularization and application of coating film reinforcement of the sealing ring are supported;
3) the screw rod in the tool a can be other devices capable of adjusting the length and fixing the hanging disc; the slide way in the tool b can also be made into clamping grooves at different positions to fix the position of the supporting rod.
Drawings
FIG. 1 is a schematic structural view of a tooling a of the present invention;
FIG. 2 is a schematic structural diagram of a tooling b of the present invention;
in the figure: 1. the device comprises a first screwing nut, 2. an upper hanging disc, 3. a first limiting nut, 4. a screw rod, 5. a second limiting nut, 6. a lower hanging disc, 7. a second screwing nut, 8. a support rod, 9. a chassis, 10. a positioning nut, 11. a reinforcing rib plate, 12. a support spoke, 13. a slideway and 14. a stud.
Detailed Description
The technical solution of the present invention will be described in further detail with reference to specific examples.
Example 1
As shown in figure 1, a sealing ring coating tool for a vacuum coating machine adopts a tool a to coat the inner surface of a sealing ring, the tool a comprises a sealing ring hanging disc (an upper hanging disc 2 and a lower hanging disc 6), a limiting nut, a screw rod 4 and a screwing nut, the limiting nut comprises a first limiting nut 3 and a second limiting nut 5, the screwing nut comprises a first screwing nut 1 and a second screwing nut 7, the screw rod 4 plays a role of connecting the upper hanging disc 2 and the lower hanging disc 6 and is matched with the limiting nut and the screwing nut, specifically, a plurality of extending grooves are arranged on the outer circumferences of the upper hanging disc 2 and the lower hanging disc 6 and used for clamping and hanging the sealing ring, the upper hanging disc 2 and the lower hanging disc 6 are connected together through the screw rod 4, the upper hanging disc 2 is opposite to the lower hanging disc 6 in surface, the screw rod 4 is limited by the first limiting nut 3 and the second limiting nut 5 respectively between the upper hanging disc 2 and the lower hanging disc 6, the effect of limiting the relative positions of the upper hanging disc and the lower hanging disc is realized, the upper hanging disc and the lower hanging disc are fastened through the first screwing nut 1 and the second screwing nut 7, the two hanging discs are ensured not to generate relative displacement in the processing process together, and the sealing ring is ensured not to fall off in the processing process; during processing, the whole set of tool a is arranged on a turntable in a vacuum chamber, and the turntable drives the tool a to rotate, so that the coating uniformity is ensured.
A coating method of a sealing ring coating tool for a vacuum coating machine adopts a tool a to coat the inner surface of a sealing ring, and comprises the following steps:
when the tool a is used for hanging the sealing ring, the sealing ring is elongated, one end of the sealing ring is clamped in a protruding groove on the periphery of an upper hanging disc 2, one surface needing to be coated is exposed outwards, the other end of the sealing ring is clamped in a protruding groove on the periphery of a lower hanging disc 6 opposite to the protruding groove surface of the upper hanging disc 2, the distance between the upper hanging disc 2 and the lower hanging disc 6 is adjusted through a first limiting nut 3 and a second limiting nut 5 according to the size of the sealing ring, screwing nuts are used for screwing and fixing in a matched mode for clamping sealing rings with different sizes, the sealing ring is in a natural extension or stretching state after being hung, optionally, the sealing ring can be fixed through protruding clamping grooves in the upper hanging disc 2 and the lower hanging disc 6, or the sealing ring is naturally fixed due to the fact that the sealing ring is in the stretching state, and the process is repeated, and a plurality.
The distance between the upper hanging disc 2 and the lower hanging disc 6 is adjusted by adjusting the first limiting nut 3 and the second limiting nut 5 to clamp sealing rings with different sizes, and particularly, when the size of a sealing ring to be coated is large, the distance between the upper hanging disc and the lower hanging disc is increased; when the sealing washer size is little, reduce upper and lower string dish interval, when the sealing washer size is too big, and the distance between the upper and lower string dish can not satisfy the processing demand, accessible slant dislocation hangs and processes the major diameter sealing washer, and the sealing washer both ends clamp is hung in last string dish 2 and the staggered recess that stretches out of lower string dish 6 promptly, and rethread stop nut and the nut of screwing fasten the cooperation jointly, prevent to go up to hang and take place relative rotation between dish 2 and the lower string dish 6.
The lead screw 4 can also be changed into other length of adjusting and fixed structure of hanging the dish from top to bottom, and the user can select according to actual demand is nimble.
Example 2
As shown in fig. 2, a coating tool for a sealing ring for a vacuum coating machine, which can realize coating on the outer surface of the sealing ring by adopting a tool b, comprises a supporting rod 8, a chassis 9 and a positioning nut 10, wherein the chassis 9 comprises a plurality of supporting spokes 12, each supporting spoke 12 is provided with a slideway 13, the supporting rod 8 slides along the slideway 13 and is used for adjusting the relative position of the supporting rod 8, the supporting rod 8 is detachable, the supporting rod 8 is provided with a reinforcing rib plate 11, the reinforcing rib plate 11 can ensure that the supporting rod 8 is not deformed due to the elastic action of the sealing ring, the supporting rod 8 is used for supporting the sealing ring for clamping, the lower end of the supporting rod 8 is provided with two studs 14 which penetrate through the slideway 13; during processing, the tool b rotates along with the vacuum chamber turntable, so that the coating uniformity is ensured.
A coating method of a sealing ring coating tool for a vacuum coating machine is characterized in that a tool b is adopted to realize coating of the outer surface of a sealing ring, and comprises the following steps:
when the tool b is used for machining the sealing ring, the position of the supporting rod 8 is adjusted through the slide 13 according to the diameter of the sealing ring, the sealing ring is transversely sleeved on the supporting rod 8 which is vertically placed in a plurality of layer by layer, the supporting rod 8 struts the sealing ring, the length of the supporting rod 8 is longer, the more the sealing ring can be hung, and the relative distance of the supporting rod 8 is adjusted through the slide 13 to adapt to the sealing rings with different sizes.
The slideway 13 can also be made into clamping grooves at different positions to fix the position of the support rod 8. When two kinds of tools (tool a and tool b) are used for coating, the coating can be finished only by the rotation of the tools around the central axis.
The above description is only of the preferred embodiments of the present invention, and it should be noted that: it will be apparent to those skilled in the art that various modifications and adaptations can be made without departing from the principles of the invention and these are intended to be within the scope of the invention.

Claims (6)

1. A sealing ring coating tool for a vacuum coating machine is characterized in that a tool a is adopted for coating the inner surface of a sealing ring, the tool a comprises an upper hanging disc, a lower hanging disc, a limiting nut, a screw rod and a screwing nut, the upper hanging disc and the lower hanging disc are connected together through the screw rod, a plurality of extending grooves are arranged on the outer circumferences of the upper hanging disc and the lower hanging disc, two ends of the sealing ring are respectively clamped and hung in the extending grooves of the upper hanging disc and the lower hanging disc, the distance between the upper hanging disc and the lower hanging disc is adjusted in real time according to the size of the sealing ring, the screw rod, the upper hanging disc and the lower hanging disc are respectively limited through the limiting nut and are matched with the screwing nut for position fixing, when in processing, the whole set of tool a is placed on a rotating disc in a vacuum chamber, the rotating disc drives the tool a to rotate, and the;
the limiting nut comprises a first limiting nut and a second limiting nut, the nut of screwing comprises a first nut of screwing and a second nut of screwing, the upper hanging plate is opposite to the lower hanging plate in surface, the screw rod is respectively limited by the first limiting nut and the second limiting nut between the upper hanging plate and the lower hanging plate, the relative position of the upper hanging plate and the lower hanging plate is limited, the upper hanging plate and the lower hanging plate are fastened by the first nut of screwing and the second nut of screwing, the upper hanging plate and the lower hanging plate are fixed by the first nut of screwing and the second nut of screwing, the two hanging plates jointly guarantee that the two hanging plates do not produce relative displacement in the machining process, and the sealing ring is prevented from falling down in the.
2. The coating method of the sealing ring coating tool for the vacuum coating machine, which is adopted by the claim 1, is characterized by comprising the following steps:
when the tool a is used for hanging the sealing ring, the sealing ring is elongated, one end of the sealing ring is clamped in the extending groove on the periphery of the upper hanging disc, one surface needing to be coated is exposed outwards, the sealing ring is clamped in the extending groove on the periphery of the lower hanging disc, the distance between the upper hanging disc and the lower hanging disc is adjusted through the first limiting nut and the second limiting nut according to the size of the sealing ring, the upper hanging disc and the lower hanging disc are screwed and fixed through the first screwing nut and the second screwing nut in a matched mode, the sealing ring is in a natural extension or stretching state after being hung, the process is repeated, and a plurality of sealing rings are hung for one circle along the outer circumferences of the upper hanging disc and the lower hanging disc.
3. The coating method of the sealing ring coating tool for the vacuum coating machine according to claim 2, wherein the distance between the upper hanging disc and the lower hanging disc is adjusted by adjusting the positions of the first limit nut and the second limit nut to clamp the sealing rings with different sizes, and when the size of the sealing ring to be coated is large, the distance between the upper hanging disc and the lower hanging disc is increased; when the sealing ring size is small, the interval between the upper hanging disc and the lower hanging disc is reduced, when the sealing ring size is too large, and the distance between the upper hanging disc and the lower hanging disc cannot meet the processing requirement, the sealing ring is hung in a staggered extending groove through oblique dislocation, namely, two ends of the sealing ring are respectively clamped and hung on the upper hanging disc and the lower hanging disc, and the upper hanging disc and the lower hanging disc are prevented from rotating relatively through the common fastening and matching of the limit nut and the screwing nut.
4. The utility model provides a sealing washer coating film frock for vacuum coating machine, a serial communication port, adopt frock b to realize the coating film of sealing washer surface, frock b is by the chassis, bracing piece and set nut are constituteed, the chassis contains a plurality of support spokes, all be furnished with the slide on every support spoke for adjust the relative position of bracing piece, the bracing piece can be dismantled, support the sealing washer through the bracing piece and realize the clamping, two double-screw bolts are installed to the lower extreme, with the set nut cooperation with the bracing piece be fixed in on the chassis, add man-hour, frock b is rotatory along with real empty room carousel, guarantee the coating film.
5. The coating method of the sealing ring coating tool for the vacuum coating machine, which is adopted by the claim 4, is characterized by comprising the following steps:
when the tool b is used for processing the sealing ring, the position of the supporting rod is adjusted according to the diameter of the sealing ring, the sealing ring is sleeved on the supporting rod layer by layer, the sealing ring is stretched by the supporting rod, the length of the supporting rod is longer, the more sealing rings can be hung, and the relative distance of the supporting rod is adjusted through the slide way to adapt to the sealing rings with different sizes.
6. The coating tool for the sealing ring of the vacuum coating machine according to claim 1 or 4, wherein the coating can be completed by rotating the tool a or the tool b around the central axis.
CN201910674903.0A 2019-07-25 2019-07-25 Sealing ring coating tool and coating method for vacuum coating machine Active CN110306157B (en)

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CN203429242U (en) * 2013-06-28 2014-02-12 宜昌后皇真空科技有限公司 PVD (Plating Vacuum Deposition) film coating clamp of engine piston ring
CN207468721U (en) * 2017-11-08 2018-06-08 厦门大锦工贸有限公司 A kind of hose plated film hanger

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