CN110299864B - Piezoelectric-electrostatic composite energy harvester device based on collision - Google Patents

Piezoelectric-electrostatic composite energy harvester device based on collision Download PDF

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CN110299864B
CN110299864B CN201910415986.1A CN201910415986A CN110299864B CN 110299864 B CN110299864 B CN 110299864B CN 201910415986 A CN201910415986 A CN 201910415986A CN 110299864 B CN110299864 B CN 110299864B
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lower electrode
piezoelectric
cantilever beam
electrostatic
box body
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CN110299864A (en
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陈丽华
常力琦
薛江涛
张伟
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Beijing University of Technology
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Beijing University of Technology
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06Influence generators
    • H02N1/08Influence generators with conductive charge carrier, i.e. capacitor machines
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/18Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
    • H02N2/186Vibration harvesters

Abstract

The invention discloses a piezoelectric-electrostatic combined energy harvester device based on collision, which comprises a box body, a cantilever plate, a piezoelectric layer, a mass block, a folded beam and an electrostatic energy harvesting module, wherein the piezoelectric cantilever plate is fixed on the box body, the cantilever plate is subjected to vibration excitation of the environment through the box body, so that the cantilever plate generates vibration deformation, a piezoelectric sheet adhered to the cantilever plate generates deformation to obtain energy, the mass block is adhered to the fixed end of the cantilever plate, the effects of reducing the natural frequency of the structure and improving the deformation are achieved, the electrostatic energy harvesting module is arranged on protrusions on two sides of the box body, a substrate in the electrostatic module is arranged at the end part of the folded beam, the vibration in the vertical direction is converted into displacement in the horizontal direction by utilizing the collision of the mass block on the cantilever beam and the folded beam, the adaptability to the surrounding environment is improved, and the displacement at two ends of the folded beam is limited by adopting a slide block guide rail mode, so that the distance between capacitor plates in the electrostatic energy harvesting module is controlled in a very small range, and larger capacitance change is achieved, and higher voltage is generated.

Description

Piezoelectric-electrostatic composite energy harvester device based on collision
Technical Field
The invention relates to a piezoelectric-electrostatic composite energy harvester device based on collision, which generates power by collecting vibration mechanical energy of surrounding environment, and belongs to the technical fields of energy saving technology and renewable environment-friendly new energy.
Background
In recent years, with the rapid development of microelectromechanical systems MEMS (Micro-Electro-Mechanical Systems), the application range of Micro electronic devices such as Micro sensors has been expanding, and the Micro electronic devices have been widely used in various fields. Because of the miniaturized nature of MEMS structures, the design of their power supply is one of the key issues that such technology needs to address. In order to reduce maintenance difficulties and costs of the microsensors, conventional chemical batteries have failed to meet the requirements of MEMS structures. Thus, powering with ambient vibration energy becomes a better power supply solution.
Currently, three energy harvesting modes based on vibration include: electromagnetic, electrostatic, and piezoelectric. In order to improve the conversion efficiency and output power of the energy harvester, it is not necessary to limit to a single conversion method, and two or more energy harvesting techniques are considered to be used in the same device. At present, the electromagnetic-piezoelectric composite energy harvester is difficult to apply to MEMS equipment due to the large volume, and the electrostatic energy harvester is easy to integrate with the MEMS technology, and has simple structural design, so that the electromagnetic-piezoelectric composite energy harvester is favorable for combining the piezoelectric technology to manufacture the energy harvester with better performances in all aspects. In 2006, khbeis et al designed a piezoelectric-electrostatic hybrid energy harvester that could collect low frequency and low energy density environmental vibrations, and provide the electrical energy generated by the piezoelectric process to the electrostatic module as a preloaded voltage, solving the problem that the electrostatic energy harvester needs an external power supply to supply power. In 2009, khbeis et al performed an optimal design of the device to create an experimental model. In 2014, young et al, the university of korean, have proposed a piezoelectric-electrostatic composite flexible structure capable of collecting vibration mechanical energy in a low frequency environment. In the same year, the university of Shanghai traffic Yang et al designs a piezoelectric-electrostatic composite energy harvester based on PDMS flexible materials, and the device has the advantages of simple structure, easy manufacture, higher energy conversion efficiency and higher output power. 2015. In the years, madinei et al propose a tunable piezoelectric-electrostatic coupling energy harvester, which uses an electrostatic module to widen the frequency band of the system and effectively improve the output power of the piezoelectric module. Therefore, the piezoelectric-electrostatic energy harvester solves the problems that the piezoelectric energy harvester is low in collection efficiency and the electrostatic energy harvester needs an external power supply to supply power, and is an effective MEMS technical power supply solution.
Disclosure of Invention
The invention provides a piezoelectric-electrostatic composite energy harvester device based on a piezoelectric and electrostatic system. The invention aims to realize the coupling of a piezoelectric system and an electrostatic system by utilizing collision, convert the longitudinal displacement of a cantilever beam into the transverse displacement of a folded beam, improve the energy harvesting efficiency of an energy harvester, and keep the electrostatic part at a very small distance between capacitor plates so as to improve the output voltage.
In order to solve the above problems of the energy harvester, the solution of the present invention is as follows:
the piezoelectric system comprises a cantilever beam, a piezoelectric layer and a mass block, wherein the cantilever beam is fixed in a groove on a box body through an H-shaped structure of a fixed end of the cantilever beam. The mass block is adhered to the free end of the cantilever beam through JL-510 epoxy AB glue. The cantilever beam and the mass block are made of steel. The piezoelectric layer is adhered near the fixed end of the cantilever beam through JL-510 epoxy AB glue. The piezoelectric layer consists of a protective layer, a piezoelectric film and an electrode layer, and the length, width and height dimensions of the piezoelectric layer are 10 multiplied by 3.6 multiplied by 0.05mm; electrode layers are respectively attached to the upper and lower surfaces of the piezoelectric film, and electrode wires are led out from the electrode layers to the outer sides of the piezoelectric layers. The piezoelectric film and the electrode layer are completely wrapped by a protective layer, and the thickness of the protective layer is 0.125mm. The piezoelectric layer material is PVDF after polarization, the electrode layer material is silver, the electrode material is copper wire, and the protective layer material is polyester film.
The electrostatic system comprises a folded beam and four electret electrostatic energy harvesting modules, wherein each electret electrostatic energy harvesting module consists of a positive electrode, a negative electrode, a substrate and electrets, each electrode comprises an electrode plate and six block electrodes, and two electrode plates of each group of electrostatic energy harvesting modules are respectively connected with a box body and the substrate. The electret is attached to an end of the block electrode on one side of the substrate. Two base plates are respectively arranged at two ends of the folding beam through interference fit. The slide blocks are arranged on two sides of the base plate, and the guide rails are arranged on the frame.
The middle part of the folding beam is convex, two ends of the folding beam are horizontal, and four folding angles are formed.
The folded beam is made of copper, the electret material is Polytetrafluoroethylene (PTFE) porous film electret, and the substrate and the frame are both made of aluminum.
The working process comprises the following steps:
when the device is affected by vibration of external environment, the cantilever beam vibrates along with the vibration, so that a piezoelectric film attached to the cantilever beam generates voltage, meanwhile, when the cantilever beam descends, a mass block at the free end of the cantilever beam impacts the middle part of the folded beam, then four folded corners of the folded beam deform, so that horizontal displacement is generated at two ends of the cantilever beam, and the upper polar plate and the lower polar plate of the capacitor storing certain charges correspondingly displace, thereby realizing the flow of charges, namely, vibration energy is converted into electric energy by changing the capacitor.
Compared with the prior art, the invention has the beneficial effects that:
1. the device converts the vibration in the vertical direction into the displacement in the horizontal direction by utilizing the collision between the free end of the cantilever beam and the folded beam, namely, converts the more common vibration in the environment into the less common transverse vibration, thereby improving the adaptability to the surrounding environment.
2. The displacement of the two ends of the folding beam is limited by adopting a sliding block guide rail mode, so that the distance between capacitor pole plates in the electrostatic energy harvesting module is controlled in a very small range, larger capacitance change is realized, and higher voltage is generated.
And 1.3, coupling the electrostatic energy harvesting mode with the piezoelectric energy harvesting mode, and improving the energy harvesting density. The structure is compact in design and is suitable for micro-electromechanical systems with smaller space.
Drawings
FIG. 1 is a three-dimensional perspective view of a crash-based piezoelectric-electrostatic hybrid energy harvester device of the present invention with a cover removed;
FIG. 2 is a partial cross-sectional view of a piezoelectric-electrostatic composite energy harvester device of the invention based on a collision;
FIG. 3 is an enlarged view of a portion of an electrostatic energy harvesting module in a collision-based piezoelectric-electrostatic hybrid energy harvester device of the invention;
in the figure: 1. the box cover, 2, the box body, 3, the piezoelectric layer, 4, the cantilever beam, 5, the mass block, 6, the folded beam, 7, the guide rail, 8 and the base plate, 9, a lower electrode plate, 10, electrets, 11, a lower electrode block, 12, an upper electrode plate, 13, an upper electrode block, 14 and a sliding block.
Detailed Description
The present invention will be described in further detail with reference to the following embodiments.
A piezoelectric-electrostatic composite energy harvester based on collision comprises a tank cover 1, a tank body 2, a piezoelectric layer 3, a cantilever beam 4, a mass block 5 and four groups of electrostatic energy harvesting modules; the box cover 1 is a cuboid plate with two protruding ends, the box body 2 is corresponding to the box cover 1 in shape, the cantilever beam 4 is arranged on the box body 2, the free end of the cantilever beam 4 is stuck with the mass block 5, and the piezoelectric layer 3 is stuck to the free end of the cantilever beam 4; two sides of the box body 2 are respectively provided with a cuboid plate, and static two groups of electric energy harvesting modules are arranged in the cuboid plates;
each group of electrostatic energy harvesting modules consists of a folding beam 6, a base plate 8, a lower electrode plate 9, an electret 10, a lower electrode block 11, an upper electrode plate 12, an upper electrode block 13 and a sliding block 14; the base plate 8 is arranged at the end part of the folding beam 6; the lower electrode plate 9 is arranged above the base plate 8; the lower electrode blocks 11 are arranged above the lower electrode plates 9, one lower electrode block 11 is arranged every 1mm, and six lower electrode blocks 11 are arranged on each lower electrode plate 9; an electret 10 is respectively arranged above each lower electrode block 11, and the length and the width dimensions are equal to those of the lower electrode blocks 11; an upper electrode plate 12 is arranged on one surface of the box body 2 opposite to the electret 10, and the size of the upper electrode plate is equal to that of the lower electrode plate 9; an upper electrode block 13 is arranged below the upper electrode plate 12, and the size and the installation mode are the same as those of the lower electrode block 11; the sliding blocks 14 on the two sides of the base plate 8 are integrally formed with the base plate; the box body 2 is provided with a guide rail 7, and a sliding block 14 can slide on the guide rail 7;
the length direction of the piezoelectric layer 3 is consistent with the length direction of the cantilever beam 4, the piezoelectric layer 3 extends from the fixed end to the free end of the cantilever beam 4, the length of the piezoelectric layer 3 is smaller than the length of the cantilever beam 4, the width of the piezoelectric layer 3 is the same as the width of the cantilever beam 4, and two lateral surfaces of the piezoelectric layer 3 in the length direction are flush with two lateral surfaces of the cantilever beam 4 in the length direction;
the slider 14 is integrally formed with the base plate 8.
The cantilever beam 4 and the mass block 5 are made of common steel, and the piezoelectric layer 3 paved and adhered on the cantilever beam 4 is made of PVDF piezoelectric film.
The displacement in the vertical direction is converted into the displacement in the horizontal direction by the collision of the mass block 5 on the cantilever beam 4 and the folded beam 6.
The displacement of the two ends of the folding beam 6 is limited by adopting a mode of a sliding block 14 and a guide rail 7.
Grooves are formed in the case body 2 and the case cover 1, respectively, and serve as guide rails for the slider 14.
Six lower electrode blocks 11 and six upper electrode blocks 13 are adopted in each electrostatic module, and the lower electrode blocks 11 and the six upper electrode blocks 13 are respectively distributed in an array in the lower electrode plate 9 and the upper electrode plate 12.
Examples
As shown in fig. 1-3: the invention relates to a piezoelectric-electrostatic composite energy harvester device based on collision, which mainly comprises a box cover 1, a box body 2, a piezoelectric layer 3, a cantilever beam 4, a mass block 5 and four groups of electrostatic energy harvesting modules; the box body 2 and the box cover 1 are made of aluminum materials, the length, width and height dimensions are 49mm and 6mm and 31mm, two sides of the box body are respectively provided with a protrusion, the length of each protrusion is 15mm, the height is 8.8mm, and a groove is formed in the position of the box body 2, which is leftwards and upwards, for installing the cantilever beam 4; the fixed end of the cantilever beam 4 is H-shaped, is convenient to install on the box body 2, and has the length of 28mm, the width of 3.6mm and the thickness of 0.5mm; the piezoelectric layer 3 is stuck above the fixed end of the cantilever beam 4, and has the length of 10mm and the thickness of 0.03mm; the mass block 5 is stuck below the free end of the cantilever beam, and the length, width and height dimensions are 6mm x 3.6mm x 3mm. Each group of electrostatic energy harvesting modules consists of a folding beam 6, a base plate 8, a lower electrode plate 9, an electret 10, a lower electrode block 11, an upper electrode plate 12, an upper electrode block 13 and a sliding block; the base plate 8 is arranged at the end part of the folded beam 6, the length of the folded beam 6 is 57mm, the thickness of the folded beam is 0.5mm, the length of the base plate 8 is 12mm, and the thickness of the folded beam is 0.8mm; the lower electrode plate 9 is arranged above the base plate 8, and has the length and width equal to those of the base plate 8 and the thickness of 0.3mm; the lower electrode blocks 11 are arranged above the lower electrode plates 9, one lower electrode block is arranged at intervals of 1mm, six lower electrode blocks are arranged on each electrode plate 9, and the length, width and height dimensions of the lower electrode blocks 11 are 1.2mm by 3.6mm by 0.45mm; an electret 10 is respectively arranged above each lower electrode block 11, the length and the width are equal to those of the lower electrode blocks 11, and the thickness is 0.3mm; an upper electrode plate 12 is arranged on one surface of the box body 2 opposite to the electret 10, and the size of the upper electrode plate is equal to that of the lower electrode plate 9; a lower electrode block 13 is arranged below the upper electrode plate 12, and the size and the installation mode are the same as those of the upper electrode block 11; the sliders 14 on the two sides of the substrate 8 are integrally formed with the substrate, and the length, width and height dimensions are 3mm 1.2mm; the box body 2 is provided with a guide rail 7, and a slide block 14 can slide on the guide rail 7.
When the device is affected by vibration of external environment, the cantilever beam 4 vibrates along with the vibration, so that a piezoelectric film attached to the cantilever beam 4 generates voltage, meanwhile, when the cantilever beam 4 descends, the mass block 5 at the free end of the cantilever beam impacts the middle part of the folded beam 6, then four folded angles of the folded beam 6 deform, so that horizontal displacement is generated at two ends of the cantilever beam, and the upper polar plate and the lower polar plate of the capacitor storing certain charges correspondingly displace, thereby realizing the flow of charges, namely, vibration energy is converted into electric energy by changing the capacitor. The application is achieved by supplying the generated electrical energy to other devices through electrodes and thereafter a circuit designed in the application.
To sum up: according to the piezoelectric-electrostatic composite energy harvester device based on collision, the collision between the mass block on the cantilever beam and the folding beam is reasonably utilized, so that vibration in the vertical direction is converted into displacement in the horizontal direction, namely, more common vibration in the environment is converted into less transverse vibration, the adaptability to the surrounding environment is improved, and meanwhile, the electrostatic energy harvesting mode is coupled with the piezoelectric energy harvesting mode, and the energy harvesting density is improved. The displacement of the two ends of the folding beam is limited by adopting a sliding block guide rail mode, so that the distance between capacitor pole plates in the electrostatic energy harvesting module is controlled in a very small range, larger capacitance change is realized, and higher voltage is generated.
The piezoelectric-electrostatic composite energy harvester device based on collision can be used for micro-electromechanical products, such as internal power supply of a wireless sensor, aircrafts, satellite components and the like, and can also be used for motion power generation, such as a piezoelectric device placed on a sole when a person walks, a piezoelectric device paved on a road surface, and the like.

Claims (2)

1. The piezoelectric-electrostatic composite energy harvester based on collision is characterized by comprising a box cover (1), a box body (2), a piezoelectric layer (3), a cantilever beam (4), a mass block (5) and four groups of electrostatic energy harvesting modules; the box cover (1) is a cuboid plate with two protruding ends, the box body (2) is corresponding to the box cover (1) in shape, the cantilever beam (4) is arranged on the box body (2), the free end of the cantilever beam (4) is stuck with the mass block (5), and the piezoelectric layer (3) is stuck to the free end of the cantilever beam (4); two sides of the box body (2) are respectively provided with a cuboid plate, and two groups of electrostatic energy harvesting modules are arranged in the cuboid plates;
each group of electrostatic energy harvesting modules consists of a folding beam (6), a base plate (8), a lower electrode plate (9), electrets (10), a lower electrode block (11), an upper electrode plate (12), an upper electrode block (13) and a sliding block (14); the base plate (8) is arranged at the end part of the folding beam (6); the lower electrode plate (9) is arranged above the base plate (8); the lower electrode blocks (11) are arranged above the lower electrode plates (9), one lower electrode block (11) is arranged every 1mm, and six lower electrode blocks (11) are arranged on each lower electrode plate (9); an electret (10) is respectively arranged above each lower electrode block (11), and the length and the width are equal to those of the lower electrode blocks (11); an upper electrode plate (12) is arranged on one surface of the box body (2) opposite to the electret (10), and the size of the upper electrode plate is equal to that of the lower electrode plate (9); an upper electrode block (13) is arranged below the upper electrode plate (12), and the size and the installation mode are the same as those of the lower electrode block (11); the sliding blocks (14) at the two sides of the base plate (8) are integrally formed with the base plate; a guide rail (7) is arranged on the box body (2), and a sliding block (14) can slide on the guide rail (7);
the length direction of the piezoelectric layer (3) is consistent with the length direction of the cantilever beam (4), the piezoelectric layer (3) extends from the fixed end to the free end of the cantilever beam (4), the length of the piezoelectric layer (3) is smaller than that of the cantilever beam (4), the width of the piezoelectric layer (3) is identical with that of the cantilever beam (4), and two lateral surfaces of the piezoelectric layer (3) in the length direction are flush with two lateral surfaces of the cantilever beam (4) in the length direction;
the slide block (14) and the base plate (8) are integrally formed;
the cantilever beam (4) and the mass block (5) are made of common steel, and the piezoelectric layer (3) paved and adhered on the cantilever beam (4) is made of PVDF piezoelectric film;
the displacement in the vertical direction is converted into the displacement in the horizontal direction by utilizing the collision between the mass block (5) on the cantilever beam (4) and the folding beam (6);
the displacement of the two ends of the folding beam (6) is limited by adopting a mode of adding a sliding block (14) and a guide rail (7);
grooves are respectively formed on the box body (2) and the box cover (1) and are used as guide rails of the sliding blocks (14).
2. The piezoelectric-electrostatic composite energy harvester based on the collision according to claim 1, wherein six lower electrode blocks (11) and six upper electrode blocks (13) are adopted in each electrostatic module, and the lower electrode blocks (11) and the six upper electrode blocks (13) are respectively distributed in an array in the lower electrode plate (9) and the upper electrode plate (12).
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JP2010068643A (en) * 2008-09-11 2010-03-25 Nippon Signal Co Ltd:The Electrostatic induction type power generation device and method for manufacturing the same
CN202586803U (en) * 2012-03-31 2012-12-05 深圳职业技术学院 Piezoelectric energy collecting device, piezoelectric energy collecting system and electricity generating shoes using the device
CN104753394A (en) * 2015-03-16 2015-07-01 北京交通大学 Shear type piezoelectric energy harvester and manufacture method thereof
CN104821743A (en) * 2015-04-22 2015-08-05 北京工业大学 Multi-mode vibration power generation device
CN105375818A (en) * 2015-12-11 2016-03-02 中国地质大学(武汉) Dual-crank arm type piezoelectric-electromagnetic composite power generation device
CN106972782A (en) * 2017-04-22 2017-07-21 吉林大学 A kind of piezoelectric beam with bistable characteristic and electric capacity combined bidirectional energy collector

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012008113A1 (en) * 2010-07-16 2012-01-19 パナソニック株式会社 Micro-electromechanical generator and electric apparatus using same
JP5256381B2 (en) * 2011-06-10 2013-08-07 パナソニック株式会社 Vibration power generator, vibration power generation device, and electronic device and communication device equipped with vibration power generation device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010068643A (en) * 2008-09-11 2010-03-25 Nippon Signal Co Ltd:The Electrostatic induction type power generation device and method for manufacturing the same
CN202586803U (en) * 2012-03-31 2012-12-05 深圳职业技术学院 Piezoelectric energy collecting device, piezoelectric energy collecting system and electricity generating shoes using the device
CN104753394A (en) * 2015-03-16 2015-07-01 北京交通大学 Shear type piezoelectric energy harvester and manufacture method thereof
CN104821743A (en) * 2015-04-22 2015-08-05 北京工业大学 Multi-mode vibration power generation device
CN105375818A (en) * 2015-12-11 2016-03-02 中国地质大学(武汉) Dual-crank arm type piezoelectric-electromagnetic composite power generation device
CN106972782A (en) * 2017-04-22 2017-07-21 吉林大学 A kind of piezoelectric beam with bistable characteristic and electric capacity combined bidirectional energy collector

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