CN110286566A - A method of based on internal layer fool proof under direct-write type lithography machine jigsaw mode - Google Patents
A method of based on internal layer fool proof under direct-write type lithography machine jigsaw mode Download PDFInfo
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- CN110286566A CN110286566A CN201910590633.5A CN201910590633A CN110286566A CN 110286566 A CN110286566 A CN 110286566A CN 201910590633 A CN201910590633 A CN 201910590633A CN 110286566 A CN110286566 A CN 110286566A
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- mark
- jigsaw
- internal layer
- write type
- turnover panel
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70475—Stitching, i.e. connecting image fields to produce a device field, the field occupied by a device such as a memory chip, processor chip, CCD, flat panel display
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/708—Mark formation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
A method of based on internal layer fool proof under direct-write type lithography machine jigsaw mode, when can solve direct-write type lithography machine jigsaw mode using the exposure of multi-disc plank jigsaw, the lower technical problem of existing reprint mode aligning accuracy.The following steps are included: two kinds of S100, setting variform mark Mark, align Mark-A and sequence number Mark-B；S200, the maximum quantity N that litho machine jigsaw can be accommodated according to table top, determine the quantity M of Mark-B；S300, the coding that Mark-B is arranged, are arranged in asymmetrically shape for M Mark B；S400, Image Acquisition is carried out to Mark-A and Mark-B using CCD；S500, one group Mark-B collected for CCD are calculated the corresponding number I of litho machine jigsaw and judge to be left and right turnover panel or upper lower turnover panel；S600, Mark-A collected for CCD, determine mirror image and deformation；S700, correction process is carried out to the photoetching jigsaw figure accordingly numbered according to what is recognized.The present invention accurately can be converted and be compensated to jigsaw figure, have foolproof function, while improving aligning accuracy.
Description
Technical field
The present invention relates to direct-write type lithography machine technical fields, and in particular to one kind is based under direct-write type lithography machine jigsaw mode
The method of internal layer fool proof.
Background technique
Write-through photoetching technique is the surface printing in photosensitive material (mostly glue or film) with the skill of the composition of feature
Art, mask-free photolithography technology according to the present invention generate composition using Digital Micromirror System, pass through optical projection element, image
With must multiplying power project on the substrate of photaesthesia, generate the composition of feature.
Maskless lithography can be effectively reduced the complexity of lithography system (without mask platform, mask transmission, frame structure letter
It is single) and mask processing, maintenance cost, be to carry out one of the development trend of large-sized substrates photoetching, and based on space light modulation
The maskless lithography method of device (Spatial Light Modulator, hereinafter referred to as SLM) is because its production is flexible, high reliablity
Advantages are being increasingly used to production printed circuit board (PCB), film liquid crystal display panel (TFT), microcomputer with yield is more objective etc.
Electric system (MEMS).
Currently, laser direct imaging system is all for most printed circuit boards (Printed CircuitBoard, abbreviation pcb board)
Image is exported using the matching of movement and the output of DMD exposure figure of precision surface plate, the size for the exposure base that can achieve is logical
Often all 24 cun wide multiplied by 21 cun of height, even more greatly.It is (even more small such as when 250mm*300mm when substrate size is smaller
90mm*40mm), it is often carried out using the mode of jigsaw exposure, to promote production capacity.
But it when using the exposure of multi-disc plank jigsaw, exposes the front surface A that is over and often there is reprint mode when exposing reverse side B
The problem of, for example reprint and left and right reprint will lead to aligning accuracy excessive problem up and down；In addition, operator completes in a table top
Front surface A exposure needs to be moved to another table top (or regional location) and continues reverse side exposure because technique etc. needs, then
During moving, corresponding position can not be often determined, or be easy error, and it is mixed to cause the number of jigsaw subregion to have occurred
Disorderly, so that the deformation parameter of each plank can not be determined, aligning accuracy is reduced.
Summary of the invention
The method of internal layer fool proof, can solve write-through under a kind of jigsaw mode based on direct-write type lithography machine proposed by the present invention
When litho machine jigsaw mode is exposed using multi-disc plank jigsaw, the lower technical problem of existing reprint mode aligning accuracy.
To achieve the above object, the invention adopts the following technical scheme:
A method of based on internal layer fool proof under direct-write type lithography machine jigsaw mode, comprising: in carrying litho machine jigsaw
On the table top of precision movement platform, card slot is set；
The following steps are included:
S100, setting two kinds of variform mark Mark, Mark-A and Mark-B；Wherein Mark-A is contraposition Mark,
The adjacent both sides of litho machine jigsaw plate face are arranged in Mark-A, and Mark-B is board sequence number Mark, and Mark-B is arranged in photoetching
One side of machine jigsaw plate face, the Mark-A and Mark-B are arranged in the table top card slot of litho machine precision movement platform；
S200, the maximum quantity N that litho machine jigsaw can be accommodated according to table top, determine the quantity M of Mark-B；
S300, the coding that Mark-B is arranged, are arranged in asymmetrically shape for M Mark B；
S400, Image Acquisition is carried out to Mark-A and Mark-B using CCD；
S500, one group Mark-B collected for CCD, on the one hand according to the correspondence of this group of set Mark-B point
Coding rule, the corresponding number I of litho machine jigsaw is calculated, wherein 0≤I≤N；On the other hand according to the asymmetry of setting
Shape, judgement are left and right turnover panel or upper lower turnover panel；
S600, Mark-A collected for CCD, in conjunction with the turnover panel situation of step 500, i.e., if the turnover panel of left and right, to light
It carves jigsaw figure and carries out X-direction mirror image；If upper lower turnover panel, Y-direction mirror image is carried out to photoetching jigsaw figure；
S700, the litho machine jigsaw reference numeral I recognized according to step S500, to the photoetching jigsaw figure accordingly numbered
Carry out correction process.
Further, the coding of the step S300 setting Mark-B, wherein coding rule includes setting each Mark-B
A binary bit is represented, then the board sequence number range of Mark-B is 0~(2^m -1)；Wherein, (2^m -1) be greater than etc.
In N.
Further, the coding of the step S300 setting Mark-B, wherein coding rule includes by Mark-B
Number is identified.
Further, the step S700 carries out correction process to the photoetching jigsaw figure accordingly numbered, wherein at correction
Reason includes rotation, harmomegathus, mirror image, translation.
As shown from the above technical solution, the method for internal layer fool proof has under the jigsaw mode of the invention based on direct-write type lithography machine
Body be by image image procossing and it is binary-coded in the way of, the Mark of identification is stamped to inner plating face, then according to volume
The Mark of code is identified, so that it is determined that the contraposition failure of front and back sides caused by reprint or different-time exposure is asked under jigsaw mode
Topic.Especially by the table top of carrying plank, designing multiple groups board slot, each card slot installs one group of laser Mark (or UV
Light Mark), it is arranged in a shape, and encode to each Mark, so that the mark of each jigsaw is not identical, to both meet every
The internal layer of a plank converts, while can also mark the sequence number of each plank, so as to quickly know method for distinguishing with figure
Positioning jigsaw subregion is carried out, corresponding transformation parameter is then applied, increases foolproof function to the internal layer alignment of jigsaw in this way, into
And improve aligning accuracy.
Detailed description of the invention
Fig. 1 is method and step schematic diagram of the invention；
Fig. 2 is the present embodiment monolithic board, aligns the arrangement mode of Mark and board identification Mark；
Fig. 3 is the jigsaw card slot of K row J column on the present embodiment backing plate；
Fig. 4 is the board identification Mark situation in the face B after the exposure of the face the present embodiment A.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.
As shown in Figure 1, the method based on internal layer fool proof under direct-write type lithography machine jigsaw mode described in the present embodiment, packet
It includes: on the table top of the precision movement platform of carrying litho machine jigsaw, card slot is set；
The following steps are included:
S100, setting two kinds of variform mark Mark, Mark-A and Mark-B；Wherein Mark-A is contraposition Mark,
The adjacent both sides of litho machine jigsaw plate face are arranged in Mark-A, and Mark-B is board sequence number Mark, and Mark-B is arranged in photoetching
One side of machine jigsaw plate face, the Mark-A and Mark-B are arranged in the table top card slot of litho machine precision movement platform；
S200, the maximum quantity N that litho machine jigsaw can be accommodated according to table top, determine the quantity M of Mark-B；
S300, the coding that Mark-B is arranged, are arranged in asymmetrically shape for M Mark B；
S400, Image Acquisition is carried out to Mark-A and Mark-B using CCD；
S500, one group Mark-B collected for CCD, on the one hand according to the correspondence of this group of set Mark-B point
Coding rule, the corresponding number I of litho machine jigsaw is calculated, wherein 0≤I≤N；On the other hand according to the asymmetry of setting
Shape, judgement are left and right turnover panel or upper lower turnover panel；
S600, Mark-A collected for CCD, in conjunction with the turnover panel situation of step 500, i.e., if the turnover panel of left and right, to light
It carves jigsaw figure and carries out X-direction mirror image；If upper lower turnover panel, Y-direction mirror image is carried out to photoetching jigsaw figure；
S700, the litho machine jigsaw reference numeral I recognized according to step S500, to the photoetching jigsaw figure accordingly numbered
Carry out correction process.
Wherein, the Mark-A is cross Mark or Circular Mark.
The Mark-B is cross Mark or Circular Mark.
Below by taking contraposition and compound target spot as an example, Fig. 2 is contraposition Mark and the board identification of one of monolithic board
The arrangement mode of Mark, illustrates below in conjunction with attached drawing:
(1) card slot has been customized according to the mode that K row J is arranged on the backing plate of accurate exposure stage, wherein K and J is greater than zero
Natural number；As shown in figure 3, wherein k=2, J=2；
(2) setting places according to mode shown in Fig. 2 and aligns Mark, Mark-A, Mark-A ten in each card slot
Word；
(3) plank exposed will be needed to be put into card slot, is arranged in K row, J column；
(4) jigsaw parameter K row is set, J column, program according to the jigsaw parameter and graphic documentation of setting, each card slot according to
Jigsaw arranges serial number, sets corresponding Mark in the face B of board and carries out stamp；The MarkA and MarkB of the present embodiment are sent out by laser
Raw device is beaten in jigsaw plate face；
Wherein, the maximum quantity N that jigsaw can be accommodated according to table top determines the quantity M of circular indicia Mark B；Each of which
Mark B represents a binary bit, then board Serial No. 0~(2^m -1) that can be expressed；Wherein (2^m -1) is big
In equal to N；Assuming that M=5, then 00000 indicates that 0,00001 indicates that 1,00010 indicates that 2,00011 indicates 3；..., 01001 indicates
9；And so on；
(5) start to expose the face A, while stamping board sequence number Mark in the face B, Mark-B, Mark-B are circle；
The coding for designing Circular Mark B, is arranged in the shape without symmetry for M Mark B；For example set one group
Circular indicia MarkB is L-type, guarantees that long side and short side do not have symmetry, is started counting with long side or short side, each
Mark B carries out corresponding with one bit of binary, is binary 0th, successively are as follows: bit0 corresponding first Mark B, bit1
Corresponding second Mark B, bit2 correspond to third Mark B, the corresponding 4th Mark B of bit3 ... .bitM corresponds to m-th
Mark B；
(6) operator carry out turnover panel (there are it is unordered a possibility that), at this time by CCD to B panel carry out Mark identification, packet
Include contraposition Mark, Mark-A and board sequence number Mark, Mark-B；
(7) for collected Circular Mark, Mark-B knows method for distinguishing by figure, on the one hand according to setting this
One group of Mark B point there are situations, exist for 1, there is no being 0, obtain one group of sequence, such as 010010 ..., table look-up or count
Calculation obtains corresponding number I (0≤I≤N)；On the other hand according to the asymmetrically shape of setting, judgement be left and right turnover panel or on
Lower turnover panel；If shown in Fig. 4, the L-type identification code of each board is not identical；
(8) cross Mark collected for CCD calculates deformation parameter in conjunction with turnover panel situation；
Contraposition Mark A specially collected for CCD if the turnover panel of left and right, is needed to photoetching in conjunction with turnover panel situation
Jigsaw figure carries out X-direction mirror image；If upper lower turnover panel, need to carry out Y-direction mirror image to photoetching jigsaw figure；
Calculating deformation parameter is such as to bring into the calculation formula such as similarity transformation, projective transformation, obtains deformation parameter；
(9) according to the board reference numeral recognized, corresponding jigsaw figure is converted and corresponding parameter is mended
It repays；Specifically include such as rotation, harmomegathus, mirror image, translation etc. operation；
For step (1), for the card slot of the backing plate on precision surface plate, can according to the type of client's means of production, into
Row customization possesses the backing plate of different size card slots；
For step (4), the graphic documentation of setting, graphic documentation be may be the same or different；
For step (7), the Circular Mark of acquisition can be other shapes, facilitate CCD acquisition and graphic pattern discrimination i.e.
It can；
In summary, the embodiment of the present invention provides a kind of side of internal layer fool proof under the jigsaw mode for direct-write type lithography machine
Method, by identifying that jigsaw board is marked in Mark to contraposition Mark and board, because of the design configuration of board identification Mark
Feature, and then determine the deformation parameter of turnover panel and different boards, after carrying out turnover panel or replacement table top, correspondence can be traced back to
The deformation parameter and compensating parameter of board have foolproof function, together so that accurately jigsaw figure is converted and be compensated
When improve aligning accuracy.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
Invention is explained in detail, those skilled in the art should understand that: it still can be to aforementioned each implementation
Technical solution documented by example is modified or equivalent replacement of some of the technical features；And these modification or
Replacement, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (8)
1. a kind of method of internal layer fool proof under jigsaw mode based on direct-write type lithography machine, it is characterised in that: spelled in carrying litho machine
On the table top of the precision movement platform of plate, card slot is set；
The following steps are included:
S100, setting two kinds of variform mark Mark, Mark-A and Mark-B；Wherein Mark-A is contraposition Mark, Mark-
The adjacent both sides of litho machine jigsaw plate face are arranged in A, and Mark-B is board sequence number Mark, and Mark-B is arranged in litho machine jigsaw
One side of plate face, the Mark-A and Mark-B are arranged in the table top card slot of litho machine precision movement platform；
S200, the maximum quantity N that litho machine jigsaw can be accommodated according to table top, determine the quantity M of Mark-B；
S300, the coding that Mark-B is arranged, are arranged in asymmetrically shape for M Mark B；
S400, Image Acquisition is carried out to Mark-A and Mark-B using CCD；
S500, one group Mark-B collected for CCD, on the one hand according to the corresponding volume of this group of set Mark-B point
Code rule, is calculated the corresponding number I of litho machine jigsaw；On the other hand according to the asymmetrically shape of setting, judgement is left and right
Turnover panel still goes up lower turnover panel；
S600, Mark-A collected for CCD determine mirror image and deformation in conjunction with the turnover panel situation of step 500；
S700, the litho machine jigsaw reference numeral I recognized according to step S500 carry out the photoetching jigsaw figure accordingly numbered
Correction process.
2. the method for internal layer fool proof under the jigsaw mode according to claim 1 based on direct-write type lithography machine, it is characterised in that:
The coding of the step S300 setting Mark-B, wherein coding rule includes setting each Mark-B to represent binary one
Bit, then the board sequence number range of Mark-B is 0~(2^m -1)；Wherein, (2^m -1) is more than or equal to N.
3. the method for internal layer fool proof under the jigsaw mode according to claim 1 based on direct-write type lithography machine, it is characterised in that:
The coding of the step S300 setting Mark-B, wherein coding rule includes being identified by the number of Mark-B.
4. the method for internal layer fool proof under the jigsaw mode according to claim 1 based on direct-write type lithography machine, it is characterised in that:
The S600, the turnover panel situation in conjunction with step 500, determine mirror image and deformation；The turnover panel situation in conjunction with step 500 is specifically included,
I.e. if the turnover panel of left and right, X-direction mirror image processing is carried out to photoetching jigsaw figure；If upper lower turnover panel, to photoetching jigsaw figure into
Row Y-direction mirror image processing.
5. the method for internal layer fool proof under the jigsaw mode according to claim 1 based on direct-write type lithography machine, it is characterised in that:
The Mark-A is cross Mark or Circular Mark.
6. the method for internal layer fool proof under the jigsaw mode according to claim 1 based on direct-write type lithography machine, it is characterised in that:
The Mark-B is cross Mark or Circular Mark.
7. the method for internal layer fool proof under the jigsaw mode according to claim 3 based on direct-write type lithography machine, it is characterised in that:
M Mark B is arranged as L-type in the step S300.
8. the method for internal layer fool proof under the jigsaw mode according to claim 1 based on direct-write type lithography machine, it is characterised in that:
The step S700 carries out correction process to the photoetching jigsaw figure accordingly numbered, and wherein correction process includes rotation, harmomegathus, mirror
Picture, translation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910590633.5A CN110286566B (en) | 2019-06-20 | 2019-06-20 | Inner layer fool-proofing method based on plate splicing mode of direct-writing photoetching machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910590633.5A CN110286566B (en) | 2019-06-20 | 2019-06-20 | Inner layer fool-proofing method based on plate splicing mode of direct-writing photoetching machine |
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| CN110286566A true CN110286566A (en) | 2019-09-27 |
| CN110286566B CN110286566B (en) | 2021-08-13 |
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| CN201910590633.5A Active CN110286566B (en) | 2019-06-20 | 2019-06-20 | Inner layer fool-proofing method based on plate splicing mode of direct-writing photoetching machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117192908A (en) * | 2023-08-22 | 2023-12-08 | 安徽国芯智能装备有限公司 | Compensation method for expansion and contraction consistency of direct-writing type photoetching machine |
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