CN110285776A - A kind of X-ray type thickness measuring system and its test method - Google Patents
A kind of X-ray type thickness measuring system and its test method Download PDFInfo
- Publication number
- CN110285776A CN110285776A CN201910667133.7A CN201910667133A CN110285776A CN 110285776 A CN110285776 A CN 110285776A CN 201910667133 A CN201910667133 A CN 201910667133A CN 110285776 A CN110285776 A CN 110285776A
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- China
- Prior art keywords
- ray
- thickness measuring
- bracket
- mounting bracket
- deflector roll
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
Abstract
The invention discloses a kind of X-ray type thickness measuring systems, adjust the moving assembly and cantilevered touch control screen that component, X-ray emitter, X-ray receptor, upper mounting bracket, lower mounting bracket, synchronous belt and linear guide are used cooperatively including thickness measuring bracket, dustproof encloser, pneumatic sliding door, deflector roll, deflector roll；Dustproof encloser is provided on thickness measuring bracket；Deflector roll adjusts component by deflector roll and is installed on thickness measuring bracket；X-ray emitter is installed on upper mounting bracket, and X-ray receptor is located on lower mounting bracket；Upper mounting bracket and lower mounting bracket are connect by moving assembly with thickness measuring bracket；Pneumatic sliding door uses double-acting self locking cylinder；Control cabinet is set on the inside of dustproof encloser, and there is cantilever control box in outside；PLC controller is set in control cabinet；Cantilever control box is connect with PLC controller.The present invention uses semi-automatic feeding, and non-contact measurement, cantilever touch screen operation, measurement result is more efficiently accurate, is suitable for dustless, mute workshop.
Description
Technical field
The present invention relates to film fabrication techniques fields, and in particular to a kind of semi-automatic feeding, the X-ray type thickness measuring of low noise
System and its test method.
Background technique
In the film production process, in order to control the thickness of film, need to use THICKNESS GAUGE FOR THE MEASUREMENT OF THIN FOILS to provide thickness for it
Data.Existing measuring thickness device, measuring result error is big, and whole manually feeding, inconvenient, low efficiency；Next is made an uproar
Sound is big, influences working environment.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of X-ray type thickness measuring systems, realize semi-automatic feeding, and use is non-
Contact type measurement, cantilever touch screen operation, measurement result is more efficiently accurate, is suitable for dustless, mute workshop.
In order to solve the above technical problems, the present invention adopts the following technical scheme that: a kind of X-ray type thickness measuring system, including survey
Thick bracket, dustproof encloser, pneumatic sliding door, deflector roll, deflector roll adjust component, X-ray emitter, X-ray receptor, top installation branch
The moving assembly and cantilevered touch control screen that frame, lower mounting bracket, synchronous belt and linear guide are used cooperatively；Described
Dustproof encloser is provided on thickness measuring bracket；
Pneumatic sliding door is provided on the dustproof encloser, the pneumatic sliding door is using in double-acting self locking cylinder control sliding door
Lower movement, realizes semi-automatic feeding；
The deflector roll, deflector roll adjust component, X-ray emitter, X-ray receptor, upper mounting bracket, lower mounting bracket
And moving assembly is set in the dustproof encloser；
The cantilevered touch control screen appearance uses aluminium alloy one casting forming；
The dustproof encloser is integral coating type dustproof encloser, and metal plate uses R50 bending internal diameter；Inner wall posts sound-proof material；
The deflector roll adjusts component by deflector roll and is installed on the thickness measuring bracket, keeps front and back deflector roll parallel；
The X-ray emitter is installed on the upper mounting bracket, and the X-ray receptor is installed on described
On lower mounting bracket；The upper mounting bracket and the lower mounting bracket are cooperated by synchronous belt and linear guide
The moving assembly used is connect with the thickness measuring bracket；
Control cabinet is arranged in the inside of the dustproof encloser, and outside is provided with cantilevered touch control screen；Setting in the control cabinet
There is PLC controller；The cantilevered touch control screen is connect with the PLC controller；
The PLC controller and the automatically controlled association of moving assembly, control moving assembly drive X-ray emitter and X to penetrate
Line receiver transverse shifting；
X-ray emitter, the X-ray receptor and the pneumatic sliding door is connect with the PLC controller；PLC control
Device control X-ray emitter processed issues X-ray, and X-ray is received by X-ray receptor after penetrating object under test, sent out according to X-ray
The intensity of the received X-ray of intensity and X-ray receptor of the X-ray of emitter compares, and calculates the thickness of object under test.
Further, the control system includes data acquisition module, data processing module and central processing module；Institute
The data acquisition module stated includes location information acquisition module, thickness information acquisition module；The location information acquisition module
The position that acquisition X-ray emitter, X-ray receptor move on thickness measuring bracket；The thickness information acquisition module acquires X
The received X-ray intensity information of the strength information and X-ray receptor of ray emission；The location information acquisition module, thickness
Degree information acquisition module is connect with data processing module, and data processing module handles received data, calculates film thickness
And the distance that X-ray emitter, X-ray receptor are advanced on guide rail；During calculated result is sent to by data processing module
Entreat processing module；The central processing module compares multiple film thickness information of measurement, and detection film thickness bounce is more than preset value
Film thickness value, when finding out the abnormal film thickness value of appearance, the location of X-ray emitter, X-ray receptor, and on-line control film
The pressure of corresponding position in production equipment.
Further, it includes guiding polished rod, polish rod fixing seat, movable cross connecting piece that the deflector roll, which adjusts component,；Institute
The deflector roll stated is fixedly mounted on the movable cross connecting piece of two sides；The movable cross connecting piece is along the guiding polished rod
Vertical lift；The guiding polished rod is installed on the thickness measuring bracket by polish rod fixing seat.
Further, the interior of the thickness measuring bracket is provided with the channel passed through for membrane material；The moving assembly packet
Include sliding rail, glidepath, synchronous belt and multiple synchronous pulleys；Be respectively arranged with above and below the channel sliding rail and
Glidepath；The upper mounting bracket and the lower mounting bracket are fixed on the sliding block of sliding rail, are oriented to by sliding rail；
Driving motor drives synchronous pulley to drive synchronous belt movement, and synchronous belt drives X-ray emitter and X-ray to connect by mounting bracket
Device is received to move back and forth.
Further, one of synchronous pulley is installed on the thickness measuring bracket by tensioning apparatus,
Tight device includes the fixed plate being fixed on thickness measuring bracket；Waist hole is provided in the fixed plate；Adjustment wheel bracket is described in
Waist hole it is mobile；The synchronous pulley is installed in adjustment wheel bracket.
The present invention uses the test method of X-ray type thickness measuring system, includes the following steps:
(1) X-ray emitter and X-ray receptor are opened by PLC controller；
(2) film thickness is calculated according to the received transmitted intensity of X-ray receptor；
(3) according to the multiple film thickness values calculated in one round trip of X-ray emitter and X-ray receptor, select bounce compared with
Big several film thickness values, and determine the position of bounce point；
(4) pressure value for the position control membrane production equipment corresponding position that PLC controller is put according to bounce.
Further, X-ray emitter is pneumatically divided into preheating, boosting and up-flow three phases in the step (1), pneumatically
Time is 3-5min.
Beneficial effects of the present invention:
The present invention realizes semi-automatic feeding, using non-contact measurement, cantilever touch screen operation, measurement result more high-efficiency precision
Standard will not lose precision because of abrasion, be suitable for dustless, mute workshop.
The present invention monitors whether film thickness is consistent in width range on-line, and the part that thickness bounce is more than threshold value is carried out
On-line control.
Detailed description of the invention
It, below will be to needed in the embodiment in order to more clearly illustrate the technical solution in the embodiment of the present invention
Attached drawing is simply introduced, it should be apparent that, the accompanying drawings in the following description is only some embodiments recorded in the present invention, for
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other
Attached drawing.
Fig. 1 is axonometric drawing of the invention.
Fig. 2 is thickness measuring system schematic diagram of internal structure of the invention.
Fig. 3 be in Fig. 2 A to cross-sectional view.
Fig. 4 is dustproof encloser structural schematic diagram.
Specific embodiment
Technical solution of the present invention will be clearly and completely described by specific embodiment below.
As shown in Figure 1-3, being a kind of X-ray type thickness measuring system of the invention, including thickness measuring bracket 1, dustproof encloser 2, gas
Dynamic sliding door 21, deflector roll 3, deflector roll adjust component, X-ray emitter 41, X-ray receptor 42, upper mounting bracket 5, lower part peace
The moving assembly and cantilevered touch control screen 22 that dress bracket 6, synchronous belt and linear guide are used cooperatively；The thickness measuring branch
Dustproof encloser 2 is provided on frame 1；Pneumatic sliding door 21 is provided on the dustproof encloser 2, the pneumatic sliding door 21 is using double
Self-locking cylinder 24 is acted on, control sliding door moves up and down, and realizes semi-automatic feeding；The self-locking function of double-acting self locking cylinder guarantees work
It is constant to make status bar, preventing sliding door from falling influences material head feeding.The deflector roll 3, deflector roll adjust component, X-ray emitter 41,
X-ray receptor 42, upper mounting bracket 5, lower mounting bracket 6 and moving assembly are set in the dustproof encloser 2；
The deflector roll 3 adjusts component by deflector roll and is installed on the thickness measuring bracket 1, guarantees that front and back deflector roll is parallel up and down；
The X-ray emitter 41 is installed on the upper mounting bracket 5, and the X-ray receptor 42 is installed on
On the lower mounting bracket 6；The upper mounting bracket 5 and the lower mounting bracket 6 are by synchronous belt and directly
The moving assembly that line guide rail is used cooperatively is connect with the thickness measuring bracket 1.
Control cabinet 23 is arranged in the inside of the dustproof encloser 2, and outside is provided with cantilevered touch control screen 22；The control
PLC controller is provided in cabinet；The cantilevered touch control screen 22 is connect with the PLC controller.
22 appearance of cantilevered touch control screen uses aluminium alloy one casting forming, and appearance is practical and attractive；It touches
Screen operates more convenient, human oriented design.Cantilever mechanism can realize 360 ° of monitoring.
2 integral coating type dustproof encloser of dustproof encloser, metal plate use R50 bending internal diameter, appearance neat appearance, and inner wall posts
Sound-proof material substantially reduces production noise (< 60dB), is suitable for dustless, mute workshop.
The PLC controller and the automatically controlled association of moving assembly, control moving assembly drive X-ray emitter 41
With 42 transverse shifting of X-ray receptor.
X-ray emitter 41, the X-ray receptor 42 and the pneumatic sliding door 21 and the PLC controller
Connection；PLC controller controls X-ray emitter 41 and issues X-ray, and X-ray is connect after penetrating object under test by X-ray receptor 42
It receives, is compared according to the intensity of the intensity of the X-ray of X-ray emitter 41 and the received X-ray of X-ray receptor 42, counted
Calculate the thickness of object under test.
Control system of the invention includes data acquisition module, data processing module and central processing module；The number
It include location information acquisition module, thickness information acquisition module according to acquisition module；The location information acquisition module acquisition X is penetrated
The position that line transmitter 41, X-ray receptor 42 move on thickness measuring bracket 1；The thickness information acquisition module acquisition X is penetrated
The strength information and the received X-ray intensity information of X-ray receptor of line transmitting；The location information acquisition module, thickness
Information acquisition module is connect with data processing module, and data processing module handles received data, calculate film thickness with
And the distance that X-ray emitter 41, X-ray receptor 42 are advanced on guide rail；Calculated result is sent to by data processing module
Central processing module；The central processing module compares multiple film thickness information of measurement, and detection film thickness bounce is more than default
The film thickness value of value, when finding out appearance exception film thickness value, the location of X-ray emitter 41, X-ray receptor 42, and it is online
Adjust the pressure of corresponding position on membrane production equipment.
It includes guiding polished rod 71, polish rod fixing seat 72, movable cross connecting piece 73 that deflector roll of the invention, which adjusts component,；It is described
Deflector roll 3 be fixedly mounted on the movable cross connecting piece 73 of two sides；The movable cross connecting piece 73 is along the guiding
Polished rod 71 is vertically moved up or down；The guiding polished rod 71 is installed on the thickness measuring bracket 1 by polish rod fixing seat 72.
The channel 11 passed through for membrane material is provided in thickness measuring bracket 1 of the invention；The moving assembly includes upper
Sliding rail 7, glidepath 8, synchronous belt 9 and multiple synchronous pulleys 10；Cunning is respectively arranged with above and below the channel 11
Rail 7 and glidepath 8；The upper mounting bracket 5 and the lower mounting bracket 6 are fixed on the sliding block of sliding rail, by
Sliding rail guiding；Driving motor drives synchronous pulley 10 that synchronous belt 9 is driven to move, and synchronous belt 9 drives X-ray to send out by mounting bracket
Emitter 41 and X-ray receptor 42 move back and forth.
One of synchronous pulley 10 of the invention is installed on the thickness measuring bracket 1 by tensioning apparatus, described
Tensioning apparatus includes the fixed plate 11 being fixed on thickness measuring bracket；Waist hole is provided in the fixed plate 11；Adjustment wheel bracket
It is moved along the waist hole；The synchronous pulley 10 is installed in adjustment wheel bracket.Adjustment wheel bracket is fastened on solid by nut 12
On fixed board 11.
The working principle of the invention: membrane material is introduced in thickness measuring bracket 1 by deflector roll first, is located at X-ray emitter
41, between X-ray receptor 42；According to the occasion of practical application, the high and low position of deflector roll can be connected by adjusting activity cross
Fitting 73 drives deflector roll to move up and down, and deflector roll is fixed on guiding polished rod 71 by the clamp device that the present invention uses such as bolt.
Driving motor drive any one synchronous pulley rotate, synchronous belt start to work, the present invention in thickness measuring bracket 1 one
Side is provided with the active synchronization belt wheel driven by driving motor, is driven by synchronous belt, X-ray emitter 41, X-ray receptor
42 synchronizing movings.
Adjustable synchronous pulley, the tension of adjustable synchronous belt are provided with below active synchronization belt wheel.Ensure same
Step is with stable.
The inside of the dust-proof periphery surrounding of the present invention is additionally provided with sound-proof material 25, reduces operation noise, is suitable for quiet
Sound workshop.
The present invention uses the test method of X-ray type thickness measuring system, includes the following steps:
(1) X-ray emitter 41 and X-ray receptor 42 are opened by PLC controller；X-ray emitter in the step (1)
41 are pneumatically divided into preheating, boosting and up-flow three phases, pneumatic time 3-5min；
(2) film thickness is calculated according to the received transmitted intensity of X-ray receptor 42；
(3) according to the multiple film thickness values calculated in 42 1 round trips of X-ray emitter 41 and X-ray receptor, jump is selected
Biggish several film thickness values are moved, and determine the position of bounce point；
(4) pressure value for the position control membrane production equipment corresponding position that PLC controller is put according to bounce.
Embodiment described above is only that the preferred embodiment of the present invention is described, not to design of the invention
It is defined with range, without departing from the design concept of the invention, ordinary engineering and technical personnel is to this hair in this field
The all variations and modifications that bright technical solution is made should all fall into protection scope of the present invention, claimed skill of the invention
Art content is all documented in technical requirements book.
Claims (7)
1. a kind of X-ray type thickness measuring system, it is characterised in that: including thickness measuring bracket (1), dustproof encloser (2), pneumatic sliding door
(21), deflector roll (3), deflector roll adjust component, X-ray emitter (41), X-ray receptor (42), upper mounting bracket (5), under
The moving assembly and cantilevered touch control screen (22) that portion's mounting bracket (6), synchronous belt and linear guide are used cooperatively；It is described
Thickness measuring bracket (1) on be provided with dustproof encloser (2)；
It is provided with pneumatic sliding door (21) on the dustproof encloser (2), the pneumatic sliding door (21) uses double-acting self locking gas
Cylinder (24) control sliding door moves up and down, and realizes semi-automatic feeding；
The deflector roll (3), deflector roll adjust component, X-ray emitter (41), X-ray receptor (42), upper mounting bracket
(5), lower mounting bracket (6) and moving assembly are set in the dustproof encloser (2)；
Cantilevered touch control screen (22) appearance uses aluminium alloy one casting forming；
The dustproof encloser (2) is integral coating type dustproof encloser, and metal plate (26) uses R50 bending internal diameter；Inner wall post every
Sound cotton (25)；
The deflector roll (3) adjusts component by deflector roll and is installed on the thickness measuring bracket (1), keeps front and back deflector roll parallel；
The X-ray emitter (41) is installed on the upper mounting bracket (5), the X-ray receptor (42)
It is installed on the lower mounting bracket (6)；The upper mounting bracket (5) and the lower mounting bracket (6) is logical
It crosses synchronous belt and moving assembly that linear guide is used cooperatively is connect with the thickness measuring bracket (1)；
Control cabinet (23) are arranged in the inside of the dustproof encloser (2), and outside is provided with cantilevered touch control screen (22)；The control
PLC controller is provided in cabinet processed；The cantilevered touch control screen (22) is connect with the PLC controller；
The PLC controller and the automatically controlled association of moving assembly, control moving assembly drive X-ray emitter (41) and
X-ray receptor (42) transverse shifting；
X-ray emitter (41), the X-ray receptor (42) and the pneumatic sliding door (21) and the PLC are controlled
Device connection；PLC controller controls X-ray emitter (41) and issues X-ray, and X-ray penetrates after object under test by X-ray receptor
(42) receive, according to the intensity of the intensity of the X-ray of X-ray emitter (41) and X-ray receptor (42) received X-ray into
Row comparison, calculates the thickness of object under test.
2. a kind of X-ray type thickness measuring system according to claim 1, it is characterised in that: the control system includes number
According to acquisition module, data processing module and central processing module；The data acquisition module include location information acquisition module,
Thickness information acquisition module；The location information acquisition module acquires X-ray emitter (41), X-ray receptor (42) exists
The position moved on thickness measuring bracket (1)；The strength information and X-ray of the thickness information acquisition module acquisition X-ray emission
The received X-ray intensity information of receiver；Location information acquisition module, thickness information acquisition module and the data processing mould
Block connection, data processing module handle received data, calculate film thickness and X-ray emitter (41), X-ray connect
Receive the distance that device (42) advance on guide rail；Calculated result is sent to central processing module by data processing module；In described
Centre processing module compares multiple film thickness information of measurement, and detection film thickness bounce is more than the film thickness value of preset value, and it is different to find out appearance
When normal film thickness value, the location of X-ray emitter (41), X-ray receptor (42), and phase on on-line control membrane production equipment
Answer the pressure of position.
3. a kind of X-ray type thickness measuring system according to claim 1, it is characterised in that: the deflector roll adjusts component packet
Include guiding polished rod (71), polish rod fixing seat (72), movable cross connecting piece (73)；The deflector roll (3) is fixedly mounted on two sides
Movable cross connecting piece (73) on；The movable cross connecting piece (73) is vertically moved up or down along the guiding polished rod (71)；
The guiding polished rod (71) is installed on the thickness measuring bracket (1) by polish rod fixing seat (72).
4. a kind of X-ray type thickness measuring system stated according to claim 3, it is characterised in that: the thickness measuring bracket (1) it is interior
It is provided with the channel (11) passed through for membrane material；The moving assembly includes upper sliding rail (7), glidepath (8), synchronous belt (9)
With multiple synchronous pulleys (10)；Sliding rail (7) and glidepath (8) are respectively arranged with above and below the channel (11)；
The upper mounting bracket (5) and the lower mounting bracket (6) is fixed on the sliding block of sliding rail, is oriented to by sliding rail；
Driving motor drives synchronous pulley (10) to drive synchronous belt (9) movement, and synchronous belt (9) drives X-ray emission by mounting bracket
Device (41) and X-ray receptor (42) move back and forth.
5. a kind of X-ray type thickness measuring system stated according to claim 4, it is characterised in that: one of synchronous pulley (10) is logical
It crosses tensioning apparatus to be installed on the thickness measuring bracket (1), the tensioning apparatus includes the fixation being fixed on thickness measuring bracket
Plate (11)；Waist hole is provided in the fixed plate (11)；Adjustment wheel bracket is moved along the waist hole；The synchronous pulley (10)
It is installed in adjustment wheel bracket.
6. using the test method of X-ray type thickness measuring system described in claim 1, characterized by the following steps:
(1) X-ray emitter (41) and X-ray receptor (42) are opened by PLC controller；
(2) film thickness is calculated according to the received transmitted intensity of X-ray receptor (42)；
(3) according to the multiple film thickness values calculated in (42) round trips of X-ray emitter (41) and X-ray receptor, choosing
It beats out biggish several film thickness values, and determines the position of bounce point；
(4) pressure value for the position control membrane production equipment corresponding position that PLC controller is put according to bounce.
7. the test method of X-ray type thickness measuring system according to claim 6, it is characterised in that: X in the step (1)
Ray emitter (41) is pneumatically divided into preheating, boosting and up-flow three phases, pneumatic time 3-5min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910667133.7A CN110285776A (en) | 2019-07-23 | 2019-07-23 | A kind of X-ray type thickness measuring system and its test method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910667133.7A CN110285776A (en) | 2019-07-23 | 2019-07-23 | A kind of X-ray type thickness measuring system and its test method |
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| Publication Number | Publication Date |
|---|---|
| CN110285776A true CN110285776A (en) | 2019-09-27 |
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ID=68023882
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910667133.7A Pending CN110285776A (en) | 2019-07-23 | 2019-07-23 | A kind of X-ray type thickness measuring system and its test method |
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| Country | Link |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117739881A (en) * | 2024-02-19 | 2024-03-22 | 钛玛科（北京）工业科技有限公司 | Mobilizable off-line thickness gauge |
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| CN201094009Y (en) * | 2007-06-22 | 2008-07-30 | 北京化工大学 | Full-automatic reciprocating wide breadth X ray thin membrane thickness measuring instrument |
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| CN102865980A (en) * | 2012-09-10 | 2013-01-09 | 天津大学 | Automatic light leakage degree and closed gap detector of three-station piston ring and calibrating block thereof |
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| CN206633387U (en) * | 2017-03-01 | 2017-11-14 | 雅科薄膜（东莞）有限公司 | A kind of film production calibrator |
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| US5255302A (en) * | 1991-03-05 | 1993-10-19 | Permelec Electrode, Ltd. | Foil-thickness measuring device |
| CN201094009Y (en) * | 2007-06-22 | 2008-07-30 | 北京化工大学 | Full-automatic reciprocating wide breadth X ray thin membrane thickness measuring instrument |
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| CN102865980A (en) * | 2012-09-10 | 2013-01-09 | 天津大学 | Automatic light leakage degree and closed gap detector of three-station piston ring and calibrating block thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117739881A (en) * | 2024-02-19 | 2024-03-22 | 钛玛科（北京）工业科技有限公司 | Mobilizable off-line thickness gauge |
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Application publication date: 20190927 |