CN110284106B - Take metal coating by vaporization machine of automatic crucible system - Google Patents
Take metal coating by vaporization machine of automatic crucible system Download PDFInfo
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- CN110284106B CN110284106B CN201910512510.XA CN201910512510A CN110284106B CN 110284106 B CN110284106 B CN 110284106B CN 201910512510 A CN201910512510 A CN 201910512510A CN 110284106 B CN110284106 B CN 110284106B
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- crucible
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Abstract
The invention relates to the technical field of manufacturing of evaporation machines, in particular to a metal evaporation machine with an automatic crucible system. The utility model provides a take metal coating machine of automatic crucible system, includes: a main chamber and a sub-chamber; the main chamber is internally provided with: a first rotatable pressure sensitive stage and a vacuum module; the auxiliary chamber is provided with: a feeding module; the auxiliary chamber is internally provided with: the device comprises a vacuum module, a first transmission module and a second rotatable pressure-sensitive carrying platform; the first rotatable pressure sensitive stage is for: detecting whether the crucible metal is about to be used up, and starting an automatic feeding function if the crucible metal is about to be used up; the first transfer module is configured to: the crucible that is about to be used up in the main chamber is taken out and the crucible of the same metal source in the sub-chamber is transferred to the main chamber. Can realize through this structure that automatic material conveying process need not to open the chamber door, only need through reinforced module reinforced can, avoid causing environmental pollution, and whole process full automation, it is energy-conserving time-saving again.
Description
Technical Field
The invention relates to the technical field of manufacturing of evaporation machines, in particular to a metal evaporation machine with an automatic crucible system.
Background
As shown in fig. 1, in the prior art, in the metal evaporation process, the target material in the crucible is exhausted and needs to be charged by opening a cavity, which is easy to cause pollution, and the vacuum pumping is performed again, which consumes more energy and time. In addition, an independent pre-melting metal device is not needed, pre-melting metal needs manual judgment, and time and labor are consumed. And no automatic recovery device is provided, the integral automation degree is not high, and the efficiency is low.
Disclosure of Invention
Therefore, a metal evaporation machine with an automatic crucible system is needed to be provided for solving the problems that the existing evaporation machine needs to be provided with a cavity for feeding, pollution is easy to cause, and energy consumption and time consumption are low. The specific technical scheme is as follows:
a take metal evaporator of automatic crucible system includes: the device comprises a main chamber and an auxiliary chamber, wherein a partition chamber door is arranged between the main chamber and the auxiliary chamber; the main chamber is used for metal evaporation; the main cavity is internally provided with: the device comprises a slide plate, a first rotatable pressure-sensitive carrying platform, a uniformity baffle and a vacuum module; the auxiliary chamber is provided with: a feeding module; the auxiliary cavity is internally provided with: the device comprises a vacuum module, a first transmission module and a second rotatable pressure-sensitive carrying platform; the first rotatable pressure sensitive stage is to: detecting whether the crucible metal is about to be used up, and starting an automatic feeding function if the crucible metal is about to be used up; the feeding module is used for: charging a crucible of a second rotatable pressure sensitive stage; the first transfer module is configured to: taking out the crucible which is about to be used up in the main cavity, and transferring the crucible with the same metal source in the auxiliary cavity to the main cavity; the vacuum module is used for: and after the crucible in the auxiliary cavity is filled with materials, vacuumizing the auxiliary cavity and purifying the cavity.
Further, the sub-chamber is further provided with: a pre-melting comparison module; the premelting comparison module is used for: and heating and pre-melting the crucible to be evaporated, photographing the surface of the pre-melted metal after the pre-melting of the metal in the crucible is finished, comparing preset photos, and judging whether the pre-melting state and the metal surface state are normal or not.
Further, the method also comprises the following steps: a recovery chamber; a partition cavity door is arranged between the auxiliary cavity and the recovery cavity; the recovery cavity is internally provided with: the second crucible conveying module and the cavity cleaning module; the cavity cleaning module is used for: cleaning the cavity; the second crucible transfer module is used for: and automatically taking out the recovery crucible.
Further, the first or second rotatable pressure sensitive stage comprises: the device comprises a crucible, a pressure-sensitive sensor, a water cooling module, an electron beam emitting port and a rotating module; the pressure-sensitive sensor is arranged below the crucible; the water cooling module is arranged below the pressure-sensitive sensor; the electron beam module is arranged below the water cooling module; the rotating module is arranged below the electron beam module.
Further, the reinforced module includes: the device comprises a feeding hole, an electronic scale and a discharging hole, wherein the electronic scale is arranged below the feeding hole.
The invention has the beneficial effects that: the crucible on the second rotatable pressure-sensitive bearing platform is fed in raw material through the feeding module, treat reinforced good back, heat the premelting to the crucible that needs the coating by vaporization, the premelting in-process can begin evacuation and purification cavity to two cavities, when the vacuum of main cavity and accessory chamber is equal, the wall chamber door between two cavities is automatic to be opened, first conveying module can carry out the metal coating by vaporization operation on the first rotatable pressure-sensitive bearing platform in the main cavity with the crucible conveying that premelt. When the first rotatable pressure sensitive stage detects that the crucible metal is about to run out, the automatic feeding function is started. Can realize through this structure that automatic material conveying process need not to open the chamber door, only need through reinforced module reinforced can, avoid causing environmental pollution, and whole process full automation, it is energy-conserving time-saving again.
Furthermore, the pre-melting comparison module is arranged on the auxiliary cavity and can be used for heating and pre-melting a crucible to be evaporated, after the crucible metal is pre-melted, the pre-melted metal surface is photographed and compared with a preset photo, and whether the pre-melting state and the metal surface state are normal or not is judged. When the pre-melting state and the metal surface state are judged to be normal, the next step is carried out, so that the automatic judgment of the pre-melting metal is realized, manual judgment is not needed, and time, labor and labor are saved.
Furthermore, a recovery cavity is arranged on one side of the auxiliary cavity, when the crucible needing to be recovered is judged, partition cavity doors of the recovery cavity and the auxiliary cavity are opened, and the second crucible conveying module automatically takes out the recovered crucible. Automatic recovery is realized, efficiency is greatly improved, and user experience is improved.
Drawings
FIG. 1 is a schematic diagram of a conventional evaporator according to the background art;
FIG. 2 is a schematic view of a metal evaporator with an automatic crucible system according to an embodiment;
FIG. 3 is a schematic diagram of an embodiment rotatable pressure sensitive stage;
FIG. 4 is a schematic diagram of an embodiment material handling module;
FIG. 5 is a schematic diagram of a metal evaporator with an automatic crucible system with a premelt ratio module according to an embodiment;
FIG. 6 is a schematic diagram of a metal evaporator with an automated crucible system with a recovery chamber according to an embodiment.
Description of reference numerals:
1. a main chamber, a main cavity and a side cavity,
2. the sub-chamber is provided with a plurality of sub-chambers,
3. a door of the partition cavity is arranged on the upper part of the shell,
4. a slide plate is arranged on the slide plate,
5. a first rotatable pressure-sensitive carrier having a first axis,
6. a vacuum module,
7. a first transmission module for transmitting the data to the first transmission module,
8. a second rotatable pressure-sensitive carrier for carrying a pressure,
9. a feeding module,
10. a crucible which is provided with a plurality of holes,
11. a pressure-sensitive sensor for sensing a pressure-sensitive,
12. a water-cooling module, which is used for cooling the water,
13. an electron beam module for generating an electron beam,
14. an electron beam emitting port is provided,
15. the rotating module is used to rotate the rotating module,
16. a pre-melting comparison module for pre-melting,
17. the recovery chamber is provided with a plurality of cavities,
18. a second transmission module for transmitting the data to the first transmission module,
19. clear chamber module.
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
Referring to fig. 2 to 6, in the present embodiment, an embodiment of a metal evaporator with an automatic crucible system is as follows:
a take metal evaporator of automatic crucible system includes: the device comprises a main chamber 1 and an auxiliary chamber 2, wherein a partition chamber door 3 is arranged between the main chamber 1 and the auxiliary chamber 2; the main chamber 1 is used for metal evaporation; the main chamber 1 is internally provided with: the device comprises a slide plate 4, a first rotatable pressure-sensitive slide table 5, a uniformity baffle and a vacuum module 6; the auxiliary chamber 2 is provided with: a feeding module 9; the auxiliary chamber 2 is internally provided with: a vacuum module 6, a first transfer module 7 and a second rotatable pressure sensitive stage 8; the first rotatable pressure sensitive stage 5 is configured to: detecting whether the crucible metal is about to be used up, and starting an automatic feeding function if the crucible metal is about to be used up; reinforced module 9 is used for: charging crucible 10 of second rotatable pressure sensitive stage 8; the first transfer module 7 is configured to: taking out the crucible 10 which is about to be used up in the main chamber 1 and transferring the crucible 10 of the same metal source in the sub-chamber 2 to the main chamber 1; the vacuum module 6 is used for: after the crucible 10 in the sub-chamber 2 is filled with the materials, the sub-chamber 2 is vacuumized and the chamber is purified.
The specific working process is as follows: before operation metal coating by vaporization, the coating by vaporization parameter is selected to the coating by vaporization machine platform end, reinforced module 9 feeds in raw material to crucible 10 on the rotatable pressure sensitive microscope carrier 8 of second, and through 11 output reinforced weight of crucible pressure sensitive sensor, treat reinforced good backs, heat premelting to the crucible 10 that needs the coating by vaporization, the premelting in-process, main cavity 1 and the vacuum module 6 of auxiliary cavity 2 all can begin to evacuate and purify the cavity to two cavities, when main cavity 1 and the vacuum of auxiliary cavity 2 are equal, the wall chamber door 3 between two cavities is automatic to be opened, first conveying module 7 can convey the premelted crucible 10 to the operation of carrying out metal coating by vaporization on the rotatable pressure sensitive microscope carrier 5 in main cavity 1. When the first rotatable pressure sensitive stage 5 detects that the crucible metal is about to run out, the automatic feeding function is started and the process is repeated.
In this embodiment, a plurality of vacuum pumps may be integrated in the vacuum module 6 to control the main chamber and the sub-chamber, respectively.
In the present embodiment, the uniformity mask is provided between the slide plate 4 and the first rotatable pressure-sensitive stage 5, and shields the outer ring of the metal source evaporated in the crucible 10 and passes through the intermediate source body having a good uniformity.
Can realize through this structure that automatic material conveying process need not to open the chamber door, only need through reinforced module 9 reinforced can, avoid causing environmental pollution, and whole process full automation, it is energy-conserving again time-saving.
Referring to fig. 3, in the present embodiment, the first rotatable pressure-sensitive stage 5 or the second rotatable pressure-sensitive stage 8 is as shown in fig. 3, and includes: the device comprises a crucible 10, a pressure sensitive sensor 11, a water cooling module 12, an electron beam module 13, an electron beam emission port 14 and a rotating module 15; the pressure-sensitive sensor 11 is arranged below the crucible 10; the water cooling module 12 is arranged below the pressure-sensitive sensor 11; the electron beam module 13 is arranged below the water cooling module 12; the rotation module 15 is disposed below the electron beam module 13.
Referring to fig. 4, in the present embodiment, the feeding module 9 is as shown in fig. 4, and the feeding module 9 includes: the device comprises a feeding hole, an electronic scale and a discharging hole, wherein the electronic scale is arranged below the feeding hole.
Further, referring to fig. 5, in order to realize the automatic judgment of the pre-melted metal, the sub-chamber 2 is further provided with: a premelt comparison module 16; the premelting ratio module 16 is used for: the crucible 10 to be evaporated is heated and pre-melted, after the crucible metal is pre-melted, the pre-melted metal surface is photographed and compared with a preset photograph, and whether the pre-melted state and the metal surface state are normal or not is judged. The following method can be specifically adopted:
the pre-melting comparison module 16 comprises a pre-melting stage and a comparison stage. The premelting process uses an electronic laser beam to heat and premelt the crucible 10 to be evaporated, after the crucible metal is premelted, the premelt comparison module 16 uses an infrared photographing function to photograph the surface of the premelted metal and compares the preset photos, and judges the premelted state and the metal surface state, if the metal particles are not melted, obvious concave-convex shapes are generated, and if the electron beam deflects, metal overflow is generated on the crucible 10, and other abnormalities are generated; after the comparison is completed, if an exception exists, the PC/mobile monitoring terminal is informed to process; if normal, when the vacuum degrees of the main chamber 1 and the sub-chamber 2 are equal, the partition chamber door 3 between the two chambers is automatically opened, and the first conveying module 7 conveys the pre-melted crucible 10 to the first rotatable pressure-sensitive carrying platform 5 in the main chamber 1 for metal evaporation operation. When the first rotatable pressure sensitive stage 5 detects that the crucible metal is about to run out, the automatic feeding function is started and the process is repeated. Through the structure, the judgment of the pre-melted metal can be automated, manual judgment is not needed, and time, labor and labor are saved.
Further, referring to fig. 6, in order to realize the recycling automation, in this embodiment, the method further includes: a recovery chamber 17; a partition cavity door 3 is arranged between the auxiliary cavity 2 and the recovery cavity 17; the recovery chamber 17 is provided with: a second crucible transfer module and a cavity cleaning module 19; the cavity cleaning module 19 is used for: cleaning the cavity; the second crucible transfer module is used for: the recovery crucible 10 is automatically taken out. The following method can be specifically adopted: the crucible 10 replaced from the first rotatable pressure-sensitive carrying platform 5 is monitored in a numbering mode, the crucible 10 enters and exits the main cavity 1, the times and the identification are recorded through scanning of the conveying arm, and after the crucible 10 is used for N times, the crucible 10 is automatically recovered after reaching the replacement standard. There are two recovery modes: one is that the waste water is forcibly recycled after reaching the specified N times according to the using times; one is to photograph, compare and judge the appearance of the crucible 10 after replacement or pre-melting, and enter an automatic recovery stage if the appearance of the pre-melted metal or the edge of the crucible 10 is abnormal. When the crucible 10 is to be recovered, the recovery cavity 17 can automatically clean the cavity and vacuumize, so that the cleanliness and the vacuum degree of the recovery cavity 17 are close to those of the auxiliary cavity 2, after the cavity cleaning and vacuum procedures are completed, the partition cavity doors 3 of the recovery cavity 17 and the auxiliary cavity 2 are opened, and the second conveying module 18 takes out the recovery crucible 10. The outermost partition chamber door 3 of the recovery chamber 17 is opened and manually taken out for cleaning and standby. Automatic recovery is realized through above structure, raises the efficiency greatly, improves user experience.
It should be noted that, although the above embodiments have been described herein, the invention is not limited thereto. Therefore, based on the innovative concepts of the present invention, the technical solutions of the present invention can be directly or indirectly applied to other related technical fields by making changes and modifications to the embodiments described herein, or by using equivalent structures or equivalent processes performed in the content of the present specification and the attached drawings, which are included in the scope of the present invention.
Claims (4)
1. The utility model provides a take metal coating machine of automatic crucible system which characterized in that includes: the device comprises a main chamber and an auxiliary chamber, wherein a partition chamber door is arranged between the main chamber and the auxiliary chamber;
the main chamber is used for metal evaporation;
the main cavity is internally provided with: the device comprises a slide plate, a first rotatable pressure-sensitive carrying platform, a uniformity baffle and a vacuum module;
the auxiliary chamber is provided with: a feeding module;
the auxiliary cavity is internally provided with: the device comprises a vacuum module, a first transmission module and a second rotatable pressure-sensitive carrying platform;
the first rotatable pressure sensitive stage is to: detecting whether the crucible metal is about to be used up, and starting an automatic feeding function if the crucible metal is about to be used up;
the feeding module is used for: charging a crucible of a second rotatable pressure sensitive stage;
the first transfer module is configured to: taking out the crucible which is about to be used up in the main cavity, and transferring the crucible with the same metal source in the auxiliary cavity to the main cavity;
the vacuum module is used for: after the crucible in the auxiliary cavity is filled with materials, vacuumizing the auxiliary cavity and purifying the cavity;
the reinforced module includes: the device comprises a feeding hole, an electronic scale and a discharging hole, wherein the electronic scale is arranged below the feeding hole.
2. The metal evaporation machine with the automatic crucible system as claimed in claim 1,
the auxiliary chamber is also provided with: a pre-melting comparison module;
the premelting comparison module is used for: and heating and pre-melting the crucible to be evaporated, photographing the surface of the pre-melted metal after the pre-melting of the metal in the crucible is finished, comparing preset photos, and judging whether the pre-melting state and the metal surface state are normal or not.
3. The metal evaporator with automatic crucible system according to claim 1, further comprising: a recovery chamber;
a partition cavity door is arranged between the auxiliary cavity and the recovery cavity;
the recovery cavity is internally provided with: the second crucible conveying module and the cavity cleaning module;
the cavity cleaning module is used for: cleaning the cavity;
the second crucible transfer module is used for: and automatically taking out the recovery crucible.
4. The metal evaporation machine with the automatic crucible system as claimed in claim 1,
the first or second rotatable pressure sensitive stage comprising: the device comprises a crucible, a pressure-sensitive sensor, a water cooling module, an electron beam emitting port and a rotating module;
the pressure-sensitive sensor is arranged below the crucible;
the water cooling module is arranged below the pressure-sensitive sensor;
the electron beam module is arranged below the water cooling module;
the rotating module is arranged below the electron beam module.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910512510.XA CN110284106B (en) | 2019-06-13 | 2019-06-13 | Take metal coating by vaporization machine of automatic crucible system |
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| CN201910512510.XA CN110284106B (en) | 2019-06-13 | 2019-06-13 | Take metal coating by vaporization machine of automatic crucible system |
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| CN110284106B true CN110284106B (en) | 2021-11-05 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0339465A (en) * | 1989-07-05 | 1991-02-20 | Mitsubishi Heavy Ind Ltd | Device for vaporizing metal vapor |
| JP2013104084A (en) * | 2011-11-11 | 2013-05-30 | Hitachi Zosen Corp | Material supply device for electron beam deposition, method and electron beam deposition device |
| CN103526164A (en) * | 2013-10-23 | 2014-01-22 | 京东方科技集团股份有限公司 | Evaporation equipment |
| CN205420530U (en) * | 2016-03-17 | 2016-08-03 | 合肥鑫晟光电科技有限公司 | Evaporation plating equipment |
| CN206570393U (en) * | 2017-01-23 | 2017-10-20 | 南京高光半导体材料有限公司 | Exempt from charging type evaporator of beginning to speak |
| CN208776826U (en) * | 2018-08-10 | 2019-04-23 | 福建省福联集成电路有限公司 | A kind of crucible device of metal evaporation machine |
-
2019
- 2019-06-13 CN CN201910512510.XA patent/CN110284106B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0339465A (en) * | 1989-07-05 | 1991-02-20 | Mitsubishi Heavy Ind Ltd | Device for vaporizing metal vapor |
| JP2013104084A (en) * | 2011-11-11 | 2013-05-30 | Hitachi Zosen Corp | Material supply device for electron beam deposition, method and electron beam deposition device |
| CN103526164A (en) * | 2013-10-23 | 2014-01-22 | 京东方科技集团股份有限公司 | Evaporation equipment |
| CN205420530U (en) * | 2016-03-17 | 2016-08-03 | 合肥鑫晟光电科技有限公司 | Evaporation plating equipment |
| CN206570393U (en) * | 2017-01-23 | 2017-10-20 | 南京高光半导体材料有限公司 | Exempt from charging type evaporator of beginning to speak |
| CN208776826U (en) * | 2018-08-10 | 2019-04-23 | 福建省福联集成电路有限公司 | A kind of crucible device of metal evaporation machine |
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