CN110282249A - A kind of equipment end photoresist bottle with bottle cap lock - Google Patents
A kind of equipment end photoresist bottle with bottle cap lock Download PDFInfo
- Publication number
- CN110282249A CN110282249A CN201810223781.9A CN201810223781A CN110282249A CN 110282249 A CN110282249 A CN 110282249A CN 201810223781 A CN201810223781 A CN 201810223781A CN 110282249 A CN110282249 A CN 110282249A
- Authority
- CN
- China
- Prior art keywords
- bottle cap
- bottle
- lock
- air cavity
- piston
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 64
- 239000000463 material Substances 0.000 claims description 13
- 239000007788 liquid Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 230000005484 gravity Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D47/00—Closures with filling and discharging, or with discharging, devices
- B65D47/04—Closures with discharging devices other than pumps
- B65D47/06—Closures with discharging devices other than pumps with pouring spouts or tubes; with discharge nozzles or passages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D55/00—Accessories for container closures not otherwise provided for
- B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
- B65D55/14—Applications of locks, e.g. of permutation or key-controlled locks
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Closures For Containers (AREA)
Abstract
The present invention relates to a kind of equipment end photoresist bottle with bottle cap lock, including bottle body, bottle body includes bottleneck, body, the outside of bottleneck is equipped with bottle handle, the bottleneck upper cover of bottleneck is equipped with the bottle cap being threadedly coupled, bottle cap is equipped with bottle cap locking device, bottle cap locking device includes cylinder pin, cylinder pin is fixed on the edge of bottle cap by cylinder key seat, cylinder pin includes cylinder, lock pin, cylinder pushes the contact that lock pin, which is extended downwardly, forms prediction with the bottle handle that bottle cap rotates in a circumferential direction on route to lock bottle cap state, cylinder pushes lock pin to retract the non-contact unlock bottle cap state that the bottle handle to rotate in a circumferential direction on route with bottle cap forms prediction upwards.The present invention locks bottle cap using bottle cap lock, prevents operator's miss change photoresist, has the characteristics that be avoided that operation error leads to accident.
Description
Technical field
The present invention relates to a kind of photoresist bottle, in particular to a kind of equipment end photoresist bottle with bottle cap lock belongs to photoresist
Field of containers.
Background technique
Photoresist is a kind of light-sensitive material, is applied to photoetching technique, engraves the coating of a pattern on the surface of the material.It is existing
The relatively common photoresist bottle of row is provided with the vial of bottle cap, installs air inlet pipe, outlet tube on bottle cap, air inlet pipe is applied into bottle
Pressure, photoresist liquor are exported from outlet tube.Due to having several different types of photoresists, but the shape phase of photoresist agent container in equipment
Together, it has not been convenient to distinguish, operator is easy that mistake occurs during replacing photoresist, and product is caused abnormal or report occur
It is useless.
Summary of the invention
There is the present invention equipment end photoresist bottle of bottle cap lock to disclose new scheme, locks bottle cap using bottle cap lock, prevents
Operator's miss change photoresist solves the problems, such as existing scheme without related insurance measure.
It includes bottle body that the present invention, which has the equipment end photoresist bottle of bottle cap lock, and bottle body includes bottleneck, body, on the outside of bottleneck
Equipped with bottle handle, the bottleneck upper cover of bottleneck is equipped with the bottle cap being threadedly coupled, and bottle cap is equipped with bottle cap locking device, bottle cap locking device packet
Cylinder pin is included, cylinder pin is fixed on the edge of bottle cap by cylinder key seat, and cylinder pin includes cylinder, lock pin, and cylinder pushes lock
Pin is extended downwardly, and the contact with the bottle handle that bottle cap rotates in a circumferential direction on route forms prediction locks bottle cap state, and cylinder pushes lock pin
The non-contact unlock bottle cap state for the formation prediction of the bottle handle on route that rotates in a circumferential direction with bottle cap is retracted upwards.
It further, is cylinder on the outside of the bottle cap of this programme, cylinder key seat includes platform board, and platform board is fan-shaped hardened
Structure, fixation is vertically equipped with positioning side plate below platform board, and the positioning side for positioning side plate is bonded positioning, platform with the outside of bottle cap
The inner arc end of plate is fixed on the edge of bottle cap by connector, and the outer arc end of platform board is equipped with cylinder pin fixed hole, lock
Pin is moved up and down across cylinder pin fixed hole.
Further, it is equipped with piston in the cylinder of this programme, is fixedly connected below piston with the connecting pin of lock pin, piston
Top is equipped with air cavity A, and the lower section of piston is equipped with air cavity B, and air cavity B is connected to external high pressure gas source, opens external high pressure gas source, living
Band pendulum lock pin moves upwards to form unlocked state plug under the action of high pressure in air cavity B, closing external high pressure gas source, in air cavity B
High pressure disappear, piston in air cavity A under the action of high pressure, piston self gravity band pendulum lock pin move downward to form locking shape
State.
Further, the pipeline that the external high pressure gas source of this programme is connected to air cavity B is equipped with solenoid valve, equipment end or net
Network photoresist management backstage controls the working condition of bottle cap locking device by the open/close states of control solenoid valve.
Further, it is equipped with piston in the cylinder of this programme, is fixedly connected below piston with the connecting pin of lock pin, piston
Top is equipped with micropump, and air cavity A is equipped between piston and micropump, and the lower section of piston is equipped with air cavity B, the cylinder of the lower part of air cavity B
Inner wall is equipped with piston limit plate, under air cavity C that air cavity B is divided into above piston limit plate by piston limit plate, piston limit plate
The air cavity D of side, the air inlet of micropump are connected to air cavity A, and the gas outlet of micropump is connected to air cavity D, start micropump, miniature
Gas in air cavity A is pumped into air cavity B by pump, and band pendulum lock pin moves upwards to form unlock piston under the action of high pressure in air cavity B
State closes micropump, and the high pressure in air cavity B disappears, and piston band pendulum lock pin under self gravitation effect moves downward to form lock
Determine state.
Further, the micropump of this programme includes micropump wireless control module, after equipment end or network photoresist manage
Platform controls the open/close states of micropump by micropump wireless control module to control the working condition of bottle cap locking device.
Further, it is equipped with piston in the cylinder of this programme, is fixedly connected below piston with the connecting pin of lock pin, piston
Top is equipped with air cavity A, and the lower section of piston is equipped with lock pin driving device, and air cavity B is equipped between piston and lock pin driving device, and lock pin drives
Dynamic device forms screw-driven with lock pin and connect, and lock pin driving device connects driving key raise/lower by above-mentioned screw-driven and formed
Unlock or lock state.
Further, the lock pin driving device of this programme includes driving wireless control module, equipment end or network resistron
Reason backstage controls the open/close states of lock pin driving device by driving wireless control module to control the work shape of bottle cap locking device
State.
Further, the bottle cap of this programme is equipped with air inlet pipe, outlet tube, and the bottom surface in body is the funnel conical surface, bottom surface
Lowest part offers downwards poly- material hole, and the lower end of outlet tube extends down into poly- material hole, and the positive pressure of air inlet pipe input is by body
Interior photoresist liquid is discharged from outlet tube.
Further, the lower end of the outlet tube of this programme includes elastic dilatation section, the scarce suction inlet of tack, and tack lacks suction inlet and includes
Suction inlet outer is provided with tack notch on suction inlet outer, tightens bottle cap, tack lacks suction inlet and the poly- material hole bottom contact elasticity of compression expands
Hold section, turn on bottle cap, elastic dilatation section extends the residual photoresist absorbed in the scarce suction inlet of tack under the action of natural resiliency stress
Liquid.
There is the present invention equipment end photoresist bottle of bottle cap lock to lock bottle cap using bottle cap lock, prevent operator's miss change photoresist
Agent has the characteristics that be avoided that operation error leads to accident.
Detailed description of the invention
Fig. 1 is the schematic diagram for the equipment end photoresist bottle that the present invention has bottle cap lock.
Fig. 2 is the schematic top plan view of photoresist bottle.
Fig. 3 is one of the schematic front view of photoresist bottle.
Fig. 4 is the two of the schematic front view of photoresist bottle.
Fig. 5 is the three of the schematic front view of photoresist bottle.
Fig. 6 is the schematic diagram of bottle cap locking device.
Fig. 7 is the partial schematic sectional view inside body.
Fig. 8 is the partial enlargement diagram of outlet tube lower end.
Fig. 9 is the schematic diagram of cylinder pin embodiment one.
Figure 10 is the schematic diagram of cylinder pin embodiment two.
Figure 11 is the schematic diagram of cylinder pin embodiment three.
Wherein, 111 be a bottle handle, and 121 be poly- material hole, and 211 be lock pin, and 212 be piston, and 213 be air cavity A, and 214 be air cavity
B, 215 be micropump, and 216 be piston limit plate, and 217 be air cavity D, and 218 be lock pin driving device, and 221 be platform board, and 222 are
Side plate is positioned, 311 be elastic dilatation section, and 312 be that tack lacks suction inlet.
Specific embodiment
As shown in Fig. 1~5, it includes bottle body that the present invention, which has the equipment end photoresist bottle of bottle cap lock, and bottle body includes bottleneck, bottle
Body, the outside of bottleneck are equipped with bottle handle, and the bottleneck upper cover of bottleneck is equipped with the bottle cap being threadedly coupled, and bottle cap is filled equipped with bottle cap lock
Set, bottle cap locking device includes cylinder pin, and cylinder pin is fixed on the edge of bottle cap by cylinder key seat, cylinder pin include cylinder,
Lock pin, cylinder push the contact that lock pin, which is extended downwardly, forms prediction with the bottle handle that bottle cap rotates in a circumferential direction on route to lock bottle cap shape
State, cylinder push lock pin to retract the non-contact unlock bottle cap shape that the bottle handle to rotate in a circumferential direction on route with bottle cap forms prediction upwards
State.Above scheme locks bottle cap using bottle cap lock, prevents operator's miss change photoresist, thing caused by avoiding because of operation error
Therefore.
In order to improve the stability of cylinder key seat, this programme discloses a kind of cylinder key seat with positioning function, such as Fig. 6
It is shown, it is specifically cylinder on the outside of bottle cap, cylinder key seat includes platform board, and platform board is sector plate structure, under platform board
Face fixation is vertically equipped with positioning side plate, and the positioning side for positioning side plate is bonded positioning with the outside of bottle cap, and the inner arc end of platform board is logical
It crosses connector to be fixed on the edge of bottle cap, the outer arc end of platform board is equipped with cylinder pin fixed hole, and lock pin passes through cylinder pin
Fixed hole moves up and down.
In order to realize that locking, the unlocking function of cylinder pin, this programme disclose following instance.
Embodiment one
As shown in figure 9, being equipped with piston in the cylinder of this programme, it is fixedly connected below piston with the connecting pin of lock pin, piston
Top is equipped with air cavity A, and the lower section of piston is equipped with air cavity B, and air cavity B is connected to external high pressure gas source, opens external high pressure gas source, living
Band pendulum lock pin moves upwards to form unlocked state plug under the action of high pressure in air cavity B, closing external high pressure gas source, in air cavity B
High pressure disappear, piston in air cavity A under the action of high pressure, piston self gravity band pendulum lock pin move downward to form locking shape
State.In order to obtain remote control function, the pipeline that the external high pressure gas source of this programme is connected to air cavity B is equipped with solenoid valve, if
Standby end or network photoresist management backstage control the working condition of bottle cap locking device by the open/close states of control solenoid valve.
Embodiment two
As shown in Figure 10, it is equipped with piston in the cylinder of this programme, is fixedly connected below piston with the connecting pin of lock pin, piston
Top is equipped with micropump, and air cavity A is equipped between piston and micropump, and the lower section of piston is equipped with air cavity B, the cylinder of the lower part of air cavity B
Inner wall is equipped with piston limit plate, under air cavity C that air cavity B is divided into above piston limit plate by piston limit plate, piston limit plate
The air cavity D of side, the air inlet of micropump are connected to air cavity A, and the gas outlet of micropump is connected to air cavity D, start micropump, miniature
Gas in air cavity A is pumped into air cavity B by pump, and band pendulum lock pin moves upwards to form unlock piston under the action of high pressure in air cavity B
State closes micropump, and the high pressure in air cavity B disappears, and piston band pendulum lock pin under self gravitation effect moves downward to form lock
Determine state.In order to obtain remote control function, the micropump of this programme includes micropump wireless control module, equipment end or network
Photoresist management backstage controls the open/close states of micropump by micropump wireless control module to control the work of bottle cap locking device
State.
Embodiment three
As shown in figure 11, it is equipped with piston in the cylinder of this programme, is fixedly connected below piston with the connecting pin of lock pin, piston
Top is equipped with air cavity A, and the lower section of piston is equipped with lock pin driving device, and air cavity B is equipped between piston and lock pin driving device, and lock pin drives
Dynamic device forms screw-driven with lock pin and connect, and lock pin driving device connects driving key raise/lower by above-mentioned screw-driven and formed
Unlock or lock state.In order to obtain remote control function, the lock pin driving device of this programme includes driving wireless control module,
Equipment end or network photoresist management backstage are controlled by the open/close states of driving wireless control module control lock pin driving device
The working condition of bottle cap locking device.
It is accumulated to reduce photoresist in body, saves material, this programme also discloses a kind of body internal structure, such as
Shown in Fig. 7, specifically bottle cap is equipped with air inlet pipe, outlet tube, and the bottom surface in body is the funnel conical surface, and the lowest part of bottom surface is downward
Offer poly- material hole, the lower end of outlet tube extends down into poly- material hole, and the positive pressure of air inlet pipe input is by the photoresist liquid in body
It is discharged from outlet tube.When further, in order to avoid opening bottle cap, photoresist discloses one from outlet tube lower end water clock, this programme
The partial structurtes of kind outlet tube, as shown in figure 8, the lower end of specifically outlet tube includes elastic dilatation section, the scarce suction inlet of tack, tack
Scarce suction inlet includes suction inlet outer, and tack notch is provided on suction inlet outer, tightens bottle cap, and tack lacks suction inlet and contacts with poly- material hole bottom
Elasticity of compression dilatation section turns on bottle cap, and elastic dilatation section extends under the action of natural resiliency stress to be absorbed in the scarce suction inlet of tack
Residual light blocking solution.Wherein, tack, which lacks suction inlet, can draw more residual photoresists compared to tapered ramp suction inlet, improve light
The utilization rate of resist.
This programme discloses a kind of container for storing photoresist, and container is to have handle below 1 gal glass bottle and bottleneck,
Current most of photoetching processes all store photoresist using such glass container.The photoresist bottle of this programme includes bottle cap locking device,
Lock control module and communication module.Bottle cap locking device is by increasing locking pin on equipment end photoresist bottle cap, and with cylinder
Control the flexible of locking pin.The state that locking pin stretches out is lock state, at this time if twisting equipment end bottle cap counterclockwise, stretches out shape
The locking pin (lock pin) of state can be blocked by handle, can not release apparatus end bottle cap, operator, which not can be carried out, normally more to move
Make.Locking pin retracted mode is unlocked state, can twist equipment end bottle cap at this time, operator can carry out normally replacing light
Resist movement.The switch of control module solenoid valve control compressed air is locked, for controlling the flexible of cylinder in locking module.
The locking and unlock life to specified photoresist bottle cap lock that communication module receiving device end or network photoresist management system end issue
It enables.This programme increases locking pin on equipment end photoresist bottle cap, is fixed by lengthening original fixed screw on equipment end bottle cap
Cylinder locks pedestal and cylinder, does not influence the movement of normal screwing bottle cap.Bottle cap solution can be remotely controlled during replacing photoresist
Lock assists operator to select correct photoresist bottle, avoids operator's mistake because caused by error in judgement selects wrong photoresist bottle,
And it is obvious to the locking effect of equipment end photoresist bottle cap, it installs additional easy, is not necessarily to reforming equipment, production that will not be original to equipment
It affects.Based on the above feature, the equipment end photoresist bottle with bottle cap lock of this programme has compared to existing product to be protruded
Substantive distinguishing features and significant progress.
The equipment end photoresist bottle with bottle cap lock of this programme is not limited to content disclosed in specific embodiment, implements
In example the technical solution that occurs can the understanding based on those skilled in the art and extend, those skilled in the art are according to this programme
The simple replacement scheme made in conjunction with common knowledge also belongs to the range of this programme.
Claims (10)
1. a kind of equipment end photoresist bottle with bottle cap lock, it is characterized in that including bottle body, the bottle body includes bottleneck, body, institute
The outside for stating bottleneck is equipped with bottle handle, and the bottleneck upper cover of the bottleneck is equipped with the bottle cap being threadedly coupled, and the bottle cap is equipped with
Bottle cap locking device, the bottle cap locking device includes cylinder pin, and the cylinder pin is fixed on the side of the bottle cap by cylinder key seat
Along upper, the cylinder pin includes cylinder, lock pin, and the cylinder pushes the lock pin to extend downwardly and rotates in a circumferential direction road with the bottle cap
The contact that the bottle handle on line forms prediction locks bottle cap state, the cylinder push the lock pin retract upwards with it is described
Bottle cap rotate in a circumferential direction the bottle handle on route formed prediction non-contact unlock bottle cap state.
2. the equipment end photoresist bottle according to claim 1 with bottle cap lock, which is characterized in that be on the outside of the bottle cap
Cylinder, the cylinder key seat includes platform board, and the platform board is sector plate structure, and fixation is vertically equipped with below the platform board
Side plate is positioned, the positioning side of the positioning side plate is bonded positioning with the outside of the bottle cap, and the inner arc end of the platform board is logical
It crosses connector to be fixed on the edge of the bottle cap, the outer arc end of the platform board is equipped with cylinder pin fixed hole, the lock
Pin is moved up and down across the cylinder pin fixed hole.
3. the equipment end photoresist bottle according to claim 1 with bottle cap lock, which is characterized in that be equipped with and live in the cylinder
It fills in, is fixedly connected below the piston with the connecting pin of the lock pin, the top of the piston is equipped with air cavity A, the piston
Lower section be equipped with air cavity B, the air cavity B is connected to external high pressure gas source, opens the external high pressure gas source, the piston is in institute
State in air cavity B drives the lock pin to move upwards to form unlocked state under the action of high pressure, closes the external high pressure gas source, institute
The high pressure stated in air cavity B disappears, and the piston drives the lock under the action of high pressure, piston self gravity in the air cavity A
Pin moves downward to form lock state.
4. the equipment end photoresist bottle according to claim 3 with bottle cap lock, which is characterized in that the external high pressure gas source
The pipeline being connected to the air cavity B is equipped with solenoid valve, equipment end or network photoresist management backstage by controlling the solenoid valve
Open/close states control the working condition of the bottle cap locking device.
5. the equipment end photoresist bottle according to claim 1 with bottle cap lock, which is characterized in that be equipped with and live in the cylinder
It fills in, is fixedly connected below the piston with the connecting pin of the lock pin, the top of the piston is equipped with micropump, the piston
Air cavity A is equipped between the micropump, the lower section of the piston is equipped with air cavity B, the cylinder inner wall of the lower part of the air cavity B
It is equipped with piston limit plate, the air cavity B is divided into air cavity C above the piston limit plate, described by the piston limit plate
Air cavity D below piston limit plate, the air inlet of the micropump are connected to the air cavity A, the gas outlet of the micropump with
The air cavity D connection, starts the micropump, the gas in the air cavity A is pumped into the air cavity B by the micropump, described
Piston drives the lock pin to move upwards to form unlocked state in the air cavity B under the action of high pressure, closes the micropump,
High pressure in the air cavity B disappears, and the piston drives the lock pin to move downward to form locking shape under self gravitation effect
State.
6. the equipment end photoresist bottle according to claim 5 with bottle cap lock, which is characterized in that the micropump includes micro-
It is described micro- by micropump wireless control module control that type pumps wireless control module, equipment end or network photoresist management backstage
The open/close states of type pump control the working condition of the bottle cap locking device.
7. the equipment end photoresist bottle according to claim 1 with bottle cap lock, which is characterized in that be equipped with and live in the cylinder
It fills in, is fixedly connected below the piston with the connecting pin of the lock pin, the top of the piston is equipped with air cavity A, the piston
Lower section be equipped with lock pin driving device, between the piston and the lock pin driving device be equipped with air cavity B, the lock pin driving device
It forms screw-driven with the lock pin to connect, the lock pin driving device drives the lock pin liter by screw-driven connection
Drop forms unlock or lock state.
8. the equipment end photoresist bottle according to claim 7 with bottle cap lock, which is characterized in that the lock pin driving device
Including driving wireless control module, equipment end or network photoresist management backstage to pass through described in driving wireless control module control
The open/close states of lock pin driving device control the working condition of the bottle cap locking device.
9. the equipment end photoresist bottle according to claim 1 with bottle cap lock, which is characterized in that the bottle cap be equipped with into
Tracheae, outlet tube, the bottom surface in the body are the funnel conical surfaces, and the lowest part of the bottom surface offers downwards poly- material hole, described
The lower end of outlet tube extends down into the poly- material hole, and the positive pressure of air inlet pipe input is by the photoresist liquid in the body from described
Outlet tube discharge.
10. the equipment end photoresist bottle according to claim 9 with bottle cap lock, which is characterized in that under the outlet tube
End includes elastic dilatation section, the scarce suction inlet of tack, and it includes suction inlet outer that the tack, which lacks suction inlet, is provided with tack on the suction inlet outer
Notch tightens the bottle cap, and the tack lacks suction inlet and contacts the compression elastic dilatation section with the poly- material hole bottom, turns on institute
Bottle cap is stated, the elasticity dilatation section extends the residual photoresist absorbed in the scarce suction inlet of the tack under the action of natural resiliency stress
Liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810223781.9A CN110282249A (en) | 2018-03-19 | 2018-03-19 | A kind of equipment end photoresist bottle with bottle cap lock |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810223781.9A CN110282249A (en) | 2018-03-19 | 2018-03-19 | A kind of equipment end photoresist bottle with bottle cap lock |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110282249A true CN110282249A (en) | 2019-09-27 |
Family
ID=68000865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810223781.9A Pending CN110282249A (en) | 2018-03-19 | 2018-03-19 | A kind of equipment end photoresist bottle with bottle cap lock |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110282249A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111225062A (en) * | 2020-01-14 | 2020-06-02 | 昆山润石智能科技有限公司 | Control system and method for photoresist bottle |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3737662A1 (en) * | 1987-11-06 | 1989-05-18 | Oster Eckhard Dr Ing | Protective cap for compressed-gas cylinders |
| AU4562489A (en) * | 1988-11-30 | 1990-06-07 | Gdalia Glazer | Bottle holder |
| CN200989452Y (en) * | 2006-12-31 | 2007-12-12 | 保定天威集团有限公司 | Block valve used for transformer fire-fighting device high-pressure nitrogen cylinder |
| CN102518621A (en) * | 2011-12-20 | 2012-06-27 | 中国航空工业集团公司金城南京机电液压工程研究中心 | Actuator cylinder position locking and unlocking mechanism |
| CN204469086U (en) * | 2015-02-02 | 2015-07-15 | 天津市时代消防设备有限公司 | Fire-extinguishing device for kitchen equipment Mechanical Driven decompressor |
| CN104828380A (en) * | 2015-04-03 | 2015-08-12 | 远光共创智能科技股份有限公司 | Locking transfer bottle |
| CN207985662U (en) * | 2018-03-19 | 2018-10-19 | 玄创半导体设备（上海）有限公司 | A kind of equipment end photoresist bottle with bottle cap lock |
-
2018
- 2018-03-19 CN CN201810223781.9A patent/CN110282249A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3737662A1 (en) * | 1987-11-06 | 1989-05-18 | Oster Eckhard Dr Ing | Protective cap for compressed-gas cylinders |
| AU4562489A (en) * | 1988-11-30 | 1990-06-07 | Gdalia Glazer | Bottle holder |
| CN200989452Y (en) * | 2006-12-31 | 2007-12-12 | 保定天威集团有限公司 | Block valve used for transformer fire-fighting device high-pressure nitrogen cylinder |
| CN102518621A (en) * | 2011-12-20 | 2012-06-27 | 中国航空工业集团公司金城南京机电液压工程研究中心 | Actuator cylinder position locking and unlocking mechanism |
| CN204469086U (en) * | 2015-02-02 | 2015-07-15 | 天津市时代消防设备有限公司 | Fire-extinguishing device for kitchen equipment Mechanical Driven decompressor |
| CN104828380A (en) * | 2015-04-03 | 2015-08-12 | 远光共创智能科技股份有限公司 | Locking transfer bottle |
| CN207985662U (en) * | 2018-03-19 | 2018-10-19 | 玄创半导体设备（上海）有限公司 | A kind of equipment end photoresist bottle with bottle cap lock |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111225062A (en) * | 2020-01-14 | 2020-06-02 | 昆山润石智能科技有限公司 | Control system and method for photoresist bottle |
| CN111225062B (en) * | 2020-01-14 | 2023-06-20 | 昆山润石智能科技有限公司 | Control method for photoresist bottle |
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