CN110270932A - A kind of device and method that attrition process adds lapping liquid automatically in the process - Google Patents
A kind of device and method that attrition process adds lapping liquid automatically in the process Download PDFInfo
- Publication number
- CN110270932A CN110270932A CN201910491092.0A CN201910491092A CN110270932A CN 110270932 A CN110270932 A CN 110270932A CN 201910491092 A CN201910491092 A CN 201910491092A CN 110270932 A CN110270932 A CN 110270932A
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- China
- Prior art keywords
- lapping liquid
- addition
- liquid
- camera
- fixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 title claims abstract description 95
- 238000000034 method Methods 0.000 title claims abstract description 44
- 230000000007 visual effect Effects 0.000 claims abstract description 15
- 239000007921 spray Substances 0.000 claims description 7
- 238000003760 magnetic stirring Methods 0.000 claims description 3
- 238000000889 atomisation Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 abstract description 6
- 238000012544 monitoring process Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 238000013019 agitation Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The present invention provides a kind of device and method of addition lapping liquid automatic during attrition process, the device includes vision processing system and adds liquid device, the vision processing system includes light source, camera, host and visual processes software, the camera is fixed on polisher lapper by supporting element, the light source is arranged in the bottom of camera lens and is directed at the processing district of polisher lapper, and the visual processes software operates on host；The liquid device that adds is fixed on polisher lapper, adds liquid end alignment workpiece to be processed, the camera and is added liquid device and is attached with host.The plant automation degree is high, avoids the repetition monotonous labour of processor, and uniformly, machined parameters can be remembered and repeat the addition of simultaneous grinding liquid, have good processing consistency；The addition parameter of lapping liquid is accurately controlled, and is conducive to improve machining accuracy.
Description
Technical field
The invention belongs to precision processing technology fields, and in particular to a kind of process of lapping add automatically the device of lapping liquid with
And the method using device progress lapping liquid addition.
Background technique
In Precision and Ultra-precision Machining field, part processes the method for being small removal amount, repeatedly processing mainly taken
Carry out approaching for processing purpose parameter.The lapping liquid being made is matched using micron power and related liquid, it is small processing
When the workpiece of removal amount, there is good practicability.
But lapping liquid is not solution, but a kind of suspension, micron power are only suspended in liquid, shakes up one section of standing
After time, micron power can still be deposited on lapping liquid container bottom.To guarantee the relatively uniform of grinding technics, timing agitation is needed
Lapping liquid.The addition manner of lapping liquid at present, predominantly artificial addition, needs artificial timing that lapping liquid is placed in uniform state.
When attrition process, the frequency of lapping liquid addition, position, the volume added every time, the area of lapping liquid covering, abrasive material in lapping liquid
Whether uniform etc. the indexs of distribution, have very big contingency and randomness.Lapping liquid addition is uneven, leads to the different positions of workpiece
The uneven of removal amount is set, the decline of processing quality and grinding efficiency is caused, increases processing cost.In process, it grasps
Make the monotonous labour that personnel need to do a large amount of repeatability；And the volume of the artificial lapping liquid of addition every time, the frequency for adding lapping liquid
Deng having very big contingency and uncertainty, so that processing quality and process are difficult to control.
Summary of the invention
During solving current accurate, Ultra-precision Turning, it is artificial add lapping liquid is uneven, adding procedure cannot be from
The problem of dynamicization, the purpose of the present invention is to provide a kind of process of lapping automatically add grinding liquid device and using the device into
The method of row lapping liquid addition.
To achieve the goals above, the present invention the following technical schemes are provided:
A kind of attrition process adds the device of lapping liquid automatically in the process, which includes vision processing system and add liquid device,
The vision processing system includes light source, camera, host and visual processes software, and the camera is fixed on grinding by supporting element
On polishing machine, the light source is arranged in the bottom of camera lens and is directed at the processing district of polisher lapper, and the visual processes are soft
Part operates on host；The liquid device that adds is fixed on polisher lapper, adds liquid end alignment workpiece to be processed, the camera
It is attached with liquid device is added with host.
Further, the supporting element includes bottom plate, column, camera support plate and camera adjustments device, the bottom plate
It is bolted on the desktop of polisher lapper, the column is bolted on bottom plate, the camera support plate
It is fixed on the top of column, camera is fixed on the vertical end face of camera support plate by camera adjustments device.
Further, the light source is fixed on column by light source support plate.
Further, the liquid device that adds includes spray head, catheter, control valve, containing liquid chamber and blender, the spray head
It is connected to the outlet end of catheter, the control valve is connected between catheter and containing liquid chamber, the visual processes software control
The opening and closing of control valve.
Further, the blender is electric mixer or magnetic stirring apparatus.
Further, oscillating bar assembly, eccentric bar assembly and abrasive disk are fixed on the polisher lapper, described grinds
It is placed with workpiece on mill and is fixed by the mandril of oscillating bar assembly end.
The method for carrying out automatic addition lapping liquid using the device of above-described automatic addition lapping liquid, including following step
It is rapid:
(1) when polisher lapper non-dead axle processing, vision processing system by the area of real time contrast's workpiece and abrasive disk it
Than issuing lapping liquid addition signal and carrying out lapping liquid addition according to the threshold parameter of setting；
(2) when polisher lapper dead axle is processed, vision processing system obtains the revolving speed of workpiece, according to the frequency parameter of setting,
It issues lapping liquid addition signal and carries out lapping liquid addition.
Further, the addition parameter of lapping liquid includes point of addition, addition frequency, addition volume and area coverage.
Further, lapping liquid addition manner includes high-pressure atomization, mesolow sprinkling or squeezes out without pressure mode.
The utility model has the advantages that the present invention provides a kind of device and method of addition lapping liquid automatic during attrition process, this
The main motion state using the method for machine vision come tracking and monitoring region workpiece on abrasive disk of invention, to control grinding
The parameters such as addition manner, frequency, the volume of liquid, realize the automation addition of lapping liquid, and parameter preset can be arranged by processor.This
Device can be combined with the study of the experience and correlation machine of processor, grinding track analog simulation etc., have each machined parameters
Store function, machined parameters can be saved, processing effect is evaluated and analyzed convenient for the later period, carry out process optimization, mention
Rise processing efficiency and machining accuracy.
The device has the advantage that
(1) high degree of automation avoids the repetition monotonous labour of processor；
(2) uniformly, the position of lapping liquid addition, volume are uniform, and processing quality and efficiency are greatly improved for lapping liquid addition；
(3) machined parameters can be remembered and repeat, and for preferable processing effect, can trace back to the setting of parameter, be protected
It deposits；When producing workpieces processing in batches, good processing consistency can have；
(4) controllability is strong, and the present invention accurately controls the addition manner of lapping liquid using machine according to the various parameters of setting, substitution
The process of artificial addition, to be conducive to improve machining accuracy.
Detailed description of the invention
Fig. 1 is the machining locus figure of polisher lapper；
Fig. 2 is the system framework figure of device of the present invention；
Fig. 3 is vision processing system work flow diagram；
Fig. 4 is that lapping liquid adds flow chart；
Fig. 5 is the front view of device of the present invention；
Fig. 6 is the perspective view of device of the present invention.
In figure: 1, vision processing system；11, light source；12, camera；13, supporting element；131, bottom plate；132, column；133,
Camera support plate；134, camera adjustments device；135, light source support plate；2, add liquid device；21, spray head；22, catheter；3, it grinds
Grinding and polishing ray machine；31, oscillating bar assembly；311, swing rod；32, eccentric bar assembly；33, abrasive disk；34, workpiece；35, mandril.
Specific embodiment
The invention will now be further described with reference to specific embodiments, but examples are merely exemplary, not to this hair
Bright range constitutes any restrictions.It will be understood by those skilled in the art that without departing from the spirit and scope of the invention
Can with the details and forms of the technical scheme of the invention are modified or replaced, but these modification and replacement each fall within it is of the invention
In protection scope.
A kind of attrition process adds the device of lapping liquid automatically in the process, and as shown in Figure 5,6, which includes visual processes
System 1 includes light source 11, camera 12, host and visual processes software, the phase with liquid device 2, the vision processing system 1 is added
Machine 12 is fixed on polisher lapper 3 by supporting element 13, and the light source 11 is arranged in the bottom of camera lens and is directed at grinding
The processing district of polishing machine, the visual processes software operate on host；The liquid device 2 that adds is fixed on polisher lapper 3,
It adds liquid end alignment workpiece to be processed, the camera 12 and adds liquid device 2 and is attached with host.
The supporting element 13 includes bottom plate 131, column 132, camera support plate 133 and camera adjustments device 134, described
Bottom plate 131 is bolted on the desktop of polisher lapper, and the column 132 is bolted on bottom plate 131, institute
The top that camera support plate 133 is fixed on column 132 is stated, camera 12 is fixed on camera support plate by camera adjustments device 134
133 vertical end face.
The light source 11 is fixed on column 132 by light source support plate 135.
The liquid device 2 that adds includes spray head 21, catheter 22, control valve, containing liquid chamber and blender, and the spray head 21 connects
The outlet end in catheter 22 is connect, the control valve is connected between catheter and containing liquid chamber, the visual processes software control
The opening and closing of control valve.
The blender is electric mixer or magnetic stirring apparatus.
Oscillating bar assembly 31, eccentric bar assembly 32 and abrasive disk 33, the grinding are fixed on the polisher lapper
It is placed with workpiece 34 on disk 33 and is fixed by the mandril 35 of 31 end of oscillating bar assembly.
Whether Fig. 1 is the machining locus figure of polisher lapper, changed according to workpiece centre when processing, can be divided into dead axle and add
Work and the processing of non-dead axle.In process, abrasive disk 33 does uniform rotation, and workpiece 34 is servo-actuated rotation, when dead axle processing, pendulum
Bar 311 is static, and workpiece is along center O2 rotation；When the processing of non-dead axle, swing rod 311 is swung around fixed point O3, and workpiece 34 rotates at this time
Center will do periodic oscillations by O2 to O2'.It as seen from Figure 1, is monitoring region, benefit with rectangular broken line and 33 intersection of abrasive disk
Obtain the area ratio of workpiece 34 Yu abrasive disk 33 in real time with the method for machine vision.As can be known from Fig. 1, when workpiece 34 moves to prison
When surveying other than region, workpiece 34 and 33 area ratio of abrasive disk are 0, minimum at this time；It gradually leaves away in workpiece 2 and monitors region or gradually
Into when monitoring region, area ratio can be changed；When monitoring region or entirety is left, area ratio will not become workpiece overall region
Change.Therefore, when carrying out the processing of non-dead axle, by the area ratio of real time contrast's workpiece 34 and abrasive disk 33 as control signal
The instruction of sending；When carrying out dead axle processing, workpiece 34 and 33 area ratio of abrasive disk are definite value, without comparing the two in real time
Area ratio adds frequency, every time addition according to preset lapping liquid at this time according to vision processing system real-time tracking workpiece rotational frequency
The parameters such as the volume of lapping liquid, the instruction issued as control signal.
Fig. 2 is the system framework figure of device of the present invention, and the light source in vision processing system impinges upon monitoring region first,
Image is passed to host by camera captured in real-time workpiece motion s situation, and visual processes software is handled, real-time monitoring workpiece with grind
The area ratio of mill or the revolving speed of workpiece, when the motion state of workpiece reaches the parameter of setting, vision processing system is issued
Signal is controlled, the addition of lapping liquid is carried out.Wherein the process flow diagram of vision processing system is as shown in Figure 3.Lapping liquid addition dress
The raw material for selecting blender processing to be input to containing liquid chamber is set, mixed, stirred according to the ratio that each ingredient is set, due to grinding
Liquid is suspension, and lapping liquid need to be stirred always operation in containing liquid chamber.According to setting, when containing liquid chamber has lapping liquid, control
When parameter signal is sent, i.e., application lapping liquid, lapping liquid addition flow chart are as shown in Figure 4.
Since the device includes host, processing software, therefore the device has storage capacity, can store the ginseng of several settings
Numerical value.It after processing is completed, can be according to processing effect, contrast process parameter, to carry out the optimization of processing technology.Visual processes
Software has scalability, can carry out further simulation analysis when identifying abrasive disk and workpiece features.
Claims (9)
1. the device of automatic addition lapping liquid during a kind of attrition process, which is characterized in that the device includes visual processes system
It unites and adds liquid device, the vision processing system includes light source, camera, host and visual processes software, and the camera passes through branch
Support member is fixed on polisher lapper, and the light source is arranged in the bottom of camera lens and is directed at the processing district of polisher lapper,
The visual processes software operates on host；The liquid device that adds is fixed on polisher lapper, and it is to be added to add the alignment of liquid end
Work workpiece, the camera and adds liquid device and is attached with host.
2. the device of automatic addition lapping liquid during a kind of attrition process according to claim 1, which is characterized in that institute
The supporting element stated includes bottom plate, column, camera support plate and camera adjustments device, and the bottom plate is bolted on grinding and throws
On the desktop of ray machine, the column is bolted on bottom plate, and the camera support plate is fixed on the top of column, camera
The vertical end face of camera support plate is fixed on by camera adjustments device.
3. the device of automatic addition lapping liquid during a kind of attrition process according to claim 2, which is characterized in that institute
The light source stated is fixed on column by light source support plate.
4. the device of automatic addition lapping liquid during a kind of attrition process according to claim 1, which is characterized in that institute
The liquid device that adds stated includes spray head, catheter, control valve, containing liquid chamber and blender, and the spray head is connected to the liquid out of catheter
End, the control valve are connected between catheter and containing liquid chamber, the opening and closing of the visual processes software control control valve.
5. the device of automatic addition lapping liquid during a kind of attrition process according to claim 4, which is characterized in that institute
The blender stated is electric mixer or magnetic stirring apparatus.
6. the device of automatic addition lapping liquid during a kind of attrition process according to claim 1, which is characterized in that institute
It is fixed with oscillating bar assembly, eccentric bar assembly and abrasive disk on the polisher lapper stated, is placed with workpiece simultaneously on the abrasive disk
It is fixed by the mandril of oscillating bar assembly end.
7. the method for carrying out automatic addition lapping liquid using device as claimed in claim 6, which is characterized in that including following step
It is rapid:
(1) when polisher lapper non-dead axle processing, vision processing system by the area of real time contrast's workpiece and abrasive disk it
Than issuing lapping liquid addition signal and carrying out lapping liquid addition according to the threshold parameter of setting；
(2) when polisher lapper dead axle is processed, vision processing system obtains the revolving speed of workpiece, according to the frequency parameter of setting,
It issues lapping liquid addition signal and carries out lapping liquid addition.
8. the method for automatic addition lapping liquid according to claim 7, which is characterized in that the addition parameter of lapping liquid includes
Point of addition, addition frequency, addition volume and area coverage.
9. the method for automatic addition lapping liquid according to claim 7, which is characterized in that lapping liquid addition manner includes height
Pressure atomization, mesolow sprinkling are squeezed out without pressure mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910491092.0A CN110270932A (en) | 2019-06-06 | 2019-06-06 | A kind of device and method that attrition process adds lapping liquid automatically in the process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910491092.0A CN110270932A (en) | 2019-06-06 | 2019-06-06 | A kind of device and method that attrition process adds lapping liquid automatically in the process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110270932A true CN110270932A (en) | 2019-09-24 |
Family
ID=67960537
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910491092.0A Pending CN110270932A (en) | 2019-06-06 | 2019-06-06 | A kind of device and method that attrition process adds lapping liquid automatically in the process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110270932A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113290507A (en) * | 2021-07-06 | 2021-08-24 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Polishing solution conveying device |
| CN115091352A (en) * | 2022-07-14 | 2022-09-23 | 长鑫存储技术有限公司 | Grinder, grinding fluid flow control method and device, storage medium and equipment |
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| CN211029633U (en) * | 2019-06-06 | 2020-07-17 | 苏州超徕精工科技有限公司 | Device for automatically adding grinding fluid in grinding process |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113290507A (en) * | 2021-07-06 | 2021-08-24 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Polishing solution conveying device |
| CN115091352A (en) * | 2022-07-14 | 2022-09-23 | 长鑫存储技术有限公司 | Grinder, grinding fluid flow control method and device, storage medium and equipment |
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