CN110260981B - 一种基于超表面的非制冷红外成像传感器 - Google Patents
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G—PHYSICS
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CN108507685B (zh) * | 2018-03-13 | 2020-11-03 | 烟台睿创微纳技术股份有限公司 | 一种石墨烯探测器及其制备方法 |
CN109253803B (zh) * | 2018-08-29 | 2021-03-02 | 北方广微科技有限公司 | 非制冷红外偏振探测器像元结构及制备方法 |
CN109459148B (zh) * | 2018-11-12 | 2020-09-08 | 中国科学院长春光学精密机械与物理研究所 | 基于超表面fbar谐振频率温漂特性的偏振红外传感器 |
CN109813448B (zh) * | 2019-01-31 | 2021-11-05 | 中国科学院长春光学精密机械与物理研究所 | 双谱超表面集成非制冷红外探测器及制作方法 |
CN110118604B (zh) * | 2019-05-30 | 2020-03-13 | 中国科学院长春光学精密机械与物理研究所 | 基于混合谐振模式的宽光谱微测辐射热计及其制备方法 |
CN110967119B (zh) * | 2019-11-18 | 2020-10-27 | 中国空间技术研究院 | 单层结构的超宽波段非制冷红外探测器及其制备方法 |
CN111947787B (zh) * | 2020-07-06 | 2021-07-13 | 北京北方高业科技有限公司 | 红外探测器及其制备方法 |
CN111947789B (zh) * | 2020-08-11 | 2021-12-21 | 烟台睿创微纳技术股份有限公司 | 一种双色偏振非制冷红外探测器及其制作方法 |
CN111896122B (zh) * | 2020-08-11 | 2021-11-16 | 烟台睿创微纳技术股份有限公司 | 一种偏振非制冷红外探测器及其制备方法 |
CN113328003B (zh) * | 2021-02-01 | 2021-12-28 | 北京北方高业科技有限公司 | 一种红外探测器及其制备方法 |
CN113328002B (zh) * | 2021-02-01 | 2022-01-18 | 北京北方高业科技有限公司 | 一种红外探测器及其制备方法 |
CN113447145A (zh) * | 2021-06-25 | 2021-09-28 | 北京北方高业科技有限公司 | 一种非制冷氧化钛cmos红外探测器 |
CN113447146B (zh) * | 2021-06-25 | 2022-12-02 | 北京北方高业科技有限公司 | 一种台阶型红外探测器 |
CN113990888A (zh) * | 2021-09-30 | 2022-01-28 | 华为技术有限公司 | 一种红外探测器、摄像模组和电子设备 |
CN113984215B (zh) * | 2021-11-23 | 2023-08-11 | 天津津航技术物理研究所 | 近零功耗mems红外探测器 |
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- 2017-09-30 CN CN201710918927.7A patent/CN107741278B/zh active Active
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Publication number | Publication date |
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CN107741278B (zh) | 2019-09-10 |
CN110174175A (zh) | 2019-08-27 |
CN110174175B (zh) | 2020-06-12 |
CN110186574B (zh) | 2020-08-07 |
CN110160656A (zh) | 2019-08-23 |
CN110160656B (zh) | 2020-07-03 |
CN107741278A (zh) | 2018-02-27 |
CN110186574A (zh) | 2019-08-30 |
CN110260981A (zh) | 2019-09-20 |
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