CN110260788A - Optical micro/nano measuring device, the method for extracting structure micro-nano dimension information to be measured - Google Patents
Optical micro/nano measuring device, the method for extracting structure micro-nano dimension information to be measured Download PDFInfo
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Abstract
Description
技术领域technical field
本发明涉及一种基于傅里叶变换校正的通焦扫描光学微纳测量装置以及提取待测结构微纳尺寸信息的方法以及记录介质。具体涉及一种可以校正光学和机械噪声并得到较高测量精度结果的光学纳米测量装置以及用于提取待测结构微纳尺寸信息的方法,属于半导体行业的光学微纳测量和过程控制领域。The invention relates to a through-focus scanning optical micro-nano measurement device based on Fourier transform correction, a method for extracting micro-nano size information of a structure to be measured, and a recording medium. It specifically relates to an optical nanometer measurement device capable of correcting optical and mechanical noise and obtaining higher measurement accuracy results and a method for extracting micronano size information of structures to be measured, belonging to the field of optical micronano measurement and process control in the semiconductor industry.
背景技术Background technique
在摩尔定律的推动下,半导体的尺寸不断减小,其结构逐步由2维平面向3维立体的方向发展。而传统的微纳测量方法逐渐暴露出它的局限性,如原子力显微镜测量效率太低,扫描电子显微镜只能提供2维宽度信息而不能准确提供第3维高度信息等。光学微纳测量与传统的微纳测量方法相比具有一系列独特的优点,如成本低廉、测量效率高、可操作性强、无破坏性等。基于通焦扫描的光学微纳测量法是指对于一组结构参数x=[x1,...,xn]T,预先通过仿真手段计算在物镜焦点位置连续变化下对应的光学信号集合f(x)。然后利用测量装置收集待测结构参数x0对应的光学信号y(x0),并计算二者的均方根误差:Driven by Moore's Law, the size of semiconductors continues to decrease, and its structure gradually develops from a 2-dimensional plane to a 3-dimensional three-dimensional direction. However, the traditional micro-nano measurement method has gradually exposed its limitations. For example, the measurement efficiency of atomic force microscope is too low, and scanning electron microscope can only provide 2-dimensional width information but cannot accurately provide 3-dimensional height information. Compared with traditional micro-nano measurement methods, optical micro-nano measurement has a series of unique advantages, such as low cost, high measurement efficiency, strong operability, and non-destructive. The optical micro-nano measurement method based on through-focus scanning means that for a set of structural parameters x=[x 1 ,...,x n ] T , the corresponding optical signal set f under the continuous change of the focus position of the objective lens is calculated in advance by means of simulation. (x). Then use the measuring device to collect the optical signal y(x 0 ) corresponding to the structural parameter x 0 to be measured, and calculate the root mean square error of the two:
χ(x,x0)=||f(x)-y(x0)||χ(x, x 0 )=||f(x)-y(x 0 )||
最后结合最小二乘的思想从均方根误差中提取出最接近真实结构参数的测量结果其满足:Finally, combined with the idea of least squares, the measurement results closest to the real structural parameters are extracted from the root mean square error which satisfies:
其中Ω是结构参数域。where Ω is the structural parameter field.
在实际应用条件下,基于通焦扫描的光学微纳测量的测量结果对一些因素高度敏感,如测量装置的横向机械振动和实际照明光的角度不均匀性。上述因素会引入机械噪声和光学噪声,造成测量结果的精度降低。因此利用傅里叶变换的算法对光学信号集合f(x)进行校正,以得到消除了机械噪声和光学噪声干扰的测量结果,提高测量结果的精度。Under practical application conditions, the measurement results of optical micro-nano measurements based on through-focus scanning are highly sensitive to some factors, such as the lateral mechanical vibration of the measurement device and the angular non-uniformity of the actual illumination light. The above factors will introduce mechanical and optical noise, which will reduce the accuracy of the measurement results. Therefore, the Fourier transform algorithm is used to correct the optical signal set f(x) to obtain measurement results that eliminate the interference of mechanical noise and optical noise, and improve the accuracy of measurement results.
发明内容Contents of the invention
本发明想要解决的技术问题是:提供一种能够快速校正机械噪声和光学噪声,有助于在线、实时测量半导体元器件微纳尺寸结构的通焦扫描光学微纳测量装置以及用于提取待测结构微纳尺寸信息的方法。The technical problem to be solved by the present invention is to provide a through-focus scanning optical micro-nano measurement device that can quickly correct mechanical noise and optical noise, and is helpful for on-line and real-time measurement of the micro-nano size structure of semiconductor components, and is used to extract the A method for measuring the micro-nano size information of structures.
本发明所涉及的光学微纳测量装置,包括:反射式柯勒照明和成像部分;和物镜定位部分,其中反射式柯勒照明和成像部分包括:光源;第一物镜,放置于光源之前,用于会聚照明光;小孔,放置于所述第一物镜之前;第一透镜,置于所述小孔前方,用于形成准直光路;第二透镜,置于所述第一透镜前方,用于与所述第一透镜形成4f系统;偏振片,放置于准直光路中;分光棱镜,放置于所述偏振片之后;和第三透镜,放置于所述第二透镜之后;第四透镜,置于所述第三透镜后方,用于与所述第三透镜形成4f系统;平面镜;第二物镜,用于产生反射式柯勒照明和成像;和成像CCD,物镜定位部分包括:压电定位器,与所述第二物镜连接,用于使所述第二物镜沿光轴上下扫描,实现通焦扫描的目的;和控制部,控制所述压电定位器。The optical micro-nano measurement device involved in the present invention includes: a reflective Kohler illumination and imaging part; and an objective lens positioning part, wherein the reflective Kohler illumination and imaging part includes: a light source; Converging illuminating light; the small hole is placed in front of the first objective lens; the first lens is placed in front of the small hole to form a collimated optical path; the second lens is placed in front of the first lens for Forming a 4f system with the first lens; a polarizer, placed in the collimated optical path; a dichroic prism, placed behind the polarizer; and a third lens, placed behind the second lens; a fourth lens, Placed behind the third lens, used to form a 4f system with the third lens; a plane mirror; a second objective lens, used to generate reflective Kohler illumination and imaging; and imaging CCD, the objective lens positioning part includes: piezoelectric positioning a device, connected to the second objective lens, used to make the second objective lens scan up and down along the optical axis to achieve the purpose of through-focus scanning; and a control unit, controlling the piezoelectric positioner.
本发明所述的测量系统,优选所述光源、所述第一物镜和所述小孔组成了一个光源系统,所述第一物镜将从所述光源发出的照明光会聚至所述小孔中心,所述小孔再将会聚照明光变为发散照明光。In the measurement system of the present invention, preferably, the light source, the first objective lens and the small hole form a light source system, and the first objective lens converges the illumination light emitted from the light source to the center of the small hole , the aperture then changes the focused illumination light into divergent illumination light.
本发明所述的测量装置,优选所述第一透镜和所述第二透镜组成了4f系统,所述第一透镜和所述第二透镜组成的4f系统的入射焦平面与所述小孔中心所在平面重合,所述第一透镜和所述第二透镜组成的4f系统的出射焦平面与所述第二物镜的共轭后焦平面重合,通过调整小孔直径大小,以获得不同入射数值孔径的反射式柯勒照明模式。In the measurement device of the present invention, it is preferred that the first lens and the second lens form a 4f system, and the incident focal plane of the 4f system formed by the first lens and the second lens is the same as the center of the small hole. Where the plane coincides, the exit focal plane of the 4f system composed of the first lens and the second lens coincides with the conjugate rear focal plane of the second objective lens, and different incident numerical apertures are obtained by adjusting the diameter of the small hole Reflective Kohler illumination pattern.
本发明所述的测量装置,优选所述偏振片放置于所述第一透镜和所述第二透镜之间,针对不同类型的待测样品,通过调整偏振片的通光轴方向,以获得最佳的测量灵敏度。In the measuring device according to the present invention, preferably, the polarizer is placed between the first lens and the second lens, and for different types of samples to be measured, by adjusting the direction of the optical axis of the polarizer to obtain the optimum Good measurement sensitivity.
本发明所述的测量装置,优选所述控制部对所述压电定位器进行控制,使得所述第二物镜沿光轴上下扫描而实现通焦扫描,不对载物台产生任何影响,同时所述测量装置自身的机械位移所产生的机械噪声及所需扫描行程内因离焦所产生的光学噪声较小,对测量结果的精度影响较小。In the measuring device of the present invention, preferably, the control unit controls the piezoelectric positioner so that the second objective lens scans up and down along the optical axis to realize through-focus scanning without any influence on the stage, and at the same time The mechanical noise generated by the mechanical displacement of the measurement device itself and the optical noise generated by defocusing in the required scanning stroke are small, and have little impact on the accuracy of the measurement results.
本发明的提取待测结构微纳尺寸信息的方法,包括:模拟图像仿真步骤,用于生成组成搜索库的仿真离焦图像序列;实际图像采集步骤,用于采集待测结构的离焦图像序列;实际图像校正步骤,用于去除实际图像中受外界干扰所引入的光学噪声与机械噪声;通焦扫描图像建立步骤;和通焦扫描图像比对及待测信息提取步骤。The method for extracting the micro-nano size information of the structure to be tested includes: a simulated image simulation step for generating a sequence of simulated out-of-focus images forming a search library; an actual image collection step for collecting a sequence of defocused images of the structure to be measured ; The actual image correction step is used to remove the optical noise and mechanical noise introduced by external interference in the actual image; the step of establishing the through-focus scanning image; and the step of comparing the through-focus scanning image and extracting the information to be measured.
本发明所述的提取待测结构微纳尺寸信息的方法,优选在模拟图像仿真步骤中,利用全矢量计算方法,首先将柯勒照明光分解为一系列平面波分量,然后计算每一个平面波分量对应的散射近场分布,再利用阿贝成像原理计算每一个近场分布的远场变换和像平面分布,最后进行叠加合成得到最终的理想模拟图像。The method for extracting the micro-nano size information of the structure to be measured according to the present invention preferably uses the full vector calculation method in the analog image simulation step to first decompose the Koehler illumination light into a series of plane wave components, and then calculate the corresponding plane wave components of each plane wave component. Scattering near-field distribution, and then use the Abbe imaging principle to calculate the far-field transformation and image plane distribution of each near-field distribution, and finally perform superposition and synthesis to obtain the final ideal analog image.
本发明所述的提取待测结构微纳尺寸信息的方法,优选在实际图像采集步骤中,通过控制压电定位器,使物镜在每次扫描行程结束后通过反馈校正回到初始位置而不必手动调整,满足了快速重复测量需要。In the method for extracting the micro-nano size information of the structure to be measured according to the present invention, preferably in the actual image acquisition step, by controlling the piezoelectric positioner, the objective lens can be corrected back to the initial position after each scanning stroke without manual operation. Adjustment, to meet the needs of rapid repeated measurement.
本发明所述的提取待测结构微纳尺寸信息的方法,优选在实际图像校正步骤中,利用傅里叶变换的思想,分别分离出含噪声实际图像和理想模拟图像的频谱和相位,并将含噪声实际图像的相位和理想模拟图像的频谱组合,以消除原实际图像中受外界干扰所引入的光学噪声和机械噪声。In the method for extracting the micro-nano size information of the structure to be measured according to the present invention, preferably in the actual image correction step, the idea of Fourier transform is used to separate the spectrum and phase of the noise-containing actual image and the ideal simulated image respectively, and the The phase of the real image with noise and the frequency spectrum of the ideal analog image are combined to eliminate the optical noise and mechanical noise introduced by external interference in the original real image.
本发明的计算机可读存储介质,其上存储有可执行指令,所述指令在一个或多个处理器执行时,可以使所述一个或多个处理器执行权利要求6~9中所述的用于提取待测结构微纳尺寸信息的方法。In the computer-readable storage medium of the present invention, executable instructions are stored thereon, and when the instructions are executed by one or more processors, the one or more processors can execute the method described in claims 6-9. A method for extracting micro-nano size information of the structure to be measured.
本发明与现有技术相比具有如下优点:Compared with the prior art, the present invention has the following advantages:
(1)本发明结构简单,易操作,从软件角度消除图像噪声,对硬件水平要求不高;(1) The present invention is simple in structure, easy to operate, eliminates image noise from the software point of view, and does not require high hardware level;
(2)本发明用物镜扫描的方式代替传统通焦扫描系统的载物台扫描方式来实现通焦扫描的目的,使系统易于加装到半导体生产加工设备中;(2) The present invention uses the scanning method of the objective lens to replace the stage scanning method of the traditional through-focus scanning system to realize the purpose of through-focus scanning, so that the system is easy to be installed in semiconductor production and processing equipment;
(3)本发明的测量结果精度高,测量速度快,适合在线测量和大批量生产应用。(3) The measurement result of the present invention has high precision and fast measurement speed, and is suitable for on-line measurement and mass production applications.
附图说明Description of drawings
图1是本发明的测量系统模型图;Fig. 1 is a measurement system model diagram of the present invention;
图2是本发明的照明4f光路图;Fig. 2 is illumination 4f light path figure of the present invention;
图3是本发明的成像4f光路图;Fig. 3 is imaging 4f optical path figure of the present invention;
图4是本发明的反射式柯勒照明和成像部分模块图;Fig. 4 is a block diagram of reflective Kohler illumination and imaging part of the present invention;
图5是本发明的物镜定位部分模块图:Fig. 5 is a block diagram of the objective lens positioning part of the present invention:
图6是本发明的提取待测结构微纳尺寸信息的方法的整体流程图;Fig. 6 is the overall flowchart of the method for extracting the micro-nano size information of the structure to be tested according to the present invention;
图7是本发明的模拟图像仿真步骤的流程图;Fig. 7 is the flowchart of the analog image emulation step of the present invention;
图8是本发明的实际图像采集步骤的流程图;Fig. 8 is a flowchart of the actual image acquisition steps of the present invention;
图9是本发明的实际图像校正步骤的流程图;Fig. 9 is a flowchart of the actual image correction steps of the present invention;
图10是本发明的通焦扫描图像建立步骤的流程图;Fig. 10 is a flow chart of the steps of establishing a through-focus scanning image of the present invention;
图11是本发明的通焦扫描图像比对及待测信息提取步骤流程图。Fig. 11 is a flow chart of the steps of comparison of through-focus scanning images and extraction of information to be tested in the present invention.
具体实施方式Detailed ways
图1是本发明实施例的测量系统10的模型示意图,该系统由以下三部分组成:反射式柯勒照明部分,成像部分和物镜定位部分,其中反射式柯勒照明部分包括:LED光源11,第一物镜21,小孔22,第一透镜23,偏振片24,非偏振分光棱镜25,第二透镜26,平面反射镜27,第二物镜28,载物台12。成像部分包括:第二物镜28,压电定位器29,平面反射镜27,第二透镜26,非偏振分光棱镜25,第三透镜31,第四透镜32,CCD相机33。物镜定位部分包括压电定位器29及其控制部14。第二物镜28受压电定位器29控制。当测量开始时,控制部14向29发出指令,29控制第二物镜28从名义对焦位置开始向下移动一段行程,然后自下而上进行通焦扫描,获取一系列离焦图像,不对载物台产生任何影响,同时装置自身的机械位移所产生的机械噪声及所需扫描行程内因离焦所产生的光学噪声较小,对测量结果的精度影响较小。Fig. 1 is the model schematic diagram of the measurement system 10 of the embodiment of the present invention, and this system is made up of following three parts: reflective Kohler illumination part, imaging part and objective lens positioning part, wherein reflective Kohler illumination part comprises: LED light source 11, A first objective lens 21 , a small hole 22 , a first lens 23 , a polarizing plate 24 , a non-polarizing beam splitter prism 25 , a second lens 26 , a flat mirror 27 , a second objective lens 28 , and an object stage 12 . The imaging part includes: a second objective lens 28 , a piezoelectric positioner 29 , a plane mirror 27 , a second lens 26 , a non-polarizing beam splitter prism 25 , a third lens 31 , a fourth lens 32 , and a CCD camera 33 . The objective lens positioning part includes a piezoelectric positioner 29 and its control unit 14 . The second objective lens 28 is controlled by a piezoelectric positioner 29 . When the measurement starts, the control unit 14 sends an instruction to 29, and 29 controls the second objective lens 28 to move downward for a certain stroke from the nominal focus position, and then conducts a through-focus scan from bottom to top to obtain a series of defocused images without adjusting the object. At the same time, the mechanical noise generated by the mechanical displacement of the device itself and the optical noise generated by defocus in the required scanning stroke are relatively small, which has little influence on the accuracy of the measurement results.
图2是本发明实施例中反射式柯勒照明部分的原理示意图。一个第一物镜21放置于LED光源11之前,用于会聚入射光。一个小孔22放置于会聚点处。一个焦距为100nm的第一透镜23放置于22之前,其焦点正好与小孔22重合,将自22发出的发散光束会聚为准直光束。一块偏振片24放置于准直光路中用于产生不同的偏振照明光,以便针对不同类型的待测目标选择合适的照明状态。一个非偏振分光棱镜25放置于24后用于转折光路。另一个焦距为100nm的第二透镜26放置于15后,第二透镜26与23共同将自22发出的发散光束成像于一个第二物镜28的焦平面上。调整第二物镜28的位置使其共轭后焦平面与第二透镜26的焦平面重合,此时第二透镜26焦平面上每一个像点发出的发散球面波经第二物镜28后变为不同传播方向的平面波,从而在物平面上形成了反射式柯勒照明模式。所述第一透镜与所述第二透镜组成反射式柯勒照明部分的中继镜组,并构成入射焦平面与所述小孔所在平面重合,出射焦平面与所述第二物镜共轭后焦平面重合的4f系统,通过调整所述小孔直径的大小容易得到不同的照明数值孔径。Fig. 2 is a schematic diagram of the principle of the reflective Kohler illumination part in the embodiment of the present invention. A first objective lens 21 is placed in front of the LED light source 11 for converging incident light. A small hole 22 is placed at the point of convergence. A first lens 23 with a focal length of 100nm is placed in front of 22, its focal point coincides with the small hole 22, and the divergent beam emitted from 22 is converged into a collimated beam. A polarizing plate 24 is placed in the collimating light path for generating different polarized illumination lights, so as to select appropriate illumination states for different types of targets to be measured. A non-polarizing beam splitter prism 25 is placed behind 24 for turning the light path. Another second lens 26 with a focal length of 100 nm is placed behind 15 , and the second lens 26 and 23 together image the divergent light beam emitted from 22 on the focal plane of a second objective lens 28 . Adjust the position of the second objective lens 28 so that its conjugate back focal plane coincides with the focal plane of the second lens 26, and now the divergent spherical wave sent by each image point on the focal plane of the second lens 26 becomes Plane waves of different propagation directions, thus forming a reflected Koehler illumination pattern on the object plane. The first lens and the second lens constitute the relay lens group of the reflective Kohler illumination part, and form the incident focal plane coincident with the plane where the small hole is located, and the exit focal plane is conjugated with the second objective lens The 4f system with coincident focal planes can easily obtain different illumination numerical apertures by adjusting the size of the small hole diameter.
图3是本发明实施例的成像部分的原理示意图。第二物镜28收集自样品13的散射光,并与第二透镜26共同一次成像。第三透镜31放置于第二透镜26之后,其焦平面与第二透镜26的焦平面重合将自第二透镜26发出的散射光会聚为准直光。第四透镜32放置于第三透镜31之后,将准直光会聚到CCD相机33的感光平面上。通过选择第四透镜32的焦距并调整第四透镜32与第三透镜31之间的距离,可以获得不同放大倍率的像。Fig. 3 is a schematic diagram of the principle of the imaging part of the embodiment of the present invention. The second objective lens 28 collects the scattered light from the sample 13 and forms an image together with the second lens 26 . The third lens 31 is placed behind the second lens 26 , and its focal plane coincides with the focal plane of the second lens 26 to converge the scattered light emitted from the second lens 26 into collimated light. The fourth lens 32 is placed behind the third lens 31 to converge the collimated light onto the photosensitive plane of the CCD camera 33 . By selecting the focal length of the fourth lens 32 and adjusting the distance between the fourth lens 32 and the third lens 31 , images with different magnifications can be obtained.
图4是根据本发明实施例的反射式柯勒照明和成像部分的模块图,其中前述第二物镜28,前述平面反射镜27,前述第二透镜26,前述非偏振分光棱镜25是照明和成像的公共模块,同时发挥传递照明光和散射光的作用。Fig. 4 is the block diagram of reflective Kohler illumination and imaging part according to the embodiment of the present invention, wherein aforesaid second objective lens 28, aforesaid flat reflector 27, aforesaid second lens 26, aforesaid non-polarizing beam splitter prism 25 are illumination and imaging The common module of the building plays the role of transmitting illumination light and scattering light at the same time.
图5是根据本发明实施例的物镜定位模块图。前述控制部14向前述压电定位器29发出移动指令,控制前述第二物镜28精确移动。前述第二物镜28移动的同时向控制部14反馈图像采集数目,当达到规定数目后,前述控制部14发出终止移动指令。Fig. 5 is a diagram of an objective lens positioning module according to an embodiment of the present invention. The control unit 14 sends a movement command to the piezoelectric positioner 29 to control the precise movement of the second objective lens 28 . While the second objective lens 28 is moving, it feeds back the number of image acquisitions to the control unit 14 , and when the number reaches a predetermined number, the control unit 14 issues an instruction to stop the movement.
图6是本发明的提取待测结构微纳尺寸信息的方法的整体流程图。本发明的提取待测结构微纳尺寸信息的方法包括:模拟图像仿真步骤1,用于在对实际待测目标进行测量之前,预先仿真出组成搜索库的对应于n个不同尺寸的模拟样品的n幅理想仿真离焦图像,其中每一幅理想仿真离焦图像的模拟方法均是基于全矢量计算的思想,即首先使用时域有限差分法计算散射近场分布及其远场变换,然后使用阿贝成像原理将所有通过成像孔径的远场分量在像平面上叠加合成,得到像平面上的光强分布;实际图像采集步骤2,用于在开始测量后快速采集待测结构的离焦图像序列,其中控制部输出控制信号使压电定位器带动物镜沿光轴进行扫描,物镜每步进一段距离后,CCD相机随即拍摄待测目标的一幅实际离焦图像;实际图像校正步骤3,用于在步骤2完成后使用傅里叶变换校正算法去除实际图像中受外界干扰所引入的光学噪声与机械噪声,即首先分别将每一幅实际离焦图像和理想仿真离焦图像的振幅频谱和相位频谱通过傅里叶变换分离出来,然后将实际离焦图像的振幅频谱和理想仿真离焦图像的相位频谱组合,最后再对其做傅里叶反变换,实现将实际离焦图像关于理想仿真离焦图像校正的目的;通焦扫描图像建立步骤4,用于在步骤1和步骤3完成后从实际离焦图像和仿真离焦图像中分别创建实际通焦扫描图像和包含仿真通焦扫描图像的搜索库,其中对于每一幅实际离焦图像和仿真离焦图像,均首先选定一块包含待测目标中感兴趣部位的子区域,然后提取该子区域的平均强度,最后将这些平均强度按照步骤1和步骤2中的焦点位置进行堆叠并进行插值和平滑操作,输出通焦扫描图像;和通焦扫描图像比对及待测信息提取步骤5,用于在步骤4完成后提取待测目标的尺寸信息,即基于最小二乘法的思想,定量计算实际通焦图像与搜索库中每一幅理想仿真通焦图像之间的差异,其中最佳匹配结果,即与实际通焦图像相差最小的那幅理想仿真通焦图像对应的仿真模型参数即被当做待测目标的对应参数。Fig. 6 is an overall flow chart of the method for extracting the micro-nano size information of the structure to be measured according to the present invention. The method for extracting the micro-nano size information of the structure to be measured in the present invention includes: an analog image simulation step 1, which is used to pre-simulate the images of the simulated samples corresponding to n different sizes that make up the search library before measuring the actual target to be measured. n ideal simulated defocused images, the simulation method of each ideal simulated defocused image is based on the idea of full vector calculation, that is, first use the time domain finite difference method to calculate the scattering near-field distribution and its far-field transformation, and then use The Abbe imaging principle superimposes and synthesizes all the far-field components passing through the imaging aperture on the image plane to obtain the light intensity distribution on the image plane; the actual image acquisition step 2 is used to quickly acquire the defocused image of the structure to be measured after starting the measurement Sequence, wherein the control part outputs a control signal to make the piezoelectric positioner drive the objective lens to scan along the optical axis. After the objective lens steps a certain distance, the CCD camera immediately shoots an actual defocused image of the target to be measured; the actual image correction step 3, It is used to use the Fourier transform correction algorithm to remove the optical noise and mechanical noise introduced by external interference in the actual image after the completion of step 2, that is, firstly, the amplitude spectrum of each actual defocused image and the ideal simulated defocused image and the phase spectrum are separated by Fourier transform, and then the amplitude spectrum of the actual defocused image is combined with the phase spectrum of the ideal simulated defocused image, and finally it is inversely Fourier transformed to achieve the actual defocused image about the ideal The purpose of simulated out-of-focus image correction; the through-focus scan image establishment step 4 is used to create the actual through-focus scan image and the simulated through-focus scan image from the actual out-of-focus image and the simulated out-of-focus image after step 1 and step 3 are completed, respectively Image search library, in which for each actual out-of-focus image and simulated out-of-focus image, firstly select a sub-area containing the part of interest in the target to be tested, then extract the average intensity of the sub-area, and finally average these Intensity is stacked according to the focus position in step 1 and step 2 and interpolated and smoothed to output the through-focus scan image; compared with the through-focus scan image and the step 5 of extracting the information to be tested is used to extract the to-be-measured information after step 4 is completed. Measure the size information of the target, that is, based on the idea of the least square method, quantitatively calculate the difference between the actual through-focus image and each ideal simulated through-focus image in the search library, and the best matching result is the difference between the actual through-focus image The simulation model parameters corresponding to the smallest ideal simulation through-focus image are taken as the corresponding parameters of the target to be measured.
图7是模拟图像仿真步骤的流程图。步骤61是在运行模拟程序之前,输入模型的结构参数x,测量系统10的光学参数:波长λ,照明数值孔径INA和收集数值孔径CNA,并设定FDTD的计算域尺寸Lx和Ly。在柯勒照明模式下,视场内每一点均接受相同的照明光锥,照明光锥的空间角与INA有关。因此步骤62将照明光锥分解成一系列振幅相同,传播方向不同的平面波分量,然后在步骤63中利用时域有限差分法计算每一个平面波分量受待测样品影响所对应的的散射近场分布。在得到散射近场分布后,步骤64按光栅衍射的原理将近场分布变换为k空间里的远场分布,即散射场的傅里叶变换。以上步骤均独立作用于光矢量的X,Y,Z三个方向的分量,因此属于全矢量计算的方法。根据阿贝成像原理,像平面分布实际上是所有能通过由CNA限定的像方光阑的散射傅里叶分量的叠加结果,因此步骤65通过叠加得到的散射场傅里叶分量而输出模拟离焦图像。Fig. 7 is a flow chart of the simulation image simulation steps. Step 61 is to input the structural parameter x of the model, the optical parameters of the measurement system 10: wavelength λ, illumination numerical aperture INA and collection numerical aperture CNA before running the simulation program, and set the calculation domain size L x and Ly of FDTD. In the Koehler illumination mode, every point in the field of view receives the same illumination light cone, and the spatial angle of the illumination light cone is related to INA. Therefore, in step 62, the illumination light cone is decomposed into a series of plane wave components with the same amplitude and different propagation directions, and then in step 63, the scattering near-field distribution corresponding to each plane wave component affected by the sample to be tested is calculated by using the time domain finite difference method. After obtaining the scattered near-field distribution, step 64 transforms the near-field distribution into the far-field distribution in k-space according to the principle of grating diffraction, that is, the Fourier transform of the scattered field. The above steps all act independently on the components in the X, Y, and Z directions of the light vector, so they belong to the method of full vector calculation. According to Abbe's imaging principle, the image plane distribution is actually the superposition result of all scattered Fourier components that can pass through the image square aperture defined by the CNA, so step 65 outputs the simulated separation by superimposing the Fourier components of the scattered field out of focus image.
图8是实际图像采集步骤的流程示意图。在采集之前,设定相机曝光时间,输入离焦图像数目2n+1,通焦扫描步长k nm并指定图像存储路径。开始采集后,控制压电定位器29,使压电定位器29首先控制所述第二物镜28向下移动n×knm,然后由控制部14进行迭代运算。每迭代一次相机33曝光一次,然后所述第二物镜28向上移动k nm,并判断已采集图像数目是否满足要求。当采集图像数目满足要求后,控制部14向压电定位器29发出指令,控制所述第二物镜28回到初始位置。通过控制压电定位器,使物镜在每次扫描行程结束后通过反馈校正回到初始位置而不必手动调整,满足了快速重复测量需要。Fig. 8 is a schematic flow chart of the actual image acquisition steps. Before acquisition, set the camera exposure time, input the number of out-of-focus images 2n+1, through-focus scan step size k nm and specify the image storage path. After the collection starts, the piezoelectric positioner 29 is controlled so that the piezoelectric positioner 29 firstly controls the second objective lens 28 to move downward by n×knm, and then the control unit 14 performs an iterative calculation. The camera 33 exposes once every iteration, and then the second objective lens 28 moves up by k nm, and judges whether the number of captured images meets the requirement. When the number of captured images meets the requirements, the control unit 14 sends an instruction to the piezoelectric positioner 29 to control the second objective lens 28 to return to the initial position. By controlling the piezoelectric positioner, the objective lens can be corrected back to the initial position after each scanning stroke without manual adjustment, which meets the needs of rapid repeated measurement.
图9是实际图像校正步骤的流程图。光学噪声会导致通焦扫描图像的图案倾斜,机械噪声会导致通焦扫描图像的图案出现波动,可见二者均产生于位移相关的影响。步骤71对每一幅离焦图像应用傅里叶变换,分别得到实际离焦图像和理想仿真离焦图像的频谱和相位。然后步骤72用实际离焦图像的频谱乘以仿真离焦图像的相位,得到校正后图像的傅里叶变换,最后在步骤73中对该结果应用傅里叶逆变换,则可以得到校正后的离焦图像。Fig. 9 is a flowchart of the actual image correction steps. Optical noise will cause the pattern of the through-focus scanning image to tilt, and mechanical noise will cause the pattern of the through-focus scanning image to fluctuate. It can be seen that both of them are caused by displacement-related effects. Step 71 applies Fourier transform to each defocused image to obtain the frequency spectrum and phase of the actual defocused image and the ideal simulated defocused image respectively. Then step 72 multiplies the phase of the simulated defocused image by the frequency spectrum of the actual defocused image to obtain the Fourier transform of the corrected image, and finally applies the inverse Fourier transform to the result in step 73, then the corrected one can be obtained out of focus image.
图10是通焦扫描图像建立步骤的流程图.通焦扫描图像实际是由离焦图像序列堆叠而成的三维散射强度分布数据集的一个二维截面图,它的X轴代表待测样品各部位的真实空间位置,Y轴代表各离焦图像对应的焦点位置,灰度值代表了归一化光强。其中步骤81用平滑背景离焦图像对含目标的离焦图像进行归一化操作,得到的归一化离焦图像的背景区域灰度值趋于0,有利于消除采集过程中照明光光强波动产生的影响。步骤82提取出的强度轮廓曲线是该次级区域光强的平均,因此任何小于该次级区域的尺寸变化不能被分辨。步骤83和步骤84分别对堆叠而成的粗通焦扫描图像进行插值和平滑滤波,以消除堆叠造成的不连续性。Figure 10 is a flow chart of the steps for creating a through-focus scanning image. The through-focus scanning image is actually a two-dimensional cross-sectional view of a three-dimensional scattering intensity distribution data set formed by stacking out-of-focus image sequences, and its X-axis represents each The real spatial position of the part, the Y axis represents the focal position corresponding to each defocused image, and the gray value represents the normalized light intensity. Among them, step 81 uses the smooth background defocus image to perform normalization operation on the defocus image containing the target, and the gray value of the background area of the normalized defocus image obtained tends to 0, which is beneficial to eliminate the intensity of the illumination light in the acquisition process. The impact of fluctuations. The intensity profile extracted in step 82 is the average of the intensity of the sub-region, so any dimensional changes smaller than the sub-region cannot be resolved. Steps 83 and 84 respectively perform interpolation and smoothing filtering on the stacked rough-pass focal scan images to eliminate discontinuities caused by stacking.
图11是通焦扫描图像比对及待测信息提取步骤的流程图.提取待测目标的尺寸信息实际是一个逆问题求解的过程,首先将待测目标的通焦图像与通过正向建模得到的一系列仿真通焦图像进行匹配,得到一系列定量匹配指标,然后建立这些匹配指标的拟合函数,通过寻找拟合函数最小值对应的模型尺寸来提取待测目标的尺寸信息。其中步骤91计算待测目标通焦图像与仿真通焦图像之间的差异,将其作为定量匹配指标。步骤92根据匹配指标的分布情况选择二次函数或样条函数作为拟合函数。步骤93计算拟合函数的最小值,当出现多个局部极值点时需要进一步处理以寻找到最优解。Figure 11 is a flow chart of the steps of through-focus scanning image comparison and information extraction. Extracting the size information of the target to be measured is actually a process of solving an inverse problem. First, the through-focus image of the target to be measured is compared with the The obtained series of simulated through-focus images are matched to obtain a series of quantitative matching indicators, and then the fitting functions of these matching indicators are established, and the size information of the target to be measured is extracted by finding the model size corresponding to the minimum value of the fitting function. Wherein step 91 calculates the difference between the through-focus image of the target to be measured and the simulated through-focus image, and uses it as a quantitative matching index. Step 92 selects a quadratic function or a spline function as the fitting function according to the distribution of the matching index. Step 93 calculates the minimum value of the fitting function. When multiple local extreme points appear, further processing is required to find an optimal solution.
附图中示出了一些方框图和/或流程图。应理解,方框图和/或流程图中的一些方框或其组合可以由计算机程序指令来实现。这些计算机程序指令可以提供给通用计算机、专用计算机或其他可编程数据处理装置的处理器,从而这些指令在由该处理器执行时可以创建用于实现这些方框图和/或流程图中所说明的功能/操作的装置。Some block diagrams and/or flowcharts are shown in the figures. It will be understood that some or combinations of blocks in the block diagrams and/or flowcharts can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus, so that these instructions, when executed by the processor, can be created to implement the functions illustrated in these block diagrams and/or flowcharts /operated device.
因此,本公开的技术可以用硬件和/或软件(包括固件、微代码等)的形式来实现。另外,本公开的技术可以采取存储有指令的计算机可读介质上的计算机程序产品的形式,该计算机程序产品可供指令执行系统(例如,一个或多个处理器)使用或者结合指令执行系统使用。在本公开的上下文中,计算机可读介质可以是能够包含、存储、传送、传播或传输指令的任意介质。例如,计算机可读介质可以包括但不限于电、磁、光、电磁、红外或半导体系统、装置、器件或传播介质。计算机可读介质的具体示例包括:磁存储装置,如磁带或硬盘(HDD);光存储装置,如光盘(CD-ROM);存储器,如随机存取存储器(RAM)或闪存;和/或有线/无线通信链路”。Accordingly, the techniques of the present disclosure may be implemented in the form of hardware and/or software (including firmware, microcode, etc.). Additionally, the technology of the present disclosure may take the form of a computer program product on a computer-readable medium having instructions stored thereon for use by or in connection with an instruction execution system (e.g., one or more processors) . In the context of the present disclosure, a computer-readable medium is any medium that can contain, store, convey, propagate or transport instructions. For example, a computer readable medium may include, but is not limited to, an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, device, or propagation medium. Specific examples of computer-readable media include: magnetic storage, such as magnetic tape or hard disk (HDD); optical storage, such as compact disc (CD-ROM); memory, such as random access memory (RAM) or flash memory; and/or wired /wireless communication link".
尽管已经示出和描述了本发明的示例实施例,本领域技术人员应当理解,在不背离权利要求及其等价物中限定的本发明的范围和精神的情况下,可以对这些示例实施例做出各种形式和细节上的变化。While example embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that changes may be made to these example embodiments without departing from the scope and spirit of the invention as defined in the claims and their equivalents. Variations in various forms and details.
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