CN110260764A - A kind of measuring tool for the horizontal crystal orientation positioning of crystal bar - Google Patents
A kind of measuring tool for the horizontal crystal orientation positioning of crystal bar Download PDFInfo
- Publication number
- CN110260764A CN110260764A CN201910556561.2A CN201910556561A CN110260764A CN 110260764 A CN110260764 A CN 110260764A CN 201910556561 A CN201910556561 A CN 201910556561A CN 110260764 A CN110260764 A CN 110260764A
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- ring
- fixed
- channel
- positioning
- locating rod
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- 239000013078 crystal Substances 0.000 title claims abstract description 79
- 230000001105 regulatory effect Effects 0.000 claims abstract description 32
- 238000005259 measurement Methods 0.000 claims description 9
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims description 6
- 239000004810 polytetrafluoroethylene Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- -1 polytetrafluoroethylene Polymers 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 7
- 229910052710 silicon Inorganic materials 0.000 abstract description 7
- 239000010703 silicon Substances 0.000 abstract description 7
- 238000000053 physical method Methods 0.000 abstract description 3
- 230000007547 defect Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003292 glue Substances 0.000 description 2
- 241000252254 Catostomidae Species 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/24—Measuring arrangements characterised by the use of mechanical techniques for measuring angles or tapers; for testing the alignment of axes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/30—Nuclear fission reactors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The present invention provides a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar, including adjustment device and dispensing device, dispensing device includes measuring disk, spirit bubble and locating rod, the inside for measuring disk is additionally provided with the channel passed through for locating rod, adjusting device includes regulating mechanism, positioning mechanism and bindiny mechanism, regulating mechanism includes fixed column, regulating nut, ring set and fixed ring, fixed column is cylinder, the outer wall of regulating nut is additionally provided with an annular groove, ring set is equipped in annular groove, ring set connects bindiny mechanism by fixed ring；Bindiny mechanism includes connecting rod and connection ring, and connecting rod is articulated with fixed ring and positioning mechanism by connection ring；Positioning mechanism includes stop block and fixed-hinged support, and stop block is connected to connection ring by fixed-hinged support, and stop block bottom surface is also connected with locating rod.The present invention compensate for the horizontal crystal orientation of the angle Notch silicon single crystal bar can not physical measurement positioning defect.
Description
Technical field
The invention belongs to monocrystalline silicon piece production fields, and in particular to a kind of measurement work for the horizontal crystal orientation positioning of crystal bar
Tool.
Background technique
The present invention is applied to monocrystalline silicon piece production field, and silicon single crystal rod needs before being cut into monocrystalline silicon piece in sticky stick
Bonding is oriented according to two deflection angles that equipment is calculated to crystal bar on platform, the two deflection angles, one is α water
Flat deflection angle determines the vertical crystal orientation of crystal bar, and one is β vertical deflection angle, determines the horizontal crystal orientation of crystal bar, and glues
The β deflection angle of stick platform is to rotate to carry out electronic surveying by encoder, 6 inches and 6 inches of diameter or less currently on the market
The silicon single crystal rod overwhelming majority all have the plane of reference, according to boule diameter size and the difference of customer requirement, the width of the plane of reference
Degree is also not quite similar,, can be with after being bonded on sticky stick platform for this kind of monocrystal rod for having the crystal ingot plane of reference from 25-60mm etc.
By carpenter's bevel protractor, bevel protractor is placed directly on physical measurement on the crystal ingot plane of reference, to verify and recheck equipment electronic surveying
Deflection angle it is whether correct, it is such as incorrect, then adjust β vertical deflection angle to being properly bonded again.But for such as 8 inches
It mostly without reference to face is the angle Notch to replace the plane of reference with 12 inches of silicon single crystal rod, and Notch
Slot again it is especially small, width and depth only have 2mm or so, this resulted in carpenter's bevel protractor without the image of Buddha survey plane of reference stick it is the same, directly
It connects and is put on the plane of reference to measure Notch, it is multiple that this β vertical deflection angle for having resulted in crystal bar can not carry out manually physics
Inspection can only be positioned by Lineside encoding unit, and there are suckers to skid, rotational display angle does not conform to the actual conditions for Lineside encoding unit
Situation, and can only be rechecked after sticky stick adhesive curing using the horizontal and vertical crystal bar crystal orientation that can be measured when verify crystal orientation
Instrument is rechecked, and the reinspection instrument price that current this horizontal vertical can be rechecked is generally at 240,000 yuan or more.Even if using this
Equipment, sticky stick adhesive curing needs or so 1 hour, if bonding angle is wrong, needs again to bake crystal bar and is bonded again, in
Between process need to expend or so 5 hours；And for crystal bar crystal orientation reinspection instrument, the reinspection of vertical crystal orientation can only be rechecked
Instrument, it is only necessary to 70,000 yuan.Crystal bar, which is baked to glue again, has delayed production efficiency, and crystal bar has the wind burst during baking and gluing again
Danger, and the twin crystal for cooperating 240,000 is needed to use to reinspection instrument, the value of horizontal crystal orientation otherwise can not be verified completely, once bonding
β vertical deflection angle mistake, horizontal crystal orientation is exceeded after will result in slice, and silicon wafer is scrapped, and the loss that can not be retrieved is caused.
Summary of the invention
To solve the above problems, the present invention provides a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar, compensate for
The horizontal crystal orientation of the angle Notch silicon single crystal bar can not physical measurement positioning defect.
To achieve the goals above, the technical solution adopted by the present invention are as follows:
A kind of measuring tool for the horizontal crystal orientation positioning of crystal bar, it is characterised in that: described including adjustment device and dispensing device
Dispensing device includes measuring disk, spirit bubble and locating rod, and the measurement disk is circular discs, measures panel surface and is equipped with angle measuring calibration,
The spirit bubble is fixed on the upper surface for measuring disk, and the inside for measuring disk is additionally provided with the channel passed through for locating rod；It is described
Channel further includes first passage and second channel perpendicular to disk center's axis, the channel is measured, and the first passage and second are led to
Road both passes through the center of circle for measuring disk, and the inside of the first passage and the second channel is equipped with the locating rod, the positioning
Bar is set as multiple, and the locating rod is also by adjusting device adjusting；The adjustment device include regulating mechanism, positioning mechanism and
Bindiny mechanism, the regulating mechanism include fixed column, regulating nut, ring set and fixed ring, and the fixed column is cylinder, fixed
The bottom end of column is vertically connected at the upper surface for measuring disk along the central axis direction for measuring disk, and the outer wall of fixed column is additionally provided with outer spiral shell
Line, the inner wall of regulating nut are equipped with the internal screw thread to match with the external screw thread, and the regulating nut is threadedly connected to fixed column,
The outer wall of regulating nut is additionally provided with an annular groove, and the ring set is equipped in annular groove, and the ring set is annular shape, ring set
Outer wall is connected and fixed ring, and the ring set connects the bindiny mechanism by the fixed ring；The bindiny mechanism includes connecting rod
And connection ring, the connecting rod are column type bar, the both ends of connecting rod are also connected with connection ring respectively, and one end of connecting rod passes through connection
Ring is articulated with fixed ring, and the other end of connecting rod passes through connection ring connecting locating mechanism；The positioning mechanism includes stop block and consolidates
Determine hinged-support, the stop block is fixed on the end of locating rod, and the stop block is rectangular-shape, and stop block top surface is connected and fixed hinged
Seat, the stop block are connected to the connection ring by the fixed-hinged support, and stop block bottom surface is also connected with locating rod.
Further, the locating rod is set as identical four, the number of the fixed ring, connecting rod and fixed-hinged support
Measure identical as the quantity of locating rod, the length of the connecting rod is all the same, and one end of locating rod is each passed through first passage and the
The passway in two channels is set in the channel of first passage and second channel, and the other end of locating rod connects stop block, the resistance
Block is set to the outside of first passage and second channel.
Further, the locating rod includes the first positioning plate and the second positioning plate, the first positioning plate and the second positioning plate
It is rectangular slab, second positioning plate is also vertically connected at the bottom surface of the first positioning plate, the first positioning plate and the second positioning plate
Cross section be also connected with as " T " font.
Further, the first passage and second channel are " T " the font channel passed through for positioning plate.
Further, the material of the ring set is polytetrafluoroethylene (PTFE).
Further, the fixed ring and the connection ring are circular ring shape.
Further, the angle measuring calibration include the vertical scale vertical with spirit bubble and with spirit bubble horizontal direction parallel
Horizontal scale, the vertical scale be -90 ° ~ 90 °, the horizontal scale be 0 ° ~ 180 °.
Further, the first passage and the second channel are also mutually perpendicular to.
The present invention is utilized to be directly fitted with crystal bar head end, is realized and is rechecked to the physics at crystal bar β angle: especially by turning
The regulating nut of dynamic adjustment structure, so that regulating nut carries out up and down adjustment in fixed column, regulating nut also drives and fixes
The connecting rod movement that ring is connected, meanwhile, the angle that the ring set on regulating nut is also able to maintain connecting rod is constant, and connecting rod is rigid
Property bar, when the end carry out activity of connecting rod, be able to drive the displacement of positioning mechanism, the stop block of positioning mechanism is also solid with locating rod
Surely it links together, and then has driven the sliding of locating rod；When most marginal one end of the locating rod by measuring the disk center of circle point
When not coinciding with the head end edge of crystal bar, measurement disk center of the invention is also mutually be overlapped with the center of crystal bar head end
It closes, the deflection angle of the Notch directly read at this time is the β vertical deflection angle value of crystal bar.
The invention has the benefit that a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar of the invention, is applied to β
The physics at angle is rechecked, and the present invention is laid flat in the head end of crystal bar, is in a horizontal position spirit bubble, by adjusting device
The most marginal position of locating rod is adjusted, because the diameter of end face and measuring tool of the invention most edge (locating rod most edge) are straight
Diameter is consistent, so not needing the central point of searching end face using the present invention, can directly read, at this time the deflection angle of Notch
Degree, the as β vertical deflection angle value of crystal bar, very intuitively and conveniently, and β vertical deflection angle determines the level of crystal bar
Crystal orientation value；Simultaneously again can be avoided the horizontal crystal orientation of crystal bar it is exceeded after bake the risk being bonded again again.While save the cost
Improve production efficiency.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is the top view for measuring disk；
Fig. 3 is the front view for measuring disk；
Fig. 4 is the face the A-A cross-sectional view of Fig. 3；
Fig. 5 is the structural schematic diagram of regulating mechanism；
Fig. 6 is the structural schematic diagram of regulating nut；
Fig. 7 is the cooperation figure of ring set and fixed ring；
Fig. 8 is the top view of ring set and fixed ring；
Fig. 9 is the structural schematic diagram of connection structure；
Figure 10 is the structural schematic diagram of positioning mechanism；
Figure 11 is the structural schematic diagram of locating rod.
Wherein, each label in figure are as follows: 1, measurement disk；2, spirit bubble；3, first passage；4, second channel；5, fixed column；6,
Regulating nut；7, ring set；8, fixed ring；9, annular groove；10, connecting rod；11, connection ring；12, stop block；13, fixation is hinged
Seat；14, the first positioning plate；15, the second positioning plate.
Specific embodiment
In order to which those skilled in the art better understood when technical solution provided by the present invention, below with reference to specific
Embodiment is illustrated.
Fig. 1 is the structural diagram of the present invention, the present invention is placed directly in the head end of crystal bar when use, because of end
The diameter and profile in face are consistent with measuring tool edge diameter, so not needing the central point of searching end face using the present invention, allow
The present invention is overlapped with end face and behind spirit bubble holding horizontal position, can directly read, at this time the deflection angle of Notch,
The as β vertical deflection angle value of crystal bar, and β vertical deflection angle determines the horizontal crystal orientation value of crystal bar, it is very intuitive and
It is convenient.
A kind of measuring tool for the horizontal crystal orientation positioning of crystal bar, including adjustment device and dispensing device, dispensing device packet
It includes and measures disk 1, spirit bubble 2 and locating rod, measurement disk 1 is circular discs, measures 1 surface of disk and is equipped with angle measuring calibration, spirit bubble 2 is fixed
In the upper surface for measuring disk 1, the inside for measuring disk 1 is additionally provided with the channel passed through for locating rod；Channel is perpendicular to measurement 1 center of disk
Axis, channel further include first passage 3 and second channel 4, and first passage 3 and second channel 4 both pass through the center of circle for measuring disk 1,
Also first passage 3 and second channel 4 can be set as being mutually perpendicular in application process, equally distributed channel and locating rod are more held
Easily matched at crystal bar edge；The inside of first passage 3 and second channel 4 is equipped with locating rod, and locating rod is set as four, Gu
The quantity for determining ring 8, connecting rod 10 and fixed-hinged support 13 is identical as the quantity of locating rod, and the length of connecting rod 10 is all the same, fixed
The passway that one end of position bar is each passed through first passage 3 and second channel 4 is set to the logical of first passage 3 and second channel 4
In road, the other end of locating rod connects stop block 12, and stop block 12 is set to the outside of first passage 3 and second channel 4, and locating rod is also
By adjusting device adjusting；Locating rod is also configured to T font, and first passage 3 and second channel 4 pass through for positioning plate
" T " font channel can guarantee stability of the locating rod in sliding process.
Adjusting device includes regulating mechanism, positioning mechanism and bindiny mechanism, and regulating mechanism includes fixed column 5, regulating nut
6, ring set 7 and fixed ring 8, fixed column 5 are cylinder, and the bottom end of fixed column 5 is vertically connected at along the central axis direction for measuring disk 1
The upper surface of disk 1 is measured, the outer wall of fixed column 5 is additionally provided with external screw thread, and the inner wall of regulating nut 6 is equipped with to match with external screw thread
Internal screw thread, regulating nut 6 are threadedly connected to fixed column 5, and the outer wall of regulating nut 6 is additionally provided with an annular groove 9, annular groove 9
Interior to be equipped with ring set 7, ring set 7 is annular shape, and the material of ring set 7 is polytetrafluoroethylene (PTFE), and frictional force is small, can guarantee in regulating nut
When being rotated, the stability of the bindiny mechanism and positioning mechanism that are connected with ring set 7, the outer wall of ring set 7 is connected and fixed ring 8, ring
Set 7 connects bindiny mechanism by fixed ring 8.
Bindiny mechanism includes connecting rod 10 and connection ring 11, and connecting rod 10 is column type bar, and the both ends of connecting rod 10 are also distinguished
It is connected with connection ring 11, fixed ring 8 and connection ring 11 are circular ring shape, and the size of annulus hole is also slightly larger than the ring thickness of annulus,
Guarantee synchronism of the different hinge joints in rotation, one end of connecting rod 10 is articulated with fixed ring 8, connecting rod by connection ring 11
10 other end passes through 11 connecting locating mechanism of connection ring.
Positioning mechanism includes stop block 12 and fixed-hinged support 13, and stop block 12 is fixed on the end of locating rod, and stop block 12 is length
Cube shape, 12 top surface of stop block are connected and fixed hinged-support 13, and stop block 12 is connected to connection ring 11, stop block 12 by fixed-hinged support 13
Bottom surface is also connected with locating rod.
In application process, by rotating the regulating nut 6 of adjustment structure, so that regulating nut 6 carries out in fixed column 5
Up and down adjustment, regulating nut 6 also drive the connecting rod 10 being connected with fixed ring 8 to move, and connecting rod 10 is rigid rod, connecting rod
When 10 end carry out activity, it is able to drive the displacement of positioning mechanism, the stop block 12 of positioning mechanism is also fixedly connected with locating rod
Together, and then the movement of locating rod has been driven；When by measure 1 center of circle of disk locating rod most marginal one end respectively with crystalline substance
When the head end edge of stick coincides, the center of 1 center of measurement disk of the invention also with crystal bar head end coincides, at this time
The deflection angle of the Notch directly read is the β vertical deflection angle value of crystal bar.
Measuring tool of the invention can be measured using with the crystal bar end plane angle bigger than measuring disk 1, and the size for measuring disk 1 exists
The minimum dimension (8 inches) of common angle silicon single crystal bar can be corresponded to when selection, i.e. measurement disk may be configured as diameter dimension 200mm.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
The present invention will not be limited to the embodiments shown herein, and is to fit to special with principles disclosed herein and novelty
The consistent widest scope of point.
Claims (8)
1. a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar, it is characterised in that: including adjustment device and dispensing device, institute
Stating dispensing device includes measuring disk, spirit bubble and locating rod, and the measurement disk is circular discs, measures panel surface and carves equipped with angulation
Degree, the spirit bubble are fixed on the upper surface for measuring disk, and the inside for measuring disk is additionally provided with the channel passed through for locating rod；Institute
Channel is stated perpendicular to disk center's axis is measured, the channel further includes first passage and second channel, the first passage and second
Channel both passes through the center of circle for measuring disk, and the inside of first passage and the second channel is equipped with the locating rod, the locating rod
It is set as multiple, the locating rod is also adjusted by adjusting device；
The adjustment device includes regulating mechanism, positioning mechanism and bindiny mechanism, and the regulating mechanism includes fixed column, adjusts spiral shell
Cap, ring set and fixed ring, the fixed column are cylinder, and the bottom end of fixed column is vertically connected at along the central axis direction for measuring disk
The upper surface of disk is measured, the outer wall of fixed column is additionally provided with external screw thread, and the inner wall of regulating nut is equipped with to match with the external screw thread
Internal screw thread, the regulating nut is threadedly connected to fixed column, and the outer wall of regulating nut is additionally provided with an annular groove, annular groove
Interior to be equipped with the ring set, the ring set is annular shape, and the outer wall of ring set is connected and fixed ring, and the ring set is connected by the fixed ring
Meet the bindiny mechanism；
The bindiny mechanism includes connecting rod and connection ring, and the connecting rod is column type bar, and the both ends of connecting rod are also connected with respectively
One end of connection ring, connecting rod is articulated with the fixed ring by connection ring, and it is fixed that the other end of connecting rod is connected by connection ring
Position mechanism；
The positioning mechanism includes stop block and fixed-hinged support, and the stop block is fixed on the end of locating rod, and the stop block is length
Cube shape, stop block top surface are connected and fixed hinged-support, and the stop block is connected to the connection ring, stop block by the fixed-hinged support
Bottom surface is also connected with locating rod.
2. a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar according to claim 1, it is characterised in that: described fixed
Position bar is set as identical four, and the quantity of the fixed ring, connecting rod and fixed-hinged support and the quantity of locating rod are identical, institute
The length for stating connecting rod is all the same, and one end of locating rod is each passed through first passage and the passway of second channel is set to first
In channel and the channel of second channel, the other end of locating rod connects stop block, and the stop block is set to first passage and second and leads to
The outside in road.
3. a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar according to claim 2, it is characterised in that: described fixed
Position bar includes the first positioning plate and the second positioning plate, and the first positioning plate and the second positioning plate are rectangular slab, second positioning
Plate is also vertically connected at the bottom surface of the first positioning plate, and the cross section of the first positioning plate and the second positioning plate is also connected with as " T " font.
4. a kind of measuring tool for crystal bar horizontal crystal orientation positioning according to claim 3, it is characterised in that: described the
One channel and second channel are " T " the font channel passed through for positioning plate.
5. a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar according to claim 1, it is characterised in that: the ring
The material of set is polytetrafluoroethylene (PTFE).
6. a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar according to claim 1, it is characterised in that: described solid
Determining ring and the connection ring is circular ring shape.
7. a kind of measuring tool for the horizontal crystal orientation positioning of crystal bar according to claim 1, it is characterised in that: the amount
Angle index includes the vertical scale vertical with spirit bubble and the horizontal scale with spirit bubble horizontal direction parallel, the vertical scale
It is -90 ° ~ 90 °, the horizontal scale is 0 ° ~ 180 °.
8. a kind of measuring tool for crystal bar horizontal crystal orientation positioning according to claim 1, it is characterised in that: described the
One channel and the second channel are also mutually perpendicular to.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910556561.2A CN110260764B (en) | 2019-06-25 | 2019-06-25 | Measuring tool for horizontal crystal orientation positioning of crystal bar |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910556561.2A CN110260764B (en) | 2019-06-25 | 2019-06-25 | Measuring tool for horizontal crystal orientation positioning of crystal bar |
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| Publication Number | Publication Date |
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| CN110260764A true CN110260764A (en) | 2019-09-20 |
| CN110260764B CN110260764B (en) | 2024-02-06 |
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| CN201910556561.2A Active CN110260764B (en) | 2019-06-25 | 2019-06-25 | Measuring tool for horizontal crystal orientation positioning of crystal bar |
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| Country | Link |
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| CN (1) | CN110260764B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111059992A (en) * | 2019-11-28 | 2020-04-24 | 梁凤丽 | Semiconductor-grade monocrystalline silicon crystal bar orientation testing device |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB895154A (en) * | 1959-04-13 | 1962-05-02 | Rolls Royce | Improvements relating to apparatus for gauging dimensions of workpieces |
| JPH07237072A (en) * | 1994-03-01 | 1995-09-12 | Kurimoto Ltd | Pipe outer peripheral machined surface centering method and device therefor |
| TW200525081A (en) * | 2004-01-20 | 2005-08-01 | Wen-Tsuen Jang | Engine crankshaft gas-inlet angle detector |
| CN104723313A (en) * | 2015-03-10 | 2015-06-24 | 鞍钢重型机械有限责任公司 | Lineation measurement method and device for large-scale irregular workpiece |
| CN105021099A (en) * | 2015-07-16 | 2015-11-04 | 北京工业大学 | Large-size ground wafer warping measuring clamp |
| CN204757915U (en) * | 2015-07-15 | 2015-11-11 | 厦门市工程检测中心有限公司 | A inside diameter measurement device for smooth inner wall tubular product |
| KR20170079254A (en) * | 2015-12-30 | 2017-07-10 | 김종민 | Spherical surface measuring apparatus |
| CN107504941A (en) * | 2017-08-30 | 2017-12-22 | 福建农林大学 | A kind of xylophyta aerial part fractal characteristic measurement apparatus |
| CN109186413A (en) * | 2018-07-16 | 2019-01-11 | 西安交通大学 | A kind of adjustable spherometer of measurement diameter and radius of curvature and offset measuring method |
| CN208704613U (en) * | 2018-08-17 | 2019-04-05 | 浙江建业工程管理有限公司 | A kind of project supervision stake holes hole diameter detection apparatus |
| CN210036568U (en) * | 2019-06-25 | 2020-02-07 | 麦斯克电子材料有限公司 | Measuring tool for horizontal crystal orientation positioning of crystal bar |
-
2019
- 2019-06-25 CN CN201910556561.2A patent/CN110260764B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB895154A (en) * | 1959-04-13 | 1962-05-02 | Rolls Royce | Improvements relating to apparatus for gauging dimensions of workpieces |
| JPH07237072A (en) * | 1994-03-01 | 1995-09-12 | Kurimoto Ltd | Pipe outer peripheral machined surface centering method and device therefor |
| TW200525081A (en) * | 2004-01-20 | 2005-08-01 | Wen-Tsuen Jang | Engine crankshaft gas-inlet angle detector |
| CN104723313A (en) * | 2015-03-10 | 2015-06-24 | 鞍钢重型机械有限责任公司 | Lineation measurement method and device for large-scale irregular workpiece |
| CN204757915U (en) * | 2015-07-15 | 2015-11-11 | 厦门市工程检测中心有限公司 | A inside diameter measurement device for smooth inner wall tubular product |
| CN105021099A (en) * | 2015-07-16 | 2015-11-04 | 北京工业大学 | Large-size ground wafer warping measuring clamp |
| KR20170079254A (en) * | 2015-12-30 | 2017-07-10 | 김종민 | Spherical surface measuring apparatus |
| CN107504941A (en) * | 2017-08-30 | 2017-12-22 | 福建农林大学 | A kind of xylophyta aerial part fractal characteristic measurement apparatus |
| CN109186413A (en) * | 2018-07-16 | 2019-01-11 | 西安交通大学 | A kind of adjustable spherometer of measurement diameter and radius of curvature and offset measuring method |
| CN208704613U (en) * | 2018-08-17 | 2019-04-05 | 浙江建业工程管理有限公司 | A kind of project supervision stake holes hole diameter detection apparatus |
| CN210036568U (en) * | 2019-06-25 | 2020-02-07 | 麦斯克电子材料有限公司 | Measuring tool for horizontal crystal orientation positioning of crystal bar |
Non-Patent Citations (1)
| Title |
|---|
| 黄燕: "硅晶体定向测量的光学方法", 电子工业专用设备, no. 02, pages 34 - 37 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111059992A (en) * | 2019-11-28 | 2020-04-24 | 梁凤丽 | Semiconductor-grade monocrystalline silicon crystal bar orientation testing device |
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| Publication number | Publication date |
|---|---|
| CN110260764B (en) | 2024-02-06 |
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