CN110246787A - Cell piece surface foreign matter cleaning device - Google Patents

Cell piece surface foreign matter cleaning device Download PDF

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Publication number
CN110246787A
CN110246787A CN201910565153.3A CN201910565153A CN110246787A CN 110246787 A CN110246787 A CN 110246787A CN 201910565153 A CN201910565153 A CN 201910565153A CN 110246787 A CN110246787 A CN 110246787A
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CN
China
Prior art keywords
cell piece
foreign matter
distance
controller
air hose
Prior art date
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Granted
Application number
CN201910565153.3A
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Chinese (zh)
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CN110246787B (en
Inventor
朱晶晶
刘晓兵
赵福祥
崔钟亨
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Jiangsu Linyang Solarfun Co Ltd
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Jiangsu Linyang Solarfun Co Ltd
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Priority to CN201910565153.3A priority Critical patent/CN110246787B/en
Publication of CN110246787A publication Critical patent/CN110246787A/en
Application granted granted Critical
Publication of CN110246787B publication Critical patent/CN110246787B/en
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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • H01L21/67028Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715Changing the direction of the conveying path
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a kind of cell piece surface foreign matter cleaning devices, including transmission track, detection device for foreign matter and blow device, the controller that the detection device for foreign matter includes range sensor, is connected with the range sensor, the blow device includes the air hose being erected on the transmission track and the gas source that is connected with the air hose, offers one or more gas outlets on the air hose;The transmitter of the range sensor emits signal to the transmission track with the direction set to detect the distance between cell piece on the transmitter and transmission track, and the controller receives the testing result of the range sensor and controls the folding of gas outlet on the on-off between the gas source and air hose and/or the air hose.Cell piece surface foreign matter cleaning device of the present invention measures the distance between the highest point and the lowest point of foreign matter on cell piece by range sensor and judges whether speckle with fragment on cell piece with this, and purged by blow device to cell piece.

Description

Cell piece surface foreign matter cleaning device
Technical field
The invention belongs to technical field of solar cell manufacturing, and in particular to a kind of cell piece surface foreign matter cleaning device.
Background technique
China increases grid-connected installed capacity newly and reaches 44GW, and adding up grid-connected installed capacity is more than 174GW, increases newly and accumulative Grid-connected installation is the whole world first.All data shows that we have become the manufacture big country of photovoltaic industry and use big country.State Border photovoltaic technology route (International Technology Roadmap for Photovoltaic, ITRPV) 2019 refers to Out, global installed capacity in 2018 reaches 109GW.Photovoltaic power generation is being increasingly becoming the main force of New Energy Industry.
Silicon wafer involved in manufacture of solar cells process, halftone and slurry etc. also become important material.For now Mainstream battery technology, silk-screen printing is a ring important in battery production link, in this link shared by the consumption of halftone slurry According to cost it is larger.Wherein, the consumption of halftone and site work environment relationship are larger, quick-fried version (silk-screen halftone caused by foreign matter Rupture) it is the biggish reason of halftone consumption, expensive for the halftone of printing front gate line, control Its service life is the effective way of drop originally, and most straightforward approach is that the cell piece for speckling with foreign matter such as fragment is avoided to enter screen printing Brush step.
Summary of the invention
In view of this, in order to overcome the drawbacks of the prior art, the object of the present invention is to provide a kind of cell piece Superficial Foreign Bodies Whether cleaning plant, the surface that can accurately detect cell piece speckle with foreign matter and remove foreign matter by way of purging.
In order to achieve the above object, the following technical solution is employed by the present invention:
A kind of cell piece surface foreign matter cleaning device, including transmission track, the driving machine for driving the transmission track operation Structure, detection device for foreign matter and blow device, the detection device for foreign matter include range sensor, with the range sensor phase The controller of connection, the blow device include the air hose being erected on the transmission track and are connected with the air hose Gas source offers one or more gas outlets on the air hose;Under the driving effect of driving mechanism, the transmission track is used for It is sequentially transmitted cell piece along the conveying direction, the top of the transmission track is arranged in the range sensor, and the distance passes The transmitter of sensor is powered on the direction set to transmission track transmitting signal with detecting the transmitter with transmission track The distance between pond piece, the controller receive the testing result of the range sensor and control the gas source and wind according to it The folding of gas outlet in on-off and/or the air hose between pipe.Air hose is inner hollow, one side closed tubular structure, is opened Mouth side is connected with tracheae, and tracheae is connected with air compressor, and it is strong that control purging is additionally provided between air hose and air compressor The flow control valve of degree.Gas source is high-pressure air source, for the compressed gas prepared by air compressor.
The transmitter of the range sensor emits signal to the transmission track with the direction set with detecting distance, institute If stating controller to receive distance and judge that the distance is less than preset distance threshold, it is determined as that corresponding cell piece surface exists Foreign matter.Pass through the surface of cell piece described in range sensor real-time detection or the foreign matter on the cell piece and the distance The distance between sensor, to judge whether the surface of cell piece speckles with foreign matter such as fragment etc., and will by blow device Foreign matter is removed.
The detection device further includes for incuding the inductor whether on transmission track with cell piece, the inductor It is connected with the controller.Whether there is or not cell pieces for incuding on transmission track for the inductor, when sensing cell piece, institute It states inductor and sends a signal to controller, controller receives the signal and controls transmission track operation and command range sensor work Make.The lower section of the transmission track is arranged in the inductor, and the top of the transmission track is arranged in the range sensor.
Preferably, the blow device further includes the electromagnetic switch being arranged between the air hose and the gas source, described Electromagnetic switch is connected with the controller.Electromagnetic switch is controlled by controller, and then realizes that control blow device is It is no that cell piece is purged.
It is further preferred that being preset with the normal pitch between the distance controller and the transmission track in the controller From H, the surface of cell piece described in the range sensor real-time detection or foreign matter and the distance on the cell piece The distance between sensor L, and convert distance signal for distance L and be conveyed to the controller, the controller receives institute It states distance signal and screens the minimum range Li in distance L, the value of H-Li is calculated, as H-Li >=k*2D, on the cell piece With foreign matter, the k is error coefficient, and the D is the thickness of cell piece.
It is further preferred that the error coefficient k is 0.8-1.0.
It is further preferred that the controller transmission open command is described to the electromagnetic switch as H-Li >=k*2D Electromagnetic switch is opened.The opening and closing that electromagnetic switch is controlled by controller, can reduce energy consumption, further decrease and be produced into This.
Preferably, the range sensor is line scan-type range sensor, and line sweep length is greater than or equal to described Length of the cell piece in transmission track width direction;The purging width of air hose is greater than or equal to cell piece in transmission track width Length on direction.The width that restraining line sweep length is greater than or equal to the cell piece just can guarantee the comprehensive and quasi- of detection True property just not can guarantee the accuracy of detection if only the detection of point is similar to the form of sampling observation.Limitation purging width is big It just can guarantee comprehensive purging to cell piece in or equal to the width of the cell piece, prevent purging from not exclusively still having foreign matter It is stained on cell piece.
Preferably, the gas outlet is evenly distributed on the air hose.
Preferably, blowing nozzle is correspondingly arranged on the gas outlet.
It is further preferred that the blowing nozzle, in horn-like, it is close that the opening size far from the air hose side is greater than its The opening size of the air hose side.The opening of i.e. horn-like blowing nozzle enables gas larger range of towards outside The surface of cell piece is purged, and blowing nozzle and cell piece are at an angle, such setting is so that the wind blown out by blowing nozzle It can be more conducive to blowing away the foreign matter on cell piece surface with cell piece at an angle.
In some embodiments, the angle of blowing nozzle can also be arranged to adjustable mode, it is specific as follows: can be with The both ends of air hose are rotated into setting, air hose is relatively rotated, blowing nozzle entirety on same air hose may be implemented in this way Angle adjustment, to realize more preferably purging effect.The realization of rotation can be by gear and rack drives, more to automate.
Preferably, the range sensor includes transmitter, receiver and digital signal processor.In some embodiments In, select laser displacement sensor, including laser emitter, laser pickoff and digital signal processor.Laser displacement sensing When device receives the signal of controller, inner laser transmitter emits laser, and the scan area of the laser is greater than surveyed cell piece Area or its line sweep length are greater than or equal to length of the surveyed cell piece in transmission track width direction, and laser reaches Cell piece is back to laser pickoff behind upper surface, and the reality of transmitting Yu cell piece upper surface is calculated by digital signal processor Border distance L simultaneously converts distance signal for distance L and is conveyed to the controller.
The controller includes computing module.The distance controller and the transmission track are preset in the controller Between gauged distance H.The controller receives the distance signal to be come by range sensor conveying and screens in distance L most Small distance Li, the minimum range Li that the computing module of controller obtains the measurement of institute's displacement sensors carry out calculation processing, It brings into and determines formula H-Li >=k*2D, k is error coefficient, and the error coefficient k is 0.8-1.0, and D is the thickness of cell piece.When H-Li >=k*2D has foreign matter on the cell piece.If cell piece is with a thickness of 170 μm, if k is 1.0, then the μ of H-Li >=340 Twice of m(cell piece thickness) when, it is judged to speckling with foreign matter on cell piece, but due to cell piece thickness and apart from biography There is a certain error for sensor, so error coefficient k preferably 0.8, i.e., when H-Li >=272 μm, be determined as on cell piece Speckle with foreign matter.At this point, the unlatching of controller control electromagnetic switch, purges to remove foreign matter the cell piece, prevents this Cell piece enters screen printing device and causes quick-fried version.
In some embodiments, the detection device may also include the alarm being connected with the controller.Work as control When device calculates H-Li >=k*2D, there is foreign matter on the cell piece, the controller sends alarm command to alarm, alarm Device receives the alarm command and sounds an alarm, and to play a warning role, can be gone by manually carrying out confirmation foreign matter Except clean.In some embodiments, controller is also connected with the driving mechanism of driving transmission track, when detection device for foreign matter detects When having foreign matter on to cell piece, controller sends reduction of speed and instructs to driving mechanism, the operation of driving mechanisms control transmission track Speed reduces, so that blow device preferably plays a role.
When first used, need artificially to trigger inductor induction, so that range sensor measures it between silk-screen track Distance H, only need to just recalibrate H value when the position change of range sensor.When normal use, when inductor senses When cell piece, inductor sends a signal to controller, and controller receives the signal and controls transmission track operation and command range Working sensor, the digital signal processor of range sensor calculate at transmitting with the actual range L of cell piece upper surface simultaneously Distance signal is converted by distance L and is conveyed to controller, and controller, which is received, conveys the distance signal to come by range sensor And the minimum range Li in distance L is screened, this value is the distance away from cell piece upper surface highest point at transmitting, i.e., (H-Li) is electricity The distance between vertex and lower bottom point in the distance of pond piece the highest point and the lowest point namely maximum foreign matter.The calculating of controller The minimum range Li that module obtains the measurement of range sensor carries out calculation processing, brings into and determines formula H-Li >=k*2D, works as k It is 1.0, there are fragments for explanation when (H-Li) reaches twice of cell piece thickness, then the control unit transmission of controller, which is opened, refers to It enables, electromagnetic switch is opened, and controller sends reduction of speed and instructs to driving mechanism, the speed of service of driving mechanisms control transmission track It reduces, so that blow device preferably plays a role.
Compared with prior art, the invention has the beneficial effects that: cell piece surface foreign matter cleaning device knot of the invention Structure design rationally, is measured the distance between the highest point and the lowest point of foreign matter on cell piece by range sensor and is sentenced with this Whether power-off pond on piece speckles with fragment, and is purged by blow device to cell piece, draws so as to substantially reduce fragment The quick-fried version phenomenon of silk-screen risen, save the cost, device is simple, and measurement is accurate.
Detailed description of the invention
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings other Attached drawing.
Fig. 1 is the schematic diagram of cell piece surface foreign matter cleaning device in the preferred embodiment of the present invention;
Fig. 2 is the schematic diagram of blow device in the preferred embodiment of the present invention;
Wherein: transmission track -1, column -2, printing table -3, inductor -4, range sensor -5, controller -6, air hose -7, Fixed bracket -8, clamp device -9, gas outlet -10, connector -11, alarm -12.
Specific embodiment
In order that those skilled in the art will better understand the technical solution of the present invention, implement below in conjunction with the present invention Attached drawing in example, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment Only a part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common Technical staff's every other embodiment obtained without making creative work, all should belong to protection of the present invention Range.
Referring to attached drawing 1-2, a kind of cell piece surface foreign matter cleaning device of the present embodiment, including transmission track 1, driving are passed Whether the driving mechanism of sending track 1 to run detection device for foreign matter, blow device, for incuding on transmission track 1 has cell piece Inductor 4, detection device for foreign matter includes range sensor 5, the controller being connected with range sensor 56, driving mechanism with And inductor 4 is connected with controller 6.
Under the driving effect of driving mechanism, transmission track 1 is passed for being sequentially transmitted cell piece, distance along the conveying direction The top of transmission track 1 is arranged in sensor, and the transmitter of range sensor, which is emitted with the direction set to the transmission track, to be believed Number to detect the distance between cell piece on transmitter and transmission track 1, controller receives the testing result of range sensor simultaneously The folding of gas outlet on on-off and/or air hose between gas source and air hose is controlled according to it.
The transmitter of range sensor 5 emits signal to transmission track 1 with the direction set with detecting distance, controller 4 If receiving distance and judging that the distance is less than preset distance threshold, it is determined as that there are foreign matters on corresponding cell piece surface.It blows Sweeping device includes the air hose 7 being erected on transmission track 1, the gas outlet 10 being provided on air hose 7 and is connected with air hose 7 High-pressure air source.Pass through the surface of 5 real-time detection cell piece of range sensor or the foreign matter on cell piece and range sensor 5 The distance between, to judge whether the surface of cell piece speckles with foreign matter such as fragment etc., and by blow device that foreign matter is clear It removes.
The cell piece surface foreign matter cleaning device of the present embodiment is arranged before silk-screen process, i.e., transmission track 1 is silk-screen Track, column 2 is provided on silk-screen track, and printing table 3 is arranged between multiple columns 2.
As shown in Fig. 2, the air hose 7 in the present embodiment is inner hollow, one side closed tubular structure, the side that is open is connect First 11 are connected with tracheae, and tracheae is connected with air compressor, and control purging intensity is additionally provided between air hose 7 and air compressor Flow control valve, gas outlet 10 is evenly distributed on air hose 7, is correspondingly arranged on blowing nozzle on gas outlet 10 and (does not show in figure Out).High-pressure air source is the compressed gas prepared by air compressor.Blowing nozzle is in horn-like, far from 7 side of air hose Opening size is greater than it close to the opening size of 7 side of air hose.The opening of i.e. horn-like blowing nozzle is towards outside, so that gas It is capable of the surface of larger range of purging cell piece, and blowing nozzle and cell piece are at an angle, it is such to be arranged so that passing through The wind of blowing nozzle blowout can be more conducive to blowing away the foreign matter on cell piece surface with cell piece at an angle.
The both ends of air hose 7 pass through fixed bracket 8 and are fixed on transmission track 1 in the present embodiment, and fixed bracket 8 passes through fastening Device 9 is fixed on transmission track 1, and one end of air hose 7 is provided with the connector 11 connecting with high-pressure air source.7 surface of air hose is equipped with Several small sircle holes can realize the adjusting of purging angle by the angle of rotating air-duct 7 as gas outlet 10.It is specific as follows: can be with The both ends of air hose 7 are rotatably arranged on fixed bracket 8, air hose 7 is relatively rotated, same air hose may be implemented in this way The angle adjustment of blowing nozzle entirety on 7, to realize more preferably purging effect.The realization of rotation can pass through gear and rack gear band It is dynamic, more to automate and precision.
Whether there is or not cell pieces for incuding on transmission track 1 for inductor 4, and when sensing cell piece, inductor 4 issues signal To controller 6, controller 6 receives the signal and controls the operation of transmission track 1 and the work of command range sensor 5.Inductor 4 is set It sets in the lower section of transmission track 1, the top of transmission track 1 is arranged in range sensor 5.
The line sweep length of range sensor 5 is greater than or equal to length of the cell piece in transmission track width direction;Wind The purging width of pipe 7 is greater than or equal to length of the cell piece in transmission track width direction.Restraining line sweep length be greater than or Equal to the comprehensive and accuracy that the width of cell piece just can guarantee detection, if only the detection of point is similar to the shape of sampling observation Formula just not can guarantee the accuracy of detection.The width that limitation purging width is greater than or equal to cell piece just can guarantee to battery Comprehensive purging of piece prevents purging from not exclusively still having foreign matter to be stained on cell piece.
The gauged distance H being preset between distance controller 6 and transmission track 1 in controller 6, range sensor 5 are real-time The surface of cell piece or the distance between the foreign matter on cell piece and range sensor 5 L are detected, and distance L is converted It is conveyed to controller 6 for distance signal, controller 6 receives distance signal and screens the minimum range Li in distance L, calculates H-Li Value as H-Li >=k*2D there is foreign matter on cell piece, k is error coefficient, and D is the thickness of cell piece.Error coefficient k is 0.8-1.0。
Specifically, the controller 6 in the present embodiment includes computing module.It is preset with distance controller 6 in controller 6 and passes Send the gauged distance H between track 1.Controller 6, which is received, to be conveyed the distance signal to come by range sensor 5 and screens distance L In minimum range Li, the computing module of controller 6 carries out the minimum range Li that the measurement of displacement sensor obtains at calculating Reason brings into and determines that formula H-Li >=k*2D, k are error coefficient, and error coefficient k is 0.8-1.0, and D is the thickness of cell piece.Work as H- Li >=k*2D has foreign matter on cell piece.
If cell piece is with a thickness of 170 μm, if k be 1.0, then H-Li >=340 μm (twice of cell piece thickness) when It waits, is judged to speckling with foreign matter on cell piece, but since there is a certain error for cell piece thickness and range sensor 5, institute With error coefficient k preferably 0.8, i.e., when H-Li >=272 μm, it is judged to speckling with foreign matter on cell piece.At this point, controller 6 Control electromagnetic switch unlatching, cell piece is purged to remove foreign matter, prevent the cell piece enter screen printing device cause it is quick-fried Version.
In the present embodiment, detection device further includes the alarm 12 being connected with controller 6.When controller 6 calculates H- When Li >=k*2D, there is foreign matter on cell piece, controller 6 sends alarm command to alarm 12, and alarm 12 receives alarm and refers to It enables and sounds an alarm, to play a warning role, can be had been removed completely by manually carrying out confirmation foreign matter.Controller 6 is also It is connected with the driving mechanism of driving transmission track 1, when detection device for foreign matter, which detects, has foreign matter on cell piece, controller 6 It sends reduction of speed to instruct to driving mechanism, the speed of service of driving mechanisms control transmission track 1 reduces, so that blow device is better It plays a role.
Blow device further includes the electromagnetic switch being connected with controller 6 in the present embodiment, electromagnetic switch setting air hose 7 with Between high-pressure air source.As H-Li >=k*2D, controller 6 sends open command to electromagnetic switch, and electromagnetic switch is opened.Pass through control Device 6 processed controls the opening and closing of electromagnetic switch, can reduce energy consumption, further decreases production cost.
In the present embodiment, range sensor 5 select laser displacement sensor, including laser emitter, laser pickoff and Digital signal processor.When laser displacement sensor receives the signal of controller 6, inner laser transmitter emits laser, should The scan area of laser is greater than surveyed cell piece area or its line sweep length is greater than or equal to surveyed cell piece in transmission rail Length in road width direction, laser is back to laser pickoff after reaching cell piece upper surface, by digital signal processor It calculates the actual range L of at transmitting and cell piece upper surface or foreign matter and converts distance signal for distance L and be conveyed to control Device 6 processed.Controller 6, which is received, to be conveyed the distance signal to come by range sensor 5 and screens the minimum range Li in distance L, this Value be transmitting at the highest point away from cell piece upper surface foreign matter distance, i.e., (H-Li) be cell piece foreign matter highest point with it is minimum The distance between vertex and lower bottom point in the distance of point namely maximum foreign matter.The computing module of controller 6 is by range sensor The minimum range Li that 5 measurement obtains carries out calculation processing, brings into and determines formula H-Li >=k*2D, and when k is 1.0, (H-Li) reaches There are fragments for explanation when to twice of cell piece thickness, then the control unit of controller 6 transmits open command, and electromagnetic switch is opened It opens, gas is blown out from blowing nozzle to blow down the foreign matter of cell piece upper surface;Controller 6 sends alarm command to alarm 12, Alarm 12 receives alarm command and sounds an alarm, can be by manually having carried out confirmation foreign matter to play a warning role Removal is clean;Controller 6 sends reduction of speed and instructs to driving mechanism, and the speed of service of driving mechanisms control transmission track 1 reduces, with Blow device is set preferably to play a role.
The use process of the device of the improvement quick-fried version of cell piece silk-screen in the present embodiment described briefly below:
When first used, need artificially to trigger the induction of inductor 4 so that range sensor 5 measure transmitter and silk-screen track it Between distance H, only need to just recalibrate H value when the position change of range sensor 5.When normal use, when inductor 4 is felt When should arrive cell piece, inductor 4 sends a signal to controller 6, and controller 6 receives the signal and controls the operation of transmission track 1 simultaneously Command range sensor 5 works, and the digital signal processor of range sensor 5 calculates at transmitting and the reality of cell piece upper surface Border distance L simultaneously converts distance signal for distance L and is conveyed to controller 6, and the reception of controller 6 was conveyed by range sensor 5 The minimum range Li in distance signal and screening distance L come, this value is the highest point away from cell piece upper surface foreign matter at transmitting Distance, i.e., (H-Li) be cell piece foreign matter the highest point and the lowest point distance namely maximum foreign matter on vertex and bottom The distance between point.
The minimum range Li that the computing module of controller 6 obtains the measurement of range sensor 5 carries out calculation processing, brings into Determine formula H-Li >=k*2D.K is preferably 0.8 in the present embodiment, i.e. the explanation when (H-Li) reaches 1.6 times of cell piece thickness There are foreign matters, then the control unit transmission open command of controller 6 refers to electromagnetic switch, alarm command to alarm and reduction of speed Enable to driving mechanism, transmission track reduction of speed, alarm 12 is alarmed, and electromagnetic switch is opened, blow device to the surface of cell piece into Row purging.
Cell piece surface foreign matter cleaning device of the invention is reasonable in design, measures cell piece by range sensor The distance between the highest point and the lowest point of upper foreign matter simultaneously judges fragment whether is speckled on cell piece with this, and passes through blow device Cell piece is purged, so as to substantially reduce the quick-fried version phenomenon of silk-screen caused by fragment, save the cost, device is simple, surveys Amount is accurate.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art Scholar cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention, it is all according to the present invention Equivalent change or modification made by Spirit Essence, should be covered by the protection scope of the present invention.

Claims (10)

1. a kind of cell piece surface foreign matter cleaning device, it is characterised in that: including transmission track, for driving the transmission track Driving mechanism, detection device for foreign matter and the blow device of operation, the detection device for foreign matter include range sensor, with it is described The controller that range sensor is connected, the blow device include the air hose being erected on the transmission track and with it is described The gas source that air hose is connected offers one or more gas outlets on the air hose;
Under the driving effect of driving mechanism, the transmission track for being sequentially transmitted cell piece along the conveying direction, it is described away from From the top that the transmission track is arranged in sensor, the transmitter of the range sensor is with the direction that sets to the transmission Orbit launching signal to detect the distance between cell piece on the transmitter and transmission track, the controller receive it is described away from Gas outlet on on-off and/or the air hose between the gas source and air hose is controlled from the testing result of sensor and according to it Folding.
2. a kind of cell piece surface foreign matter cleaning device according to claim 1, it is characterised in that: the blow device is also Including the electromagnetic switch being arranged between the air hose and the gas source, the electromagnetic switch is connected with the controller.
3. a kind of cell piece surface foreign matter cleaning device according to claim 2, it is characterised in that: pre- in the controller Equipped with the gauged distance H between the distance controller and the transmission track, electricity described in the range sensor real-time detection The distance between the surface of pond piece or foreign matter on the cell piece and the range sensor L, and distance L is converted It is conveyed to the controller for distance signal, the controller receives the distance signal and screens the minimum range in distance L Li calculates the value of H-Li, as H-Li >=k*2D, has foreign matter on the cell piece, the k is error coefficient, and the D is electricity The thickness of pond piece.
4. a kind of cell piece surface foreign matter cleaning device according to claim 3, it is characterised in that: the error coefficient k For 0.8-1.0.
5. a kind of cell piece surface foreign matter cleaning device according to claim 3, it is characterised in that: as H-Li >=k*2D When, the controller sends open command to the electromagnetic switch, and the electromagnetic switch is opened.
6. a kind of cell piece surface foreign matter cleaning device according to claim 1, it is characterised in that: the range sensor For line scan-type range sensor, line sweep length is greater than or equal to length of the cell piece in transmission track width direction Degree.
7. a kind of cell piece surface foreign matter cleaning device described in -6 any one according to claim 1, it is characterised in that: described Gas outlet is evenly distributed on the air hose.
8. a kind of cell piece surface foreign matter cleaning device according to claim 7, it is characterised in that: right on the gas outlet Blowing nozzle should be provided with.
9. a kind of cell piece surface foreign matter cleaning device according to claim 8, it is characterised in that: the blowing nozzle is in loudspeaker Shape, the opening size far from the air hose side are greater than it close to the opening size of the air hose side.
10. a kind of cell piece surface foreign matter cleaning device according to claim 7, it is characterised in that: the Distance-sensing Device includes transmitter, receiver and digital signal processor.
CN201910565153.3A 2019-06-27 2019-06-27 Battery piece surface foreign matter cleaning device Active CN110246787B (en)

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CN205220024U (en) * 2015-12-25 2016-05-11 安徽银阳光伏科技有限公司 Solar cell screen printing feeding conveyor
CN108417516A (en) * 2018-04-23 2018-08-17 上海华虹宏力半导体制造有限公司 The detecting system and its detection method of wafer rear foreign matter

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JP2014093441A (en) * 2012-11-05 2014-05-19 Just Wafer transfer device and wafer inspection apparatus comprising the same
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