CN110244080B - Preparation method for three-dimensional accelerometer magnetic suspension - Google Patents
Preparation method for three-dimensional accelerometer magnetic suspension Download PDFInfo
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- CN110244080B CN110244080B CN201910411813.2A CN201910411813A CN110244080B CN 110244080 B CN110244080 B CN 110244080B CN 201910411813 A CN201910411813 A CN 201910411813A CN 110244080 B CN110244080 B CN 110244080B
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
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Abstract
The invention discloses a preparation method for a three-dimensional accelerometer magnetic suspension, which comprises the following steps: (1) forming an inner layer of soft magnetic material; (2) a hexahedral structure is formed at the outer surface of the hexahedral permanent magnet layer fixedly connected with the outer surface of the inner layer; (3) the permanent magnetic layers on each surface have remanent magnetic fields by magnetizing, and the magnetic poles of the permanent magnetic layers on the two opposite surfaces have opposite polarities; (4) and forming a magnetic suspension body with six surfaces all provided with remanent magnetic fields, wherein the inner layer of the magnetic suspension body is magnetized under the action of the magnetic fields of six permanent magnetic layers and a complete magnetic path is formed in the magnetic suspension body. The magnetic suspension body prepared by the invention adopts a hexahedral structure, six-surface magnetic suspension body is realized by fixedly connecting six permanent magnetic layers on the inner layer of the soft magnetic, and six-degree-of-freedom suspension can be realized, so that the technical defect that the permanent magnetic suspension body only can form two surfaces with remanent magnetic fields in the prior art is thoroughly overcome, and the magnetic suspension body can be widely applied to the three-dimensional magnetic suspension accelerometer.
Description
Technical Field
The invention relates to the technical field of magnetic suspension bodies, in particular to a preparation method for a magnetic suspension body of a three-dimensional accelerometer.
Background
In the prior art, the existing magnetic suspension body can be divided into a superconducting state and a normal state according to the difference of magnetic force, the superconducting state of the suspension body is utilized to realize stable magnetic suspension, and the suspension body needs to be cooled by liquid nitrogen or other modes to reach the superconducting state, so that the whole system has huge product and huge energy consumption, and is not suitable for being applied to a miniaturized high-precision magnetic suspension type accelerometer; in recent years, research on a diamagnetic suspension mode is gradually promoted at home and abroad, diamagnetic suspension is a special superconducting state, small-volume suspension can be realized at normal temperature, most substances in nature have diamagnetism, but the diamagnetic force generated by the substances in an external magnetic field is very small, and the application of the suspension mode on an accelerometer is limited.
There are three types of normal magnetic suspensions: permanent magnets, electromagnets and metallic conductors. When the metal conductor is used as the magnetic suspension body, an excitation magnetic field with high change rate is needed to enable the metal conductor to overcome the self gravity to buy stable suspension, the magnetic suspension body generates a large amount of heat due to the eddy current effect and quickly reaches the upper limit of magnetic force, and the complexity of the system is greatly increased when the magnetic suspension body is used as the magnetic suspension body. If an electromagnet (coil) is used as the magnetic levitation body, energy supply is required by physical connection, and thus complete six-degree-of-freedom levitation cannot be achieved.
The suspension body using the permanent magnet as the magnetic suspension system has the advantages of larger generated magnetic force, simple structure, easy realization and convenient miniaturization, the stress theory of the permanent magnet in the magnetic field also has mature research results, and the existing theory can be used for calculating some practical problems in engineering application. However, the permanent magnet and the magnetizing method adopted by the permanent magnet in the prior art can only form a two-sided magnetic field, so that only single-axis acceleration detection can be realized.
Therefore, it is necessary to provide a solution to the above-mentioned drawbacks in the prior art.
Disclosure of Invention
In view of the above, it is necessary to provide a method for preparing a magnetic suspension for a three-dimensional accelerometer, which is suitable for miniaturization, so as to conveniently prepare the magnetic suspension with high quality and conveniently realize triaxial suspension.
In order to solve the technical problems in the prior art, the technical scheme of the invention is as follows:
the preparation method for the magnetic suspension body of the three-dimensional magnetic suspension accelerometer comprises the following steps:
(1) forming an inner layer of soft magnetic material;
(2) six permanent magnet layers fixedly connected with the outer surface of the inner layer form a hexahedral structure;
(3) the permanent magnetic layers on each surface have remanent magnetic fields by magnetizing, and the magnetic poles of the permanent magnetic layers on the two opposite surfaces have opposite polarities;
(4) and forming a magnetic suspension body with six surfaces all provided with remanent magnetic fields, wherein the inner layer of the magnetic suspension body is magnetized under the action of the magnetic fields of six permanent magnetic layers and a complete magnetic path is formed in the magnetic suspension body.
In the above-mentioned method for preparing a magnetic suspension body of a three-dimensional magnetic suspension accelerometer, in the step (3),
the permanent magnetic material is fixedly connected with the soft magnetic material and then is magnetized.
In the above-mentioned method for preparing a magnetic suspension body of a three-dimensional magnetic suspension accelerometer, in the step (3),
the permanent magnetic material is fixedly connected with the soft magnetic inner layer after being magnetized.
In the step (3), the magnetizing device comprises a vertically arranged lower magnetizing head and an upper magnetizing head positioned right above the lower magnetizing head, and the device further comprises four horizontally arranged side surface magnetizing heads which are distributed circumferentially, wherein the side surface magnetizing heads are positioned between the lower magnetizing head and the upper magnetizing head, a first magnetizing contact plane is arranged at the upper end of the lower magnetizing head, a second magnetizing contact plane parallel to the first magnetizing contact plane is arranged at the lower end of the upper magnetizing head, and a vertically arranged third magnetizing contact plane is respectively arranged at the inner end of each side surface magnetizing head.
The designed upper magnetic charging head, lower magnetic charging head and four lateral surface magnetic charging heads can realize six-surface magnetic charging at one time; the upper magnetizing head, the lower magnetizing head and the four lateral surface magnetizing heads, the two opposite magnetic heads and the magnetized suspension body form a closed magnetic circuit, the magnetizing magnetic field intensity is improved, the magnetizing efficiency is also improved, and the production efficiency is very high.
And secondly, through the design of the structure, the displacement of the six-sided magnetic suspension body in the magnetizing process is avoided, and meanwhile, the magnetic head is made of soft magnetic materials, so that the phenomenon of magnetic leakage is greatly reduced.
The area of the magnetizing contact plane is the same as the area and the shape of each surface of the six-surface magnetic suspension body.
In the above magnetizing apparatus for a six-sided magnetic suspension, the lower magnetizing head structure, the upper magnetizing head structure and the lateral-sided magnetizing head have the same structure, and include a tapered section and a straight section connected to the large head end of the tapered section, and the outer sides of the straight section and/or the tapered section are respectively sleeved with an energizing coil.
The design of the conical section can realize avoidance, and simultaneously, the magnetizing efficiency can be further improved.
In the above magnetizing apparatus, the lower magnetizing head is fixed on the frame; or a first lifting driving mechanism for driving the lower charging magnetic head to lift in the vertical direction is arranged on the frame.
The first lifting driving mechanism comprises any one of an air cylinder, an oil cylinder and a linear motor.
A first vertical guide structure is arranged between the down-filling magnetic head and the rack.
The first vertical guide structure here comprises a guide post-guide bush-coupled structure.
In the above magnetizing device, the frame is provided with a second lifting driving mechanism for driving the upper magnetizing head to lift in the vertical direction.
The second lifting driving mechanism comprises any one of an air cylinder, an oil cylinder and a linear motor.
In the above magnetizing device, each lateral surface magnetizing head is connected to a horizontal driving mechanism, and the horizontal driving mechanisms are connected to the rack respectively.
The horizontal driving mechanism comprises any one of an air cylinder, an oil cylinder and a linear motor.
Through the design of the driving mechanism, automatic production action can be realized, and the production efficiency is invisibly improved.
In the magnetizing device, the frame is provided with a cylindrical support sleeved outside the lower magnetizing head, the upper end of the cylindrical support is connected with four cantilever beams distributed circumferentially, the suspension end of each cantilever beam is respectively connected with an inclined support which is obliquely arranged inwards and upwards, the upper end of the inclined support is converged to the circumferential direction of the annular sleeve, the four lateral surface magnetizing heads are arranged on the cantilever beams one by one, and the upper magnetizing head is arranged in the annular sleeve.
Through design tube-shape support, cantilever beam, slope support and annular cover, it constitutes a fixed bolster, fills the magnetic head and gathers on a fixed bolster, not only is convenient for the dismouting of device, but also has further reduced the maintenance degree of difficulty of device.
In the magnetizing device, the upper end of the lower magnetizing head is sleeved with a fixed frame and a positioning frame positioned above the fixed frame, an axial elastic structure is arranged between the fixed frame and the positioning frame, the positioning frame is sleeved on the periphery of the first magnetizing contact plane, and a lifting driving mechanism for driving the positioning frame to lift in the vertical direction is arranged on the frame or the fixed frame.
And the upper edge opening of the inner wall of the positioning frame is provided with a chamfer.
The lifting driving mechanism comprises a plurality of cylinders or oil cylinders which are distributed circumferentially.
Through the design of above-mentioned structure, it can realize the accuracy of six magnetic levitation body location, has avoided the skew of position to lead to follow-up needs to be corrected again, has improved production efficiency intangibly.
In foretell magnetization unit, the fixed frame outside be equipped with a plurality of lower location breach, be equipped with in the outside of posting a position a plurality of with the last location breach of lower location breach one-to-one, be equipped with the direction frame between posting a position and fixed frame, be equipped with in the circumference of direction frame a plurality of with the direction sand grip of lower location breach one-to-one just the vertical setting of direction sand grip, the upper end card of direction sand grip in last location breach in and with last location breach fixed connection, the lower extreme card of direction sand grip in lower location breach in and with lower location breach sliding connection.
Through the design of above-mentioned structure, it can realize the ride comfort that goes up and down in the vertical direction, simultaneously, can also further improve holistic structural strength.
In the above magnetizing apparatus for a six-sided magnetic suspension, the axial elastic structure includes a plurality of springs disposed between the lower end of the guide frame and the upper end of the fixed frame.
Compared with the prior art, the magnetic suspension body adopts a hexahedral structure, the hexahedral magnetic suspension body is realized in a mode that the six permanent magnetic layers are fixedly connected to the soft magnetic inner layer, the six-degree-of-freedom suspension triaxial acceleration change can be realized to enable the suspension body and the magnetic cavity to generate relative displacement so as to cause the magnetic force change between the suspension body and the magnetic cavity, and therefore the technical defect that the permanent magnetic suspension body can only form a two-sided magnetic field in the prior art is thoroughly overcome, and the magnetic suspension body can be widely applied to the three-dimensional magnetic suspension accelerometer.
Drawings
Fig. 1 is a schematic diagram showing a junction state in which a magnetic suspension is built in a magnetic cavity provided in the present invention.
Fig. 2 is a sectional view of the magnetic suspension body provided in the magnetic chamber according to the present invention.
Fig. 3 is a cross-sectional view of a magnetic chamber provided by the present invention.
Fig. 4 is a three-dimensional structure diagram of a magnetic suspension body provided by the invention.
Fig. 5 is a cross-sectional view of a magnetic suspension provided by the present invention.
Fig. 6 is a simplified structural schematic diagram of the magnetizing apparatus provided in the present invention.
FIG. 7 is a schematic view of the structure of the magnetic charger head provided by the present invention.
Fig. 8 is a schematic structural diagram of a magnetizing apparatus provided in the present invention.
Fig. 9 is an enlarged schematic view of a portion a in fig. 8.
Fig. 10 is a schematic view of a fixing frame structure provided by the present invention.
Fig. 11 is a schematic structural view of the cylindrical support provided by the present invention with a vertical rod built therein.
Fig. 12 is a schematic view of a six-sided magnetic levitation body provided by the present invention being placed in a positioning frame.
In the figure, the magnetic suspension device comprises a magnetic cavity 2, a piezoelectric induction layer 21, a fixing plate 22, a second permanent magnet layer 23, a magnetic suspension body 3, a soft magnetic inner layer 31, a first permanent magnet layer 32, a lower magnetizing head A1, a first magnetizing contact plane A11, an upper magnetizing head A2, a second magnetizing contact plane A21, a lateral surface magnetizing head A3, a third magnetizing contact plane A31, a frame A4, a cylindrical support A5, a cantilever beam A51, an inclined support A52, an annular sleeve A53, a fixed frame A6, a positioning frame A61, a lower positioning notch A62, an upper positioning notch A63, a guide frame A64, a guide convex strip A65, a spring A66, a tapered segment a, a flat segment b and an energizing coil c.
The following specific embodiments will further illustrate the invention in conjunction with the above-described figures.
Detailed Description
The technical solution provided by the present invention will be further explained with reference to the accompanying drawings.
Referring to fig. 4-5, there is shown a structural diagram of the magnetic suspension body for a three-dimensional magnetic suspension accelerometer according to the present invention, the magnetic suspension body adopts a hexahedral structure, and includes an inner layer 31 of soft magnetic material and an outer layer 32 composed of six permanent magnetic layers 23 fixedly connected to the inner layer 31, the permanent magnetic layer 23 on each surface of the magnetic suspension body is magnetized to have a residual magnetic field, and the polarities of the magnetic poles of the permanent magnetic layers 23 on the two opposite surfaces are opposite; the permanent magnet layer 23 is a permanent magnet, is made of a hard magnetic material, and is characterized by high coercivity, large remanence and difficult demagnetization after magnetization; the soft magnetic inner layer 31 is soft magnetic and made of soft magnetic materials, and is characterized by low coercive force, low remanence, easy magnetization and easy demagnetization.
The soft magnetic inner layer 31 serves to better conduct the magnetic fields of the six permanent magnetic layers and forms a closed magnetic circuit together with the outside. The soft magnetic inner layer 31 itself is not magnetic, but under the action of the permanent magnetic layers 23 with opposite magnetic poles on opposite sides, the soft magnetic inner layer 31 closely arranged with the permanent magnetic layers 23 is magnetized, so that the soft magnetic inner layer 31 also presents magnetic polarity, thereby playing a role of magnetic conduction and conducting the magnetic field of the six permanent magnetic layers 23. Thus, a magnetic path from the N pole to the S pole is formed inside the soft magnetic inner layer 31, so that a complete magnetic path is formed between the permanent magnetic layers 23, thereby forming a magnetic levitation body having six sides with remanence. Meanwhile, the soft magnetic inner layer 31 is adopted, so that the demagnetization field of the permanent magnetic layer 23 is reduced, and the six residual magnetic fields of the magnetic suspension body are stable.
The permanent magnet layer 23 is fixedly connected to the surface of the regular hexahedral soft magnetic inner layer 31 because the magnetic permeability of the air gap between the permanent magnet and the soft magnet is much smaller than that of the soft magnetic material.
By adopting the technical scheme, the soft magnetic inner layer 31 is skillfully made to be a medium for transferring the inherent magnetic energy of the permanent magnetic layer 23 in a mode of combining soft magnetism and permanent magnetism, so that a six-sided magnetic suspension body is formed. The magnetic suspension type accelerometer has the advantages that soft magnetism and permanent magnetism are easy to process, a suspension body can be conveniently miniaturized, and the magnetic suspension type accelerometer can be applied to the miniaturized triaxial magnetic suspension type accelerometer.
The magnetic suspension body designed by the invention forms magnetic fields on six surfaces, so that the technical defect that the permanent magnetic suspension body in the prior art can only form magnetic fields on two surfaces is thoroughly overcome, when repulsive external magnetic fields are simultaneously applied on the six surfaces, the magnetic suspension body can reach a six-surface magnetic force balance state under the action of certain repulsive magnetic forces on the six surfaces, namely, six-degree-of-freedom suspension is realized, and the three-axis acceleration change can be induced. In the inertia system, the suspension body can be in an equilibrium state all the time, and once acceleration is generated, the suspension body can reach a new six-surface magnetic force equilibrium state in the acceleration system, the new equilibrium position of the suspension body is determined by an acceleration value, and therefore six-surface repulsive magnetic force changes, and the acceleration value can be detected by detecting the change of the magnetic force.
Referring to fig. 1, a schematic block diagram of a six-degree-of-freedom magnetic suspension structure formed by the magnetic suspension of the present invention is shown, which includes a magnetic cavity 2 having a hexahedral space inside and a magnetic suspension body suspended in the magnetic cavity 2 and having residual magnetic fields on six sides, wherein the magnetic fields are provided on the inner walls of the six sides of the magnetic cavity, and the magnetic fields on any side are the same as the magnetic poles on one side of the magnetic suspension body opposite to the magnetic field, so that the magnetic suspension body can reach a six-side magnetic force balance state and be suspended in the magnetic cavity.
In a preferred application, referring to fig. 1-3, there is shown a structural block diagram of the application of the magnetic suspension in a three-dimensional magnetic suspension accelerometer of the present invention, wherein an external magnetic field is generated by a magnetic cavity 2, the magnetic cavity 2 is a closed magnetic cavity 2, the closed magnetic cavity 2 is closed by six square magnetic plates to form a regular hexahedral space, the magnetic plates are sequentially provided with a fixing plate 22, a piezoelectric induction layer 21 and a permanent magnetic layer 23 from outside to inside, the fixing plate 22 of each magnetic plate and the fixing plate 22 of its adjacent magnetic plate have a fixing structure, and thus can be tightly fixed and form a sealed cavity. A magnetic force induction structure is formed between the piezoelectric induction layer 21 and the permanent magnet layer 23, wherein the piezoelectric induction layer 21 is tightly arranged between the fixed plate 22 and the permanent magnet layer 23 and is used for inducing the change of repulsive magnetic force borne by the magnetic plate; the principle is that when the permanent magnetic layer 23 is subjected to a certain repulsive magnetic force, the repulsive magnetic force is transmitted to the piezoelectric sensing layer 21, and since the piezoelectric sensing layer 21 is made of piezoelectric material, the microstructure of the piezoelectric material changes after being stressed to generate induced current corresponding to the stress intensity, so that the magnetic force change of the permanent magnetic layer 23 can be detected only by detecting the induced current. When the magnetic suspension body is placed in the sealed magnetic cavity 2, the magnetic poles on any side of the magnetic suspension body have the same polarity as the magnetic poles of the corresponding magnetic plate permanent magnetic layers 23, so that repulsion magnetic force is generated on six sides of the magnetic suspension body at the same time, and the magnetic suspension body can reach a six-side magnetic force balance state under the action of the six-side repulsion magnetic force, so as to be suspended in the sealed magnetic cavity 2. In an inertial system, a suspension body can be in a balanced state all the time, once the sealed magnetic cavity 2 generates acceleration, the balanced position between the sealed magnetic cavity 2 and the suspension body is changed, further, magnetic force generated by six magnetic plates of the sealed magnetic cavity 2 is changed to cause the change of induced current of the corresponding piezoelectric induction layer 21, and the acceleration value can be detected by detecting the induced current of the piezoelectric induction layer 21 in the six magnetic plates.
In a preferred embodiment, the fixing plate 22 is made of soft magnetic material, such as silicon steel sheet, permalloy, pure iron, etc., and because the soft magnetic material is used to form the closed cavity, the magnetic leakage of the closed magnetic cavity 2 can be prevented, the work of the external device will not be disturbed, and the external magnetic field will not affect the internal magnetic field of the magnetic cavity 2, so as to improve the acceleration detection precision.
In a preferred embodiment, the dimensions of the piezoelectric sensing layer 21 and the permanent magnet layer 23 are slightly smaller than the fixed plate 22, so that after the closed cavity is formed, a gap is formed between the magnetic sensing structures of the adjacent magnetic plates, so that the piezoelectric sensing layer 21 in each magnetic plate can fully sense the magnetic force applied to each magnetic plate without transmitting the adjacent piezoelectric sensing layer 21. Meanwhile, due to the existence of the gap, even if the temperature changes to cause expansion with heat and contraction with cold, the closed structure of the cavity cannot be damaged.
In a preferred embodiment, six sides of the magnetic suspension body form magnetic fields with uniform intensity, so that if the inner walls of the six sides of the closed magnetic cavity 2 also form the magnetic fields with uniform intensity, the magnetic suspension body is suspended at the central position of the closed magnetic cavity 2, so that the six-directional free stroke of the magnetic suspension body is uniform, and the measuring range and the precision of acceleration measurement are improved.
In a preferred embodiment, the permanent magnet layer 23 is uniformly magnetized by the magnetizing device and then arranged on six surfaces of the regular hexahedral soft magnetic inner layer 31, so that the magnetic suspension can be prepared by a simple process.
In a preferred embodiment, magnetism cavity outer wall parcel have soft magnetic sealing layer 4, soft magnetic sealing layer 4 by six with the soft magnetic sealing piece of fixed plate one-to-one, just soft magnetic sealing piece circumference between connect through sealed glue or hot pressing mode, soft magnetic sealing layer 4 inside have a confined cavity, avoided accidents such as magnetic leakage.
However, although the multiple permanent magnetic layers 23 with the same magnetic field strength can be obtained by adopting the magnetizing method in the prior art, after the multiple permanent magnetic layers are arranged in the regular hexahedral soft magnetic inner layer 31, the six-sided magnetic field of the magnetic suspension body has intensity deviation due to process reasons. In order to overcome the technical problem, the invention provides a method for magnetizing a magnetic suspension body of a three-dimensional magnetic suspension accelerometer, wherein permanent magnet layers 23 are arranged on six surfaces of a regular hexahedron soft magnet inner layer 31, then the magnetic suspension body is wholly magnetized, and the magnetic field intensity of six surfaces of the magnetic suspension body is ensured to be equal through magnetizing intensity control. As shown in fig. 6-12, the specific magnetizing apparatus includes a vertically arranged lower magnetizing head a1 and an upper magnetizing head a2 located right above the lower magnetizing head a1, and the apparatus further includes four circumferentially distributed and horizontally arranged lateral surface magnetizing heads A3,
the down-fill head A1, the up-fill head A2, and the side-fill head A3 are each disposed on the chassis.
Further, the down-fill head A1 is mounted to the frame A4.
And a second lifting driving mechanism for driving the upper charging head A2 to lift in the vertical direction is arranged on the machine frame A4.
Each lateral surface charge head A3 is connected to a horizontal drive mechanism, which is connected to the frame a 4.
The lateral face charge heads a3 are grouped two by two and move toward each other or vice versa.
The lateral surface charge head A3 is positioned between the down-charge head A1 and the up-charge head A2.
The upper end of the lower magnetizing head A1 is provided with a first magnetizing contact plane A11, the lower end of the upper magnetizing head A2 is provided with a second magnetizing contact plane A21 parallel to the first magnetizing contact plane A11, and the inner end of each lateral surface magnetizing head A3 is respectively provided with a third magnetizing contact plane A31 which is vertically arranged. Lower part
Specifically, the structure of the lower charge head a1, the structure of the upper charge head a2, and the structure of the lateral surface charge head A3 of the present embodiment are the same, and the lower charge head a1, the upper charge head a2, and the lateral surface charge head A3 include a tapered section a and a straight section b connected with the large head end of the tapered section a, and the outer sides of the straight section b and the tapered section a are respectively sleeved with an energizing coil c.
The design of the conical section a enlarges the magnetic field.
A cylindrical support A5 sleeved outside the lower charging head A1 is arranged on the frame A4, a plurality of vertical rods distributed circumferentially are arranged on the inner wall of the cylindrical support A5, each vertical rod is respectively coated with an aluminum foil reflection layer, the vertical rods are encircled into a circle, the down-filling magnetic heads A1 are positioned in the vertical rods encircled into a circle, secondly, a plurality of through holes distributed circumferentially are arranged at the lower end of the cylindrical support A5, an axial flow fan is respectively arranged in each through hole, the upper end of the cylindrical support A5 is connected with four cantilever beams A51 which are distributed circumferentially, the free end of each cantilever beam A51 is respectively connected with an inclined support A52 which is arranged obliquely and inwards and upwards, the upper end of the inclined support A52 converges to the circumferential direction of the annular sleeve A53, namely, the upper end of the inclined support A52 is circumferentially connected with the annular sleeve A53, four lateral surface charging heads A3 are arranged on the cantilever beam A51 one by one, and the upper charging head A2 is arranged in the annular sleeve A53.
The upper end cover of under fill magnetic head A1 is equipped with fixed frame A6 to and be located the locating frame A61 of fixed frame A6 top, be equipped with axial elastic construction and locating frame A61 cover and be peripheral at first contact plane A11 that magnetizes between fixed frame A6 and locating frame A61, be equipped with the drive on frame A4 or fixed frame A6 the locating frame A61 lift at vertical direction lift actuating mechanism.
Secondly, be equipped with a plurality of lower location breach A62 in the fixed frame A6 outside, be equipped with a plurality of and the outside of location frame A61 the lower location breach A62 one-to-one last location breach A63 be equipped with between location frame A61 and fixed frame A6 guide frame A64, be equipped with a plurality of and lower location breach A62 one-to-one guide convex strip A65 and the vertical setting of guide convex strip A65 in the circumference of guide frame A64, the upper end card of guide convex strip A65 in last location breach A63 and with last location breach A63 fixed connection, the lower extreme card of guide convex strip A65 in lower location breach A62 and with lower location breach A62 sliding connection.
The aperture of the opening of the lower positioning gap is smaller than the inner diameter of the lower positioning gap.
The caliber of the opening of the upper positioning notch is smaller than the inner diameter of the upper positioning notch.
The outer diameter of the guide convex strip A65 is larger than the opening caliber of the lower positioning notch, and the outer diameter of the guide convex strip A65 is larger than the opening caliber of the upper positioning notch.
Further, the axial elastic structure includes a plurality of springs a66 disposed between the lower end of the guide frame a64 and the upper end of the fixing frame a 6.
When the six-sided magnetic suspension body is placed in place, the lifting driving mechanism drives the positioning frame A61 to move downwards, so that the interference of the lateral surface magnetizing head to approach the six-sided magnetic suspension body is avoided.
The magnetizing method of the six-sided magnetic suspension body comprises the following steps:
A. positioning, namely placing a six-sided magnetic suspension body on a first magnetizing contact plane A11 of a lower magnetizing head A1, moving an upper magnetizing head A2 downwards and forcing a second magnetizing contact plane A21 to be in contact with the upper surface of the six-sided magnetic suspension body, and then moving two oppositely-arranged lateral surface magnetizing heads A3 in four lateral surface magnetizing heads A3 inwards in opposite directions respectively and forcing third magnetizing contact planes A31 to press four circumferential planes of the six-sided magnetic suspension body one by one;
B. and (4) magnetizing, namely electrifying the lower magnetizing head A1, the upper magnetizing head A2 and the lateral surface magnetizing head A3, namely magnetizing.
The preparation method for the magnetic suspension body of the three-dimensional magnetic suspension accelerometer comprises the following steps:
(1) forming an inner layer of soft magnetic material;
(2) six permanent magnet layers fixedly connected with the outer surface of the inner layer form a hexahedral structure;
(3) the permanent magnetic layers on each surface have remanent magnetic fields by magnetizing, and the magnetic poles of the permanent magnetic layers on the two opposite surfaces have opposite polarities;
(4) and forming a magnetic suspension body with six surfaces all provided with remanent magnetic fields, wherein the inner layer of the magnetic suspension body is magnetized under the action of the magnetic fields of six permanent magnetic layers and a complete magnetic path is formed in the magnetic suspension body.
In the step (3), the step (c),
the permanent magnetic material is fixedly connected with the soft magnetic material and then is magnetized.
In the step (3), the step (c),
the permanent magnetic material is fixedly connected with the soft magnetic inner layer after being magnetized.
The above description of the embodiments is only intended to facilitate the understanding of the method of the invention and its core idea. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
1. A preparation method for a magnetic suspension body of a three-dimensional accelerometer is characterized by comprising the following steps:
step (1), forming an inner layer of a soft magnetic material;
step (2), forming a hexahedral structure outside the six-sided permanent magnet layer fixedly connected with the outer surface of the inner layer;
step (3), through magnetizing, the permanent magnetic layer on each surface has a remanence magnetic field and the magnetic poles of the permanent magnetic layers on the two opposite surfaces are opposite in polarity;
step (4), forming a magnetic suspension body with remanent magnetic fields on six surfaces, magnetizing the inner layer of the magnetic suspension body under the action of the magnetic fields of the permanent magnetic layers on the six surfaces, and forming a complete magnetic path in the magnetic suspension body;
the inner layer is used for conducting the magnetic fields of the six permanent magnet layers, reducing the demagnetization fields of the permanent magnet layers and conducting the magnetic fields of the six permanent magnet layers and forming a closed magnetic circuit with the outside;
in the step (3), the permanent magnetic material of the outer layer is fixedly connected with the soft magnetic material of the inner layer and then is magnetized.
2. The method for preparing a magnetic suspension body for a three-dimensional accelerometer according to claim 1, wherein the six-sided remanence magnetic field of the magnetic suspension body is uniform.
3. The method as claimed in claim 1 or 2, wherein in the step (3), a magnetizing device is used for magnetizing, the magnetizing device comprises a vertically arranged lower magnetizing head and an upper magnetizing head positioned right above the lower magnetizing head, the device further comprises four circumferentially distributed and horizontally arranged lateral surface magnetizing heads, the lateral surface magnetizing heads are positioned between the lower magnetizing head and the upper magnetizing head, a first magnetizing contact plane is arranged at the upper end of the lower magnetizing head, a second magnetizing contact plane parallel to the first magnetizing contact plane is arranged at the lower end of the upper magnetizing head, and a vertically arranged third magnetizing contact plane is respectively arranged at the inner end of each lateral surface magnetizing head.
4. The method for preparing a magnetic suspension body for a three-dimensional accelerometer according to claim 3, wherein the area of the magnetizing contact plane is the same as the area and shape of each face of the six-face magnetic suspension body.
5. The method for preparing a magnetic suspension body of a three-dimensional accelerometer according to claim 3, wherein the lower magnetizing head structure, the upper magnetizing head structure and the lateral surface magnetizing head have the same structure, and comprise a conical section and a straight section connected with the big head end of the conical section, and the outer sides of the straight section and/or the conical section are respectively sleeved with an electrified coil.
6. The method for preparing a magnetic suspension body for a three-dimensional accelerometer according to claim 3, wherein the down-charging head is fixed on the frame; or a first lifting driving mechanism for driving the lower charging magnetic head to lift in the vertical direction is arranged on the frame;
the first lifting driving mechanism comprises any one of an air cylinder, an oil cylinder and a linear motor;
a first vertical guide structure is arranged between the lower filling magnetic head and the rack;
the rack is provided with a second lifting driving mechanism for driving the upper charging magnetic head to lift in the vertical direction;
the second lifting driving mechanism comprises any one of an air cylinder, an oil cylinder and a linear motor;
each lateral surface magnetizing head is respectively connected with a horizontal driving mechanism, and the horizontal driving mechanisms are respectively connected to the rack;
the horizontal driving mechanism comprises any one of an air cylinder, an oil cylinder and a linear motor.
7. The method as claimed in claim 6, wherein the frame is provided with a cylindrical support sleeved outside the lower magnetic head, the upper end of the cylindrical support is connected with four cantilever beams distributed circumferentially, the free end of each cantilever beam is connected with an inclined support arranged obliquely inwards and upwards, the upper end of the inclined support converges to the circumferential direction of the annular sleeve, the four lateral magnetic heads are arranged on the cantilever beams one by one, and the upper magnetic head is arranged in the annular sleeve.
8. The method for preparing the magnetic suspension body of the three-dimensional accelerometer according to claim 7, wherein a fixed frame and a positioning frame are sleeved on the upper end of the lower magnetizing head, the positioning frame is positioned above the fixed frame, an axial elastic structure is arranged between the fixed frame and the positioning frame, the positioning frame is sleeved on the periphery of the first magnetizing contact plane, and a lifting driving mechanism for driving the positioning frame to lift in the vertical direction is arranged on the frame or the fixed frame;
a chamfer is arranged on the upper edge opening of the inner wall of the positioning frame;
the lifting driving mechanism comprises a plurality of cylinders or oil cylinders which are distributed circumferentially.
9. The method according to claim 8, wherein a plurality of lower positioning notches are formed in the outer side of the fixed frame, a plurality of upper positioning notches corresponding to the lower positioning notches in a one-to-one manner are formed in the outer side of the positioning frame, a guide frame is arranged between the positioning frame and the fixed frame, a plurality of guide convex strips corresponding to the lower positioning notches in a one-to-one manner are arranged in the circumferential direction of the guide frame, the guide convex strips are vertically arranged, the upper ends of the guide convex strips are clamped in the upper positioning notches and fixedly connected with the upper positioning notches, and the lower ends of the guide convex strips are clamped in the lower positioning notches and slidably connected with the lower positioning notches.
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| CN110231662B (en) * | 2019-06-21 | 2020-09-08 | 华中科技大学 | Preparation method of MEMS inertial sensor based on diamagnetic body suspension |
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| CN110244080A (en) | 2019-09-17 |
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