CN110241379A - A kind of ion nitriding technology of titanium alloy material - Google Patents
A kind of ion nitriding technology of titanium alloy material Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22F—CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS
- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/02—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working in inert or controlled atmosphere or vacuum
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- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
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- C22F1/00—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working
- C22F1/16—Changing the physical structure of non-ferrous metals or alloys by heat treatment or by hot or cold working of other metals or alloys based thereon
- C22F1/18—High-melting or refractory metals or alloys based thereon
- C22F1/183—High-melting or refractory metals or alloys based thereon of titanium or alloys based thereon
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
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Abstract
The invention discloses a kind of ion nitriding technologies of titanium alloy material.It is characterized by: titanium alloy material is placed on nitriding furnace, ion bombardment is first carried out, then carry out ion Plasma Nitriding Treatment；The ion bombardment is that first preset temperature is 490-510 DEG C, forvacuum is to 40-60Pa or less, given duty ratio is that 30-50% carries out ion bombardment 30-40min, then given voltage is 640-660V, ammonia flow is 240-260mL/min and duty ratio is that 50-60% carries out ion bombardment 30-40min again.The present invention can improve the wearability and corrosion resistance of titanium alloy material.
Description
Technical field
The invention belongs to heat treatment nitrogen micronizing technology neck, especially a kind of ion nitriding technology of titanium alloy material.
Background technique
At present in the research and development components of aero-engine, there are many components to be the need for wearability, corrosion resistant, such as
The components such as valve, bushing, it is that 9Cr18 is quenched acquisition high rigidity and wearability that material, which is currently mainly used, in these components,
High rigidity and wearability are obtained after 4Cr14Ni14W2Mo via nitride, but disadvantage is exactly shadow in the case where same thrust than heavier
Ring the comprehensive performance of aero-engine.So existing currently, people start to select titanium alloy.
The comprehensive performance that titanium alloy itself has its excellent, specific strength low with density degree is high, general corrosion resistance and
The advantages that good biocompatibility, is widely used in fields such as aviation, automobiles, but disadvantage is exactly that universal hardness is relatively low, wearability
Can be poor, its use scope is limited, especially corrosion resistance is also poor in certain reductant.
Summary of the invention
The object of the present invention is to provide a kind of ion nitriding technologies of titanium alloy material.The present invention can improve titanium alloy
The wearability and corrosion resistance of material.
Technical solution of the present invention: titanium alloy material is placed on titanium and closed by a kind of ion nitriding technology of titanium alloy material
Metal working is loaded onto, and is then placed on ion nitriding furnace cathode disc simultaneously close to auxiliary cathode together, is first carried out ion bombardment, then carry out
Ion Plasma Nitriding Treatment；The ion bombardment is that first preset temperature is 490-510 DEG C, and forvacuum to 40-60Pa is hereinafter, given
Duty ratio is that 30-50% carries out ion bombardment 30-40min, then given voltage is 640-660V, ammonia flow 240-
260mL/min and duty ratio are that 50-60% carries out ion bombardment 30-40min again.
In the ion nitriding technology of titanium alloy material above-mentioned, the ion bombardment is that first preset temperature is 495-505 DEG C,
Forvacuum is to 45-55Pa hereinafter, given duty ratio is that 35-45% carries out ion bombardment 32-38min, then given voltage is
645-655V, ammonia flow are 245-255mL/min and duty ratio is that 52-58% carries out ion bombardment 32-38min again.
In the ion nitriding technology of titanium alloy material above-mentioned, the ion bombardment is that first preset temperature is 500 DEG C, in advance
50Pa is evacuated to hereinafter, given duty ratio is 40% progress ion bombardment 35min, then given voltage is 650V, ammonia flow
It is 55% to carry out ion bombardment 35min again for 250mL/min and duty ratio.
In the ion nitriding technology of titanium alloy material above-mentioned, the ion Plasma Nitriding Treatment be four-stage, the first stage:
Ionic nitriding temperature is 570-590 DEG C, keeps the temperature 0.5-1h, voltage 640-660V, ammonia flow 490-510mL/min, pressure
Power is 280-300Pa, duty ratio 60-80%；Second stage: ionic nitriding temperature is 740-760 DEG C, keeps the temperature 0.5-1h, electricity
Pressure is 690-710V, ammonia flow 740-760mL/min, pressure 690-710Pa；Phase III: ionic nitriding temperature is
870-890 DEG C, keep the temperature 8-10h, voltage 790-810V, ammonia flow 790-810mL/min, pressure 790-810Pa；
Fourth stage: band aura is cooling, keeps the temperature 0.5-1h, voltage 690-710V, ammonia flow 690-710mL/min, and pressure is
290-310Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
In the ion nitriding technology of titanium alloy material above-mentioned, the ion Plasma Nitriding Treatment be four-stage, the first stage:
Ionic nitriding temperature is 575-585 DEG C, keeps the temperature 0.7-0.8h, voltage 645-655V, ammonia flow 495-505mL/min,
Pressure is 285-295Pa, duty ratio 65-75%；Second stage: ionic nitriding temperature is 745-755 DEG C, keeps the temperature 0.7-
0.8h, voltage 695-705V, ammonia flow 745-755mL/min, pressure 695-705Pa；Phase III: ionic nitriding
Temperature is 875-885 DEG C, keeps the temperature 8.5-9.5h, voltage 795-805V, ammonia flow 795-805mL/min, and pressure is
795-805Pa；Fourth stage: band aura is cooling, keeps the temperature 0.7-0.8h, voltage 695-705V, ammonia flow 695-
705mL/min, pressure 295-305Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
In the ion nitriding technology of titanium alloy material above-mentioned, the ion Plasma Nitriding Treatment be four-stage, the first stage:
Ionic nitriding temperature is 580 DEG C, keeps the temperature 0.75h, voltage 650V, ammonia flow 500mL/min, and pressure 290Pa is accounted for
Sky is than being 70%；Second stage: ionic nitriding temperature is 750 DEG C, keeps the temperature 0.75h, voltage 700V, ammonia flow 750mL/
Min, pressure 700Pa；Phase III: ionic nitriding temperature is 880 DEG C, keeps the temperature 9h, voltage 800V, and ammonia flow is
800mL/min, pressure 800Pa；Fourth stage: band aura is cooling, keeps the temperature 0.75h, voltage 700V, and ammonia flow is
700mL/min, pressure 300Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
Preferably, the titanium alloy material being placed on nitriding furnace needs to carry out ionic nitriding pre-treatment, and pre-treatment is
Titanium alloy material is cleaned, is made annealing treatment, solution treatment, is polished, is polished, cleaning and deburring.
Preferably, it is specifically that titanium alloy material is placed in tooling on nitriding furnace that the titanium alloy material, which is placed on,
Tooling is placed on the cathode disc of ion nitriding furnace at auxiliary cathode.
To prove effect of the present invention, inventor detects the product of embodiment 1-4, and testing result see the table below.
According to monitoring result, it can be seen that after being modified through the invention to titanium alloy TC 4 material surface, in gained material
Surface hardness, depth of penetration, brittleness, tissue and deformation of material etc. are convenient to have excellent performance.
Compared with prior art, the present invention have it is following the utility model has the advantages that
1, the present invention carries out titanium alloy material to beat arc, titanium alloy material is protected by the control to ion bombardment parameter
Oxidation film in shield groove completely removes, and guarantees the effect of subsequent nitridation.The present invention by ion Plasma Nitriding Treatment divide four-stage into
Row, can be effectively controlled temperature, and prevent the deformation of titanium alloy material, by Current Decomposition ammonia on titanium alloy material surface
Nitration case is formed, the corrosion resistance of titanium alloy material is greatly promoted, through detecting, the titanium alloy material after process through the invention
Expect that its wearability greatly increases.
2, inventor is existed the study found that being handled using conventional nitride metal technique titanium alloy and is difficult to reach
The reason of the technical issues of good wear-resisting and anti-corrosion effect, this technical problem occurs in inventor's discovery is because of titanium alloy material
Material surface can hinder the extension of infiltration layer there are layer oxide film layer.So the present invention designs ion bombardment and removes titanium alloy
After the oxidation film of material surface, then ion Plasma Nitriding Treatment is carried out to titanium alloy material.
3, when inventor's discovery carries out ion Plasma Nitriding Treatment to titanium alloy material, when nitriding temperature >=800 DEG C, with nitridation
It is higher that time increases hardness number, but when nitriding temperature >=900 DEG C, hardness has a declining tendency, and depth of penetration prolongs at any time
It is long can be deeper and deeper, nitrogenize hardness and depth again with voltage, pressure, ammonia flow has substantial connection, so inventor herein it
Before carried out many experiments, finally obtain the parameter area of reasonable in this technique, pass through selection nitriding temperature, time, electricity
Pressure, pressure, ammonia flow and duty ratio can so mention significantly come surface hardness and depth of penetration needed for material after being nitrogenized
The wearability and corrosion resistance of titanium master alloy material.
4, through the detection to product of the present invention, the titanium alloy material after ion bombardment and ion Plasma Nitriding Treatment is on surface
Hardness, depth of penetration, brittleness, tissue and deformation are had excellent performance, with the property after presently used structural steel, the nitridation of stainless steel atmosphere
It can compare, there is same effectiveness, and its feature light there are also density.So the present invention can be the military products such as Aeronautics and Astronautics
Development in control loss of weight index a kind of relatively good selection and technological reserve are provided more.If being closed using the present invention treated titanium
Gold can not only promote the effect of comprehensive performance to aero-engine loss of weight, even more shorten the period of processing flow, reduce
Research and develop cost.
5, present invention process may be used in the ionic nitriding of various titanium alloy materials, such as: TC4 and TC6, and from theory
On say that TC10, TC9, TC11 etc. are applicable.
6, illustrate about ion bombardment stage parameter designing: mainly considering that the heated of workpiece to the greatest extent may be used using titanium alloy tooling
It can uniformly, so that it is guaranteed that entire tooling nitration case is uniform.Preset temperature main purpose is that ionic nitriding system is allowed to be in work
State, followed by control temperature are no more than nitriding temperature, according to the characteristic of ion nitriding furnace non homogen field, general preset temperature ratio
Technique requires temperature 300-400 DEG C low；Preset pressure mainly considers titanium alloy formation oxidation film easy to oxidize in air
Layer is difficult to be destroyed, so selection carries out bombardment destruction under low pressure；Given duty ratio is to generate aura to constant current and control
Size of current avoids burn workpiece；Time control main purpose is that piece surface foul is cleaned out substantially, but is banged such
Under hit intensity, workpiece surface oxidation film layer is not destroyed thoroughly.Secondary bombardment main purpose is that under low pressure, duty ratio reaches certain
It is difficult to increasing bombardment intensity after value, needs given voltage and ammonia flow then to adjust furnace pressure, then adjust duty
Than increasing electric current, reinforcing bombardment intensity, be subsequent so that tooling removing surface completely simultaneously thoroughly be destroyed oxidation film layer
Nitrogenize best adequate preparation, and the process that must have from bombarding to heating up.The above parameter is coupled ion nitridation equipment and design
The parameter combination come is found out, these parameters are lower than, it is out of trim before nitridation, it influences to nitrogenize quality, is higher than these parameters, hold
Easily burn part, generates waste product.
7, four-stage nitriding process specification: segment design is mainly the deformation considered after workpiece nitridation, is navigated at present
Parts size precision requires very high after empty product nitridation, and deformation accuracy is required within 0.02mm substantially, and titanium alloy nitrogenizes
Nearly 900 DEG C of temperature, and product wall thickness is thin, extremely it is cold it is very hot during be easy to produce deformation, grope to obtain by testing, work as nitridation
When temperature is close to 900 DEG C, comprehensive design is carried out in the geometries for combining part, being divided into four sections of nitriding process can satisfy product
Dimension precision requirement after nitridation, first two sections are mainly play a part of to control heating rate and discharge stress, the 4th section of band in heating
Aura is cooling, mainly avoids the deformation for connecing cold generation.If by technical flow design at four sections or more, be not cannot, but meeting
Production efficiency is reduced, certain production cost is increased.The parameter combination in each stage is summarized and is verified by great number tested data
It obtains, main purpose just controls current input value, so as to adjust heating rate and guarantees ammonia amount required for nitrogenizing, if ammonia
Measure to excessively, the ammonia of cost of idleness while extra release is harmful to human body and environment, and electric current is excessive to will lead to heating speed
Rate is too fast, increases the deformation probability of part.
In summary: the wearability and corrosion resistance of the titanium alloy material after processed by the invention can be obviously improved,
And can be improved titanium alloy material brittleness, tissue and in terms of performance, and product has fabulous answer in aviation field
With prospect, meanwhile, present invention process can also be used in the ionic nitriding of various titanium alloy materials.
Specific embodiment
Below with reference to embodiment, the present invention is further illustrated, but is not intended as the foundation limited the present invention.
Embodiment 1 carries out ion Plasma Nitriding Treatment to titanium alloy TC 4 material, and processing step is as follows:
Ionic nitriding pre-treatment:
(1) sample is made in titanium alloy TC 4 material, sample is processed into the specification of φ 30x20mm, then uses agent for carbon hydrogen detergent
Sample is cleaned up, A product are obtained；
(2) A product are put into vacuum drying oven and are made annealing treatment, technological parameter are as follows: annealing temperature: 790 DEG C, soaking time:
60min is furnace-cooled to 200 DEG C hereinafter, argon gas is cooling, and cooling pressure 1bar, vacuum degree is begun to warm up after being 10Pa, heating rate 5
DEG C/min obtains B product；
(3) B product are subjected to solution treatment, obtain C product, C product hardness requirement: 255HB；
(4) by the grinding emery cloth polishing of C product, gauze model 7447C, mesh number 3M are cleaned after polishing with agent for carbon hydrogen detergent
Clean surface dirt simultaneously removes corresponding burr, titanium alloy material after must handling；
Ion nitriding technology:
(5) 400 × 20mm of φ tooling is made with titanium alloy material, the hole Intermediate Gray 50 × 20mm of φ later lays flat tooling
On the cathode disc of ion nitriding furnace and close to auxiliary cathode, then titanium alloy material after processing is vertically placed in tooling carry out from
Son bombardment, ion bombardment are to remove workpiece surface foul and destroy oxidation film layer, and ion bombardment is that first preset temperature is 490
DEG C, forvacuum to 40Pa is hereinafter, given duty ratio is 30% progress ion bombardment 30min, then given voltage is 640V, ammonia
Flow is 240mL/min and duty ratio is 50% to carry out ion bombardment 30min again, titanium alloy material after must handling；In this step
The tooling for being placed with titanium alloy material is placed on cathode disc at auxiliary cathode, titanium alloy material can be made to bang in ion
Hit is that temperature is uniform；
(6) ion Plasma Nitriding Treatment being carried out to the D product after ion bombardment again, ion Plasma Nitriding Treatment is four-stage, the
One stage: ionic nitriding temperature is 570 DEG C, keeps the temperature 0.5h, voltage 640V, ammonia flow 490mL/min, and pressure is
280Pa, duty ratio 60%；Second stage: ionic nitriding temperature is 740 DEG C, keeps the temperature 0.5h, voltage 690V, ammonia flow
For 740mL/min, pressure 690Pa；Phase III: ionic nitriding temperature is 870 DEG C, keeps the temperature 8h, voltage 790V, ammonia flow
Amount is 790mL/min, pressure 790Pa；Fourth stage: band aura is cooling, keeps the temperature 0.5h, voltage 690V, and ammonia flow is
690mL/min, pressure 290Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
Embodiment 2 carries out ion Plasma Nitriding Treatment to titanium alloy TC 4 material, and processing step is as follows:
Ionic nitriding pre-treatment:
(1) sample is made in titanium alloy TC 4 material, sample is processed into the specification of φ 30x20mm, then uses agent for carbon hydrogen detergent
Sample is cleaned up, A product are obtained；
(2) A product are put into vacuum drying oven and are made annealing treatment, technological parameter are as follows: annealing temperature: 810 DEG C, soaking time:
120min is furnace-cooled to 200 DEG C hereinafter, argon gas is cooling, and cooling pressure 2bar, vacuum degree is begun to warm up after being 9Pa, heating rate 15
DEG C/min obtains B product；
(3) B product are subjected to solution treatment, obtain C product, C product hardness requirement: 341HB；
(4) by the grinding emery cloth polishing of C product, gauze model 7447C, mesh number 3M are cleaned after polishing with agent for carbon hydrogen detergent
Clean surface dirt simultaneously removes corresponding burr, titanium alloy material after must handling；
Ion nitriding technology:
(5) 400 × 20mm of φ tooling is made with titanium alloy material, the hole Intermediate Gray 50 × 20mm of φ later lays flat tooling
On the cathode disc of ion nitriding furnace and close to auxiliary cathode, then titanium alloy material after processing is vertically placed in tooling carry out from
Son bombardment, ion bombardment are that first preset temperature is 510 DEG C, forvacuum to 60Pa hereinafter, given duty ratio be 50% carry out from
Son bombardment 40min, then given voltage is 660V, ammonia flow is 260mL/min and duty ratio is 60% to carry out ion bombardment again
40min, titanium alloy material after must handling；
(6) ion Plasma Nitriding Treatment being carried out to the D product after ion bombardment again, ion Plasma Nitriding Treatment is four-stage, the
One stage: ionic nitriding temperature is 590 DEG C, keeps the temperature 1h, voltage 660V, ammonia flow 510mL/min, pressure 300Pa,
Duty ratio is 80%；Second stage: ionic nitriding temperature is 760 DEG C, keeps the temperature 1h, voltage 710V, ammonia flow 760mL/
Min, pressure 710Pa；Phase III: ionic nitriding temperature is 890 DEG C, keeps the temperature 10h, voltage 810V, and ammonia flow is
810mL/min, pressure 810Pa；Fourth stage: band aura is cooling, keeps the temperature 1h, voltage 710V, ammonia flow 710mL/
Min, pressure 310Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
Embodiment 3, the ion nitriding technology of titanium alloy material, steps are as follows:
Ionic nitriding pre-treatment:
(1) sample is made in titanium alloy TC 4 material, sample is processed into the specification of φ 30x20mm, then uses agent for carbon hydrogen detergent
Sample is cleaned up, A product are obtained；
(2) A product are put into vacuum drying oven and are made annealing treatment, technological parameter are as follows: annealing temperature: 805 DEG C, soaking time:
800min is furnace-cooled to 200 DEG C hereinafter, argon gas is cooling, and cooling pressure 1.3bar, vacuum degree is begun to warm up after being 10Pa, heating speed
12 DEG C/min of rate obtains B product；
(3) B product are subjected to solution treatment, obtain C product, C product hardness requirement: 300HB；
(4) by the grinding emery cloth polishing of C product, gauze model 7447C, mesh number 3M are cleaned after polishing with agent for carbon hydrogen detergent
Clean surface dirt simultaneously removes corresponding burr, titanium alloy material after must handling；
Ion nitriding technology:
(5) 400 × 20mm of φ tooling is made with titanium alloy material, the hole Intermediate Gray 50 × 20mm of φ later lays flat tooling
On the cathode disc of ion nitriding furnace and close to auxiliary cathode, then titanium alloy material after processing is vertically placed in tooling carry out from
Son bombardment, ion bombardment are that first preset temperature is 495 DEG C, forvacuum to 45Pa hereinafter, given duty ratio be 35% carry out from
Son bombardment 32min, then given voltage is 645V, ammonia flow is 245mL/min and duty ratio is 52% to carry out ion bombardment again
32min；
(6) ion Plasma Nitriding Treatment being carried out to the D product after ion bombardment again, ion Plasma Nitriding Treatment is four-stage, the
One stage: ionic nitriding temperature is 575 DEG C, keeps the temperature 0.7h, voltage 645V, ammonia flow 495mL/min, and pressure is
285Pa, duty ratio 65%；Second stage: ionic nitriding temperature is 745 DEG C, keeps the temperature 0.7h, voltage 695V, ammonia flow
For 745mL/min, pressure 695Pa；Phase III: ionic nitriding temperature is 875 DEG C, keeps the temperature 8.5h, voltage 795V, ammonia
Flow is 795mL/min, pressure 795Pa；Fourth stage: band aura is cooling, keeps the temperature 0.7h, voltage 695V, ammonia flow
For 695mL/min, pressure 295Pa, when furnace cold temperature≤100 DEG C, inflates blow-on.
Embodiment 4, the ion nitriding technology of titanium alloy material, steps are as follows:
Ionic nitriding pre-treatment:
(1) sample is made in titanium alloy TC 4 material, sample is processed into the specification of φ 30x20mm, then uses agent for carbon hydrogen detergent
Sample is cleaned up, A product are obtained；
(2) A product are put into vacuum drying oven and are made annealing treatment, technological parameter are as follows: annealing temperature: 800 DEG C, soaking time:
90min is furnace-cooled to 200 DEG C hereinafter, argon gas is cooling, and cooling pressure 1.5bar, vacuum degree is begun to warm up after being 10Pa, heating rate
10 DEG C/min obtains B product；
(3) B product are subjected to solution treatment, obtain C product, C product hardness requirement: 298HB；
(4) by the grinding emery cloth polishing of C product, gauze model 7447C, mesh number 3M are cleaned after polishing with agent for carbon hydrogen detergent
Clean surface dirt simultaneously removes corresponding burr, titanium alloy material after must handling；
Ion nitriding technology:
(5) 400 × 20mm of φ tooling is made with titanium alloy material, the hole Intermediate Gray 50 × 20mm of φ later lays flat tooling
On the cathode disc of ion nitriding furnace and close to auxiliary cathode, then titanium alloy material after processing is vertically placed in tooling carry out from
Son bombardment, ion bombardment are that first preset temperature is 500 DEG C, forvacuum to 50Pa hereinafter, given duty ratio be 40% carry out from
Son bombardment 35min, then given voltage is 650V, ammonia flow is 250mL/min and duty ratio is 55% to carry out ion bombardment again
35min.；
(6) ion Plasma Nitriding Treatment being carried out to the D product after ion bombardment again, ion Plasma Nitriding Treatment is four-stage, the
One stage: ionic nitriding temperature is 580 DEG C, keeps the temperature 0.75h, voltage 650V, ammonia flow 500mL/min, and pressure is
290Pa, duty ratio 70%；Second stage: ionic nitriding temperature is 750 DEG C, keeps the temperature 0.75h, voltage 700V, ammonia flow
For 750mL/min, pressure 700Pa；Phase III: ionic nitriding temperature is 880 DEG C, keeps the temperature 9h, voltage 800V, ammonia
Flow is 800mL/min, pressure 800Pa；Fourth stage: band aura is cooling, keeps the temperature 0.75h, voltage 700V, ammonia flow
For 700mL/min, pressure 300Pa, when furnace cold temperature≤100 DEG C, inflates blow-on.
Claims (6)
1. a kind of ion nitriding technology of titanium alloy material, it is characterised in that: titanium alloy material is placed in titanium alloy tooling,
Ion bombardment is first carried out by ion nitriding furnace, then carries out ion Plasma Nitriding Treatment；The ion bombardment is that first preset temperature is
490-510 DEG C, forvacuum to 40-60Pa is hereinafter, given duty ratio is that 30-50% carries out ion bombardment 30-40min, then gives
Constant voltage is 640-660V, ammonia flow is 240-260mL/min and duty ratio is that 50-60% carries out ion bombardment 30- again
40min。
2. the ion nitriding technology of titanium alloy material according to claim 1, it is characterised in that: the ion bombardment is first
Preset temperature is 495-505 DEG C, and forvacuum to 45-55Pa is hereinafter, given duty ratio is that 35-45% carries out ion bombardment 32-
38min, then given voltage is 645-655V, ammonia flow is 245-255mL/min and duty ratio is that 52-58% carries out ion again
Bombard 32-38min.
3. the ion nitriding technology of titanium alloy material according to claim 2, it is characterised in that: the ion bombardment is first
Preset temperature is 500 DEG C, and forvacuum to 50Pa is hereinafter, given duty ratio is 40% progress ion bombardment 35min, then given electricity
Pressure is 650V, ammonia flow is 250mL/min and duty ratio is 55% to carry out ion bombardment 35min again.
4. the ion nitriding technology of titanium alloy material according to claim 1, it is characterised in that: the ion Plasma Nitriding Treatment
For four-stage, the first stage: ionic nitriding temperature is 570-590 DEG C, keeps the temperature 0.5-1h, voltage 640-660V, ammonia flow
Amount is 490-510mL/min, pressure 280-300Pa, duty ratio 60-80%；Second stage: ionic nitriding temperature is 740-
760 DEG C, keep the temperature 0.5-1h, voltage 690-710V, ammonia flow 740-760mL/min, pressure 690-710Pa；Third
Stage: ionic nitriding temperature is 870-890 DEG C, keeps the temperature 8-10h, voltage 790-810V, ammonia flow 790-810mL/
Min, pressure 790-810Pa；Fourth stage: band aura is cooling, keeps the temperature 0.5-1h, voltage 690-710V, and ammonia flow is
690-710mL/min, pressure 290-310Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
5. the ion nitriding technology of titanium alloy material according to claim 4, it is characterised in that: the ion Plasma Nitriding Treatment
For four-stage, the first stage: ionic nitriding temperature is 575-585 DEG C, keeps the temperature 0.7-0.8h, voltage 645-655V, ammonia
Flow is 495-505mL/min, pressure 285-295Pa, duty ratio 65-75%；Second stage: ionic nitriding temperature is
745-755 DEG C, keep the temperature 0.7-0.8h, voltage 695-705V, ammonia flow 745-755mL/min, pressure 695-
705Pa；Phase III: ionic nitriding temperature is 875-885 DEG C, keeps the temperature 8.5-9.5h, voltage 795-805V, and ammonia flow is
795-805mL/min, pressure 795-805Pa；Fourth stage: band aura is cooling, keeps the temperature 0.7-0.8h, voltage 695-
705V, ammonia flow 695-705mL/min, pressure 295-305Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
6. the ion nitriding technology of titanium alloy material according to claim 5, it is characterised in that: the ion Plasma Nitriding Treatment
For four-stage, the first stage: ionic nitriding temperature is 580 DEG C, keeps the temperature 0.75h, voltage 650V, ammonia flow 500mL/
Min, pressure 290Pa, duty ratio 70%；Second stage: ionic nitriding temperature is 750 DEG C, keeps the temperature 0.75h, and voltage is
700V, ammonia flow 750mL/min, pressure 700Pa；Phase III: ionic nitriding temperature is 880 DEG C, keeps the temperature 9h, voltage
For 800V, ammonia flow 800mL/min, pressure 800Pa；Fourth stage: band aura is cooling, keeps the temperature 0.75h, and voltage is
700V, ammonia flow 700mL/min, pressure 300Pa, whens furnace cold temperature≤100 DEG C, inflate blow-on.
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| CN111690893A (en) * | 2020-06-16 | 2020-09-22 | 大连理工大学 | Machining method for improving structural integrity of idling flywheel of nuclear main pump |
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