CA2000320A1 - Surface treatment of metals and alloys - Google Patents
Surface treatment of metals and alloysInfo
- Publication number
- CA2000320A1 CA2000320A1 CA002000320A CA2000320A CA2000320A1 CA 2000320 A1 CA2000320 A1 CA 2000320A1 CA 002000320 A CA002000320 A CA 002000320A CA 2000320 A CA2000320 A CA 2000320A CA 2000320 A1 CA2000320 A1 CA 2000320A1
- Authority
- CA
- Canada
- Prior art keywords
- component
- nitrogen
- ion bombardment
- titanium
- carried out
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/80—After-treatment
Abstract
ABSTRACT
Title: Surface Treatment of Metals and Alloys The invention provides a method of treating a component made of metal or alloy, in which the component is bombarded with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding. The nitrogen ion bombardment is preferably carried out at a temperature below 850°C and for a period of time in the range of 1-2 hours. This method allows surface treatment of a component to be carried out relatively quickly.
The invention also provides a method of treating a component made of metal or alloy, in which the surface of the component is cleaned by ion bombardment; the cleaned component is bombarded with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding; and a surface coating is then formed on the component. A component is thus produced which has improved properties compared with those obtained hitherto, for example, good adhesion, wear and surface finish properties.
Title: Surface Treatment of Metals and Alloys The invention provides a method of treating a component made of metal or alloy, in which the component is bombarded with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding. The nitrogen ion bombardment is preferably carried out at a temperature below 850°C and for a period of time in the range of 1-2 hours. This method allows surface treatment of a component to be carried out relatively quickly.
The invention also provides a method of treating a component made of metal or alloy, in which the surface of the component is cleaned by ion bombardment; the cleaned component is bombarded with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding; and a surface coating is then formed on the component. A component is thus produced which has improved properties compared with those obtained hitherto, for example, good adhesion, wear and surface finish properties.
Description
20~)03Z0 Title: Surface Treatment of Metals and Alloy~ !
.
De~cription ' Thi8 invention concerns the surface treatment of metals and alloys, particularly titanium and titanium alloys.
Background to the invention ~
It i8 well known that titanium and its alloys have some ~ -very useful properties: they are strong, corrosion resistant, light in weight and easily machinable, weldable ~ -and foregeable. However the wear properties of such materials, either between themselves or with other ,~
materials, are very poor. In consequence such materials~ --are generally unsuitable for application in circumstances in which rubbing takes place, although they are used in;--~
some special situations where no other alternative i5 -~
practicable, with the material being coated and/or treated in various ways. , ~-~
None of the coatings and treatments available so far has ! -:
proved really satisfactory. Coatings generally lacX
adhesion or hardness. Metallurgical treatments generally damage the fatigue resistance, surface finish, or hardness and/or cause distortion of the bulk material due to the high temperatures at which the treatments are carried ` 2000320 out.
In particular plasma nltridlng, a process u~ed widely for surface hardening of~ some steel alloys, has proved to be disappointing in treatment of titanium. In this process as applied to steel a finished component is introduced into a vacuum ~ystem and bombarded with nitrogen ions, by holding the component at a negative DC voltage of some 0.1 to 1 kilovolts. The energy dissipated at the surface of the material by the ion bombardment raises the temperature gradually to 800-900-C (although the heating can be accelerated by additional heating). In this temperature range the nitrogen reacts at the surface with iron, ~-~
producing iron nitrides. The nitrogen diffuses slowly into the surface during treatment. After a treatment at temperatures up to lOOO-C and;lasting up to 60 hours a --hard nitride skin some tens of microns thick is established on the component. The nitrogen reacts m~re rapidly with other alloying elements such as titanium producing titanium nitrides (TiN and Ti2N), which are very hard and ~table compounds.
However there are various drawbacks to this process. The effect is inevitably accompanied by changes in dimension, i.e. distortion, generally necessitating re-worXing or re-finishing of the component by machining, grinding or polishing. In addition, and re importantly, there is a reduction in fatigue resistance of the material probably due to microcracks being opened up in the surface by preferential attack by nitrogen ions at grain boundaries.
Moreover the surface finish of the component deteriorates and takes on an "orange peel" appearance.
In another process, a component is coated with titanium ~, .,, ~:;
~ 2000320 nitrlde by phy~lcal vapour depo~ltlon ~PVD). Tltanlum i~
vaporlsed from a eruclblo in a vaeuum sy~tem by electron beam hombardment. A~ a firet step, the fini~hed machined eomponent, which has~already been ultra~onleally eleaned, iB ion bombarded by argon ions for about 30 minute~ in the vaeuum system, to remove any residual eonta-ination and to raise the temperature of the eomponent to about 300-400-C.
Then with the component again at negative voltage titanium evaporation io eommeneed by bombarding the titanium ~ouree with eleetrons. At the same time nitrogen and argon gas are admitted to the vaeuum system 80 as to ereate a gas pressure of some 5-15 ~ 10 3 millibars ~3.3-10 mierons):
a plasma is created of electrons and ionised nitrogen, ~
argon and titanium. Operating eonditions sueh as plasma -- -pressure and voltage are generally regulated to maintain ~ ~ ;
the temperature of the eompone`nt in the range 350-450-C. ¦ -- The eomponent attraets the ions, whieh give up their eharge on arrival at the surface, and the titanium and nitrogen combine to form a stoichio-etrie eompound of TiN.
After an hour or 80 a titanium nitride eoa-ting 2 or 3 -mieron~ thiek is built up on the surfaee of the eomponent.
Under the correet conditions the adhesion is satisfaetory.
m On steel surfaces this treatment greatly improves the `::::: : :
; eutting and wear performance of many manufacturing tools.
On titanium alloys such treatment provides a wear ~ -resistant surface which is adequate for many specialized ! i ~ applieations: indeed this proeess transforms the performance and makes the use of titanium alloys practicable in vehicles (at present mainly racing and rally cars).
Nevertheless, the coating is relatively thin and brittle. -~
Under high load condition6 sub surface deformation of the , ~"~
;v 2000~20 component can cause breakdown of the coating. In contrast, the comparatlvely deep diffu~ed layers produced by pla~ma nitrldlng do not suffer from hlgh load ~ub surfaee deformatlon. The metallurgleal propertie~ of the material are hardly affected by PVD ~the treatment temperature is not high enough), there is no distortion, the fatigue resistance i8 not wor~ened and can even be improved, and the surface is left with a highly reflecting polish as good as before coating.
If the wear propertie~ of titanium and its alloy~ could be further improved in a cost-effective way this would signifieantly open up the range of potential uses for such materials in many industries, particularly the aerospace, automobile and chemical industries for which combination~ -of the other properties of su¢h materials are of outstanding value.
The Invention According to one aspect of the present invention there is -provided a method of treating a component made of metal or alloy in whieh the component is bombarded with nitrogen -~
:;:
ions in a vacuum system at a temperature below that eonventionally used for plasma nitriding.
The nitrogen ion bombardment, or nitriding, i8 generally ~-~
;~ carried out at a temperature below 850-C, typically in the range 600-700-C.
:
Nitriding treatment time i8 not critical, but will typically be in the range 1-2 hours, which is a small fraction of the time of conventional plasma nitriding :~
` 2000320 treatment.
The nitriding may be carried out using nitrogen alone, or nitrogen in combination with other gases such as argon.
After nitriding, a surface coating, particulary of a nitride, may be formed on the component. Such a coating may be formed in conventional manner, e.g. using PVD as described above. Preferred coatings include titanium nitride, although other materials such as aluminium nitride and titanium aluminium nitride may also be used.
By way of example, when coating with titanium nitride by PVD, titanium metal in the vacuum system is vaporised by electron beam bombardment in parallel with continued nitrogen ion bombardment. Treatment is generally carried out for between 20 and 40 minutes, say 1/2 hour, and following conventional practice at a temperature in the range 350-450-C, although rather higher temperatures, say up to 600-700C, can also be used.
If desired, a further coating, eg of a carbide, oxide or carbonitride, may be formed on top of the first coating.
Prior to the nitriding treatment the component is ' -conveniently cleaned by ion bombardment in conventional manner, e.g. by bombardment with argon ions in a vacuum system as described above. Such treatment is typically carried out for between 1/4 and 3/4 hour, say 1/2 hour, at a temperature in the range 300-400C, although rather higher temperatures, up to about 500C, can also be used.
Nitrogen or titanium ions could also be used in similar manner for cleaning purposes. If nitrogen ion~ are used some plasma nitriding will take place during the cleaning proces~.
The invention ie particularly applicable to the treatment of components of titanium and titanium alloys, but may also be used for other materials such as steel and other ferrous alloys.
In a further aspect the present invention provides a method of treating a component made of metal or alloy, comprising cleaning the surface of the component by ion bombardment; bombarding the cleaned component with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding and then forming a surface coating on the component.
- I
The invention also includes within its scope a component . which has been treated by a method. in accordance with the invention.
1~ The nitriding treatment of the invention allows surface : treatment of a component to be carried out relatively : quickly, for example 1/2 hour cleaning, 1-2 hours :
:~ ~ nitriding, then 1/2 hour coating by PVD. ~.
Further, use of the nitriding treatment of the invention prior to surface coating enables production of a component w!ith improved properties compared with those obtained hitherto, having good adhesion, wear and surface finish ~` properties without any distortion of the component occurring.
~: .
In a typical embodiment of the invention a component of titanium or titanium alloy i~ cleaned by argon ion ~.
, ,,., ~,,;, ,, ., -. . , , ,, ~, `-: 2000320 bombardment ln a vacuum system, ~uch a~ the vacuum eystem~
produced by Tecvac Limlted and marketed a~ their IP35L
model. The component is maintalned at a negative voltage, and argon gas pumped through the system.
Cleaning i8 carried out for about 30 minutes, with the temperature of the component rising rapidly due to dissipation of energy at the surface of the material by the ion bombardment, and being maintained in the range 300-400-C by suitable regulation of the plasma pressure and the negative voltage of the component. -~-, After cleaning the component is nitrided by introducing nitrogen gas to the vacuum system and bombarding the component inten~ely with nitrogen ions for 1-2 hours, with the temperature of the component maintained in the range 600-700-C by regulation of the plasma pressure and the voltage of the component.
- - , . .
Immediately following nitriding a titanium nitride coating ~-~
is laid down on the component by PVD, by vaporising ~ ' titanium metal introduced to the vacuum system by electron beam bombardment in parallel with continued nitrogen ion bombardment. PVD is carried out for about 30 minutes, -with the temperature of the component maintained in the range 350-600-C by regulation of the plasma pressure and ~-the voltage of the component. -~
The resulting surface appears to have all of the - ~-advantages associated with both of the known treatments ;~
(plasma nitriding and coating by PVD), without many of the - ;
disadvantages. Compared with results obtained previously, adhesion of the titanium nitride coating is improved; the fatigue properties and bulk metallurgical structure of the component are little affected; there is `~;-.: ' ,~ ,. .. .
~ :.,.:
no distortion (as the temperatures employed have not been sufficiently high to produce di~tortion)~ and the surface finish is as good a~ that of the component prior to treatDent .
Features of preferred treatment methods incorporating the invention are:
1. To build up a graded structure, with a tough core, an interlayer of increasing hardness and a top ~urface of greatest pos 8 ible hardne~ 8 .
.
De~cription ' Thi8 invention concerns the surface treatment of metals and alloys, particularly titanium and titanium alloys.
Background to the invention ~
It i8 well known that titanium and its alloys have some ~ -very useful properties: they are strong, corrosion resistant, light in weight and easily machinable, weldable ~ -and foregeable. However the wear properties of such materials, either between themselves or with other ,~
materials, are very poor. In consequence such materials~ --are generally unsuitable for application in circumstances in which rubbing takes place, although they are used in;--~
some special situations where no other alternative i5 -~
practicable, with the material being coated and/or treated in various ways. , ~-~
None of the coatings and treatments available so far has ! -:
proved really satisfactory. Coatings generally lacX
adhesion or hardness. Metallurgical treatments generally damage the fatigue resistance, surface finish, or hardness and/or cause distortion of the bulk material due to the high temperatures at which the treatments are carried ` 2000320 out.
In particular plasma nltridlng, a process u~ed widely for surface hardening of~ some steel alloys, has proved to be disappointing in treatment of titanium. In this process as applied to steel a finished component is introduced into a vacuum ~ystem and bombarded with nitrogen ions, by holding the component at a negative DC voltage of some 0.1 to 1 kilovolts. The energy dissipated at the surface of the material by the ion bombardment raises the temperature gradually to 800-900-C (although the heating can be accelerated by additional heating). In this temperature range the nitrogen reacts at the surface with iron, ~-~
producing iron nitrides. The nitrogen diffuses slowly into the surface during treatment. After a treatment at temperatures up to lOOO-C and;lasting up to 60 hours a --hard nitride skin some tens of microns thick is established on the component. The nitrogen reacts m~re rapidly with other alloying elements such as titanium producing titanium nitrides (TiN and Ti2N), which are very hard and ~table compounds.
However there are various drawbacks to this process. The effect is inevitably accompanied by changes in dimension, i.e. distortion, generally necessitating re-worXing or re-finishing of the component by machining, grinding or polishing. In addition, and re importantly, there is a reduction in fatigue resistance of the material probably due to microcracks being opened up in the surface by preferential attack by nitrogen ions at grain boundaries.
Moreover the surface finish of the component deteriorates and takes on an "orange peel" appearance.
In another process, a component is coated with titanium ~, .,, ~:;
~ 2000320 nitrlde by phy~lcal vapour depo~ltlon ~PVD). Tltanlum i~
vaporlsed from a eruclblo in a vaeuum sy~tem by electron beam hombardment. A~ a firet step, the fini~hed machined eomponent, which has~already been ultra~onleally eleaned, iB ion bombarded by argon ions for about 30 minute~ in the vaeuum system, to remove any residual eonta-ination and to raise the temperature of the eomponent to about 300-400-C.
Then with the component again at negative voltage titanium evaporation io eommeneed by bombarding the titanium ~ouree with eleetrons. At the same time nitrogen and argon gas are admitted to the vaeuum system 80 as to ereate a gas pressure of some 5-15 ~ 10 3 millibars ~3.3-10 mierons):
a plasma is created of electrons and ionised nitrogen, ~
argon and titanium. Operating eonditions sueh as plasma -- -pressure and voltage are generally regulated to maintain ~ ~ ;
the temperature of the eompone`nt in the range 350-450-C. ¦ -- The eomponent attraets the ions, whieh give up their eharge on arrival at the surface, and the titanium and nitrogen combine to form a stoichio-etrie eompound of TiN.
After an hour or 80 a titanium nitride eoa-ting 2 or 3 -mieron~ thiek is built up on the surfaee of the eomponent.
Under the correet conditions the adhesion is satisfaetory.
m On steel surfaces this treatment greatly improves the `::::: : :
; eutting and wear performance of many manufacturing tools.
On titanium alloys such treatment provides a wear ~ -resistant surface which is adequate for many specialized ! i ~ applieations: indeed this proeess transforms the performance and makes the use of titanium alloys practicable in vehicles (at present mainly racing and rally cars).
Nevertheless, the coating is relatively thin and brittle. -~
Under high load condition6 sub surface deformation of the , ~"~
;v 2000~20 component can cause breakdown of the coating. In contrast, the comparatlvely deep diffu~ed layers produced by pla~ma nitrldlng do not suffer from hlgh load ~ub surfaee deformatlon. The metallurgleal propertie~ of the material are hardly affected by PVD ~the treatment temperature is not high enough), there is no distortion, the fatigue resistance i8 not wor~ened and can even be improved, and the surface is left with a highly reflecting polish as good as before coating.
If the wear propertie~ of titanium and its alloy~ could be further improved in a cost-effective way this would signifieantly open up the range of potential uses for such materials in many industries, particularly the aerospace, automobile and chemical industries for which combination~ -of the other properties of su¢h materials are of outstanding value.
The Invention According to one aspect of the present invention there is -provided a method of treating a component made of metal or alloy in whieh the component is bombarded with nitrogen -~
:;:
ions in a vacuum system at a temperature below that eonventionally used for plasma nitriding.
The nitrogen ion bombardment, or nitriding, i8 generally ~-~
;~ carried out at a temperature below 850-C, typically in the range 600-700-C.
:
Nitriding treatment time i8 not critical, but will typically be in the range 1-2 hours, which is a small fraction of the time of conventional plasma nitriding :~
` 2000320 treatment.
The nitriding may be carried out using nitrogen alone, or nitrogen in combination with other gases such as argon.
After nitriding, a surface coating, particulary of a nitride, may be formed on the component. Such a coating may be formed in conventional manner, e.g. using PVD as described above. Preferred coatings include titanium nitride, although other materials such as aluminium nitride and titanium aluminium nitride may also be used.
By way of example, when coating with titanium nitride by PVD, titanium metal in the vacuum system is vaporised by electron beam bombardment in parallel with continued nitrogen ion bombardment. Treatment is generally carried out for between 20 and 40 minutes, say 1/2 hour, and following conventional practice at a temperature in the range 350-450-C, although rather higher temperatures, say up to 600-700C, can also be used.
If desired, a further coating, eg of a carbide, oxide or carbonitride, may be formed on top of the first coating.
Prior to the nitriding treatment the component is ' -conveniently cleaned by ion bombardment in conventional manner, e.g. by bombardment with argon ions in a vacuum system as described above. Such treatment is typically carried out for between 1/4 and 3/4 hour, say 1/2 hour, at a temperature in the range 300-400C, although rather higher temperatures, up to about 500C, can also be used.
Nitrogen or titanium ions could also be used in similar manner for cleaning purposes. If nitrogen ion~ are used some plasma nitriding will take place during the cleaning proces~.
The invention ie particularly applicable to the treatment of components of titanium and titanium alloys, but may also be used for other materials such as steel and other ferrous alloys.
In a further aspect the present invention provides a method of treating a component made of metal or alloy, comprising cleaning the surface of the component by ion bombardment; bombarding the cleaned component with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding and then forming a surface coating on the component.
- I
The invention also includes within its scope a component . which has been treated by a method. in accordance with the invention.
1~ The nitriding treatment of the invention allows surface : treatment of a component to be carried out relatively : quickly, for example 1/2 hour cleaning, 1-2 hours :
:~ ~ nitriding, then 1/2 hour coating by PVD. ~.
Further, use of the nitriding treatment of the invention prior to surface coating enables production of a component w!ith improved properties compared with those obtained hitherto, having good adhesion, wear and surface finish ~` properties without any distortion of the component occurring.
~: .
In a typical embodiment of the invention a component of titanium or titanium alloy i~ cleaned by argon ion ~.
, ,,., ~,,;, ,, ., -. . , , ,, ~, `-: 2000320 bombardment ln a vacuum system, ~uch a~ the vacuum eystem~
produced by Tecvac Limlted and marketed a~ their IP35L
model. The component is maintalned at a negative voltage, and argon gas pumped through the system.
Cleaning i8 carried out for about 30 minutes, with the temperature of the component rising rapidly due to dissipation of energy at the surface of the material by the ion bombardment, and being maintained in the range 300-400-C by suitable regulation of the plasma pressure and the negative voltage of the component. -~-, After cleaning the component is nitrided by introducing nitrogen gas to the vacuum system and bombarding the component inten~ely with nitrogen ions for 1-2 hours, with the temperature of the component maintained in the range 600-700-C by regulation of the plasma pressure and the voltage of the component.
- - , . .
Immediately following nitriding a titanium nitride coating ~-~
is laid down on the component by PVD, by vaporising ~ ' titanium metal introduced to the vacuum system by electron beam bombardment in parallel with continued nitrogen ion bombardment. PVD is carried out for about 30 minutes, -with the temperature of the component maintained in the range 350-600-C by regulation of the plasma pressure and ~-the voltage of the component. -~
The resulting surface appears to have all of the - ~-advantages associated with both of the known treatments ;~
(plasma nitriding and coating by PVD), without many of the - ;
disadvantages. Compared with results obtained previously, adhesion of the titanium nitride coating is improved; the fatigue properties and bulk metallurgical structure of the component are little affected; there is `~;-.: ' ,~ ,. .. .
~ :.,.:
no distortion (as the temperatures employed have not been sufficiently high to produce di~tortion)~ and the surface finish is as good a~ that of the component prior to treatDent .
Features of preferred treatment methods incorporating the invention are:
1. To build up a graded structure, with a tough core, an interlayer of increasing hardness and a top ~urface of greatest pos 8 ible hardne~ 8 .
2. To produce the interlayer and top surface by consecutive treatment stages in the same equipment, with one stage immediately following the other without breaX ~io as to avoid contamination whic~ can affect adhesion.
:~ .
:~ .
3. To produce diffused layers on titanium with benefits of both titanium nitride coating and plasma nitriding at low temperatures and in very fast cycle times, typically one tenth of plasma nitriding times.
, - ..
, - ..
4. To produce diffused layers on hardened steel by nitriding at a lower temperature and for a much shorter time than customarily used for plasma nitriding (typically one tenth of that time) followed immediately in the same equipment without a break (ie with one stage immediately following the next, as in 2 above) by coating with titanium nitride or titanium aluminium nitride by a PVD ~.
process.
;
process.
;
5. To produce diffused layers on metals other than hardened steel by nitriding at lower temperatures and for times shorter than customarily used for plasma nitriding followed immediately ~as in 2 above) by coating with titanium nitride or titanium alumlnium nltride by a PVD
proce~o.
.~ i ': :.
proce~o.
.~ i ': :.
Claims (15)
1. A method of treating a component made of metal or alloy in which the component is bombarded with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding.
2. A method according to Claim 1, wherein the nitrogen ion bombardment is carried out at a temperature below 850°C.
3. A method according to Claim 2, wherein the nitrogen ion bombardment is carried out at a temperature in the range 600-700°C.
4. A method according to Claim 1, 2 or 3, wherein the nitrogen ion bombardment is carried out for a period of time in the range 1-2 hours.
5. A method according to any one of the preceding claims, wherein the nitrogen ion bombardment is carried out in an atmosphere comprising nitrogen and argon.
6. A method according to any one of the preceding claims, further comprising forming a surface coating on the component after the nitrogen ion bombardment.
7. A method according to Claim 6, wherein the surface coating comprises a nitride.
8. A method according to Claim 6 or 7, wherein the surface coating is formed by physical vapour deposition.
9. A method according to Claim 6, 7 or 8, further comprising forming a further coating on top of the first coating.
10. A method according to any one of the preceding claims, wherein the component is initially cleaned by ion bombardment.
11. A method according to any one of the preceding claims, applied to the treatment of components of titanium and titanium alloys.
12. A method according to any one of Claims 1 to 10, applied to the treatment of steel and other ferrous alloys.
13. A method of treating a component made of metal or alloy, comprising cleaning the surface of the component by ion bombardment; bombarding the cleaned component with nitrogen ions in a vacuum system at a temperature below that conventionally used for plasma nitriding; and then forming a surface coating on the component.
14. A method of treating a component made of metal or alloy, substantially as herein described.
15. A component which has been treated by a method in accordance with any one of the preceding claims.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB8823668.2 | 1988-10-08 | ||
| GB888823668A GB8823668D0 (en) | 1988-10-08 | 1988-10-08 | Surface treatment of metals & alloys |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2000320A1 true CA2000320A1 (en) | 1990-04-08 |
Family
ID=10644918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002000320A Abandoned CA2000320A1 (en) | 1988-10-08 | 1989-10-06 | Surface treatment of metals and alloys |
Country Status (6)
| Country | Link |
|---|---|
| KR (1) | KR900702071A (en) |
| AU (1) | AU4401789A (en) |
| CA (1) | CA2000320A1 (en) |
| ES (1) | ES2017832A6 (en) |
| GB (2) | GB8823668D0 (en) |
| WO (1) | WO1990004044A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5669988A (en) * | 1994-08-12 | 1997-09-23 | Mitsubishi Jukogyo Kabushiki Kaisha | Corrugating roll and manufacturing method thereof |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2227755B (en) * | 1988-12-08 | 1993-03-10 | Univ Hull | A process for improving the wear and corrosion resistance of metallic components |
| JPH03115560A (en) * | 1989-09-28 | 1991-05-16 | Daido Metal Co Ltd | Production of sliding bearing |
| FR2682125A1 (en) * | 1991-10-07 | 1993-04-09 | Nitruvid | PROCESSING PROCESS FOR DEPOSITING A CARBON LAYER IN A STEAM PHASE ON THE SURFACE OF A METAL PART AND A PART THUS OBTAINED. |
| GB9308545D0 (en) * | 1993-04-24 | 1993-06-09 | British Nuclear Fuels Plc | Surface treatment of metallic components |
| US5975912A (en) * | 1994-06-03 | 1999-11-02 | Materials Research Corporation | Low temperature plasma-enhanced formation of integrated circuits |
| US5972790A (en) * | 1995-06-09 | 1999-10-26 | Tokyo Electron Limited | Method for forming salicides |
| DE19525182C2 (en) * | 1995-07-11 | 1997-07-17 | Metaplas Ionon Gmbh | Process for the production of corrosion and wear protection layers on iron-based materials |
| CN1110579C (en) * | 1998-11-16 | 2003-06-04 | 江西省科学院应用物理研究所 | Plasma reinforcement technology for the surface of tantalum spinning jet |
| KR100317731B1 (en) * | 1999-11-25 | 2001-12-24 | 김덕중 | High density plasma ion nitriding method and apparatus |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5514839A (en) * | 1978-07-14 | 1980-02-01 | Kawasaki Heavy Ind Ltd | Treating method for ion nitriding |
| JPS5576046A (en) * | 1978-11-30 | 1980-06-07 | Nisshin Steel Co Ltd | Ultra low carbon nitriding steel |
| SU905325A1 (en) * | 1979-12-04 | 1982-02-15 | Московский Автомобильно-Дорожный Институт | Method for chemical and heat treatment |
| JPS58213868A (en) * | 1982-06-04 | 1983-12-12 | Toyota Central Res & Dev Lab Inc | Method and device for ionic nitridation of aluminum or aluminum alloy |
| JPS6086263A (en) * | 1983-10-14 | 1985-05-15 | Mitsubishi Metal Corp | Surface hardening method of fe-base, ni-base and co-base alloys by ion nitrification |
| DE3706482A1 (en) * | 1986-02-28 | 1987-09-03 | Politechnika Warszawska | METHOD AND DEVICES FOR PRODUCING DIFFUSION SURFACE LAYERS ON METAL WORKPIECES BY GLIMMENT CHARGING |
| JPH01319665A (en) * | 1988-06-17 | 1989-12-25 | Toyota Central Res & Dev Lab Inc | Ion nitriding method for aluminum material |
| GB2227755B (en) * | 1988-12-08 | 1993-03-10 | Univ Hull | A process for improving the wear and corrosion resistance of metallic components |
-
1988
- 1988-10-08 GB GB888823668A patent/GB8823668D0/en active Pending
-
1989
- 1989-10-04 AU AU44017/89A patent/AU4401789A/en not_active Abandoned
- 1989-10-04 KR KR1019900701216A patent/KR900702071A/en not_active Application Discontinuation
- 1989-10-04 WO PCT/GB1989/001177 patent/WO1990004044A1/en unknown
- 1989-10-06 CA CA002000320A patent/CA2000320A1/en not_active Abandoned
- 1989-10-06 ES ES8903381A patent/ES2017832A6/en not_active Expired - Lifetime
-
1991
- 1991-03-08 GB GB9104885A patent/GB2245601B/en not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5669988A (en) * | 1994-08-12 | 1997-09-23 | Mitsubishi Jukogyo Kabushiki Kaisha | Corrugating roll and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| ES2017832A6 (en) | 1991-03-01 |
| AU4401789A (en) | 1990-05-01 |
| WO1990004044A1 (en) | 1990-04-19 |
| GB8823668D0 (en) | 1988-11-16 |
| GB9104885D0 (en) | 1991-05-15 |
| GB2245601B (en) | 1992-10-07 |
| GB2245601A (en) | 1992-01-08 |
| KR900702071A (en) | 1990-12-05 |
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