CN110239877A - Silicon wafer caches machine - Google Patents
Silicon wafer caches machine Download PDFInfo
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- CN110239877A CN110239877A CN201910364021.4A CN201910364021A CN110239877A CN 110239877 A CN110239877 A CN 110239877A CN 201910364021 A CN201910364021 A CN 201910364021A CN 110239877 A CN110239877 A CN 110239877A
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- Prior art keywords
- silicon wafer
- conveyer belt
- cache
- cache shelf
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
- B65G15/10—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface
- B65G15/12—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts
- B65G15/20—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration comprising two or more co-operating endless surfaces with parallel longitudinal axes, or a multiplicity of parallel elements, e.g. ropes defining an endless surface with two or more endless belts arranged side by side, e.g. for conveyance of flat articles in vertical position
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/34—Devices for discharging articles or materials from conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0214—Articles of special size, shape or weigh
- B65G2201/022—Flat
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of silicon wafers to cache machine, including cache mechanism and transmission mechanism；Transmission mechanism has the multiple groups conveyer belt of synchronizing moving；The target position in transmission direction of belt travel, the multiple groups cache shelf with synchronization lifting is arranged in cache mechanism；It is equipped with the multiple brackets for being spaced each other arrangement along the vertical direction in every group of cache shelf, there is the vertical gap for accommodating silicon wafer edge between two adjacent stents；When silicon wafer on conveyer belt is transferred into target position, the edge of silicon wafer enters vertical gap contour therewith in cache shelf；When cache shelf rises, bracket bracketing silicon wafer rises, so that the silicon wafer on conveyer belt is displaced in cache shelf；When cache shelf declines, on the silicon slice charging to conveyer belt in cache shelf.Cache shelf of the invention configures between two sets equipment that wafer track system produce, and when leading portion equipment pause of traffic direction successively caches silicon wafer, on the silicon slice charging to assembly line that when equipment enabling successively caches, silicon wafer during equipment pause is avoided to be damaged.
Description
Technical field
The present invention relates to silicon wafer technical field of automation equipment, and in particular to a kind of silicon wafer caching machine.
Background technique
In the flow line production of silicon wafer, close it is located at when the leading portion equipment of traffic direction breaks down pause
When the equipment of traffic direction back segment cannot stop running immediately, or even if headend equipment cuts off back segment when breaking down immediately
When equipment, part silicon wafer can be all overstock between two equipment；Such as the technique machine and blanking machine of silicon wafer, the silicon wafer come out in technique machine
Part silicon wafer can be overstock between technique machine and blanking machine, silicon wafer heap accumulates when blanking machine, which breaks down, to be suspended into blanking machine
Scuffing can inevitably be generated because of friction by setting, and therefore, it is necessary to place cache mechanism between two sets of equipment, be broken down in equipment
When can be temporary caching silicon wafer, avoid silicon wafer during maintenance of equipment from being damaged.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of silicon wafers to cache machine, configures two sets produced in wafer track system
Between equipment, the leading portion equipment of traffic direction successively caches silicon wafer when suspending, the silicon slice charging that equipment successively caches when enabling is extremely
On assembly line, silicon wafer is damaged during avoiding equipment from suspending；On the other hand, the caching machine of optimizing structure design, is reducing
Equipment volume accomplishes that high-volume caches silicon wafer in the case where simplifying power source.
In order to solve the above-mentioned technical problems, the present invention provides a kind of silicon wafers to cache machine, including cache mechanism and conveyer
Structure；
The transmission mechanism has multiple groups conveyer belt, the multiple groups conveyer belt successively laid out in parallel, and institute in the horizontal direction
It states multiple groups conveyer belt and is all connected with driver one, multiple groups conveyer belt synchronizing moving under the driving of driver one；The transmission
Band is used to convey silicon wafer and the silicon wafer is detached from conveyer belt along the two sides edge perpendicular to its direction of transfer and extends outward；
The target position in transmission direction of belt travel is arranged in the cache mechanism, described more with multiple groups cache shelf
Group cache shelf successively laid out in parallel in the horizontal direction, and the multiple groups cache shelf is all connected with driver two, the multiple groups cache shelf
The synchronization lifting under the driving of driver two；Every group of conveyer belt corresponds to one group of cache shelf and each cache shelf is arranged at
The outside of corresponding conveyer belt；
Multiple brackets are equipped in cache shelf described in every group, what multiple brackets were spaced each other along the vertical direction is fixed on
In cache shelf, the other end of the bracket extends to conveyer belt direction, has between two adjacent stents for accommodating silicon wafer edge
Vertical gap；
When silicon wafer on the conveyer belt is transferred into the target position, the two sides edge of the silicon wafer enters caching
Vertical gap contour therewith on frame；When the cache shelf rises, the bracket bracketing silicon wafer rises, so that the silicon on conveyer belt
Piece is displaced in cache shelf；When the cache shelf declines, on the silicon slice charging to conveyer belt in cache shelf.
It further comprise that each conveyer belt includes parallel to each other and interval is set in a preferred embodiment of the present invention
The two groups of belts set, the both ends of two groups of belts are respectively sleeved on a pair of of drive pulley and a pair of of driven pulley, institute
It states a pair of of drive pulley coaxial line to be connected on driving shaft, the pair of driven pulley coaxial line is connected on driven shaft；
The driving shaft of the multiple groups conveyer belt is connected two-by-two by shaft coupling, the integrated connection driver one after all active axis connections.
In a preferred embodiment of the present invention, further comprise all conveyer belts two groups of belts between be equipped with blocking
Device, stopper described in multiple groups are all connected with driver three, multiple groups stopper synchronization lifting under the driving of driver three；Along biography
The direction of transfer of band is sent, the outside of cache shelf is arranged in the stopper；
When the edge of the silicon wafer enters vertical gap contour therewith in cache shelf, the stopper, which rises, stops silicon
Piece.
It further comprise the stopper is vertically extending barrier plate in a preferred embodiment of the present invention, it is each described
Barrier plate is each attached in connecting component, and two groups of drivers three are equipped at intervals on the connecting component length extending direction；It is described
The position that silicon wafer is contacted on barrier plate is equipped with tilt guides.
In a preferred embodiment of the present invention, further comprise the driver three be cylinder.
In a preferred embodiment of the present invention, further comprise all conveyer belts two groups of belts between be equipped with close to biography
Sensor, the proximity sensor are arranged close to the center of bracket.
It further comprise that supporting beam, the supporting beam are equipped between circular belt in a preferred embodiment of the present invention
On the correcting error guidance component extended along conveyer belt direction of transfer is installed, the other end of the correcting error guidance component is to cache shelf side
To horizontal extension.
It further comprise that the multiple groups cache shelf is installed on sectional materials cage in a preferred embodiment of the present invention, institute
It states sectional materials cage to be connected on two groups of screw rods being oppositely arranged, the power end of two groups of screw rods passes through synchronous band connection driving electricity
Machine.
It further comprise that the cache shelf is vertical on sectional materials cage with being mounted in a preferred embodiment of the present invention
Plate, what multiple brackets of each cache shelf were spaced each other along the vertical direction is fixed on the vertical plate；Each bracket is equal
With two pairs of supporting plates, two pairs of supporting plate backrest-types are mounted on vertical plate, positioned at two ipsilateral supporting plates along the biography of silicon wafer
Direction interval is sent to be arranged.
It further comprise that synchronous belt is equipped with tensioning wheel in a preferred embodiment of the present invention.
Beneficial effects of the present invention:
One, silicon wafer of the invention cache machine, configure between two sets of equipment that wafer track system produces (such as silicon wafer work
Between skill machine and silicon slice charging machine), traffic direction headend equipment successively caches silicon wafer when suspending, what equipment successively cached when enabling
On silicon slice charging to assembly line, silicon wafer is damaged during avoiding equipment from suspending.
Secondly, silicon wafer of the invention cache machine, transport mechanism is docked with assembly line, and when cache shelf rising will be in transport mechanism
Silicon wafer take away and be buffered on current brackets, cache shelf continuously rises, and the multiple silicon wafers conveyed by transport mechanism are delayed piecewise
It deposits to the different support of cache shelf；Conversely, cache shelf decline when, with conveyer belt close to and be located at conveyer belt above silicon wafer
In blanking to conveyer belt；Cache shelf continuously declines, will be on the multiple silicon wafers successively cached piecewise blanking to conveyer belt.It is excellent based on this
The cache mechanism for changing structure design is designed by a nested structure while realizing material stock and blowing (or discharging), can simplified with this
The structure of equipment designs, while equipment can be stablized, coherent operation.
Thirdly, the silicon wafer of optimizing structure design of the present invention cache machine, entire caching machine only needs to configure two driving motors,
Multiple groups conveyer belt synchronizing moving is driven respectively, and multiple groups cache shelf synchronization lifting is accomplished to cache high-volume silicon wafer.For example, a set of silicon
Piece caches machine, configures five groups of conveyer belts, five groups of cache shelfs, and every group of cache shelf configures 20 pack supports, that is, two drives of configuration
In the case where dynamic motor, a set of caching machine can cooperate 100 silicon wafers of caching.The silicon wafer caching machine designed with this is set in reduction
Standby volume can accomplish that high-volume caches silicon wafer in the case where simplifying power source, utmostly reduce equipment manufacturing costs and fortune
Row cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram for needing the silicon wafer cached；
Fig. 2 is the structural schematic diagram of silicon wafer caching machine in the preferred embodiment of the present invention；
Fig. 3 is the structural schematic diagram of transmission mechanism in the machine of silicon wafer caching shown in Fig. 2；
Fig. 4 is the structural schematic diagram of cache mechanism in the machine of silicon wafer caching shown in Fig. 2；
Fig. 5 is the structural schematic diagram of stopper in the machine of silicon wafer caching shown in Fig. 2.
Figure label explanation: 1- silicon wafer, 13- edge；
2- transmission mechanism, 21- conveyer belt, 22- driver one, 23- belt, 24- driving shaft, 25- shaft coupling, 26- stop
Device, 27- driver three, 28- connecting component, 29- tilt guides, 30- proximity sensor, 31- supporting beam, 32- correcting error guidance
Component；
4- cache mechanism, 41- cache shelf, 42- supporting plate, the vertical gap 43-, 44- sectional materials cage, 45- screw rod, 46- are synchronous
Band, 47- vertical plate, 48- tensioning wheel, 49- driver two.
Specific embodiment
The present invention will be further explained below with reference to the attached drawings and specific examples, so that those skilled in the art can be with
It more fully understands the present invention and can be practiced, but illustrated embodiment is not as a limitation of the invention.
Embodiment
The present embodiment discloses a kind of silicon wafer caching machine, suitable for configured between two equipment that wafer track system produces,
Such as between silicon wafer technique machine and silicon slice charging machine.Shown in referring to Fig.1~5, the silicon wafer of the application caches machine, including cache mechanism
2 and transmission mechanism 4, transmission mechanism 4 docked with wafer track system, by the silicon wafer transfer destination position on wafer track system, caching
Mechanism 2 is arranged in target position, actively takes away the silicon wafer on transmission mechanism 4 and successively caches.In the present embodiment technical solution,
The preferred structure of cache mechanism 2 and transmission mechanism 4 is as follows:
One, transmission mechanism 4
As shown in figures 2-3, above-mentioned transmission mechanism 4 has five groups of conveyer belts 21, and five groups of conveyer belts 21 are in the horizontal direction successively
Laid out in parallel, five groups of conveyer belts 21 are all connected with driver 1, and five groups of conveyer belts 21 are synchronous under the driving of driver 1 to be moved
It is dynamic.As shown in figure 3, defining five groups of conveyer belts 21 successively laid out in parallel along the x axis in the horizontal plane, conveyer belt 21 is in horizontal plane
On move along the y axis.Above-mentioned conveyer belt 21 is for conveying silicon wafer 1, when silicon wafer 1 as shown in Figure 1 is located on conveyer belt 21, silicon
Piece 1 is detached from conveyer belt 21 outward along two sides (two sides extended along the x axis) edge 13 perpendicular to its direction of transfer
Extend, the edge 13 with cache mechanism for contacting, so that entire silicon wafer is mounted on cache mechanism by its edge 13.
In addition, those skilled in the art are according to actual needs, transmission mechanism configuration conveyer belt quantity can be adjusted, than
Such as, two groups of conveyer belts, four groups of conveyer belts, seven groups of conveyer belts, eight groups of conveyer belts, even more multiple groups conveyer belt are configured.
Five groups of conveyer belts of the application synchronizing moving under the driving of driver 1, preferred structure design are as follows:
The structure of above-mentioned five groups of conveyer belts is identical, includes parallel to each other and spaced two groups of belts 23, above-mentioned
The both ends of two groups of belts 23 are respectively sleeved on a pair of of drive pulley and a pair of of driven pulley, above-mentioned a pair of drive pulley
Coaxial line is connected on driving shaft 24, and above-mentioned a pair of driven pulley coaxial line is connected on driven shaft；Above-mentioned five groups of conveyer belts
21 driving shaft 24 is connected two-by-two by shaft coupling 25, the integrated connection driver 1 after all connections of driving shafts 24.By one
Driving two groups of belt synchronizing movings to drive pulley and a pair of of driven pulley is the prior art, realizes that process and work are former
Details are not described herein again for reason.
In the present embodiment technical solution technical solution, above-mentioned driver 1 is it is preferable to use motor, those skilled in the art,
According to actual needs, the model and type of motor can be converted.
One motor drives five groups of transmission belts are synchronous to convey silicon wafer 1 along the y axis.
Two, cache mechanism 4
The target position on 21 moving direction of conveyer belt is arranged in above-mentioned cache mechanism 4, and target position herein is silicon wafer 1
The initial position on cache mechanism 4 is admitted to from conveyer belt 21.As shown in Figure 2,4, above-mentioned cache mechanism 4 has five groups of cache shelfs
41, successively laid out in parallel, five set conveyer belt 21 correspond five groups of cachings to above-mentioned five groups of cache shelfs 41 respectively along the x axis
Frame 41 configures, and every group of cache shelf 41 is arranged at the outside of corresponding conveyer belt 21.Above-mentioned five groups of cache shelfs 41 connect
Driver connected 2 49, above-mentioned five groups of cache shelfs 41 synchronization lifting under the driving of driver 2 49.Those skilled in the art according to
Actual use need, the quantity of cache mechanism allocating cache frame can be adjusted, for example, configuration two groups of cache shelfs, four groups of cache shelfs,
Seven groups of cache shelfs, eight groups of cache shelfs, even more multiple groups cache shelf.
Five groups of cache shelfs 41 of the application are all connected with driver 2 49, and specific implementation is as follows:
As shown in figure 4, above-mentioned five groups of cache shelfs 41 are installed on sectional materials cage 44, above-mentioned sectional materials cage 44 is connected to phase
To on two groups of screw rods 45 of setting, the power end of above-mentioned two groups of screw rods 45 connects driver 2 49, synchronous belt by synchronous belt 46
46 be equipped with tensioning wheel 48, for adjusting the tension of synchronous belt 46, it is ensured that two groups of screw rods 45 a power source driving similarly hereinafter
Step movement.In the present embodiment technical solution technical solution, above-mentioned driver 2 49 is it is preferable to use motor, those skilled in the art,
According to actual needs, the model and type of motor can be converted.
When silicon wafer 1 on above-mentioned conveyer belt 21 is transferred into above-mentioned target position, the two sides edge 13 of above-mentioned silicon wafer 1 into
Enter vertical gap 43 contour therewith in cache shelf 41；Vertical gap 43 herein is located at setting up and down first on vertical direction
Between bracket and second support, when above-mentioned cache shelf 41 rises, second support bracketing silicon wafer 1 rises, so that on conveyer belt 21
Silicon wafer 1 is displaced in cache shelf 41；When above-mentioned cache shelf 41 declines, in silicon wafer 1 blanking to conveyer belt 21 in cache shelf 41.
In the present embodiment technical solution, the structure of every group of cache shelf 41 is identical, all has vertical plate 47 and 20 bracket,
The vertical plate 47 of five groups of cache shelfs is installed on sectional materials cage 44, and what 20 brackets were spaced each other along the vertical direction is fixed on vertical
On plate 47, the other end of above-mentioned bracket extends to 21 direction of conveyer belt, has between two adjacent stents for accommodating silicon wafer edge
Vertical gap 43.Further, above-mentioned each bracket all has two pairs of supporting plates 42, and 42 backrest-type of above-mentioned two pairs of supporting plates is mounted on
On vertical plate 47, it is arranged positioned at two ipsilateral above-mentioned supporting plates 42 along the direction of transfer interval of silicon wafer.With this, a bracket has four
A supporting plate 42, four supporting plates 42 respectively correspond four corners configuration of the silicon wafer of quadrilateral structure, eight supporting plates of upper and lower bracket
42, which cooperatively form four vertical gaps, is respectively used to accommodate four corners of silicon wafer 1.
In addition, those skilled in the art are according to actual needs, the quantity that each cache shelf 41 configures bracket can be adjusted,
For example, configuration 15 brackets, 18 brackets, 25 brackets, 30 brackets, even more Frame lamps.
In order to wafer track system seamless interfacing, the transport mechanism continuous operation of the application, in order to ensure in transport mechanism
Silicon wafer can smoothly enter into cache shelf 41, be equipped with stopper 26 between two groups of belts 23 of all conveyer belts 21 of the application, five groups
Stopper 26 is all connected with driver 3 27, above-mentioned five groups of stoppers 26 synchronization lifting under the driving of driver 3 27；Along transmission
With 21 direction of transfer, the outside of cache shelf 41 is arranged in above-mentioned stopper 26；The edge 13 of above-mentioned silicon wafer 1 enters cache shelf 41
On therewith contour vertical gap 43 when, above-mentioned stopper 26, which rises, stops silicon wafer 1, and silicon wafer 1 is limited in target position, it is ensured that
The silicon wafer of target location is taken away in subsequent 41 uphill process of cache shelf.
Specifically, each above-mentioned barrier plate is each attached to as shown in figure 5, above-mentioned stopper 26 is vertically extending barrier plate
In connecting component 28, two groups of drivers 3 27 are equipped at intervals on above-mentioned 28 length extending direction of connecting component；On above-mentioned barrier plate
The position for being contacted with silicon wafer 1 is equipped with tilt guides 29.Tilt guides 26 play the role of adjusting 1 position of silicon wafer, it is ensured that silicon
Piece 1 is buffered frame in target location and takes away.Two groups of drivers 3 27 are set, balanced can be applied on five groups of stoppers 26
Driving force, it is ensured that the movement of five groups of 26 synchronism stabilities of stopper.In the present embodiment technical solution technical solution, above-mentioned driving 27 is excellent
Choosing uses cylinder, and those skilled in the art can convert the model and type of cylinder according to actual needs.
It is equipped with supporting beam 31 between circular belt 23, is equipped in above-mentioned supporting beam 31 and prolongs along 21 direction of transfer of conveyer belt
The correcting error guidance component 32 stretched, the other end of above-mentioned correcting error guidance component 32 is to 41 direction horizontal extension of cache shelf.It is fixed on branch
The correcting error guidance component 32 supportted on beam 31 is fixed, and belt 23 is introduced into correcting error guidance portion 32 when driving silicon wafer mobile, laggard
Enter target position, correcting error guidance component 32 herein adjusts silicon wafer along the width direction (i.e. perpendicular to its direction of transfer) of silicon wafer
Position, it is ensured that silicon wafer enters target position with object pose.
Further, when entering target position in order to ensure silicon wafer, stopper 26, cache shelf 41 are successively acted, the application
Proximity sensor 30 is equipped between two groups of belts 23 of all conveyer belts 21, above-mentioned proximity sensor 30 is mounted on supporting beam 31
On, above-mentioned proximity sensor 30 is arranged close to the center of bracket.When silicon wafer is close to target position, proximity sensor 30 is fed back
Signal, subsequent stopper 26 rise.By adjusting the delay between 30 feedback signal of proximity sensor and the rising of stopper 26, make
Stopper 26 when silicon wafer enters target position is obtained to rise immediately.3 27 feedback signal of driver after stopper 26 rises, it is then slow
Deposit the rising of frame 41.
Embodiment described above is only to absolutely prove preferred embodiment that is of the invention and being lifted, protection model of the invention
It encloses without being limited thereto.Those skilled in the art's made equivalent substitute or transformation on the basis of the present invention, in the present invention
Protection scope within.Protection scope of the present invention is subject to claims.
Claims (10)
1. a kind of silicon wafer caches machine, it is characterised in that: including cache mechanism and transmission mechanism；
The transmission mechanism has a multiple groups conveyer belt, the multiple groups conveyer belt successively laid out in parallel in the horizontal direction, and described more
Group conveyer belt is all connected with driver one, multiple groups conveyer belt synchronizing moving under the driving of driver one；The conveyer belt is used
In conveying silicon wafer and the silicon wafer is detached from conveyer belt and extends outward along the two sides edge perpendicular to its direction of transfer；
The target position in transmission direction of belt travel is arranged in the cache mechanism, and with multiple groups cache shelf, the multiple groups are slow
Frame successively laid out in parallel in the horizontal direction is deposited, and the multiple groups cache shelf is all connected with driver two, the multiple groups cache shelf is being driven
Synchronization lifting under the driving of dynamic device two；Every group of conveyer belt corresponds to one group of cache shelf and each cache shelf is arranged at therewith
The outside of corresponding conveyer belt；
Multiple brackets are equipped in cache shelf described in every group, what multiple brackets were spaced each other along the vertical direction is fixed on caching
On frame, the other end of the bracket extends to conveyer belt direction, has between two adjacent stents for accommodating the perpendicular of silicon wafer edge
Straight gap；
When silicon wafer on the conveyer belt is transferred into the target position, the two sides edge of the silicon wafer enters in cache shelf
Contour vertical gap therewith；When the cache shelf rises, the bracket bracketing silicon wafer rises, so that the silicon wafer on conveyer belt moves
In position to cache shelf；When the cache shelf declines, on the silicon slice charging to conveyer belt in cache shelf.
2. silicon wafer as described in claim 1 caches machine, it is characterised in that: each conveyer belt include it is parallel to each other and
Every two groups of belts of setting, the both ends of two groups of belts are respectively sleeved at a pair of of drive pulley and a pair of of driven pulley
On, the pair of drive pulley coaxial line is connected on driving shaft, and the pair of driven pulley coaxial line is connected to driven
On axis；The driving shaft of the multiple groups conveyer belt is connected two-by-two by shaft coupling, the integrated connection driving after all active axis connections
Device one.
3. silicon wafer as claimed in claim 2 caches machine, it is characterised in that: be equipped with resistance between two groups of belts of all conveyer belts
Lug-latch, stopper described in multiple groups are all connected with driver three, multiple groups stopper synchronization lifting under the driving of driver three；Edge
The outside of cache shelf is arranged in the direction of transfer of conveyer belt, the stopper；
When the edge of the silicon wafer enters vertical gap contour therewith in cache shelf, the stopper, which rises, stops silicon wafer.
4. silicon wafer as claimed in claim 3 caches machine, it is characterised in that: the stopper is vertically extending barrier plate, respectively
The barrier plate is each attached in connecting component, and two groups of drivers three are equipped at intervals on the connecting component length extending direction；
The position that silicon wafer is contacted on the barrier plate is equipped with tilt guides.
5. the silicon wafer as described in claim 1 or 3 or 4 caches machine, it is characterised in that: the driver three is cylinder.
6. silicon wafer as claimed in claim 2 caches machine, it is characterised in that: be equipped with and connect between two groups of belts of all conveyer belts
Nearly sensor, the proximity sensor are arranged close to the center of bracket.
7. silicon wafer as claimed in claim 2 caches machine, it is characterised in that: be equipped with supporting beam, the branch between circular belt
The correcting error guidance component extended along conveyer belt direction of transfer is installed, the other end of the correcting error guidance component is to caching on support beam
Frame direction horizontal extension.
8. silicon wafer as described in claim 1 caches machine, it is characterised in that: the multiple groups cache shelf is installed in sectional materials cage
On, the sectional materials cage is connected on two groups of screw rods being oppositely arranged, and the power end of two groups of screw rods passes through synchronous band connection
Driving motor.
9. silicon wafer as claimed in claim 8 caches machine, it is characterised in that: the cache shelf, which has, to be mounted on sectional materials cage
Vertical plate, what multiple brackets of each cache shelf were spaced each other along the vertical direction is fixed on the vertical plate；Each bracket
Two pairs of supporting plates are all had, two pairs of supporting plate backrest-types are mounted on vertical plate, positioned at two ipsilateral supporting plates along silicon wafer
The setting of direction of transfer interval.
10. silicon wafer as claimed in claim 8 caches machine, it is characterised in that: synchronous belt is equipped with tensioning wheel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910364021.4A CN110239877A (en) | 2019-04-30 | 2019-04-30 | Silicon wafer caches machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910364021.4A CN110239877A (en) | 2019-04-30 | 2019-04-30 | Silicon wafer caches machine |
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| Publication Number | Publication Date |
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| CN110239877A true CN110239877A (en) | 2019-09-17 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910364021.4A Withdrawn CN110239877A (en) | 2019-04-30 | 2019-04-30 | Silicon wafer caches machine |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114890056A (en) * | 2022-05-11 | 2022-08-12 | 宁德市利元亨智能装备有限公司 | Buffer memory device and production line |
| CN115799147A (en) * | 2023-01-17 | 2023-03-14 | 苏州桔云科技有限公司 | Wafer transmission device |
| CN115799139A (en) * | 2023-01-17 | 2023-03-14 | 苏州桔云科技有限公司 | Wafer transmission device with caching function |
| CN115872094A (en) * | 2023-02-23 | 2023-03-31 | 无锡江松科技股份有限公司 | Silicon wafer caching device and support initial position correcting device and correcting method thereof |
-
2019
- 2019-04-30 CN CN201910364021.4A patent/CN110239877A/en not_active Withdrawn
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114890056A (en) * | 2022-05-11 | 2022-08-12 | 宁德市利元亨智能装备有限公司 | Buffer memory device and production line |
| CN114890056B (en) * | 2022-05-11 | 2024-03-22 | 宁德市利元亨智能装备有限公司 | Caching device and production line |
| CN115799147A (en) * | 2023-01-17 | 2023-03-14 | 苏州桔云科技有限公司 | Wafer transmission device |
| CN115799139A (en) * | 2023-01-17 | 2023-03-14 | 苏州桔云科技有限公司 | Wafer transmission device with caching function |
| CN115799139B (en) * | 2023-01-17 | 2023-05-12 | 苏州桔云科技有限公司 | Wafer transmission device with buffer memory function |
| CN115872094A (en) * | 2023-02-23 | 2023-03-31 | 无锡江松科技股份有限公司 | Silicon wafer caching device and support initial position correcting device and correcting method thereof |
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Application publication date: 20190917 |