CN110234984A - Lighting device, means of illumination and filming apparatus - Google Patents

Lighting device, means of illumination and filming apparatus Download PDF

Info

Publication number
CN110234984A
CN110234984A CN201780083942.2A CN201780083942A CN110234984A CN 110234984 A CN110234984 A CN 110234984A CN 201780083942 A CN201780083942 A CN 201780083942A CN 110234984 A CN110234984 A CN 110234984A
Authority
CN
China
Prior art keywords
light
mentioned
illumination
emitting component
lighting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201780083942.2A
Other languages
Chinese (zh)
Inventor
马越昌一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Publication of CN110234984A publication Critical patent/CN110234984A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V14/00—Controlling the distribution of the light emitted by adjustment of elements
    • F21V14/02—Controlling the distribution of the light emitted by adjustment of elements by movement of light sources
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V23/00—Arrangement of electric circuit elements in or on lighting devices
    • F21V23/003—Arrangement of electric circuit elements in or on lighting devices the elements being electronics drivers or controllers for operating the light source, e.g. for a LED array
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/007—Array of lenses or refractors for a cluster of light sources, e.g. for arrangement of multiple light sources in one plane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • F21V5/043—Refractors for light sources of lens shape the lens having cylindrical faces, e.g. rod lenses, toric lenses
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21—LIGHTING
    • F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V5/00—Refractors for light sources
    • F21V5/04—Refractors for light sources of lens shape
    • F21V5/045—Refractors for light sources of lens shape the lens having discontinuous faces, e.g. Fresnel lenses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G01N21/474—Details of optical heads therefor, e.g. using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515—Objects of complex shape, e.g. examined with use of a surface follower device
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8809—Adjustment for highlighting flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G01N2021/8825—Separate detection of dark field and bright field
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8835—Adjustable illumination, e.g. software adjustable screen
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0638—Refractive parts

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)

Abstract

Present invention miniaturization and the lighting engineering that offer can illuminate object with a variety of lighting methods at low cost.Lighting device of the invention has: illumination region, has the 1st light-emitting component and the 2nd light-emitting component to shine to object；Optical system, have by the light distribution for light be emitted from the 1st light-emitting component be changed to the 1st light distribution and leaded light to object the 1st optical element, and by with 2nd light distribution different from the 1st light distribution from the light guide that the 2nd light-emitting component is emitted to object；And lighting control section, shining for the 1st light-emitting component and the 2nd light-emitting component is controlled independently of each other.

Description

Lighting device, means of illumination and filming apparatus
Technical field
The present invention relates to the lighting device illuminated to object and means of illumination, use the shooting of above-mentioned lighting device Device.
The disclosure of the specification of Japanese publication as shown below, attached drawing and claim is by referring to and by its institute Having content includes in this manual.
Japan Patent 2017-57449 (application on March 23rd, 2017).
Background technique
The lighting engineering illuminated to object is used in various fields.As one mode, such as in Japan Patent text It offers in 1 and records, the image of object is shot to object illumination light, and according to the shooting image come the inspection for the appearance for checking object Look into device.In the apparatus, equipped with the light source unit for being illuminated to the object being placed on objective table.Light source unit The object is illuminated with the top light source portion illuminated from surface to the object on objective table, from oblique upper more A rectangle light source portion and from multiple side light sources portion that side direction illuminates the object.Wherein, rectangle light source portion and Equiangularly compartment of terrain is configured in a manner of surrounding objective table in side light source portion.In the light source unit, selectively specify Corresponding to the light source portion for the subject area to be shot in object, illumination light is made to be irradiated on object from the light source portion.Then, it illuminates Subject area be taken by shoot part.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2016-57075 bulletin
Summary of the invention
The project solved is wanted in invention
Each light source portion used by the device of patent document 1 is recorded in single light distribution.For example, side light source portion quilt It is set to for illumination to be incident upon the substantially half of subject area.Therefore, according to the shape for the object for becoming inspection object, surface shape State exists and is unable to get to shoot to lighting condition required for the helpful image of inspection.For example, in order to avoid because of illumination Caused shade, preferably from the multi-direction illumination for carrying out light distribution diffusion.In addition, the scar etc. in order to check body surface, compared with Good is by reducing light distribution come the scattering light for the illumination light for determining illumination direction and observing scar part.Although there are such bases Shape, surface state or the content of inspection of object change the requirement of lighting method, but previous light source portion is difficult to meet State requirement.
Herein, in order to correspond to a variety of lighting methods, consideration is configured to prepare the mutually different multiple light sources portion of light distribution, according to Lighting method and so that light source portion is shone, but in this case, not can avoid enlargement, the installation cost of lighting device Increase.
The present invention is proposed in view of the above subject, its object is to miniaturization and at low cost provide can be with a variety of The lighting engineering that lighting method illuminates object, and the shooting that object can be suitably shot using the lighting engineering is provided Technology.
Means for solving the problems
1st mode of the invention is that, to the lighting device that object is illuminated, which has: illumination region has The 1st light-emitting component and the 2nd light-emitting component to shine to object；Optical system has the light that will be emitted from the 1st light-emitting component Light distribution is changed to the 1st light distribution and guide-lighting the 1st optical element to object, and by with 2nd light distribution different from the 1st light distribution from the The light guide of 2 light-emitting components outgoing is to object；And lighting control section, the 1st light-emitting component and the 2nd hair are controlled independently of each other Optical element shines.
In addition, the 2nd mode of the invention is the illumination illuminated using the 1st light-emitting component and the 2nd light-emitting component to object Method, the means of illumination control shining for the 1st light-emitting component and the 2nd light-emitting component independently of each other, dynamic thereby executing the 1st illumination Make at least one party in acting with the 2nd illumination, and the light distribution of the light illuminated to object can be adjusted, wherein the 1st illumination is dynamic Work is that light obtained from changing to the light distribution for the light being emitted from the 1st light-emitting component is guide-lighting to object as the 1st illumination light The movement of body；2nd illumination movement is to be changed to the light distribution for the light being emitted from the 2nd light-emitting component with the light distribution of the 1st illumination light not With light distribution obtained from light or using the light being emitted from the 2nd light-emitting component as the movement of the 2nd illumination light leaded light to object.
In addition, the 3rd mode of the invention is a kind of filming apparatus, have: objective table keeps object；Above-mentioned lighting device, Its object kept to objective table illuminates；And shoot part, shoot the object by lighting device lighting.
In the invention constituted in this way, if only the 1st light-emitting component shines in the 1st light-emitting component and the 2nd light-emitting component, object Body is illuminated by the light of the 1st light distribution.On the other hand, if only the 2nd light-emitting component shines, object is illuminated by the light of the 2nd light distribution.This Outside, if the 1st light-emitting component and the 2nd light-emitting component shine together, object is matched the 1st light distribution and the 2nd made of photosynthesis Another light distribution is illuminated.That is, illumination region is not arranged for every kind of lighting method, and pass through the 1st light-emitting component of selection and the 2nd hair Optical element it is luminous come with a variety of lighting methods illuminate object.
Invention effect
As described above, according to the present invention, by the hair for controlling the 1st light-emitting component and the 2nd light-emitting component independently of each other Light can illuminate object with a variety of lighting methods while can be avoided enlargement, the cost increase of device.
Multiple constituent elements possessed by above-mentioned each mode of the invention are not entirely necessary, above-mentioned in order to solve Project part or all, or in order to reach effect documented by this specification part or all, and suitably Its change, deletion and the replacement of other new constituent elements or limit are carried out to the constituent element of the part of above-mentioned multiple constituent elements It deletes the part for determining content.In addition, in order to solve above-mentioned problem part or all, or reach recorded in this specification Effect part or all, the technical characteristic that can also included by above-mentioned one mode of the present invention part or all, Part or all for the technical characteristic for being included with above-mentioned other modes of the present invention is combined, and is set as of the invention only A vertical mode.
Detailed description of the invention
Fig. 1 is the figure for indicating the 1st embodiment of lighting device of the invention.
Fig. 2 is the figure for schematically showing the lighting method of the object 2 based on lighting device shown in FIG. 1.
Fig. 3 is the figure for indicating the 2nd embodiment of lighting device of the invention.
Fig. 4 is the figure for indicating the 3rd embodiment of lighting device of the invention.
Fig. 5 is the figure for indicating to be equipped with the 1st embodiment of the check device of lighting device of the invention.
Fig. 6 is the figure for schematically showing the lighting method and style of shooting of check device shown in fig. 5.
Fig. 7 A is the figure for indicating to be equipped with the 2nd embodiment of the check device of lighting device of the invention.
Fig. 7 B is the figure for indicating to be equipped with the 3rd embodiment of the check device of lighting device of the invention.
Fig. 7 C is the figure for indicating to be equipped with the 4th embodiment of the check device of lighting device of the invention.
Fig. 8 A is the figure for indicating to be equipped with the 5th embodiment of the check device of lighting device of the invention.
Fig. 8 B is the line B-B arrowhead plan view of Fig. 8 A.
Fig. 8 C is the figure for schematically showing the connection relationship of illumination head and lighting control section.
Fig. 9 A is the figure for indicating to be equipped with the 6th embodiment of the check device of lighting device of the invention.
Fig. 9 B is the partial plan layout of check device shown in Fig. 9 A.
Figure 10 A is the figure for indicating to be equipped with the 7th embodiment of the check device of lighting device of the invention.
Figure 10 B is the figure for schematically showing the shift action of illumination head of check device shown in Figure 10 A.
Figure 11 A is the figure for indicating to be equipped with the 8th embodiment of the check device of lighting device of the invention.
Figure 11 B is the figure for schematically showing the shift action of illumination head of check device shown in Figure 11 A.
Figure 12 is the figure for indicating to be equipped with the 9th embodiment of the check device of lighting device of the invention.
Figure 13 is the figure for indicating to be equipped with the 10th embodiment of the check device of lighting device of the invention.
Figure 14 is the figure for indicating to be equipped with the 11st embodiment of the check device of lighting device of the invention.
Specific embodiment
A. lighting device
Fig. 1 is the figure for indicating the 1st embodiment of lighting device of the invention, and column (c) in the figure shows entirety Constitute, and by the column line A-A arrowhead view and line B-B arrowhead view respectively indicate in the column (a) and (b) column.In addition, Fig. 2 is the figure for schematically showing the lighting method of the object 2 based on lighting device shown in FIG. 1.Lighting device 1 is to object 2 devices illuminated, as shown in Figure 1, having: illumination region 12, with a plurality of light-emitting elements 11；Optical system 13, will From the light guide that each light-emitting component 11 is emitted to the lighting object region 21 of object 2；Driving unit 14 drives each light-emitting component 11；And lighting control section 15, shining for each light-emitting component 11 is controlled independently of each other.
In illumination region 12, such as column (b) of Fig. 1 and (c) shown in column, a plurality of light-emitting elements 11 are in 3 rows × 16 column matrix It is disposed in shape on substrate 121.Half in these light-emitting components 11 is functioned as " the 1st light-emitting component " of the invention, On the other hand, remaining half is functioned as " the 2nd light-emitting component " of the invention, by these the 1st light-emitting components and the 2nd Light-emitting component is configured in a manner of alternateing.In the present specification, in order to distinguish the 1st light-emitting component and the 2nd shine Element is suitably referred to as " the 1st light-emitting component 11a " and " the 2nd light-emitting component 11b ".
In this way, there is the case where 2 kinds of light-emitting component 11a, 11b accordingly with illumination region 12, in optical system 13, as An example of " the 1st optical element " of the invention and be provided with multiple collector lenses 131.More specifically, in optical system 13, Transparent substrate 132 for the parallel flat shape configured at the object side of illumination region 12 (upper side in column (c) of Fig. 1) is more A collector lens 131 is arranged to opposed with the 1st light-emitting component 11a one to one.Transparent substrate 132 is by making from light-emitting component 11 The light transmissive material of outgoing is constituted.Therefore, if light-emitting component 11a shines, the light being emitted from light-emitting component 11a passes through poly- on one side Optical lens 131 is guided to the lighting object region 21 of object 2 by optically focused on one side.On the other hand, if light-emitting component 11b shines, The light being emitted from light-emitting component 11b will not directly be guided to the lighting object region 21 of object 2 by collector lens 131.
Control signal that the luminous basis of each light-emitting component 11 is given from lighting control section 15 carries out.The control signal packet Containing the bright light with each light-emitting component 11/turn off the light and based on pulse width modulation (PWM:Pulse Width Modulation) The associated serial data of light modulation.The driving unit 14 for receiving the control signal has control signal expanding unit 141, Ji Yufa The driver 142 that optical element 11 is arranged with corresponding.If driving unit 14 receives above-mentioned control signal, pass through control Signal expanding unit 141 will control signal and be unfolded and generate the associated data (light-emitting component that shines with each light-emitting component 11 11 forward current value, the light modulation value based on PWM, bright light/turn off the light).Then, for each light-emitting component 11, driver 142 Light-emitting component 11 is driven according to above-mentioned data.Can be performed as a result, the movement (the 1st illumination movement) for only making light-emitting component 11a luminous, (the 1st illumination is dynamic for the movement (the 2nd illumination movement) for only making light-emitting component 11b luminous and the movement for keeping all light-emitting components 11 luminous Make the+the 2 illumination movement).
In the present embodiment, LED (light emitting diode is used as light-emitting component 11；Light Emitting Diode), the 1st light-emitting component 11a and the 2nd light-emitting component 11b has identical light distribution, i.e. a wide range of relative to the direction of illumination of light The wide light distribution of ground diffusion.Herein, so-called " light distribution " is to indicate light with which kind of angle, which kind of intensity illumination, such as Japanese industry mark The luminous intensity of quasi- (JIS) defined, expression primary source (light-emitting component 11) and secondary souce (optical system 13) is relative to angle The variation or distribution of degree.In the 1st illumination movement, the light being emitted from light-emitting component 11a is matched by collector lens 131 by optically focused Light changes, and is guided to the lighting object region 21 of object 2 as the 1st illumination light using the light distribution after the change.It is tied Fruit, such as shown in column (a) of Fig. 2, illumination zone can be reduced and relatively to increase the lighting method of illumination to object The lighting object region 21 of body 2 is illuminated.On the other hand, by executing the 2nd illumination movement, can make to go out from light-emitting component 11b The light penetrated does not pass through parallel flat part, with not changing the light distribution direct guide-lighting illumination pair to object 2 by collector lens 131 As region 21 is used as the 2nd illumination light.As a result, for example as shown in column (c) of Fig. 2, lighting object that can on a large scale to object 2 Region 21 is illuminated (the 2nd illumination movement).In addition, if all light-emitting components 11 is made to shine, (the+the 2 illumination of the 1st illumination movement is dynamic Make), such as shown in column (b) of Fig. 2, it can be to synthesize made of the light distribution of the 1st illumination movement and the light distribution of the 2nd illumination movement Intermediate light distribution, on a large scale illuminates the lighting object region 21 of object 2.
As described above, the 1st embodiment according to the present invention, only constitutes the more of illumination region 12 by control independently of each other Shining for a light-emitting component 11, can be illuminated with lighting object region 21 of 3 kinds of light distributions to object 2.That is, not having to every kind Dedicated illumination region is arranged in lighting method, and can be carried out by a variety of lighting methods to object 2 with miniaturization and at low cost Illumination.Further, since can change with turning off the light by switching the bright light of light-emitting component 11 and be irradiated to lighting object region 21 The light distribution of illumination light, therefore the switching of light distribution can be carried out in a short time.
Fig. 3 is the figure for indicating the 2nd embodiment of lighting device of the invention.2nd embodiment and the 1st embodiment Biggish difference is substantially the composition of illumination region 12 and optical system 13, other compositions are then identical as the 1st embodiment.With Under, it is illustrated centered on difference, the same symbol is indicated to same composition and is omitted the description.
In the illumination region 12 of the 2nd embodiment, a plurality of light-emitting elements 11 are disposed of the rectangular of the column of 2 rows × 16, and The light-emitting component for constituting upper section column is functioned as the 1st light-emitting component 11a, constitutes the light-emitting component of lower section column as the 2nd Light-emitting component 11b and function.In addition, correspondingly, in optical system 13, being equipped with linear Fresnel lens An example of (Fresnel lens) 133 as " the 1st optical element " of the invention.More specifically, in optical system 13, phase Upper section column (the 1st hair for being configured at the transparent substrate 132 of the parallel flat shape of the object side of illumination region 12, with illumination region 12 Optical element 11a) accordingly it is equipped with linear Fresnel lens 133.The linear Fresnel lens 133 answer the principle of Fresnel Lenses For cylindrical lens, straight line ditch has been set in parallel with the orientation X of the 1st light-emitting component 11a.
In the lighting device 1 constituted in this way, if according to the control signal assigned from lighting control section 15 only the 1st shine member Part 11a shines, then the light being emitted from the 1st light-emitting component 11a is concentrated on the arrangement of straight line ditch by linear Fresnel lens 133 Direction Y, as a result, illumination zone is contracted to only orientation Y, linearly to the lighting object region 21 of object 2 (referring to figure 1) (the 1st illumination movement) is illuminated.On the other hand, if only the 2nd light-emitting component 11b shines, in a same manner as in the first embodiment (the 2nd illumination movement) can be illuminated to the lighting object region 21 of object 2 directly in a manner of wide light distribution.In this way from line Property the light being emitted of the Fresnel Lenses 133 and light being emitted from the 2nd light-emitting component 11b, be respectively equivalent to " the 1st illumination of the invention An example of light " and " the 2nd illumination light ".
As described above, being only made up of multiple luminous members of illumination region 12 control independently of each other according to the 2nd embodiment Shining for part 11, can be illuminated with lighting object region 21 of 2 kinds of light distributions to object 2.That is, not having to be directed to every kind of illumination side Illumination region is arranged in formula, can be to minimize and be illuminated at low cost by a variety of lighting methods to object 2.In addition, the 2nd In embodiment, though it shines while without the 1st light-emitting component 11a and the 2nd light-emitting component 11b, if necessary, can also be same Shi Jinhang shines.In addition, also may replace linear Fresnel lens 133 and cylindrical lens is set and as " the 1st optics of the invention Element ".
Fig. 4 is the figure for indicating the 3rd embodiment of lighting device of the invention.3rd embodiment and the 1st embodiment Biggish difference is the composition of optical system 13, other compositions are then identical as the 1st embodiment.Hereinafter, in difference being The heart is illustrated, and is indicated the same symbol to identical composition and is omitted the description.
In the 3rd embodiment, in the light-emitting component 11 of composition illumination region 12, the light-emitting component 11c for constituting upper section column makees It is functioned for " the 3rd light-emitting component " of the invention.On the other hand, remaining light-emitting component is then in a same manner as in the first embodiment Ground is functioned as the 1st light-emitting component 11a and the 2nd light-emitting component 11b, and is configured with alternateing.Moreover, in optics It is upper with illumination region 12 relative to the transparent substrate 132 for the parallel flat shape configured in the object side of illumination region 12 in system 13 Section column (the 3rd light-emitting component 11c) are correspondingly provided with linear Fresnel lens 133, and with a pair of with the 1st light-emitting component 11a The corresponding mode in one ground is provided with multiple collector lenses 131.
In the lighting device 1 constituted in this way, if according to the control signal assigned from lighting control section 15 (referring to Fig.1), So that the 1st light-emitting component 11a is shone in a same manner as in the first embodiment, can two-dimensionally reduce illumination zone and with opposite The 1st light distribution (referring to column (a) of Fig. 2) that ground increases illumination illuminates the lighting object region 21 of object 2.In addition, if The 2nd light-emitting component 11b is only set to shine, the light being emitted from light-emitting component 11b can not pass through collector lens 131 and linear luxuriant and rich with fragrance alunite Your lens 133 and by parallel flat part, pass through the 2nd light distribution (referring to column (c) of Fig. 2) illumination to object 2 on a large scale Subject area 21 is illuminated.If the 1st light-emitting component 11a and the 2nd light-emitting component 11b is made to shine, to synthesize the 1st illumination movement Light distribution and the 2nd illumination movement light distribution made of intermediate light distribution (referring to column (b) of Fig. 2) on a large scale to the photograph of object 2 Bright subject area 21 is illuminated.In addition, if the 3rd light-emitting component 11c is only made to shine, from the light quilt of the 3rd light-emitting component 11c outgoing It is concentrated on the orientation of straight line ditch, and is contracted to the 3rd light distribution of the only orientation with illumination zone, linearly to object 2 lighting object region 21 is illuminated.
As described above, collector lens 131 and linear phenanthrene is respectively set using to transparent substrate 132 according to the 3rd embodiment Optical system 13 of the Nie Er lens 133 as an example of " the 1st optical element " and " the 2nd optical element " of the invention, only passes through Control independently of each other constitutes shining for a plurality of light-emitting elements 11 of illumination region 12, just being capable of illumination with 4 kinds of light distributions to object 2 Subject area 21 is illuminated.That is, the 3rd embodiment can be increased made of the 1st embodiment of combination and the 2nd embodiment Lighting method.In this way, being emitted in the 3rd embodiment from the light of the outgoing of collector lens 131 and from linear Fresnel lens 133 Light be respectively equivalent to an example of " the 1st illumination light " and " the 2nd illumination light " of the invention.
In addition, the composition of optical system 13 is not limited to embodiment above-mentioned, such as it can also be used and shine with composition The light-emitting component 11c of part in a plurality of light-emitting elements 11 in portion 12 is arranged in correspondence with linear Fresnel lens 133, and relative to The optical system 13 of collector lens 131 is arranged in remaining light-emitting component 11a in a manner of corresponding one to one.In this case, It optionally executes and the lighting method of illumination zone is two-dimensionally reduced and by shining by shining for light-emitting component 11a The lighting method luminous and that there is linear illumination zone of element 11c.
B. it is equipped with the check device of above-mentioned lighting device
Then, on one side referring to attached drawing, explanation to object illumination light and shoots the shadow of object by above-mentioned lighting device 1 on one side Picture, and the check device that the appearance of object is checked according to the shooting image.
Fig. 5 is the figure for indicating to be equipped with the 1st embodiment of the check device of lighting device of the invention.In addition, Fig. 6 is to show Meaning property earth's surface shows the lighting method of check device shown in fig. 5 and the figure of style of shooting.Check device 100 is to pass through Fig. 1 on one side Shown in lighting device the object (inspection object) 2 being placed on objective table (stage) 3 is illuminated, one side subject Body 2 and the device checked.In the check device 100, there is illumination head 16 in the top fixed configurations of objective table 3.The photograph Bright head 16 integrally keeps illumination region, optical system and the driving unit in the component parts of lighting device, and is come with corresponding to From the lighting method of the control signal of lighting control section 15, the object 2 on objective table 3 is illuminated from top.
In the lower side of illumination head 16, objective table 3 is set as moving freely on X, Y in the horizontal direction.The objective table 3 connection In loading table transferring mechanism 31.Moreover, loading table transferring mechanism 31 is according to the move from objective table drive control part 32 And actuation, thus objective table 3 moves on X, Y in the horizontal direction, can will be from the illumination that illumination head 16 is emitted to object 2 Desired region.That is, in the present embodiment, illumination head 16 is set as relatively moving relative to object 2, and can cut Change the lighting object region 21 (Fig. 6) of object 2.
In order to shoot the lighting object region 21 illuminated by illumination head 16, shooting camera 4 is configured in objective table 3 Oblique upper.The shooting camera 4 will shoot lighting object region 21 and obtain image corresponding to image data be transmitted to figure As processing unit 41.On the other hand, image processing part 41 is taken into the image data from shooting camera 4, and carry out binaryzation etc. Image procossing.
Check device 100 has the control unit 5 for each portion of control device.Control unit 5 is in addition to above-mentioned illumination control Other than portion 15 processed, objective table drive control part 32 and image processing part 41, also there is arithmetic processing section 51 and memory 52.Storage Various data in the storage inspection of device 52 program, initial setting etc., device action.On the other hand, arithmetic processing section 51 has and holds Known CPU (the central processing unit of row logical operation；Central Processing Unit), and according to being pre-stored within The inspection program of memory 52 controls each portion of device to carry out the visual examination of object 2.In particular, in present embodiment In, as will be explained below, lighting method is switched according to visual examination content, is achieved in the promotion for checking precision.
In check device 100, lighting device is made of lighting control section 15 and illumination head 16, specific to constitute and scheme Lighting device 1 shown in 1 is identical.Such as lighting method shown in column (c) with Fig. 2 illuminates object 2, it thus can be to shape The lighting object region 21 of shape complexity is not easy to generate the shooting of shade because of illumination.On the other hand, with the column (a) institute of Fig. 2 The lighting method shown illuminates object 2, thus can also shoot the concave-convex shade for being present in lighting object region 21, thus It is easy to determine check object of the bumps for based on situation caused by defect or scar when.Therefore, it is intended that according to the shape of object 2 Shape, surface state etc. switch lighting method.In this regard, illustrating an example of object 2 and being carried out to the switching of specific lighting method Explanation.In addition, herein, on one side referring to Fig. 6, illustrating that shooting has the object 2 of horizontal plane 22, gently sloping surface 23 and greatly sloped side 24 on one side And the switching of the lighting method when inspection of horizontal plane 22 is carried out according to these shooting image.
If the object 2 for becoming check object is placed on objective table 3 by the conveying machine people of illustration omitted or user, Arithmetic processing section 51 according to the inspection program for being pre-stored within memory 52 come each portion of control device and carry out object 2 illumination, Shooting and inspection.Shooting become check object when including the object 2 on inclined-plane other than horizontal plane 22, if by inclined-plane The light of mirror-reflection is directly transmitted to shooting camera 4, it is likely that causes adverse effect to shooting image.Such as such as Fig. 6 (a) shown in column, there is region, the i.e. lighting object region 21 illuminated by illumination head 16 in addition to horizontal plane in the surface of object 2 There is also the light of shooting camera 4 in the case where gently sloping surface 23, is directly transmitted to by 23 mirror-reflection of gently sloping surface very other than 22 It is few.It therefore, will not be to bat even if being illuminated with the 2nd wide light distribution that the direction of illumination relative to light is spread on a large scale It takes the photograph image and causes adverse effect, and can inspection AQL face 22 well.However, if objective table 3 it is mobile and such as the column (b) of Fig. 6 institute Show, it is direct by 24 mirror-reflection of greatly sloped side in lighting object region 21 there is also when greatly sloped side 24 other than horizontal plane 22 The amount for being incident to the light of shooting camera 4 can become more, and there are the feelings for being difficult to that image appropriate is obtained by shooting camera 4 Condition is switched to the 1st light distribution for reducing illumination zone by the illumination for being carried out illumination head 16 (referring to Fig. 2's in this case (a) column), it is able to suppress the case where reflected light from greatly sloped side 24 is incident to shooting camera 4, it can be by shooting camera 4 shoot the preferable image for the inspection of horizontal plane 22.
As described above, according to the check device 100 equipped with lighting device of the invention, it can be according to the shape etc. of object 2 Switch lighting method, the preferable image for inspection can be shot, as a result, inspection can be accurately proceed.
Further, since by the bright light of light-emitting component 11 and can turn off the light and carry out the switching of lighting method, that is, pass through cutting Control is changed to carry out the switching of lighting method, therefore compared to the existing skill for the switching for mechanically carrying out lighting method Art, time needed for can significantly shortening switching.In particular, check device 100 has to check for the object 2 of multi items, so as to The technical characteristic for switching lighting method in a short time is useful in the extreme.
Also, in the check device using existing lighting device, by handling as obtained by multiple illumination/shooting Multiple images and obtain inspection result, but in the check device 100 of present embodiment there is also using by illumination head 16 come It changes the characteristic of the light distribution of illumination light and reduces 1 time and check that the example for the shooting number that should be carried out in this case can be substantially Shorten the review time in ground.
In this way, lighting control section 15 and illumination head 16 " shine as of the invention in Fig. 5 and embodiment shown in fig. 6 Bright device " and function, shooting camera 4 functioned as " shoot part " of the invention, by these and 3 groups of objective table Component made of conjunction is functioned as " filming apparatus " of the invention.
However, fixed configurations have an illumination head 16 in above-mentioned check device 100, but for example as shown in figure 7 a can also be with Illumination head 16 is configured to go up and down along vertical direction (the 2nd embodiment of check device).In this embodiment, it compares Bright head 16 connects head moving mechanism 161, is instructed according to the lifting assigned from the head drive control part 162 for being set to control unit 5 Head moving mechanism 161 is acted, thus can adjust relative positional relationship of the illumination head 16 relative to object 2 in vertical direction. Therefore, make to illuminate item by the irradiation distance that position adjustment can change illumination head 16 to the distance of object 2, i.e. illumination light Part is suitably changed.In this way in the 2nd embodiment, the combination of head moving mechanism 161 and head drive control part 162 is equivalent to the present invention " head driving portion " and " position adjustment section " an example.
In addition, for example can also be configured to illumination head 16 can be around the rotation axis with horizontal direction parallel as shown in Figure 7 B AX1 rotates (the 3rd embodiment of check device).In this embodiment, head rotating mechanism 163 is connected to illumination head 16, And a rotating mechanism 163 is acted according to the rotation command assigned from the head drive control part 162 for being set to control unit 5, Thus it enables that illumination head 16 rotates to adjust the relative positional relationship relative to object 2 using rotation axis AX1 as center of rotation.Cause This, can make the shadow surface of illumination light meet the inclination around the lighting object region 21 of rotation axis AX1 by position adjustment.This For sample in the 3rd embodiment, the combination of head rotating mechanism 163 and head drive control part 162 is equivalent to " head driving of the invention An example of portion " and " position adjustment section ".
Rotation direction is not limited to using above-mentioned rotation axis AX1 as the direction of center of rotation, such as seen in figure 7 c may be used To be configured to that (the 4th embodiment of check device) can be rotated around the rotation axis AX2 different from rotation axis AX1.In the embodiment party In formula, head rotating mechanism 164 is connected to illumination head 16, and according to from 162 institute of head drive control part for being set to control unit 5 The rotation command of imparting acts a rotating mechanism 164, thus it enables that illumination head 16 is rotated by center of rotation of rotation axis AX2 To adjust the relative positional relationship relative to object 2.Therefore, by the position adjustment can make illumination light shadow surface meet around The inclination in the lighting object region 21 of rotation axis AX2.In this way in the 4th embodiment, head rotating mechanism 164 and head drive control The combination in portion 162 is equivalent to an example of " head driving portion " and " position adjustment section " of the invention.
Illumination head 16 is not limited to single direction relative to the relative position adjustment of object 2, can also be compoundly by this It is combined.Such as it is also configured to set illumination head 16 to move along vertical direction and around rotation axis AX1, AX2 It is dynamic, and so that illumination head 16 is rotated mechanism (illustration omitted) towards 3 by head according to the instruction from head drive control part 162 Direction is mobile and makes its rotation, so as to adjust the relative positional relationship relative to object 2.In addition, herein, head rotates mechanism And the combination of head drive control part 162 is equivalent to an example of " head driving portion " and " position adjustment section " of the invention.
Fig. 8 A is the figure for indicating to be equipped with the 5th embodiment of the check device of lighting device of the invention.In addition, Fig. 8 B is The line B-B arrowhead plan view of Fig. 8 A.Also, Fig. 8 C is the connection relationship for schematically showing illumination head and lighting control section Figure.In the check device 100 of the 5th embodiment, objective table 3 freely turns around the rotation axis AX3 extended along vertical direction It is dynamic.Objective table 3 is connected to objective table rotating mechanism 33.Moreover, objective table rotating mechanism 33 is according to from objective table drive control The rotation command in portion 32 and act, thus make objective table 3 around rotation axis AX3 rotate.In addition, multiple illumination heads 17 are carried with surrounding The mode for the object 2 being placed on objective table 3 is configured, and can annularly be illuminated from side direction to object 2.In this way, more A illumination head 17 functions as side direction light source portion and carries out ring-shaped lighting.
Each illumination head 17 integrally keeps illumination region 12 in the component parts of lighting device 1 shown in Fig. 3, optical system 13 and driving unit 14.As shown in Figure 8 C, the driving unit 14 of illumination head 17 is connected by 2 systems and 15 cable of lighting control section It connects.Moreover, in the same manner as above-mentioned lighting device 1, if serial data is transferred to as control signal from lighting control section 15 Then control signal is unfolded for each driving unit 14, and will become the forward current value of the LED of control information, based on the light modulation of PWM Value, bright light/turn off the light etc. are sent to driver 142 (referring to Fig.1).As a result, by only making light-emitting component 11a shine, such as Fig. 8 A institute Show, linear illumination light is irradiated to the object 2 on objective table 3, and is utilized from close with the check object face 25 of object 2 The complete cycle for the 1st light distribution that parallel angle is reduced illuminates.On the other hand, though omitting icon in fig. 8 a, by only making to send out Optical element 11b shines and can illuminate on a large scale to object 2 from side direction.
It, can be from vertical as shown in Figure 8 A configured with shooting camera 4 above the vertical of object 2 to be illuminated in this way The check object face 25 of top shooting object 2.It therefore, only just can 2 by controlling the luminous of light-emitting component 11 independently of each other Kind light distribution illuminates the check object face 25 of object 2.That is, not having to that illumination region, Neng Gou little is arranged for every kind of lighting method Type and object 2 is illuminated with a variety of lighting methods at low cost.In particular, in this embodiment, as check object The object 2 of object is located at the central part for the ring-shaped lighting system being made of multiple illumination heads 17, carries out complete cycle with above-mentioned 1st light distribution Illumination carries out the shooting based on shooting camera 4 in the state of carrying out the dark field illumination of low angle.Therefore, it can shoot It is present in the subtle scar etc. in check object face 25.As a result, the visual examination of object 2 can be accurately proceed.
Fig. 9 A is the figure for indicating to be equipped with the 6th embodiment of the check device of lighting device of the invention.In addition, Fig. 9 B is The partial plan layout of check device shown in Fig. 9 A.The check device 100 and the 5th embodiment of 6th embodiment are biggish The difference lies in that composition relevant to lighting device and shooting camera, other compositions are substantially identical as the 5th embodiment. Therefore, in the following description, it is illustrated centered on difference, and the same symbol is indicated to identical composition and omits composition Explanation.
In the 6th embodiment, identically as the 5th embodiment, the objective table of the object 2 as inspection object is loaded 3 connect with objective table rotating mechanism 33, make objective table rotating mechanism according to the rotation command from objective table drive control part 32 33 act and rotate objective table 3 around rotation axis AX3.In addition, multiple illumination heads 16 are to surround mounting in vault (doom) shape It is configured in the mode of the object 2 on objective table 3.More specifically, the mutually different 4 ring-shaped lighting systems of ring diameter are provided with Unite 18A~18D, can annularly carry out to object 2 in side direction, the 1st tilted direction, the 2nd tilted direction and 4 stages of top Illumination.
In these, the ring-shaped lighting system 18A of the maximum paragraph 1 of ring diameter is to surround the object being placed on objective table 3 The mode of body 2 is configured with multiple illumination heads 16, can annularly be illuminated from side direction to object 2.In addition, being shone in the ring-type It, just can be two-dimensionally to reduce the 1st light distribution of illumination zone (referring to Fig. 2's if only light-emitting component 11a shines in bright system 18A (a) column) from side direction to object 2 to carry out ring-shaped lighting.In addition, if only light-emitting component 11b shines, it can be wide to illuminate The 2nd light distribution (referring to column (c) of Fig. 2) spread to range carries out ring-shaped lighting to object 2 from side direction.In addition, if shining member Part 11a, 11b shine, then can carry out ring-shaped lighting to object 2 from side direction with intermediate light distribution (referring to column (b) of Fig. 2). Other ring-shaped lighting system 18B~18D are configured to and ring-type other than ring diameter is different and the direction of illumination of illumination light is different Lighting system 18A is identical.It so in the present embodiment, can be with mutually different 3 kinds of light distributions to the object 2 on objective table 3 It is illuminated.Moreover, by controlling the light modulation value based on PWM the Illumination Distribution of ring-shaped lighting can be adjusted, with light distribution.For This point, it is also the same such in the embodiment illustrated later.
In addition, in order to from various angle shot objects 2, and in multiple positions in the gap of illumination head 16, respectively each configuration There is 1 shooting camera 4.In addition, being shone to be visually distinguish with illumination head 16 shooting in Fig. 9 A and Fig. 9 B Camera 4 indicates point (dot).It is also the same such in the embodiment illustrated later for this point.
In the check device 100 constituted in this way, only by controlling shining for light-emitting component 11 independently of each other, just can Object 2 is illuminated with 3 kinds of light distributions.That is, do not have to that illumination region is arranged for every kind of lighting method, just can minimize and it is low at It is local that object 2 is illuminated with a variety of lighting methods.
In addition, in the 6th embodiment, though all ring-shaped lighting system 18A~18D are constituted with illumination head 16, in order to Check the scar etc. for being present in the upper surface of the object 2 as inspection object, it can also be in a same manner as in the fifth embodiment using low The ring-shaped lighting of angle.That is, the ring-shaped lighting system 18A of paragraph 1 can also be made of illumination head 17.However, the ring-shaped lighting The ring diameter of system 18A is larger, and illumination head 17 to object 2 illumination light irradiation distance it is relatively large.Accordingly, there exist because shining It spends low, illumination light diffusion and is difficult to shoot the situation of scar for the upper surface for being present in object 2 etc. well.Therefore, compared with The good illumination head 17 for head moving mechanism 161 to be connected to composition ring-shaped lighting system 18A, and passing through ring-shaped lighting system 18A makes illumination head 17 close to object 2 (the 7th embodiment) when illuminating to object 2.Hereinafter, 0A and figure referring to Fig.1 on one side 10B is on one side illustrated the check device 100 of the 7th embodiment.
Figure 10 A is the figure for indicating to be equipped with the 7th embodiment of the check device of lighting device of the invention.In addition, Figure 10 B It is the figure for schematically showing the shift action of illumination head of check device shown in Figure 10 A.The inspection of 7th embodiment fills Set 100 biggish to the 6th embodiment the difference lies in that composition relevant with lighting device, other constitute substantially real with the 6th It is identical to apply mode.Therefore, in the following description, it is illustrated centered on difference, the same symbol is indicated to identical composition And it omits and constitutes explanation.
In the 7th embodiment, though identically as the 6th embodiment, it is provided with ring diameter mutually different 4 cyclic annular photographs Bright system 18A~18D, but ring-shaped lighting system 18A therein is made of illumination head 17.Moreover, as shown in Figure 10 A, each Illumination head 17 is connected with head moving mechanism 161.Moreover, being directed to each illumination head 17, head moving mechanism 161 is controlled according to from the beginning driving Move that portion 162 processed is assigned and act, thus, it is possible to adjust 17 phase of illumination head radially of cyclic annular lighting system 18A For the relative positional relationship of object 2.Therefore, illumination head 17 can be changed to the distance of object 2, i.e. photograph by position adjustment The irradiation distance of Mingguang City, and lighting condition is suitably changed.
In the 7th embodiment constituted in this way, as shown in Figure 10 B, according to the big of the object 2 being placed on objective table 3 It is small, constitute a part of the illumination head 17 of ring-shaped lighting system 18A close to object 2, by only close 17 bright light of illumination head, The dark field illumination of low angle can be carried out with higher illumination.As a result, the upper surface for being present in object 2 can be shot well Subtle scar etc., and the visual examination of object 2 can be accurately proceed.In this way in the 7th embodiment, head moving machine The combination of structure 161 and head drive control part 162 is equivalent to an example of " head driving portion " and " position adjustment section " of the invention.
In addition, in fig. 1 ob, though making the half for constituting the illumination head 17 of ring-shaped lighting system 18A close to object 2, The selecting of mobile illumination head 17, moving distance be it is any, preferably set according to the size of object 2.For example, preferably with Object 2 become smaller make the illumination head 17 of selection number reduce and so that moving distance is become larger.In addition, preferably such as Figure 11 A and Shown in Figure 11 B, corresponding to reduce illumination head 17 dark field illumination range and make the shooting being configured above the vertical of object 2 Camera 4 is close to object 2 (the 8th embodiment).In the 8th embodiment, being connected with to above-mentioned shooting camera 4 makes its edge Vertical direction lifting camera movement mechanism 42.Moreover, camera movement mechanism 42 is according to from being set to control unit 5 The lifting that camera drive control part 43 is assigned is instructed and is acted, thus it enables that shooting camera 4 is moved along vertical direction It moves and adjusts the relative positional relationship relative to object 2.Therefore, it is adjusted by the position, is emitted from the object 2 of dark field illumination Light with sufficient light quantity be taken camera 4 receive, can certainly shoot the dark field picture of object 2.As a result, it is possible to More good picture quality shooting is present in the subtle scar etc. of the upper surface of object 2, is capable of the outer of further lifting object 2 See the precision checked.
Figure 12 is the figure for indicating to be equipped with the 9th embodiment of the check device of lighting device of the invention.9th embodiment party The check device 100 of formula is attached with head and rotates mechanism (province's sketch map relative to check device 100 shown in Fig. 9 A and Fig. 9 B Show) and head drive control part 162.Head rotates mechanism with shown in head moving mechanism 161 shown in constitutional diagram 7A and Fig. 7 B Head rotating mechanism 163 and adjust function of the illumination head 16 relative to the relative position for the object 2 being placed on objective table 3.And And head rotates mechanism and is connected to the illumination head 16 in dome-shaped configured, head rotates mechanism according to from setting Be placed in that the head drive control part 162 of control unit 5 assigned rotates instruction and acts, and thus, it is possible to adjust illumination head 16 Relative positional relationship relative to object 2.In addition, other constitute substantially with 100 phase of check device shown in Fig. 9 A and Fig. 9 B Together.
In the check device 100 constituted in this way, illumination is adjusted according to the shape for the object 2 being placed on objective table 3 First 16 position, thus, it is possible to reasonably shoot object 2.Such as shown in figure 12, checking section shape for substantially I shape When object 2, position adjustment below is carried out.
Make to constitute a part of the illumination head 16 of ring-shaped lighting system 18A towards the radially inner side of ring-shaped lighting system 18A It is mobile and close to object 2, and rotate remaining illumination head 16 obliquely；
Make to constitute a part of the illumination head 16 of ring-shaped lighting system 18C towards the radially inner side of ring-shaped lighting system 18C It is mobile and close to object 2.
Later, object 2 is illuminated using the illumination head 16 of ring-shaped lighting system 18A, 18C, thus, it is possible to shoot simultaneously The preferable image for the scar of the scar inspection of the upper flat face 26 of object 2 and lower flat face 27 checks.As a result, Can shoot well be present in upper flat face 26 and lower flat face 27 subtle scar etc., can in a short time, And it is accurately proceed the visual examination of object 2 with complex shape.In this way, head rotates machine in the 9th embodiment The combination of structure and head drive control part 162 is equivalent to an example of " head driving portion " and " position adjustment section " of the invention.
In addition, in the present embodiment, being also configured to enter to make objective table 3 to go up and down to 33 groups of objective table rotating mechanism Loading table transferring mechanism, and go up and down objective table 3 according to shape of object 2 etc., so as to adjust object 2 and illumination head 16 Positional relationship.In addition it is also possible to be configured to part or all of illumination head 16 being replaced into illumination head 17 and executable scotopia Open country illumination.It is also the same such in the following embodiments for this point.
Figure 13 is the figure for indicating to be equipped with the 10th embodiment of the check device of lighting device of the invention.10th implements The check device 100 of mode is attached with camera movement rotating mechanism and (saves sketch map relative to check device 100 shown in Figure 12 Show) and camera drive control part 43.Camera movement rotating mechanism has been provided simultaneously with identical by rotating mechanism with head Mechanism and making shoot mechanism that camera 4 is moved forward and backward towards object 2 and make to shoot camera 4 and rotate and make around rotation axis The mechanism of shooting angle change, and there is opposite position of the adjustment shooting camera 4 relative to the object 2 being placed on objective table 3 The function of setting.Moreover, being connected with camera movement rotating mechanism, camera movement rotating mechanism on each shooting camera 4 According to assigned from the camera drive control part 43 for being set to control unit 5 rotate instruction and act, thus, it is possible to Relative positional relationship of the adjustment shooting camera 4 relative to object 2.Furthermore other, which are constituted, substantially checks with shown in Figure 12 Device 100 is identical.
In the check device 100 constituted in this way, illumination is adjusted according to the shape for the object 2 being placed on objective table 3 First 16 position and the position for shooting camera 4, thus, it is possible to reasonably shoot object 2.Such as shown in figure 13, to surround After the mode of object 2 positions illumination head 16 and shooting camera 4, the illumination head 16 using ring-shaped lighting system 18A~18D is right Object 2 is illuminated, and thus, it is possible to shoot object 2 while equably illuminating to object 2.As a result, it is possible to short Time is interior and is accurately proceed the visual examination of object 2.In this way, head rotates mechanism and head in the 10th embodiment The combination of drive control part 162 is equivalent to an example of " head driving portion " and " position adjustment section " of the invention.
Figure 14 is the figure for indicating to be equipped with the 11st embodiment of the check device of lighting device of the invention.11st implements In the check device 100 of mode, instead of the objective table rotating mechanism 33 of check device 100 shown in Figure 12, and it is provided with loading Platform rotates mechanism 35.In addition, other compositions are identical as the check device 100 of the 10th embodiment.
Objective table, which rotates mechanism 35 and adds relative to objective table rotating mechanism 33, makes objective table 3 along vertical direction liter The loading table transferring mechanism of drop, and the objective table 3 with mounting as the object 2 of inspection object is connect.Moreover, objective table is mobile Rotating mechanism 35 is acted according to the move from objective table drive control part 32, thus it enables that the lifting of objective table 3 is simultaneously Object 2 is positioned at the position suitable for shooting.
In the check device 100 constituted in this way, vertical is adjusted according to the size for the object 2 being placed on objective table 3 The height and position of objective table 3 on direction and the position of illumination head 16, thus, it is possible to reasonably shoot object 2.Such as such as Figure 14 When the laminal object 2 of shown inspection, position adjustment below is carried out:
Being located at object 2 and increase objective table 3 makes shooting face (illustration omitted) towards the shooting below vertical The underface of camera 4；
To constitute the illumination direction court of the illumination head 16 of the close ring-shaped lighting system 18D of above-mentioned shooting camera 4 Mode inwardly rotates illumination head 16.
Later, object 2 is illuminated using the illumination head 16 of ring-shaped lighting system 18D, thus, it is possible to shoot to object 2 Inspection for preferable image.As a result, the illumination tune that can not only make up by the movable configuration of illumination head 16 can be carried out It is whole, so as to improve the versatility of check device 100.In this way in the 11st embodiment, head rotates mechanism and head drives The combination of dynamic control unit 162 is equivalent to an example of " head driving portion " and " position adjustment section " of the invention.
C. other
In addition, the present invention is not limited to above embodiment, can be carried out without departing from its purport other than the above Various changes.For example, in the above-described embodiment, matched though changing using collector lens 131, linear Fresnel lens 133 Light, but also light distribution can be changed by other optical lenses.
In addition, being filled in the inspection for using multiple illumination heads 16 (or 17) to illuminate the object 2 as inspection object It sets in 100, such as shown in Figure 8 C, by 2 cable systems come transmission of control signals, but the Transmission system for controlling signal is not It is defined in this, it can also be by 1 or 3 or more cable system come transmission of control signals.
In the check device 100 of the 5th embodiment to the 11st embodiment, though make on one side object 2 with objective table 3 together Rotation shoots the image of object 2 on one side, but object 2 is made to rotate or rotate not necessarily condition, object 2 can also be maintained solid A series of processing (illumination/shooting/inspection) is carried out in the state of fixed.
In addition, in the check device 100 of the 5th embodiment to the 11st embodiment, though by multiple illumination heads 16 (or 17) it annularly arranges and constitutes ring-shaped lighting system 18A~18D, but the arrangement of illumination head 16 (or 17) is not limited to ring Shape can also be arranged in polygonal shape.
In addition, in the check device 100 of the 6th embodiment to the 11st embodiment, by the way that 4 ring-shaped lighting systems are arranged System 18A~18D and multiple illumination heads 16 (or 17) are configured to dome-shaped, but the number of ring-shaped lighting system, configuration etc. are not It is defined in this.
In addition, carrying out object while lighting device 1 through the invention illuminates object 2 applying among the above The check device 100 of the visual examination of body 2, but the application of lighting device 1 is not limited to this.Such as it can be used as and be provided to The discharge opening of nozzle is shot while to illuminating from the nozzle of discharge opening discharge liquid (treatment fluid, ink etc.) and is carried out The filming apparatus of observation, the shooting for shooting sample while having the sample of cell etc. to illuminate culture and being observed fill The shooting dress for setting, shooting forming object while to illuminating using the obtained forming object of three-dimensional printer and being observed The lighting device set etc. and use.
More than, invention is illustrated by specific embodiment, but the explanation be not intended to limited meaning into Row is explained.If referring to the explanation of invention, the various modifications example of revealed embodiment and other embodiment party of the invention Formula similarly, can be versed in those skilled in the art and be known.Therefore, the range of the request patent protection of accompanying is not It is detached from the range of the true scope of invention, includes the variation or embodiment.
Industrial availability
The present invention can be applied to the lighting device that all pairs of objects are illuminated and means of illumination and use above-mentioned photograph The filming apparatus of bright device.
Symbol description
1 lighting device
2 objects
3 objective tables
4 shootings camera (shoot part)
The 1st light-emitting component of 11a
The 2nd light-emitting component of 11b
The 3rd light-emitting component of 11c
12 illumination regions
13 optical systems
15 lighting control sections
16,17 illumination head
31 loading table transferring mechanisms (position adjustment section)
32 objective table drive control parts (position adjustment section)
33 objective table rotating mechanisms
35 objective tables rotate mechanism (position adjustment section)
100 check devices
131 collector lenses (the 1st optical element)
133 linear Fresnel lens (the 1st optical element, the 2nd optical element)
161 head moving mechanisms (position adjustment section)
162 drive control parts (position adjustment section)
163,164 rotating mechanisms (position adjustment section).

Claims (12)

1. a kind of lighting device, illuminates object, which is characterized in that the lighting device has:
Illumination region has the 1st light-emitting component and the 2nd light-emitting component to shine to above-mentioned object；
Optical system, it is simultaneously guide-lighting to above-mentioned with the light distribution for the light being emitted from above-mentioned 1st light-emitting component is changed to the 1st light distribution 1st optical element of object, and the light that will be emitted with 2nd light distribution different from above-mentioned 1st light distribution from above-mentioned 2nd light-emitting component Leaded light is to above-mentioned object；And
Lighting control section controls shining for above-mentioned 1st light-emitting component and above-mentioned 2nd light-emitting component independently of each other.
2. lighting device according to claim 1, which is characterized in that
Above-mentioned 1st light-emitting component and above-mentioned 2nd light-emitting component are emitted the light of above-mentioned 2nd light distribution,
The light being emitted from above-mentioned 2nd light-emitting component is remained above-mentioned 2nd light distribution and guide-lighting to above-mentioned object by above-mentioned optical system.
3. lighting device according to claim 1, which is characterized in that
The 2nd light that there is above-mentioned optical system the light distribution for making the light being emitted from above-mentioned 2nd light-emitting component to be changed to above-mentioned 2nd light distribution Learn element.
4. lighting device according to claim 3, which is characterized in that
Above-mentioned illumination region also has the 3rd light-emitting component to shine to above-mentioned object,
Above-mentioned 1st light-emitting component and above-mentioned 3rd light-emitting component are emitted 3 different from above-mentioned 1st light distribution and above-mentioned 2nd light distribution The light of light distribution,
The light being emitted from above-mentioned 3rd light-emitting component is remained above-mentioned 3rd light distribution and guide-lighting to above-mentioned object by above-mentioned optical system,
Above-mentioned lighting control section relative to above-mentioned 1st light-emitting component and above-mentioned 2nd light-emitting component it is luminous independently control it is above-mentioned 3rd light-emitting component shines.
5. lighting device according to claim 3 or 4, which is characterized in that
Above-mentioned 1st optical element is collector lens, and above-mentioned 2nd optical element is cylindrical lens or linear Fresnel lens.
6. lighting device according to any one of claim 1 to 5, which is characterized in that
Above-mentioned lighting device is also equipped with illumination head, which is arranged to, and integrally keeps above-mentioned illumination region and above-mentioned optical system It can be relatively moved relative to above-mentioned object while system.
7. lighting device according to claim 6, which is characterized in that
Above-mentioned lighting device is also equipped with a driving portion, this driving portion moves above-mentioned illumination head relative to above-mentioned object.
8. a kind of means of illumination illuminates object using the 1st light-emitting component and the 2nd light-emitting component, which is characterized in that
The means of illumination controls shining for above-mentioned 1st light-emitting component and above-mentioned 2nd light-emitting component independently of each other, thereby executing the At least one party in 1 illumination movement and the 2nd illumination movement, and the light distribution of the light illuminated to above-mentioned object can be adjusted, In, above-mentioned 1st illumination movement be using to light obtained from being changed from the light distribution for the light that above-mentioned 1st light-emitting component is emitted as 1st illumination light and the guide-lighting movement to above-mentioned object；Above-mentioned 2nd illumination movement is the light that will be emitted from above-mentioned 2nd light-emitting component Light distribution be changed to light obtained from the light distribution different from the light distribution of above-mentioned 1st illumination light or will be from above-mentioned 2nd light-emitting component The light of outgoing is as the guide-lighting supreme movement for stating object of the 2nd illumination light.
9. a kind of filming apparatus, which is characterized in that have:
Objective table keeps object；
The lighting device as claimed in claim 6 that the above-mentioned object kept to above-mentioned objective table is illuminated；And
Shoot part is shot to by the above-mentioned object of above-mentioned lighting device lighting.
10. filming apparatus according to claim 9, which is characterized in that
Above-mentioned filming apparatus is also equipped with position adjustment section, which makes in above-mentioned objective table and above-mentioned illumination head at least One side is mobile to adjust relative positional relationship of the above-mentioned illumination head relative to above-mentioned object.
11. filming apparatus according to claim 10, which is characterized in that
Above-mentioned position adjustment section has the head moving mechanism for keeping above-mentioned illumination head mobile.
12. filming apparatus described in 0 or 11 according to claim 1, which is characterized in that
Above-mentioned position adjustment section has the loading table transferring mechanism for keeping above-mentioned objective table mobile.
CN201780083942.2A 2017-03-23 2017-11-30 Lighting device, means of illumination and filming apparatus Pending CN110234984A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2017-057449 2017-03-23
JP2017057449A JP2018159650A (en) 2017-03-23 2017-03-23 Illumination device, method for illumination, and imaging device
PCT/JP2017/043020 WO2018173370A1 (en) 2017-03-23 2017-11-30 Illumination device, illumination method, and imaging device

Publications (1)

Publication Number Publication Date
CN110234984A true CN110234984A (en) 2019-09-13

Family

ID=63586004

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780083942.2A Pending CN110234984A (en) 2017-03-23 2017-11-30 Lighting device, means of illumination and filming apparatus

Country Status (6)

Country Link
US (1) US20200011809A1 (en)
EP (1) EP3605070A4 (en)
JP (1) JP2018159650A (en)
CN (1) CN110234984A (en)
TW (1) TWI654425B (en)
WO (1) WO2018173370A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20220146437A1 (en) * 2019-03-19 2022-05-12 Nec Corporation Product-inspection apparatus, product-inspection method, and non-transitory computer readable medium
US11790197B2 (en) 2021-10-11 2023-10-17 Zebra Technologies Corporation Miniature long range imaging engine with auto-focus, auto-zoom, and auto-illumination system

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040239919A1 (en) * 2003-04-30 2004-12-02 Byk Gardner Gmbh Device and method for determining the properties of surfaces
JP2007057296A (en) * 2005-08-23 2007-03-08 Denso Wave Inc Optical reader
JP4366923B2 (en) * 2002-04-10 2009-11-18 日亜化学工業株式会社 Lighting device and control method thereof
CN101884249A (en) * 2007-12-07 2010-11-10 夏普株式会社 Lighting device
CN102022637A (en) * 2009-09-09 2011-04-20 富士迈半导体精密工业（上海）有限公司 Illuminating device
JP2011222182A (en) * 2010-04-06 2011-11-04 Minebea Co Ltd Lighting device
US20110298901A1 (en) * 2008-12-24 2011-12-08 Snecma Method for the non-destructive inspection of a mechanical part
WO2014036509A1 (en) * 2012-08-31 2014-03-06 Nuoptic, Llc Multi-spectral variable focus illuminator
JP5595144B2 (en) * 2010-07-01 2014-09-24 三菱電機株式会社 lighting equipment
WO2016035381A1 (en) * 2014-09-05 2016-03-10 株式会社Ｓｃｒｅｅｎホールディングス Inspection device and inspection method
JP6164603B2 (en) * 2013-02-20 2017-07-19 地方独立行政法人青森県産業技術センター Nondestructive inspection equipment

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3657694B2 (en) * 1995-03-31 2005-06-08 リンテック株式会社 Lighting device
FI123335B (en) * 2008-05-20 2013-02-28 Metso Automation Oy LED luminaire matrix with pulsing devices
US7843558B2 (en) * 2008-06-25 2010-11-30 Applied Materials South East Asia Pte. Ltd. Optical inspection tools featuring light shaping diffusers
JP2010067415A (en) * 2008-09-09 2010-03-25 Stanley Electric Co Ltd Led lighting fixture

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4366923B2 (en) * 2002-04-10 2009-11-18 日亜化学工業株式会社 Lighting device and control method thereof
US20040239919A1 (en) * 2003-04-30 2004-12-02 Byk Gardner Gmbh Device and method for determining the properties of surfaces
JP2007057296A (en) * 2005-08-23 2007-03-08 Denso Wave Inc Optical reader
CN101884249A (en) * 2007-12-07 2010-11-10 夏普株式会社 Lighting device
US20110298901A1 (en) * 2008-12-24 2011-12-08 Snecma Method for the non-destructive inspection of a mechanical part
CN102022637A (en) * 2009-09-09 2011-04-20 富士迈半导体精密工业（上海）有限公司 Illuminating device
JP2011222182A (en) * 2010-04-06 2011-11-04 Minebea Co Ltd Lighting device
JP5595144B2 (en) * 2010-07-01 2014-09-24 三菱電機株式会社 lighting equipment
WO2014036509A1 (en) * 2012-08-31 2014-03-06 Nuoptic, Llc Multi-spectral variable focus illuminator
JP6164603B2 (en) * 2013-02-20 2017-07-19 地方独立行政法人青森県産業技術センター Nondestructive inspection equipment
WO2016035381A1 (en) * 2014-09-05 2016-03-10 株式会社Ｓｃｒｅｅｎホールディングス Inspection device and inspection method

Also Published As

Publication number Publication date
EP3605070A4 (en) 2021-01-20
US20200011809A1 (en) 2020-01-09
WO2018173370A1 (en) 2018-09-27
JP2018159650A (en) 2018-10-11
EP3605070A1 (en) 2020-02-05
TW201835555A (en) 2018-10-01
TWI654425B (en) 2019-03-21

Similar Documents

Publication Publication Date Title
KR101659718B1 (en) Multi-beam illumination system and method of illumination
US7766489B2 (en) Device for projecting a pixelated lighting pattern
US20160363753A1 (en) Integrated Illuminator and Condenser for Microscopes
US9453995B2 (en) Electronically variable illumination filter for microscopy
US10302931B2 (en) Magnifying observation apparatus
US20080080179A1 (en) LED floodlight structure
DE3906555A1 (en) REFLECTIVE LIGHTING DEVICE
CN110234984A (en) Lighting device, means of illumination and filming apparatus
CN108474931A (en) Device and method for image taking
CN112912781B (en) Illuminated display as an illumination source for microscopy
CN106133597A (en) Projector
CN110006904A (en) Adaptive diffusion lighting system and method
US9726873B2 (en) Microscope and magnifying observation method using the same
CN104698581B (en) Lighting device and stereomicroscope
DE102005021808B4 (en) Device for illuminating an object
CN106796181A (en) The method of illuminator, the instruments of inspection with illuminator and operation illuminator
JP6667395B2 (en) Magnifying observation device
JP5403255B2 (en) Lighting device and projector
CN113194222A (en) Combined imaging device
US20230114419A1 (en) Background display device
JP4579554B2 (en) Microscope illumination system
JP2015127776A (en) Magnifying observation device and magnified image observation method
KR102596730B1 (en) Lenseless Optical System
KR102612715B1 (en) Lighting device having auto-spot and lighting method using thereof
EP4307026A1 (en) Digital microscope and method of generating a full overview image of a sample in a digital microscope

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20190913