CN110234876A - Cryogenic pump - Google Patents
Cryogenic pump Download PDFInfo
- Publication number
- CN110234876A CN110234876A CN201880005243.0A CN201880005243A CN110234876A CN 110234876 A CN110234876 A CN 110234876A CN 201880005243 A CN201880005243 A CN 201880005243A CN 110234876 A CN110234876 A CN 110234876A
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- CN
- China
- Prior art keywords
- low temperature
- arc
- cryogenic pump
- string
- bending section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The low temperature plate portion of cryogenic pump has two low temperature board members (62), is arranged respectively at the two sides of sub-cooled platform to clip cryogenic pump central axis.Each low temperature board member (62) has: arc-shaped flat part (75), with arc sections (78) and string (79)；And the 1st bending section (76), it is formed as one with arc-shaped flat part (75) and is connect at a part of string (79) with arc-shaped flat part (75).Arc-shaped flat part (75) is thermally connected via the 1st bending section (76) and sub-cooled platform.The remainder of the string of the arc-shaped flat part (75) of each low temperature board member (62) is shaped as, with refrigeration machine occur interference can two low temperature board members (62) interchangeable with one another shape.
Description
Technical field
The present invention relates to a kind of cryogenic pumps.
Background technique
Cryogenic pump is to be exhausted by condensing or adsorbing to capture gas molecule in the cryopanel for being cooled to ultralow temperature
Vacuum pump.Cryogenic pump is commonly used in realizing the clean vacuum environment required in semiconductor circuit manufacturing process etc..
Conventional art document
Patent document
Patent document 1: Japanese Unexamined Patent Publication 7-35041 bulletin
Summary of the invention
The invention technical task to be solved
The illustrative first purpose of one embodiment of the present invention is to reduce the manufacturing cost of cryogenic pump.
For solving the means of technical task
A kind of embodiment according to the present invention provides a kind of cryogenic pump, has: refrigeration machine has High-temperature cooling platform
And sub-cooled platform；Radiation barrier part is thermally connected with the High-temperature cooling platform, and its edge passes through the center of low temperature pump steam inlet
The direction of cryogenic pump central axis extend and surround the sub-cooled platform；And low temperature plate portion, with the sub-cooled
Platform is thermally connected, and it is surrounded together with the sub-cooled platform by the radiation barrier part.Low temperature plate portion have two it is low
Warm board member, the upper end of the sub-cooled platform of two low temperature board members configuration on the cryogenic pump central axis direction with
Height and position between lower end and the two sides of the sub-cooled platform are arranged respectively to clip the cryogenic pump central axis.
Each low temperature board member has: arc-shaped flat part, with arc sections and string；And the 1st bending section, it is flat with the arc-shaped
Smooth portion is formed as one and connect at a part of the string with the arc-shaped flat part.The arc-shaped flat part via
1st bending section and the sub-cooled platform are thermally connected.When from the cryogenic pump central axis direction, the arc-shaped is flat
The arc sections in smooth portion constitute the outer rim of the low temperature board member.The string of the arc-shaped flat part of each low temperature board member
Remainder is shaped as, with the refrigeration machine occur interference can described two low temperature board members interchangeable with one another shape
Shape.
A kind of embodiment according to the present invention provides a kind of cryogenic pump, has: refrigeration machine has High-temperature cooling platform
And sub-cooled platform；Radiation barrier part is thermally connected with the High-temperature cooling platform, and its edge passes through the center of low temperature pump steam inlet
The direction of cryogenic pump central axis extend and surround the sub-cooled platform；Low temperature plate portion, with the sub-cooled platform
It is thermally connected, and it is surrounded together with the sub-cooled platform by the radiation barrier part, low temperature plate portion has two
Low temperature board member, two low temperature board members are arranged respectively at the two sides of the sub-cooled platform to clip in the cryogenic pump
Mandrel；And two mounting surfaces, correspond respectively to described two low temperature board members.Each low temperature board member has: arc-shaped is flat
Portion, with arc sections and string；And the 1st bending section, it is formed as one with the arc-shaped flat part and the one of the string
It is connect at part with the arc-shaped flat part.1st bending section is mounted on corresponding mounting surface.The arc-shaped flat part
It is thermally connected via the 1st bending section and the sub-cooled platform.The institute of the arc-shaped flat part of each low temperature board member
Being shaped as the remainder of string is stated, interference does not occur with the refrigeration machine can described two cryopanel structures interchangeable with one another
The shape of part.Each low temperature board member, which has, to be formed as one and in the remainder of the string with the arc-shaped flat part
The 2nd bending section connecting at least part with the arc-shaped flat part, the 2nd bending section is configured in the side of the string
It is upwardly separated from the mounting surface.
In addition, the mode for being substituted for each other constituent element or performance of the invention between method, apparatus, system etc. is also made
It is effective for mode of the invention.
Invention effect
In accordance with the invention it is possible to reduce the manufacturing cost of cryogenic pump.
Detailed description of the invention
Fig. 1 is the lateral sectional view that outlined cryogenic pump involved in embodiment.
Fig. 2 is the top view that outlined cryogenic pump shown in FIG. 1.
Fig. 3 is the perspective view that outlined a part in low temperature plate portion of cryogenic pump involved in embodiment.
Fig. 4 is the perspective view that outlined a part in low temperature plate portion of cryogenic pump involved in embodiment.
Fig. 5 is the perspective view that outlined a part in low temperature plate portion of cryogenic pump involved in embodiment.
Specific embodiment
Hereinafter, with reference to attached drawing, detailed description of embodiments of the present invention.In explanation and attached drawing, to identical or phase
Deng constituent element, component and processing mark identical symbol, and suitably omit repeated explanation.For ease of description, in attached drawing
In suitably set the scale bar and shape of each section and be not interpreted in a limited way unless otherwise indicated.Embodiment is only shown
Example, is not limited in any way the scope of the present invention.All features recorded in embodiments or combinations thereof are not necessarily
The essence of invention.
Fig. 1 is the lateral sectional view that outlined cryogenic pump 10 involved in embodiment.Fig. 2 is to outlined figure
The top view of cryogenic pump 10 shown in 1.Fig. 1 shows the sections for including the cryogenic pump central axis C shown in single dotted broken line.But
In order to make it easy to understand, the low temperature plate portion of cryogenic pump 10 indicates side rather than section in Fig. 1.Fig. 2 is the direction view of line B-B.
Also, Fig. 3 and Fig. 4 are the solids that outlined a part in low temperature plate portion of cryogenic pump 10 involved in embodiment
Figure.
Cryogenic pump 10 is for example installed on ion implantation apparatus, sputtering equipment, evaporation coating device or other vacuum treatment installations
Vacuum chamber, and the level required in desired be vacuum-treated for being increased to the vacuum degree inside vacuum chamber.Low temperature
Pump 10 has the air inlet 12 for receiving gas to be discharged from vacuum chamber.Gas enters cryogenic pump by air inlet 12
10 inner space 14.
Cryogenic pump 10 can be made with illustrating direction (that is, posture with air inlet 12 upward) setting in vacuum chamber
With.But it's not limited to that for the posture of cryogenic pump 10, cryogenic pump 10 can also be arranged towards other directions in vacuum chamber.
In addition, the positional relationship between the constituent element in order to indicate cryogenic pump 10 more easy-to-understandly below, makes sometimes
With the terms such as " axial direction ", " radial direction ".It is axial to indicate through the direction of air inlet 12 (in Fig. 1, by the center of air inlet 12 along low
The direction of temperature pump central axis C), the radial direction (direction vertical with central axis C) indicated along air inlet 12.It rises for convenience
See, the side of axial relatively close air inlet 12 is known as "upper" sometimes, the side for being relatively distant from air inlet 12 is known as "lower".
That is, the side for being relatively distant from 10 bottom of cryogenic pump is known as "upper" sometimes, the side of relatively close 10 bottom of cryogenic pump is known as
"lower".About radial direction, the side that will be close to the center (in Fig. 1 for center axis C) of air inlet 12 sometimes is known as "inner", will be close into
The side of the periphery of port 12 is known as "outside".In addition, configuration when this expression way and cryogenic pump 10 are mounted on vacuum chamber
It is unrelated.For example, cryogenic pump 10 can also by air inlet 12 along vertical direction it is directed downwardly in a manner of be mounted on vacuum chamber.
Also, " circumferential direction " will be known as around axially direction sometimes.It is circumferential along the 2nd direction of air inlet 12, to be and diameter
To orthogonal tangential direction.
Cryogenic pump 10 has refrigeration machine 16, first order cryopanel 18, second level cryopanel component 20 and low temperature pump case 70.
First order cryopanel 18 is also referred to as high temperature cryopanel portion or the portion 100K.Second level cryopanel component 20 is also referred to as low temperature
Plate portion or the portion 10K.
Refrigeration machine 16 is, for example, ultra-low temperature refrigerating devices such as Ji Fude-McMahon formula refrigeration machine (so-called GM refrigeration machines).System
Cold 16 is two-stage type refrigeration machine.Therefore, refrigeration machine 16 has the 1st cooling bench 22 and the 2nd cooling bench 24.Refrigeration machine 16 is constituted
For the 1st cooling bench 22 is cooled to the 1st cooling temperature, the 2nd cooling bench 24 is cooled to the 2nd cooling temperature.2nd cooling temperature
For the temperature lower than the 1st cooling temperature.For example, the 1st cooling bench 22 is cooled to 65K~120K or so, it is preferably cooled to 80K
~100K, the 2nd cooling bench 24 are cooled to 10K~20K or so.
Also, refrigeration machine 16 has refrigeration machine structural portion 21, the refrigeration machine structural portion 21 by the 2nd cooling bench 24 structurally
It is supported on the 1st cooling bench 22 and the 1st cooling bench 22 is structurally supporting to the room temperature portion 26 of refrigeration machine 16.Therefore, freeze
Machine structural portion 21 has the 1st cylinder body 23 and the 2nd cylinder body 25 extended along radial direction with coaxial manner.1st cylinder body 23 is by refrigeration machine
16 room temperature portion 26 is connected to the 1st cooling bench 22.1st cooling bench 22 is connected to the 2nd cooling bench 24 by the 2nd cylinder body 25.Room temperature portion
26, the 1st cylinder body 23, the 1st cooling bench 22, the 2nd cylinder body 25 and the 2nd cooling bench 24 are successively linearly arranged in a column.
In the inside of the 1st cylinder body 23 and the 2nd cylinder body 25, the 1st displacer has been separately equipped in a manner of it can move back and forth
And the 2nd displacer (not shown).It is assembled with the 1st regenerator and the 2nd regenerator respectively (not in the 1st displacer and the 2nd displacer
Diagram).Also, room temperature portion 26 has the driving mechanism (not shown) for moving back and forth the 1st displacer and the 2nd displacer.
Driving mechanism includes stream switching mechanism, and the flow path of the stream switching mechanism switch operating gas is to be repeated periodically to system
The inside of cold 16 supplies working gas (such as helium) and working gas is discharged from the inside of refrigeration machine 16.
The first order low-temperature end of refrigeration machine 16 is arranged in 1st cooling bench 22.1st cooling bench 22 is opposite with room temperature portion 26
Side surround the 1st cylinder body 23 end to surround working gas the 1st expansion space component.1st expansion space is shape
Between the 1st cylinder body 23 and the 1st displacer of the inside of 1 cylinder body 23 of Cheng and with its appearance of the reciprocating movement of the 1st displacer
The changed variable volume of product.The 1st cooling bench 22 metal material system high by the thermal coefficient of the 1st cylinder body 23 of thermal conductivity ratio
At.For example, the 1st cooling bench 22 is made of copper, the 1st cylinder body 23 is made of stainless steel.
The second level low-temperature end of refrigeration machine 16 is arranged in 2nd cooling bench 24.2nd cooling bench 24 is opposite with room temperature portion 26
Side surround the 2nd cylinder body 25 end to surround working gas the 2nd expansion space component.2nd expansion space is shape
Between the 2nd cylinder body 25 and the 2nd displacer inside 2 cylinder body 25 of Cheng and with its volume of the reciprocating movement of the 2nd displacer
Changed variable volume.2nd cooling bench 24 by the 2nd cylinder body 25 of thermal conductivity ratio the higher metal material system of thermal coefficient
At.2nd cooling bench 24 is made of copper, and the 2nd cylinder body 25 is made of stainless steel.The 2nd cooling bench 24 and the 2nd cylinder body are shown in Fig. 1
Boundary 24b between 25.
Refrigeration machine 16 is connected to the compressor (not shown) of working gas.Refrigeration machine 16 makes the work pressurizeed by compressor
Gas is in the internal expansion of refrigeration machine 16 to cool down to the 1st cooling bench 22 and the 2nd cooling bench 24.The working gas of expansion
It is recycled to compressor and is pressurized again.Refrigeration machine 16 pass through repeat include working gas supply and discharge and with this
The thermal cycle of the reciprocating movement of the supply and discharge of working gas synchronous the 1st displacer and the 2nd displacer, to generate cold
It is cold.
The cryogenic pump 10 of diagram is so-called horizontal low temperature pump.Horizontal low temperature pump typically refer to refrigeration machine 16 be arranged to it is low
The cryogenic pump of (usually orthogonal) that the central axis A of temperature pump 10 intersects.1st cooling bench 22 of refrigeration machine 16 and the 2nd cooling bench 24
(it is horizontal direction in Fig. 1, and is the direction of the central axis D of refrigeration machine 16) arrangement along the direction vertical with cryogenic pump central axis C.
First order cryopanel 18 has radiation barrier part 30 and entrance cryopanel 32, and it surrounds second level cryopanel component
20.First order cryopanel 18 is in order to from the radiation Thermal protection second level low temperature from the outside of cryogenic pump 10 or low temperature pump case 70
Board group part 20 and be arranged cryopanel.First order cryopanel 18 and the 1st cooling bench 22 are thermally connected.Therefore, first order cryopanel 18
It is cooled to the 1st cooling temperature.There is gap, the first grade low-temp between first order cryopanel 18 and second level cryopanel component 20
Plate 18 is not contacted with second level cryopanel component 20.
Radiation barrier part 30 be in order to from the radiation Thermal protection second level cryopanel component 20 from cryogenic pump shell 70 and
It is arranged.Radiation barrier part 30 is present between low temperature pump case 70 and second level cryopanel component 20, and surrounds the second level
Cryopanel component 20.Radiation barrier part 30 has for the external shielding for receiving gas and entering inner space 14 from cryogenic pump 10
Part main opening 34.Shielding part main opening 34 is located at air inlet 12.
Radiation barrier part 30 has: shielding part front end 36 determines shielding part main opening 34；Shielding part bottom 38, be located at
The opposite side of shielding part main opening 34；And shielding part side 40, shielding part front end 36 is connected to shielding part bottom 38.Shielding
A part of the composition shielding part side 40 of part front end 36.Shielding part side 40 along axial direction from shielding part front end 36 towards with shielding part
The opposite side of main opening 34 extends, and in a manner of surrounding the 2nd cooling bench 24 circumferentially.Radiation barrier part 30 has
Tubular (such as cylinder) shape that shielding part bottom 38 is closed, is formed as cup-shaped.It is low with the second level in shielding part side 40
Annular gap 42 is formed between warm board group part 20.
In addition, shielding part bottom 38 can be another component different from shielding part side 40.For example, shielding part bottom 38
It can be the diameter flat disk roughly the same with the diameter of shielding part side 40, and opposite with shielding part main opening 34
Side is installed on shielding part side 40.Also, shielding part bottom 38 is also configured to, and at least part is open.For example, putting
It penetrates shielding part 30 to be also configured to, not closed by shielding part bottom 38.That is, 40 both ends of shielding part side can also be opened.
Shielding part side 40 has the shielding part side mouth 44 being inserted into for refrigeration machine structural portion 21.2nd cooling bench 24 and
2nd cylinder body 25 is inserted into radiation barrier part 30 from the outside of radiation barrier part 30 by shielding part side mouth 44.Shielding part
Side mouth 44 is the mounting hole for being formed in shielding part side 40, and shape is, for example, circle.The configuration of 1st cooling bench 22 is being radiated
The outside of shielding part 30.
Shielding part side 40 has the mounting base 46 of refrigeration machine 16.Mounting base 46 is for the 1st cooling bench 22 to be installed on
The flat of radiation barrier part 30, it is slightly concave when from the external observation of radiation barrier part 30.Mounting base 46 forms shielding
The periphery of part side mouth 44.In the axial direction, mounting base 46 compares shielding part front end 36 closer to shielding part bottom 38.Passing through will
1st cooling bench 22 is installed on mounting base 46, and radiation barrier part 30 and the 1st cooling bench 22 are thermally connected.
In one embodiment, radiation barrier part 30 can also via additional heat conduction member and with the 1st cooling bench 22
It is thermally connected, so that radiation barrier part 30 is directly mounted on the 1st cooling bench 22 instead of above-mentioned.Heat conduction member for example can be both ends
Hollow short cylinder with flange.Heat conduction member can be fixed on mounting base 46 by the flange of wherein one end, pass through the other end
Flange be fixed on the 1st cooling bench 22.Heat conduction member can surround refrigeration machine structural portion 21 and extend to and put from the 1st cooling bench 22
Penetrate shielding part 30.Shielding part side 40 also may include this heat conduction member.
In the illustrated embodiment, radiation barrier part 30 is formed integrally as tubular.It replaces, radiation barrier part 30
Also it is configured to make its entirety become tubular by combining multiple parts.These multiple parts also can be provided so each other it
Between have gap.For example, radiation barrier part 30 can be divided into two parts in the axial direction.At this point, radiation barrier part 30 is upper
Portion is the cylinder of both ends open, has the part 1 of shielding part front end 36 and shielding part side 40.The lower part structure of radiation barrier part 30
Become, upper end is open and lower end closed, has part 2 and the shielding part bottom 38 of shielding part side 40.As described above, radiation
The lower part of shielding part 30 can be the cylinder of its both ends open without shielding part bottom 38.At the 1st of shielding part side 40
Divide the slit being formed between part 2 circumferentially.The slit can be at least one of shielding part side mouth 44
Point.Alternatively, shielding part side mouth 44 is configured to, top half is formed in the part 1 of shielding part side 40, under
Half part is formed in the part 2 of shielding part side 40.
Entrance cryopanel 32 is in order to from the radiation Thermal protection second level cryopanel component of the heat source outside cryogenic pump 10
20 and be set to shielding part main opening 34.The vacuum chamber that heat source outside cryogenic pump 10 is for example, equipped with cryogenic pump 10 is indoor
Heat source.Entrance cryopanel 32 can not only limit radiant heat entrance, additionally it is possible to limit the entrance of gas molecule.Entrance cryopanel 32
A part of the opening area of shielding part main opening 34 is occupied, so that inner space 14 will be flowed by shielding part main opening 34
Gas be limited in desired amount.Cricoid open area is formed between entrance cryopanel 32 and shielding part front end 36
48。
Entrance cryopanel 32 has blinds window portion 50 and the blinds for blinds window portion 50 to be mounted on to shielding part front end 36
Window installation component 52.Shutter installation component 52 is the stick that shielding part front end 36 is erected at along the diameter of shielding part main opening 34
The component of shape.Entrance cryopanel 32 is thermally connected via shutter installation component 52 and radiation barrier part 30 with the 1st cooling bench 22.
Blinds window portion 50 has the multiple louver boards linearly extended along the 1st direction respectively in shielding part main opening 34.
Multiple louver boards are arranged in shielding part main opening 34 along 2nd direction vertical with the 1st direction.Multiple louver boards are arranged in that
This is parallel, and each louver board is configured to tilt relative to opening face.As shown in the picture, it is located at side relative to central axis C
Louver board inversely tilts each other with the louver board for being located at the other side.Multiple louver boards are to cover be located at immediately below it the
The mode (that is, the mode that can't see second level cryopanel component 20 from the outside of cryogenic pump 10) of second level cryopanel component 20 is along
2 directions are closely aligned.Multiple louver boards are respectively provided with the 1st direction length different from each other, so that whole shape after its arrangement
As circle.Shutter installation component 52 extends along the 2nd direction.
Therefore, it is necessary to the gases for using cryogenic pump 10 to be exhausted to pass through the hundred of blinds window portion 50 from the outside of cryogenic pump 10
Gap or open area 48 between leaf luffer boards and enter inner space 14.
Entrance cryopanel 32 also can have other shapes.For example, blinds window portion 50 also can have same heart shaped configuration
Multiple cricoid louver boards.Alternatively, entrance cryopanel 32 can also be a tabular component.
Second level cryopanel component 20 is mounted on the 2nd cooling bench 24 in a manner of surrounding the 2nd cooling bench 24.Therefore, second
Grade low-temp board group part 20 and the 2nd cooling bench 24 are thermally connected, and second level cryopanel component 20 is cooled to the 2nd cooling temperature.Second
Grade low-temp board group part 20 is surrounded by shielding part side 40 together with the 2nd cooling bench 24.
Second level cryopanel component 20 has the top low temperature plate 60 opposed with shielding part main opening 34, multiple (this example
In be two) low temperature board member 62 and low temperature board installation member 64.
Also, as shown in Figure 1, cryogenic pump 10 has cryopanel positioning member 67.Even by 20 heat of second level cryopanel component
The heat-conducting part for being connected to the 2nd cooling bench 24 includes low temperature board installation member 64 and cryopanel positioning member 67.
Annular gap 42 is formed between top low temperature plate 60 and low temperature board member 62 and shielding part side 40, therefore, top
Portion's cryopanel 60 and low temperature board member 62 are not contacted with radiation barrier part 30.Low temperature board member 62 is covered by top low temperature plate 60
Lid.
Top low temperature plate 60 is in second level cryopanel component 20 near the part of entrance cryopanel 32.Top low temperature plate
60 configure in the axial direction between shielding part main opening 34 or entrance cryopanel 32 and refrigeration machine 16.Top low temperature plate 60 is in axial direction
The central part of the upper inner space 14 positioned at cryogenic pump 10.Therefore, low with entrance in the front (upper surface) of top low temperature plate 60
The main accommodation space 65 of wide condensate layer is formed between warm plate 32.The main accommodation space 65 of condensate layer occupies inner space 14
Top half.
Top low temperature plate 60 is the generally flat cryopanel with axially vertical configuration.That is, top low temperature plate 60 is along diameter
To and circumferentially extending.As shown in Fig. 2, top low temperature plate 60 is that size (for example, projected area) is bigger than the size of blinds window portion 50
Disk-shaped plate.But it's not limited to that for the size relationship between top low temperature plate 60 and blinds window portion 50, also can be set to
Top low temperature plate 60 is smaller, or also can be set to the two with roughly the same size.
Top low temperature plate 60 is configured to be formed with gap area 66 between refrigeration machine structural portion 21 at it.Gap area 66
For the space being axially formed between the back side of top low temperature plate 60 (lower surface) and the 2nd cylinder body 25.
Low temperature board member 62 is provided with the adsorbent materials such as activated carbon 74.Adsorbent material 74 is for example pasted onto low temperature board member
62 back side (lower surface).The front (upper surface) of low temperature board member 62 is functioned as cryosurface, and the back side is as absorption
Face and function.Adsorbent material 74 also can be set in the front of low temperature board member 62.Similarly, top low temperature plate 60 can also
There is adsorbent material 74 in its front and/or the back side.Alternatively, top low temperature plate 60 can not have adsorbent material 74.
Two low temperature board members 62 clip cryogenic pump central axis C and are arranged respectively at the two sides of the 2nd cooling bench 24.Cryopanel
Component 62 is configured along the plane vertical with cryogenic pump central axis C.For ease of understanding, cryopanel structure is represented by dashed line in Fig. 2
Part 62 and low temperature board installation member 64.
The top and bottom of 2nd cooling bench 24 of two configurations of low temperature board member 62 on the direction of cryogenic pump central axis C
Between height and position.2nd cooling bench 24 is in the direction (side of the central axis D of refrigeration machine 16 vertical with cryogenic pump central axis C
To) on end have flange part 24a.The upper end and lower end of the 2nd cooling bench 24 on the direction of cryogenic pump central axis C are by flange
Portion 24a is determined.That is, the flange part of 2nd cooling bench 24 of two configurations of low temperature board member 62 on the direction of cryogenic pump central axis C
Height and position between the top and bottom of 24a.Two configurations of low temperature board member 62 are in identical height.Shown in FIG. 1 2nd is cold
But the boundary 24b between platform 24 and the 2nd cylinder body 25 determines the another of the 2nd cooling bench 24 on the direction of the central axis D of refrigeration machine 16
One end (that is, end with flange part 24a opposite side).
Two low temperature board members 62 and low temperature board installation member 64 are shown in Fig. 3, and a cryopanel structure is shown in Fig. 4
Part 62.
Two low temperature board members 62 are designed to the same part.Two low temperature board members 62 are of similar shape, and by phase
Same material is made.Low temperature board member 62 has arc-shaped, shape semilunar or semicircle shape.Low temperature board member 62 is for example by copper
The metal material of equal high thermal conductivity coefficients is made, and such as can the cladding of the coating by nickel.
Low temperature board installation member 64 has two mounting surfaces 68 corresponding with two low temperature board members 62.Cryopanel peace
Dress component 64 is the bracket with rectangular reverse U shape shape, and is for from the 2nd cooling bench 24 to top low temperature plate 60 and low
The thermally conductive heat-conducting plate of warm board member 62.Two mounting surfaces 68 are equivalent to two sides of low temperature board installation member 64.Cryopanel structure
Part 62 is mounted on corresponding mounting surface 68 by fastening member 87 (for example, rivet).
Top low temperature plate 60 is mounted on the upper surface 69 for linking the low temperature board installation member 64 of these mounting surfaces 68.Mounting surface
68 extend vertically relative to upper surface 69 downward from the two sides of upper surface 69.
2nd cooling bench 24 and cryopanel positioning member 67, which are inserted in cryopanel along the direction of the central axis D of refrigeration machine 16, pacifies
The inside of component 64 is filled, the 2nd cooling bench 24 is installed on low temperature board installation member 64 via cryopanel positioning member 67.Cryopanel is fixed
Position component 67 is mounted on the upper surface 69 (side opposite with top low temperature plate 60) of low temperature board installation member 64.Top low temperature plate
60, low temperature board installation member 64 and cryopanel positioning member 67 are integrally fixed to the 2nd by fastening member (for example, bolt)
Cooling bench 24.
Each low temperature board member 62 has arc-shaped flat part 75, the 1st bending section 76 and the 2nd bending section 77.Each low temperature
Board member 62 is formed by single metal plate.By implementing such as punch process to a flat metal plate, it is integrally formed
1st bending section 76, the 2nd bending section 77 and arc-shaped flat part 75, to produce a low temperature board member 62.Adsorbent material 74
It is arranged in arc-shaped flat part 75.In the 1st bending section 76 and the 2nd bending section 77 and it is not provided with adsorbent material 74.
Arc-shaped flat part 75 has arc sections 78 and string 79.String 79 is a straight line for linking the both ends of arc sections 78.
Arc sections 78 and string 79 are located in the plane vertical with cryogenic pump central axis C, and when from the direction of cryogenic pump central axis C
Determine the profile of low temperature board member 62.Arc sections 78 determine the outer rim of low temperature board member 62, and string 79 determines low temperature board member 62
Inner edge.Low temperature board member 62 is with arc sections 78 close to the shielding part side 40 of radiation barrier part 30, and string 79 is close to refrigeration machine 16
The 2nd cooling bench 24 and the mode of the 2nd cylinder body 25 configure.String 79 is parallel with the axial D of refrigeration machine 16, and the half of string 79 is along system
2nd cooling bench 24 of cold 16 and the 2nd cylinder body 25 extend, and the other half is then more than the 2nd cooling bench 24 and towards shielding part side
40 extend.
The whole region of arc-shaped flat part 75 is flat, especially comprising the outer edge of arc sections 78 is flat.In this side
Face, the shape of low temperature board member 62 have the shape of typical cryopanel of circular cone shape inclined surface different from peripheral part.
1st bending section 76 at a part (specifically, in central portion of string 79) of string 79 with the flat-shaped smooth portion of arc-shaped
75 connections.1st bending section 76 is arranged as the fastening part for low temperature board member 62 to be fastened on to low temperature board installation member 64.
1st bending section 76 is mounted on the corresponding mounting surface 68 of low temperature board installation member 64.Arc-shaped flat part 75 is via the 1st bending section
76 and the 2nd cooling bench 24 is thermally connected.1st bending section 76 is to form the rectangular-shaped of angle (such as right angle) with arc-shaped flat part 75
Part.1st bending section 76 is vertical relative to arc-shaped flat part 75.1st bending section 76 is elongated along the direction of string 79, string 79
The width of the width and the mounting surface 68 of low temperature board installation member 64 of the 1st bending section 76 on direction is roughly equal.
1st bending section 76 is bent upward relative to arc-shaped flat part 75, and is had and passed through for fastening member 87
Fastener hole 88.The position of close top of the configuration of fastener hole 88 between string 79 and the top 76a of the 1st bending section 76.Fastening
Hole 88 is formed in more closer to the top than the medium line 89 between string 79 and the top 76a of the 1st bending section 76.
Using the above structure, the distance between fastener hole 88 and arc-shaped flat part 75 become larger, and therefore, operator is easy
Tool (for example, rivet rifle) of the operation for fastening, can be improved the operability in manufacturing process.Also, according to this structure, exist
Low temperature board member 62 is applied to the arc-shaped flat part 75 of low temperature board member 62 in the case where being installed on low temperature board installation member 64
Gravity play a role as making the 1st bending section 76 press on the torque of mounting surface 68.Therefore, with other mounting structure (examples
Such as, the bending section of installation is bent downward relative to low temperature board member, and is nearby fastened on installation in the following of bending section
The case where face) it compares, arc-shaped flat part 75 is inhibited relative to the case where inclination of mounting surface 68.
At least part of 2nd bending section 77 in the remainder (that is, the part for being not provided with the 1st bending section 76) of string 79
It is connect at (specifically, at both ends of string 79) with arc-shaped flat part 75.2nd bending section 77 is configured in the direction of string 79
The upper mounting surface 68 for being detached from low temperature board installation member 64.2nd bending section 77 is located at outside relative to mounting surface 68.2nd bending section
77 is form the edge part at angle (for example, right angle) with arc-shaped flat part 75, and slenderly extend along the direction of string 79.The
2 bending sections 77 are vertical relative to arc-shaped flat part 75.
2nd bending section 77 as low temperature board member 62 rigidity reinforced portion and be arranged.2nd bending section 77 is able to suppress arch
Shape flat part 75 deforms.In particular, in the case where low temperature board member 62 is relatively large, with the width of mounting surface 68 (that is, string 79
The length of central portion) it compares, become the length of the end of the string 79 in the outside of mounting surface 68, as a result, arc-shaped is flat
The both ends in portion 75 can be easy to produce the deformation such as bending or inclination under the effect of gravity.Due to being provided with the 2nd bending section 77, because
This, is able to suppress its deformation low temperature board member 62 is relatively large.
2nd bending section 77 spreads the whole length of the remainder of string 79 and connect with arc-shaped flat part 75.Therefore, exist
On the direction of string 79, the 2nd bending section 77 is connect with the 1st bending section 76.Since the 2nd bending section 77 spreads the remainder of string 79
Whole length, therefore can more effectively inhibit the deformation of low temperature board member 62.
Same as the 1st bending section 76, the 2nd bending section 77 is bent upward also relative to arc-shaped flat part 75.2nd is curved
The height from arc-shaped flat part 75 of pars convoluta 77 is lower than the height in the 1st bending section 76 from the flat-shaped smooth portion 75 of arc-shaped.It adopts
With above structure, the 2nd bending section 77 is not easy with the constituent element of surrounding (for example, adjacent on the direction of cryogenic pump central axis C match
Other cryopanels set) it interferes.Also, it is easy edge and axially tightly configures multiple low temperature board members 62.For example, the 2nd is curved
The height of pars convoluta 77 can be set to lower than the height of the medium line 89 between string 79 and the top 76a of the 1st bending section 76.
In addition, the 2nd bending section 77 can also towards the direction bending different from the 1st bending section 76 or with the 1st bending section
76 different angle bendings.For example, the 1st bending section 76 can be bent upward, the 2nd bending section 77 is curved downward
It is bent.1st bending section 76 can also be bent to relative to arc-shaped flat part 75 vertically, the 2nd bending section 77 is bent to relatively
In the inclined angle in arc-shaped flat part 75.
2nd bending section 77 can also be provided only on the remainder (that is, the part for being not provided with the 1st bending section 76) of string 79
A part on.
As shown in Fig. 2, two low temperature board members 62 are configured to the two when from the direction of cryogenic pump central axis C
Medium line (the central axis D of refrigeration machine 16) is mutually symmetrical for symmetry axis.The arc sections 78 of two low temperature board members 62 be located at
On same circumference centered on cryogenic pump central axis C.Also, each low temperature board member 62 have with by the midpoint of string 79 (or
Cryogenic pump central axis C) and the line E vertical with string 79 be symmetry axis and symmetrical shape.
The remainder of the string 79 of the arc-shaped flat part 75 of each low temperature board member 62 is (that is, be not provided with the 1st bending section
76 part) shape be configured to, not with refrigeration machine 16 (for example, the 2nd cooling bench 24 and the 2nd cylinder body 25) occur interference can that
This exchanges the shape of two low temperature board members 62.
The size of the structure illustrative as 1, the interval 90 between two low temperature board members 62 is set as, in string 79
Any position on direction can be such that the 2nd cooling bench 24 is inserted between two low temperature board members 62.Two low temperature board members
Whole length of the interval 90 on chord line throughout string between 62 is constant.
In this way, two low temperature board members 62 have interchangeability.A kind of low temperature board member 62 can be mounted on cryopanel installation
On any one mounting surface of two mounting surfaces 68 of component 64.A kind of low temperature board member 62 is being mounted on a mounting surface 68
When upper and being mounted on another mounting surface 68, the arc sections 78 of low temperature board member 62 are respectively positioned on same circumference.Also,
When a kind of low temperature board member 62 is mounted on a mounting surface 68 and being mounted on another mounting surface 68, low temperature board member
Central axis D of 62 string 79 away from refrigeration machine 16 is located at equal distance.Low temperature board member 62 can not with it is the 2nd of refrigeration machine 16 cold
But platform 24 and the generation of the 2nd cylinder body 25 are intrusively mounted on any one of two mounting surfaces 68 mounting surface.
As shown in Figure 1, cryopanel positioning member 67 is fixed on the flange part 24a of the 2nd cooling bench 24, to be supported on the 2nd
Cooling bench 24.Cryopanel positioning member 67 is formed as the inverted L shape to turn upside down.The longitudinal edge portion of cryopanel positioning member 67 is for example
Flange part 24a is mounted on by the fastening member appropriate such as bolt.The upper edge 67a of cryopanel positioning member 67 is cooling from the 2nd
The flange part 24a of platform 24 extends along the direction of the central axis D of refrigeration machine 16.On this edge 67a low temperature board installation member 64 it
It is interior to extend along the 2nd cooling bench 24 or the 2nd cylinder body 25 towards the 1st cooling bench 22.
2nd cooling bench 24 is upwardly separated from cryogenic pump central axis C in the side of the central axis D of refrigeration machine 16.In refrigeration machine 16
Distance until the flange part 24a of 46 to the 2nd cooling bench 24 of mounting base of slave radiation barrier part 30 on the direction of mandrel D is shorter than
Distance (phase until the mounting base 46 of radiation barrier part 30 on the direction of the central axis D of refrigeration machine 16 to cryogenic pump central axis C
It instead, can also be longer).Thus, it is supposed that the configuration of second level cryopanel component 20 is in the surface of the 2nd cooling bench 24, then the second level
Cryopanel component 20 can deviate on the direction of the central axis D of refrigeration machine 16 from cryogenic pump central axis C.
But cryopanel positioning member 67 is so that the arc sections 78 of each low temperature board member 62 are centrally located in cryogenic pump
Mode on central axis C supports two low temperature board members 62.Cryopanel positioning member 67 is formed as, and cryopanel can be installed structure
The configuration of part 64 is in the position appropriate for aligning low temperature board member 62 and cryogenic pump central axis C.Second level cryopanel component as a result,
20 are positioned on cryogenic pump central axis C.
By using cryopanel positioning member 67, the length limitation of the refrigeration machine 16 on the direction central axis D is mitigated.Its
As a result, it is possible to use existing refrigeration machine instead of the refrigeration machine designed exclusively for cryogenic pump 10.This helps to reduce cryogenic pump
10 manufacturing cost.
In addition, in order to align cryogenic pump central axis C and second level cryopanel component 20, with shown in Fig. 1 on the contrary, can also
So that the upper edge 67a of cryopanel positioning member 67 is from the flange part 24a of the 2nd cooling bench 24 along the central axis D of refrigeration machine 16
Direction be directed away from the 2nd cylinder body 25 direction extend.About the cryogenic pump 10 with bigbore air inlet 12, it is preferable to use
Cryopanel positioning member 67 with this shape.
Low temperature pump case 70 is the cryogenic pump for accommodating first order cryopanel 18, second level cryopanel component 20 and refrigeration machine 16
10 basket, and be the vacuum tank constituted in a manner of keeping the vacuum tight of inner space 14.Low temperature pump case 70 with
Cordless surrounds first order cryopanel 18 and refrigeration machine structural portion 21.Low temperature pump case 70 is mounted on the room temperature of refrigeration machine 16
Portion 26.
Air inlet 12 delimited by the front end of low temperature pump case 70.Low temperature pump case 70 has outside from its front end towards diameter
The air inlet flange 72 that side extends.Air inlet flange 72 spreads the complete cycle of low temperature pump case 70 and is arranged.Cryogenic pump 10 using into
Port flange 72 is mounted on the vacuum chamber of vacuum evacuation object.
Cryogenic pump 10 has gas flow adjustment member 80, which makes from shielding part main opening 34
The gas flow of inflow deviates from refrigeration machine structural portion 21.Gas flow adjustment member 80 is configured to, and makes through blinds window portion 50
Or open area 48 and the gas flow that flows into main accommodation space 65 deviate from the 2nd cylinder body 25.Gas flow adjustment member 80 can
Think and is biased to component or gas flow in the gas flow of the top configuration adjacent thereto of refrigeration machine structural portion 21 or the 2nd cylinder body 25
Reflecting member.Gas flow adjustment member 80 is, for example, a planar plate, but can also be bent.
Gas flow adjustment member 80 with the 2nd cooling bench 24 and second level cryopanel component 20 the two non-contacting sides
Formula is configured adjacently with refrigeration machine structural portion 21.Gas flow adjustment member 80 with the 2nd cooling bench 24, second level cryopanel component
20 and the 2nd cylinder body 25 not in contact with mode configured along the 2nd cylinder body 25.Gas flow adjustment member 80 and the 2nd cylinder body 25 it
Between be formed with gap 86.It gas flow adjustment member 80 and is cooled to the part of the 2nd cooling temperature as a result, and supports the part
Structural portion thermal release and structure separate.
Gas flow adjustment member 80 extends from shielding part side 40 towards gap area 66, with 22 heat of the 1st cooling bench
Connection.Gas flow adjustment member 80 is supported in shielding part side 40.Therefore, gas flow adjustment member 80 is cooled to the 1st
Cooling temperature.
Gas flow adjustment member 80 is in a manner of at least blocking a part of annular gap 42 along shielding part side 40
And circumferentially.Gas flow adjustment member 80 is arranged in the circumferential in position identical with shielding part side mouth 44
In a part.Rectangular shaped when gas flow adjustment member 80 is overlooked.In addition, gas flow adjustment member 80 is circumferentially more
It is long, such as can also be arranged on complete cycle along shielding part side 40.
The base end part 82 (that is, the part for being mounted on shielding part side 40) of gas flow adjustment member 80 is radially positioned
The outside of blinds window portion 50, therefore, as shown in Fig. 2, it is exposed to air inlet 12.Pass through open area from the outside of cryogenic pump 10
48 and annular gap 42 it can be seen that gas flow adjustment member 80 base end part 82.When from end on observation, base end part 82 not with
Top low temperature plate 60 is overlapped.
The front end 84 of gas flow adjustment member 80 enters gap area 66, is covered by top low temperature plate 60.Before this
End 84 radially configures between the outer circumference end and central axis C of top low temperature plate 60 cryogenic pump.Front end 84 will not be simultaneously
The 2nd cooling bench 24 is not arrived at, therefore, as described above, gas flow adjustment member 80 is not contacted with the 2nd cooling bench 24.
In this way, by making gas flow adjustment member 80 be inserted in the gap between top low temperature plate 60 and the 2nd cylinder body 25
The entrance in region 66, gap area 66 narrows.Therefore, the gas that gap area 66 is flowed into from main accommodation space 65 can be reduced.
In the following, being illustrated to the movement of the cryogenic pump 10 of above structure.When cryogenic pump 10 works, firstly, in its work
1Pa or so will be slightly evacuated to inside vacuum chamber using other roughing vacuum pumps appropriate before work.Later, cryogenic pump 10 is made to work.1st
Cooling bench 22 and the 2nd cooling bench 24 are cooled to the 1st cooling temperature and the 2nd cooling temperature by the driving of refrigeration machine 16 respectively
Degree.Therefore, respectively with the 1st cooling bench 22 and the hot linked first order cryopanel 18 of the 2nd cooling bench 24 and second level low temperature board group
Part 20 is also cooled to the 1st cooling temperature and the 2nd cooling temperature respectively.22 heat of gas flow adjustment member 80 and the 1st cooling bench
Connection, therefore it is cooled to the 1st cooling temperature.
The cooling gas to fly here from vacuum chamber towards cryogenic pump 10 of entrance cryopanel 32.The steam under the 1st cooling temperature
Pressure sufficiently reduce (such as 10-8Pa is below) gas entrance cryopanel 32 surface condensation.The gas is also referred to as the 1st kind
Gas.1st kind of gas is, for example, vapor.In this way, the 1st kind of gas can be discharged in entrance cryopanel 32.Under the 1st cooling temperature
Vapour pressure is that a part of the gas sufficiently reduced enters to main accommodation space 65 by blinds window portion 50 or open area 48.
Alternatively, another part of gas is reflected by entrance cryopanel 32 and is not entered main accommodation space 65.
The gas for entering main accommodation space 65 is cooling by second level cryopanel component 20.The steam under the 2nd cooling temperature
Pressure sufficiently reduce (such as 10-8Pa is below) gas second level cryopanel component 20 surface condensation.The gas can also claim
Make the 2nd kind of gas.2nd kind of gas is, for example, argon gas.In this way, the 2nd kind of gas can be discharged in second level cryopanel component 20.Due to
Top low temperature plate 60 is directly facing main accommodation space 65, therefore in the front of top low temperature plate 60, the condensate layer energy of the 2nd kind of gas
Enough can substantially it grow up.In addition, the 2nd kind of gas will not condense under the 1st cooling temperature but gas.
The gas that vapour pressure does not reduce sufficiently under the 2nd cooling temperature is inhaled by the adsorbent material of second level cryopanel component 20
It is attached.The gas is also referred to as the 3rd kind of gas.3rd kind of gas is, for example, hydrogen.In this way, second level cryopanel component 20 can be arranged
3rd kind of gas out.Therefore, various gases are discharged by condensing or adsorbing for cryogenic pump 10, so as to make the true of vacuum chamber
Reciprocal of duty cycle reaches desired degree.
As described above, two low temperature board members 62 have interchangeability.At least part shape of two low temperature board members 62
It is identical.Therefore, at least part generalization of the manufacturing process of second level cryopanel component 20 can be made, therefore help to reduce
The manufacturing cost of cryogenic pump 10.In particular, in this embodiment, two low temperature board members 62 are designed to same component.Two low
Warm board member manufactures in identical manufacturing process.The component type of cryogenic pump is reduced.Can further decrease manufacture at
This.
The design can also be applied on the mutually different low temperature board member 62 of diameter, to make the one of its manufacturing process
Part generalization.In the different low temperature board member of diameter, by the way that the 1st bending section 76 (fastening part) is set as same shape and is incited somebody to action
The arc sections 78 of arc-shaped flat part 75 are set as flat, so as to make the mold generalization of punch process.Can use for
Punch process (for example, bending machining, perforation are processed) is carried out to the low temperature board member 62 of major diameter and the mold that designs comes pair
The low temperature board member 62 of smaller diameter carries out punch process.Mold is typically relatively expensive, thus the generalization of mold to manufacture at
This reduction is quite effective.For the manufacturer of this variety of cryogenic pump 10 mutually different to the bore for needing to provide air inlet 12
It is advantageous.
As described above, being provided with gas flow adjustment member 80 in cryogenic pump 10.The covering of gas flow adjustment member 80 the 2nd
Cylinder body 25, therefore, the 2nd cylinder body 25 will not be from the exposures of shielding part main opening 34.Gas flow adjustment member 80 can make from main appearance
Receive the 2nd kind of other directions of gas flow of space 65 towards the 2nd cylinder body 25.Therefore, although the surface of the 2nd cylinder body 25 have from
The Temperature Distribution of 1st cooling temperature to the 2nd cooling temperature, but the 2nd cooling temperature or with the surface portion of its similar temperature it is several
Or the 2nd kind of gas absolutely not condensed.Also, since gas flow adjustment member 80 has the 1st cooling temperature, the
2 kinds of gases will not be condensed in the surface of gas flow adjustment member 80.
The a part for entering the gas of main accommodation space 65 can be reflected by gas flow adjustment member 80.The gas reflected
At least part of body is towards second level cryopanel component 20.Alternatively, a part of the gas reflected can be towards radiation barrier
Part 30 or entrance cryopanel 32, and towards second level cryopanel component 20 after being reflected again herein.In this way, second level cryopanel
Component 20 can pass through condensation the 2nd kind of gas of discharge and pass through absorption the 3rd kind of gas of discharge.
Cryogenic pump is generally configured with the mutually different two kinds of cryopanels of temperature.There is gas condensation on the cryopanel of low temperature.Companion
With the use of cryogenic pump, condensate layer is grown up on low temperature plate.Similarly, in the structural portion of support low temperature plate, condensation
Layer can also grow up.The condensate layer of growth is eventually contacted with the cryopanel of high temperature.In this way, in high temperature cryopanel and condensate layer
Contact site, gas can gasify again and around being discharged into.Cryogenic pump can be interfered to give full play to from the release of the gas of condensate layer
It is acted on.Therefore, the hold-up of the gas of time of contact becomes the maximum hold-up of cryogenic pump.
But cryogenic pump 10 according to involved in embodiment, gas flow adjustment member 80 can slow down or prevent cold
Solidifying layer is grown up at the position of the 1st cooling temperature and the position of the 2nd cooling temperature position close to each other.Therefore, 10 energy of cryogenic pump
Enough slow down or prevent the location contacts of condensate layer and the 1st cooling temperature, or even can slow down or prevent the gasification again of condensate layer.
As a result, it is possible to the fronts of the top low temperature plate 60 in main accommodation space 65 to condense a large amount of 2nd kind of gas.Therefore, Neng Gouti
The gas hold-up of high/low temperature pump 10.
Above according to embodiment, the present invention is described.Those skilled in the art are of course it is to be understood that the present invention
It is not limited to the above embodiment, is able to carry out various design alterations and there are various modifications example, and this variation
Also belong to the scope of the present invention.
For example, as shown in figure 5, each mounting surface 68 in low temperature board installation member 64 can install multiple low temperature board members
62.In each mounting surface 68, multiple (being two in this example) low temperature board members 62 arrange installation along the direction of cryogenic pump central axis.
In this way, multiple low temperature board members 62 can be respectively configured in the two sides of the 2nd cooling bench 24 of refrigeration machine 16.
More than, horizontal low temperature pump 10 has been illustrated.But the present invention also can be applied to so-called vertical low temperature pump.
Vertical low temperature pump typically refers to: the cryogenic pump that refrigeration machine 16 is arranged along cryogenic pump central axis C.
The shape of low temperature board member 62 is not limited to above-mentioned shape, can also use other shapes.Arc-shaped flat part
75, it is whole not fully flat also to can be set to it for the 1st bending section 76 and/or the 2nd bending section 77.For example, arc-shaped flat part
75 can have inclined surface, recess portion or protrusion at a certain position (for example, position in addition to arc sections 78).Also, cryopanel
The arc sections 78 of component 62 are not required for being proper circular arc.Similarly, the string 79 of low temperature board member 62 is also simultaneously
It does not require be proper straight line.Arc-shaped flat part 75, the 1st bending section 76 and/or the 2nd bending section 77 can also be with
With the opening portions such as hole or slit.
In the above-described embodiment, the mounting base 46 of radiation barrier part 30 is formed in the lower half portion of radiation barrier part 30.
Therefore, the 2nd cooling bench 24 is on the direction of cryogenic pump central axis C relatively close to shielding part bottom 38.But this 2nd is cooling
Platform 24 configuration it is not necessary to.The mounting base 46 of radiation barrier part 30 can also be formed in the upper half of radiation barrier part 30
Point, so that the 2nd cooling bench 24 configures on the direction of cryogenic pump central axis C close to shielding part front end 36.Also, radiation barrier part
30 mounting base 46 can also be formed in the central portion of shielding part side 40 on the direction of cryogenic pump central axis C, so that the 2nd is cold
But platform 24 configures on the direction of cryogenic pump central axis C at the center of radiation barrier part 30.
Embodiments of the present invention can also show as follows.
1. a kind of cryogenic pump, which is characterized in that have:
Refrigeration machine has High-temperature cooling platform and sub-cooled platform；
Radiation barrier part is thermally connected with the High-temperature cooling platform, and its edge passes through the low of the center of low temperature pump steam inlet
The direction of temperature pump central axis extends and surrounds the sub-cooled platform；And
Low temperature plate portion is thermally connected with the sub-cooled platform, and it is described together with the sub-cooled platform
Radiation barrier part surrounds, and low temperature plate portion has two low temperature board members, and two low temperature board member configurations are described
Height and position between the top and bottom of the sub-cooled platform on cryogenic pump central axis direction and it is arranged respectively at institute
The two sides of sub-cooled platform are stated to clip the cryogenic pump central axis,
Each low temperature board member has: arc-shaped flat part, with arc sections and string；And the 1st bending section, and it is described
Arc-shaped flat part is formed as one and connect at a part of the string with the arc-shaped flat part, and the arc-shaped is flat
Smooth portion is thermally connected via the 1st bending section and the sub-cooled platform, described when from the cryogenic pump central axis direction
The arc sections of arc-shaped flat part constitute the outer rim of the low temperature board member,
The remainder of the string of the arc-shaped flat part of each low temperature board member is shaped as, not with institute
State refrigeration machine occur interference can described two low temperature board members interchangeable with one another shape.
2. according to cryogenic pump described in embodiment 1, which is characterized in that
Two mounting surfaces are also equipped with, described two mounting surfaces correspond respectively to described two low temperature board members, and the described 1st is curved
Pars convoluta is mounted on corresponding mounting surface,
Each low temperature board member, which has, to be formed as one and in the remainder of the string with the arc-shaped flat part
The 2nd bending section connecting at least part with the arc-shaped flat part, the 2nd bending section is configured in the side of the string
It is upwardly separated from the mounting surface.
3. according to cryogenic pump described in embodiment 2, which is characterized in that
It is connect in the whole length of remainder of 2nd bending section in the string with the arc-shaped flat part, and
And it is connect on the direction of the string with the 1st bending section.
4. the cryogenic pump according to any one of embodiment 1 to 3, which is characterized in that
Described two low temperature board members are designed to the same part.
5. the cryogenic pump according to any one of embodiment 1 to 4, which is characterized in that
Interval between described two low temperature board members is set as, and the sub-cooled platform is on the direction of the string
Any position be inserted into the size between described two low temperature board members.
6. according to cryogenic pump described in embodiment 5, which is characterized in that
It is permanent throughout the whole length of string on the direction for being spaced in the string between described two low temperature board members
It is fixed.
7. the cryogenic pump according to any one of embodiment 1 to 6, which is characterized in that
1st bending section is bent upward and is had relative to the arc-shaped flat part and passed through for fastening member
Hole,
Position close to the top of the hole configuration between the string and the top of the 1st bending section.
8. the cryogenic pump according to any one of embodiment 1 to 7, which is characterized in that
The High-temperature cooling platform and sub-cooled platform of the refrigeration machine are along the direction with the cryogenic pump central axis
Arrangement,
The cryogenic pump is also equipped with cryopanel positioning member, and the cryopanel positioning member is supported in the sub-cooled platform
And extend from the sub-cooled platform along with the direction of the cryogenic pump central axis,
The cryopanel positioning member so that the arc sections of the arc-shaped flat part of each low temperature board member centralized positioning
Described two low temperature board members are supported in the mode on the cryogenic pump central axis.
9. a kind of cryogenic pump, which is characterized in that have:
Refrigeration machine has High-temperature cooling platform and sub-cooled platform；
Radiation barrier part is thermally connected with the High-temperature cooling platform, and its edge passes through the low of the center of low temperature pump steam inlet
The direction of temperature pump central axis extends and surrounds the sub-cooled platform；
Low temperature plate portion is thermally connected with the sub-cooled platform, and it is described together with the sub-cooled platform
Radiation barrier part surrounds, and low temperature plate portion has two low temperature board members, which is arranged respectively at
The two sides of the sub-cooled platform are to clip the cryogenic pump central axis；And
Two mounting surfaces correspond respectively to described two low temperature board members,
Each low temperature board member has: arc-shaped flat part, with arc sections and string；And the 1st bending section, and it is described
Arc-shaped flat part is formed as one and connect at a part of the string with the arc-shaped flat part, the 1st bending
Portion is mounted on corresponding mounting surface, and the arc-shaped flat part is thermally connected via the 1st bending section and the sub-cooled platform,
The remainder of the string of the arc-shaped flat part of each low temperature board member is shaped as, not with institute
State refrigeration machine occur interference can described two low temperature board members interchangeable with one another shape,
Each low temperature board member, which has, to be formed as one and in the remainder of the string with the arc-shaped flat part
The 2nd bending section connecting at least part with the arc-shaped flat part, the 2nd bending section is configured in the side of the string
It is upwardly separated from the mounting surface.
10. according to cryogenic pump described in embodiment 9, which is characterized in that
The upper end of the sub-cooled platform of described two low temperature board member configurations on the cryogenic pump central axis direction
It height and position between lower end and is arranged respectively at the two sides of the sub-cooled platform and states cryogenic pump center to clip to send
Axis.
11. the cryogenic pump according to embodiment 9 or 10, which is characterized in that
When from the cryogenic pump central axis direction, the arc sections of the arc-shaped flat part constitute the low temperature board member
Outer rim.
12. the cryogenic pump according to any one of embodiment 9 to 11, which is characterized in that
It is connect in the whole length of remainder of 2nd bending section in the string with the arc-shaped flat part, and
And it is connect on the direction of the string with the 1st bending section.
13. the cryogenic pump according to any one of embodiment 9 to 12, which is characterized in that
Described two low temperature board members are designed to the same part.
14. the cryogenic pump according to any one of embodiment 9 to 13, which is characterized in that
Interval between described two low temperature board members is set as, and the sub-cooled platform is on the direction of the string
Any position can be inserted in the size between described two low temperature board members.
15. according to cryogenic pump described in embodiment 14, which is characterized in that
It is permanent throughout the whole length of string on the direction for being spaced in the string between described two low temperature board members
It is fixed.
16. the cryogenic pump according to any one of embodiment 9 to 15, which is characterized in that
1st bending section is bent upward and is had relative to the arc-shaped flat part and passed through for fastening member
Hole,
Position close to the top of the hole configuration between the string and the top of the 1st bending section.
17. the cryogenic pump according to any one of embodiment 9 to 16, which is characterized in that
The High-temperature cooling platform and sub-cooled platform of the refrigeration machine are along the direction with the cryogenic pump central axis
Arrangement,
The cryogenic pump is also equipped with cryopanel positioning member, and the cryopanel positioning member is supported in the sub-cooled platform
And extend from the sub-cooled platform along with the direction of the cryogenic pump central axis,
The cryopanel positioning member so that the arc sections of the arc-shaped flat part of each low temperature board member centralized positioning
Described two low temperature board members are supported in the mode on the cryogenic pump central axis.
Symbol description
10- cryogenic pump, 12- air inlet, 16- refrigeration machine, the 2nd cooling bench of 24-, 30- radiation barrier part, 62- cryopanel structure
Part, 67- cryopanel positioning member, 68- mounting surface, 75- arc-shaped flat part, the 1st bending section 76-, the 2nd bending section 77-, 78-
Arc sections, C- cryogenic pump central axis, 79- string, 87- fastening member, 88- fastener hole.
Industrial availability
The present invention can utilize in the field of cryogenic pump.
Claims (9)
1. a kind of cryogenic pump, which is characterized in that have:
Refrigeration machine has High-temperature cooling platform and sub-cooled platform；
Radiation barrier part is thermally connected with the High-temperature cooling platform, and the cryogenic pump that its edge passes through the center of low temperature pump steam inlet
The direction of central axis extends and surrounds the sub-cooled platform；And
Low temperature plate portion, with the sub-cooled platform be thermally connected, and its together with the sub-cooled platform by the radiation
Shielding part surrounds, and low temperature plate portion has two low temperature board members, and two low temperature board member configurations are in the low temperature
It pumps the height and position between the top and bottom of the sub-cooled platform on central axis direction and is respectively arranged at described low
The two sides of warm cooling bench to clip the cryogenic pump central axis,
Each low temperature board member has: arc-shaped flat part, with arc sections and string；And the 1st bending section, with the arch
Shape flat part is formed as one and connect at a part of the string with the arc-shaped flat part, the arc-shaped flat part
It is thermally connected via the 1st bending section and the sub-cooled platform, when from the cryogenic pump central axis direction, the arch
The arc sections of shape flat part constitute the outer rim of the low temperature board member,
The remainder of the string of the arc-shaped flat part of each low temperature board member is shaped as, not with the system
Cold occur interference can described two low temperature board members interchangeable with one another shape.
2. cryogenic pump according to claim 1, which is characterized in that
Two mounting surfaces are also equipped with, described two mounting surfaces correspond respectively to described two low temperature board members, the 1st bending section
It is mounted on corresponding mounting surface,
Each low temperature board member have be formed as one with the arc-shaped flat part and the remainder of the string at least
The 2nd bending section connecting at a part with the arc-shaped flat part, the 2nd bending section is configured on the direction of the string
It is detached from the mounting surface.
3. cryogenic pump according to claim 2, which is characterized in that
It is connect in the whole length of remainder of 2nd bending section in the string with the arc-shaped flat part, and
It is connect on the direction of the string with the 1st bending section.
4. cryogenic pump according to any one of claim 1 to 3, which is characterized in that
Described two low temperature board members are designed to the same part.
5. cryogenic pump according to any one of claim 1 to 4, which is characterized in that
Interval between described two low temperature board members is set as, the sub-cooled platform appointing on the direction of the string
Meaning position can be inserted in the size between described two low temperature board members.
6. cryogenic pump according to claim 5, which is characterized in that
Whole length on the direction for being spaced in the string between described two low temperature board members throughout string is constant.
7. cryogenic pump according to any one of claim 1 to 6, which is characterized in that
1st bending section is bent upward relative to the arc-shaped flat part and has and passes through for fastening member
Hole,
Position close to the top of the hole configuration between the string and the top of the 1st bending section.
8. cryogenic pump according to any one of claim 1 to 7, which is characterized in that
The High-temperature cooling platform and sub-cooled platform of the refrigeration machine are arranged along with the direction of the cryogenic pump central axis,
The cryogenic pump is also equipped with cryopanel positioning member, the cryopanel positioning member be supported in the sub-cooled platform and
Extend from the sub-cooled platform along with the direction of the cryogenic pump central axis,
The cryopanel positioning member is so that the arc sections of the arc-shaped flat part of each low temperature board member are centrally located in institute
It states the mode on cryogenic pump central axis and supports described two low temperature board members.
9. a kind of cryogenic pump, which is characterized in that have:
Refrigeration machine has High-temperature cooling platform and sub-cooled platform；
Radiation barrier part is thermally connected with the High-temperature cooling platform, and the cryogenic pump that its edge passes through the center of low temperature pump steam inlet
The direction of central axis extends and surrounds the sub-cooled platform；
Low temperature plate portion, with the sub-cooled platform be thermally connected, and its together with the sub-cooled platform by the radiation
Shielding part surrounds, and low temperature plate portion has two low temperature board members, which is arranged respectively at described
The two sides of sub-cooled platform are to clip the cryogenic pump central axis；And
Two mounting surfaces correspond respectively to described two low temperature board members,
Each low temperature board member has: arc-shaped flat part, with arc sections and string；And the 1st bending section, with the arch
Shape flat part is formed as one and connect at a part of the string with the arc-shaped flat part, the 1st bending section peace
Mounted in corresponding mounting surface, the arc-shaped flat part is thermally connected via the 1st bending section and the sub-cooled platform,
The remainder of the string of the arc-shaped flat part of each low temperature board member is shaped as, not with the system
Cold occur interference can described two low temperature board members interchangeable with one another shape,
Each low temperature board member have be formed as one with the arc-shaped flat part and the remainder of the string at least
The 2nd bending section connecting at a part with the arc-shaped flat part, the 2nd bending section is configured on the direction of the string
It is detached from the mounting surface.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-021002 | 2017-02-08 | ||
| JP2017021002A JP2018127943A (en) | 2017-02-08 | 2017-02-08 | Cryopump |
| PCT/JP2018/003606 WO2018147187A1 (en) | 2017-02-08 | 2018-02-02 | Cryopump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110234876A true CN110234876A (en) | 2019-09-13 |
Family
ID=63107484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201880005243.0A Pending CN110234876A (en) | 2017-02-08 | 2018-02-02 | Cryogenic pump |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2018127943A (en) |
| KR (2) | KR102436493B1 (en) |
| CN (1) | CN110234876A (en) |
| TW (1) | TWI688710B (en) |
| WO (1) | WO2018147187A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112523993A (en) * | 2020-12-03 | 2021-03-19 | 安徽万瑞冷电科技有限公司 | Adsorption array and cryogenic pump with same |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7311522B2 (en) * | 2018-09-06 | 2023-07-19 | 住友重機械工業株式会社 | cryopump |
| GB2613595A (en) * | 2021-12-08 | 2023-06-14 | Edwards Vacuum Llc | A cryopump with increased capacity |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08219019A (en) * | 1995-02-14 | 1996-08-27 | Ulvac Kuraio Kk | Cryo pump |
| JP2009062891A (en) * | 2007-09-06 | 2009-03-26 | Sumitomo Heavy Ind Ltd | Cryopanel |
| JP2012047120A (en) * | 2010-08-27 | 2012-03-08 | Aisin Seiki Co Ltd | Cryopump |
| CN102817809A (en) * | 2011-06-08 | 2012-12-12 | 住友重机械工业株式会社 | Cryopump and cryogenic refrigerator |
| CN103807140A (en) * | 2012-11-13 | 2014-05-21 | 住友重机械工业株式会社 | Cryopump, cryopanel structure and vacuum exhaust method |
| CN104179660A (en) * | 2013-05-27 | 2014-12-03 | 住友重机械工业株式会社 | Cryopump and vacuum pumping method |
| CN105484968A (en) * | 2014-10-07 | 2016-04-13 | 住友重机械工业株式会社 | Cryopump |
| CN106014916A (en) * | 2015-03-31 | 2016-10-12 | 住友重机械工业株式会社 | Cryopump |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4555907A (en) * | 1984-05-18 | 1985-12-03 | Helix Technology Corporation | Cryopump with improved second stage array |
| DE58904918D1 (en) * | 1989-02-28 | 1993-08-19 | Leybold Ag | A CRYOPUMPUM OPERATED WITH A TWO-STAGE REFRIGERATOR. |
| JP3309229B2 (en) * | 1992-07-16 | 2002-07-29 | アルバック・クライオ株式会社 | Cryopump device with turbo molecular pump |
| JPH0735041A (en) * | 1993-07-14 | 1995-02-03 | Fujitsu Ltd | Cryopump |
| JP4980179B2 (en) * | 2007-09-06 | 2012-07-18 | 住友重機械工業株式会社 | Cryopanel |
| JP5031548B2 (en) * | 2007-12-28 | 2012-09-19 | 住友重機械工業株式会社 | Cryopump |
-
2017
- 2017-02-08 JP JP2017021002A patent/JP2018127943A/en active Pending
-
2018
- 2018-01-19 TW TW107101951A patent/TWI688710B/en active
- 2018-02-02 WO PCT/JP2018/003606 patent/WO2018147187A1/en active Application Filing
- 2018-02-02 KR KR1020217039684A patent/KR102436493B1/en active IP Right Grant
- 2018-02-02 KR KR1020197017505A patent/KR20190110087A/en not_active Application Discontinuation
- 2018-02-02 CN CN201880005243.0A patent/CN110234876A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08219019A (en) * | 1995-02-14 | 1996-08-27 | Ulvac Kuraio Kk | Cryo pump |
| JP2009062891A (en) * | 2007-09-06 | 2009-03-26 | Sumitomo Heavy Ind Ltd | Cryopanel |
| JP2012047120A (en) * | 2010-08-27 | 2012-03-08 | Aisin Seiki Co Ltd | Cryopump |
| CN102817809A (en) * | 2011-06-08 | 2012-12-12 | 住友重机械工业株式会社 | Cryopump and cryogenic refrigerator |
| CN103807140A (en) * | 2012-11-13 | 2014-05-21 | 住友重机械工业株式会社 | Cryopump, cryopanel structure and vacuum exhaust method |
| CN104179660A (en) * | 2013-05-27 | 2014-12-03 | 住友重机械工业株式会社 | Cryopump and vacuum pumping method |
| CN105484968A (en) * | 2014-10-07 | 2016-04-13 | 住友重机械工业株式会社 | Cryopump |
| CN106014916A (en) * | 2015-03-31 | 2016-10-12 | 住友重机械工业株式会社 | Cryopump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112523993A (en) * | 2020-12-03 | 2021-03-19 | 安徽万瑞冷电科技有限公司 | Adsorption array and cryogenic pump with same |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018147187A1 (en) | 2018-08-16 |
| KR20190110087A (en) | 2019-09-27 |
| TW201829913A (en) | 2018-08-16 |
| TWI688710B (en) | 2020-03-21 |
| KR20210149250A (en) | 2021-12-08 |
| KR102436493B1 (en) | 2022-08-24 |
| JP2018127943A (en) | 2018-08-16 |
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