CN110234799A

CN110234799A - Consecutive deposition equipment and component for it

Info

Publication number: CN110234799A
Application number: CN201780076077.9A
Authority: CN
Inventors: 米歇尔·帕西格; 马库斯·赛博尔; 诺伯特·贝依; 约翰·博西克; 达米安·派西; 沃夫冈·敦佩费德; 马库斯·尤莱恩; 霍格·坤莱恩; 托马斯·赫尔特; 安德列斯·柯特瑞尔
Original assignee: Reina Technologies Ltd
Current assignee: Reina Technologies Ltd; RENA Technologies GmbH
Priority date: 2016-12-09
Filing date: 2017-12-08
Publication date: 2019-09-13
Also published as: KR20190091481A; TW201827655A; EP3551785A1; US20190338439A1; JP2020505503A; WO2018103793A1

Abstract

The present invention relates to a kind of for being electrolysed the consecutive deposition equipment (10 of deposition substance on object (1)；20；30；50), wherein the consecutive deposition equipment (10；20；30；It 50) include that there is at least one conductive contact arm (13；33a, 33b, 33c, 33d, 53a, 53b, 53c) contact device (12；22a, 22b；32a, 32b；52) device (12, and is wherein contacted；22a, 22b；32a, 32b；52) it is disposed in the region of the electrolyte (7) without the electrolytic deposition for the substance of consecutive deposition equipment.The invention further relates to the components (60) for being used for consecutive deposition equipment (50).

Description

Consecutive deposition equipment and component for it

The present invention relates to as claimed in claim 1 as described in the preamble a kind of for being electrolysed the company of deposition substance on object Continuous deposition apparatus and a kind of component for the consecutive deposition equipment of electrolysis deposition substance on object.

If intended by substance electrolytic deposition on voluminous object, in many cases, this can cost-effectively make It is realized with consecutive deposition equipment.For example, metal or metal alloy can expense advantageously on an industrial scale largely deposit On substrate, such as solar cell substrate or finished product solar battery.Electrolytic deposition is related to using containing substance to be deposited The electrolyte of ion.Electric current is additionally needed, carrier can be supplied by the electric current by the ion, ion deposition is made to exist On the surface of object.For example, in the case where Metal deposition, electronics is fed into body surface to be coated, there They are reacted when contacting in a way known with electrolyte with the metal cation from electrolyte and the metal is formed sediment Product is on a surface of an.

In order in consecutive deposition equipment by substance electrolytic deposition on voluminous object, it is necessary to pass through continuous device this A little objects are in electrical contact.Since object is moved relative to consecutive deposition equipment, sliding contact is had proven to pair This is useful.This sliding contact can be for example by conduction brush or at least partly elastically bendable or film are formed.Especially The film made of metal, high-grade steel or graphite can be used in ground.

If multiple objects pass through the continuous device of discussed type, slider contacts first object first, Then contact passes in succession through another object of the equipment.If these objects are such as the customization or necessary in many applications with that This is separated by the mode of certain space distance by continuous device, then slider is after moving past the first object and subsequent encountering Before object, any object will not be encountered in certain time.In the certain time, passed through between sliding contact and electrolyte Often occur directly to contact.For example, slider immerses in electrolyte solution.For example, in the substrate of such as solar battery It is particularly the case during upper electrolysis deposition substance.This undesirable direct contact between sliding contact and electrolyte, leads Cause deposit of the substance (such as metal) on sliding contact from electrolyte.The case where this effect not only occurs on contact brush Under, and occur in the case where other contact devices of such as metallic roll.This on sliding contact or other contacts is not wished The deposit of prestige may be damaged the surface of the object then contacted.In such as solar cell substrate or solar battery etc In the case where thin objects, this may cause the destruction of object.Moreover, it may also happen that corrosion phenomenon on contact.

In this context, the problem to be solved by the invention is to provide a kind of for being electrolysed the company of deposition substance on object Continuous deposition apparatus, can be reduced or even be avoided electrolytic deposition of the substance on contact apparatus by the equipment.

The problem is resolved by the consecutive deposition equipment of the feature with claim 1.

In addition, the present invention solves the problems, such as to manufacture this consecutive deposition equipment in a manner of cost advantages.

The problem is resolved by the component of the feature with claim 9.

Dependent claims relate separately to advantageous further embodiment.

Consecutive deposition equipment according to the present invention for being electrolysed deposition substance on object includes leading at least one The contact device of electrical contact arm.In addition, the contact device is disposed in those of consecutive deposition equipment region, these regions are not Electrolyte containing the electrolytic deposition for substance.Due to this arrangement, when contacting device contact object and it does not contact object When, the direct contact that is not in contact between device and electrolyte.Substance is thus avoided to be not intended on contact device Electrolytic deposition.The quick or premature corrosion of contact device have been prevented, and make the process conditions of deposition process more steady It is fixed.Furthermore, it is possible to greatly improve the control of processing.In addition, the maintenance cost for consecutive deposition equipment may be reduced, because For that need not clean the undesirable deposition substance on contact device, otherwise this cleaning must be by passing through after some time Etching or reverse current direction are completed.Moreover, making it possible in many cases using higher current density.

Contact arm is preferably implemented in a flexible manner.Object table can be overcome in a manner of cost advantages in this way Irregularities on face.Preferably, multiple contact arms are provided with, even if because in this way in the feelings of body surface out-of-flatness Under condition, it is also possible by means reliable contact is realized in these contacts.

Contact arm, or device is entirely contacted, it can be for example made of graphite film or advanced steel disc, wherein in advanced steel disc In the case of the thickness of about 0.5mm be proved to be beneficial.In individual application, your gold for example, by using such as gold of contact arm The coating of category can be advantageous.

Preferably, using such contact device, i.e. the contact arm of the contact device is at least contacted at them with object There is smooth edge in those regions.This smooth edge can for example be cut by laser, line corrodes or electrobrightening To realize.Due to using the contact arm with smooth edge, can to avoid or at least reduce object scraped or other damage Risk.

Preferably, all contact devices are disposed in the region without electrolyte.It in this way can be utmostly Ground utilizes advantages of the present invention.

However, in principle, there is also differently arranged one or more a possibility that contacting device.

In an advantageous configuration modification, electrolyte is arranged in tank.At least one bleeder is set in tank, The height of electrolyte can be made locally to reduce in outflow region by least one bleeder.Contacting device has contact Surface can contact object by the contact surface.These can be for example during the operation of consecutive deposition equipment with Those of at least one conductive contact arm that object is contacted surface.The contact surface of contact device is disposed in described It flows out in region.In this way it is possible to be realized in a manner of cost advantages in the area without electrolyte of consecutive deposition equipment The feature of arrangement contact device in domain.

Preferably, at least one bleeder includes ducted body, which is at least partially disposed at least one and connects The lower section of the contact surface of device is touched, and electrolyte can at least partly be flowed by the ducted body.Ducted body can be with It is shaped and arranged in this way, i.e., so that below its contact surface for being only located at single contact device.Alternatively, can determine in this wise The size of ducted body, i.e., so that below its contact surface for being at least partially situated at multiple contact devices.In this way, it flows out Region can be adapted to the position of contact surface in such a way that abnormal cost is advantageous, and vice versa.

It is particularly preferred that at least one described bleeder has an opening in its top side, the opening is at least partly Ground is arranged in the liquid level of electrolyte or less.This allows to reduce the liquid level of electrolyte in a manner of localizing very much.

In practice, it has proved that it is necessary to provide a pipes as ducted body, the upper opening of pipe be arranged in The lower section of the contact surface of few contact device.

In a kind of configuration modification, multiple contact devices, preferably all contact devices are electrically connected to same voltage Source.Thus they pass through the voltage fed.This makes it possible to carry out to contact the wiring of device in a manner of cost advantages.So And different deposition rates may be established at contact device.This is attributable to following facts: i.e.: from voltage source to phase The part very different there is resistance on the path for the contact device answered.In order to compensate for that, provide be connected to it is more The load resistance of at least part of upstream of a contact device.In this case, the size of corresponding load resistance is by this Sample determines, i.e., so that when being contacted, applies the electric current of essentially identical size to each of the multiple contact device. In other words: load resistance is so selected, i.e., so that described in resistance on from voltage source to the path of corresponding contact device Difference is compensated, and each contact device flows through identical electric current.In the sense of the present invention, the contact carried out should Contact surface is understood to mean that so that electric current can be at a flow way against the object.If all contact devices are all It is connected to voltage source, then center power supply can be used, and all contact devices are in parallel.Conflicting with the advantage is to increase The mounting cost added, because being necessary for each contact device determines and compensates for resistance difference.In addition, establishing higher electrical power Loss, so that voltage source must provide considerably higher voltage, this equipment cost for being used for the production of consecutive deposition equipment can quilt It increases.

Alternatively, special rectifier device can be provided for each contact device.The rectifier is preferably implemented as constant-current source. In this way can to avoid or at least reduce compensation resistance difference load resistance determination and installation.However, using this Method, be now generally used for solar battery manufacture industrial consecutive deposition equipment in the case where, would require about 250 it is whole Flow device or constant current source.This needs sizable installation space, this must be typically installed at except actual continuous device.This Outside, the size of this equipment results in high wiring expense.

Component according to the present invention for being electrolysed the consecutive deposition equipment of deposition substance on object includes at least one Device is contacted, and may be connected to the control device of voltage source.Each of at least one described contact device is via independent Be wired to control device, enable current to be separately applied to each of at least one described contact device. By this component, above-mentioned consecutive deposition equipment can be constructed in a modular manner.

Preferably, at least one contact device includes multiple contact devices, preferably at least four contact devices.This makes can To realize above-mentioned constant current source in a manner of cost advantages to each contact device the advantages of.

Therefore, control device is preferably configured to so that being applied to each contact device at least one contact device Electric current by be respectively used to it is each it is described contact device opened loop control and/or closed-loop control control.For closed-loop control The measurand of process can be remembered for example, flowing through the contact resistance at the electric current or each contact device of corresponding contact device Record processing history in, and for each object be further processed optimised can adapt to each contact device or other Handle position.

Preferably, control device is configurable for the perseverance of the individual contact device of each of at least one contact device Closed-loop control is flowed, so that the electric current of constant size can be separately applied to each list at least one contact device Only contact device.In this way it is possible to realize substance in electrolysis consecutive deposition equipment in such a way that relative cost is advantageous Uniform electrolytic deposition.

Advantageously, control device is configured as that the individual contact device of each of at least one contact device is made to flow through list It is only, can scheduled current curve.In this case, current curve should be understood the variable time-varying series of current value.Art Language " flowing through ... current curve " indicates that the current value for corresponding to the current curve is applied in the form of time-varying series by shadow Loud contact device.In such a case, it is possible to control the current value by opened loop control or closed-loop control.Component this Kind configuration provides improved treatment process possibility.For example, current impulse can be applied to contact device, and therefore apply It is added to the object contacted in consecutive deposition equipment by the latter.In English, which is known as pulse electricity in some cases Plating.Furthermore, it is possible to apply reversed or alternately polarity electric current, this is referred to as reversed plating in English in some cases.It forms sediment Delay or pause during product also can be realized.

In an advantageous configuration modification, control device has communication interface can be with one by means of the communication interface Data processing equipment two-way exchange data.In this case, the communication interface is preferably implemented as bus interface, such as It is embodied as the interface of CAN bus.By the communication interface, current control device can be obtained from data processing equipment to electricity The regulation of flow control.Furthermore, it is possible to by the measurement data determined by control device (for example, in electric current of each contact device) It is transmitted to data processing equipment, to be for example stored in institute for handling the archive for monitoring and processing data, and processing data State data processing equipment.This especially compensate in subsequent installation region by the technological parameter of adaptation processed The defect established in journey.Preferably pass through shielded protocol realization by the data exchange of communication interface.

Consecutive deposition equipment according to the present invention preferably includes at least one said modules.In this way it is possible to The advantages of component is utilized in consecutive deposition equipment.

The consecutive deposition equipment described in the present specification may be advantageously used with the electrolytic deposition of metal or metal alloy. Particularly advantageously, it can be used for metal or metal alloy electrolytic deposition on substrate, especially be deposited over solar-electricity Chi Shang.

In practice, consecutive deposition equipment according to the present invention (passes through in English in the metallization of solar battery Be commonly referred to as aluminium back panel) in, passivation transmitter and rear solar battery (so-called PERC) metallization in, passivation send out All to photosensitive in the metallization of the complete diffusion solar cells in emitter-base bandgap grading rear portion (so-called PERT solar battery) and in two sides In the metallization of the solar battery (so-called double-sided solar battery) of sense, it is proved to be valuable.

Below with reference to the accompanying drawings the present invention is explained in greater detail.In the accompanying drawings, the element of phase same-action has identical attached drawing mark Note.It is also even such on functional character the present invention is not limited to exemplary embodiment-shown in figure.Above-mentioned and following knot The description for closing attached drawing includes many features, these features are partly rendered as multiple combinations in the dependent claims.However, this Every other feature disclosed in a little features and above and below Detailed description of the invention can also be considered separately and be combined to form confession Advantageous being further combined of those skilled in the art's progress.Particularly, all features being previously mentioned in each case can be with It individually or with any appropriate combination is combined with consecutive deposition equipment and component required in independent claims.

In the accompanying drawings:

Fig. 1 shows the first exemplary embodiment of consecutive deposition equipment according to the present invention with schematic sectional；

Fig. 2 shows the second exemplary embodiment of consecutive deposition equipment according to the present invention with schematic sectional；

Fig. 3 shows the partial illustration of the third exemplary embodiment of consecutive deposition equipment according to the present invention；

It is the 4th exemplary to show consecutive deposition equipment according to the present invention, comprising component according to the present invention by Fig. 4 The schematic partial view of embodiment shows.

Fig. 1 shows the first exemplary embodiment of consecutive deposition equipment according to the present invention with schematic sectional.Institute The consecutive deposition equipment 10 shown includes tank 5, and liquid electrolyte 7 is arranged in tank 5.In consecutive deposition equipment 10, solar-electricity It is transmitted on direction of transfer 3 by transfer roller 4 in pond 1.In this case, the downside of solar battery 1 is contacted with electrolyte 7. Tank 5 can be implemented as overflow launder in known manner, so that the liquid level 8 of electrolyte 7 is higher than the top edge of tank 5, and be electrolysed Matter overflows in the tank (not shown) that one surrounds.

Consecutive deposition equipment 10 includes contact device 12.For simplicity, the one of contact device 12 is illustrated only in Fig. 1 A conductive contact arm 13, but multiple contact arms can be easily provided.Pipe 16 as bleeder is arranged in tank 5. The upper opening 17 of the pipe 16 is arranged in the lower section of the liquid level 8 of electrolyte 7.Therefore, electrolyte 15 flows into pipe around pipe 16 Opening 17 in, and flowed downward by pipe 16.Therefore, the liquid level 8 of electrolyte is locally lowered in outflow region 18.

Contacting device 12 has contact surface 14 in its lower end.These are when solar battery 1 passes through consecutive deposition equipment The surface that those of contacts with the surface of solar battery 1 of device 12 is contacted when 10.Contact the contact surface 14 of device 12 It is disposed in outflow region 18.Therefore, contact surface 14 and entire contact device 12, even if not being supported at them When on one in solar battery 1, it will not be contacted with electrolyte 7.Therefore, contact surface 14 and contact device 12 on the whole It is never contacted with electrolyte 7, and avoids the unfavorable Metal deposition as described above on contact device 12.In solar energy Battery 1, which passes through contact device 12 lower section and those of contacts the moment by contact surface 14, is carried on the sun according to the size of pipe 16 Contact surface 14 on the surface of energy battery 1 may be in the outside in outflow region 18 really.However, due to contact surface 14 On the liquid level 8 that these moment are located at electrolyte 7, therefore contact surface 14 or the other parts and electrolyte that contact device 12 It will not be in contact between 7.

In exemplary embodiment in Fig. 1, the contact surface 14 of the contact device 12 in the meaning of the application is by cloth It sets in outflow region 18.In addition, pipe 16 is disposed in 14 lower section of contact surface of contact device 12.Correspondingly, shown in Fig. 2 Exemplary embodiment in, the contact surface 14 of contact device 22a, 22b are disposed in outflow region 28, and pipe 26 is arranged Below the contact surface 14 of contact device 22a, 22b.

A kind of consecutive deposition equipment 20 is shown with the second exemplary embodiment that schematic sectional illustrates in Fig. 2, The difference of itself and the consecutive deposition equipment 10 in Fig. 1 essentially consists in, and is provided with two contact devices in outflow region 28 22a, 22b, the contact device are arranged in such a way that the transmission direction 3 along solar battery 1 is offset relative to each other.? The verified configuration modification is advantageous in specific application.Rest part the case where and Fig. 1 in exemplary embodiment In it is identical.The contact surface 14 of contact device 22a, 22b are disposed in outflow region 28 and never connect with electrolyte 7 Touching.The opening 27 of pipe 26 is also to be disposed in the lower section of the liquid level 8 of electrolyte 7.

Fig. 3 shows the perspective partial diagram of another exemplary embodiment.Shown in the case where consecutive deposition equipment 30 Under, contact device 32a, 32b are provided, each contact device includes four contact arms 33a, 33b, 33c, 33d.To be similar to figure The mode of contact device 22a, 22b in exemplary embodiment in 2, in the top of the same bleeder along solar-electricity The direction of transfer 3 in pond 1 has been disposed adjacently two contacts device 32a, 32b, and the bleeder is as in consecutive deposition equipment 20 In the case of like that include one pipe.Other bleeders can also be provided.It can't see the pipe as bleeder in Fig. 3. Contacting device 32b, also only part is visible with fraction.In most cases, contact device 32b is by contact device bearing part 34 are blocked.These contact device bearing parts 34 are used to support the contact apparatus module 36 for accommodating contact device 32a, 32b.

In the case where consecutive deposition equipment 30, all contact device 32a, 32b are electrically connected to voltage source 40.In order to mend The difference (as described above in greater detail) of resistance is repaid, load resistance 38 is connected the upstream of all contact device 32a, 32b. In the exemplary embodiment of Fig. 3, the load resistance is disposed in contact apparatus module 36.In principle, they can also be with It is arranged in other positions.For the sake of becoming apparent from, the electrical lead of voltage source 40 is not shown in the diagram in Fig. 3.

In other exemplary embodiments as depicted in the figures like that, solar battery 1 is by means of transfer roller 4 along biography It send direction 3 to be transmitted and is directed over contact device 32a, 32b in this process.In this case, showing in Fig. 3 Contact device 32a, the 32b formed in example property embodiment by advanced steel disc is slight curving and connects with the top side of solar battery 1 Touching.Contact with contact device 32a, 32b does not slow down the movement for even stopping solar battery 1.Shown in Fig. 1 to Fig. 4 In all exemplary embodiments, device is contacted at least part time of their contact solar cells by electric current or current-carrying Son is transmitted to solar battery.The circuit is closed by electrolyte 7 and anode (not shown) in known manner.

Fig. 4 shows in a schematic form an exemplary embodiment of component according to the present invention.The component 60 is by dotted line side Boundary mark is known.Meanwhile Fig. 4 is shown based on schematic partial view and shows the another exemplary embodiment of consecutive deposition equipment.The company Continuous deposition apparatus 50 includes tank, electrolyte, bleeder and conveying roller.However, for the sake of becoming apparent from, these component parts are not It is shown in FIG. 4.In contrast, solar battery 1 is shown, 3 is passed along the conveying direction by transfer roller (not shown) It send.The case where similar to exemplary embodiment in Fig. 1 and 2, bleeder is provided, is especially managed, forms outflow region, The contact surface of contact device 52 is disposed in the outflow region.

Consecutive deposition equipment 50 includes four components 60.The quantity of component, which can according to need, to be increased or decreased.Each institute Stating component includes three contact devices 52 in exemplary embodiment in Fig. 4.Therefore, which is designed to be used as three and sets It is standby.The quantity of contact device can increase, such as in order to be each in component 60 as in the exemplary embodiment in Fig. 3 Road provides two contact devices, or in order to be extended by additional road to consecutive deposition equipment 50.Each contact dress Setting 52 includes three contact arms 53a, 53b, 53c.The number of contact arm can be adjusted according to corresponding application.Contact device 52 are supported on contact device bearing part 54.

Other than contacting device 52, component 60 further includes the control device 64 that may be connected to voltage source.Due in Fig. 4 Diagram in consecutive deposition equipment 50 in used component 60, the control device has been coupled to voltage source 70.In addition, every A contact device 52 is by being individually wired to control device 64.This connection is so that electric current can be applied separately What the mode on to each contact device 52 carried out.

In addition, component 60 includes data processing unit 68, it is configured as executing measurement processing in component, such as each It is a contact device 52 or contact arm 53a, 53b, 53c place electric current or resistance measurement, and detect measured value and to they progress must That wants is further processed.Control device is configurable for the constant current closed-loop control of each contact device.In addition, control device quilt Be configured to make each contact device 52 flow through individually, can scheduled current curve.The function of control device can pass through Discrete electrically or electronically circuit or component is realized.Preferably, data processing unit 68 is configured as control device These functions are provided when 64 other assemblies are appropriate.This makes processing management have high flexibility.By being provided in component 60 Bus interface 66, further enhance this flexibility；The bus interface can be realized double with data processing equipment 72 To data exchange.Using the bus interface, the survey determined by control device 66 can be assessed in central data processing unit The contact device of the component 60 or the component measuring data, and be disposed in 3 downstream along the conveying direction can be for each Individual solar battery and targetedly driven.This allows to through the subsequent transverse direction in consecutive deposition equipment 50 Each characteristic that processing parameter is adapted in part or processing parameter is made to adapt to corresponding solar battery 1, to compensate Or disadvantage determined by least reducing.In addition, in order to be achieved to processing, the measurement of each processed solar battery and Processing data may pass to data processing equipment 72 and be achieved.

Complicated current curve may be implemented by means of data processing unit 68.For example, low electricity can be used first Flow valuve, to make, possible electrolyte splash is dry present on solar battery and avoids spark.The process slightly Time point afterwards can provide higher electric current to realize required deposition rate.

In all exemplary embodiments shown in the figure, if it is desired, can by protective paint in epoxy resin or Encapsulating is worth the component of protection to protect, and protects it from corrosion.

Although specifically describing and describing the present invention by preferred exemplary embodiment, the present invention not by The limitation of disclosed exemplary embodiment, and those skilled in the art can be in the feelings for not departing from basic conception of the invention Other modifications of the invention are obtained under condition.

Reference signs list:

1 solar battery

3 transporting directions

4 conveying rollers

5 tanks

7 electrolyte

8 liquid levels

10 consecutive deposition equipment

12 contact devices

13 contact arms

14 contact surfaces

15 electrolyte

16 pipes

17 openings

18 outflow areas

20 consecutive deposition equipment

22a contacts device

22b contacts device

26 pipes

27 openings

28 outflow areas

30 consecutive deposition equipment

32a contacts device

32b contacts device

33a contact arm

33b contact arm

33c contact arm

33d contact arm

34 contact device bearing parts

36 contact apparatus modules

38 load resistances

40 voltage sources

50 consecutive deposition equipment

52 contact devices

53a contact arm

53b contact arm

53c contact arm

54 contact device bearing parts

60 components

62 electric wires

64 control devices

66 bus interface

68 data processing units

70 voltage sources

72 data processing equipments

Claims

1. one kind on object (1) for being electrolysed the consecutive deposition equipment (10 of deposition substance；20；30；50), wherein described continuous Deposition apparatus (10；20；30；It 50) include that there is at least one conductive contact arm (13；33a, 33b, 33c, 33d, 53a, 53b, Contact device (12 53c)；22a, 22b；32a, 32b；52),

It is characterized by:

Contact device (12；22a, 22b；32a, 32b；52) be disposed in consecutive deposition equipment without the electricity for the substance In the region for solving the electrolyte (7) of deposit.

2. consecutive deposition equipment (10 as described in claim 1；20；30；50), it is characterised in that:

Electrolyte (7) is placed in tank (5)；

It is provided at least one bleeder (16) in tank (5), passes through the liquid level of at least one bleeder electrolyte (7) (8) in outflow region (18；28) it can be lowered in；

Contact device (12；22a, 22b；32a, 32b；52) there are contact surface (14), object (1) can be connect by contact surface Touching；

Contact device (12；22a, 22b；32a, 32b；52) contact surface (14) is placed in outflow region (18；28) in.

3. consecutive deposition equipment (10 as claimed in claim 2；20；30；50), it is characterised in that:

At least one bleeder (16；It 26) include a ducted body (16), which is at least partially disposed at least One contact device (12；22a, 22b；32a, 32b；52) contact surface (14；24) lower section, and electrolyte (7) can be extremely Partially flow through the ducted body.

4. consecutive deposition equipment (10 as claimed in claim 3；20；30；50), it is characterised in that:

(16) are managed by as ducted body (16), the upper opening (17 of the pipeline；27) it is arranged at least one contact device (12； 22a, 22b；32a, 32b；52) contact surface (14；24) lower section.

5. consecutive deposition equipment (30) as described in any one of the preceding claims, it is characterised in that:

Multiple contact devices (32a, 32b) and preferably all contact devices (32a, 32b) and voltage source (40) are conductively connected, and negative At least part of upstream that resistance (38) are connected to the multiple contact device (32a, 32b) is carried, wherein corresponding load electricity The size of resistance (38) makes the electric current of the essentially identical size when being contacted be added to the multiple contact device (32a, 32b) Each of on.

6. consecutive deposition equipment according to any one of claims 1 to 4, it is characterised in that be provided with for each contact device Special rectifier device.

7. consecutive deposition equipment (50) according to any one of claim 1 to 4, including at least one component (60), packet It includes:

Multiple contact devices (52)；

It may be connected to the control device (64) of voltage source (70)；

Wherein each contact device (52) in the multiple contact device (52) is connected to control via individual electric wire (62) Device (64) enables current to each contact device (52) being separately applied in the multiple contact device (52)；

Wherein control device (64) is so configured, i.e., so that being applied to each contact in the multiple contact device (52) Control of the electric current of device (52) by the opened loop control or closed-loop control for being respectively used to each each contact device (52), It is preferably subjected to the control of closed-loop control；

Wherein control device (64) is configured as the constant current closed-loop control that each each contact device (52) carries out, to make The electric current for obtaining constant size can be respectively applied to each each contact device (52)；

Wherein control device (64) be configured to make each each contact device (52) flow through individually, can scheduled electricity Flow curve；

Wherein control device (64) has communication interface (66), data can be bidirectionally exchanged by the communication interface, wherein leading to Letter interface (64) is preferably implemented as bus interface (64).

8. consecutive deposition equipment (50) according to any one of claim 1 to 4, including at least one is such as claim 9 To component described in any one of 14 (60).

9. one kind is used for the component (60) of consecutive deposition equipment (50), for the deposition substance on object, wherein component (60) is wrapped It includes:

At least one contact device (52)；

It may be connected to the control device (64) of voltage source (70)；

Each of wherein at least one contact device (52) is connected to control device (64) by individual electric wire (62), makes Each of at least one contact device (52) can be respectively applied to by obtaining electric current.

10. component (60) as claimed in claim 9, it is characterised in that:

At least one described contact device (52) includes multiple contact devices (52), and preferably at least four.

11. the component (60) as described in any one of claim 9 and 10, it is characterised in that:

Control device (64) is configured so that each contact device (52) being applied at least one contact device (52) Control of the electric current by the opened loop control and/or closed-loop control for being respectively used to each each contact device (52).

12. component (60) as claimed in claim 11, it is characterised in that:

Control device (64) is configurable for individual contact device (52) of each of at least one contact device (52) Constant current closed-loop control, so that the electric current of constant size can be separately applied at least one described contact device (52) Each of individual contact device (52).

13. the component (60) as described in any one of claim 11 and 12, it is characterised in that:

Control device (64) is configured as flowing through for each of at least one contact device (52) individual contact device (52) it is individual, can scheduled current curve.

14. the component according to any one of claim 9 to 13 (60), it is characterised in that:

Control device (64) has communication interface (66), can be with data processing equipment (72) two-way exchange by means of the communication interface Data, wherein communication interface (66) is preferably implemented as bus interface (66).

15. such as consecutive deposition equipment (10 described in any item of the claim 1 to 8；20；30；50) it carries out metal or metal closes The purposes of the electrolytic deposition of gold is preferably sputter-deposited in solar battery wherein the metal or metal alloy is deposited on substrate (1) (1) on.