CN110221373A - A kind of block prism edge filter of depolarization - Google Patents
A kind of block prism edge filter of depolarization Download PDFInfo
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- 230000028161 membrane depolarization Effects 0.000 title claims abstract description 35
- 238000005457 optimization Methods 0.000 claims abstract description 28
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical group O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 25
- 239000004408 titanium dioxide Substances 0.000 claims description 12
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical group [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 10
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical group [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 230000000747 cardiac effect Effects 0.000 claims description 3
- 239000005304 optical glass Substances 0.000 claims description 3
- 230000005622 photoelectricity Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 119
- 239000010410 layer Substances 0.000 description 58
- 230000010287 polarization Effects 0.000 description 44
- 230000003287 optical effect Effects 0.000 description 31
- 230000005540 biological transmission Effects 0.000 description 28
- 238000000926 separation method Methods 0.000 description 28
- 230000000694 effects Effects 0.000 description 20
- 239000011521 glass Substances 0.000 description 15
- 230000004075 alteration Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 14
- 230000007704 transition Effects 0.000 description 12
- 238000003384 imaging method Methods 0.000 description 9
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000005357 flat glass Substances 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 230000009975 flexible effect Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000000985 reflectance spectrum Methods 0.000 description 2
- 238000002310 reflectometry Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 101100070542 Podospora anserina het-s gene Proteins 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000003682 fluorination reaction Methods 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
Abstract
The invention discloses a kind of block prism edge filters of depolarization, including the light cutoff filter multilayer film between two isosceles right-angle prisms and the described two isosceles right-angle prisms of setting, the light cutoff filter multilayer film includes the low refractive index film being arranged alternately, middle refractive index film and high refractive index film.The light cutoff filter multilayer film is by initial configuration (0.795L 1.336M 1.12H 1.336M 0.795L)qIt is obtained through thickness optimization, or by initial configuration (0.56H 1.336M 1.59L 1.336M 0.56H)qIt is obtained through thickness optimization.L indicates that the low refractive index film of a quarter central wavelength thickness, H indicate that the high refractive index film of a quarter central wavelength thickness, M indicate the middle refractive index film of a quarter central wavelength thickness.This depolarization block prism edge filter can be widely used for digital projection and optics, photoelectricity and the laser device such as show.
Description
Technical field
The present invention relates to field of optical films, and in particular to a kind of block prism edge filter of depolarization.
Background technique
It is that composition is low that depolarization short-pass edge filter and long wave in digital projection display system, which lead to edge filter,
The basis film device of color separation and the color image synthesis of Polarization aberration.
Arranged for optical path regular, conveniently, color separation closes color or beam splitting, closes the incident light of beam system often with 45 ° of incidence angle works
Make, as shown in Figure 1, usually system constitutes edge filter device using cube edge mirror-type (Fig. 1 a) or plate glass type (Fig. 1 b)
Part.The major advantage of prism-type device is that imaging aberration is small, easy adjustment, and major defect is that polarization effect is big;And plate device
Advantage and disadvantage it is just opposite with cube edge mirror-type: polarization effect is smaller, but because transmitted light generate deviation, spherical aberration and color difference etc. imaging
Aberration is larger.This is to say, the inevitable choice cube edge mirror-type device in imaging optical path, to reduce the picture of image as much as possible
Difference, and plate color splitting and mixing (beam) device is just used in the non-imaged optical path of such as lighting system.
Prism-type edge filter why the polarization effect reason more much bigger than plate device, be because prism-type cut
Refraction angle only in the optical filter film layer reason more much bigger than the refraction angle in plate optical filter film layer.The prior art is common
High and low two kinds of refractive index films constitute edge filter as color splitting and mixing (beam) device, to identical high refractive index film nH=
2.385 with low refractive index film nL=1.382 and 45 ° of identical incidence angle, using the law of sines, prism-type device has 1.52 ×
Sin45 °=2.385 × sin θH=1.382 × sin θL, obtaining the refraction angle in high and low refractive index film layer is respectively θH=
26.8 ° and θL=51.1 °;The same glass refraction 1.52 replaced in above formula with air refraction 1.0, can equally calculate flat
Refraction angle in template device high and low refractive index film layer is respectively θH=16.9 ° and θL=30.8 °.It can be seen that block prism
The refraction angle of middle film layer is far longer than the refraction angle of identical film layer in plate, and incident medium refractive index is higher, the refraction in film layer
Angle is bigger;From Film Optics it is found that when light is incident in film with θ overturning angle, refractive index is the film of n to s polarised light and p
η is different the effective refractive index (or amendment admittance) of polarised light, and has ηs=n cos θ, ηp=n/cos θ, θ are light in film
Refraction angle in layer, therefore the refraction angle in film layer is bigger, the polarization separation and polarization phase difference of s, p light are more serious, that is, polarize
Effect is bigger.As the above analysis: as long as 1. incident lights are oblique incidences to membrane system, the polarization of membrane system is imitated
It should be inevitable;2. the refraction angle in film is bigger, the polarization effect of film layer is bigger;3. incident medium refractive index is higher,
Refraction angle in film is bigger;4. incidence angle is bigger, the refraction angle in film is also bigger;5. the refractive index of film layer is lower, film
In refraction angle it is also bigger.It can explain the plate depolarized gyros for still using air incidence why so far well above
The Philips prism depolarized gyros optical filter of optical filter and low-angle incidence, and there are no cube edge mirror-type edge filter
Basic reason where.
Existing plate short-pass edge filter and long wave lead to edge filter be respectively adopted (0.5LH0.5L) and
(0.5HL0.5H) is used as symmetrical member substantially, regrettably, if these plate designs are arranged into block prism, point
Closing color (beam) characteristic will be destroyed completely without applying application, more notably, howsoever optimize, cannot get always acceptable
S, p-polarization separation and s, p-polarization phase difference.It then results in: 1, causing optical energy loss, and since that a part of light of loss exists
By becoming stray light after multiple reflections and refraction in device, image definition and contrast is caused to decline;2, s, p-polarization position
A part of light of phase official post becomes flat elliptically polarized light by linearly polarized light, generates Polarization aberration, this Polarization aberration be different from spherical aberration,
The imaging aberrations such as color difference finally also result in light energy losses and introduce stray light.For this purpose, the invention proposes a kind of new structures
Think, by using the combination of three kinds of film materials, the equivalent refractive index of each symmetrical basic member is made dexterously to reach Εs=Εp, from
And making trans-reflective transition region substantially just has sufficiently small s, p-polarization separation and s, p-polarization phase difference.
Summary of the invention
The purpose of the present invention is overcome the technology of existing plate edge filter and Philips prism edge filter to limit
System, in 45 ° of incident block prisms, provides a kind of block prism edge filter of depolarization, all in full to be applied to
In the optics of word Projection Display etc, photoelectricity and laser device.
To achieve the above object, the present invention proposes one kind on the basis of analyzing existing oblique incidence edge filter
New design enables the block prism edge filter success of depolarization, substantially reduces block prism edge filter
S, p-polarization separation and s, p-polarization phase difference.
Most widely used plate edge filter due to incident medium be air, refractive index 1.0, thus even if
Polarization effect can be still effectively inhibited in the case where 45 ° of incidence angles.Unfortunately, even if plate glass vertically enters in chief ray
Also the imaging aberrations such as biggish spherical aberration and color difference can be generated when penetrating, it is inclined also to generate optical path in the case where 45 ° of incident angles
Folding introduces bigger aberration, therefore plate edge filter can typically be only used in non-imaged optical path.
Also incidentally to Philips prism-type edge filter, since its incidence angle can be limited within 30 °,
Existing optimal design even can be down to 16 °, in addition medium can also be designed to air for incidence (or outgoing), so Philips
The polarization effect of prism-type edge filter is little naturally, in addition it will not introduce imaging aberration, thus Phillips
Prism-type edge filter is commonly used for the color splitting and mixing system of such as LCoS reflective image chip, makes incident non-imaged optical path tool
There is color separation function, and have the function of to close color through the modulated outgoing imaging optical path of reflective image chip, becomes unique energy so far
In conjunction with the device of two functions.Unfortunately, the incident light of Philips prism and emergent light all need linearly polarized light, so necessary
Vibration and analyzing vibration is polarized with a polarizer.As can be seen that the device architecture of Philips prism-type edge filter, work
It is special to make principle and application all and be, it and natural light are with 45 ° of incident plate edge filters and cube edge mirror-type
Edge filter is completely different, does not have comparativity with block prism depolarized gyros optical filter of the invention.
Although the incident light of plate edge filter and cube edge mirror-type edge filter is natural light, and incidence angle
Be 45 °, if but when plate edge filter is applied to block prism will generate complete unacceptable polarization effect,
Reason is exactly that the refractive index of incident medium is risen to 1.52 reason of block prism K9 glass by the air 1.0 of plate.Although
The refractive index of block prism K9 glass has been calculated very low, but still dramatically increases refraction angle or polarization effect in film.Thus
As it can be seen that design cube edge mirror-type edge filter is sought under the premise of 45 ° of incidence angle and incidence medium K9 determine polarization
Effect minimizes.As described in the background art, the factor that can be adjustable when actually designing is considerably less, now only
The refractive index of remaining film layer, i.e., should be used as much as possible high refraction materials, but regrettably, the present invention selected highest folding
Penetrate the titanium dioxide of rate, and low-index material is actually also to restrict, otherwise will affect edge filter cut-off degree and
Cut off band width.For this purpose, the present invention proposes following new design: one, proposing using high refractive index (H), middle refractive index (M) and low
Refractive index (L) three kinds of thin-film materials constitute block prism edge filter, to increase the adjusting factor of design, improve flexible
Property.Two, pair of plate short wave pass filter (0.5LH0.5L) and plate long wave pass filter (0.5HL0.5H) are similar to
Claim member substantially, proposes that building corresponds to cube edge mirror-type short wave pass filter (0.5LMHM0.5L) and cube edge mirror-type long wave is logical
The symmetrical member substantially of optical filter (0.5HMLM0.5H), since these basic members are all symmetrical, so each basic first available
Equivalent refractive index is the equivalent single layer film of E to indicate.It three, must be right because the cut-off degree of a basic member is very low
The repetition period number of basic member is claimed to be increased to q:(0.5LMHM0.5L)q(0.5HMLM0.5H)q, according to symmetrical equivalent film character,
As long as symmetrical basic member is depolarization, only effective thicknesses of layers of optical filter is multiplied by q times after repeating q times, equivalent refraction
Rate E is remained unchanged, and depolarization condition still meets.Four, because of (0.5LMHM0.5L)qSymmetrical basic member end to end containing two layers eight points
One of wavelength thickness film, analyze more complicated, therefore it is as follows to carry out approximate processing to it: (0.5LMHM0.5L)qIt is launched into
0.5LMHML MHML MHML MHML ... MHM0.5L, it can be seen that remove first and the last one basic cycle is more respectively
0.5L and lack other than 0.5L, remaining intermediate q-2 is all basic cycle MHML, since MHML is quarter-wave
The film of long thickness, as long as therefore meeting △=△p/△s=△H*△L/△2 M=1, so that it may eliminate polarization effect, formula well
In, △=△p/△sIndicate the p-polarization of basic cycle MHML and the admittance ratio of s polarization, △H=ηp/ηsIndicate high refractive index layer
P-polarization and s polarization admittance ratio, △LAnd △MAlso and so on;Accordingly, (0.5HMLM0.5H)qProcessing method it is similar,
No longer repeat.From above formula △=△p/△s=△H*△L/△2 M=1, which is not difficult, knows, two kinds of materials of high and low refractive index are absolutely not
This equation may be made to set up, here it is the foundation places that must use three kinds of materials.Five, determining low refractive index film for fluorination
Magnesium (in the refractive index 1.382 of wavelength 550nm), high refractive index film are titanium dioxide (in the refractive index 2.385 of wavelength 550nm)
Under the premise of, by △H*△L/△2 M=1 can be about 1.62 in the hope of the refractive index of middle refractive index film, therefore select aluminum oxide
Film;Amendment admittance and its admittance ratio when table one lists 45 ° of incidence angles in K9 glass below to the calculating of these three materials, from table
One can obtain △=△H*△L/△2 M=1.2548*2.5308/1.78442=0.9974, this value has been in close proximity to 1, indication tool
Standby good depolarization effect.Six, after basic member and three kinds of film materials have been determined, according to effective 1/4 wavelength film thickness of table one,
Obtain the initial configuration (0.795L 1.336M 1.12H 1.336M 0.795L) of final block prism short-pass edge filterqWith
Block prism long wave leads to the initial configuration (0.56H 1.336M 1.59L 1.336M 0.56H) of edge filterq, q is just whole
Number.Seven, to initial configuration (0.795L 1.336M 1.12H 1.336M 0.795L)q(0.56H 1.336M 1.59L
1.336M 0.56H)qFinal film thickness optimization is carried out, just the excellent depolarization block prism edge filter of availability and negative
Optical filter.
Table one
Film layer and refractive index n | cosθ | Effective 1/4 wavelength film thickness | ηp=n/cos θ | ηs=n cos θ | △=ηp/ηs |
Titanium dioxide (2.385) | 0.8927 | 1.12 | 2.6716 | 2.1291 | 1.2548 |
Magnesium fluoride (1.382) | 0.6286 | 1.59 | 2.1985 | 0.8687 | 2.5308 |
Aluminum oxide (1.621) | 0.7486 | 1.336 | 2.1654 | 1.2135 | 1.7844 |
Specifically, the technical solution used in the present invention is:
A kind of block prism edge filter of depolarization, including two isosceles right-angle prisms and the described two isosceles of setting
Light cutoff filter multilayer film between right-angle prism can be applied to the biggish cube edge mirror-type edge filter of polarization effect, filter
Piece is arranged between the inclined-plane of two isosceles right-angle prisms of composition block prism.
The light cutoff filter multilayer film includes the low refractive index film being arranged alternately, middle refractive index film and high refractive index
Film.
Edge filter is made of symmetrically substantially first (0.5L M H M 0.5L) or (0.5H M L M 0.5H),
In, L indicates that the low refractive index film of a quarter central wavelength thickness, H indicate the high refractive index of a quarter central wavelength thickness
Film, M indicate the middle refractive index film of a quarter central wavelength thickness, and central wavelength is according to the cutoff wavelength of edge filter
It determines, the symmetry of the basic member can make basic member be equivalent to a monofilm, and corresponding refractive index is referred to as equivalent refraction
Rate passes through the design feature for selecting the refractive index of L, M, H that basic member can be made to have depolarization.
The bevel edge of two isosceles right-angle prisms is parallel to each other, and the light cutoff filter multilayer film is arranged in described two isosceles
Between two bevel edges of right-angle prism.That is the first tunic of the light cutoff filter multilayer film is tightly attached to an isosceles right-angle prism
Bevel edge on, the first tunic of the light cutoff filter multilayer film is tightly attached on the bevel edge of an isosceles right-angle prism, described
Last tunic of light cutoff filter multilayer film is tightly attached on the bevel edge of another isosceles right-angle prism.
Two isosceles right-angle prisms are made of K9 optical glass, one of right-angle surface of the light in the isosceles right-angle prism
Air-glass surface on incidence angle be 0 °, and the incidence angle on glass-film layer interface is 45 °, because of each layer in basic first
The effective thicknesses of layers and light of film reflect cosine of an angle in the film layer and are inversely proportional, therefore above-mentioned two symmetrical basic member is corrected respectively
For (0.795L 1.336M 1.12H 1.336M 0.795L) or (0.56H 1.336M 1.59L 1.336M 0.56H).
For the cut-off degree for improving the edge filter, symmetrical basic member is repeated q times: (0.795L 1.336M 1.12H
1.336M 0.795L)qOr (0.56H 1.336M 1.59L 1.336M 0.56H)q, q is positive integer, indicates symmetrical basic member
Periodicity, since symmetrical basic member is depolarization, only effective thicknesses of layers of optical filter is multiplied by q times after repeating q times, etc.
Effect refractive index remains unchanged, thus the depolarization condition of entire edge filter is still set up.
Further, the edge filter initial configuration (0.795L being made of symmetrically substantially first (0.5L M H M 0.5L)
1.336M 1.12H 1.336M 0.795L)qThe highly transmissive depolarization short-pass of long wave cut-off function, shortwave is obtained through thickness optimization to cut
Only optical filter;Edge filter initial configuration (the 0.56H 1.336M being made of symmetrically substantially first (0.5H M L M 0.5H)
1.59L 1.336M 0.56H)qThe highly transmissive depolarization long wave of short wavelength cutoff, long wave, which is obtained, through thickness optimization leads to light cutoff filter
Piece;Leading to edge filter to above-mentioned short-pass or long wave also can get the highly transmissive special filter in rejection zone two sides through thickness optimization
Mating plate, this special filter plate are referred to as negative filter.
I.e. the light cutoff filter multilayer film is by initial configuration (0.795L 1.336M 1.12H 1.336M 0.795L)q
It is obtained through thickness optimization, or by initial configuration (0.56H 1.336M 1.59L 1.336M 0.56H)qIt is obtained through thickness optimization, q
It is positive integer, indicates that the periodicity of symmetrical basic member, L indicate that the low refractive index film of a quarter central wavelength thickness, H indicate four
The high refractive index film of/mono- central wavelength thickness, M indicate the middle refractive index film of a quarter central wavelength thickness, center
Wavelength is determined according to the cutoff wavelength of edge filter.Thickness optimization pass through commercial optimization software " Essential Macleod ",
This optimization purpose can be achieved in " TFCal " etc..
(0.795L 1.336M 1.12H 1.336M 0.795L)qIn, (0.795L 1.336M 1.12H 1.336M
0.795L) as symmetrical substantially first, the last one 0.795L of the symmetrical basic member as subsequent symmetrical basic member first
A 0.795L, and (0.795L 1.336M 1.12H 1.336M) can be writeq0.795L, if q is 18, (0.795L 1.336M
1.12H 1.336M 0.795L)1873 layers are expressed as, i.e. (0.795L 1.336M 1.12H 1.336M)18 0.795L。
(0.56H 1.336M 1.59L 1.336M 0.56H)qIn, (0.56H 1.336M 1.59L 1.336M
0.56H) as symmetrical substantially first, first as subsequent symmetrical basic member of the last one 0.56H of the symmetrical basic member
0.56H, and (0.56H 1.336M 1.59L 1.336M) can be writeq0.56H, if q is 18, (0.56H 1.336M
1.59L 1.336M 0.56H)1873 layers are expressed as, i.e. (0.56H 1.336M 1.59L 1.336M)18 0.56H。
Preferably, the low refractive index film is magnesium fluoride film, and high refractive index film is titanium dioxide film, middle refractive index film
For di-aluminium trioxide film.The a length of 550nm of cardiac wave in the middle, the magnesium fluoride film are 1.382 in the refractive index of wavelength 550nm, institute
The titanium dioxide film stated is 2.385 in the refractive index of wavelength 550nm, refraction of the di-aluminium trioxide film in wavelength 550nm
Rate is 1.621.
Preferably, two isosceles right-angle prisms are K9 optical glass, it is 1.52 in the refractive index of wavelength 550nm.
Preferably, the periodicity q of symmetrical basic member is 16~20, preferred value 18.
After optimization, the light cutoff filter multilayer film is 73 layers, overall thickness 7675.5nm, where from incident light etc.
The bevel edge of waist right-angle prism into the 1st to 73 layer of the bevel edge direction of another isosceles right-angle prism, the 1st, 5,9,13,17,21,
25,29,33,37,41,45,49,53,57,61,65,69,73 layers be low-refraction magnesium fluoride film, the 2nd, 4,6,8,10,12,
14、16、18、20、22、24、26、28、30、32、34、36、38、40、42、44、46、48、50、52、54、56、58、60、62、
64,66,68,70,72 layers be middle refractive index di-aluminium trioxide film, the 3rd, 7,11,15,19,23,27,31,35,39,43,47,
51,55,59,63,67,71 layers are high refractive index titanium dioxide film.Light cutoff filter multilayer film has the advantage that 1) cut-off region
Shortwave lateral reflection-transmission transition region does not have polarization separation;2) the basic non-ripple of shortwave transmission bands, and have preferable transmission special
Property, in 400~495nm of wavelength, it is 96.1% that Tp average value, which is 99.6%, Ts average value, and Tav average value is 97.9%.
After optimization, the light cutoff filter multilayer film is 75 layers, overall thickness 7750.5nm, where from incident light etc.
The bevel edge of waist right-angle prism into the 1st to 75 layer of the bevel edge direction of another isosceles right-angle prism, the 1st, 6,10,14,18,
22,26,30,34,38,42,46,50,54,58,62,66,70,75 layers be high refractive index titanium dioxide film, the 2nd, 4,8,12,
16,20,24,28,32,36,40,44,48,52,56,60,64,68,72,74 layers be low-refraction magnesium fluoride film, the 3rd, 5,7,
9、11、13、15、17、19、21、23、25、27、29、31、33、35、37、39、41、43、45、47、49、51、53、55、57、59、
61,63,65,67,69,71,73 layers are middle refractive index di-aluminium trioxide film.Light cutoff filter multilayer film has the advantage that 1)
Cut-off region long wave lateral reflection-transmission transition region is substantially without polarization separation;2) the basic non-ripple of long wave transmission bands, and have compared with
Good transmissison characteristic, in 545~700nm of wavelength, it is 97.5% that Tp average value, which is 99.9%, Ts average value, and Tav average value is
98.7%.
The block prism edge filter of depolarization of the invention can be widely applied to what such as digital projection was shown etc
Optics, photoelectricity and laser device.
Further, design of the invention can be applied to the biggish block prism depolarized gyros optical filter of polarization effect,
Using same design principle, the design method is also extended in the lesser plate edge filter of polarization effect, to obtain
Obtain the depolarization characteristic of more excellent plate edge filter.
Compared with prior art, the beneficial effects of the present invention are:
1, when natural light (corresponds to block prism) (corresponding to plate) or in glass with 45 ° of incident overturning angles in air
When being incident on edge filter, since very big difference certainly will occur in itself for the optical admittance of s polarised light and p-polarization light,
Very big s, p-polarization separation and s, p-polarization phase difference, especially cube edge are generated so as to cause the light splitting curve of edge filter
Mirror-type edge filter, polarization separation and polarization phase difference will lead to edge filter and do not apply use completely.Just because of this, existing
Have edge filter more be confined to flat structure, the optical system more demanding to imaging aberration and block prism must be used
When type structure, incidence natural lights first can only be converted into polarised light (being often s polarised light) by means of additional polarized systems, then
It is again incident in cube edge mirror-type edge filter, avoids generating polarization separation and polarizes phase difference, such as common transmission type LCD
Projection display system is exactly such.Regrettably, so far, the prior art has not recognized directly design block prism cut-off
The method of optical filter.
The present invention proposes three kinds of materials using high, medium and low refractive index to constitute block prism edge filter, makes to design
Parameter is more flexible, it is thus achieved that the Design of Depolarization Thin of cube edge mirror-type edge filter.This non-polarizing technology is simple
Understandable, one of core is exactly using equivalent symmetrical member (0.5LMHM0.5L) and (0.5HMLM0.5H) substantially, due to these bases
This yuan is all symmetrical, so each basic member can be equivalent to a monofilm, in this way, whole properties of equivalent film all can quilt
It utilizes.Core second is that (0.5LMHM0.5L)qApproximate processing is carried out, to ask in the case where determining high and low refractive index film
The refractive index of middle refractive index material out.Core third is that the basic cycle implement Design of Depolarization Thin, as long as basic cycle MHML
Meet △=△p/△s=△H*△L/△2 M=1, so that it may eliminate polarization effect well.This is design optical system and instrument
Bring subversive progress, not only cost-saved especially in the fields such as Projection Display, reduction volume and weight, Er Qieke
Significantly improve optical property.In addition, the present invention devises natural light directly with 45 ° of incident cube edge mirror-type edge filter devices
Part, after understanding this design principle, the more excellent natural light of design performance is just light and easy with 45 ° of incident plate edge filters
It lifts.
2, a negative filter inherently highly difficult thing is designed, it requires the shortwave side and long wave side of rejection zone simultaneously
All there is very high transmissivity.Such requirement, that is afraid of in the case where light vertical incidence, due to two kinds it is alternate high and low
Refraction materials refringence is smaller, therefore to obtain higher reflectivity, the film layer that is bound to number is considerably beyond 100 layers or more.To
Natural light is designed with 45 ° of incident cube edge mirror-type negative filter devices, difficulty is hardly it is contemplated that because s, p-polarization
Two rejection zones can generate serious separation, and there are no the thinkings of this negative filter design method at all for the prior art.
The Design of Depolarization Thin of cube edge mirror-type edge filter, institute are incident in since the present invention be directed to natural lights with 45 °
Had with design: 1), trans-reflective transition region almost without polarization separation, s, p-polarization two rejection zones be substantially overlapped
Together;2), the long wave side (corresponding long wave leads to edge filter) of rejection zone or shortwave side (corresponding short-pass edge filter)
There is very high transmissivity.In this case, as long as suitably optimizing thicknesses of layers, so that it may make shortwave side and the length of rejection zone
Wave side all has very high transmissivity simultaneously, and here it is negative filter devices excellent in the case of light oblique incidence, this is this hair
One additional achievement of bright acquisition.
Detailed description of the invention
Fig. 1 shows the schematic diagrames that 45 ° are incident in block prism edge filter and plate edge filter, wherein (a) is vertical
Square glass prism type, it is (b) plate.
Fig. 2 is that the plate short-pass edge filter of the prior art and long wave lead to edge filter in 45 ° of incidence
S, p-polarization and average transmission are divided curve, wherein (a) short-pass, (b) long wave is logical.
Fig. 3 is s, p-polarization and the average transmission light splitting curve when the plate edge filter of Fig. 2 is transplanted to block prism,
Wherein, (a) short-pass, (b) long wave is logical.
Fig. 4 is the s of Fig. 3 block prism short-pass edge filter, p-polarization phase difference curve.
Fig. 5 is the structural schematic diagram of block prism short-pass edge filter of the present invention.
Fig. 6 is that block prism short-pass edge filter and long wave of the present invention lead to the s of edge filter, p-polarization and average
Transmission light splitting curve, wherein (a) short-pass, (b) long wave is logical.
Fig. 7 is s, p-polarization of the block prism short-pass edge filter after thickness optimization shown in Fig. 6 (a) of the present invention
Curve is divided with average transmission.
Fig. 8 is the s of block prism short-pass edge filter shown in Fig. 7, p-polarization phase difference curve.
Fig. 9 is the film thickness of the every tunic of block prism short-pass edge filter shown in Fig. 7 and the corresponding relationship of refractive index
Figure.
Figure 10 is that block prism long wave shown in Fig. 6 (b) of the present invention leads to s, p-polarization of the edge filter after thickness optimization
Curve is divided with average transmission.
Figure 11 is s, the p-polarization phase difference curve that block prism long wave shown in Fig. 10 leads to edge filter.
Figure 12 is that block prism long wave shown in Fig. 10 leads to the film thickness of the every tunic of edge filter and the corresponding of refractive index is closed
System's figure.
Figure 13 is s, p-polarization and average transmission the light splitting curve of block prism negative filter of the invention.
Figure 14 is the corresponding relationship of the film thickness of the every tunic of block prism negative filter and refractive index shown in Figure 13.
Specific embodiment
Fig. 1 is the working principle signal of block prism edge filter and existing plate edge filter of the invention
Figure, wherein Fig. 1 (a) is block prism edge filter schematic diagram of the invention, edge filter 2 (i.e. light cutoff filter multilayer film)
It is sandwiched between the inclined-plane of the isosceles right-angle prism 1 and isosceles right-angle prism 3 that constitute block prism.As preferred embodiment party
Formula, isosceles right-angle prism 1 and isosceles right-angle prism 3 are made of the lower K9 glass of refractive index, its refractive index in wavelength 550nm
It is 1.52.Incidence natural lights are incident on the air-glass surface of one of right-angle surface of isosceles right-angle prism 1, incidence angle
It is 0 °, into after glass, the incidence angle on glass-film layer interface is 45 °, and after edge filter, transmitted spectrum is by isosceles
One of right-angle surface of right-angle prism 3 is emitted, after reflectance spectrum is reflected by edge filter, by the another of isosceles right-angle prism 1
One right-angle surface outgoing.Fig. 1 (b) is the schematic diagram of existing plate edge filter, and edge filter 2 ' is coated on plate
On one of face of glass 3 '.As preferred embodiment, plate glass is also made of K9 glass, and refractive index is
1.52.Incident light is directly incident on edge filter 2 ' by the air 1 ' that refractive index is 1.0, and incidence angle is 45 °.Reflectance spectrum quilt
After edge filter reflection, it is emitted by air 1 ';Transmitted spectrum outgoing generates the y of one with incident light direction because of the refraction of plate 3 '
Deviate, this deviation will cause bigger imaging aberration.
Fig. 2 is that the plate short-pass edge filter of the prior art and long wave lead to edge filter and enter for 45 ° in air
S, p-polarization and average transmission when penetrating are divided curve, wherein (a) short-pass, (b) long wave is logical.The plate shortwave of the prior art
Typical symmetric periodic (0.5LH0.5L) and (0.5HL0.5H) conduct is respectively adopted in logical edge filter and long wave pass filter
Substantially first, since, with 45 ° of incidences, either short-pass or long wave is logical, all necessarily produces between Ts the and Tp curve of spectrum in air
Raw polarization separation, this optical phenomena intrinsic when being Ray obliquity incidence, though the prior art can reduce this plate cut-off
The polarization separation of optical filter, but not only difficulty is big for this depolarized technology, but also can not completely eliminate.Since Ts, Tp polarize song
The polarization separation of line causes Tav=(Ts+Tp)/2 step occur in trans-reflective transition region, this is not permitted in actual use
's.Fortunately, the prior art can substantially eliminate the ripple in transmission bands by optimization film layer number and each layer film thickness.
Fig. 3 is s, p-polarization and the average transmission light splitting song when the plate edge filter of Fig. 2 being transplanted to block prism
Line, wherein (a) short-pass, (b) long wave is logical.If two kinds of plate edge filters shown in Fig. 2 are respectively provided to cube edge
In mirror, then being divided curve will be by fatefulue destruction: not only polarization separation is logical from the 26nm and long wave of plate short-pass
28nm rise to the 93nm and the 116nm that long wave is logical of cube edge mirror-type short-pass, and the ripple in transmission bands also significantly increases
Greatly.This feature is intrinsic, even if A (0.5LH0.5L)18G and A (0.5HL0.5H)18G is modified to effective 1/4 wave film
Thick G (0.795L1.12H 0.795L)18G and G (0.56H1.59L0.56H)18G, curve shape is still almost unchanged, only wavelength
Mobile (the mobile available reference wavelength of wavelength easily corrects).Not only polarization separation is very for block prism edge filter
Greatly, and polarization phase difference is also very big, and Fig. 4 is the s of Fig. 3 block prism short-pass edge filter, p-polarization phase difference song
Line, it can be seen that within the scope of 400~700nm of wavelength, as wavelength increases, phase difference is almost rising always: in phase difference
It is raised to 360 ° of A point, will also be after of continuing rising, but Fig. 4 ordinate only provides 0~360 ° of range, opens so 0 ° of B point can only be returned to
Begin the new period, 360 ° of C point is then continued to rise to from B point, D point ... is returned and rises to wavelength 700nm always in this way
Near, it is seen then that the phase difference between different wave length is very big.The polarization phase difference for leading to edge filter to block prism long wave is bent
Line is also similar, therefore is no longer provided here.The polarization effect of cube edge mirror-type edge filter is than plate big many, the two
Difference be only that incident medium is different, and the influence of incident medium is so large that unexpectedly!If the existing skill of this polarization effect
Two kinds of thin-film materials of art are difficult to eliminate, and can also make some change with non-polarizing technology in plate edge filter
It is kind, in block prism be exactly simply it is helpless, Just because of this, " depolarization " is always by famous American film expert
A.Macleod regards as one of six hang-ups that " Film Optics " end solves so far.
To solve the above problems, the present invention proposes that three kinds of materials of high, medium and low refractive index is selected to cut to constitute block prism
Only optical filter, Fig. 5 are the structural schematic diagrams of block prism short-pass edge filter of the present invention, and 4 and 4 ' be two K9 glass in figure
The isosceles right-angle prism of glass, 5 indicate that equivalent symmetrical is substantially first (0.5LMHM0.5L), since basic member is symmetrically, so each
Basic member can all be equivalent to a monofilm, in this way, (0.5LMHM0.5L)qIt is equivalent to q equivalent single layer film 6, here it is
It says, (0.5LMHM0.5L)qEquivalent refractive index be equal to (0.5LMHM0.5L) equivalent refractive index, (0.5LMHM0.5L)qEtc.
Imitate q times that film thickness is equal to (0.5LMHM0.5L) equivalent film thickness.In view of (0.5LMHM0.5L) processing is cumbersome, therefore use is substantially all
Phase MHML is approximate, and △=△ thus can be writtenp/△s=△H*△L/△2 MIf △ can be madep=△s, then it represents that do not have between s, p
There is polarization separation.Obviously, by selecting △M, can achieve purpose, polarization effect can be eliminated well.To this hair
The structural schematic diagram that bright block prism long wave leads to edge filter does not provide, as long as this changes substantially first (0.5LMHM0.5L)
At (0.5HMLM 0.5H).
Fig. 6 is that block prism short-pass edge filter and long wave of the present invention lead to the s of edge filter, p-polarization and average
Transmission light splitting curve, wherein (a) short-pass, (b) long wave is logical.As can be seen that since the present invention can satisfy △=△p/△s=
△H*△L/△2 M=1, so trans-reflective transition region Ts and the Tp curve in cut-off region two sides is almost to be overlapped, in other words
It is that complete depolarization separates.And in the transmission bands of cut-off region two sides, Ts and Tp curve still has separation, this is mainly membrane system knot
Caused by structure and dispersion of refractive index, it is, in general, that this can be optimized by means of thicknesses of layers and be improved, and not as transmission-is anti-
The separation of transition region is penetrated, thicknesses of layers optimization is invalid.Block prism edge filter of the present invention shown in fig. 6 is compared to figure
3 existing block prism edge filters mainly have two big desired variations: first is that trans-reflective transition region Ts and Tp separation are aobvious
It writes and reduces, second is that the ripple in transmission bands becomes smaller.But the disadvantage is that rejection zone width also narrows therewith, this is requiring cut-off bandwidth
Occasion needs two membrane systems front and back superpositions to broaden, thus film layer number can greatly increase.
Embodiment one
As embodiment one, Fig. 7 provides block prism short-pass edge filter shown in Fig. 6 (a) of the present invention through thickness
S, p-polarization and average transmission after optimization are divided curve.The initial film structure of film thickness optimization is what Fig. 6 (a) was provided: G
(0.795L1.336M1.12H1.336M0.795L)18G, i.e. G [(0.795L1.336M1.12H1.336M)180.795L] G, always
Film layer number is 73 layers, and L indicates the low refractive index film magnesium fluoride (MgF of a quarter central wavelength thickness2), H indicates a quarter
High refractive index film titanium dioxide (the TiO of central wavelength thickness2), M indicates the middle refractive index of a quarter central wavelength thickness
Film aluminum oxide (Al2O3), central wavelength is set to 518nm according to the cutoff wavelength of optical filter.Commercial optimization software
This optimization purpose can be achieved in " Essential Macleod ", " TFCal " etc..Total film layer number after simple optimization is still 73
Layer, the s, p-polarization and average transmission light splitting curve after optimization are as shown in fig. 7, as seen from Figure 7: 1) cut-off region shortwave lateral reflection-
Transmission transition region does not have polarization separation;2) the basic non-ripple of shortwave transmission bands, and there is preferable transmissison characteristic, in wavelength 400
It is 96.1%, Tav average value is 97.9% that~495nm, Tp average value, which are 99.6%, Ts average value,.
Fig. 8 provides the s of block prism short-pass edge filter shown in Fig. 7, p-polarization phase difference curve.It can from Fig. 8
See, as wavelength increases from 400nm, phase difference decline, phase difference drops to 0 ° of A ' point, also to continue to decline, so can only
It returns to 360 ° of B ' point to start to continue to fall to approximately 300 ° of C ' point, oscillation is then begun to ramp up, it is recognised that entire wavelength zone
Polarization phase difference actually all within 0 ° ± 120 °, near central wavelength, even more less than 0 ° ± 60 °.It is inclined compared to Fig. 4
Vibration phase difference far surpasses 10 times or more.
Fig. 9 is the film thickness of the every tunic of block prism short-pass edge filter shown in Fig. 7 and the corresponding relationship of refractive index
Scheme, in Fig. 9, ordinate indicates the refractive index of substrate and each film layer, and abscissa indicates film thickness, so the refractive index of corresponding each film layer
It can be obtained from figure with thickness.
Embodiment two
Figure 10 is that block prism long wave shown in Fig. 6 (b) of the present invention leads to s, p-polarization of the edge filter after thickness optimization
Curve is divided with average transmission.Initial film structure is provided by Fig. 6 (b): G (0.56H1.336M1.59L1.336M0.56H)18G, i.e. G [(0.56H1.336M1.59L1.336M)180.56H] G, total film layer number is 73 layers, and L indicates a quarter central wavelength
Low refractive index film magnesium fluoride (the MgF of thickness2), H indicates the high refractive index film titanium dioxide of a quarter central wavelength thickness
(TiO2), M indicates the middle refractive index film aluminum oxide (Al of a quarter central wavelength thickness2O3), central wavelength is according to filter
The cutoff wavelength of mating plate is set to 518nm.It is 75 layers with total film layer number of the commercial optimization software after simple optimization, s after optimization,
P-polarization and average transmission light splitting curve are as shown in Figure 10, as seen from Figure 10: 1) cut-off region long wave lateral reflection-transmission transition region base
This does not have polarization separation;2) the basic non-ripple of long wave transmission bands, and there is preferable transmissison characteristic, in 545~700nm of wavelength,
It is 97.5%, Tav average value is 98.7% that Tp average value, which is 99.9%, Ts average value,.Similarly, Figure 11 is shown in Fig. 10 vertical
Square glass prism long wave leads to s, the p-polarization phase difference curve of edge filter, and Figure 12 is the logical cut-off of block prism long wave shown in Fig. 10
The film thickness of the every tunic of optical filter and the corresponding relationship of refractive index, are specifically no longer described in detail.
Embodiment three
Figure 13 is s, p-polarization and average transmission the light splitting curve of block prism negative filter of the invention.Initial film tying
Structure is also what Fig. 6 (a) was provided: G (0.795L1.336M1.12H1.336M0.795L)18G, total film layer number are 73 layers, and L indicates four
Low refractive index film magnesium fluoride (the MgF of/mono- central wavelength thickness2), H indicates the high refraction of a quarter central wavelength thickness
Rate film titanium dioxide (TiO2), M indicates the middle refractive index film aluminum oxide (Al of a quarter central wavelength thickness2O3), in
Cardiac wave is long to be set to 518nm according to the cutoff wavelength of optical filter.Total film layer number after the optimization of commercial optimization software is 76 layers, from figure
13 final optimization pass result is it can be seen that 1) cut-off region two sides reflective-transmissive transition region is almost without polarization separation, especially
Shortwave side Tp and Ts curve are substantially completely overlapped;2) the transmission bands ripple very little of cut-off region two sides, and there is preferable transmission
Characteristic, in 400~495nm of wavelength, it be 95.7%, Tav average value is 97.2% that Tp average value, which is 98.7%, Ts average value,
It is 97.0%, Tav average value is 98.0% that wavelength 545~700nm, Tp average value, which is 99.0%, Ts average value,.This is an allusion quotation
The block prism negative filter of type.
Negative filter designs an inherently highly difficult thing, that is afraid of in the case where light vertical incidence, due to two
The alternate high and low refractive index Refractive Index of Material difference of kind is smaller, therefore higher reflectivity in order to obtain, and the film layer that is bound to number is extremely
It is more.To design natural light with 45 ° of incident cube edge mirror-type negative filter devices, difficulty is it is contemplated that be not to have no way of handling
's.The Design of Depolarization Thin of cube edge mirror-type edge filter is incident in since the present invention be directed to natural lights with 45 °, so design
Had: 1), trans-reflective transition region almost without polarization separation, s, p-polarization two rejection zones be substantially superimposed at one
It rises;2), the long wave side (corresponding long wave leads to edge filter) of rejection zone or shortwave side (corresponding short-pass edge filter) have had
There is very high transmissivity.In this case, as long as suitably optimizing thicknesses of layers, so that it may make the shortwave side and long wave side of rejection zone
All there is very high transmissivity simultaneously, here it is the negative filter devices of function admirable in the case of light oblique incidence.
Figure 14 is the corresponding relationship of the film thickness of the every tunic of block prism negative filter and refractive index shown in Figure 13.
Depolarization block prism edge filter of the invention is when on glass-optical filter interface with 45° angle oblique incidence
S, p-polarization separation and very low s, the p-polarization transmission phase difference of very little are obtained, thus it is aobvious to cannot be only used for such as digital projection
Show with the fields such as optical communication, and can be widely applied in various optics, photoelectricity, laser device and technology.
Claims (8)
1. a kind of block prism edge filter of depolarization, including two isosceles right-angle prisms and that described two isosceles are arranged is straight
Light cutoff filter multilayer film between angle prism, which is characterized in that the light cutoff filter multilayer film includes the low folding being arranged alternately
Penetrate rate film, middle refractive index film and high refractive index film.
2. the block prism edge filter of depolarization according to claim 1, which is characterized in that two isosceles right-angled edges
The bevel edge of mirror is parallel to each other, the light cutoff filter multilayer film be arranged in described two isosceles right-angle prisms two bevel edges it
Between.
3. the block prism edge filter of depolarization according to claim 1, which is characterized in that the light cutoff filter
Multilayer film is by initial configuration (0.795L1.336M1.12H1.336M0.795L)qIt is obtained through thickness optimization, or by initial configuration
(0.56H1.336M1.59L1.336M0.56H)qIt is obtained through thickness optimization, q is positive integer, indicates the period of symmetrical basic member
Number, L indicate that the low refractive index film of a quarter central wavelength thickness, H indicate the high refractive index of a quarter central wavelength thickness
Film, M indicate the middle refractive index film of a quarter central wavelength thickness.
4. the block prism edge filter of depolarization according to claim 1, which is characterized in that the low-refraction
Film is magnesium fluoride film, and high refractive index film is titanium dioxide film, and middle refractive index film is di-aluminium trioxide film.
5. the block prism edge filter of depolarization according to claim 3, which is characterized in that the week of symmetrical basic member
Issue q is 16~20.
6. the block prism edge filter of depolarization according to claim 5, which is characterized in that the week of symmetrical basic member
Issue q is 18.
7. the block prism edge filter of depolarization according to claim 1, which is characterized in that cardiac wave is a length of in the middle
550nm, the magnesium fluoride film are 1.382 in the refractive index of wavelength 550nm, and the titanium dioxide film is wavelength 550nm's
Refractive index is 2.385, and the di-aluminium trioxide film is 1.621 in the refractive index of wavelength 550nm.
8. the block prism edge filter of depolarization according to claim 1, which is characterized in that two isosceles right-angled edges
Mirror is K9 optical glass, it is 1.52 in the refractive index of wavelength 550nm.
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