CN110208460A - A kind of support construction and preparation method thereof of micro-structure gas detector - Google Patents
A kind of support construction and preparation method thereof of micro-structure gas detector Download PDFInfo
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- CN110208460A CN110208460A CN201910436979.XA CN201910436979A CN110208460A CN 110208460 A CN110208460 A CN 110208460A CN 201910436979 A CN201910436979 A CN 201910436979A CN 110208460 A CN110208460 A CN 110208460A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
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Abstract
A kind of micro-structure gas detector support construction and preparation method thereof, method includes: S1, and parameters of laser cutting is arranged, and parameter includes cutting spacing, size and figure；S2, the hot melt adhesive film (1) being attached on release paper (2) is cut by laser according to parameter, it is cut to fully penetrated hot melt adhesive film (1) but does not switch to release paper (2), form support pad (5) array for having frame (6)；S3, the hot melt adhesive film (1) of support pad (5) array with frame (6) is close to the reading anode plate (3) of micro-structure gas detector on one side, apply pressure hot pressing from release paper (2) one side using plate hot pressing, forms support construction；The stainless steel cloth (7) of micro-structure gas detector is placed in support construction simultaneously hot pressing by S4, is connect in fact so that reading anode plate (3) with stainless steel cloth (7).This method machining accuracy and high-efficient increases detector stability with support construction prepared by hot melt adhesive film.
Description
Technical field
The present invention relates to micro-structure gas detector field more particularly to a kind of support constructions of micro-structure gas detector
And preparation method thereof.
Background technique
In common micro-structure gas detector Micromegas, enlarged structure is by stainless steel cloth and reads anode unit
At therebetween using support construction formation air gap, the size and homogeneity of air gap are to detection between stainless steel cloth and anode
Device amplification factor has direct influence.
It in the prior art, is by anode circuit plate, two layers of light-sensitive surface (thickness in monolayer with photoperceptivity by the way of
It is press-fitted together as one by way of roll-in for 64um), then uses optical etching technology that diameter is made as 300um in light-sensitive surface,
Away from the support column for 2mm.Then, the stainless steel cloth with some tension is placed on support pad surface, by silk screen with
Silk screen is adsorbed on gasket surface by the electrostatic attraction between anode.Therefore, it reads between anode and stainless steel cloth and just forms 128um
Even air gap.But " suspension silk screen " (virtual connection) the Micromegas detector performance that the technical solution is made is not
Stablize.The support intercolumniation of detector silk screen is close, and support density is high, and it is difficult clear to face detector using exposure and lithographic method
Clean problem, especially large area detector.At the same time, the support column on circuit board is easy to fall off, and corresponding region is caused not have
There is support, floating silk screen tension is not high (15N/cm) in addition, is easy to produce sparking electric discharge.Using laser processing gasket it
Before, putting for gasket is by putting completion one by one manually；Branch for large area detector, between stainless steel cloth and anode
Stake pad piece spacing remains unchanged, and gasket quantity substantially increases, and difficulty of processing is significantly increased, and the quality and batch for influencing detector are made
Make efficiency, precision, is unfavorable for large area detector production.
Summary of the invention
(1) technical problems to be solved
It is directed to above-mentioned technical problem, the present invention proposes support construction and its preparation side of a kind of micro-structure gas detector
Method, for solve difficulty in the sparking of detector caused by the virtual connection between stainless steel cloth and anode electric discharge and process it is high,
The low problem of low efficiency, precision.
(2) technical solution
One aspect of the present invention proposes a kind of preparation method of micro-structure gas detector support construction, comprising: S1, setting swash
Light cutting parameter, parameter include cutting spacing, cut lengths and cutting pattern；S2, according to parameter to being attached in release paper 2
Hot melt adhesive film 1 is cut by laser, and is cut to fully penetrated hot melt adhesive film 1 but is not switched to release paper 2, is formed with frame 6
5 array of support pad；S3, by 1 one side of hot melt adhesive film and micro-structure gas detector of 5 array of support pad with frame 6
Reading anode plate 3 be close to, using plate hot pressing from release paper one side apply pressure hot pressing, formed support construction；S4, by micro- knot
The stainless steel cloth 7 of structure gas detector is placed in support construction and hot pressing, so that reading anode plate 3 and stainless steel cloth 7 in fact
It connects.
Optionally, in step s 2, cutting spacing is no more than 1cm*1cm.
Optionally, in step s 2, cut lengths are that diameter is no more than 1mm.
Optionally, before step S1 further include: S0 flattens the hot melt adhesive film 1 being attached in release paper 2；
Optionally, reading anode plate 3 and the real spacing that connects of stainless steel cloth 7 is hundred micron orders.
Optionally, in step s3, the heat of 5 array of support pad of frame 6 will be had along 2 edge of release paper using adhesive tape
1 one side of melten gel film and the reading anode plate 3 of micro-structure gas detector are fixed.
Another aspect of the present invention provides a kind of support construction of micro-structure gas detector, and support construction is hot melt adhesive film 1
5 array of support pad of composition, each support pad 5 include: the first glue-line 101, substrate layer 102 and the second glue-line 103；Substrate
Layer 102 is formed between the first glue-line 101 and the second glue-line 103, and the first glue-line 101 infiltrates into micro-structure gas detector not
It becomes rusty in the mesh of steel wire 7, the second glue-line 103 is infiltrated to the reading anode plate 3 of micro-structure gas detector.
Optionally, the diameter of each support pad 5 is no more than 1mm.
Optionally, reading anode plate 3 and the real spacing that connects of stainless steel cloth 7 is hundred micron orders.
Optionally, the first glue-line 101 and the second glue-line 103 discharge stickiness more than preset temperature value.
(3) beneficial effect
The present invention proposes a kind of support construction and preparation method thereof of micro-structure gas detector, has the beneficial effect that
1, the support construction using hot melt adhesive film as micro-structure gas detector, so that detector stainless steel cloth and branch
Stake pad piece realizes tangible connection, effectively avoids because the sparking discharge scenario of detector caused by virtual connection, increases detector and stablize
Property.
2, the mode of laser cutting is applied to the array and frame of production hot melt adhesive film gasket, machining accuracy is improved, subtracts
Minipad quantity, reduce support pad defect probability, it can be achieved that smaller spacing, smaller diameter gasket array processing, and
Process velocity is fast, high-efficient.
3, pre- hot pressing is carried out to hot melt adhesive film gasket array and frame using the mode of plate hot pressing, avoids and manually puts
Gasket improves gasket and puts efficiency and precision.
Detailed description of the invention
Fig. 1 diagrammatically illustrates the preparation method process of the support construction of micro-structure gas detector of the embodiment of the present invention
Figure.
Fig. 2 diagrammatically illustrates the unprocessed hot melt adhesive film 1 of the embodiment of the present invention and 2 the schematic diagram of the section structure of release paper.
Fig. 3 diagrammatically illustrates the uncut hot melt adhesive film 1 of the embodiment of the present invention and cuts and shell extra hot melt adhesive film 1
The structural schematic diagram of 5 array of support pad and frame 6 from after.
Fig. 4 diagrammatically illustrates the schematic diagram that the covering of release paper of the embodiment of the present invention 2 reads 3 surface of anode plate.
Fig. 5 diagrammatically illustrates plate hot pressing schematic diagram of the embodiment of the present invention.
Fig. 6, which diagrammatically illustrates the embodiment of the present invention and reads 3 support pad of anode plate 5 array, controls schematic diagram.
Fig. 7 diagrammatically illustrates the original state schematic diagram of plate hot pressing of embodiment of the present invention hot melt adhesive film 1.
The support construction connection that Fig. 8 diagrammatically illustrates micro-structure gas detector of the embodiment of the present invention reads anode plate 3
With the schematic diagram of stainless steel cloth 7.
[appended drawing reference]
1- hot melt adhesive film
101- the first glue-line 102- substrate layer the second glue-line of 103-
2- release paper
3- reads anode plate
4- heating platen
5- support pad
6- frame
7- stainless steel cloth
F- pressure direction
Specific embodiment
To make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Attached drawing, the present invention is described in more detail.
The present invention proposes a kind of preparation method of the support construction of micro-structure gas detector, detailed process such as Fig. 1 institute
Show, comprising:
S0 flattens the hot melt adhesive film 1 being attached in release paper 2.
In an embodiment of the present invention, the hot melt adhesive film 1 used is attached in silica gel release paper 2 and in reel, therefore,
Before laser cutting, firstly, hot melt adhesive film 1 is cut into fritter as needed and is flattened by applying pressure, such as Fig. 2
It is shown.Secondly, being fixed on laser-scribing platform using adhesive tape by the release paper 2 for having hot melt adhesive film 1 is sticked.When fixed, hot melt
Glue film 1 is in upper, close laser light-emitting window；Release paper 2 is under, far from laser light-emitting window.Wherein, hot melt adhesive film 1 is flattened
The reason of be to prevent hot melt adhesive film 1 and 2 surface irregularity of release paper from focusing inaccuracy so as to cause laser condenser lens, from
And occurred to cut or cut insufficient phenomenon.
S1, is arranged parameters of laser cutting, and parameter includes cutting spacing, cut lengths and cutting pattern.
Cutting parameter is set on laser control software, wherein cutting spacing is no more than 1cm*1cm, and cut lengths are
Diameter is no more than 1mm, and cutting pattern is provided in round.In an embodiment of the present invention, needs, cutting drawing are made according to detector
Shape is set as spacing 1cm*1cm, the circular array of diameter 1mm, and the rectangular hollow out border structure (ruler arranged around array
It is very little to depend on the needs).
S2 is cut by laser the hot melt adhesive film 1 being attached in release paper 2 according to parameter, is cut to fully penetrated heat
Melten gel film 1 but release paper 2 is not switched to, forms 5 array of support pad for having frame 6.
According to laser parameter, so that laser is in cuts through shape of the hot melt adhesive film 1 without switching to silica gel release paper 2 just
(if switching to release paper 2, paper scrap may not be able to be stripped state after subsequent plate hot pressing；If undercut, support pad 5
It cannot be completely stripped).After cutting, extra hot melt adhesive film 1 is removed, remaining 5 array of support pad, frame 6 according to
2 surface of release paper is stayed in by intrinsic viscosity, to use to hot pressing.The hot melt adhesive film 1 for cutting front and back is as shown in Figure 3, wherein left figure
For uncut hot melt adhesive film 1, right figure is 5 array of support pad and frame 6 after cutting and after removing extra hot melt adhesive film 1
Structural schematic diagram.
Do not ensure that required support pad 5 is all retained in silicon by the adhesiveness of hot melt adhesive film 1 itself and release paper 2
2 surface of glue release paper, this is related with the effect of laser cutting；If it is excessive to be cut by laser depth, release paper 2 will be switched to and leave paper
Bits, as mentioned before；If depth of cut is small, hot melt adhesive film 1 cannot be fully penetrated, cannot be de- with extra 1 part of hot melt adhesive film
From.It is adjusted laser parameter, support pad 5 can be retained in release paper 2.
Above-mentioned laser cutting technique helps the mechanization for realizing 5 array of support pad, frame 6 is processed, and array processing can
To realize 1cm*1cm spacing, diameter 1mm, and by the high mobile accuracy of mechanical platform and the high manufacturing accuracy of laser cutting,
Reduce gasket quantity, reduce the probability of 5 defect of support pad, so that the smaller spacing of processing, 5 array of the support pad of smaller diameter
It is possibly realized；Also, the movement speed of mechanical platform and the speed of laser cutting are fast, and the processing of 5 array of support pad can be efficient
It completes, it is more time saving.
S3, by the reading sun of 1 one side of hot melt adhesive film of 5 array of support pad with frame and micro-structure gas detector
Pole plate 3 is close to, and applies pressure hot pressing on one side from release paper 2 using heating platen 4, forms support construction.
5 array of support pad is retained in 2 surface of release paper by intrinsic viscosity, release paper 2 is overturn, release paper 2 is upper
Far from anode circuit plate 3 is read, hot melt adhesive film 1 is directly contacted lower with reading anode circuit plate 3, using high temperature gummed tape along release
2 edge of paper, which is affixed to, reads 3 surface of anode circuit plate；As shown in figure 4, the overturning of release paper 2 is layed onto reading anode circuit
3 surface of plate, canescence are upper layer release paper 2, and dashed circle indicates 5 array of lower layer support gasket.Finally, using heating platen 4 from
Release paper 2 applies pressure hot pressing on one side, as shown in figure 5, when hot melt adhesive film 1 after being heated to certain temperature (with product type
And the type of glue is different), first glue-line 101 on 1 surface of hot melt adhesive film starts to discharge stickiness, starts infiltration to reading anode plate 3
On, when temperature reaches optimum fusion temperature, 101 viscosity of the first glue-line of hot melt adhesive film 1 is sufficiently discharged, the flowing of glue-line
Property reach maximum, infiltration reads anode plate 3 and reaches optimum efficiency.After this, stop heating hot melt adhesive film 1, drop to it
Room temperature, the first glue-line 101 gradually solidify in temperature-fall period, are restored to semi-cured state.
The stainless steel cloth 7 of micro-structure gas detector is placed in support construction simultaneously hot pressing by S4, so that reading anode plate
3 connect in fact with stainless steel cloth 7.
Hot melt adhesive film 1 is cooled to room temperature, and release paper 2 is removed；Hot melt adhesive film 1 is pressed in advance to be read on anode circuit plate 3, such as
Shown in Fig. 6.Support pad 5, the pre- hot pressing of frame 6 finish.
It will be placed into 5 array upper surface of support pad with tensioned stainless steel cloth 7, using roll squeezer to stainless steel wire
Net 7 carries out hot pressing, and second glue-line 103 on 1 surface of hot melt adhesive film starts to discharge stickiness, permeate into the mesh of stainless steel cloth 7
When temperature reaches optimum fusion temperature, 103 viscosity of the second glue-line of hot melt adhesive film is sufficiently discharged, the second glue-line 103
Mobility reaches maximum, and infiltration stainless steel cloth 7 reaches optimum efficiency.After this, stop heating hot melt adhesive film 1, make it
Room temperature is dropped to, glue-line gradually solidifies in temperature-fall period, is restored to semi-cured state, and extra stainless steel is cut off after being cooled to room temperature
Silk screen.Stainless steel cloth 7 is bonded in and reads on anode plate 3 by hot melt adhesive film 1 as a result,.
In step S4 and S5, hot pressing original state as shown in fig. 7, the state after the completion of hot pressing as shown in figure 8, hot melt adhesive
First glue-line 101 of film 1 penetrates 7 mesh of stainless steel cloth, and 103 thickness of the second glue-line reduces.By hot melt adhesive film 1 itself from
Type paper 2 realizes from monomer manual shim in conjunction with the mode of platform hot pressing and puts the one to support pad array 5 and frame 6
The transformation of hot pressing avoids and manually puts gasket, improves gasket and puts efficiency and precision.The mechanization gasket disposing way is outstanding
It is suitable for hot melt adhesive film gaskets a large amount of in large area detector to put situation.Meanwhile the support knot prepared by the above method
Structure under conditions of not increasing bearing area ratio (< 1%), reduces gasket quantity using the branch tie distance for being not less than 10mm,
The probability of support pad defect is reduced, while biggish branch tie distance is conducive to the cleaning cleaning of detector sensitive volume.
The embodiment of the present invention proposes that a kind of support construction of micro-structure gas detector, the support construction are hot melt adhesive film 1
5 array of support pad of composition.As shown in figure 8, each support pad 5 includes:
First glue-line 101, substrate layer 102 and the second glue-line 103, substrate layer 102 are formed in the first glue-line 101 and the second glue
Between layer 103, the first glue-line 101 is infiltrated into the mesh of stainless steel cloth 7 of micro-structure gas detector, the second glue-line 103
It infiltrates to the reading anode plate 3 of micro-structure gas detector.
Wherein, the diameter of each support pad 5 is no more than 1mm.The thickness of first glue-line 101 and the second glue-line 103 can phase
Together, can also be different, depending on actual demand, the first glue-line 101 discharges more than preset temperature value with the second glue-line 103
Stickiness, infiltration infiltrate into the mesh of stainless steel cloth 7 to reading on anode plate 3.It reads anode plate 3 and stainless steel cloth 7 is real
Connecing spacing is hundred micron orders.
This kind of support construction effectively avoids so that detector stainless steel cloth 7 and reading anode plate 3 realize tangible connection
The discharge scenario because detector caused by virtual connection is struck sparks, increases detector stability.This kind of support construction is not only applicable to
It, can also in the production of microgrid gas detector (Micro-mesh gaseous structure, Micromegas) detector
To be applied to other micro-structure detectors as the support construction of enlarged structure, such as gas electron multiplier (Gas Electron
Multiplier, GEM), thick gas electron multiplier (Gas Electron Multiplier, THGEM) etc..
In conclusion the embodiment of the present invention proposes a kind of support construction and preparation method thereof of micro-structure gas detector,
Support construction using hot melt adhesive film as micro-structure gas detector, so that detector stainless steel cloth and support pad are realized
Tangible connection effectively avoids because the sparking discharge scenario of detector caused by virtual connection, increases detector stability.Laser is cut
Array and frame that mode is applied to production hot melt adhesive film gasket are cut, machining accuracy is improved, reduces gasket quantity, reduces support
The probability of gasket defect, it can be achieved that smaller spacing, smaller diameter gasket array processing, and process velocity is fast, high-efficient.Make
Pre- hot pressing is carried out to hot melt adhesive film gasket array and frame with the mode of plate hot pressing, avoids and manually puts gasket, improve
Gasket puts efficiency and precision.This method is particularly suitable for the batch making of large area detector.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
It describes in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (10)
1. a kind of preparation method of micro-structure gas detector support construction characterized by comprising
S1, is arranged parameters of laser cutting, and the parameter includes cutting spacing, cut lengths and cutting pattern；
S2 is cut by laser the hot melt adhesive film (1) being attached on release paper (2) according to the parameter, is cut to and cuts completely
It the saturating hot melt adhesive film (1) but does not switch to the release paper (2), forms support pad (5) array for having frame (6)；
S3 visits the hot melt adhesive film (1) of described support pad (5) array with frame (6) with the micro-structure gas on one side
The reading anode plate (3) for surveying device is close to, and applies pressure hot pressing from release paper one side using plate hot pressing, forms the support knot
Structure；
The stainless steel cloth (7) of the micro-structure gas detector is placed in the support construction simultaneously hot pressing, so that described by S4
It reads anode plate (3) and is connect in fact with the stainless steel cloth (7).
2. the preparation method of micro-structure gas detector support construction according to claim 1, which is characterized in that in step
In S2, the cutting spacing is no more than 1cm*1cm.
3. the preparation method of micro-structure gas detector support construction according to claim 1, which is characterized in that in step
In S2, the cut lengths are that diameter is no more than 1mm.
4. the preparation method of micro-structure gas detector support construction according to claim 1, which is characterized in that in step
Before S1 further include:
S0 flattens the hot melt adhesive film (1) being attached on release paper (2).
5. the preparation method of micro-structure gas detector support construction according to claim 1, which is characterized in that the reading
It is hundred micron orders that anode plate (3) and the stainless steel cloth (7) connect spacing in fact out.
6. the preparation method of micro-structure gas detector support construction according to claim 1, which is characterized in that in step
In S3, the hot melt adhesive film of support pad (5) array using adhesive tape along the release paper (2) edge by described in frame (6)
(1) fixed with the reading anode plate (3) of the micro-structure gas detector on one side.
7. a kind of support construction of micro-structure gas detector, which is characterized in that the support construction is hot melt adhesive film (1) composition
Support pad (5) array, each support pad (5) includes:
First glue-line (101), substrate layer (102) and the second glue-line (103)；
The substrate layer (102) is formed between first glue-line (101) and second glue-line (103), first glue
Layer (101) infiltrates into the mesh of stainless steel cloth (7) of the micro-structure gas detector, the second glue-line (103) leaching
Moisten to the reading anode plate (3) of the micro-structure gas detector.
8. the support construction of micro-structure gas detector according to claim 7, which is characterized in that each support pad
(5) diameter is no more than 1mm.
9. the support construction of micro-structure gas detector according to claim 7, which is characterized in that the reading anode plate
(3) connecing spacing in fact with the stainless steel cloth (7) is hundred micron orders.
10. the support construction of micro-structure gas detector according to claim 7, which is characterized in that first glue-line
(101) stickiness is discharged more than preset temperature value with second glue-line (103).
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| CN201910436979.XA CN110208460B (en) | 2019-05-23 | 2019-05-23 | Supporting structure of microstructure gas detector and preparation method thereof |
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| CN201910436979.XA CN110208460B (en) | 2019-05-23 | 2019-05-23 | Supporting structure of microstructure gas detector and preparation method thereof |
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| CN113433580A (en) * | 2021-06-25 | 2021-09-24 | 中国科学技术大学 | Gas detector manufacturing method, gas detector and ray detection device |
| CN115950920A (en) * | 2023-03-16 | 2023-04-11 | 中国科学技术大学 | Micro-structure gas detector based on micro-fluidic technology and preparation method thereof |
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| CN110208460B (en) | 2021-08-13 |
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