CN110199373A - Powerful x-ray sources and operating method - Google Patents
Powerful x-ray sources and operating method Download PDFInfo
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- CN110199373A CN110199373A CN201880006823.1A CN201880006823A CN110199373A CN 110199373 A CN110199373 A CN 110199373A CN 201880006823 A CN201880006823 A CN 201880006823A CN 110199373 A CN110199373 A CN 110199373A
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- target
- target assembly
- copper body
- power radiation
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/105—Cooling of rotating anodes, e.g. heat emitting layers or structures
- H01J35/106—Active cooling, e.g. fluid flow, heat pipes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/08—Anodes; Anti cathodes
- H01J35/10—Rotary anodes; Arrangements for rotating anodes; Cooling rotary anodes
- H01J35/101—Arrangements for rotating anodes, e.g. supporting means, means for greasing, means for sealing the axle or means for shielding or protecting the driving
- H01J35/1017—Bearings for rotating anodes
- H01J35/1024—Rolling bearings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/10—Drive means for anode (target) substrate
- H01J2235/1026—Means (motors) for driving the target (anode)
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/10—Drive means for anode (target) substrate
- H01J2235/1046—Bearings and bearing contact surfaces
- H01J2235/1053—Retainers or races
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1262—Circulating fluids
- H01J2235/127—Control of flow
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2235/00—X-ray tubes
- H01J2235/12—Cooling
- H01J2235/1225—Cooling characterised by method
- H01J2235/1262—Circulating fluids
- H01J2235/1275—Circulating fluids characterised by the fluid
- H01J2235/1279—Liquid metals
Abstract
Subject description discloses a kind of high power CW Formula X radiographic sources with rotation target assembly, rotation target assembly is cooled down by the circulation of the fluent material contacted with target assembly, wherein, target assembly is with the mechanism by the front surface of electronic impact and for rotating target assembly.Coolant liquid is contacted at least one surface of target always, to disperse the heat generated by the energy of electron stream deposition, reduces the temperature of target thus to allow to operate continuously.
Description
Cross reference
The application depends on entitled " powerful x-ray sources and its operating method (High submitted on January 31st, 2017
Power X-Ray Source and Method of Operating the Same) " U.S. Provisional Patent Application No. 62/
452,756 priority.
Technical field
Subject specification relates generally to x-ray systems, and in particular it relates to high-power, the sigmatron of continuous operation
Source, x-ray source include the cooled rotary target of the circulation of the fluid by being connected to target assembly.
Background technique
Great-power electronic source (up to 500kW) is commonly used in x-ray bombardment application, including food irradiation and sterilizing.It is logical
Often, pencil electronic beam is rasterized comprising the scanning area from one side to another side, meanwhile, transportation system transfer object, to cover
Cover illuminated object.Electronics is crossed the thin window of source vacuum and air separation.Because its is relatively thin, window is readily able to cold
But, it to prevent from rupturing, and is rasterized because of electron beam, over a substantial area diffusing electrons energy.It compares as a result,
In the heat being gathered in small point, it is more easily cooled.
In typical sciagraphy, the fixed target of electronic impact in beam is to generate X-ray.Target is usually cold
The circulating water of jelly is to remove by the tungsten-rhenium of the copper brazing filler metal of the heat of electronic deposition.Sigmatron checks that system generallys use
The up to source of 1kW may include the use of such target.However, there are emerging inspection applications, wherein need by
Power increases to approximate 20kW, to allow bigger penetration power and realize new technology.However, in these higher power
Under, the heat from target cannot be removed fast enough to target liquefaction point, to destroy target.
Medical X-ray pipe used in computed tomography (CT) application requires very high function because of submillimeter focal spot
Rate (up to 100kW).Fig. 1 shows typical rotating anode X-ray tube 100 used in medical application.Glass shell 102 will wrap
The cathode 104 for including filament 106 is enclosed in focusing cup, and anode/target 108 is via anode stem 114 and tungsten/rhenium anode disc 110
Coupling.The anode/target 108 in the pipe melts in order to prevent, makes target 108 by using the motor for including rotor 109 and stator 111
With very high speed (about 8000rpm) rotation, so that the heat in target 108 disperses over a larger area.Because passing through height
It is unrealistic that vacuum sealing transmits rotary shaft, thus by the rotating part of pipe be located in including the X-ray that has generated by its from
In the glass evacuated shell 102 of the port 116 of open pipe 100.Temperature management is realized by the heat storage capacity of target 108.Because passing through biography
Lead that the heat of removing is insignificant and heat storage capacity is limited, so need to close pipe 100 before being again turned on sometimes, by
This reduces occupation efficiency.However, being different from medical application, some safety check systems need continuous operation.Therefore, it is necessary to one
Kind can operate continuously and not generate the powerful x-ray sources of problems of excessive heat.
Another kind method used in high-power target is based on liquid metal target.Fig. 2 shows typical cases used in x-ray source
Liquid metal target assembly.Pass through at least part of 204 cooled target 202 of liquid metal of circulation.It will using heat exchanger 206
Liquid metal 204 is cooled down and is recycled using 208 pairs of liquid metals 204 of pump.Liquid metal 204 is used as X-ray
Both target and coolant liquid are generated, is to remove by the flowing stream of liquid metal 204 because electron beam 210 hits target surface 202
And the heat generated.The advantages of this method is, since liquid metal can be cooled down fast enough, allows continuous behaviour
Make.
Possible liquid metal includes liquid gallium, viscous with high thermal conductivity, high specific heat per unit volume and low power
Degree.However, gallium has low atomicity (Z) 32, this causes X-ray transfer efficiency lower and a piece of wood serving as a brake to halt a carriage compared with tungsten (Z=74)
Cause radiation fan angle narrower.Mercury is liquid metal at room temperature with high Z (80), however, not had to usually due to its harmfulness
In this application.Suitable metal alloy is made of the Sn of 62.5% Ga, 21.5% In and 16%.However, with tungsten phase
Compare, the atomicity of above-mentioned alloy is also comparable low.Another suitable alloy can be made of the element with higher Z, all
Such as, the Hg of 43% Bi, 21.7% Pb, 18.3% In, 8% Sn, 5% Cd and 4%.However, mercury, cadmium, with
And lead is entirely to endanger material.The further drawback of liquid metal target is that it needs thin window to separate vacuum with liquid target.The window
It ruptures higher with the probability of pollution vacuum.
Therefore, it is necessary to it is a kind of can by safety and it is effective in a manner of carry out cooling high power x-ray and generate target.Into one
Step ground, the X-ray tube with the target can operate in a continuous mode.
Summary of the invention
In conjunction be intended to the unrestricted system of exemplary and illustrative and range, tool and method description and
Following embodiments and its various aspects are shown.This application discloses multiple embodiments.
In some embodiments, subject description discloses a kind of high-power radiation to generate target assembly, comprising: target group
Part, the target of the periphery positioning with copper body and along copper body, wherein the target is hit by particle flux to generate radiation；Multiple leaves
Piece is located on the copper body；Water flow pushes the blade, so that copper body rotation and cooling；And at least one coupling
Part provides vacuum sealing when rotated.
Optionally, the particle flux includes the electronics for hitting rotary target sub-component to generate X-ray.Optionally, electronics
Energy is 6MV or higher.
Optionally, target is the ring made of tungsten.
Optionally, target assembly further includes for guiding liquid flow in a predetermined direction and for pushing the one of multiple blades
A or multiple stream guiding devices.
Optionally, the liquid is water.Optionally, at least one coupling is for providing vacuum-packed magnetic fluid coupling
Fitting.
In some embodiments, subject description discloses a kind of high-power radiation to generate target assembly, comprising: target group
Part, the target of the periphery with copper body and along copper body, wherein the target is hit by particle flux to generate radiation；Liquid flow is used for
The cooling copper body；Direct current generator driving is configured as rotating copper body；And coupling, it is close that vacuum is provided when rotated
Envelope.
Optionally, the particle flux is the electron beam for hitting rolling target to generate X-ray.Optionally, the energy of electronics
For 6MV or higher.
Optionally, target is the ring made of tungsten.
Optionally, direct current generator driving includes brushless torque motor.
Optionally, the liquid is water.
Optionally, coupling is used to water-stop and provides the magnetic fluid coupling of vacuum.
In some embodiments, subject description discloses a kind of high-power radiation to generate target assembly, comprising: target group
Part, the target of the periphery with copper body and along target body, wherein the target is hit by particle flux to generate radiation；Liquid flow is used for
The cooling copper body；Chain driving motor is configured as rotating copper body；And coupling, vacuum sealing is provided.
Optionally, the particle flux is the electron beam for hitting rotary target and generating X-ray.Optionally, the energy of electronics is
6MV or higher.
Optionally, target is the ring made of tungsten.
Optionally, chain driving motor combines an operation in following: chain, timing belt, continuous cable and direct current are just
Gear coupling.
Optionally, the liquid is water.
Optionally, coupling is used to water-stop and provides the magnetic fluid coupling of vacuum.
In some embodiments, subject description discloses a kind of methods that continuous operation radiation generates target assembly, comprising:
Rotate target, wherein the target is formed in the outer of copper body and places, and wherein, and the mechanism for generating rotation is used to make institute
State target rotation；Particle flux is set to hit rotary target to generate radiation；And make coolant liquid in target surrounding loop so that liquid always with
At least one surface of target contacts, and to disperse the heat generated by the particle flux hit, thus cooled target to be to allow to operate continuously,
Wherein, target assembly includes providing vacuum-packed coupling.
Optionally, the mechanism for rotating target includes the multiple blades for being attached to the copper body, wherein the blade
By the jet impellor of the coolant liquid, thus rotate target.
Optionally, the mechanism for rotating target includes being attached to the direct current generator driving of the target assembly, the electricity
Machine includes brushless torque motor.
Optionally, the mechanism for rotating target includes the chain driving motor for being attached to the target assembly.Optionally, chain
Driving motor combines an operation in following: chain, timing belt, continuous cable and direct current spur gear coupling.
Optionally, the particle flux is the electron beam for hitting rotary target to generate X-ray.Optionally, the energy of electronics is
6MV or higher.
Optionally, target is the ring made of tungsten.
Optionally, the coolant liquid is water.
Optionally, coupling is used to water-stop and provides the magnetic fluid coupling of vacuum.
In some embodiments, present specification describes a kind of high power radiation sources including rotating target assembly, target group
Part is cooled by the circulation of the liquid with component touch, and component includes: target, wherein the target is hit by particle to generate spoke
It penetrates；Multiple blades are attached to the target assembly, wherein the blade is by the jet impellor of liquid, so that target rotates；With
And at least one coupling, water is provided for vacuum sealing.Optionally, target assembly further includes for guiding liquid in a predetermined direction
The jet flow of material and the one or more stream guiding devices for being used to push multiple blades.
In some embodiments, subject description discloses a kind of high power radiation sources including rotating target assembly, target group
Part is cooled by the circulation of the liquid with component touch, and component includes: target, wherein the target is hit by particle to generate spoke
It penetrates；Direct current generator driving, is attached to the target assembly, so that target assembly rotates；And coupling, it is close to provide water to vacuum
Envelope.Optionally, direct current generator driving includes brushless torque motor.
In some embodiments, subject description discloses a kind of high power radiation sources including rotating target assembly, target group
Part is cooled by the circulation of the liquid with component touch, and component includes: target, wherein the target is hit by particle to generate spoke
It penetrates；Chain driving motor is attached to the target assembly, so that target assembly rotates；And coupling, provide water to vacuum sealing.
Optionally, chain driving motor combines an operation in following: chain, timing belt and continuous cable.
In some embodiments, subject description discloses a kind of sides using rotation target assembly operation continuous radiation source
Method, comprising: rotate target, wherein use the mechanism for generating rotation that the target is rotated；Particle flux is guided to rotation
To generate radiation on target；So that the liquid circulation contacted with target assembly and cooled target；And coupling, it is close to provide water to vacuum
Envelope.Optionally, the mechanism for rotating target includes the multiple blades for being attached to the target assembly, wherein the blade quilt
The jet impellor of liquid, so that target rotates.Optionally, the mechanism for rotating target includes be attached to the target assembly straight
Motor driven is flowed, so that target rotates, direct current generator driving includes brushless torque motor.Optionally, the mechanism for rotating target
Chain driving motor including being attached to the target assembly, so that target rotates.Optionally, chain driving motor combines one in following
A operation: chain, timing belt and transmission belt.Optionally, particle is the electronics for hitting the target to generate X-ray.Optionally,
Target is made of tungsten.
In some embodiments, subject description discloses a kind of high power radiation sources including rotating target assembly, target group
Part is cooled by the circulation of the liquid with component touch, and component includes: target, wherein the target is hit by particle to generate spoke
It penetrates；And multiple blades, it is attached to the target assembly, wherein the blade is by the jet impellor of liquid, so that target rotates.
Optionally, high power radiation sources further include providing water to vacuum-packed coupling.Optionally, coupling is to be used for
Provide water to vacuum-packed power magnetic fluid coupling.Optionally, high power radiation sources further include providing sealing, so that water
At least one coupling separated between vacuum, between water and air or between vacuum and air.
The above-mentioned and other reality of this specification is described deeper into ground in the attached drawing and specific embodiment being presented below
Apply mode.
Detailed description of the invention
When considered in conjunction with the accompanying drawings, it due to being become more fully understood from by reference to following detailed description, will recognize that
To these and other features and advantages of this specification, in which:
Fig. 1 shows routine rotating anode X-ray tube 100 used in medical application；
Fig. 2 shows liquid-metal target assemblies used in powerful x-ray sources；
Fig. 3 A be according to the embodiment of this specification include that target group is generated by the X-ray of the target component of jet
The side cross-sectional view of part；
Fig. 3 B is the normal cross-section of a part of the x-ray target sub-component in Fig. 3 A according to the embodiment of this specification
Figure；
It includes the target component rotated via direct-drive motor that Fig. 4 A, which is shown according to the embodiment of this specification,
X-ray generate target assembly side cross-sectional view；
Fig. 4 B is the normal cross-section of a part of the x-ray target sub-component in Fig. 4 A according to the embodiment of this specification
Figure；
Fig. 5 A show according to the embodiment of this specification include via the rotation of chain motor driven target component X
The side cross-sectional view of ray generation target assembly；
Fig. 5 B is the normal cross-section of a part of the x-ray target sub-component in Fig. 5 A according to the embodiment of this specification
Figure；And
Fig. 6 is the process for showing the step of generating target assembly according to the operation rotary radiation of the embodiment of this specification
Figure.
Specific embodiment
Present specification describes several embodiments that high-power, rotational x-ray generates target.In each embodiment,
Target is cooled by being made by the ring of the tungsten of brazing filler metal to copper body, rotate at high speed and using the flow at high speed of chilled water.?
In embodiment, the range of the speed of water flow is between 100RPM and 5000RPM.In embodiments, the speed of water flow is based on
Target material thickness, target material type, beam current and cooling temperature change.In embodiments, for the water of cooled target
Jet flow is also used for rotating target.Further, in embodiments, using O-ring or washer via physical interface by target group
Part is connected to electron accelerator.The coolant liquid of such as water or water and ethylene glycol mixture connects at least one surface of target always
Touching, dispersing the heat of the energy production by electron stream deposition, thus reducing the temperature of target and allowing to operate continuously.
It generates the term " high-power " of target assembly for radiating and refers to that target assembly is configured as generating at least 2kW and up to
The X-ray radiation of 100kW.Embodiment in this specification can be used in the power of 2kW to 20kW or energy range operating
Target assembly.The design of target assembly depends on the optimization of the correspondingly-sized of required power and required power and target assembly.It should recognize
Know, by making X-ray generate the power capacity for the target assembly that target assembly can increase more greatly in this specification.
This specification is towards multiple embodiments.It is mentioned in order to make those of ordinary skill in the art realize the present invention
For following disclosure.Language used in this specification be not necessarily to be construed as denying comprehensively any one specific embodiment or
For will claim limitation terminology used in this article meaning except.In the feelings without departing substantially from the spirit and scope of the invention
Under condition, the General Principle being defined herein can be applied to other embodiments and application.In addition, used term and word
For describing the purpose of illustrative embodiments and being not construed as limiting.As a result, the present invention with cover and disclosed original
The widest range of reason and the consistent a variety of substitutions of feature, transformation and equivalent is consistent.For clear purpose, not in detail
Description with and the related technical field of the present invention in the related details of known technologic material, with do not make it is of the invention unnecessarily
It is fuzzy.In the description and claims of this application, each word " including (comprise) ", " including (include) ", with
" having " and its form are not necessarily necessarily limited to the element in list associated with word.
Herein, it should be noted that can be used and realize related to specific embodiment in any other embodiments
Join the arbitrary characteristics or component of description, unless otherwise expressly indicated.
It includes containing the target by jet and the target of cooling that Fig. 3 A, which is shown according to the embodiment of this specification,
The X-ray of component 302 generates the side cross-sectional view of target assembly 300.Fig. 3 B shows the target of the embodiment according to this specification
Decomposition of a part of sub-component 302 along the line 340 in Fig. 3 A, normal cross-section figure.With reference to Fig. 3 A and Fig. 3 B, target component
302 include the copper body 330 of scoring ring 303 of the support by brazing filler metal into copper body 330.In embodiments, scoring ring 303 includes tungsten ring.
However, in alternate embodiments, using copper body 330 when not needing neutron product for the energy of approximation 7.5MeV above
As target.In some embodiments, copper body 330 is disk shape and optionally includes center wheel portion outstanding.Implementing
In mode, scoring ring 303 can be positioned around the center wheel portion of copper body 330.Scoring ring 303 along copper body 330 edge or periphery
Positioning, wherein the direct phase of electron source or electron accelerator of target component 302 or part thereof and such as linear accelerator
It is right.Copper body 330 is contained in hollow stainless steel cylinder 355.In embodiments, the top 330a of copper body 330 and bottom
330b is by brazing filler metal to the inner surface of hollow cylinder 355.Target shell 320 accommodates target component 302.In embodiments, target shell
It is made of the thin material for not making X-ray obviously decay.
Target is realized by the first bearing 310 (in vacuum) and second bearing 312 that are arranged between cylinder 355 and shell 320
Sub-component 302 and cylinder 355 surround the rotation of center longitudinal axis 380.In some embodiments, first bearing 310 and the second axis
Holding 312 is the radial open bearing with the stainless steel for the multiple rounds being clamped between fixed part and rotating part.
The fixed part of bearing 310,312 is attached to the inner surface of shell 320, and the rotating part of bearing 310,312 is coupled to simultaneously
And it is resisted against on the outer surface of cylinder 355.Power magnetic fluid coupling or sealing element 306 are (in embodiments, including first
Divide 306a and second part 306b) it is also positioned between cylinder 355 and shell 320.In some embodiments, two can be used
A magnetic fluid coupling.In some embodiments, only with a magnetic fluid coupling.Be located in shell 320 distal end or
The fixation O-ring 308 of periphery is used as target component 302 and vacuum/sky between the electronics source interface 316 of the adjoining of shell 320
Seal.Holder or screw-type nut bearing 314 are coupled to the inner surface of shell 320, and holder 315 is coupled to cylinder
355 outer surface.As shown in Figure 3A, second bearing 312 be positioned through copper body 330 positioning vertical plane 341 proximal end, first
Bearing 310 is positioned through the distal end of the vertical plane 341 of copper body 330.In embodiments, magnetic fluid coupling 306 is located in
Between first bearing 310 and second bearing 312.First bearing 310 is arranged in screw-type nut bearing 314 and holder 315
It is distally and adjacent with first bearing 310.Screw-type nut bearing 314 and holder 315 allow a bearing by movably attached
It connects, so that it can be adjusted in the case where misalignment.In alternate embodiments, single bearing can be used.Reason
Ground is thought, if being able to bear the power of torque using single bearing.It in embodiments, can be with if using single bearing
It is placed at the position of the proximal end of the vertical plane 341 of copper body 330.It will be appreciated by those of ordinary skill in the art that bearing 310,
312, it 314 is merely exemplary and in alternate embodiments can be different from the current arrangement of magnetic fluid coupling 306.
Referring still to Fig. 3 A and Fig. 3 B, target component 302 further includes the multiple blades 322 for being configured to radial elongated piece.?
In embodiment, blade dimensions depend on the overall dimensions of target.In embodiments, multiple blades 322 are coupled to copper body 330.
In embodiments, blade 322 is coupled to copper body via any suitable adhering device, such as, but is not limited to machining, glue
It closes or welds.In embodiments, the continuous blade of any two is separated from each other certain distance, wherein distance range be from
First value is to second value.In embodiments, it should be noted that the distance between blade 322 depends on the entirety of target and target component
Size.In some embodiments, multiple blades 322 are configured to the plane positioning relative to copper body 330 after copper body 330
The first concentric ring 322a and the second concentric ring 322b in face.Those of ordinary skill in the art are it should be understood that X-ray generates target
Component 300 is located between the electronics source interface 316 and collimator 350 of X-ray source component (its entirety is not shown).It answers herein
Note that in the embodiment of this specification electron accelerator (a part that can be X-ray source component) can be used.?
In embodiment, electron accelerator can be the pipe for operating the energy for being less than 600kV.In embodiments, electronics accelerates
Device can be for operating the energy for being greater than lMeV and the linear accelerator for generating high energy electron.
According to the one side of this specification, pass through the flowing cooled target sub-component 302 of recirculated water 304.In operation, fixed
Periphery of the electron beam 318 towards copper body 330, so that hitting scoring ring 303.In some embodiments, the electricity in electron beam 318
The energy of son is 6MV or the higher order of magnitude.When electron beam 318 hits scoring ring 303 (via water flow rotary), X-ray is generated
And it is spread by the energy of electronic deposition around rotation scoring ring 303.The cold water in shell 320 is flowed into via pipeline or opening 324
Concentric ring 322a and 322b including blade 322 are hit, thus rotates copper body 330 and at the same time cooled target sub-component 302.Cold
But after target component 302, hot water is via pipeline or 326 outflow shell 320 of opening to freezer unit with cooling water.Flow guiding device
328 are configured to guide water flow in the desired direction.In embodiments, target component 302 is under the pressure of approximate 100psi
By jet.
It includes the target component rotated via direct-drive motor that Fig. 4 A, which is shown according to the embodiment of this specification,
402 X-ray generates the side cross-sectional view of target assembly 400.Fig. 4 B, which is shown, passes through stream according to the embodiment of this specification
A part of the cooling target component 402 of water is moved along the normal cross-section figure of the line 440 in Fig. 4 A.With reference to Fig. 4 A and Fig. 4 B, target
Sub-component 402 includes the copper body 430 of scoring ring 403 of the support by brazing filler metal into copper body 430.In embodiments, scoring ring 403 includes
Tungsten ring.However, in alternate embodiments, using copper when not needing neutron product for the energy of approximate 7.5MeV or more
Body 430 is used as target.In some embodiments, copper body 430 is disk shape and optionally includes center wheel portion outstanding.?
In embodiment, scoring ring 403 can be positioned around the center wheel portion of copper body 430.In embodiments, tungsten ring 403 is along copper
The edge of body 430 or periphery positioning, wherein target component 402 or part thereof and the electron source of such as linear accelerator are straight
It connects opposite.Copper body 430 is contained in hollow stainless steel cylinder 455.In embodiments, the top 430a of copper body 430 and bottom
Portion 430b is by brazing filler metal to the inner surface of hollow cylinder 455.Target shell 460 accommodates target component 402.In embodiments, outside target
Shell is made of the thin material for not making X-ray obviously decay.
At least one and preferably the first magnetic fluid seal 406a and the second magnetic fluid seal 406b are also positioned on
Between cylinder 455 and target shell 460, to provide vacuum to the sealing of motor/air and motor/air to water-stop.At least one
A fixed O-ring 408 is used as target component 402 and vacuum/air between the electronics source interface 420 of the adjoining of target shell 460
Sealing element.Optionally, using two fixed O-ring packings 408 and as between target component 402 and target shell 460
Vacuum/air seals.
Target is realized by the first bearing 410 and second bearing 412 that are located between hollow cylinder 455 and target shell 460
Component 402 and cylinder 455 surround the rotation of center longitudinal axis 480.In some embodiments, first bearing 410 and second bearing
412 be the radial open bearing of the stainless steel with the multiple rounds being clamped between fixed part and rotating part.The
The proximal end of the vertical plane 441 of copper body 430 is arranged in two bearings 412, and the vertical plane 441 of copper body 430 is arranged in first bearing 410
Distally.In embodiments, first bearing 410 is located on the distal side of the first magnetic fluid seal 406a and second bearing
412 are located on the proximal lateral of the second magnetic fluid seal 406b, wherein limit relative to by the vertical plane 441 of copper body 430
The distal side and proximal lateral, and proximal location is closer to vertical plane 441, and remote location is further from vertical plane 441.As a result,
In the embodiment just described, first bearing 410 and the first magnetic fluid seal 406a of second bearing 412 " clamping " and
Two magnetic fluid seal 406b, to provide vacuum sealing when rotated.In alternate embodiments, first bearing 410 can determine
Position is in the air on the proximal lateral of the first magnetic fluid seal 406a, and second bearing 412 can be positioned at the second magnetic fluid
In air on the distal side of sealing element 406b, therefore, first bearing 410 and second bearing 412 are by " clamping " in the first magnetic current
In air between body sealing element 406a and the second magnetic fluid seal 406b.In alternate embodiments, it can use single
Bearing.It is desirable that if being able to bear the power of torque using single bearing.In the embodiment using single bearing,
The first bearing 410 in air that can be located on the proximal lateral of the first magnetic fluid seal 406a is located in the second magnetic
Second bearing 412 in air on the distal side of fluid seal 406b.
The fixed part of bearing 410 is attached to structural member 490, and the fixed part of bearing 412 is attached to target shell
460 inner surface.The rotating part of bearing 410,412 is coupled to and is resisted against on the outer surface of cylinder 455.External bearings are protected
Gripping member 414 is located in the outer of shell 460 in far-end and places, and internal bearings holder 416 is coupled to the appearance of cylinder 455
Face.Internal bearings holder 416 is located in the distal end of bearing 410, and external bearings holder 414 is located in internal bearings holding
The proximal end of the periphery of the distal end and shell 460 of part 416.Bearing holder 414 and 416 allows a bearing to be movably attached,
So that it can be adjusted in the case where misalignment.It will be appreciated by those of ordinary skill in the art that bearing 410,412
It is merely exemplary with the current arrangement of two magnetic fluid seals 406a, 406b and in alternate embodiments may not be used
Together.
Direct current generator driving including brushless torque motor 409 is set directly on target component 402 and is attached to
Target component 402, so that sub-component 402 (and therefore copper body 430) and cylinder 455 rotate.In embodiments, target component
402 can be by brazing filler metal to stainless rotor, wherein permanent magnet is bonded to rotor.Those of ordinary skill in the art should
Understand, X-ray generates the electronics source interface 420 and standard that target assembly 400 is located in X-ray source component (its entirety is not shown)
Between straight instrument 450, in embodiments, X-ray source component may include the linear accelerator for generating high energy electron.
According to the one side of this specification, by 404 cooled target sub-component 402 of recirculated water, and subgroup is made by motor 409
Part 402 and therefore copper body 430 rotate.In operation, periphery of the stationary electron beams 418 towards copper body 430 and scoring ring is hit
403.In some embodiments, the energy of the electronics in electron beam 418 is 6MV or the higher order of magnitude.When electron beam 418 is hit
When hitting scoring ring 403 (rotating by motor 409), generates X-ray and surround the tungsten ring 403 of target by the energy of electronic deposition
Diffusion.In embodiments, for example, Union Movement model HTO5000 brushless motor can be used, so that target rotates and makes water
Circulation.In other embodiments, any appropriate brushless torque motor can be used.Further, according to actual disposition, by
In the electric and magnetic fields incuded by motor, motor can change electron beam trace.Referring back to Fig. 4 A and Fig. 4 B, by via
The cold water cooled target sub-component 402 that pipeline or opening 424 flow through shell 460, recycle and keep target component 402 cooling.Hot water
Via pipeline or 426 outflow shell 460 of opening to freezer unit to cool down hot water.Stream guiding device 428 is provided in desired orientation
Upper guidance water flow.In embodiments, target shell or shell 460 are water-cooled come sharp using at least one pipe 490.Optionally,
Using three pipes 490.
It includes the target component 502 that rotation is driven by motor that Fig. 5 A, which is shown according to the embodiment of this specification,
The side cross-sectional view of X-ray generation target assembly 500.Fig. 5 B is shown according to the embodiment of this specification by flowing water cooling
But a part of target component 502 along the line 540 in Fig. 5 A normal cross-section figure.With reference to Fig. 5 A and Fig. 5 B, target component
502 include the copper body 501 of scoring ring 503 of the support by brazing filler metal in copper body 501.In embodiments, scoring ring 503 includes tungsten ring.
However, in alternate embodiments, copper can be used when not needing neutron product for the energy of approximate 7.5MeV or more
Body 501 is used as target.In some embodiments, copper body 501 is disk shape and optionally includes center wheel portion outstanding.?
In embodiment, scoring ring 503 can be positioned around the center wheel portion of copper body 501.In embodiments, tungsten ring 503 is along copper
The edge of body 501 or periphery positioning, wherein target component 502 or part thereof and the electron source of such as linear accelerator are straight
It connects opposite.Copper body 501 is contained in hollow stainless steel cylinder 555.In embodiments, the top 501a of copper body 501 and bottom
Portion 501b is by brazing filler metal to the inner surface of hollow cylinder 455.Target shell 560 accommodates target component 502.In embodiments, outside target
Shell is made of the thin material for not making X-ray obviously decay.
At least one and preferably the first magnetic fluid seal 506a and the second magnetic fluid seal 506b are also positioned on
Between cylinder 555 and target shell 560, to provide vacuum to the sealing of motor/air and motor/air to water-stop.At least one
A fixed O-ring 508 is used as target component 502 and vacuum/air between the electronics source interface 524 of the adjoining of target shell 560
Sealing element.Optionally, using two fixed O-ring packings 508 and as between target component 502 and target shell 560
Vacuum/air seals.
Target component is realized by the first bearing 514 and second bearing 516 that are arranged between cylinder 555 and shell 560
502 and cylinder 555 surround center longitudinal axis 580 rotation.In some embodiments, first bearing 514 and second bearing 516 are
The radial open bearing of stainless steel with the multiple rounds being clamped between fixed part and rotating part.Second bearing
516 are arranged in the proximal end of the vertical plane of copper body 501, and the distal end of the vertical plane of copper body 501 is arranged in first bearing 514.Implementing
In mode, first bearing 514 is located on the distal side of the first magnetic fluid seal 506a and second bearing 516 is located in
On the proximal lateral of two magnetic fluid seal 506b, wherein limit the distal side relative to by the vertical plane 541 of copper body 501
And proximal lateral, and proximal location is closer to vertical plane 541, and remote location is further from vertical plane 541.It is described as a result, just
Embodiment in, first bearing 514 and the first magnetic fluid seal 506a of second bearing 516 " clamping " and the second magnetic fluid are close
Sealing 506b.In alternate embodiments, first bearing 514 can be positioned on the proximal lateral of the first magnetic fluid seal 506a
Air in, and second bearing 516 can be positioned in the air on the distal side of the second magnetic fluid seal 506b, therefore,
First bearing 514 and second bearing 516 are by " clamping " in the first magnetic fluid seal 506a and the second magnetic fluid seal 506b
Between air in.In alternate embodiments, single bearing can be used.It is desirable that if using single bearing, it can
Bear the power of torque.In the embodiment using single bearing, it can be located at the first magnetic fluid seal 506a's
In first bearing 514 in air on proximal lateral or the air being located on the distal side of the second magnetic fluid seal 506b
Second bearing 516.
The fixed part of bearing 514 is attached to structural member 590, and the fixed part of bearing 516 is attached to shell 560
Inner surface.The rotating part of bearing 514,516 is coupled to and is resisted against on the outer surface of cylinder 555.External bearings are kept
Part 518 is located in the proximal end of the periphery of shell 560, and internal bearings holder 520 is coupled to the outer surface of cylinder 555.Bearing
Holder 518 and 520 allows a bearing to be movably attached, so that it can be adjusted in the case where misalignment.
It will be appreciated by those of ordinary skill in the art that the current arrangement of bearing 514,516 and two magnetic fluid seals 506a, 506b
It is merely exemplary and in alternate embodiments can be different.In addition, internal bearings holder 520 is located in bearing 514
Distal end, and external bearings holder 518 be located in internal bearings holder 520 distal end and shell 560 periphery proximal end.
Component 500 further includes DC brush gear motor 509, roller chain driving 510 and chain 512, wherein 509 coupling of motor
It is connected to target component 502, so that sub-component 502 and cylinder 555 rotate.In embodiments, in conjunction with the DC brush having a size of 16
Gear motor is using sprocket wheel than No. 25 size roller chains for 5:1.In each embodiment, revolved based on required target component
Rotary speed and motor size/service speed or operation torque judge sprocket wheel ratio.
Those of ordinary skill in the art are located in X-ray source component (its it should be understood that X-ray generates target assembly 500
Entirety be not shown) electronics source interface 524 and collimator 550 between, X-ray source component optionally include for generate high energy electricity
The linear accelerator of son.
According to the one side of this specification, make by 504 cooled target sub-component 502 of recirculated water, while by motor 509
Sub-component 502 rotates.In operation, periphery of the stationary electron beams 507 towards copper body 501 and tungsten ring 503 is hit.In some realities
It applies in mode, the energy of the electronics in electron beam 507 is 6MV or the higher order of magnitude.(lead to when electron beam 507 hits tungsten ring 503
Cross the rotation of motor 509) when, it generates X-ray and the tungsten ring 503 by the energy of electronic deposition around target is spread.Because of motor
509 are attached to chain 512, and chain 512 transfers to couple via chain driving 510 with target component 502, and the rotation of motor 509 generates chain
512 movement, this transfers to rotate target component 502 and therefore rotates copper body 501.It, can be in each embodiment
Using allowing from the timing belt of target axis remote-control motor, continuous cable, friction-driven, a series of spur gear or direct current spur gear
Coupling and any driving column replace chain 512.Due to motor 509 be located in away from a certain distance from electron beam 507 and because
This motor induced magnetic field and electric field do not interfere electronics, so which overcomes the potential deviations of electron trajectory.
Referring back to Fig. 5 A and Fig. 5 B, by flowing into shell 560, recycling via pipeline 530 and make target component
502 cooling cold water cooled targets.Hot water flows out shell 560 via pipeline 532.Stream guiding device 534 is provided in desired orientation
Upper guidance water flow.In embodiments, target shell or shell 560 are water-cooled come sharp using at least one pipe 590.Optionally,
Using three pipes 590.
It will be appreciated by those of ordinary skill in the art that above embodiment is only the multiple of the target assembly in this specification
The illustration of configuration.In other embodiments, target material may include fine copper or can be by the group of such as, but not limited to tungsten and rhenium
Other suitable materials closed are made.In addition, as described above, bearing can be relocated and be placed in air.Optionally,
It can thus be excluded using the single bearing (such as crossed roller or four spot contact bearings) for being able to bear moment load to second
The demand of bearing.It is possible to further use other liquid cooled targets, such as water and ethylene glycol mixture, that is, be suitable for wherein
Target is exposed to the condition close to shaft ice frozen or freezing temperature.It in embodiments, can also include inhibition for the water of cooled target
Agent.In embodiments, target is hit by the particle beams except the electronics of such as photon or deuteron.In addition, in each embodiment
In, different types of vacuum seal can be used instead of magnetic fluid seal.
Fig. 6 is the process for showing the step of generating target component according to the operation rotary radiation of the embodiment of this specification
Figure.At step 602, the target that radiation generates in target component is rotated.In embodiments, target component includes that support contains quilt
The copper body of the target of scoring ring of the brazing filler metal in copper body.In embodiments, scoring ring is made of tungsten.In embodiments, by quilt
It is attached at one group of blade of copper body and pushes water jet and target is rotated.In another embodiment, by using with target
The motor of component coupling rotates target.In embodiments, motor is the direct current generator driving for including brushless torque motor.?
In another embodiment, motor includes the sprocket wheel of screw-type, and chain, timing belt, friction-driven and continuous cable pass through sprocket wheel
It moves and target is rotated.
At step 604, particle flux generates radiation towards rotary target.In embodiments, particle flux is added by electronics
The stationary electron beams that fast device generates, electron beam generate X-ray when hitting the tungsten loop section of rotary target.
At step 606, coolant liquid is recycled around target, so that liquid is contacted at least one surface of target, to disperse
By the heat of the energy production of particle flux deposition, the temperature of target is reduced thus to allow to operate continuously.In embodiments, it is used for
The water jet for rotating target is also used to cooled target.In each embodiment, such as, but not limited to water or water and second can be used
The liquid of diol mixture carrys out cooled target.
In embodiments, the continuous operation in this specification rotational x-ray generate target assembly can with such as but not
It is limited to the security system disposed in border control, Haikou, commercial buildings, and/or office space/office building position
It is integrated.
Above-described embodiment is only the illustration of many applications of the system in the present invention.Although only describing the present invention herein
In a small number of embodiments, it being understood, however, that, without departing substantially from spirit or scope of the invention, the present invention
Various other specific forms can be covered.Therefore, the present embodiment and embodiment are considered as illustrative and non-limiting, and
The present invention can modify within the scope of the appended claims.
Claims (31)
1. a kind of high-power radiation generates target assembly, comprising:
Target component, the target of the periphery positioning with copper body and along the copper body, wherein the target is hit by particle flux to produce
Raw radiation；
Multiple blades are located on the copper body；
Water flow pushes the blade, so that copper body rotation and cooling；And
At least one coupling, provides vacuum sealing when rotated.
2. high-power radiation according to claim 1 generates target assembly, wherein the particle flux include hit rotary target with
Generate the electronics of X-ray.
3. high-power radiation according to claim 2 generates target assembly, wherein the energy of the electronics is 6MV or higher.
4. high-power radiation according to claim 1 generates target assembly, wherein the target is the ring made of tungsten.
5. high-power radiation according to claim 1 generates target assembly, wherein the target assembly further includes for predetermined
Side boots up liquid flow and one or more stream guiding devices for pushing the multiple blade.
6. high-power radiation according to claim 1 generates target assembly, wherein liquid is water.
7. high-power radiation according to claim 1 generates target assembly, wherein at least one described coupling is for mentioning
For vacuum-packed magnetic fluid coupling.
8. a kind of high-power radiation generates target assembly, comprising:
Target component, the target of the periphery with copper body and along the copper body, wherein the target is hit by particle flux to generate spoke
It penetrates；
Liquid flow, for cooling down the copper body；
Direct current generator driving is configured as rotating the copper body；And
Coupling provides vacuum sealing when rotated.
9. high-power radiation according to claim 8 generates target assembly, wherein the particle flux is to hit rotary target to produce
The electron beam of raw X-ray.
10. high-power radiation according to claim 9 generates target assembly, wherein the energy of electronics is 6MV or higher.
11. high-power radiation according to claim 8 generates target assembly, wherein the target is the ring made of tungsten.
12. high-power radiation according to claim 8 generates target assembly, wherein the direct current generator includes nothing when driving
Brushing force torque motor.
13. high-power radiation according to claim 8 generates target assembly, wherein the liquid is water.
14. high-power radiation according to claim 8 generates target assembly, wherein the coupling is used to water seal and mentions
For the magnetic fluid coupling of vacuum.
15. a kind of high-power radiation generates target assembly, comprising:
Target component, the target of the periphery with copper body and along the copper body, wherein the target is hit by particle flux to generate spoke
It penetrates；
Liquid flow, for cooling down the copper body；
Chain driving motor is configured as rotating the copper body；And
Coupling provides vacuum sealing.
16. high-power radiation according to claim 15 generates target assembly, wherein the particle flux be hit rotary target with
Generate the electron beam of X-ray.
17. high-power radiation according to claim 16 generates target assembly, wherein the energy of electronics is 6MV or higher.
18. high-power radiation according to claim 15 generates target assembly, wherein the target is the ring made of tungsten.
19. high-power radiation according to claim 15 generates target assembly, wherein the chain driving motor combines in following
One operation: chain, timing belt, continuous cable and direct current spur gear coupling.
20. high-power radiation according to claim 15 generates target assembly, wherein the liquid is water.
21. high-power radiation according to claim 15 generates target assembly, wherein the coupling is used to water seal and mentions
For the magnetic fluid coupling of vacuum.
22. a kind of method that continuous operation radiation generates target assembly, comprising:
Rotate target, wherein the target is formed in the outer of copper body and places, and wherein, makes using the mechanism for generating rotation
The target rotation；
Particle flux is set to hit rotary target to generate radiation；And
Recycle coolant liquid around the target, so that liquid is contacted at least one surface of the target always, to disperse by hitting
The heat that the particle flux hit generates, cools down the target thus to allow to operate continuously, wherein the target assembly includes providing vacuum
The coupling of sealing.
23. according to the method for claim 22, wherein for making the mechanism of the target rotation including being attached to institute
State multiple blades of copper body, wherein thus the blade rotates the target by the jet impellor of the coolant liquid.
24. according to the method for claim 22, wherein for making the mechanism of the target rotation including being attached to institute
The direct current generator driving of target assembly is stated, the motor includes brushless torque motor.
25. according to the method for claim 22, wherein for making the mechanism of the target rotation including being attached to institute
State the chain driving motor of target assembly.
26. according to the method for claim 25, wherein the chain driving motor combines an operation in following: chain is determined
When band, continuous cable and direct current spur gear coupling.
27. according to the method for claim 22, wherein the particle flux is the electronics for hitting rotary target to generate X-ray
Beam.
28. according to the method for claim 27, wherein the energy of electronics is 6MV or higher.
29. according to the method for claim 22, wherein the target is the ring made of tungsten.
30. according to the method for claim 22, wherein the coolant liquid is water.
31. according to the method for claim 22, wherein the coupling is used to water-stop and provides the magnetic fluid of vacuum
Coupling.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201762452756P | 2017-01-31 | 2017-01-31 | |
| US62/452,756 | 2017-01-31 | ||
| PCT/US2018/016284 WO2018144630A1 (en) | 2017-01-31 | 2018-01-31 | High-power x-ray sources and methods of operation |
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| CN110199373A true CN110199373A (en) | 2019-09-03 |
| CN110199373B CN110199373B (en) | 2021-09-28 |
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| CN201880006823.1A Active CN110199373B (en) | 2017-01-31 | 2018-01-31 | High power X-ray source and method of operation |
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| US (1) | US10600609B2 (en) |
| CN (1) | CN110199373B (en) |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111243924A (en) * | 2020-01-14 | 2020-06-05 | 中国电子科技集团公司第三十八研究所 | Rotating target mechanism for ray source |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US11289311B2 (en) | 2018-10-23 | 2022-03-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for reducing vacuum loss in an ion implantation system |
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- 2018-01-31 WO PCT/US2018/016284 patent/WO2018144630A1/en active Application Filing
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| US4165472A (en) * | 1978-05-12 | 1979-08-21 | Rockwell International Corporation | Rotating anode x-ray source and cooling technique therefor |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111243924A (en) * | 2020-01-14 | 2020-06-05 | 中国电子科技集团公司第三十八研究所 | Rotating target mechanism for ray source |
| CN111243924B (en) * | 2020-01-14 | 2022-10-25 | 中国电子科技集团公司第三十八研究所 | Rotating target mechanism for ray source |
Also Published As
| Publication number | Publication date |
|---|---|
| US10600609B2 (en) | 2020-03-24 |
| US20190043686A1 (en) | 2019-02-07 |
| CN110199373B (en) | 2021-09-28 |
| WO2018144630A1 (en) | 2018-08-09 |
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