CN110198138A - 一种直流磁控溅射镀膜电源快速可靠助燃电路 - Google Patents
一种直流磁控溅射镀膜电源快速可靠助燃电路 Download PDFInfo
- Publication number
- CN110198138A CN110198138A CN201910441113.8A CN201910441113A CN110198138A CN 110198138 A CN110198138 A CN 110198138A CN 201910441113 A CN201910441113 A CN 201910441113A CN 110198138 A CN110198138 A CN 110198138A
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- China
- Prior art keywords
- circuit
- output end
- voltage
- combustion
- power supply
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/08—Circuits specially adapted for the generation of control voltages for semiconductor devices incorporated in static converters
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/42—Conversion of dc power input into ac power output without possibility of reversal
- H02M7/44—Conversion of dc power input into ac power output without possibility of reversal by static converters
- H02M7/48—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/53—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/537—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters
- H02M7/5387—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration
- H02M7/53871—Conversion of dc power input into ac power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only, e.g. single switched pulse inverters in a bridge configuration with automatic control of output voltage or current
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Dc-Dc Converters (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910441113.8A CN110198138A (zh) | 2019-05-24 | 2019-05-24 | 一种直流磁控溅射镀膜电源快速可靠助燃电路 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910441113.8A CN110198138A (zh) | 2019-05-24 | 2019-05-24 | 一种直流磁控溅射镀膜电源快速可靠助燃电路 |
Publications (1)
Publication Number | Publication Date |
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CN110198138A true CN110198138A (zh) | 2019-09-03 |
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Family Applications (1)
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CN201910441113.8A Pending CN110198138A (zh) | 2019-05-24 | 2019-05-24 | 一种直流磁控溅射镀膜电源快速可靠助燃电路 |
Country Status (1)
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CN (1) | CN110198138A (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114980401A (zh) * | 2022-06-13 | 2022-08-30 | 成都华澜海软件开发有限公司 | 一种重复频率脉冲电源氙灯预燃电源系统 |
JP2023505974A (ja) * | 2019-12-18 | 2023-02-14 | ベイジン・ナウラ・マイクロエレクトロニクス・イクイップメント・カンパニー・リミテッド | 制御回路、パルス電源システム及び半導体処理装置 |
-
2019
- 2019-05-24 CN CN201910441113.8A patent/CN110198138A/zh active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2023505974A (ja) * | 2019-12-18 | 2023-02-14 | ベイジン・ナウラ・マイクロエレクトロニクス・イクイップメント・カンパニー・リミテッド | 制御回路、パルス電源システム及び半導体処理装置 |
JP7382507B2 (ja) | 2019-12-18 | 2023-11-16 | ベイジン・ナウラ・マイクロエレクトロニクス・イクイップメント・カンパニー・リミテッド | 制御回路、パルス電源システム及び半導体処理装置 |
US11955313B2 (en) | 2019-12-18 | 2024-04-09 | Beijing Naura Microelectronics Equipment Co., Ltd. | Control circuit, pulsed power supply system, and semiconductor processing equipment |
CN114980401A (zh) * | 2022-06-13 | 2022-08-30 | 成都华澜海软件开发有限公司 | 一种重复频率脉冲电源氙灯预燃电源系统 |
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Address after: No.5, Huangjing Road, Southwest Airport, Shuangliu, Chengdu, Sichuan 610041 Applicant after: SOUTHWESTERN INSTITUTE OF PHYSICS Applicant after: Zhonghe Tongchuang (Chengdu) Technology Co.,Ltd. Address before: No.5, Huangjing Road, Southwest Airport, Shuangliu, Chengdu, Sichuan 610041 Applicant before: SOUTHWESTERN INSTITUTE OF PHYSICS Applicant before: CHENGDU TONGCHUANG MATERIAL SURFACE TECHNOLOGY CO.,LTD. |
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TA01 | Transfer of patent application right |
Effective date of registration: 20220803 Address after: No. 219, section 4, xihanggang Avenue, Shuangliu Southwest Airport Economic Development Zone, Chengdu, Sichuan 610207 Applicant after: Zhonghe Tongchuang (Chengdu) Technology Co.,Ltd. Address before: No.5, Huangjing Road, Southwest Airport, Shuangliu, Chengdu, Sichuan 610041 Applicant before: SOUTHWESTERN INSTITUTE OF PHYSICS Applicant before: Zhonghe Tongchuang (Chengdu) Technology Co.,Ltd. |
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